Normally-open solenoid valves and mass flow controllers having normally-open solenoid valves
A cost-effective and accurate normally-open solenoid valve design for mass flow controllers addresses the limitations of piezo-based actuators and complex circuitry in conventional solenoid valves, achieving efficient gas flow control through a balanced magnetic and spring-based mechanism.
WO2026147926A1PCT designated stage Publication Date: 2026-07-09ILLINOIS TOOL WORKS INC
View PDF 0 Cites 0 Cited by
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- ILLINOIS TOOL WORKS INC
- Filing Date
- 2025-12-30
- Publication Date
- 2026-07-09
Smart Images
Figure US2025061551_09072026_PF_FP_ABST
Abstract
Disclosed example normally-open proportional valves include: a body comprising an inlet, an outlet, and an interior volume; a poppet configured to move within the interior volume between a seated position in which the poppet blocks gas flow between the inlet and the outlet, a fully opened position in which gas is permitted to flow between the inlet and the outlet, and positions between the seated position and the fully opened position; a biasing element configured to bias the poppet toward the seated position; a solenoid having a coil and a core; a permanent magnet positioned to bias the poppet away from the seated position; and control circuitry configured to selectively control the solenoid to control a net force of the permanent magnet and the solenoid on the poppet to control a position of the poppet.
Need to check novelty before this filing date? Find Prior Art