Ultrasonic-assisted ultrafast laser glass trepanning device and method

Abstract

The invention discloses an ultrasonic-assisted ultrafast laser glass trepanning device and method, and relates to the field of laser beam machining.The ultrasonic-assisted ultrafast laser glass trepanning device comprises a main box body, an operation cavity is formed in the main box body, a laser generating device is arranged on one side in the operation cavity, and a material conveying line is arranged at the position, located in the middle of the operation cavity, of the main box body; a fixing assembly is arranged at the top of the material conveying line, and a jacking assembly is arranged between the fixing assembly and the material conveying line. A discharging table top is arranged in the middle of the material conveying line, a feeding sensor is arranged at the front end of the discharging table top, an ultrasonic assembly is arranged on the side, located on the discharging table top, in the operation cavity, a lifting assembly is arranged on the side, away from the discharging table top, of the ultrasonic assembly, and a width adjusting assembly is arranged on the side, away from the ultrasonic assembly, of the lifting assembly. An auxiliary adjusting wheel is arranged on one side of the bottom of the width adjusting assembly. According to the glass cutting device, assembly line operation is adopted for production, labor dependence is reduced, the glass cutting speed is ultra-high, meanwhile, the higher machining precision is achieved, and the cutting quality is improved.

Description

Technical Field

[0001] The present invention relates to the field of laser beam processing, and in particular, to an ultrasonic-assisted ultrafast laser glass drilling device and method. Background Art

[0002] There are obvious deficiencies in traditional glass drilling methods. For example, in mechanical drilling, the glass is brittle and hard. When using a glass drill bit to drill, if the operation is improper, such as too fast feed speed or too much pressure, the glass is prone to break due to local stress concentration. The glass has a high hardness, and during the drilling process, the glass drill bit needs to frequently rub against the glass surface, resulting in fast wear of the drill bit and frequent replacement of the drill bit. Moreover, to prevent the glass from breaking, the drilling speed is usually slow, resulting in low overall drilling efficiency. For a large number of drilling tasks, it will consume more time and manpower. While water jet machining for cutting glass has problems such as complex processes, low precision and surface quality, and high costs of a large amount of water and abrasives. Summary of the Invention

[0003] In order to solve the problems that the current conventional glass drilling devices rely on manpower to increase costs, and at the same time, the cutting speed is slow and the processing precision is insufficient, resulting in reduced cutting quality, the present invention provides an ultrasonic-assisted ultrafast laser glass drilling device and method.

[0004] The ultrasonic-assisted ultrafast laser glass drilling device and method provided by the present invention adopt the following technical solutions: An ultrasonic-assisted ultrafast laser glass drilling device includes a main box body. An operation cavity for the drilling process is provided inside the main box body. A laser generating device for thinning the glass plate is arranged on one side inside the operation cavity. A material transportation line is arranged in the middle of the main box body in the operation cavity. A material plate for processing is arranged on the surface of the material transportation line. A fixing component for clamping the material plate is arranged above the material transportation line. A lifting component is arranged between the fixing component and the material transportation line. A material placing table for placing the material plate is arranged in the middle of the material transportation line. A material arrival sensor for sensing the placement state of the material plate is arranged at the front end of the material placing table. An ultrasonic component for performing a de-sheeting process on the thinned material plate is arranged on one side of the material placing table inside the operation cavity. A lifting component for driving the ultrasonic component to move longitudinally is arranged on the side of the ultrasonic component away from the material placing table. A width adjustment component for driving the lifting component to move horizontally and fixedly connected to the main box body is arranged on the side of the lifting component away from the ultrasonic component. An auxiliary adjustment wheel for manually adjusting the width adjustment component is arranged on one side at the bottom of the width adjustment component.

[0005] By adopting the above technical solution, the material transportation line transports the material plate to be processed into the operation cavity, and the laser generating device emits laser to cut the material plate, and the cutting points are still in a tightly connected state. Then, the material transportation line transports the preliminarily processed material plate to the surface of the discharging table, and then the lifting assembly drives the fixing assembly to move to a position flush with the material plate. The fixing assembly moves to clamp and fix the material plate. Then, the lifting assembly and the width adjusting assembly cooperate to move the ultrasonic assembly to a position aligned with the cutting points of the material plate, and the ultrasonic stamping method is used to perform the de-sheeting process on the material plate.

[0006] Preferably, the ultrasonic assembly includes an installation housing fixedly arranged on one side of the lifting assembly. A fixed inner housing is fixedly arranged inside the installation housing. An ultrasonic generator for generating ultrasonic waves is fixedly arranged inside the fixed inner housing. An ultrasonic tool head for conducting vibration force is telescopically arranged inside the fixed inner housing. A plurality of auxiliary tool heads are arranged in a surrounding manner at the bottom of the fixed inner housing at the position of the ultrasonic tool head.

[0007] By adopting the above technical solution, the outside of the installation housing is connected to the lifting assembly and the inside is connected to the ultrasonic generator, so that the whole ultrasonic emitter moves up and down. At the same time, the ultrasonic tool head conducts the high-frequency vibration force generated by the ultrasonic generator and contacts the material plate, so as to process and separate the laser hole traces on the surface of the material plate.

[0008] Preferably, the ultrasonic tool head includes a pressure block telescopically arranged at the bottom of the fixed inner housing. A conduction rod fixedly connected to the ultrasonic generator is inserted through the middle of the pressure block. A contact surface abutting against the material plate is fixedly arranged at the bottom of the conduction rod. A plurality of transverse grooves are formed on the surface of the contact surface around the conduction rod. A plurality of expansion plates are movably arranged in the plurality of transverse grooves.

[0009] By adopting the above technical solution, the opening of the transverse grooves provides a limiting space for the transverse movement of the expansion plates. At the same time, the pressure block is movably inserted into the conduction rod, so that the pressure block moves along the conduction rod to drive the expansion plates to move.

[0010] Preferably, longitudinal grooves are formed at the positions of the conduction rod corresponding to the plurality of transverse grooves. A plurality of inclined support rods are movably arranged in the plurality of longitudinal grooves. The plurality of inclined support rods are respectively rotatably connected to the plurality of expansion plates to realize transverse extension with vibration thrust.

[0011] By adopting the above technical solution, the opening of the longitudinal grooves provides a sliding track for the movement of the inclined support rods and limits the movement of the inclined support rods at the same time, so that the inclined support rods convert the longitudinal thrust received into transverse thrust, causing the expansion plates to move transversely.

[0012] Preferably, a ring groove is formed around the through hole of the conduction rod at the bottom of the pressure block, an extension torsion spring is fixedly arranged in the ring groove, and the bottom of the extension torsion spring is fixedly connected to the tops of a plurality of inclined support rods.

[0013] By adopting the above technical solution, the formation of the ring groove provides a fixed point for the installation of the extension torsion spring. At the same time, when the pressure block presses down, it pushes the extension torsion spring to move downward, so that the extension torsion spring elastically pushes a plurality of inclined support rods, forming a state where the top of the inclined support rod moves downward and the bottom of the inclined support rod moves horizontally, thereby driving the expansion plate to move horizontally.

[0014] Preferably, a dropping hole is formed at the position on the surface of the feeding table surface aligned with the ultrasonic component, and a plurality of attenuation holes for improving the sound energy transmission efficiency are formed around the dropping hole on the surface of the feeding table surface.

[0015] By adopting the above technical solution, the formation of the dropping hole provides a discharge outlet for the waste after the material plate is cut. At the same time, a plurality of attenuation holes are arranged around the dropping hole, so that the ultrasonic waves received by the feeding table surface are transmitted and diffused along a plurality of dropping holes, thereby improving the sound energy transmission efficiency.

[0016] Preferably, a waste material cavity is communicated and opened at the bottom of the operation cavity inside the main box body, and a waste material transportation line for discharging the waste residue is arranged in the waste material cavity.

[0017] By adopting the above technical solution, the waste material cavity is communicated with the operation cavity, so that the waste material falling into the dropping hole falls onto the surface of the waste material transportation line, and the waste material is discharged from the waste material cavity to the outside.

[0018] Preferably, feeding and discharging openings communicating with the operation cavity are formed at both the front and rear ends of the main box body, and the material transportation line extends to the outside through the two feeding and discharging openings.

[0019] By adopting the above technical solution, the feeding and discharging openings communicate with the operation cavity, thereby reserving an opening for the feeding and discharging of the material plate. At the same time, the feeding and discharging openings communicate with the outside, so that a semi-sealed state is formed inside the operation cavity to prevent external dust and sundries from entering the main housing.

[0020] Preferably, a feeding motor group is arranged on one side of the feeding and discharging opening in the operation cavity, and the output end of the feeding motor group is fixedly connected to the rotating gear inside the material transportation line.

[0021] By adopting the above technical solution, the output end of the feeding motor group rotates to drive the material transportation line to operate, so that the material transportation line drives the material plate to move horizontally, providing power for the movement and processing of the material plate.

[0022] A method for ultrasonic-assisted ultrafast laser glass drilling, which is used for the above-mentioned ultrasonic-assisted ultrafast laser glass drilling device, includes the following steps: S01. The material transportation line drives the material plate to move from the outside into the operation chamber 2. When the material plate moves to the bottom of the ultrasonic generator, the ultrasonic generator emits laser to preliminarily cut the material plate, and the thinning work is completed at the cutting point of the material plate. S02. When the material plate moves to the surface of the material placing table, the lifting assembly drives the fixing assembly to move upward to align with the material plate. The clamping plates in the fixing assembly move towards each other to clamp and fix the material plate, and the material plate is fixed to the fixing assembly and abuts against the material placing table. S03. The width adjustment assembly drives the lifting assembly 7 to move to the position aligned with the center of the cutting point of the material plate. The lifting assembly 7 drives the installation housing to descend, and the installation housing synchronously drives the abutting surface to abut against the surface of the material plate. The ultrasonic generator conducts high-frequency mechanical vibration to the abutting surface through the conduction rod, and the material plate receives the vibration to complete the de-lamination process at the cutting point. S04. The pressure block presses down to drive the tops of multiple inclined support rods to press down synchronously. The bottoms of multiple inclined support rods all apply downward pressure to the expansion plates. Multiple expansion plates are horizontally limited in the horizontal grooves. Multiple expansion plates receive the downward pressure of the inclined support rods and convert it into horizontal thrust. Multiple expansion plates extend along the horizontal grooves. After the abutting surface expands, it is driven by the installation housing to abut against the material plate, thereby fixing the material plate and improving the de-lamination effect.

[0023] In summary, the present invention includes at least one of the following beneficial technical effects: 1. The material transportation line is used to transport the material plate into the operation chamber, so that it is preliminarily cut and thinned by the laser generating device. Then, as the material plate moves, it is clamped and fixed by the fixing assembly, so that the material plate stably abuts against the material placing table. Then, the ultrasonic tool head abuts against the cutting point of the material plate to transmit high-frequency mechanical vibration, causing the material piece to fall off, thereby forming an efficient automated operation and improving production efficiency. 2. With the help of ultrafast laser cutting, which is fast and has no daily consumables, and in cooperation with the ultrasonic device to transmit vibration to the cutting point for secondary processing, the sliced pieces on the glass surface are thus removed. The process is smooth and the cutting speed is fast. The abutting surface is expanded by the expansion plate, and the coverage range is adjusted with the increase of the opening aperture, so that the ultrasonic stamping coverage range is comprehensive, improving the processing accuracy and thus ensuring the product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a three-dimensional schematic diagram of the present invention; Figure 2 It is a left internal view of the present invention; Figure 3 It is a structural diagram of the interior of the main box body of the present invention; Figure 4 It is a connection diagram of the ultrasonic component and the width adjustment component of the present invention; Figure 5 It is an overall view of the ultrasonic component of the present invention; Figure 6 Internal explosion diagram of the ultrasonic component of the present invention; Figure 7 Bottom view of the ultrasonic component of the present invention; Figure 8 Connection diagram of the conduction rod of the present invention.

[0025] Reference numerals: 1, main box body; 2, operation chamber; 3, waste chamber; 4, feeding and discharging port; 5, waste transportation line; 6, ultrasonic component; 61, mounting outer shell; 62, fixed inner shell; 63, ultrasonic tool head; 6³¹, pressure block; 6³², conduction rod; 6³³, extension torsion spring; 6³⁴, inclined support rod; 6³⁵, abutting surface; 6³⁶, extension plate; 6³⁷, transverse groove; 6³⁸, longitudinal groove; 6³⁹, annular groove; 64, auxiliary tool head; 65, ultrasonic generator; 7, lifting component; 8, width adjustment component; 9, auxiliary adjustment wheel; 10, material transportation line; 11, jacking component; 12, discharging table; 13, material plate; 14, feeding motor group; 15, fixing component; 16, in - material sensor; 17, attenuation hole; 18, dropping hole; 19, laser generating device. Detailed implementation manners

[0026] The following will further elaborate on the present invention in conjunction with the attached Figures 1 - 8 drawings.

[0027] An embodiment of the present invention discloses an ultrasonic - assisted ultrafast laser glass hole - opening device and method.

[0028] The "up, down, left, and right" perspectives of this device are based on Figure 1 the direction of the attached drawings.

[0029] Referring to Figures 1 to 3 , an ultrasonic - assisted ultrafast laser glass hole - opening device includes a main box body 1. An operation chamber 2 is opened inside the main box body 1. Feeding and discharging ports 4 are opened on the outer surface of the main box body 1 at both the front and rear ends of the operation chamber 2. Both feeding and discharging ports 4 are in communication with the inside of the operation chamber 2. A material transportation line 10 is installed at the horizontally aligned position between the two feeding and discharging ports 4 and the inside of the operation chamber 2. The material transportation line 10 is used to convey a material plate 13 made of glass that needs to be processed externally into the device. At the same time, a waste chamber 3 is opened at one side of the bottom of the operation chamber 2 inside the main box body 1. The waste chamber 3 is in communication with the operation chamber 2, and the channels of the waste chamber 3 and the operation chamber 2 are in a state of perpendicular intersection in a plane. A waste transportation line 5 is installed in the waste chamber 3. One end of the waste transportation line 5 extends to the outside, and a storage device for storing the waste of the material plate 13 is provided at the extended end.

[0030] On one side at the top of the material transport line 10 inside the operation chamber 2, a width adjustment component 8 is fixedly installed. The width adjustment component 8 is composed of a slide bar, a slider, and a circuit structure driven by air. At the same time, on one side in the middle of the base of the width adjustment component 8, an auxiliary adjustment wheel 9 is provided. Personnel adjust the sliding distance of the slider of the width adjustment component 8 by rotating the auxiliary adjustment wheel 9. On one side of the surface of the slider of the width adjustment component 8, a lifting component 7 is fixedly installed. The housing of the lifting component 7 is fixedly connected to the slider of the width adjustment component 8 by screws. The telescopic end of the lifting component 7 extends downward, and an ultrasonic component 6 is fixedly installed at the end of the extension.

[0031] Refer to Figures 3 to 5 , at the position between the conveyor belts of the material transport line 10 inside the operation chamber 2, a feeding table 12 is fixedly installed. A dropping hole 18 is penetrated and opened on the surface of the feeding table 12 at the position of the ultrasonic component 6. The dropping hole 18 is aligned and communicated with the waste chamber 3, so that the waste of the cut material board 13 falls into the waste transport line 5 through the dropping hole 18 for recycling. A plurality of attenuation holes 17 are penetrated and opened around the dropping hole 18 on the surface of the feeding table 12 to form a porous cavity structure inside the feeding table 12. The porous cavity structure enables the feeding table 12 to reflect, scatter, and rub with the pore wall surface multiple times when receiving high-frequency mechanical vibration, resulting in the conversion of sound energy into heat energy, thereby improving the absorption efficiency.

[0032] At the same time, jacking components 11 are installed on both sides at the top of the material transport line 10. The telescopic ends of the jacking components 11 extend upward, and a fixing component 15 is provided at the end of the extension. The fixing component 15 is composed of a clamping plate abutted against the telescopic end of the jacking component 11 and a transverse driving mechanism fixedly connected to the clamping plate. Under normal conditions, the clamping plate of the jacking component 11 is horizontally staggered with the material board 13.

[0033] It should be noted that a feeding motor group 14 is fixedly installed at the position of one end of the material transport line 10 inside the operation chamber 2. The output end of the feeding motor group 14 is fixedly connected to the internal slave gear of the material transport line 10. A material arrival sensor 16 is fixedly installed on one side at the front end of the feeding table 12 inside the operation chamber 2. The model of the material arrival sensor 16 uses the CHINT Electric YBLX-ME series travel switch, and the sensing end of the material arrival sensor 16 faces the feeding table 12. When a material board 13 is placed on the surface of the feeding table 12, the material board 13 contacts the sensing end of the material arrival sensor 16, so that the material arrival sensor 16 transmits an electrical signal. At the same time, a laser generating device 19 is fixedly installed at one end of the operation chamber 2 away from the material arrival sensor 16. The laser emitting end of the laser generating device 19 faces downward and directly faces the material transport line 10, so as to perform preliminary laser cutting on the material board 13. The laser generating device 19 selects a wavelength of 1030 nm, a single pulse width ≤ 10 ps, and an average power of 0.5 - 5 W.

[0034] Refer to Figures 6 to 8, the ultrasonic component 6 includes a mounting housing 61 fixedly arranged at the end of the telescopic end of the lifting component 7. The interior of the mounting housing 61 is hollow, and a fixed inner housing 62 is fixedly arranged therein. A groove is opened downward at the top of the fixed inner housing 62, and an ultrasonic generator 65 is fixedly arranged in the groove (the ultrasonic generator 65 is set to have an output frequency of 20 kHz ± 1 kHz, a power of 100–500 W, and an adjustable amplitude of 0.1–5 μm). The ultrasonic generator 65 is connected to an external power supply device through a circuit. A bottom groove is opened on the side of the fixed inner housing 62 opposite to the groove, and an ultrasonic tool head 63 is fixedly arranged in the bottom groove. The ultrasonic tool head 63 movably penetrates through the bottom groove and is connected to the ultrasonic generator 65 in the groove to receive the high-frequency mechanical vibration generated by the ultrasonic generator 65. A plurality of auxiliary tool heads 64 that can be movably extended are fixedly arranged around the ultrasonic tool head 63 on the lower end surface of the fixed inner housing 62, which are used to abut against the material plate 13 to conduct the vibration force and provide auxiliary fixation; The ultrasonic tool head 63 includes a pressure block 631 movably arranged in the bottom groove of the fixed inner housing 62. One end of the top of the pressure block 631 movably penetrates through the interior of the fixed inner housing 62, and an electric push rod is fixedly arranged at the penetrated end, so that the electric push rod pushes the pressure block 631 to move up and down. At the same time, a through hole is opened in the middle of the pressure block 631, and a conduction rod 632 is movably inserted into the through hole. The conduction rod 632 movably penetrates through the pressure block 631 and is connected to the ultrasonic generator 65. An abutting surface 635 is fixedly arranged on the bottom surface of the conduction rod 632. The abutting surface 635 is longitudinally aligned with the center of the opening position of the material plate 13. A plurality of transverse grooves 637 are opened on the surface of the abutting surface 635 around the conduction rod 632. Expansion plates 636 are movably inserted into the plurality of transverse grooves 637. Longitudinal grooves 638 are opened on the surface of the conduction rod 632 at the positions of the plurality of transverse grooves 637. Inclined support rods 634 are movably inserted into the plurality of longitudinal grooves 638. Both ends of the inclined support rods 634 are rotatably connected to the groove channels of the longitudinal grooves 638, and the bottoms of the plurality of inclined support rods 634 are rotatably connected to the tops of the plurality of expansion plates 636; A ring groove 639 is opened on the lower end surface of the pressure block 631 at the positions of the plurality of inclined support rods 634. An extension torsion spring 633 is fixedly arranged in the ring groove 639. The extension torsion spring 633 is in an extended state in its normal state, and the calculation formula for the torsion spring force is F = kx, where F represents the torsion spring force, k represents the torsion spring constant (the magnitude of the elastic force generated by the torsion spring per unit length under force), and x represents the torsion spring compression amount (the displacement distance of the torsion spring from the original state to the compressed state). The elastic force of the extension torsion spring 633 can be calculated by this formula, and the bottom of the extension torsion spring 633 is fixedly connected to the tops of the plurality of inclined support rods 634. When the pressure block 631 is subjected to a downward pressure, the downward pressure is transmitted to the plurality of inclined support rods 634 through the extension torsion spring 633, so that the tops of the plurality of inclined support rods 634 are synchronously subjected to the downward pressure and then descend.

[0035] It should be noted that multiple extension plates 636 are fitted and connected to the channels of the transverse slots 638, and the connection gap is less than 0.1 mm. When the multiple extension plates 636 are completely inserted into the transverse slots 638, the entire abutting surface 635 is in a circular state and is adapted to the opening of the material plate 13. And the maximum distance that the pressure block 631 is pressed downward is less than the channel length of the transverse slot 638, so that after the pressure block 631 is completely pressed into the extension torsion spring 633, a part of the extension plate 636 is still located in the transverse slot 638 to prevent excessive removal. The pressure block 631 is combined with the inclined strut 634 through the pre-tightening spring 633, so that the vibration force is converted into a transverse thrust along the inclined plane, driving the extension plate 636 to extend uniformly along the transverse slot 637, so as to maintain stable clamping during the process of increasing the aperture.

[0036] Among them, the timing sequences of the laser generating device 19 and the ultrasonic generator 65 are both controlled by the same PLC. The control logic of this device is as follows: after the signal of the in-feed sensor 16 is confirmed, the PLC issues sequential control instructions to pause the material transport line 10, start the lifting assembly 11 - width adjustment assembly 8 - lifting assembly 7 - ultrasonic generator 65, ensuring that each actuator runs in a closed loop according to the timing sequence and speed. After the vibration lasts for 0.5 s - 2 s, it automatically resets, and the entire process cycle ≤ 5 s.

[0037] Embodiment 2 Refer to Figures 1 to 8 , a method for ultrasonic-assisted ultrafast laser glass hole opening, which is used for the above-mentioned ultrasonic-assisted ultrafast laser glass hole opening device, and includes the following steps: S01. In the prior process, the material plate 13 to be processed is placed on the surface of the conveyor belt of the material transport line 10, and then the material transport line 10 runs to transport the material plate 13 from one of the in-out ports 4 to the operation chamber 2. When the material plate 13 moves to the laser port of the laser generating device 19, the material transport line 10 pauses, and the laser generating device 19 emits laser to perform hole cutting on the surface of the material plate 13. And after cutting, the glass is still in a tightly connected state, and the cutting point completes the thinning work. S02. Then the material transport line 10 continues to transport the preliminarily processed material plate 13. When the material plate 13 moves to the surface of the material placing table 12, the material plate 13 contacts the sensing end of the in-feed sensor 16, so that the in-feed sensor 16 transmits a signal, causing the material transport line 10 to pause again. At the same time, the lifting assembly 11 and the fixing assembly 15 are controlled to operate. The telescopic end of the lifting assembly 11 jacks up, driving the two clamping plates of the fixing assembly 15 to rise to align with the turntable of the material plate 13. Then the two transverse push rods of the fixing assembly 15 push towards each other, driving the two clamping plates to move towards each other to form clamping and fixing on both sides of the material plate 13. At this time, the material plate 13 is fixed on both sides and abuts against the material placing table 12 at the bottom.

[0038] S03. Then, by moving the slider on the surface of the slide bar of the post-adjusting width component 8, the housing of the lifting component 7 is driven to move. The movement of the lifting component 7 synchronously drives the movement of the mounting housing 61, so as to move the two ultrasonic tool heads 63 to the position aligned with the center of the cutting point of the material plate 13. Then, by extending the telescopic end of the post-lifting component 7, the mounting housing 61 is driven to move vertically downward. When the bottom of the ultrasonic tool head 63 abuts against the surface of the material plate 13, the lifting component 7 stops operating. At this time, the ultrasonic tool head 63 is aligned with and abuts against the center of the cutting point of the material plate 13. The ultrasonic generator 65 operates to generate high-frequency mechanical vibration and transmits it to the ultrasonic tool head 63. The ultrasonic tool head 63 abuts against the material plate 13 to convey the high-frequency mechanical vibration. The cutting point of the material plate 13 is vibrated, so that the cut part of the material piece is separated from the main body of the material plate 13, forming a peeling process; S04. When the ultrasonic tool head 63 abuts against the surface of the material plate 13, the operator controls the pressure block 631 to press down to a corresponding degree according to the different cutting diameters of the material plate 13. The downward pressure of the pressure block 631 applies a synchronous pressure to the multiple inclined support rods 634, so that the tops of the multiple inclined support rods 634 move downward along the longitudinal groove 638. Cooperating with the connection between the bottom of the inclined support rod 634 and the expansion plate 636, the inclined support rod 634 transmits the downward thrust received to the expansion plate 636, so that the expansion plate 636 moves horizontally along the transverse groove 637 and expands outward. The overall coverage range of the abutting surface 635 is expanded. As the abutting surface 635 abuts against the material plate 13, the fixing effect on the material plate 13 is increased, and at the same time, the output range of the high-frequency mechanical vibration is expanded, improving the effect of peeling the material piece.

[0039] The above are only optional embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An ultrasonic-assisted ultrafast laser glass hole-opening device, characterized in that: It includes a main box body (1). An operation cavity (2) for the hole-opening process is provided inside the main box body (1). A laser generating device (19) for thinning the glass plate is arranged on one side inside the operation cavity (2). A material transportation line (10) is arranged in the middle of the main box body (1) in the operation cavity (2). A material plate (13) for processing is arranged on the surface of the material transportation line (10). A fixing component (15) for clamping the material plate (13) is arranged above the material transportation line (10). A lifting component (11) is arranged between the fixing component (15) and the material transportation line (10). A material placing table surface (12) for placing the material plate (13) is arranged in the middle of the material transportation line (10). A material arrival sensor (16) for sensing the placing state of the material plate (13) is arranged at the front end of the material placing table surface (12). An ultrasonic component (6) for performing the film peeling process on the thinned material plate (13) is arranged on one side of the operation cavity (2) where the material placing table surface (12) is located. A lifting component (7) for driving the ultrasonic component (6) to move longitudinally is arranged on the side of the ultrasonic component (6) away from the material placing table surface (12). A width adjustment component (8) for driving the lifting component (7) to move horizontally and fixedly connected to the main box body (1) is arranged on the side of the lifting component (7) away from the ultrasonic component (6). An auxiliary adjustment wheel (9) for manually adjusting the width adjustment component (8) is arranged on one side at the bottom of the width adjustment component (8).

2. The ultrafast laser glass hole opening device assisted by ultrasonic waves according to claim 1, wherein: The ultrasonic component (6) includes an installation outer shell (61) fixedly arranged on one side of the lifting component (7). A fixed inner shell (62) is fixedly arranged inside the installation outer shell (61). An ultrasonic generator (65) for generating ultrasonic waves is fixedly arranged inside the fixed inner shell (62). An ultrasonic tool head (63) for conducting vibration force is telescopically arranged inside the fixed inner shell (62). A plurality of auxiliary tool heads (64) are arranged in a surrounding manner at the position of the ultrasonic tool head (63) at the bottom of the fixed inner shell (62).

3. An ultrasonic-assisted ultrafast laser glass hole-opening device according to claim 2, characterized in that: The ultrasonic tool head (63) includes a pressure block (631) telescopically arranged at the bottom of the fixed inner shell (62). A conduction rod (632) fixedly connected to the ultrasonic generator (65) is inserted through the middle of the pressure block (631). A contact surface (635) for abutting against the material plate (13) is fixedly arranged at the bottom of the conduction rod (632). A plurality of transverse grooves (637) are formed on the surface of the contact surface (635) around the conduction rod (632). A plurality of expansion plates (636) are movably arranged in the plurality of transverse grooves (637).

4. An ultrasonic-assisted ultrafast laser glass hole-opening device according to claim 3, characterized in that: Longitudinal grooves (638) are formed on the surface of the conduction rod (632) at the positions of the plurality of transverse grooves (637). A plurality of inclined support rods (634) are movably arranged in the plurality of longitudinal grooves (638). The plurality of inclined support rods (634) are respectively rotatably connected to the plurality of expansion plates (636) to achieve lateral expansion with vibration thrust.

5. An ultrasonic-assisted ultrafast laser glass hole-opening device according to claim 4, characterized in that: A ring groove (639) is formed at the bottom of the pressure block (631) around the through hole of the conduction rod (632). An extension torsion spring (633) is fixedly arranged in the ring groove (639), and the bottom of the extension torsion spring (633) is fixedly connected to the tops of a plurality of inclined support rods (634).

6. An ultrasonic-assisted ultrafast laser glass hole-opening device according to claim 1, characterized in that: A drop hole (18) is formed at a position on the surface of the material placing table surface (12) aligned with the ultrasonic component (6). A plurality of attenuation holes (17) for improving the sound energy transmission efficiency are formed around the drop hole (18) on the surface of the material placing table surface (12).

7. An ultrasonic-assisted ultrafast laser glass hole-opening device according to claim 1, characterized in that: A waste material cavity (3) is communicated and formed at the bottom of the operation cavity (2) inside the main box body (1). A waste material transportation line (5) for discharging waste residue is arranged in the waste material cavity (3).

8. An ultrasonic-assisted ultrafast laser glass hole-opening device according to claim 1, characterized in that: Feeding and discharging openings (4) communicating with the operation cavity (2) are formed at both the front and rear ends of the main box body (1). The material transportation line (10) extends to the outside through the two feeding and discharging openings (4).

9. An ultrasonic-assisted ultrafast laser glass hole-opening device according to claim 8, characterized in that: A feeding motor group (14) is arranged on one side of the feeding and discharging opening (4) inside the operation cavity (2). The output end of the feeding motor group (14) is fixedly connected to a rotating gear inside the material transportation line (10).

10. A method for ultrasonic-assisted ultrafast laser glass drilling, which is used for an ultrasonic-assisted ultrafast laser glass drilling device according to any one of claims 5 to 9, characterized in that: including the following steps: S01. The material transportation line (10) drives the material plate (13) to move from the outside into the operation cavity 2. When the material plate (13) moves to the bottom of the ultrasonic generator (65), the ultrasonic generator (65) emits laser to perform preliminary cutting on the material plate (13), and the thinning work is completed at the cutting point of the material plate (13). S02. When the material plate (13) moves to the surface of the material placing table surface (12), the lifting component (11) drives the fixing component (15) to move upward to an aligned state with the material plate (13). The clamping plates inside the fixing component (15) move towards each other to clamp and fix the material plate (13), and the material plate (13) is fixed to the fixing component (15) and abuts against the material placing table surface (12). S03. The width adjustment component (8) drives the lifting component 7 to move to a position aligned with the center of the cutting point of the material plate (13). The lifting component 7 drives the installation housing (61) to descend. The installation housing (61) synchronously drives the abutting surface (635) to abut against the surface of the material plate (13). The ultrasonic generator (65) conducts high-frequency mechanical vibration to the abutting surface (635) through the conduction rod (632), and the material plate (13) receives the vibration to complete the de-lamination process at the cutting point. S04. The pressure block (631) presses down to drive the tops of a plurality of inclined support rods (634) to press down synchronously. The bottoms of the plurality of inclined support rods (634) apply downward pressure to a plurality of expansion plates (636). The plurality of expansion plates (636) are horizontally limited in the horizontal grooves (637). The plurality of expansion plates (636) receive the downward pressure of the inclined support rods (634) and convert it into horizontal thrust. The plurality of expansion plates (636) extend along the horizontal grooves (637). After the abutting surface (635) expands, it is driven by the installation housing (61) to abut against the material plate (13) so as to fix the material plate (13) and improve the de-lamination effect.

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