Copper foil manufacturing apparatus

Abstract

The present invention relates to a copper foil manufacturing apparatus comprising: an electrolyzer for accommodating an electrolyte; a main liquid supply unit for supplying the electrolyte to the electrolyzer; a drum which rotates about a drum shaft while being at least partially immersed in the electrolyte; a counter electrode disposed inside the electrolyzer and spaced apart from the drum; a drum cover including a cover unit spaced apart from the outer surface of the drum and a frame unit supporting the cover unit; a blower unit coupled to the drum cover; and a peeling roll which is disposed outside the electrolyzer, spaced apart from the drum, and rotates about a peeling roll shaft, wherein the blower unit blows air toward the gap between the drum and the peeling roll.

Description

[0001] [DESCRIPTION]

[0002] [Invention Title]

[0003] Copper Foil Manufacturing Apparatus

[0004] [Technical Field]

[0005] The present invention relates to a copper foil manufacturing apparatus.

[0006] [Background Art]

[0007] Generally, in the electrolytic copper foil manufacturing process, copper is deposited on a drum in an electrolytic bath to form a copper foil, and then the copper foil is separated from the drum using a filling roll. In this process, the bonding force between the copper foil and the drum gradually increases as the process progresses, and as a result, tension and bonding force act in combination during the separation of the copper foil, which can cause the sides of the copper foil to tear.

[0008] The tearing of copper foil reduces production efficiency and significantly affects product quality. To prevent this, technologies have been studied to improve the structure of drums and filling rolls or to alleviate the stress applied to the copper foil during the peeling process. However, conventional technologies had limitations in effectively controlling breakage caused by a sudden increase in bonding force between the drum and the copper foil.

[0009] [Disclosure]

[0010] [Technical Problem]

[0011] The problem that the present invention aims to solve is to provide a copper foil manufacturing device capable of preventing the copper foil from tearing during the copper foil manufacturing process.

[0012] In addition, another problem that the present invention aims to solve is to provide a copper foil manufacturing device that can easily peel off the copper foil by injecting appropriate air between the drum and the copper foil.

[0013] However, the technical problems that the present invention aims to solve are not limited to those described above, and other unmentioned problems will be clearly understood by a person skilled in the art from the description of the invention below.

[0014] [Technical Solution]

[0015] The copper foil manufacturing apparatus of the present invention comprises: an electrolytic cell for receiving an electrolyte; a liquid injection unit for supplying an electrolyte to the electrolytic cell; a drum that rotates around a drum axis while at least a portion of which is impregnated with the electrolyte; a counter electrode disposed spaced apart from the drum within the electrolytic cell; a drum cover including a cover portion spaced apart from the surface of the drum and a frame portion supporting the cover portion; a spraying unit coupled to the drum cover; and a filling roll disposed spaced apart from the drum outside the electrolytic cell and rotating around a filling roll axis; wherein the spraying unit sprays air toward the space between the drum and the filling roll.

[0016] The drum shaft can be positioned parallel to the filling roll shaft.

[0017] The above injection part may be placed at the bottom of the drum cover.

[0018] The above injection part may be positioned on one side of the drum cover close to the filling roll along the circumferential direction of the drum.

[0019] The above injection unit can inject air along the drum axis direction to both sides of the filling roll axis.

[0020] The above injection unit may include a first injection unit disposed on one side of the drum cover along the drum axis direction and a second injection unit disposed on the other side of the drum cover.

[0021] The injection pressure of the injection part may be in the range of 0.01 MPa to 0.2 MPa. The cover part may be formed as a curved surface corresponding to the shape of the drum. The filling roll may be positioned adjacent to the area where the outer surface of the drum flows out of the electrolytic cell, rather than the area where the outer surface of the drum flows into the electrolytic cell when the drum rotates.

[0022] The rotation direction of the above-mentioned filling roll may be opposite to the rotation direction of the above-mentioned drum.

[0023] [Advantageous Effects]

[0024] The copper foil manufacturing apparatus of the present invention comprises: an electrolytic cell for receiving an electrolyte; a liquid injection unit for supplying an electrolyte to the electrolytic cell; a drum that rotates around a drum axis while at least a portion of it is impregnated with the electrolyte; a counter electrode disposed spaced apart from the drum within the electrolytic cell; a drum cover including a cover portion spaced apart from the surface of the drum and a frame portion supporting the cover portion; a spraying unit coupled to the drum cover; and a filling roll disposed spaced apart from the drum outside the electrolytic cell and rotating around a filling roll axis; wherein the spraying unit sprays air toward the space between the drum and the filling roll.

[0025] The drum shaft can be positioned parallel to the filling roll shaft.

[0026] The above injection part may be placed at the bottom of the drum cover.

[0027] The above injection part may be positioned on one side of the drum cover close to the filling roll along the circumferential direction of the drum.

[0028] The above injection unit can inject air along the drum axis direction to both sides of the filling roll axis.

[0029] The injection part may include a first injection part disposed on one side of the drum cover along the drum axis direction and a second injection part disposed on the other side of the drum cover. The injection pressure of the injection part may be in the range of 0.01 MPa to 0.2 MPa. The cover part may be formed as a curved surface to correspond to the shape of the drum. The filling roll may be disposed adjacent to the area where the outer surface of the drum flows out of the electrolytic cell, rather than the area where the outer surface of the drum flows into the electrolytic cell when the drum rotates.

[0030] The rotation direction of the above-mentioned filling roll may be opposite to the rotation direction of the above-mentioned drum.

[0031] [Description of Drawings]

[0032] FIG. 1 illustrates a copper foil manufacturing apparatus according to an embodiment of the present invention. FIG. 2 and FIG. 3 illustrate a drum according to an embodiment of the present invention. FIG. 4 illustrates region A of FIG. 1.

[0033] [Mode for Invention]

[0034] Hereinafter, the present invention will be described in detail with reference to the attached drawings. However, this is merely illustrative and the present invention is not limited to the specific embodiments described illustratively.

[0035] Specific terms used in this specification are for convenience of explanation only and are not intended to limit the exemplified embodiments.

[0036] For example, expressions such as “identical” and “identical” indicate not only a strictly identical state, but also a state in which there is a tolerance or a difference in the degree to which the same function is obtained.

[0037] The use of terms such as 'first, second, third,' etc., attached to the components mentioned below is intended solely to avoid confusion regarding the components being referred to, and is unrelated to the order, importance, or master-subordinate relationship among the components. For example, an invention including only the second component without the first component can also be implemented.

[0038] The terms used in this specification are for the description of specific embodiments and are not intended to limit the scope of the claims. As used in the description of embodiments and in the appended claims, the singular form is intended to include the plural form unless the context clearly indicates otherwise.

[0039] In this specification, when any layer is described as being located "on" or "between" another arbitrary layer, this includes not only cases where any layer is in contact with another arbitrary layer, but also cases where another layer or material exists between the two layers.

[0040] Where in this specification a quantity, concentration, or other value or parameter is given as an enumeration of a range, a preferred range, a preferred upper limit, and a preferred lower limit, it should be understood that any pair of any upper range limit or preferred value and any lower range limit or preferred value, regardless of whether the range is disclosed separately, specifically discloses any range that may be formed. Where a range of numerical values ​​is mentioned in this specification, unless otherwise stated, for example, without limiting terms such as greater than, less than, the range is intended to include the endpoint value and all integers and fractions within that range. The scope of the invention is not intended to be limited to the specific value mentioned when defining the range.

[0041] Among the physical properties mentioned in this specification, if a specific temperature affects the property, that is, the property is measured at room temperature unless specifically otherwise specified. The term "room temperature" refers to a natural temperature that has not been heated or cooled, and may mean, for example, any temperature within the range of about 10 °C to 30 °C, about 23 °C, or about 25 °C. Furthermore, unless specifically otherwise specified, the unit of temperature in this specification is °C.

[0042] In addition, among the physical properties mentioned in this specification, if the measured pressure affects the physical property, unless specifically otherwise specified, the physical property is measured at atmospheric pressure, i.e., at an atmospheric pressure (about 1 atmosphere).

[0043] FIG. 1 illustrates a copper foil manufacturing apparatus according to one embodiment of the present invention, FIG. 2 and FIG. 3 illustrate a drum according to one embodiment of the present invention, and FIG. 4 illustrates region A of FIG. 1.

[0044] A copper foil manufacturing apparatus according to one embodiment of the present invention comprises an electrolytic cell for receiving an electrolyte, a liquid injection unit for supplying an electrolyte to the electrolytic cell, a drum rotating around a drum axis while at least a portion of which is impregnated with the electrolyte, a counter electrode disposed spaced apart from the drum within the electrolytic cell, a drum cover spaced apart from the surface of the drum, a spraying unit coupled to the drum cover, and a filling roll disposed spaced apart from the drum outside the electrolytic cell and rotating around a filling roll axis, wherein the spraying unit can spray air toward the space between the drum and the filling roll.

[0045] Referring to FIG. 1, the copper foil manufacturing device (100) may include two electrodes. The two electrodes may each be a drum (230) and a counter electrode (240). The drum (230) and the counter electrode (240) may have opposite polarities. For example, the drum (230) may be a negative electrode and the counter electrode (240) may be a positive electrode.

[0046] When an electric current is applied, a metal may be deposited on the surface of the negative electrode of the two electrodes. For example, the metal may be electrodeposited on the surface of the drum (230). The metal may be deposited in the form of a thin film. The deposited metal thin film may be separated from the electrode to produce a metal foil. In the present disclosure, the metal foil may refer to a copper foil (300).

[0047] The electrolytic cell (210) can accommodate an electrolyte (310). At least a portion of the drum (230) may be impregnated with the electrolyte (310). The inner surface (111) of the electrolytic cell (210) may be formed to correspond to the shape of the drum (230). A counter electrode (240) may be placed on the inner surface (111) of the electrolytic cell (210). The drum (230) may be spaced apart from the counter electrode (240) and positioned to face the counter electrode (240). The counter electrode (240) may be formed in a semicircular shape and may be in a shape that surrounds the lower surface of the drum (230). The electrolyte (310) may flow between the counter electrode (240) and the drum (230).

[0048] The above electrolyte (310) can be supplied by the above injection part (220). One end of the above injection part (220) is located inside the electrolytic cell (210), and the above electrolyte (310) can be supplied between the counter electrode (240) and the drum (230).

[0049] The above electrolyte (310) can be used to electrodeposit a copper foil by contacting the drum (230) during the copper foil (300) manufacturing process. The above electrolyte (310) may be an aqueous copper sulfate solution containing copper ions. The above electrolyte (310) may optionally further include organic additives to improve the stability and quality of the electrodeposition reaction.

[0050] The drum (230) is a rotating electrode for electrodepositing a copper thin film and may be cylindrical in shape. The drum (230) may be made of a conductive material such as copper or stainless steel. The surface of the drum (230) may be formed flat to uniformly form the electrodeposited copper thin film.

[0051] The drum (230) may include a drum shaft (231). The drum (230) is installed to be rotatable around the drum shaft (231) and, while rotating, comes into contact with the electrolyte (310) to electrodeposit copper ions. At this time, the drum (230) may rotate while at least a portion of it is submerged in the electrolyte (310). Through this, a certain portion of the surface of the drum (230) comes into contact with copper ions in the electrolyte (310) to cause an electrochemical reaction, and a copper thin film can be continuously electrodeposited on the surface of the drum (230).

[0052] Additionally, the drum (230) is connected to a drive unit capable of controlling the rotational speed, which can ensure uniformity of the electrodeposition thickness or facilitate the removal of oxygen bubbles or impurities in the electrolyte (310).

[0053] The copper foil manufacturing device (100) may further include a power supply unit (250) that applies voltage. The power supply unit (250) may be configured to apply current between the drum (230) and the counter electrode (240) so that copper ions in the electrolyte (310) are reduced to the surface of the drum (230) and electrodeposited as a copper thin film. The power supply unit (250) may be implemented as a DC power supply and may include a control unit capable of controlling voltage and current (A).

[0054] The power supply unit (250) can operate in a constant voltage or constant current mode within a set voltage range, thereby providing optimal electrochemical conditions for thickness uniformity, grain size control, and surface roughness improvement of the electrodeposition reaction. For example, during the electrodeposition process, the power supply unit (250) can apply a DC voltage of 0.5V to 5V, and the current density is 0.5 A / dm² 2 Up to 10A / dm 2 It can be set as a range.

[0055] When power is applied, copper ions in the electrolyte (310) move to the drum (230) (cathode), receive electrons, and are reduced to copper metal, thereby electrodepositing a copper thin film on the surface of the drum (230). At the same time, an oxidation reaction occurs in the electrolyte (310) at the counter electrode (240), which may be an oxygen evolution reaction or, if the counter electrode (240) is a copper plate, a copper ion elution reaction. Through this electrochemical reaction, a copper thin film having a uniform thickness and an excellent crystal structure is formed on the surface of the drum (230).

[0056] The above power supply unit (250) can monitor parameters such as voltage, current, temperature, and electrodeposition time in real time during the electrodeposition process and adjust them as needed. As a result, process stability for producing high-quality copper foil (300) can be ensured.

[0057] During the process in which an electrochemical reaction occurs when voltage is applied, acidic components in the electrolyte (310) may react to generate acid fumes. The acid fumes may be re-adsorbed onto the surface of the drum (230) or the copper film, or diffuse into the equipment, potentially causing corrosion of the equipment and deterioration of the copper film quality. In particular, if the acid fumes are re-adsorbed onto the surface of the copper film, they may cause the formation of an oxide film, which degrades the electrodeposition quality and may reduce the electrical properties or mechanical strength of the film.

[0058] Referring to FIGS. 1 to 3, the drum cover (105) may include the cover portion (110) and the frame portion (120). The cover portion (110) may be spaced apart from the surface of the drum (230) to form the air curtain area (170). The frame portion (120) may support the cover portion (110).

[0059] The frame portion (120) is fixed at a position spaced apart from the surface of the drum (230) so that it can remain fixed regardless of the rotation of the drum (230). The cover portion (110) can be formed with a curved structure corresponding to the shape of the drum (230) (e.g., cylindrical shape). This allows the air curtain area (170) to be stably formed while maintaining a uniform spacing on the outer surface (112) of the drum (230).

[0060] The cover portion (110) is not directly coupled to the drum (230) but can be fixed at a certain distance from the drum (230) through the frame portion (120). Through this, the cover portion (110) can maintain a constant space (air curtain area (170)) formed between it and the surface of the drum (230) without hindering the free rotation of the drum (230).

[0061] The above cover portion (110) can be formed of plastic, corrosion-resistant metal, or other non-conductive material and can maintain stable structural characteristics even in a corrosive environment of acidic gas or electrolyte (310). As a result, the drum cover (105) of the present invention can improve the durability of the device and reduce equipment maintenance costs.

[0062] The above-mentioned cover portion (110) may include an intake port, a nozzle, or a guide structure in addition to a curved shape so as to smoothly guide the external airflow entering through the air curtain area (170), thereby controlling the distribution of the airflow and designing it to reach the surface of the drum (230) uniformly.

[0063] The cover portion (110) may include a bent portion (117) that is bent in a direction spaced apart from the drum (230) along the rotational direction of the drum (230). The bent portion (117) may be formed at the rear end of the cover portion (110) along the rotational direction of the drum (230). The bent portion (117) is formed by the end of the drum cover (105) being bent outward along the extension of the curved shape of the cover portion (110), and may be positioned opposite the filling roll (270) with respect to the rotational direction of the drum (230). The frame portion (120) may include a first body (1201) extending along the rotational direction of the drum (230) and a second body (1205) extending along the axial direction of the drum (230). The first body (1201) and the second body (1205) can be combined to form a rigid structure.

[0064] The first body (1201) may have a curved structure along the rotational direction of the drum (230) and may be formed in multiple units. The second body (1205) may be extended along the axial direction (X-axis direction in FIG. 3) of the drum (230) and may be formed in multiple units. The first body (1201) and the second body (1205) may be connected by welding and may form a grid structure. Through this, the support member (130) can be stably placed on the frame member (120). The copper foil manufacturing device (100) may include a support member (130) that supports the frame member (120). The support member (130) is a structure for supporting the frame member (120) at a position spaced apart from the drum (230). The support member (130) may be fixedly installed on the main body of the device, but is not limited thereto. The support member (130) may contact the frame member (120) through a plurality of contact points.

[0065] The above support members (130) may be provided in multiple numbers. The multiple support members (130) may be spaced apart along the rotational direction of the drum (230). Through this arrangement structure, even if the drum cover (105) is provided in a shape corresponding to the outer surface of the drum (230), the support members (130) can stably support the drum cover (105).

[0066] Additionally, a plurality of support members (130) may be arranged to face each other with the drum (230) in between. Some of the plurality of support members (130) may be arranged to face one side of the drum (230). The remaining parts of the plurality of support members (130) may be arranged to face the other side of the drum (230). The frame member may be supported by the support members (130) arranged on one side of the drum (230) and the other side of the drum (230), respectively.

[0067] For example, referring to FIGS. 1 to 3, the plurality of support members (130) may each be positioned to face one side and the other side of the drum (230) with the drum (230) in between. The support member (130) positioned on one side of the drum (230) may be positioned to correspond to the support member (130) positioned on the other side of the drum (230).

[0068] Through this, the frame part (120) is stably supported along the rotational direction of the drum (230), and both ends of the drum cover (105) are balancedly supported in the axial direction, so that the structure can be stably maintained without affecting the rotation of the drum (230).

[0069] The above frame part (120) and the above support part (130) can be formed to be detachable.

[0070] The copper foil manufacturing apparatus (100) of the present disclosure may include an upper frame (121) and a lower frame (125) arranged along the rotational direction of the drum (230). The frame portion (120) may include a plurality of frames. The frame portion (120) may be formed by assembling the plurality of frames. Although only the upper frame (121) and the lower frame (125) are illustrated in the present disclosure, it is understood that additional separate frames may be included.

[0071] If the above frame part (120) is formed as a single unit, the structural stability of the frame is reduced, and the difficulty of manufacturing in the manufacturing process may increase. Therefore, the above frame part (120) can be manufactured separately and then assembled to form the frame part (120).

[0072] The upper frame (121) and the lower frame (125) may each include a first body (1201) and a second body (1205). The first body (1201) and the second body (1205) of the upper frame (121) may be combined to form a grid structure. The first body (1201) and the second body (1205) of the lower frame (125) may be combined to form a grid structure. The upper frame (121) and the lower frame (125) may be arranged sequentially along the rotational direction of the drum (230).

[0073] The bending portion (117) may be formed in the area where the copper foil (300) is separated from the drum (230) and transferred to the next process. Through the bending shape of the bending portion (117), the movement path of the copper foil (300) immediately after peeling can be stably maintained. In addition, irregular movement of the copper foil (300) that may occur when the bending portion (117) is absent can be reduced.

[0074] The above-mentioned bending portion (117) can regulate the airflow between the cover portion (110) and the peeling roll (270) or form an auxiliary discharge path for acidic gas. Through this, the above-mentioned bending portion (117) can provide various effects such as ensuring the transport stability of the peeled copper foil (300), improving electrodeposition quality, and improving the process environment within the facility.

[0075] The copper foil manufacturing device (100) may further include a filling roll (270). The copper foil (300) electrodeposited on the drum (230) may be transferred to the filling roll (270) according to the rotation of the drum (230). The filling roll (270) may rotate. The filling roll (270) may receive the copper foil (300) being peeled off from the surface of the drum (230). The filling roll (270) may supply the copper foil (300) to the next process. The filling roll (270) may further include a filling roll axis (271). The filling roll (270) may rotate around the filling roll axis (271). The copper foil unwound from the drum (230) may be wound onto the filling roll (270).

[0076] The peeling roll (270) may be positioned adjacent to the area where the outer surface of the drum (230) flows out of the electrolytic tank (210) rather than the area where the outer surface of the drum (230) flows into the electrolytic tank (210) when the drum (230) rotates. Referring again to FIG. 1, when the drum (230) rotates, the outer surface of the drum (230) flows into the electrolytic tank (210) and then flows out of the electrolytic tank (210). The peeling roll (270) may be positioned adjacent to the area where the outer surface of the drum (230) flows out of the electrolytic tank (210).

[0077] The rotational direction of the filling roll (270) may be opposite to the rotational direction of the drum (230). The drum axis (231) may be positioned parallel to the filling roll axis (271).

[0078] The injection unit (400) can be coupled to the drum cover (105). The injection unit (400) can inject air between the drum (230) and the filling roll (270). Specifically, when the copper foil is unwound from the drum (230), the injection unit (400) can inject air between the drum (230) and the copper foil. This prevents damage to the copper foil when it is unwound.

[0079] Referring to FIGS. 1 to 3, the injection unit (400) may be positioned below the drum cover (105). The injection unit (400) may be positioned between the drum cover (105) and the drum (230). The injection unit (400) may be coupled to the cover unit (110) or to the frame unit (120). The injection unit (400) may be positioned on one side of the drum cover (105) close to the filling roll (270) along the circumferential direction of the drum (230).

[0080] The above injection unit (400) can inject air along the direction of the drum axis (231) to both sides of the filling roll axis (271). When the copper foil is unwound from the drum (230), the edges of the copper foil may be more susceptible to tearing than the center of the copper foil. By injecting air toward the edges of the copper foil with the above injection unit (400), the copper foil can be prevented from tearing.

[0081] The injection unit (400) may be provided in multiple units. The injection unit (400) may include a first injection unit (410) and a second injection unit (420). The first injection unit (410) may be positioned on one side of the drum cover (105) along the direction of the drum axis (231). Specifically, the first injection unit (410) may be positioned on one side of the cover unit (110) along the direction of the drum axis (231).

[0082] The second injection part (420) may be positioned on the other side of the drum cover (105) along the direction of the drum axis (231). Specifically, the second injection part (420) may be positioned on the other side of the cover part (110) along the direction of the drum axis (231).

[0083] The injection pressure of the injection unit (400) may be in the range of 0.01 MPa to 0.2 MPa. The injection pressure of the injection unit (400) may be formed within the range of 0.01 MPa to 0.2 MPa so that the copper foil can be easily separated from the drum (230) without damage.

[0084] Specifically, FIG. 4 illustrates a copper foil being unwound from a drum (230) and wound onto a filling roll (270). As the drum (230) rotates, the copper foil is unwound from the drum (230) in a preset area. The unwound copper foil is wound onto the outer surface of the filling roll (270). At this time, the first injection unit (410) and the second injection unit (420) can each spray air onto both sides of the filling roll (270). At this time, the copper foil and the drum (230) can be easily separated by the air, thereby preventing the copper foil from tearing. The present invention may be modified and implemented in various forms, and the scope of rights is not limited to the above-described embodiments. The above description is merely an example of applying the principles of the present invention, and other configurations may be further included within the scope of the present invention.

[0085] Explanation of drawing symbols

[0086] 100: Copper foil manufacturing device

[0087] 210: Jeonhae Jo

[0088] 220: Main amount part

[0089] 230: Drum

[0090] 240: Counter electrode

[0091] 270: Filling Roll

[0092] 400: Injection part

Claims

[CLAIMS]

1. Electrolytic cell for accommodating electrolyte; A liquid injection unit that supplies electrolyte to the above-mentioned electrolytic cell; A drum rotating around a drum axis with at least a portion impregnated in the above electrolyte; A counter electrode disposed spaced apart from the drum within the electrolytic cell; A drum cover comprising a cover portion spaced apart from the surface of the drum and a frame portion supporting the cover portion; A spraying part coupled to the above drum cover; and A filling roll disposed outside the electrolytic cell, spaced apart from the drum, and rotating about the filling roll axis; comprising The above injection unit is a copper foil manufacturing device that injects air between the drum and the filling roll.

2. In Paragraph 1, The above drum shaft is a copper foil manufacturing device arranged parallel to the above filling roll shaft.

3. In Paragraph 1, The above injection unit is a copper foil manufacturing device positioned at the bottom of the drum cover.

4. A copper foil manufacturing device according to claim 1, wherein the injection part is disposed on one side of the drum cover close to the filling roll along the circumferential direction of the drum.

5. In Paragraph 1, The above injection unit is a copper foil manufacturing device that injects air along the drum axis direction to both sides of the filling roll axis.

6. In Paragraph 1, A copper foil manufacturing apparatus comprising a first injection unit disposed on one side of the drum cover along the drum axis direction and a second injection unit disposed on the other side of the drum cover.

7. In Paragraph 1, A copper foil manufacturing apparatus in which the injection pressure of the above-mentioned injection part is within the range of 0.01 MPa to 0.2 MPa.

8. In Paragraph 1, A copper foil manufacturing device in which the above cover portion is formed as a curved surface corresponding to the shape of the drum.

9. In Paragraph 1, A copper foil manufacturing apparatus in which the above-described filling roll is positioned adjacent to the area where the outer surface of the drum flows out of the electrolytic cell, rather than the area where the outer surface of the drum flows into the electrolytic cell, when the drum rotates.

10. In Paragraph 1, A copper foil manufacturing device in which the rotation direction of the above-mentioned filling roll is opposite to the rotation direction of the above-mentioned drum.

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