High-sensitivity flexible touch sensor, preparation method thereof and intelligent robot with body

Abstract

The invention discloses a high-sensitivity flexible tactile sensor, a preparation method thereof and an intelligent robot with a body, and the high-sensitivity flexible tactile sensor comprises a flexible chamber substrate, an anti-corrosion protection ring, a flexible cover film, a sensing material layer and a plurality of projection structures. According to the high-sensitivity flexible tactile sensor, due to the innovative design of the flexible sealing cavity substrate, the flexible cover film and the protruding structure, the flexible tactile sensor shows high sensitivity and low detection limit. Meanwhile, through the arrangement of the convex structure, the close-range sensing performance of the flexible sensor and an interaction object is improved, the micro-deformation capability of the sensor is enhanced through the multi-layer deformation of the convex structure, the flexible cover film and the cavity, and the sensitivity of the sensor is further improved.

Description

Technical Field

[0001] The present invention relates to the field of flexible sensing technology, and in particular to a highly sensitive flexible tactile sensor and a preparation method thereof, as well as an embodied intelligent robot. Background Art

[0002] With the rapid development of flexible electronics, flexible sensing technology has been widely applied in various fields, including human-machine interaction. Human-machine interaction with robots primarily relies on a single interaction mode, either through wearing bulky equipment or maintaining physical contact with the interface. Due to limitations in sensitivity and integration, non-flexible sensors have limited interaction efficiency and intelligence. For example, in high-pressure and humid environments, the sensitivity and performance of some sensors that lack moisture and corrosion resistance decrease, limiting their effectiveness in practical applications.

[0003] The new type of highly sensitive flexible tactile sensors can sense and identify changes in tiny signals with higher sensing accuracy, but the development of flexible tactile sensors with high sensitivity, high stability, moisture resistance and corrosion resistance remains a challenge for the industry. Summary of the Invention

[0004] The technical problem solved by the present invention is to provide a highly sensitive flexible tactile sensor and a preparation method thereof, a highly sensitive flexible tactile sensor module, and an embodied intelligent robot integrated with the highly sensitive flexible tactile sensor module.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] A method for preparing a highly sensitive flexible tactile sensor comprises the following steps:

[0007] S1: pre-treating the flexible substrate and preparing a patterned electrode layer on the front surface of the flexible substrate;

[0008] S2: preparing a circle of upwardly protruding flexible adhesive layer at the front edge of the flexible substrate, thereby forming a cavity structure inside the flexible adhesive layer, and the patterned electrode layer is regularly arranged in the cavity structure;

[0009] S3: Surface enhancement treatment of the flexible cover film:

[0010] S4: preparing a pressure sensing layer on the front surface of the flexible cover film;

[0011] S5: preparing a plurality of protrusion structures on the back side of the flexible cover film;

[0012] S6: connecting the pressure sensing layer on the front side of the flexible cover film to the electrode layer on the front side of the flexible substrate, and assembling them together through the flexible adhesive layer, thereby sealing the chamber structure to form a closed chamber;

[0013] S7: Continue to prepare an anti-corrosion protection ring on the outer edge of the flexible adhesive layer, and the anti-corrosion protection ring completely wraps and covers the flexible adhesive layer.

[0014] Furthermore, in step S1, the pre-processing includes setting an opening in the middle of the pressure-sensitive area of the flexible substrate to form a through hole, and the patterned electrode layer avoids the through hole and is regularly set on the pressure-sensitive area.

[0015] Furthermore, in step S2, a circle of flexible adhesive layer is prepared at the outer edge of the flexible substrate and the edge of the middle through hole thereof to form inner and outer adhesive layers, and an annular chamber structure is formed between the inner and outer adhesive layers, and the patterned electrode layer is regularly arranged in the annular chamber structure.

[0016] Furthermore, in step S7, an anti-corrosion protection ring is prepared on the outer edges of the inner and outer flexible adhesive layers.

[0017] Furthermore, in step S3, the surface enhancement treatment includes high temperature enhancement treatment, chemical deposition treatment, and particle injection treatment to reduce the Young's modulus of the flexible cover film.

[0018] Furthermore, in step S4, the method for preparing the pressure-sensing layer material also includes using high-shear dispersion processes such as ultrasonic treatment and ball milling to uniformly disperse the particles with pressure-sensitive properties in the dispersion medium to form independent units, and then using an in-situ synthesis method to form a pressure-sensitive composite material with relatively uniform size.

[0019] A highly sensitive flexible tactile sensor, prepared by any of the above preparation methods, comprising a flexible chamber substrate, an anti-corrosion protection ring, a flexible cover film, a sensing material layer, and a plurality of protruding structures;

[0020] The flexible cavity substrate comprises the flexible substrate, the electrode layer and the flexible adhesive layer being regularly arranged in sequence on the front surface of the flexible substrate, the flexible adhesive layer surrounding the interdigitated electrode region of the electrode layer to form a cavity structure, and the electrode leads of the electrode layer leading out of the cavity structure;

[0021] The sensing material layer and the interdigitated electrode region of the electrode layer are separated and arranged in the closed chamber.

[0022] Furthermore, the protrusion structure includes a tiny point-shaped protrusion structure in the shape of a sphere, a hemisphere, a teardrop, a cone, etc., or a slender strip-shaped protrusion structure in the shape of a long strip, a ring, etc.; the plurality of protrusion structures are arranged in an array.

[0023] Furthermore, the material of the pressure sensing layer is one of metal nanowires, two-dimensional materials, and carbon nanomaterials, or a composite material of multiple materials.

[0024] A high-sensitivity flexible tactile sensor module comprises the above-mentioned high-sensitivity flexible tactile sensor, a base and a signal processing module, wherein the high-sensitivity flexible sensor is adhered and fixed to the front of the base, and the signal processing module is regularly arranged inside the base or on the back of the base; the leads of the high-sensitivity flexible tactile sensor are electrically connected to the signal processing module.

[0025] An embodied intelligent robot with tactile perception function includes the above-mentioned high-sensitivity flexible tactile sensor module, and the high-sensitivity flexible tactile sensor module is regularly arranged on the embodied intelligent robot to realize the tactile perception function of the embodied intelligent robot.

[0026] The beneficial effects of the present invention are:

[0027] 1. The highly sensitive flexible tactile sensor of the present invention, thanks to its innovative design of flexible sealed chamber substrate, flexible cover film and protrusion structure, exhibits high sensitivity and low detection limit.

[0028] 2. The highly sensitive flexible tactile sensor of the present invention improves the close-range perception performance of the flexible sensor and the interactive object by establishing a protruding structure, and enhances the micro-deformation capability of the sensor through the multi-layer deformation of the protruding structure, the flexible cover film and the cavity, thereby improving the sensitivity of the sensor.

[0029] 3. The preparation method of the highly sensitive flexible tactile sensor of the present invention, by performing high shear dispersion treatment and in-situ synthesis treatment on the pressure sensing material, not only makes the interface bonding strength between the materials higher, but also significantly improves the transmission efficiency of the interface stress between the pressure sensing material and the flexible cover film, thereby improving the stability and sensitivity of the sensor.

[0030] 4. The preparation method of the highly sensitive flexible tactile sensor of the present invention pre-treats the flexible cover film and adopts surface enhancement technology to reduce the Young's modulus of the film and enhance its stability, so that the sensor has better stability and higher sensitivity in the low pressure range. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is an exploded structural diagram of the present invention;

[0032] Figure 2 for Figure 1 The structural diagram after the middle part of the structure is combined;

[0033] Figure 3 for Figure 1 Structural diagram in combined state;

[0034] Figure 4 for Figure 3 A top view of

[0035] Figure 5 for Figure 4 Cross-sectional view in the AA direction;

[0036] Figure 6 for Figure 1 The structural diagram after the convex structure is transformed;

[0037] Figure 7 for Figure 1 The structural diagram after changing the flexible substrate;

[0038] Figure 8 is a structural diagram of the sensor module of the present invention;

[0039] The following are marked in the figure:

[0040] 1. Flexible chamber substrate, 11. Flexible substrate, 12. Electrode layer, 13. Flexible adhesive layer, 101. Through hole, 102. Chamber structure, 121. Interdigitated electrode, 122. Electrode lead, 131. Outer flexible adhesive layer, 132. Inner flexible adhesive layer;

[0041] 2. Anti-corrosion protection ring;

[0042] 3. Flexible cover film;

[0043] 4. Sensing material layer;

[0044] 5. Raised structure;

[0045] 6. Base;

[0046] 7. Signal processing module. DETAILED DESCRIPTION

[0047] To make the above contents, objectives, and beneficial effects of the present invention more clearly understood, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art can make similar modifications without violating the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0048] It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present invention pertains. The terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the relevant listed items.

[0049] like Figure 1-2 As shown, the present invention provides a highly sensitive flexible tactile sensor comprising a flexible cavity substrate 1, an anti-corrosion protection ring 2, a flexible cover film 3, a sensing material layer 4, and several raised structures 5. The flexible cavity substrate 1 comprises a flexible substrate 11, on the upper (front) surface of which an electrode layer 12 and a flexible adhesive layer 13 are sequentially disposed. The flexible adhesive layer 13 surrounds the interdigitated electrode region of the electrode layer 12 (i.e., the pressure-sensing region of the sensor) to form a cavity structure 102. The sensing material layer 4 is disposed on the lower (front) surface of the flexible cover film 3, and the raised structures 5 are disposed on the upper (back) surface of the flexible cover film 3. The flexible cover film 3 is bonded to the flexible substrate 11 via the flexible adhesive layer 13 disposed on the upper (front) surface of the flexible cavity substrate 1, sealing the cavity structure 102 and thereby forming a closed cavity within the flexible adhesive layer 3. The sensing material layer 4 on the front surface of the flexible cover film 3 and the electrode layer 12 on the front surface of the flexible cavity substrate 1 are disposed above and below the closed cavity.

[0050] When no pressure is applied to the sensor device, the pressure-sensing material layer 4 on the flexible cover film 3 and the patterned electrode layer 12 on the flexible chamber substrate 1 are separated and not in contact, and the sensor device does not output a signal. When pressure is applied, the two layers come into electrical contact, and the pressure-sensitive properties of the nanosensing material convert the external pressure signal into an electrical signal for output. The output electrical signal changes with the pressure applied to the sensor surface. The specific pressure-electrical signal relationship can be used to measure the pressure of the sensor.

[0051] Further, such as Figure 2 As shown, the flexible adhesive layer 13 is bonded to the upper surface of the flexible substrate 11 and surrounds the interdigitated electrode area 121 of the electrode layer 12, thereby forming a chamber structure 102 on the upper surface of the flexible substrate 11. When the flexible cover film 3 is bonded to the flexible substrate 11 through the flexible adhesive layer 13, the chamber structure 102 on the upper surface of the flexible substrate 11 forms a closed chamber.

[0052] Furthermore, the electrode layer 12 is a patterned electrode layer, printed on the front surface of the flexible substrate 11. The electrode layer 12 includes an interdigitated electrode region 121 and an electrode lead 122. The interdigitated electrode region 121 is a pressure-sensitive region, disposed in a closed cavity, and the electrode lead 122 leads out of the closed cavity.

[0053] Further, such as Figure 1 、 Figure 2 and Figure 5 As shown, an anti-corrosion protection ring 2 is regularly provided on the outer edge of the flexible adhesive layer 13. The anti-corrosion protection ring 2 surrounds the flexible adhesive layer 13 and completely covers the flexible adhesive layer 13, thereby providing waterproof and anti-corrosion functions for the sensor.

[0054] The flexible substrate 11 is made of flexible materials such as polydimethylsiloxane (PDMS), polyimide (PI), polyethylene terephthalate (PET), polyurethane (PU), and polyethylene (PE).

[0055] The electrode layer 12 is made of metal materials such as gold, silver, and copper, or carbon-based nanomaterials or conductive polymer materials.

[0056] The flexible adhesive layer 13 is made of corrosion-resistant adhesive material. Its shape is not limited and can be circular, square or other special-shaped structures. The thickness of the flexible adhesive layer is 10-500 μm.

[0057] The material of the flexible cover film 3 is the same as or different from that of the flexible substrate 11 and is made of flexible materials such as polydimethylsiloxane (PDMS), polyimide (PI), polyethylene terephthalate (PET), polyurethane (PU), polyethylene (PE), etc. The thickness is 5-200 μm.

[0058] The pressure sensing layer 4 is made of one material such as metal nanowires, two-dimensional materials, carbon nanomaterials, or a plurality of composite materials. The thickness of the sensing material layer 4 is 1-100 μm.

[0059] The material of the above-mentioned raised structure 5 is not limited, and a material with a certain elasticity is preferably used; its structural shape is also not limited, and it can be a point-shaped raised structure (a tiny point-shaped raised structure with a spherical, hemispherical, teardrop-shaped, conical, etc. shape), or a strip-shaped raised structure (a slender strip-shaped raised structure with a long strip, ring, etc. shape). The height of the raised structure is 1-2000μm, and the width is set according to actual needs.

[0060] The material of the anti-corrosion protection ring 2 is not limited, and is preferably made of glue having anti-corrosion properties. The thickness of the anti-corrosion protection ring 2 is 1-2000 μm, and the width is 10-5000 μm.

[0061] like Figure 1 and Figure 2As shown, a through-hole 101 is provided in the middle of the pressure-sensing area of the flexible substrate 11. Accordingly, to ensure the sealing of the pressure-sensing area, a flexible adhesive layer 13 and an anti-corrosion protection ring 2 are also regularly arranged at the edges of through-hole 101. Thus, an outer flexible adhesive layer 131 and an anti-corrosion protection ring are formed at the outer edge of the flexible substrate, while an inner flexible adhesive layer 132 and an anti-corrosion protection ring are formed at the inner edge.

[0062] like Figure 2 As shown, the sensor forms an annular pressure-sensitive region (annular closed chamber) between the outer flexible adhesive layer 131 and the inner flexible adhesive layer 132. Accordingly, the interdigital electrode region 121 of the electrode layer 2 is also regularly arranged as annular interdigital electrodes in the annular pressure-sensitive region.

[0063] like Figure 7 As shown, the pressure-sensitive region of the flexible substrate 11 is not provided with a central opening, thereby forming a circular pressure-sensitive region on the front surface of the flexible substrate. Accordingly, the flexible adhesive layer 13 is regularly arranged at the outer edge of the pressure-sensitive region, thereby surrounding and sealing the pressure-sensitive region of the sensor, forming a circular, enclosed chamber within the circular pressure-sensitive region.

[0064] like Figure 1 As shown in FIG. 1 , in one embodiment, the protrusion structure 5 is a dot-shaped protrusion, and the shape of the dot-shaped protrusion is not limited. Figure 6 As shown, in another embodiment, the protrusion structure 5 adopts a strip-shaped protrusion, and the shape of the strip-shaped protrusion is not limited. Figure 6 The annular strip-shaped raised structure in the.

[0065] The highly sensitive flexible tactile sensor of the present application surrounds and seals the pressure-sensing area of the sensor through a flexible adhesive layer 13, thereby forming a closed chamber structure between the flexible substrate 11 and the flexible cover film 3. The number of closed chamber structures can be a whole, which surrounds and seals the entire pressure-sensing area; or it can be a plurality of independent closed chambers. Thanks to the provision of the flexible adhesive layer, the present application forms a closed chamber between the flexible substrate and the flexible cover film, and the sensing material layer 4 and the interdigitated electrodes of the electrode layer are separated and arranged in the closed chamber, thereby exhibiting high sensitivity and low detection limit.

[0066] Furthermore, the flexible cover film 3 is a thin film with a low Young's modulus, and the pressure sensing layer 4 is prepared on the surface of the flexible cover film by printing, coating, laser direct writing or other processes.

[0067] Furthermore, in one embodiment, the material of the pressure-sensing layer 4 is prepared using a high-shear dispersion process (such as ultrasonic treatment, ball milling, etc.), using mechanical force to evenly disperse the pressure-sensitive particles in the dispersion medium to form independent units, and then using an in-situ synthesis method to form a pressure-sensitive composite material with relatively uniform size. The pressure-sensitive composite material prepared by the high-shear dispersion process not only has a high interfacial bonding strength between the materials, but also significantly improves the transmission efficiency of the interfacial stress between the pressure-sensing material and the flexible cover film, thereby improving the electromechanical coupling efficiency of the sensor, thereby having higher stability and sensing sensitivity.

[0068] Furthermore, before use, the flexible cover film 3 is treated using surface enhancement techniques (such as high-temperature enhancement, chemical deposition, and particle implantation) to reduce the film's Young's modulus and enhance its stability, resulting in the sensor having good stability and high sensitivity within the low-pressure range. For example, high-temperature enhancement can reduce the film's Young's modulus. Reducing the Young's modulus and thermal expansion coefficient can effectively eliminate film stress, thereby improving the sensitivity and stability of the flexible sensor device. Ion implantation can change the film's crystal structure and chemical composition, increasing its chemical inertness and thus improving its stability and durability.

[0069] This application utilizes regularly arranged raised structures 5 on the back of the flexible cover film to improve the sensor's close-range sensing performance with the object being interacted with. Furthermore, the multi-layered deformation of the raised structures, the flexible cover film, and the chamber enhances the sensor's micro-deformation capability, thereby increasing the sensor's sensitivity.

[0070] Furthermore, the raised structures can be formed into discrete dots (e.g., at least two droplet-shaped dots or pyramid-shaped dots) using liquid glue via injection or printing, then formed under heat or light curing conditions, and tightly attached to the flexible cover film. Alternatively, the raised structures can be formed into a sealed shape (e.g., a circular ring strip) using liquid glue via injection or printing, then formed under heat or light curing conditions, and tightly attached to the flexible cover film. Alternatively, the raised structures can be formed into discrete dots or other sealed shapes using solid glue via pasting processes.

[0071] like Figure 8 As shown, the present invention also provides a high-sensitivity flexible tactile sensor module, comprising the above-mentioned high-sensitivity flexible tactile sensor and a base 6. The base 6, serving as a support base for the high-sensitivity flexible tactile sensor, comprises a housing, with a signal processing module 7 regularly disposed inside or on the back thereof. The electrode leads of the high-sensitivity flexible tactile sensor are electrically connected to the signal processing module 7, which performs signal acquisition.

[0072] Furthermore, the highly sensitive flexible tactile sensor is fixed to the upper end of the base 6 by bonding. With the support of the base, the highly sensitive flexible tactile sensor can realize highly sensitive interactive applications. The pressure change signal during the interaction process is collected by the highly sensitive flexible sensor and converted into an electrical signal and output to the signal processing module. After filtering, amplification and other processing by the analog circuit inside the signal processing module, it is converted into a digital signal. A dedicated algorithm is used to analyze and process the pressure data. Then, data is exchanged with a mobile terminal (mobile phone APP, computer desktop, etc.) through wireless transmission (low-power Bluetooth, Wifi, 5G, etc.). The computer recognizes the interactive action based on the collected data. Wireless transmission can use Bluetooth, Wi-Fi, serial port and 5G, etc. to synchronize the measurement results to the mobile terminal for visual display and management.

[0073] The present invention also provides an embodied intelligent robot with tactile perception function, including the above-mentioned high-sensitivity flexible tactile sensor module. By regularly setting the above-mentioned high-sensitivity flexible tactile sensor module on the embodied intelligent robot, the tactile perception function of the embodied intelligent robot is realized.

[0074] Furthermore, a highly sensitive flexible tactile sensor module is integrated into the fingertips and palms of the embodied intelligent robot, and the pressure data of the robot's hand is collected in real time through the highly sensitive flexible tactile sensor, thereby realizing the tactile perception of the robot's hand.

[0075] The present invention also provides a method for preparing a highly sensitive flexible tactile sensor, comprising the following steps:

[0076] S1: pre-treating the flexible substrate 11 , and then preparing a patterned electrode layer 12 on the upper surface (front surface) of the flexible substrate 11 .

[0077] S2: a circle of upwardly protruding flexible adhesive layer 13 is prepared at the edge of the upper surface of the flexible substrate 11 , thereby forming a cavity structure 102 inside the flexible adhesive layer 13 .

[0078] S3: performing surface enhancement treatment on the flexible cover film 3 .

[0079] S4: preparing a pressure sensing layer 4 on the front surface of the flexible cover film 3 .

[0080] S5: preparing a plurality of protruding structures 5 on the back side of the flexible cover film 3 .

[0081] S6: The pressure-sensing layer on the front side of the flexible cover film 3 faces downwards, and is connected to the front side of the flexible substrate 11 , and they are assembled together through the flexible adhesive layer 13 to form a highly sensitive flexible tactile sensor.

[0082] S7: Prepare another anti-corrosion protection ring 2 on the outer edge of the flexible adhesive layer 3 , and the anti-corrosion protection ring 2 completely wraps and covers the flexible adhesive layer 13 .

[0083] Example 1:

[0084] like Figure 1 As shown, a method for preparing a highly sensitive flexible tactile sensor comprises the following steps:

[0085] S11: a hole is opened in the middle (pressure-sensing area) of the PI flexible substrate 11 to form a through hole 101, and then a patterned metal electrode layer 12 is prepared on the remaining pressure-sensing area.

[0086] S12: A circular flexible adhesive layer 13 with a thickness of 100 microns is pasted on the outer edge and inner edge of the PI flexible substrate to form an outer flexible adhesive layer 131 and an inner flexible adhesive layer 132 respectively. The pressure-sensitive area between the inner and outer flexible adhesive layers forms a cavity structure 102.

[0087] S13: The carbon nanomaterial is processed by ball milling and shearing process to form evenly dispersed independent carbon nanotube units, and then an in-situ synthesis method is used to form a carbon nanocomposite sensing material with a relatively uniform size.

[0088] S14: performing high temperature strengthening treatment on the surface of the flexible cover film 3 .

[0089] S15: Using a printed electronics process, a layer of carbon nanomaterial with a thickness of 50 μm is prepared on the front surface of the flexible cover film 3 as the pressure sensing material layer 4 .

[0090] S16: Next, on the back side of the flexible cover film 3, glue is injected into a uniformly distributed dot-shaped or strip-shaped raised structure, and then heat-cured at 100°C for 0.5 hours to adhere tightly to the flexible cover film 3. Each dot-shaped raised structure has a height of 500 μm.

[0091] S17: Place the front side of the flexible cover film 3 downward and connect it to the front side of the flexible substrate 1, and bond it to the flexible substrate through the inner and outer flexible adhesive layers 13 to seal the cavity structure 102 to form a closed cavity and a highly sensitive flexible sensor.

[0092] S18: Finally, the anti-corrosion glue is injected into the outer edge of the inner and outer flexible adhesive layers 13 by using the injection process, and the glue is dried at 100°C for 0.5 hours to solidify it into a shape, thereby preparing an anti-corrosion protection ring 2 with a thickness of 200 μm and a width of 200 μm. The anti-corrosion protection ring 2 completely covers the inner and outer flexible adhesive layers, and finally the highly sensitive flexible tactile sensor of the present invention is prepared.

[0093] Example 2:

[0094] like Figure 6 As shown, a method for preparing a highly sensitive flexible tactile sensor comprises the following steps:

[0095] S11: a through hole is opened in the middle of the PI flexible substrate 11 (pressure-sensitive area), and then a patterned metal electrode layer 12 is prepared on the remaining pressure-sensitive area.

[0096] S12: A circle of flexible adhesive layer 13 with a thickness of 100 microns and a circular cross-section is pasted on the outer circle edge and the inner circle edge of the PI flexible substrate to form an outer flexible adhesive layer 131 and an inner flexible adhesive layer 132 respectively. The pressure-sensitive area between the inner and outer flexible adhesive layers forms a cavity structure 102.

[0097] S13: The two-dimensional sulfide material is ultrasonically treated to form uniformly dispersed units, and then an in-situ synthesis method is used to form a composite sensing material with relatively uniform size.

[0098] S14: performing chemical deposition treatment on the surface of the flexible cover film 3 .

[0099] S15: Using a coating process, a layer of two-dimensional sulfide with a thickness of 100 μm is prepared on the front surface of the flexible cover film 3 as the pressure sensing material layer 4 .

[0100] S16: Next, on the back side of the flexible cover film 3, the glue is prepared into a circular strip-shaped protrusion structure by using a printing process, and is tightly attached to the flexible cover film by light curing molding. The height of the circular strip-shaped protrusion is 2000 μm.

[0101] S17: The front side of the flexible cover film 3 is placed downwards and connected to the front side of the flexible substrate 1, and is bonded to the flexible substrate through the inner and outer flexible adhesive layers 13 to form a highly sensitive flexible sensor.

[0102] S18: Finally, anti-corrosion glue is sprayed on the outer edges of the inner and outer flexible adhesive layers 13 by using a spraying process, and an anti-corrosion protection ring 2 is prepared on the outer edges of the inner and outer flexible adhesive layers through photocuring molding. The thickness of the anti-corrosion protection ring 2 is 2000 μm and the width is 5000 μm. Finally, the highly sensitive flexible tactile sensor of the present invention is prepared.

[0103] Example 3:

[0104] like Figure 7 As shown, a method for preparing a highly sensitive flexible tactile sensor comprises the following steps:

[0105] S11: preparing a patterned conductive polymer motor layer 2 on the middle pressure-sensing area of the PET flexible substrate 11.

[0106] S12: A circular flexible adhesive layer 13 with a thickness of 10 microns is pasted on the edge of the PET flexible substrate, thereby forming a cavity structure 102 in the pressure-sensitive area inside the flexible adhesive layer.

[0107] S13: Perform particle implantation treatment on the surface of the flexible cover film 3 .

[0108] S14: using a laser direct writing process, a layer of carbon nanomaterial with a thickness of 1 μm is prepared on the front surface of the flexible cover film 3 as the pressure sensing material layer 4 .

[0109] S15: Next, on the back side of the flexible cover film 3, a protruding structure 5 is formed by bonding the solid adhesive film.

[0110] S16: The front side of the flexible cover film 3 is placed downwards and connected to the front side of the flexible substrate 11, and the flexible substrate is bonded together through the flexible adhesive layer 13 to form a highly sensitive flexible sensor.

[0111] S17: Finally, on the outer edge of the flexible adhesive layer 13, the anti-corrosion film is prepared into an anti-corrosion protection ring 2 with a thickness of 10 μm and a width of 10 microns by using a pasting process. The anti-corrosion protection ring 2 completely covers the flexible adhesive layer 13, and finally the highly sensitive flexible tactile sensor of the present invention is prepared.

[0112] The specific embodiments described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for preparing a highly sensitive flexible tactile sensor, characterized in that: The following steps are involved: S1: pre-treating the flexible substrate and preparing a patterned electrode layer on the front surface of the flexible substrate; S2: preparing a circle of upwardly protruding flexible adhesive layer at the front edge of the flexible substrate, thereby forming a cavity structure inside the flexible adhesive layer, and the patterned electrode layer is regularly arranged in the cavity structure; S3: Surface enhancement treatment of the flexible cover film: S4: preparing a pressure sensing layer on the front surface of the flexible cover film; S5: preparing a plurality of protrusion structures on the back side of the flexible cover film; S6: connecting the pressure sensing layer on the front side of the flexible cover film to the electrode layer on the front side of the flexible substrate, and assembling them together through the flexible adhesive layer, thereby sealing the chamber structure to form a closed chamber; S7: Continue to prepare an anti-corrosion protection ring on the outer edge of the flexible adhesive layer, and the anti-corrosion protection ring completely wraps and covers the flexible adhesive layer.

2. The method for preparing a highly sensitive flexible tactile sensor according to claim 1, wherein: In step S1 , the pre-processing includes setting an opening in the middle of the pressure-sensitive area of the flexible substrate to form a through hole, and the patterned electrode layer avoids the through hole and is regularly set on the pressure-sensitive area.

3. The method for preparing a highly sensitive flexible tactile sensor according to claim 2, wherein: In step S2, a circle of flexible adhesive layer is prepared at the outer edge of the flexible substrate and the edge of the middle through hole thereof to form inner and outer adhesive layers, an annular chamber structure is formed between the inner and outer adhesive layers, and the patterned electrode layer is regularly arranged in the annular chamber structure.

4. The method for preparing a highly sensitive flexible tactile sensor according to claim 2, wherein: In step S7, an anti-corrosion protection ring is prepared on the outer edges of the inner and outer flexible adhesive layers.

5. The method for preparing a highly sensitive flexible tactile sensor according to claim 1, wherein: In step S3 , the surface enhancement treatment includes high temperature enhancement treatment, chemical deposition treatment, and particle implantation treatment to reduce the Young's modulus of the flexible cover film.

6. The method for preparing a highly sensitive flexible tactile sensor according to claim 1, wherein: In step S4, the method for preparing the pressure-sensing layer material further includes using high-shear dispersion processes such as ultrasonic treatment and ball milling to uniformly disperse the particles with pressure-sensitive properties in the dispersion medium to form independent units, and then using an in-situ synthesis method to form a pressure-sensitive composite material with relatively uniform size.

7. A highly sensitive flexible tactile sensor, prepared by the method according to any one of claims 1 to 6, characterized in that: It includes a flexible chamber substrate, an anti-corrosion protection ring, a flexible cover film, a sensing material layer and a plurality of protruding structures; The flexible cavity substrate comprises the flexible substrate, the electrode layer and the flexible adhesive layer being regularly arranged in sequence on the front surface of the flexible substrate, the flexible adhesive layer surrounding the interdigitated electrode region of the electrode layer to form a cavity structure, and the electrode leads of the electrode layer leading out of the cavity structure; The sensing material layer and the interdigitated electrode region of the electrode layer are separated and arranged in the closed chamber.

8. The highly sensitive flexible tactile sensor according to claim 7, characterized in that: The protrusion structures include tiny point-shaped protrusion structures in the shape of a sphere, a hemisphere, a teardrop, a cone, etc., or slender strip-shaped protrusion structures in the shape of a long strip, a ring, etc.; the plurality of protrusion structures are arranged in an array.

9. The highly sensitive flexible tactile sensor according to claim 7, characterized in that: The material of the pressure sensing layer is one of metal nanowires, two-dimensional materials, and carbon nanomaterials, or a composite material of multiple materials.

10. A highly sensitive flexible tactile sensor module, characterized by: It comprises the highly sensitive flexible tactile sensor, a base and a signal processing module as described in claim 7, wherein the highly sensitive flexible sensor is adhered and fixed on the front side of the base, and the signal processing module is regularly arranged inside the base or on the back side of the base; the leads of the highly sensitive flexible tactile sensor are electrically connected to the signal processing module.

11. An embodied intelligent robot with tactile perception function, characterized in that: It includes the high-sensitivity flexible tactile sensor module as described in claim 10, and the high-sensitivity flexible tactile sensor module is regularly set on the embodied intelligent robot to realize the tactile perception function of the embodied intelligent robot.

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