Method and system device for producing quartz glass by continuous vacuum melting

By employing a vacuum continuous melting method and automated production processes, the challenges of hydroxyl contamination and temperature control in quartz glass production have been solved, enabling efficient and low-cost production of various quartz glass materials to meet large-size requirements.

WO2026143770A1PCT designated stage Publication Date: 2026-07-09

Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Filing Date
2025-01-13
Publication Date
2026-07-09

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  • Figure CN2025072015_09072026_PF_FP_ABST
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Abstract

A method and system device for producing quartz glass by continuous vacuum melting. The system device comprises an automatic feeding device, a feeding quantity being set by means of a controller such that feeding is automatically stopped when the feeding quantity reaches a set value. A tungsten or molybdenum crucible in a vacuum melting chamber is free of oxidation, no hydroxyl group is entrained by molten quartz glass, gas-liquid inclusions in quartz particles are easily removed, and thus no additional dehydroxylation process is required. By means of the separation of the melting chamber and a forming chamber, optimal control of the temperature for each function is realized. An adjustable forming mold is used for flexible production of various series of quartz glass materials. The existing continuous process with atmospheric pressure introduction of hydrogen and nitrogen for protection is replaced with a continuous process without the introduction of hydrogen for protection, thereby greatly shortening the cycle, reducing costs, and improving the melting quality.
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Description

A method and system for producing quartz glass by vacuum continuous melting Technical Field

[0001] This invention belongs to the field of quartz glass production technology, specifically relating to a method and system for producing quartz glass by vacuum continuous melting. Background Technology

[0002] Quartz glass is a type of glass made of pure silicon dioxide. It has high heat resistance, with a typical operating temperature of 1100℃-1200℃ and a short-term operating temperature reaching 1400℃. Its coefficient of linear expansion is extremely small, only 1 / 10 to 1 / 20 that of ordinary glass, giving it excellent thermal shock resistance. Except for hydrofluoric acid and hot phosphoric acid, it has good resistance to most acids and exhibits minimal corrosion from alkalis and alkaline earth compounds. Furthermore, it is not damaged by radiation. Quartz glass has excellent electrical insulation properties. It transmits ultraviolet and infrared radiation, exhibiting excellent transmittance across a continuous wavelength range from ultraviolet to infrared, making it the best among all ultraviolet-transmitting materials.

[0003] Its mechanical properties are superior to those of ordinary glass; its hardness can reach Mohs level 7.

[0004] Existing technology does not have a vacuum feeding chamber; melting and forming are carried out in a furnace. The melting furnace is under normal pressure and is filled with nitrogen, hydrogen, and helium as protective gases. Due to the introduction of hydrogen, the quartz glass produced by this process has a high hydroxyl content.

[0005] The main process steps of the existing technology are: feeding - high temperature and atmospheric pressure furnace (filled with nitrogen, hydrogen and helium for protection) - continuous melting of quartz sand raw material in the furnace - continuous pulling of quartz glass material from the forming mold at the bottom of the furnace - continuous production of shaped quartz glass material by controlling a series of parameters - cutting quartz glass products according to length - cooling to room temperature - subsequent dehydroxylation process. Technical issues

[0006] However, existing processes have the following technical drawbacks:

[0007] 1. In a vacuum furnace filled with hydrogen, the hydrogen enters the molten quartz and transforms into hydroxyl groups. The high hydroxyl content in quartz glass reduces its high-temperature resistance. In some applications, it's necessary to remove these hydroxyl groups; this process is called dehydroxylation. Dehydroxylation is time-consuming and energy-intensive. In some cases, the dehydroxylation process is more expensive than melting quartz. For thicker glass, traditional dehydroxylation methods often fail to completely remove hydroxyl groups.

[0008] Second, the melting and molding of quartz sand raw materials are carried out in the same furnace. The gas-liquid inclusions in the quartz sand raw materials cannot be completely removed by atmospheric pressure melting, and the melting temperature usually needs to be very high, while the molding temperature needs to be controlled to a certain extent (not too high). These two are contradictory, and traditional processes are difficult to control well, resulting in one being neglected and the other being neglected.

[0009] Third, subsequent high-energy-consuming dehydroxylation is required.

[0010] This invention provides a method and system for producing quartz glass by continuous vacuum melting, which solves the problems currently faced in the production of quartz glass, such as the easy introduction of hydroxyl groups (hydrogen contamination) into the molten quartz glass, the difficulty in removing the naturally encapsulated gas-liquid inclusions inside the quartz raw material quartz particles, the inability to uniformly control the melting and forming temperatures, the inconsistency in process control, the high cost of dehydroxylation in the subsequent removal of hydroxyl groups from the quartz glass material, and the failure to achieve optimal melting quality of the quartz glass.

[0011] By adding a vacuum transition chamber, nitrogen, hydrogen, or helium is not used in the vacuum melting chamber, resulting in quartz glass melt without the introduction of additional hydroxyl groups. The vacuum ensures thorough removal of naturally occurring gas-liquid inclusions within the quartz particles. Through the innovative use of adjustable molding dies, various quartz glass materials can be flexibly produced, such as round tubes, rods, irregularly shaped tubes, rods, sheets, thick-walled tubes, and solid blocks (quartz glass ingots) of various sizes. This allows the currently discontinuous production process to be automated or continuously adjusted, reducing subsequent additional hydroxyl removal processes, significantly shortening the production cycle and lowering costs. Technical solutions

[0012] The purpose of this invention is to provide a method and system for producing quartz glass by continuous vacuum melting, so as to solve the problems mentioned in the background art.

[0013] To achieve the above objectives, the present invention provides the following technical solution:

[0014] A method and system for producing quartz glass by vacuum continuous melting includes: an automatic feeding device, which sets the feeding quantity through a controller and automatically stops feeding when the set quantity is reached; the automatic feeding device includes a controller body, and the controller body is provided with a first pipe and a second pipe.

[0015] An atmospheric pressure hopper device feeds material into the first main hopper of the atmospheric pressure hopper device via an automatic feeding device. The atmospheric pressure hopper device includes a first sand level sensor, a first automatic slide gate valve, a first image observation device, and a first quartz sand. The other end of the first pipe is inside the first quartz sand, and the other end of the second pipe is installed directly above the atmospheric pressure hopper device. The first sand level sensor is used to sense the position of the first quartz sand and transmit the data to the controller body. The first automatic slide gate valve is opened or closed by the controller body. The first image observation device is used to observe the internal condition of the atmospheric pressure hopper device.

[0016] As can be seen from the above, when the first automatic slide valve is opened, the first quartz sand flows into the interior of the vacuum transition chamber device.

[0017] The vacuum transition material chamber device feeds material into the second main body material chamber by opening the atmospheric pressure material chamber device, and the vacuum transition material chamber device feeds material into the second main body material chamber by opening the first automatic slide valve.

[0018] The vacuum transition chamber device includes a first vacuum pump, a first pressure relief port, a first pressure gauge, a second image observation device, a second quartz sand, a second automatic slide valve, a first electric three-way valve, and a second sand level sensor. The first electric three-way valve is connected to the first vacuum pump, the first pressure relief port, and the first pressure gauge. The other end of the first pressure relief port is connected to the atmosphere through an air filter.

[0019] As can be seen from the above, when the first automatic slide gate valve and the second automatic slide gate valve are closed simultaneously, the first electric three-way valve connects to the first vacuum pump, the first pressure gauge, and the vacuum transition chamber device via electric adjustment. The first vacuum pump is turned on, and the first vacuum pump is turned off after the pressure value displayed on the first pressure gauge is less than or equal to the preset value (otherwise, the vacuum pump is turned on). The system waits for the second automatic slide gate valve to open. After the second automatic slide gate valve opens, the second quartz sand flows out of the vacuum transition chamber device. After the second sand level sensor detects the lowest value, it sequentially closes the second automatic slide gate valve, opens the first automatic slide gate valve, allows the first quartz sand to flow into the vacuum transition chamber device, closes the first automatic slide gate valve, and turns on the first vacuum pump.

[0020] The vacuum feeding chamber device feeds material into the third main chamber of the vacuum feeding chamber device by opening the vacuum transition chamber device. The vacuum feeding chamber device includes a second vacuum pump, a second pressure relief port, a second pressure gauge, a third image observation device, a third quartz sand, an electric seeding wheel, a second electric three-way valve, a third sand level sensor, and a funnel. The other end of the second pressure relief port is connected to the atmosphere through an air filter. The second automatic slide gate valve, the electric seeding wheel, and the second electric three-way valve are controlled by the controller body.

[0021] As can be seen from the above, when the second automatic slide gate valve is closed, the second electric three-way valve is connected to the second vacuum pump through the electric adjustment vacuum feeding chamber device. The second vacuum pump is turned on. After the pressure value displayed by the second pressure gauge is less than or equal to the preset value, the second vacuum pump is turned off, and the electric seeding wheel starts to rotate (if the pressure value displayed by the second pressure gauge is greater than the preset value during the process, the electric seeding wheel stops rotating and the second vacuum pump is turned on). The rotation of the electric seeding wheel feeds the third quartz sand into the funnel and allows it to fall freely. When the third sand level sensor senses the set low value, the second automatic slide gate valve is opened in sequence, the second quartz sand flows into the vacuum feeding chamber device, and after the second sand level sensor senses the lowest value, the second automatic slide gate valve is closed, the second vacuum pump is turned on, and the feeding is cyclically carried out.

[0022] The vacuum melting chamber device and the first melt are used to melt multiple quartz sands into a melt. The vacuum melting chamber device includes a third vacuum pump, a third pressure gauge, a fourth image observation device, a cooling medium inlet, a cooling medium outlet, a feeder, a tungsten or molybdenum crucible, a heater, refractory bricks, the first melt, a wetting seal, a mismatch seal, insulation, and a temperature sensor. The cooling medium inlet and the heater are controlled by the controller body. A tungsten or molybdenum flange is provided between the tungsten or molybdenum crucible and the refractory bricks. A furnace body is provided below the refractory bricks. The furnace body and the tungsten or molybdenum flange are mismatched. The tungsten or molybdenum crucible and the first melt are wetting seals. The tungsten or molybdenum flange and the tungsten or molybdenum crucible are welded seals.

[0023] As can be seen from the above, the cooling medium enters through the cooling medium inlet and flows out through the cooling medium outlet, carrying away the heat and thus controlling the internal temperature of the vacuum melting chamber device. The funnel collects the quartz sand and flows into the top of the spreader. The spreader has a guide groove and a guide hole, which evenly distributes the quartz sand and spreads it onto the first melt, where it melts and flows into the interior of the secondary molding chamber device.

[0024] The secondary forming chamber device is used to solidify the molten first melt into a solid of a preset specification and shape. The secondary forming chamber device includes a first nitrogen filling port, a fourth pressure gauge, a fifth image observation, a secondary forming tungsten or molybdenum crucible, a second melt, a forming mold, a sixth image observation, a first nitrogen outlet, a diameter and thickness laser measuring instrument, and a driven pulling roller. The first nitrogen filling port and the first nitrogen outlet are controlled by the controller body and are connected to the secondary forming chamber device.

[0025] As can be seen from the above, nitrogen gas enters the secondary forming tungsten or molybdenum crucible through the first nitrogen filling port and covers and protects the liquid surface of the second melt. It then flows out through the first nitrogen outlet. The second melt flows out through the gap of the forming mold and solidifies into a solid of a preset specification and shape. It is then vertically guided downward by the driven pulling roller.

[0026] The cooling chamber device is used to bring solidified solids into the interior of the cooling chamber device to cool and shape them into a type of quartz glass tube, quartz glass lump, quartz glass rod, or quartz glass sheet. The cooling chamber device includes quartz glass raw material, seventh image observation, and electric pulling roller. The electric pulling roller is the main power for traction and pulling. The wall thickness and diameter of the quartz glass raw material are controlled by the pulling speed of the electric pulling roller.

[0027] As can be seen from the above, the second melt flows out of the forming mold and solidifies into a solid. It is then vertically guided down into the cooling chamber by the driven clamping of the driven pulling roller to cool and shape into quartz glass raw material. The quartz glass raw material then descends into the tube drawing and synchronous cutting chamber device by the active traction of the electric pulling roller.

[0028] The tube-pulling synchronous cutting chamber device is used for laser cutting of cooled and shaped quartz sand solids. The tube-pulling synchronous cutting chamber device includes a second nitrogen inlet, a fifth pressure gauge, a vertically moving dynamic laser cutting machine, an eighth image observation, a second nitrogen outlet, and an infrared sensor. The second nitrogen inlet, the vertically moving dynamic laser cutting machine, and the second nitrogen outlet are all controlled by the controller body. The second nitrogen inlet and the second nitrogen outlet are connected to the tube-pulling synchronous cutting chamber device.

[0029] As can be seen from the above, the quartz glass raw material descends and is clamped and pulled into the interior of the tube-pulling synchronous cutting chamber device by the electric pulling roller. The clamp of the up-and-down moving dynamic laser cutting machine holds the quartz glass raw material. At this time, the head of the up-and-down moving dynamic laser cutting machine descends with the quartz glass raw material. During the descent, the laser is turned on to cut around the circumference of the quartz glass raw material. After the cutting is completed, the laser of the up-and-down moving dynamic laser cutting machine is turned off, the clamp is released, and the quartz glass raw material falls to the connecting vehicle. At the same time, the head of the up-and-down moving dynamic laser cutting machine can be reset in multiple axes.

[0030] The connecting and palletizing device moves the cooled and shaped quartz sand solid to the palletizing area. The connecting and palletizing device includes a connecting vehicle, a slide rail, a robotic arm and a pallet. The connecting vehicle is equipped with a weight switch to control the sliding start of the connecting vehicle.

[0031] As can be seen from the above, limit switches are installed at both ends A and B of the slide rail. The limit switch at end A controls the gliding stop of the shuttle and the start of the robotic arm's gripping and stacking, while the limit switch at end B controls the gliding stop of the shuttle.

[0032] The raw quartz glass material falls into the shuttle car. The weight switch closes and the shuttle car slides (the limit switch at end B is disconnected). When it reaches point A on the slide rail, the limit switch closes and the shuttle car stops sliding. Then, the robotic arm begins to grab the raw quartz glass material and stack it on the tray. At the same time, the weight switch of the raw quartz glass material is disconnected as it leaves the shuttle car, and the shuttle car starts to slide. When it reaches point B on the slide rail, the limit switch closes and the shuttle car stops, waiting for the raw quartz glass material to be cut and fall into the shuttle car, thus creating a repeated cycle.

[0033] In summary, adding atmospheric pressure material chamber devices, vacuum transition material chamber devices, and vacuum feeding material chamber devices can remove air from the chamber, further remove gases and pollutants from the air, reduce pollution to quartz sand raw materials, and thus improve the purity of quartz glass.

[0034] The vacuum melting chamber device does not fill with nitrogen, hydrogen, or helium gas, thereby reducing the oxidation of tungsten or molybdenum crucibles and lowering the hydroxyl content in quartz glass.

[0035] The secondary forming chamber device, separate from the vacuum melting furnace, can increase the maximum drawn outer diameter of quartz tubes to 1 meter. The forming mold can be flexibly changed to realize the production of different types of quartz glass materials, increase the variety of products, change the single product disadvantage of the existing process, and have high flexibility. At the same time, the large-size quartz tubes can save the cost of subsequent tube expansion process. Since the outer diameter required for the final application of quartz tubes is generally much larger than the drawn tubes, the existing process cannot draw extra-large quartz tubes. This process can meet this requirement.

[0036] The tube-pulling synchronous cutting chamber device adopts an automated cutting process and automatically stacks quartz glass, improving production efficiency and capacity.

[0037] A method for producing quartz glass using a vacuum continuous melting apparatus includes:

[0038] Step 1: Open the controller body and start it to work. When the first automatic slide valve opens, the first quartz sand flows into the vacuum transition chamber device.

[0039] Step 2: When the first automatic slide gate valve and the second automatic slide gate valve are closed at the same time, the first electric three-way valve connects to the first vacuum pump, the first pressure gauge and the vacuum transition chamber device through electric adjustment, and starts the first vacuum pump.

[0040] Step 3: When the second automatic slide gate valve is closed, the second electric three-way valve is connected to the second vacuum pump through the electric regulating vacuum feeding chamber device, and the second vacuum pump is turned on.

[0041] Step 4: The cooling medium enters through the cooling medium inlet and flows out through the cooling medium outlet, carrying away the heat and thus controlling the internal temperature of the vacuum melting chamber device;

[0042] Step 5: Nitrogen gas enters the secondary forming tungsten or molybdenum crucible through the first nitrogen filling port, covering and protecting the surface of the second melt, and flows out through the second nitrogen outlet;

[0043] Step Six: The second melt flows out of the forming mold and solidifies into a solid. It is then vertically guided down into the cooling chamber by the driven pull roller to cool and shape into quartz glass raw material.

[0044] Step 7: The quartz glass raw material descends and is clamped and pulled by the electric pulling rollers into the interior of the tube pulling synchronous cutting chamber device, where the clamps of the up-and-down moving dynamic laser cutting machine hold the quartz glass raw material.

[0045] Step 8: Limit switches are installed at both ends A and B of the slide rail. The limit switch at end A controls the stopping of the shuttle car's sliding and the starting of the robotic arm's gripping and stacking. The limit switch at end B controls the stopping of the shuttle car's sliding. Beneficial effects

[0046] Compared with the prior art, the beneficial effects of the present invention are:

[0047] This invention provides a method and system for producing quartz glass by continuous vacuum melting, which solves the problems currently faced in the quartz glass production process, such as the easy oxidation of tungsten or molybdenum crucibles in the vacuum melting chamber, the limited types of quartz glass materials produced, the easy introduction of hydroxyl groups (hydrogen contamination) into the molten quartz glass, the difficulty in removing gas-liquid inclusions inside the quartz raw material quartz particles, the long production cycle of quartz glass materials, high cost, and low melting quality.

[0048] By adding a vacuum transition chamber, low-hydroxyl quartz glass melt is obtained without filling the vacuum melting chamber with nitrogen, hydrogen, or helium. Through the innovative use of adjustable forming molds, various quartz glass materials can be flexibly produced, such as round tubes, rods, irregularly shaped tubes, rods, sheets, thick-walled tubes, and solid blocks (quartz glass ingots) of various sizes. The currently discontinuous production process can be made continuous through automation or appropriate adjustments, reducing subsequent additional dehydroxylation processes, significantly shortening the production cycle and reducing costs. Attached Figure Description

[0049] Figure 1 is a structural diagram of the present invention;

[0050] Figure 2 is an enlarged structural diagram of point A in Figure 1 of the present invention.

[0051] In the diagram: 1. Automatic feeding device; 101. Controller body; 102. First pipeline; 103. Second pipeline; 2. Atmospheric pressure hopper device; 201. First sand level sensor; 202. First automatic gate valve; 203. First image observation; 204. First quartz sand; 3. Vacuum transition hopper device; 301. First vacuum pump; 302. First pressure relief port; 303. First pressure gauge; 304. Second image observation; 305. Second quartz sand; 306. Second automatic gate valve; 307. First electric three-way valve; 308. 4. Vacuum feeding hopper device; 401. Second vacuum pump; 402. Second pressure relief port; 403. Second pressure gauge; 404. Third image observation device; 405. Third quartz sand; 406. Electric seeding wheel; 407. Second electric three-way valve; 408. Third sand level sensor; 409. Funnel; 5. Vacuum melting chamber device; 501. Third vacuum pump; 502. Third pressure gauge; 503. Fourth image observation device; 504. Cooling medium inlet; 505. Cooling medium outlet; 506. Dispenser; 507. 508. Tungsten or molybdenum crucible; 509. Heater; 510. Refractory brick; 511. Melt; 512. Wetting seal; 513. Insulation; 514. Temperature sensor; 515. Tungsten or molybdenum flange; 516. Mismatched seal; 517. Furnace body; 518. Welded seal; 6. Secondary forming chamber device; 601. First nitrogen inlet; 602. Fourth pressure gauge; 603. Fifth image observation; 604. Secondary forming tungsten or molybdenum crucible; 605. Melt; 606. Forming mold; 607. Sixth image observation; 608. First nitrogen outlet; 6 09. Diameter and thickness laser measuring instrument; 610. Driven pulling roller; 7. Cooling chamber device; 701. Quartz glass raw material; 702. Seventh image observation; 703. Electric pulling roller; 8. Pulling and cutting chamber device; 801. Second nitrogen filling port; 802. Fifth pressure gauge; 803. Up and down moving dynamic laser cutting machine; 804. Eighth image observation; 805. Second nitrogen outlet; 806. Infrared sensor; 9. Connecting and palletizing device; 901. Connecting vehicle; 902. Slide rail; 903. Robotic arm; 904. Pallet. Embodiments of the present invention

[0052] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0053] As shown in Figures 1 and 2, an apparatus for producing quartz glass by vacuum continuous melting includes: an automatic feeding device 1, which sets the feeding quantity through a controller and automatically stops when the feeding quantity reaches the set value. The automatic feeding device 1 includes a controller body 101, and a first pipe 102 and a second pipe 103 are provided on the controller body 101.

[0054] As shown in Figures 1 and 2, the atmospheric pressure material hopper device 2 is fed to the first main body material hopper by the automatic feeding device 1. The atmospheric pressure material hopper device 2 includes a first sand level sensor 201, a first automatic slide valve 202, a first image observation 203, and a first quartz sand 204. The other end of the first pipe 102 is inside the first quartz sand 204, and the other end of the second pipe 103 is installed directly above the atmospheric pressure material hopper device 2. The first sand level sensor 201 is used to sense the position of the first quartz sand 204 and transmit the data to the controller body 101. The first automatic slide valve 202 is opened or closed by the controller body 101. The first image observation 203 is used to observe the internal situation of the atmospheric pressure material hopper device 2.

[0055] As can be seen from the above, when the first automatic slide valve 202 is opened, the first quartz sand 204 flows into the vacuum transition chamber device 3.

[0056] As shown in Figures 1 and 2, the vacuum transition material chamber device 3 feeds the second main body material chamber on the vacuum transition material chamber device 3 by opening the atmospheric pressure material chamber device 2, and the vacuum transition material chamber device 3 feeds the second main body material chamber by opening the first automatic slide valve 202.

[0057] As shown in Figures 1 and 2, the vacuum transition chamber device 3 includes a first vacuum pump 301, a first pressure relief port 302, a first pressure gauge 303, a second image observation 304, a second quartz sand 305, a second automatic slide valve 306, a first electric three-way valve 307, and a second sand level sensor 308. The first electric three-way valve 307 is connected to the first vacuum pump 301, the first pressure relief port 302, and the first pressure gauge 303. The other end of the first pressure relief port 302 is connected to the atmosphere through an air filter.

[0058] As can be seen from the above, when the first automatic gate valve 202 and the second automatic gate valve 306 are closed at the same time, the first electric three-way valve 307 connects to the first vacuum pump 301, the first pressure gauge 303 and the vacuum transition chamber device 3 through electric adjustment, and the first vacuum pump 301 is turned on. After the pressure value displayed by the first pressure gauge 303 is less than or equal to the preset value, the first vacuum pump 301 is turned off (otherwise the vacuum pump is turned on), and the second automatic gate valve 306 is turned on. After the second automatic gate valve 306 is turned on, the second quartz sand 305 flows out of the vacuum transition chamber device 3. After the second sand level sensor 308 senses the lowest value, it sequentially closes the second automatic gate valve 306, opens the first automatic gate valve 202, the first quartz sand 204 flows into the vacuum transition chamber device 3, closes the first automatic gate valve 202, and turns on the first vacuum pump 301.

[0059] It should be noted that traditional processes use hydrogen (or helium) + nitrogen as protective gases. However, hydrogen protection is essentially a form of impurity contamination, as it can enter the quartz glass melt and transform into hydroxyl groups. During the use of quartz glass, these hydroxyl groups are released, reducing the glass's high-temperature resistance. In some applications, it is necessary to remove these hydroxyl groups; this process is called dehydroxylation. Dehydroxylation is time-consuming and costly, sometimes even more expensive than melting quartz. For thicker glass, it is difficult to remove hydroxyl groups using traditional methods. Currently, the fiber optic communication industry uses low-hydroxyl quartz glass to draw optical fibers. Quartz glass produced using traditional chemical processes requires dehydroxylation during the chemical process, resulting in significant pollution and high energy consumption.

[0060] By adding the function of the vacuum transition chamber device 3, the absence of hydroxyl groups significantly reduces costs and increases benefits for the optical fiber industry. In semiconductor and photovoltaic diffusion processes, hydroxyl groups soften quartz glass, which also requires dehydroxylation. As semiconductor and photovoltaic products are upgraded, the size of the quartz glass tubes used is gradually increasing, and the required volume of the diffusion tube dehydroxylation equipment is also increasing, as are the costs and difficulties of dehydroxylation. Using the process mentioned in this invention, quartz glass with better melting quality can be obtained while saving dehydroxylation costs.

[0061] As shown in Figures 1 and 2, the vacuum feeding chamber device 4 feeds material into the third main body chamber on the vacuum feeding chamber device 4 through the vacuum transition chamber device 3. The vacuum feeding chamber device 4 includes a second vacuum pump 401, a second pressure relief port 402, a second pressure gauge 403, a third image observation 404, a third quartz sand 405, an electric seeding wheel 406, a second electric three-way valve 407, a third sand level sensor 408, and a funnel 409. The other end of the second pressure relief port 402 is connected to the atmosphere through an air filter. The second automatic slide valve 306, the electric seeding wheel 406, and the second electric three-way valve 407 are controlled by the controller body 101.

[0062] As can be seen from the above, when the second automatic slide gate valve 306 is closed, the second electric three-way valve 407 is connected to the second vacuum pump 401 through the electric adjustment vacuum feeding chamber device 4, and the second vacuum pump 401 is turned on. After the pressure value displayed by the second pressure gauge 403 is less than or equal to the preset value, the second vacuum pump 401 is turned off, and the electric seeding wheel 406 starts to rotate (if the pressure value displayed by the second pressure gauge 403 is greater than the preset value during the process, the electric seeding wheel 406 stops rotating, and the second vacuum pump 401 is turned on). The rotation of the electric seeding wheel 406 feeds the third quartz sand 405 into the funnel 409, and it falls freely. When the third sand level sensor 408 senses the set low value, the second automatic slide gate valve 306 is opened in sequence, the second quartz sand 305 flows into the vacuum feeding chamber device 4, and after the second sand level sensor 308 senses the lowest value, the second automatic slide gate valve 306 is closed, the second vacuum pump 401 is turned on, and the feeding is cyclically carried out.

[0063] As shown in Figures 1 and 2, the vacuum melting chamber device 5 and the first melt 510 are used to melt multiple quartz sands into a melt. The vacuum melting chamber device 5 includes a third vacuum pump 501, a third pressure gauge 502, a fourth image observation device 503, a cooling medium inlet 504, a cooling medium outlet 505, a feeder 506, a tungsten or molybdenum crucible 507, a heater 508, refractory bricks 509, the first melt 510, a wetting seal 511, a mismatch seal 515, a heat preservation device 512, and a temperature transmitter. The sensor 513, cooling medium inlet 504 and heater 508 are controlled by the controller body 101. A tungsten or molybdenum flange 514 is provided between the tungsten or molybdenum crucible 507 and the refractory brick 509. A furnace body 516 is provided below the refractory brick 509. There is a non-matching seal 515 between the furnace body 516 and the tungsten or molybdenum flange 514. There is a wetting seal 511 between the tungsten or molybdenum crucible 507 and the first melt 510. There is a weld seal 517 between the tungsten or molybdenum flange 514 and the tungsten or molybdenum crucible 507.

[0064] As can be seen from the above, the cooling medium enters through the cooling medium inlet 504 and flows out through the cooling medium outlet 505, carrying away the heat and thus controlling the internal temperature of the vacuum melting chamber device 5. The funnel 409 collects the quartz sand and flows it into the top of the spreader 506. The spreader 506 has a guide groove and a guide hole, which evenly distributes the quartz sand and sprinkles it onto the first melt 510, where it melts and flows into the interior of the secondary molding chamber device 6.

[0065] As shown in Figures 1 and 2, the secondary forming chamber device 6 is used to solidify the molten first melt 510 into a solid of a preset specification and shape. The secondary forming chamber device 6 includes a first nitrogen filling port 601, a fourth pressure gauge 602, a fifth image observation 603, a secondary forming tungsten or molybdenum crucible 604, a second melt 605, a forming mold 606, a sixth image observation 607, a first nitrogen outlet 608, a diameter and thickness laser measuring instrument 609, and a driven pulling roller 610. The first nitrogen filling port 601 and the first nitrogen outlet 608 are controlled by the controller body 101 and are connected to the secondary forming chamber device 6.

[0066] As can be seen from the above, nitrogen gas enters the secondary forming tungsten or molybdenum crucible 604 through the first nitrogen filling port 601 and covers and protects the liquid surface of the second melt 605. It then flows out through the second nitrogen outlet 805. The second melt 605 flows out through the gap of the forming mold 606 and solidifies into a solid of a preset specification and shape. It is then vertically guided downward by the driven pulling roller 610.

[0067] As shown in Figures 1 and 2, the cooling chamber device 7 is used to bring solidified solids into the interior of the cooling chamber device 7 to cool and shape them into one of the following: quartz glass tube, quartz glass lump, quartz glass rod, and quartz glass sheet. The cooling chamber device 7 includes quartz glass raw material 701, seventh image observation 702, and electric drawing roller 703. The electric drawing roller 703 is the main power for traction and drawing. The wall thickness and diameter of the quartz glass raw material 701 are controlled by the drawing speed of the electric drawing roller 703.

[0068] As can be seen from the above, the second melt 605 flows out of the forming mold 606 and solidifies into a solid. It is then driven and vertically guided by the driven pulling roller 610 to enter the cooling chamber for cooling and shaping into quartz glass raw material 701. The quartz glass raw material 701 descends and is actively pulled by the electric pulling roller 703 to enter the interior of the tube drawing synchronous cutting chamber device 8.

[0069] As shown in Figures 1 and 2, the synchronous tube cutting chamber device 8 is used for laser cutting of cooled and shaped quartz sand solids. The synchronous tube cutting chamber device 8 includes a second nitrogen inlet 801, a fifth pressure gauge 802, a vertically moving dynamic laser cutter 803, an eighth image observation 804, a second nitrogen outlet 805, and an infrared sensor 806. The second nitrogen inlet 801, the vertically moving dynamic laser cutter 803, and the second nitrogen outlet 805 are all controlled by the controller body 101. The second nitrogen inlet 801 and the second nitrogen outlet 805 are connected to the synchronous tube cutting chamber device 8.

[0070] As can be seen from the above, the quartz glass raw material 701 descends and is clamped and pulled into the interior of the tube-pulling synchronous cutting chamber device 8 by the electric pulling roller 703. The clamp of the up-and-down moving dynamic laser cutting machine 803 holds the quartz glass raw material 701. At this time, the head of the up-and-down moving dynamic laser cutting machine 803 descends with the quartz glass raw material 701. During the descent, the laser is turned on and cuts around the circumference of the quartz glass raw material 701. After the cutting is completed, the laser of the up-and-down moving dynamic laser cutting machine 803 is turned off, the clamp is released, and the quartz glass raw material 701 falls to the connecting vehicle 901. At the same time, the head of the up-and-down moving dynamic laser cutting machine 803 can be reset in multiple axes.

[0071] As shown in Figures 1 and 2, the connecting and stacking device 9 moves the cooled and shaped quartz sand solid to the stacking area. The connecting and stacking device 9 includes a connecting vehicle 901, a slide rail 902, a robotic arm 903, and a pallet 904. The connecting vehicle 901 is equipped with a weight switch to control the sliding start of the connecting vehicle 901.

[0072] As can be seen from the above, limit switches are installed at both ends A and B of the slide rail 902. The limit switch at end A controls the sliding stop of the shuttle 901 and the start of the gripping and stacking of the robotic arm 903, while the limit switch at end B controls the sliding stop of the shuttle 901.

[0073] Quartz glass raw material 701 falls into the shuttle trolley 901. The weight switch closes and the shuttle trolley 901 slides (the limit switch at end B is disconnected). When it reaches point A of the slide rail 902, the limit switch closes and the shuttle trolley 901 stops sliding. Then, the robotic arm 903 begins to grab the quartz glass raw material 701 and stack it onto the tray 904. At the same time, the weight switch of the quartz glass raw material 701 is disconnected as it leaves the shuttle trolley 901, and the shuttle trolley 901 starts to slide. When it reaches point B of the slide rail 902, the limit switch closes and the shuttle trolley 901 stops, waiting for the quartz glass raw material 701 to be cut and fall into the shuttle trolley 901, thus creating a repeated cycle.

[0074] In summary, adding the atmospheric pressure material chamber device 2, the vacuum transition material chamber device 3, and the vacuum feeding material chamber device 4 can remove air from the chamber, further remove gases and pollutants from the air, reduce the pollution of the quartz sand raw material, and thus improve the purity of quartz glass.

[0075] The vacuum melting chamber device 5 is not filled with nitrogen, hydrogen or helium, thereby reducing the oxidation of the tungsten or molybdenum crucible 507 and reducing the hydroxyl content in the quartz glass.

[0076] The secondary forming chamber device 6, separate from the vacuum melting furnace, can increase the maximum drawn outer diameter of quartz tubes to 1 meter. The forming mold 606 can be flexibly changed to realize the production of different types of quartz glass materials, increase the variety of products, change the single product disadvantage of the existing process, and have high flexibility. At the same time, large-size quartz tubes can save the cost of subsequent tube expansion process. Since the outer diameter required for the final application of general quartz tubes is much larger than the drawn tube, the existing process cannot draw extra-large quartz tubes. This process can meet this requirement.

[0077] The tube-pulling synchronous cutting chamber device 8 adopts an automated cutting process and automatically stacks quartz glass, improving production efficiency and capacity.

[0078] A method for producing quartz glass using a vacuum continuous melting apparatus includes:

[0079] Step 1: Open the controller body 101 to make it work. When the first automatic slide valve 202 is opened, the first quartz sand 204 flows into the vacuum transition chamber device 3.

[0080] Step 2: When the first automatic slide gate valve 202 and the second automatic slide gate valve 306 are closed at the same time, the first electric three-way valve 307 connects to the first pressure gauge 303 and the vacuum transition chamber device 3 through electric adjustment of the first vacuum pump 301, and starts the first vacuum pump 301.

[0081] Step 3: When the second automatic slide gate valve 306 is closed, the second electric three-way valve 407 is connected to the second vacuum pump 401 through the electric regulating vacuum feeding chamber device 4, and the second vacuum pump 401 is turned on.

[0082] Step 4: The cooling medium enters through the cooling medium inlet 504 and flows out through the cooling medium outlet 505, carrying away the heat and thus controlling the internal temperature of the vacuum melting chamber device 5.

[0083] Step 5: Nitrogen gas enters the secondary forming tungsten or molybdenum crucible 604 through the first nitrogen filling port 601, and covers and protects the liquid surface of the second melt 605, and flows out through the second nitrogen outlet 805;

[0084] Step 6: The second melt 605 flows out of the forming mold 606 and solidifies into a solid. It is then vertically guided down by the driven pulling roller 610 into the cooling chamber to cool and shape into quartz glass raw material 701.

[0085] Step 7: The quartz glass raw material 701 descends and is pulled into the interior of the tube drawing synchronous cutting chamber device 8 by the clamping of the electric pulling roller 703. The clamping of the up-and-down moving dynamic laser cutting machine 803 holds the quartz glass raw material 701.

[0086] Step 8: Limit switches are installed at both ends A and B of the slide rail 902. The limit switch at end A controls the sliding stop of the shuttle 901 and the start of the gripping and stacking of the robotic arm 903. The limit switch at end B controls the sliding stop of the shuttle 901.

[0087] Furthermore, this design application is applied to the production of quartz glass. This invention provides a method and system for producing quartz glass by vacuum continuous melting, which solves the problems currently faced in the quartz glass production process, such as the easy oxidation of tungsten or molybdenum crucibles in the vacuum melting chamber, the limited types of quartz materials produced, the long production cycle of quartz raw materials, high costs, and insufficient production capacity.

[0088] By adding a vacuum transition chamber device 3, nitrogen, hydrogen, or helium is not required to fill the vacuum melting chamber device 5, resulting in low-hydroxyl quartz glass melt. Through the innovative use of a variable forming mold 606, various quartz glass materials can be flexibly produced, such as: round tubes, round rods, irregularly shaped tubes, irregularly shaped rods, plates, thick-walled tubes, and solid blocks (quartz glass ingots) of various sizes. This connects the currently discontinuous production process through automation or appropriate adjustments, reducing subsequent additional dehydroxylation processes, significantly shortening the production cycle and reducing costs.

[0089] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An apparatus for vacuum continuous melting to produce quartz glass, characterized in that, include: Automatic feeding device (1) sets the feeding quantity through the controller, and automatically stops when the feeding quantity reaches the set value; The atmospheric pressure hopper device (2) feeds the first main body hopper on the atmospheric pressure hopper device (2) through the automatic feeding device (1); The vacuum transition chamber device (3) feeds the second body chamber on the vacuum transition chamber device (3) by opening the atmospheric pressure chamber device (2), and the vacuum transition chamber device (3) feeds the second body chamber by opening the first automatic slide valve (202); The vacuum transition chamber device (3) includes a first vacuum pump (301), a first pressure relief port (302), a first pressure gauge (303), a second image observation (304), a second quartz sand (305), a second automatic slide valve (306), a first electric three-way valve (307), and a second sand level sensor (308). The first electric three-way valve (307) is connected to the first vacuum pump (301), the first pressure relief port (302), and the first pressure gauge (303). The other end of the first pressure relief port (302) is connected to the atmosphere through an air filter. The vacuum feeding chamber device (4) is opened by the vacuum transition chamber device (3) to feed the third body chamber on the vacuum feeding chamber device (4). The vacuum feeding chamber device (4) includes a second vacuum pump (401), a second pressure relief port (402), a second pressure gauge (403), a third image observation (404), a third quartz sand (405), an electric seeding wheel (406), a second electric three-way valve (407), a third sand level sensor (408), and a funnel (409). The other end of the second pressure relief port (402) is connected to the atmosphere through an air filter. The second automatic slide gate valve (306), the electric seeding wheel (406), and the second electric three-way valve (407) are controlled by the controller body (101). A vacuum melting chamber device (5) and a first melt (510) are used to melt multiple quartz sands into a melt. The vacuum melting chamber device (5) includes a third vacuum pump (501), a third pressure gauge (502), a fourth image observation (503), a cooling medium inlet (504), a cooling medium outlet (505), a feeder (506), a tungsten or molybdenum crucible (507), a heater (508), refractory bricks (509), a first melt (510), a wetting seal (511), a mismatch seal (515), insulation (512), and a temperature sensor (513). The medium inlet (504) and heater (508) are controlled by the controller body (101). A tungsten or molybdenum flange (514) is provided between the tungsten or molybdenum crucible (507) and the refractory brick (509). A furnace body (516) is provided below the refractory brick (509). There is a non-matching seal (515) between the furnace body (516) and the tungsten or molybdenum flange (514). There is a wetting seal (511) between the tungsten or molybdenum crucible (507) and the first melt (510). There is a weld seal (517) between the tungsten or molybdenum flange (514) and the tungsten or molybdenum crucible (507). The secondary forming chamber device (6) is used to solidify the molten first melt (510) into a solid of a predetermined specification and shape; Cooling chamber device (7) is used to bring solidified solid into the interior of the cooling chamber device (7) to cool and shape it into a type of quartz glass tube, quartz glass block, quartz glass rod and quartz glass plate; The synchronous cutting chamber device (8) is used for laser cutting of cooled and shaped quartz sand solids; The connecting and stacking device (9) moves the cooled and shaped quartz sand solid to the stacking area.

2. The apparatus for vacuum continuous melting to produce quartz glass according to claim 1, characterized in that: The automatic feeding device (1) includes a controller body (101), on which a first pipe (102) and a second pipe (103) are provided.

3. The apparatus for vacuum continuous melting to produce quartz glass according to claim 2, characterized in that: The atmospheric pressure hopper device (2) includes a first sand level sensor (201), a first automatic slide gate valve (202), a first image observation (203), and a first quartz sand (204). The other end of the first pipe (102) is inside the first quartz sand (204), and the other end of the second pipe (103) is installed directly above the atmospheric pressure hopper device (2). The first sand level sensor (201) is used to sense the position of the first quartz sand (204) and transmit the data to the controller body (101). The first automatic slide gate valve (202) is opened or closed by the controller body (101). The first image observation (203) is used to observe the internal condition of the atmospheric pressure hopper device (2).

4. The apparatus for vacuum continuous melting to produce quartz glass according to claim 3, characterized in that: The secondary molding chamber device (6) includes a first nitrogen inlet (601), a fourth pressure gauge (602), a fifth image observation (603), a secondary molding tungsten or molybdenum crucible (604), a second melt (605), a molding mold (606), a sixth image observation (607), a first nitrogen outlet (608), a diameter and thickness laser measuring instrument (609), and a driven pulling roller (610). The first nitrogen inlet (601) and the first nitrogen outlet (608) are controlled by the controller body (101), and the first nitrogen inlet (601) and the first nitrogen outlet (608) are connected to the secondary molding chamber device (6).

5. The apparatus for vacuum continuous melting to produce quartz glass according to claim 4, characterized in that: The cooling chamber device (7) includes a quartz glass raw material (701), a seventh image observation (702), and an electric pulling roller (703). The electric pulling roller (703) is the main power for traction and pulling. The wall thickness and diameter of the quartz glass raw material (701) are controlled by the pulling speed of the electric pulling roller (703).

6. The apparatus for vacuum continuous melting to produce quartz glass according to claim 5, characterized in that: The tube-pulling synchronous cutting chamber device (8) includes a second nitrogen inlet (801), a fifth pressure gauge (802), a vertically moving dynamic laser cutter (803), an eighth image observation (804), a second nitrogen outlet (805), and an infrared sensor (806). The second nitrogen inlet (801), the vertically moving dynamic laser cutter (803), and the second nitrogen outlet (805) are all controlled by the controller body (101). The second nitrogen inlet (801) and the second nitrogen outlet (805) are connected to the tube-pulling synchronous cutting chamber device (8).

7. The apparatus for vacuum continuous melting production of quartz glass according to claim 6, characterized in that: The connecting and palletizing device (9) includes a connecting vehicle (901), a slide rail (902), a robotic arm (903) and a pallet (904). The connecting vehicle (901) is equipped with a weight switch for controlling the sliding start of the connecting vehicle (901).

8. A method for producing quartz glass using the vacuum continuous melting apparatus according to any one of claims 1-7, comprising: Step 1: Open the controller body 101 to make it work. When the first automatic slide valve 202 is opened, the first quartz sand 204 flows into the vacuum transition chamber device 3. Step 2: When the first automatic slide gate valve 202 and the second automatic slide gate valve 306 are closed at the same time, the first electric three-way valve 307 connects to the first pressure gauge 303 and the vacuum transition chamber device 3 through electric adjustment of the first vacuum pump 301, and starts the first vacuum pump 301. Step 3: When the second automatic slide gate valve 306 is closed, the second electric three-way valve 407 is connected to the second vacuum pump 401 through the electric regulating vacuum feeding chamber device 4, and the second vacuum pump 401 is turned on. Step 4: The cooling medium enters through the cooling medium inlet 504 and flows out through the cooling medium outlet 505, carrying away the heat and thus controlling the internal temperature of the vacuum melting chamber device 5. Step 5: Nitrogen gas enters the secondary forming tungsten or molybdenum crucible 604 through the first nitrogen filling port 601, and covers and protects the liquid surface of the second melt 605, and flows out through the second nitrogen outlet 805; Step 6: The second melt 605 flows out of the forming mold 606 and solidifies into a solid. It is then vertically guided down by the driven pulling roller 610 into the cooling chamber to cool and shape into quartz glass raw material 701. Step 7: The quartz glass raw material 701 descends and is pulled into the interior of the tube drawing synchronous cutting chamber device 8 by the clamping of the electric pulling roller 703. The clamping of the up-and-down moving dynamic laser cutting machine 803 holds the quartz glass raw material 701. Step 8: Limit switches are installed at both ends A and B of the slide rail 902. The limit switch at end A controls the sliding stop of the shuttle 901 and the start of the gripping and stacking of the robotic arm 903. The limit switch at end B controls the sliding stop of the shuttle 901.