Wet process plant mobile vision shield

Abstract

The application discloses a kind of wet process equipment mobile vision protection devices, comprising: protective cover, protective plate, sealing protection ring and air pipe assembly;Protective plate is fixedly connected at one end of protective cover, and is provided with mounting through hole;Sealing protection ring includes: first ring body and second ring body;First ring body and second ring body are interconnected;Sealing protection ring is sealingly connected with mounting through hole;Multiple overflow notches, multiple overflow flow channels, multiple flow guide notches are opened in first ring body, inner wall is sealingly connected with lens mounting portion;Annular positive pressure gas static pressure distribution groove is opened in the inner wall of the connecting portion of first ring body and second ring body;Second ring body is matched with the gap of lens;Visual camera is fixedly arranged in protective cover.The gas is distributed by two-stage static pressure of protective cover and sealing protection ring, and forms low-speed annular laminar flow air curtain along the cylindrical outer wall of lens, protects the field of view near camera lens, and the flow is controllable, low-flow energy-saving, improves the online operation rate of mobile vision.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor wafer wet processing, in particular to a wet equipment mobile vision protection device. BACKGROUND

[0002] With the development of technology, the attention paid to semiconductor equipment is increasing, and the degree of automation of semiconductor equipment is increasing. Visual cameras are increasingly used in semiconductor equipment.

[0003] At present, in the field of camera protection, the visual camera protection uses multi-path large-flow nozzles to spray turbulent gas to form a wind curtain to blow the front area of the lens for shooting. The multi-nozzle turbulent gas wind curtain is rapidly diffused after being sprayed from the nozzle, and the airflow only covers the area near the nozzle, the airflow utilization rate is very low, and the airflow energy consumption is high. The gap between the multiple nozzles cannot effectively protect the entire lens area, and the turbulent mixing and stirring form local vortex in front of the lens, which wraps part of the water and splashes it to the lens, which is quickly blown dry by the subsequent turbulent airflow, leaving water marks and increasing the cleaning work of the visual camera lens. At the same time, the visual camera protection uses turbulent airflow, the flow mixing is perpendicular to the lens column body at <90°, the wind curtain directly blows the lens end face, and the wind curtain and the lens end face arc interface, the wind curtain flow process on the lens is inconsistent and interferes with turbulence and vortex, the compensation method increases the wind curtain flow to disperse the vortex, the airflow consumption is large, the use cost is high, and the use is limited in small space. SUMMARY

[0004] In order to solve the above problems existing in the prior art, the present application provides a wet equipment mobile vision protection device. The technical problem to be solved by the present application is solved by the following technical scheme:

[0005] The first aspect of the embodiment of the present application provides a wet equipment mobile vision protection device, which comprises a protection cover, a protection plate, a sealing protection ring and a gas pipe assembly.

[0006] The protection plate is fixedly connected to one end of the protection cover and is in sealing connection with the protection cover, and an installation through hole is formed therein.

[0007] The sealing protection ring comprises a first ring body and a second ring body.

[0008] The first ring body and the second ring body are coaxially arranged and have the same outer diameter, the inner diameter of the first ring body is smaller than that of the second ring body, and the other end of the first ring body is connected to one end of the second ring body.

[0009] The outer wall of the sealing protection ring is in sealing connection with the inner wall of the installation through hole.

[0010] The first ring body is provided with a plurality of overflow notches on the radial end face facing the inside of the protective cover, a plurality of overflow flow guide channels are arranged on the inner wall, a plurality of flow guide notches are arranged on the radial end face facing away from the inside of the protective cover, and the first ring body is sleeved on the lens mounting part of the visual camera to realize sealed connection between the inner wall and the lens mounting part, and the radial end face facing away from the inside of the protective cover is tightly pressed against the radial end face of the lens end part close to the lens mounting part.

[0011] An annular positive pressure gas static pressure distribution groove is arranged on the inner wall at the connection between the first ring body and the second ring body.

[0012] The inner wall of the second ring body is gap-fitted with the outer wall of the lens.

[0013] The overflow flow guide channels are in communication with the overflow notches and the flow guide notches.

[0014] The visual camera is fixedly arranged in the protective cover.

[0015] The air pipe assembly is arranged at the other end of the protective cover, is in sealed connection with the protective cover, and is in communication with the inside of the protective cover.

[0016] In an embodiment of the present application, the overflow flow guide channels are located between the overflow notches and the flow guide notches, and the long axis is parallel to the axial direction of the sealing protective ring.

[0017] The overflow notches and the flow guide notches are oppositely arranged.

[0018] In an embodiment of the present application, the number of the overflow notches is four, and the overflow notches are uniformly and symmetrically distributed.

[0019] In an embodiment of the present application, a labyrinth sealing groove is arranged on the outer wall of the protective cover in the circumferential direction.

[0020] A sealing protrusion matched with the labyrinth sealing groove is arranged on the inner wall of the protective cover in the circumferential direction.

[0021] In an embodiment of the present application, a protective electrical connector for wall protection of a communication and power supply network line is further arranged on the protective cover.

[0022] The communication and power supply network line is in sealed connection with the protective electrical connector, and is electrically connected with the visual camera through the protective electrical connector.

[0023] In an embodiment of the present application, the protective electrical connector comprises two connector fastening nuts, a wire passing connector body and two wire passing sealing rings.

[0024] One end of the connector fastening nut is a nut part, and the other end is provided with a wire passing through hole in communication with the nut part.

[0025] The sealing ring is arranged in the nut part;

[0026] The wire-through joint body is provided with a wire-through hole, and two ends are threadedly connected with the nut part;

[0027] The nut part presses the wire-through sealing ring on the end of the wire-through joint body, so that the joint fastening nut and the wire-through joint body form a seal;

[0028] The communication power supply network line passes through the wire-through hole and the wire-through sealing ring, forms a seal with the wire-through sealing ring, and passes through the wire-through hole;

[0029] One of the joint fastening nuts is arranged in the protective cover, and the other joint fastening nut is arranged outside the protective cover; the wire-through joint body is sealingly and fixedly connected with the protective cover through the joint sealing ring on the outer wall of the wire-through joint body.

[0030] In an embodiment of the present application, the air pipe assembly comprises a throttle valve and a positive pressure air pipe.

[0031] The throttle valve is in communication and sealing connection with the other end of the protective cover;

[0032] The positive pressure air pipe is in communication and sealing connection with the throttle valve.

[0033] In an embodiment of the present application, a camera connecting plate is fixedly arranged in the protective cover;

[0034] The camera connecting plate is fixedly connected with the inner wall of the protective cover and the protective plate, and is fixedly connected with the visual camera.

[0035] In an embodiment of the present application, an adapter plate is arranged on the outer wall of the protective cover;

[0036] The adapter plate is used to be connected with a mechanical arm.

[0037] In an embodiment of the present application, further comprising a mechanical arm, a visual industrial computer, a positive pressure electromagnetic valve and a PLC controller;

[0038] The mechanical arm is electrically connected with the PLC controller;

[0039] The PLC controller is electrically connected with the visual industrial computer and the positive pressure electromagnetic valve;

[0040] The visual industrial computer is electrically connected with the communication power supply network line;

[0041] The positive pressure electromagnetic valve is connected with the air pipe assembly.

[0042] The present application has the following advantages:

[0043] In the present application, when the protective cover needs to enter the semiconductor wet process environment, the positive pressure gas enters the protective cover through the air pipe assembly and flows to the sealing protective ring, the gas passes through the protective cover and the sealing protective ring to distribute the airflow in two stages of static pressure, the low flow annular laminar flow is formed between the camera lens and the sealing protective ring and the slit of the protective plate, the low-speed annular laminar flow curtain is formed along the cylindrical outer wall of the lens, the full-area protection can be formed, in the lens end surface area, the laminar flow curtain is stably diffused to form a local low-flow positive pressure wind field, the water mist is dispersed to protect the field of view near the camera lens, the vortex turbulence is avoided to form water marks, the camera lens near the field of view is self-cleaning protected, the flow is controllable, low-flow energy-saving, and the online operation rate of the mobile vision is improved.

[0044] Additional features and advantages of the application will be set forth in the description that follows, and in part will become apparent to those skilled in the art upon examination of the following or can be learned by practice of the application. The objectives and other advantages of the application can be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

[0045] The technical solutions of the present application are described in detail below by means of the drawings and examples. BRIEF DESCRIPTION OF DRAWINGS

[0046] The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application. In the drawings:

[0047] Figure 1 A structure schematic diagram of a wet process equipment mobile vision protection device provided for an embodiment of the present application is shown in the figure.

[0048] Figure 2 A cross-sectional structure schematic diagram of a wet process equipment mobile vision protection device provided for an embodiment of the present application is shown in the figure.

[0049] Figure 3 A structure schematic diagram of a sealing protective ring provided for an embodiment of the present application is shown in the figure.

[0050] Figure 4 A three-dimensional structure schematic diagram of a sealing protective ring provided for an embodiment of the present application is shown in the figure.

[0051] Figure 5 A cross-sectional structure schematic diagram of a sealing protective ring provided for an embodiment of the present application is shown in the figure.

[0052] Figure 6 A gas flow distribution schematic diagram of a sealing protective ring provided for an embodiment of the present application is shown in the figure.

[0053] Figure 7A cross-sectional structure diagram of the protective electric connector provided by the embodiment of the present application is provided.

[0054] Figure 8 A schematic diagram of the internal structure of the protective cover provided by the embodiment of the present application is provided.

[0055] Figure 9 A use state schematic diagram of the wet process equipment mobile visual protection device provided by the embodiment of the present application is provided.

[0056] Legend of reference signs:

[0057] 10-protective cover; 20-protective plate; 21-mounting through hole; 22-labyrinth seal groove; 30-seal protection ring; 31-overflow notch; 32-overflow flow guide; 33-positive pressure gas static pressure distribution groove; 34-first ring body; 35-second ring body; 36-flow guide notch; 40-air pipe assembly; 41-throttle valve; 42-positive pressure air pipe; 50-visual camera; 51-lens; 52-lens mounting portion; 60-communication power supply network line; 70-protective electric connector; 71-joint fastening nut; 72-threaded joint body; 73-threaded seal ring; 74-threading through hole; 75-threading through hole; 76-joint seal ring; 80-camera connecting plate; 81-adaptor plate; 90-robotic arm; 91-visual industrial computer; 92-positive pressure electromagnetic valve; 93-PLC controller. DETAILED DESCRIPTION

[0058] The present application will be further described in conjunction with specific embodiments, but the embodiments of the present application are not limited thereto.

[0059] As shown in Figure 1 , Figure 2 and Figure 3 , the embodiment of the present application provides a wet process equipment mobile visual protection device, which comprises a protective cover 10, a protective plate 20, a seal protection ring 30 and an air pipe assembly 40.

[0060] The protective plate 20 is fixedly connected to one end of the protective cover 10, and the protective plate 20 is sealingly connected to the protective cover 10. A mounting through hole 21 is formed in the protective plate 20. A labyrinth seal groove 22 is formed in the outer wall of the protective plate 20 in a circumferential direction. A sealing protrusion matching the shape of the labyrinth seal groove 22 is arranged on the inner wall of the protective cover 10 in a circumferential direction. The outer wall of the side edge of the protective plate 20 forms a labyrinth mechanical seal with the protective cover 10, so as to prevent the internal positive pressure of the protective cover 10 from leaking out and prevent external mist from invading.

[0061] As shown in Figure 3 , Figure 4 and Figure 5As shown, the sealing protection ring 30 is made of elastic material, and is inserted into the mounting hole 21, and the outer wall of the sealing protection ring 30 is elastically sealed with the inner wall of the mounting hole 21. The sealing protection ring 30 comprises a first ring body 34 and a second ring body 35. The first ring body 34 and the second ring body 35 are coaxially arranged and have the same outer diameter, the inner diameter of the first ring body 34 is smaller than that of the second ring body 35, and the other end of the first ring body 34 is connected with one end of the second ring body 35. The outer walls of the first ring body 34 and the second ring body 35 are elastically sealed with the inner wall of the mounting hole 21.

[0062] A plurality of overflow notches 31 are formed on the radial end face of the first ring body 34 facing the inside of the protective cover 10, a plurality of overflow flow channels 32 are arranged on the inner wall of the first ring body 34, a plurality of flow notches 36 are formed on the radial end face of the first ring body 34 facing away from the inside of the protective cover 10, the first ring body 34 is sleeved on the lens mounting portion 52 of the visual camera 50, so that the inner wall of the first ring body 34 is sealingly connected with the lens mounting portion 52, and the radial end face of the first ring body 34 facing away from the inside of the protective cover 10 is also sealingly pressed against the end portion of the lens 51 close to the lens mounting portion 52. Here, the lens mounting portion 52 refers to the mounting portion on the camera body, the outer thread of the lens 51 is threadedly connected with the inner thread of the lens mounting portion 52, and the end portion of the lens 51 close to the lens mounting portion 52 refers to the end portion of the lens 51 close to the lens mounting portion 52 except the outer thread of the lens 51.

[0063] Here, the sealing protection ring 30 is sleeved on the lens mounting portion 52 of the visual camera 50, so that the inner wall of the sealing protection ring 30 is sealingly connected with the lens mounting portion 52. The inner wall of the sealing protection ring 30 sealingly clamps the lens mounting portion 52 to form elastic sealing.

[0064] An annular positive pressure gas static pressure distribution groove 33 is formed on the inner wall of the connection between the first ring body 34 and the second ring body 35. The inner wall of the second ring body 35 is gap-fitted with the outer wall of the lens 51.

[0065] The visual camera 50 is fixedly arranged in the protective cover 10. The air pipe assembly 40 is arranged at the other end of the protective cover 10, and is sealingly connected with the protective cover 10 and communicates with the inside of the protective cover 10.

[0066] In this embodiment, as shown in Figure 6As shown, the positive pressure gas enters the protective cover 10 through the trachea assembly 40, flows to one end of the protective plate 20, enters the structure of the sealing protective ring 30 through the overflow notch 31, and then enters the annular positive pressure gas static pressure distribution groove 33 through the plurality of overflow flow channels 32 to mix the multiple gas flows, form an annular gas flow, and then flow out through the annular slit between the inner wall of the second ring body 35 and the outer wall of the lens 51, and the outflowing gas flow forms a low-flow annular laminar flow curtain, which surrounds the outer wall of the lens 51 and flows along the outer wall of the lens 51 to the lens surface of the lens 51. In the end surface area of the lens 51, the laminar flow curtain stably diffuses to form a local low-flow positive pressure wind field. As shown in Figure 6 the arrows in the figure show the air distribution and flow direction.

[0067] In this embodiment, the protective cover 10 and the protective plate 20 form a first-stage static pressure cavity, and the overflow notch 31, the overflow flow channel 32, and the positive pressure gas static pressure distribution groove 33 of the sealing protective ring 30 form a second-stage static pressure cavity. The positive pressure clean gas is distributed through two stages of static pressure, and the low-flow laminar flow is formed by the low-flow annular laminar flow curtain flowing out through the annular slit of the outer wall of the lens 51. The outer wall surface of the lens 51 forms a positive pressure protection, and in the end surface area of the lens 51, the laminar flow curtain stably diffuses to form a local low-flow positive pressure wind field (as shown in Figure 6 the lower end arrow), which disperses the water mist from the clean protection visual camera 50 lens 51 near the field of view, prevents particulate matter and chemical vapor from depositing on the surface of the lens 51, protects the visual camera 50 from working reliably in a wet environment, and prolongs the service life of the camera.

[0068] Further, the overflow flow channel 32 is located between the overflow notch 31 and the flow guide notch 36, and the long axis of the overflow flow channel 32 is parallel to the axial direction of the sealing protective ring 30. The cross section of the overflow flow channel 32 along the short axis is an arc surface. The overflow flow channel 32 penetrates in the axial direction, and the overflow notch 31 and the flow guide notch 36 are oppositely arranged. The overflow notch 31 and the flow guide notch 36 both penetrate in the radial direction, and the two ends of the overflow flow channel 32 are connected with the overflow notch 31 and the flow guide notch 36, respectively.

[0069] Preferably, the groove wall of the positive pressure gas static pressure distribution groove 33 close to the lens 51 is flush with the radial end surface of the first ring body 34 facing away from the inside of the protective cover 10.

[0070] Preferably, the number of the overflow notches 31 is four, and they are uniformly and symmetrically distributed. Correspondingly, the number of the flow guide notches 36 is four, and they are uniformly and symmetrically distributed, and the number of the overflow flow channels 32 is four, and they are uniformly and symmetrically distributed. Here, the gas flow in the protective cover 10 can enter the sealing protective ring 30 more uniformly, so as to flow out more uniformly.

[0071] Further, as shown in Figure 1 and Figure 7As shown, the protective cover 10 is further provided with a protective electrical connector 70 for passing through the wall of the communication power supply network line 60. The communication power supply network line 60 is in sealed connection with the protective electrical connector 70, and the communication power supply network line 60 passes through the protective electrical connector 70 and is in electrical connection with the visual camera 50. The protective electrical connector 70 seals the communication power supply network line 60 to prevent external water vapor from entering the protective cover 10.

[0072] Preferably, the protective electrical connector 70 comprises two joint fastening nuts 71, a wire passing joint body 72 and two wire passing sealing rings 73.

[0073] One end of the joint fastening nut 71 is a nut portion, and the other end is provided with a wire passing through hole 74 in communication with the nut portion. The sealing ring is arranged in the nut portion.

[0074] The wire passing joint body 72 is provided with a wire passing through hole 75, and the two ends of the wire passing joint body 72 are in threaded connection with the nut portion. The nut portion tightly presses the wire passing sealing ring 73 on the end portion of the wire passing joint body 72 to form a seal between the joint fastening nut 71 and the wire passing joint body 72.

[0075] The communication power supply network line 60 passes through the wire passing through hole 74 and the wire passing sealing ring 73, and the communication power supply network line 60 is in sealed connection with the wire passing sealing ring 73 and passes through the wire passing through hole 75. The wire passing sealing ring 73 clamps the communication power supply network line 60 to form an elastic static sealing protection.

[0076] One of the joint fastening nuts 71 passes into the protective cover 10, and the other joint fastening nut 71 is located outside the protective cover 10. A part of the wire passing joint body 72 passes into the protective cover 10 with the joint fastening nut 71, and the wire passing joint body 72 is in sealed fixed connection with the protective cover 10 through the joint sealing ring 76 on the outer wall of the wire passing joint body 72. The joint fastening nut 71 locks the wire passing sealing ring 73, and the wire passing sealing ring 73 clamps the communication power supply network line 60 in a ring structure, which is convenient for use, assembly and maintenance.

[0077] Further, as shown in the drawings, Figure 8 The camera connecting plate 80 is fixedly arranged in the protective cover 10. The camera connecting plate 80 is in fixed connection with the inner wall of the protective cover 10 and the protective plate 20, and the camera connecting plate 80 is in fixed connection with the visual camera 50.

[0078] In this embodiment, the visual camera 50 conducts heat dissipation through the camera connecting plate 80, and the protective cover 10 has multiple heat dissipation modes such as static pressure overflow convection heat dissipation, to form multiple levels of conduction heat dissipation amplification and increase the heat dissipation area of the visual camera 50.

[0079] Further, as shown in the drawings, Figure 8As shown, the air pipe assembly 40 comprises a throttle valve 41 and a positive pressure air pipe 42.

[0080] The throttle valve 41 is in communication and sealed connection with the other end of the protective cover 10; the positive pressure air pipe 42 is in communication and sealed connection with the throttle valve 41. The air pipe assembly 40 is arranged on the two ends of the protective cover 10 opposite to the sealing protective ring 30, so that the air pipe assembly 40 is opposite to the camera lens 51, and the camera lens 51 is downward in use, and the air flow flows downward to increase the air flow power. The throttle valve 41 can adjust the air flow, so as to adjust the minimum positive pressure of the protective cover 10, and then the low flow annular laminar flow can be controlled.

[0081] Further, as shown in Figure 1 and Figure 2 The protective cover 10 is provided with an adapter plate 81 on the outer wall; the adapter plate 81 is used for connecting with a mechanical arm 90. The mechanical arm 90 drives the protective cover 10 to enter the semiconductor wet process environment for work or leave the semiconductor wet process environment.

[0082] As shown in Figure 9 In this embodiment, it also comprises a mechanical arm 90, a visual industrial computer 91, a positive pressure electromagnetic valve 92 and a PLC controller 93.

[0083] The mechanical arm 90 is electrically connected with the PLC controller 93; the PLC controller 93 is electrically connected with the visual industrial computer 91 and the positive pressure electromagnetic valve 92; the visual industrial computer 91 is electrically connected with the communication and power supply network 60; the positive pressure electromagnetic valve 92 is connected with the air pipe assembly 40. Specifically, the positive pressure electromagnetic valve 92 is connected with the positive pressure air pipe 42.

[0084] In this embodiment, the PLC controller 93 controls the mechanical arm 90 to connect the adapter plate 81, the mechanical arm 90 drives the protective cover 10 to enter the semiconductor wet process environment, the PLC controller 93 controls the positive pressure electromagnetic valve 92 to open, the clean compressed air enters the protective cover 10 through the positive pressure air pipe 42, the static pressure overflows to form the low flow annular laminar flow air curtain along the wall of the lens 51 through the sealing protective ring 30 and the camera lens 51, to form the low-speed annular laminar flow air curtain along the cylindrical outer wall of the lens 51, to form the local low flow positive pressure air field by the stable diffusion of the laminar flow air curtain in the end surface area of the lens 51. The PLC controller 93 controls the visual industrial computer 91 to work, the visual industrial computer 91 controls the visual camera 50 to work, the mechanical arm 90 drives the protective cover 10 to leave the semiconductor wet process environment, and the PLC controller 93 controls the positive pressure electromagnetic valve 92 to close.

[0085] In the description of the present application, it is to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0086] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0087] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0088] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "under", "below" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0089] In the description of the application, reference has been made to descriptive terms such as "one embodiment", "some embodiments", "an example", "a specific example" or "some examples" meant to connote "one" or "some" but not "all" the features, structures, materials, or characteristics described in connection with these embodiments or examples. The use of terms such as "first", "second" and "third" does not limit the quantity or order of those features, structures, materials or characteristics, but rather such terms are used only as a shorthand notation. Thus, these descriptive terms include both singular and plural, and can also include one or more examples of the described feature, structure, material or characteristic. The descriptive terms are also intended to cover all the possible combinations of the features, structures, materials or characteristics described herein. Furthermore, descriptions of a particular feature, structure, material or characteristic do not signify that all embodiments or examples have the described feature, structure, material or characteristic, but rather that some embodiments or examples can include the described feature, structure, material or characteristic.

[0090] Obviously, many modifications and variations of the present application are possible in light of the above teachings. It is, therefore, to be understood that within the scope of the claims and their equivalents, the application can be practiced otherwise than as specifically described.

Claims

1. A wet process plant mobile vision shield, characterized by, The utility model relates to a protective cover, protective board, seal protection ring and trachea assembly, and it is characterized by comprising: The protective board is fixedly connected to one end of the protective cover and is in sealing connection with the protective cover, and an installation through hole is formed in the protective board; The seal protection ring comprises a first ring body and a second ring body; The first ring body and the second ring body are coaxially arranged and have the same outer diameter, the inner diameter of the first ring body is smaller than that of the second ring body, and the other end of the first ring body is connected to one end of the second ring body; The outer wall of the seal protection ring is in sealing connection with the inner wall of the installation through hole; The first ring body is provided with a plurality of overflow notches on the radial end face facing the inside of the protective cover, a plurality of overflow flow guide channels are arranged on the inner wall, a plurality of flow guide notches are formed on the radial end face away from the inside of the protective cover, the first ring body is sleeved on the lens mounting part of the visual camera so that the inner wall is in sealing connection with the lens mounting part, and the radial end face away from the inside of the protective cover is in sealing compression with the radial end face of the lens end part close to the lens mounting part; An annular positive pressure gas static pressure distribution groove is formed in the inner wall at the connection between the first ring body and the second ring body; The inner wall of the second ring body is in clearance fit with the outer wall of the lens; The overflow flow guide channels are in communication with the overflow notches and the flow guide notches; The visual camera is fixedly arranged in the protective cover; The trachea assembly is arranged at the other end of the protective cover, is in sealing connection with the protective cover, and is in communication with the inside of the protective cover. The overflow flow guide channels are located between the overflow notches and the flow guide notches, and the long axis is parallel to the axial direction of the seal protection ring; 2. A wet process plant mobile vision shield as claimed in claim 1, wherein, The overflow notches and the flow guide notches are oppositely arranged. The number of the overflow notches is four, and they are uniformly and symmetrically distributed.

3. A wet process plant mobile vision shield as defined in claim 1, wherein, A labyrinth seal groove is formed in the outer wall of the protective cover in the circumferential direction; 4. A wet process plant mobile vision shield as defined in claim 1, wherein, A sealing protrusion matched with the labyrinth seal groove is arranged on the inner wall of the protective cover in the circumferential direction. The protective cover is further provided with a protective electrical connector for wall protection of a communication and power supply network line; 5. A wet process plant mobile vision shield as defined in claim 1, wherein, The communication and power supply network line is in sealing connection with the protective electrical connector, passes through the protective electrical connector, and is electrically connected with the visual camera. The protective electrical connector comprises two joint fastening nuts, a wire passing joint body and two wire passing sealing rings; 6. A wet plant mobile vision shield as claimed in claim 5, wherein, One end of the joint fastening nut is a nut part, and the other end is provided with a wire passing through hole in communication with the nut part; The sealing ring is arranged in the nut part; The wire passing joint body is provided with a wire passing through hole, and the two ends are in threaded connection with the nut part; The nut part compresses the wire passing sealing ring on the end part of the wire passing joint body, so that the joint fastening nut and the wire passing joint body form a seal; The communication and power supply network line passes through the wire passing through hole and the wire passing sealing ring, forms a seal with the wire passing sealing ring, and passes through the wire passing through hole; One of the joint fastening nuts penetrates into the protective cover, and the other joint fastening nut is located outside the protective cover, and the wire passing joint body is in sealing and fixed connection with the protective cover through the joint sealing ring on the outer wall of the wire passing joint body. The trachea assembly comprises a throttle valve and a positive pressure trachea; 7. A wet process plant mobile vision shield as defined in claim 1 wherein, The throttle valve is in communication and sealing connection with the other end of the protective cover; ​ The positive pressure air pipe is in communication with the throttle valve and is in sealing connection.

8. A wet process plant mobile vision shield as defined in claim 1, wherein, A camera connecting plate is fixedly arranged in the protective cover. The camera connecting plate is fixedly connected with the inner wall of the protective cover and the protective plate, and is fixedly connected with the visual camera.

9. A wet process plant mobile vision shield as defined in claim 1 wherein, An adapter plate is arranged on the outer wall of the protective cover. The adapter plate is used for being connected with a mechanical arm.

10. A wet process plant mobile vision shield as defined in claim 5 wherein, Further comprising: a mechanical arm, a visual industrial computer, a positive pressure electromagnetic valve and a PLC controller; The mechanical arm is electrically connected with the PLC controller; The PLC controller is electrically connected with the visual industrial computer and the positive pressure electromagnetic valve; The visual industrial computer is electrically connected with the communication power supply network cable; The positive pressure electromagnetic valve is connected with the air pipe assembly.

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