Energy conversion member, vibration power generation device, force sensor device, and driver

Abstract

[Problem] To provide a vibration power generation device capable of improving power generation capability and having stable power generation performance, an energy conversion member constituting the vibration power generation device, a force sensor device having the energy conversion member, and an actuator. [Solution] An energy conversion member (1) is formed by joining a solid soft magnetic material (2) and a solid magnetostrictive material (3). The vibration power generation device (10) is configured so as to generate power by the inverse magnetostrictive effect of the magnetostrictive material (3) generated by the vibration of a vibration part (13) comprising the energy conversion member (1). This force sensor device is provided with a force detection unit that detects a change in magnetization caused by the inverse magnetostrictive effect of a magnetostrictive material when a sensor unit comprising an energy conversion member (1) is deformed, and determines a force acting on the sensor unit on the basis of the change in magnetization. The actuator (20) is configured so as to vibrate a vibrating part (13) comprising the energy conversion member (1) by using the magnetostrictive effect of the magnetostrictive material (3).

Description

This application is a divisional application of Japanese Patent Application No. 201880040190.6, filed on April 20, 2018, entitled "Energy Conversion Component, Vibration Power Generation Device, Force Sensor Device, and Driver." Priority is claimed in Japanese Patent Application No. JP2017-119095, with a priority date of June 16, 2017. Technical Field

[0001] This invention relates to an energy conversion component, a vibration power generation device, a force sensor device, and a driver. Background Technology

[0002] Existing vibration power generation devices using magnetostrictive materials typically have a vibrating part, which is formed by attaching the magnetostrictive material to a vibrating component such as a cantilever beam with an adhesive or the like. The vibration power generation device generates electricity by utilizing the inverse magnetostrictive effect of the magnetostrictive material when it vibrates together with the vibrating component (for example, see Patent Document 1 or 2).

[0003] Furthermore, as a robust and lightweight material with high power generation performance based on the inverse magnetostrictive effect, the inventors have developed a composite material in which wires made of magnetostrictive material are embedded inside a base material made of epoxy resin (for example, refer to Non-Patent Document 1). Patent documents

[0004] Patent Document 1: Japanese Patent Publication No. 2013-177664 Patent Document 2: Japanese Patent Publication No. 2014-107982 Non-patent literature

[0005] Non-patent literature 1: Fumio Narita, “Inverse Magnetostrictive Effect in Fe29Co71 Wire / Polymer Composites”, Advanced Engineering Materials, January 2017, Vol. 19, No. 1, 1600586. Summary of the Invention (a) Technical problems to be solved

[0006] However, in the power generation devices described in Patent Documents 1 and 2, although the power generation capacity can be improved by carefully setting the shape of the vibrating component, etc., through increasing the power generation output or widening the power generation frequency, there is a technical problem that the improvement in power generation capacity is limited. Furthermore, while the composite material described in Non-Patent Document 1 has high power generation capacity, since it is manufactured by flowing epoxy resin, which serves as the base material, around the wire of the magnetostrictive material, there is a technical problem that fluctuations in the quality of the base material may lead to unstable power generation performance.

[0007] The present invention was made in view of the above-mentioned problems, and its object is to provide a vibration power generation device that can improve power generation capacity and has stable power generation performance, an energy conversion component constituting the vibration power generation device, a force sensor device having the energy conversion component, and a driver. (II) Technical Solution

[0008] To achieve the above objectives, the energy conversion component of the present invention is characterized in that it is constructed by joining a solid soft magnetic material and a solid magnetostrictive material through thermal diffusion bonding, hot rolling, hot drawing, cladding rolling, or explosive pressing.

[0009] The energy conversion component of this invention is suitable for use in devices that convert between electrical energy, magnetic energy, mechanical energy, etc., such as vibration power generation devices, force sensor devices, and actuators. For example, the energy conversion component of this invention can be manufactured by mass-producing a component made by bonding a soft magnetic material and a magnetostrictive material as a composite magnetostrictive material, and cutting the desired component shape from this composite magnetostrictive material. Furthermore, the absolute value of the magnetostriction coefficient λ of the magnetostrictive material is 20 ppm or higher.

[0010] The vibration power generation device of the present invention is characterized by having a vibration section composed of the energy conversion component of the present invention, and generating electricity through the inverse magnetostrictive effect of the magnetostrictive material generated by the vibration of the vibration section.

[0011] The vibration power generation device of the present invention generates electricity through the inverse magnetostrictive effect of a magnetostrictive material when the vibrating section, which is composed of the energy conversion component of the present invention, vibrates. Furthermore, the magnetization of a soft magnetic material also changes due to the change in magnetization caused by this inverse magnetostrictive effect. By utilizing this change in the magnetization of the soft magnetic material, the vibration power generation capability based on the inverse magnetostrictive effect can be improved compared to the case where only the inverse magnetostrictive effect of the magnetostrictive material is utilized. In addition, since the vibrating section is formed by combining a solid soft magnetic material and a solid magnetostrictive material, the power generation performance does not fluctuate compared to cases made of liquid materials, thus achieving the desired stable power generation performance.

[0012] The vibration power generation device of the present invention is suitable for installation on a vibrating body. There are no restrictions on the vibrating body as long as it is a vibrating object; however, for efficient power generation, it is preferable to vibrate along the vibration direction of the vibrating part and at a substantially constant frequency including the inherent vibration frequency of the vibrating part. The vibrating body is, for example, industrial machinery such as pumps or motors.

[0013] In the vibration power generation device of the present invention, the vibrating part may have one or more portions where stress concentrates during vibration. In this case, the change in magnetic flux density near the stress concentration portion during vibration can be increased, thereby improving power generation efficiency by adjusting the location of the stress concentration and the position of the power generation coil. The stress concentration portion can be formed, for example, by changing the cross-sectional shape along the length direction of the vibrating part.

[0014] The force sensor device of the present invention is characterized by comprising: a sensor unit comprising the energy conversion component of the present invention; and a force detection unit that detects the change in magnetization caused by the inverse magnetostrictive effect of the magnetostrictive material when the sensor unit is deformed, and calculates the force acting on the sensor unit based on the change in magnetization.

[0015] The force sensor device of the present invention can detect changes in magnetization caused by the inverse magnetostrictive effect of a magnetostrictive material when a force is applied to and the sensor unit, which is composed of the energy conversion component of the present invention, deforms. Furthermore, at this time, the magnetization of the soft magnetic material also changes due to the change in magnetization caused by the inverse magnetostrictive effect. Therefore, compared with the case where only a magnetostrictive material is used, the change in magnetization is increased, thereby improving the ability to detect forces acting on the sensor unit. In addition, since the sensor unit is formed by combining a solid soft magnetic material and a solid magnetostrictive material, the magnetization performance relative to the applied force does not fluctuate compared with the case where it is made of a liquid material, and the desired stable magnetization change performance can be obtained.

[0016] In the force sensor device of the present invention, the force detection unit may also include a magnetic sensor disposed near the magnetostrictive material, which detects the change in magnetization as leakage flux. The magnetic sensor is not limited as long as it can detect the change in magnetization as leakage flux; for example, it may be constructed using a Hall element. Alternatively, the force detection unit may include a detection coil disposed near the magnetostrictive material, which detects the change in magnetization as a change in impedance. The detection coil may be, for example, an electromagnetic coil.

[0017] In the force sensor device of the present invention, the sensor section may have one or more stress concentration points when the force is applied. In this case, the change in magnetic flux density near the stress concentration point when the force is applied can be increased, thereby improving the detection capability by adjusting the location of the stress concentration and the position of the power generation coil. The stress concentration point can be formed, for example, by changing the cross-sectional shape along the length direction of the sensor section.

[0018] The driver of the present invention is characterized by comprising: a vibrating section constituted by the energy conversion component of the present invention; and a vibrating coil configured to vibrate the vibrating section by passing current through it, thereby utilizing the magnetostrictive effect of the magnetostrictive material. The driver of the present invention can have the same structure as the vibration power generation device of the present invention. Furthermore, in the driver of the present invention, the vibrating coil can be wound around the vibrating section or around a magnetically coupled yoke to the vibrating section.

[0019] When a current flows through the vibrating coil, the driver of this invention causes a change in the magnetization of the magnetostrictive material, thus enabling the vibrating section to vibrate through the magnetostrictive effect of the magnetostrictive material. Furthermore, the synergistic effect of the magnetization behavior of the soft magnetic material and the magnetostrictive phenomenon of the magnetostrictive material improves vibration efficiency compared to using only the magnetostrictive material. Additionally, since the vibrating section is formed by combining a solid soft magnetic material and a solid magnetostrictive material, the vibration performance remains stable compared to that made of liquid materials, achieving the desired stable vibration performance.

[0020] In the energy conversion component of the present invention, the magnetostrictive material is preferably composed of Fe-Co alloys, Fe-Al alloys, Ni, Ni-Fe alloys, or Ni-Co alloys. In this case, by subjecting relatively inexpensive Fe-Co alloys, Fe-Al alloys, Ni, Ni-Fe alloys, or Ni-Co alloys to rolling and heat treatment, magnetostrictive materials with high energy conversion efficiency can be easily manufactured. Therefore, the power generation efficiency when used in vibration power generation devices, the force detection capability when used in force sensor devices, and the vibration efficiency when used in actuators can be improved. In addition, since these magnetostrictive materials have excellent machinability and are easy to perform plastic processing such as cutting and bending, they can be easily shaped into arbitrary forms. Furthermore, the Fe content of Ni-Fe alloys is preferably 20% by mass or less, and the Co content of Ni-Co alloys is preferably 30% by mass or less. In addition, to improve corrosion resistance and durability, the magnetostrictive material may contain Cr, Ni, Nb, V, or Ti.

[0021] In the energy conversion component of the present invention, there are no limitations on the soft magnetic material. For example, it can be made of Fe-Ni alloys, represented by pure iron and PB strong magnetic iron-nickel alloys, silicon steel, or electromagnetic stainless steel. Furthermore, the coercivity of the soft magnetic material is preferably below 8 A / cm, and particularly preferably 3 A / cm. Additionally, the soft magnetic material can be made of a magnetostrictive material having a magnetostrictive coefficient with a different sign than that of the magnetostrictive material. For example, either the soft magnetic material or the magnetostrictive material can be made of an Fe-Co alloy or an Fe-Al alloy with a positive magnetostrictive coefficient, while the other can be made of a Ni-0 to 20% by mass Fe alloy (including pure Ni) or a Ni-Co alloy with a negative magnetostrictive coefficient. In this case, the inverse magnetostrictive effect caused by the compressive and tensile stresses generated simultaneously by vibration and force can be utilized, further improving the power generation capacity when used in a vibration power generation device and the force detection capacity when used in a force sensor device. Furthermore, by utilizing the magnetization change caused by the current, the magnetostrictive effect generated simultaneously in both positive and negative magnetostrictive materials can be utilized, thereby further improving the vibration capability when used in actuators.

[0022] Since the energy conversion component of the present invention is joined by thermal diffusion bonding, hot rolling, or hot drawing, the residual stress after high-temperature bonding and subsequent cooling facilitates the movement of the magnetic domain walls of the magnetostrictive material, promoting magnetization changes. Therefore, it is possible to further improve the power generation capability based on the inverse magnetostrictive effect when used in vibration power generation devices, force sensor devices, and vibration capability based on the magnetostrictive effect when used in actuators.

[0023] Regarding the energy conversion component of the present invention, the soft magnetic material and the magnetostrictive material can also be joined under a load. In this case, the domain walls of the magnetostrictive material move more easily by releasing the residual stress after the load is applied, thus promoting magnetization changes. Therefore, it is possible to further improve the power generation capability based on the inverse magnetostrictive effect when used in vibration power generation devices, force sensor devices, and vibration capability based on the magnetostrictive effect when used in actuators.

[0024] Furthermore, regarding the present invention, instead of using soft magnetic materials, a solid component and a solid magnetostrictive material can be joined by thermal diffusion bonding, hot rolling, or hot drawing to form an energy conversion component. Alternatively, a solid component and a solid magnetostrictive material can be joined under applied load by adhesive or welding to form an energy conversion component. In these cases, although not as efficient as using soft magnetic materials, residual stress facilitates the movement of magnetic domain walls in the magnetostrictive material, promoting magnetization changes. Therefore, it is possible to further improve the power generation capability based on the inverse magnetostrictive effect when used in vibration power generation devices, force sensor devices, and the vibration capability based on the magnetostrictive effect when used in actuators. Solid components can be, for example, stainless steel or wood. (III) Beneficial Effects

[0025] According to the present invention, a vibration power generation device capable of improving power generation capacity and having stable power generation performance, an energy conversion component constituting the vibration power generation device, a force sensor device having the energy conversion component, and a driver can be provided. Attached Figure Description

[0026] Figure 1 (a) is a side view showing the thermal diffusion connection of the energy conversion component according to an embodiment of the present invention. Figure 1 (b) is a side view showing the hot rolling process of the energy conversion component according to an embodiment of the present invention. Figure 1 (c) is a side view showing the hot drawing process of the energy conversion component according to an embodiment of the present invention. Figure 2 (a) is a perspective view of the test piece used in the three-point bending test of the energy conversion component according to an embodiment of the present invention. Figure 2 (b) is a side view showing the implementation state of the magnetic flux density measurement test conducted by the three-point bending test. Figure 3 It is shown Figure 2 The graph shown is a result of a magnetic flux density measurement test conducted by a three-point bending test on a test piece of the energy conversion component, which is a graph of the change in magnetic flux density relative to the load. Figure 4 It is shown Figure 2 The graph shown is a diagram of the magnetic flux density measurement test conducted by the three-point bending test, which is a graph of the change of magnetic flux density relative to the load. Figure 5 This is a side view showing a vibration power generation device according to an embodiment of the present invention. Figure 6 It is shown Figure 5The graph shows the power generation of the vibration power generation device, specifically the vibration section formed by thermal diffusion bonding of pure iron and Fe-70% Co alloy, and the vibration section consisting only of Fe-70% Co alloy, relative to the vibration frequency. Figure 7 It is shown Figure 5 The graph shows the power generation of the vibration power generation device as a function of the vibration frequency of the vibration section formed by thermal diffusion bonding of pure iron and pure Ni, pure iron and Ni-10% Fe alloy, and a vibration section consisting only of pure Ni. Figure 8 It is shown Figure 5 The graph shows the power generation of the vibration power generation device, specifically the vibration section formed by thermal diffusion bonding of pure iron and Ni-20% Co alloy, and the vibration section consisting only of Ni-20% Co alloy, relative to the vibration frequency. Figure 9 It is shown Figure 5 The graph shows the measurement results of power generation relative to vibration frequency for the vibration unit of the vibration power generation device, which is formed by thermal diffusion bonding of pure Ni and Fe-70% Co alloy, the vibration unit formed by bonding pure Ni and Fe-70% Co alloy, and the vibration unit consisting only of Fe-70% Co alloy. Figure 10 It is shown Figure 5 The graph shows the power generation of the vibration power generation device, with the vibration part formed by thermal diffusion bonding of pure Ni and Fe-8% Al alloy, and the vibration part consisting only of Fe-8% Al alloy, as well as the measurement results of the vibration frequency. Figure 11 It is shown Figure 5 The graph shows the power generation of the vibration power generation device, specifically the vibration section formed by thermal diffusion bonding of Ni-20% Co alloy and Fe-70% Co alloy, and the vibration section consisting only of Fe-70% Co alloy, relative to the vibration frequency. Figure 12 It is shown Figure 5 The diagram shows the power generation of the vibration power generation device as a function of the vibration section formed by thermal diffusion bonding of SUS304 and Fe-70% Co alloy, the vibration section formed by bonding SUS304 and Fe-70% Co alloy, and the vibration section consisting only of Fe-70% Co alloy. Figure 13 This is a side view illustrating a driver according to an embodiment of the present invention. Figure 14The side view of (a) shows a modified example of the driver according to an embodiment of the present invention, in which the vibrating portion is formed in a double-supported beam shape (Japanese: ryomochi ryojō). Figure 14 The side view of (b) shows a modified example of the driver according to an embodiment of the present invention, in which the coil for vibration is wound around the yoke. Figure 14 The side view of (c) shows a modified example of the driver according to an embodiment of the present invention, which is composed only of the vibrating portion and contacts the electromagnetic field changing body. Detailed Embodiments

[0027] The embodiments of the present invention will be described below based on the drawings. [Regarding the energy conversion component of the embodiment of the present invention] Figures 1 to 4 The energy conversion component 1 according to an embodiment of the present invention is shown. As Figure 1 shown, the energy conversion component 1 has an elongated plate-shaped solid soft magnetic material 2 and an elongated plate-shaped solid magnetostrictive material 3. The soft magnetic material 2 and the magnetostrictive material 3 have the same length and width. The energy conversion component 1 is formed into an elongated plate shape by aligning the surfaces of the soft magnetic material 2 and the magnetostrictive material 3 with their side edges aligned and joining them.

[0028] The soft magnetic material 2 is made of a magnetic material such as pure iron, etc., and the type of its magnetic material is different from that of the magnetostrictive material 3. The magnetostrictive material 3 is made of, for example, an Fe-Co alloy, an Fe-Al alloy, Ni, a Ni-Fe alloy, or a Ni-Co alloy. When made of a Ni-Fe alloy, the Fe content is preferably 20 mass% or less, and when made of a Ni-Co alloy, the Co content is preferably 30 mass% or less. In addition, in order to improve corrosion resistance and durability, the magnetostrictive material 3 may also contain Cr, Ni, Nb, V, Ti, etc. As Figure 1 shown in (a), the energy conversion component 1 is formed by thermally diffusing and joining the soft magnetic material 2 and the magnetostrictive material 3 by heating and applying a load using a pressing device.

[0029] The energy conversion component 1 is suitable for devices that utilize the conversion between energies such as electric energy, magnetic energy, and mechanical energy, such as vibration power generation devices, force sensor devices, and drivers. The energy conversion component 1 of the present invention can be manufactured, for example, by mass-producing a component formed by joining the soft magnetic material 2 and the magnetostrictive material 3 as a composite magnetostrictive material and cutting out a desired component shape from this composite magnetostrictive material.

[0030] In the energy conversion component 1, due to the thermal diffusion bonding of the soft magnetic material 2 and the magnetostrictive material 3, the domain wall movement of the magnetostrictive material 3 becomes easier due to the residual stress after cooling, promoting magnetization change. This improves energy conversion efficiency. Since relatively inexpensive magnetostrictive materials 3 such as Fe-Co alloys, Fe-Al alloys, Ni, Ni-Fe alloys, or Ni-Co alloys can be used, the energy conversion component 1 can be manufactured cheaply and easily. Furthermore, because these magnetostrictive materials 3 have excellent machinability and are easy to process through cutting, bending, and other plastic processes, they can be easily shaped into any form.

[0031] Furthermore, in the energy conversion component 1, the soft magnetic material 2 can be composed of a magnetostrictive material with a magnetostrictive coefficient having a different sign than that of the magnetostrictive material 3. For example, either the soft magnetic material 2 or the magnetostrictive material 3 can be composed of an Fe-Co alloy or an Fe-Al alloy with a positive magnetostrictive coefficient, while the other can be composed of a Ni-0 to 20% by mass Fe alloy (including pure Ni) or a Ni-Co alloy with a negative magnetostrictive coefficient. In this case, the inverse magnetostrictive effect caused by compressive and tensile stresses simultaneously generated by vibration and force can be utilized, thereby improving the energy conversion efficiency.

[0032] Furthermore, the energy conversion component 1 is not limited to thermal diffusion bonding, but can also be achieved through... Figure 1 (b) shows the hot rolling process using rollers. Figure 1 The joining can be performed by any method shown in (c), such as welding or fusion, hot drawing, adhesive bonding, cladding rolling, explosive pressing, etc. In the case of joining by hot rolling and hot drawing, similar to the case of thermal diffusion joining, energy conversion efficiency can be improved.

[0033] Furthermore, the energy conversion component 1 can bond the soft magnetic material 2 and the magnetostrictive material 3 under an applied load. In this case, by releasing the residual stress after bonding, the magnetic domain walls of the magnetostrictive material 3 move more easily, promoting magnetization changes and thus improving energy conversion efficiency. Example 1

[0034] To investigate the energy conversion efficiency of the energy conversion component 1, which is formed by bonding a soft magnetic material 2 and a magnetostrictive material 3, the magnetic flux density was measured when the energy conversion component 1 was bent. Pure Ni was used as the soft magnetic material 2, and an Fe-Co alloy was used as the magnetostrictive material 3. Furthermore, the magnetic material 2 and the magnetostrictive material 3 were bonded by thermal diffusion bonding (hot pressing). Figure 2As shown in (a), the test piece for the energy conversion component 1 is designed as a slender plate with a length of 70 mm, a width of 5 mm, and a thickness of 1 mm. Furthermore, to concentrate stress during bending, a 2 mm long and 1 mm deep notch (groove) 1a is provided at the center of both sides of the test piece. Additionally, pure Ni, as the soft magnetic material 2, is a magnetostrictive material with a negative magnetostriction coefficient, while the Fe-Co alloy, as the magnetostrictive material 3, has a positive magnetostriction coefficient.

[0035] Experiments such as Figure 2 As shown in (b), a three-point bending test was conducted, in which a load was applied to the test piece to bend it, and the magnetic flux density was measured. In the three-point bending test, supports 31 were set at intervals of Ls = 16 mm, sandwiching the center position of the test piece (energy conversion component 1), and a load P was applied downwards to the center position of the test piece. For test pieces with notches 1a, the load P was set in the range of P = 0 N to 25 N; for test pieces without notches 1a, the load P was set in the range of P = 0 N to 50 N. In addition, during the test, 350 mT neodymium magnets 32 were installed at both ends of the test piece, and a bias magnetic field B was applied. oz The bias magnetic field B is measured near the center of the test piece, directly below the load P. oz .

[0036] Furthermore, the test was conducted by swapping the front and back surfaces of the test piece (energy conversion component 1). That is, the side opposite to the surface bearing the load P was used as the tension side, and measurements were taken for the case where the soft magnetic material 2 was the tension side and the magnetostrictive material 3 was the tension side. In addition, a test piece using the non-magnetic material SUS304 instead of the soft magnetic material 2 was prepared as a comparative test piece, and the same test was performed.

[0037] The test results of the test piece for energy conversion component 1 are as follows: Figure 3 As shown, the test results of the comparative test pieces are as follows: Figure 4 As shown. Figure 3 and 4 As shown, it was confirmed that the tensile surface (tension side) was made of pure Ni soft magnetic material 2. Figure 4 When the material is non-magnetic (the compression side is a magnetostrictive material of Fe-Co alloy type 3), the change in magnetic flux density relative to load is larger compared to the opposite direction. Furthermore, due to stress concentration when there is a notch 1a, it is confirmed that the change in magnetic flux density relative to load is larger compared to the case without the notch 1a. Additionally, it is confirmed that under the same test conditions, using… Figure 3 The experimental piece of soft magnetic material 2 shown is in good condition and is being used. Figure 4Compared to the case of the non-magnetic material comparison test piece, the magnetic flux density changes significantly with respect to the load.

[0038] [Regarding the force sensor device according to embodiments of the present invention] Thus, since the force acting on the energy conversion component 1 can be detected as a change in magnetic flux density, the energy conversion component 1 can be used to construct a force sensor device. Such a force sensor device may, for example, have a sensor section and a force detection section, wherein the sensor section is composed of the energy conversion component 1; the force detection section detects the change in magnetization caused by the inverse magnetostrictive effect of the magnetostrictive material 3 when the sensor section deforms, and calculates the force acting on the sensor section based on this change in magnetization. The force detection section may be configured to detect the change in magnetization as leakage flux using a Hall element disposed near the magnetostrictive material 3, or it may be configured to detect the change in magnetization as a change in impedance using an electromagnetic coil disposed near the magnetostrictive material 3.

[0039] Regarding the aforementioned force sensor device, not only does the magnetization change occur due to the inverse magnetostrictive effect of the magnetostrictive material 3 in the sensor section, but the magnetization of the soft magnetic material 2 also changes due to this change in magnetization. Therefore, compared to the case where only the magnetostrictive material 3 is used, the change in magnetization is greater, which improves the ability to detect forces acting on the sensor. Furthermore, since the sensor section is formed by bonding the solid soft magnetic material 2 and the solid magnetostrictive material 3, the magnetization performance relative to the applied force does not fluctuate compared to the case where it is made of liquid material, thus achieving the desired stable magnetization change performance.

[0040] In addition, force sensor devices can also increase the change in magnetic flux density when force is applied, such as... Figure 2 As shown, it has a cutout 1a, etc., which serves as a stress concentration point. In this case, the detection capability can be improved by adjusting the position of the stress concentration and the position of the detection coil, etc.

[0041] [Regarding the vibration power generation device according to an embodiment of the present invention] Figures 5 to 12 The vibration power generation device 10 according to an embodiment of the present invention is shown. like Figure 5 As shown, the vibration power generation device 10 has a housing 11, a support 12, a vibration part 13, a hammer 14, a magnet 15, and a power generation coil 16.

[0042] The housing 11 is constructed of a slender cuboid box with internal storage space. The support 12 is made of a thicker plate and is fixed to one end of the housing 11. The support 12 is fixed such that one surface of the support 12 faces the other end of the housing 11.

[0043] Vibrating part 13 is composed of Figure 1 The energy conversion component 1 shown is configured such that: The vibrating part 13 is located inside the housing 11, extending from one side of the support part 12 toward the other end of the housing 11, with one end 13a fixed to one side of the support part 12. The vibrating part 13 is configured to form a cantilever beam supported on the support part 12 and is capable of vibrating in a direction perpendicular to its length.

[0044] Hammer 14 is mounted at the other end 13b of the vibrating section 13, that is, at the front end of the cantilever beam. At the mounting position where the vibrating section 13 is mounted to the support section 12, magnet 15 is mounted at one end 13a of the vibrating section 13 and the support section 12. Magnet 15 is mounted in contact with the magnetostrictive material 3, enabling it to apply a bias magnetic field to the magnetostrictive material 3. The vibrating section 13 is penetrated by the inner side of the power generation coil 16, and the power generation coil 16 is positioned near the center of the vibrating section 13.

[0045] The vibration power generation device 10 is configured to utilize a housing 11 disposed on a vibrating body, and to cause the other end 13b of the vibrating section 13 to vibrate through the vibration of the vibrating body. Thus, the vibration power generation device 10 generates electricity through the inverse magnetostrictive effect of the magnetostrictive material 3 generated by the vibration of the vibrating section 13. Alternatively, the vibration power generation device 10 may be configured such that, for example, vibration is forcibly applied near the other end 13b of the vibrating section 13.

[0046] Next, the function will be explained. The vibration power generation device 10 is housed in a casing 11 and used for vibrating bodies such as pumps and motors in industrial machinery. In the vibration power generation device 10, when the vibrating part 13 vibrates in a direction perpendicular to its length direction due to the vibration of the vibrating body, the inverse magnetostrictive effect of the magnetostrictive material 3 is utilized, and a change in magnetization is generated through this inverse magnetostrictive effect, thereby changing the magnetization inside and around the soft magnetic material 2. Compared to the case where only the inverse magnetostrictive effect of the magnetostrictive material 3 is utilized, the vibration power generation capability based on the inverse magnetostrictive effect can be improved by utilizing this change in magnetization of the soft magnetic material 2. Furthermore, since the vibrating part 13 is formed by combining a solid soft magnetic material 2 and a solid magnetostrictive material 3, the power generation performance is stable and does not fluctuate compared to cases made of liquid materials, thus achieving the desired stable power generation performance.

[0047] Furthermore, in the vibration power generation device 10, the vibrating part 13 has one or more such... Figure 2The section where stress concentrates during vibration is as shown in (a) with cutout 1a. In this case, the change in magnetic flux density near the stress concentration section during vibration can be increased, and the power generation efficiency can be improved by adjusting the position of the stress concentration and the position of the power generation coil 16. The stress concentration section can be formed, for example, by changing the cross-sectional shape along the length direction of the vibrating section 13. Alternatively, the vibration power generation device 10 may not have the hammer 14 and may be formed as a double support beam (two-end beam, two-end fixed beam, two-end support beam) with the other end 13b of the vibrating section 13 also fixed. Example 2

[0048] for Figure 5 The vibration power generation device 10 shown was used in an experiment to measure the power generation relative to the vibration of a vibrating body using a vibration section 13. This vibration section 13 uses pure iron (coercivity: 0.8 A / cm) as the soft magnetic material 2 and an Fe-70% Co alloy with a positive magnetostriction coefficient as the magnetostrictive material 3. In the experiment, the length, width, and thickness of the vibration section 13 were set to 70 mm, 6 mm, and 1 mm, and the resonant frequency was adjusted to approximately 50 Hz. Furthermore, the vibration section 13 was formed by thermal diffusion bonding of the soft magnetic material 2 and the magnetostrictive material 3.

[0049] Figure 6 The results of power generation measurements are shown when the vibration frequency of the vibrating body is varied. Additionally, for comparison, in... Figure 6 The results are also shown when the vibrating part 13 is formed solely from a magnetostrictive material 3 of Fe-70 mass% Co alloy. For example... Figure 6 As shown, it was confirmed that when pure iron, which is used as soft magnetic material 2, and magnetostrictive material 3 are joined together ( Figure 6 The "pure iron thermal diffusion bonding" in the text is different from the case of only magnetostrictive material 3. Figure 6 Compared to the "Fe-Co system" (as in the text), the power generation was increased at all vibration frequencies. Furthermore, it was confirmed that when pure iron (as the soft magnetic material 2) and magnetostrictive material 3 were combined, the decrease in power generation before and after the resonant frequency was reduced compared to when only magnetostrictive material 3 was used. These results indicate that by combining the soft magnetic material 2 with the magnetostrictive material 3, which has a positive magnetostriction coefficient, the power generation capacity is improved. Example 3

[0050] for Figure 5The vibration power generation device 10 shown was used in an experiment to measure the power generation relative to the vibration of a vibrating body using a vibration section 13. This vibration section 13 used pure iron (coercivity: 0.8 A / cm) as the soft magnetic material 2, and pure Ni with a negative magnetostriction coefficient and a Ni-10 wt% Fe alloy with a negative magnetostriction coefficient as the magnetostrictive materials 3, respectively. In the experiment, the length, width, and thickness of the vibration section 13 were set to 70 mm, 6 mm, and 1 mm, and the resonant frequency was adjusted to approximately 50 Hz. Furthermore, the vibration section 13 was formed by thermal diffusion bonding of the soft magnetic material 2 and the magnetostrictive material 3.

[0051] Figure 7 The results of power generation measurements are shown when the vibration frequency of the vibrating body is varied. Additionally, for comparison, in... Figure 7 The results are also shown when the vibrating part 13 is formed from a magnetostrictive material 3 made solely of pure Ni. For example... Figure 7 As shown, it was confirmed that when pure iron, which is used as soft magnetic material 2, and magnetostrictive material 3 are joined together ( Figure 7 The “Ni+pure iron thermal diffusion bonding” and “NiFe+pure iron thermal diffusion bonding” in the text are compared with the case of only magnetostrictive material 3 ( Figure 7 Compared to using "Ni" as the magnetostrictive material 3, the power generation was increased at all vibration frequencies. Furthermore, it was confirmed that when pure iron (as the soft magnetic material 2) and magnetostrictive material 3 were combined, the decrease in power generation before and after the resonant frequency was reduced compared to using only magnetostrictive material 3. Additionally, it was confirmed that when using pure Ni as the magnetostrictive material 3 (… Figure 7 (Ni + pure iron thermal diffusion bonding), and when using Ni-10% Fe alloys ( Figure 7 The "NiFe + pure iron thermal diffusion bond" exhibits essentially the same power generation across all vibration frequencies. This result indicates that combining the soft magnetic material 2 with the magnetostrictive material 3, which has a negative magnetostriction coefficient, also improves power generation. Example 4

[0052] for Figure 5 The vibration power generation device 10 shown was used in an experiment to measure the power generation relative to the vibration of a vibrating body using a vibration section 13. This vibration section 13 uses pure iron as the soft magnetic material 2 and a Ni-20 mass%Co alloy with a negative magnetostriction coefficient as the magnetostrictive material 3. In the experiment, the length, width, and thickness of the vibration section 13 were set to 70 mm, 6 mm, and 1 mm, and the resonant frequency was adjusted to approximately 50 Hz. Furthermore, the vibration section 13 was formed by thermal diffusion bonding of the soft magnetic material 2 and the magnetostrictive material 3.

[0053] Figure 8The results of power generation measurements are shown when the vibration frequency of the vibrating body is varied. Additionally, for comparison, in... Figure 8 The results are also shown when the vibrating part 13 is formed solely from a magnetostrictive material 3 of a Ni-20 mass% Co alloy. Figure 8 As shown, it was confirmed that when pure iron, as the soft magnetic material 2, is joined with the magnetostrictive material 3, ( Figure 8 The “NiCo+pure iron thermal diffusion bonding” and the magnetostrictive material 3 (in the example) Figure 8 Compared to the "Ni-Co system" (as in the text), the power generation was increased at all vibration frequencies. Furthermore, it was confirmed that when pure iron (as the soft magnetic material 2) and magnetostrictive material 3 were combined, the decrease in power generation before and after the resonant frequency was reduced compared to when only magnetostrictive material 3 was used. These results indicate that by combining the soft magnetic material 2 with the magnetostrictive material 3, which has a negative magnetostriction coefficient, the power generation capacity is improved. Example 5

[0054] for Figure 5 The vibration power generation device 10 shown was used in an experiment to measure the power generation relative to the vibration of a vibrating body using a vibration section 13. This vibration section 13 used pure Ni (coercivity: 0.5 A / cm) with a negative magnetostriction coefficient as the soft magnetic material 2, and Fe-70% Co alloy with a positive magnetostriction coefficient as the magnetostrictive material 3. Two types of vibration sections 13 were used: one formed by bonding the soft magnetic material 2 and the magnetostrictive material 3 through thermal diffusion bonding; and another formed by bonding the soft magnetic material 2 and the magnetostrictive material 3 together. In the experiment, the length, width, and thickness of each vibration section 13 were set to 70 mm, 6 mm, and 1 mm, and the resonant frequency was adjusted to approximately 50 Hz.

[0055] Figure 9 The results of power generation measurements are shown when the vibration frequency of the vibrating body is varied. Additionally, for comparison, in... Figure 9 The results are also shown when the vibrating part 13 is formed solely from a magnetostrictive material 3 of Fe-70 mass% Co alloy. For example... Figure 9 As shown, it was confirmed that when pure Ni, which is used as soft magnetic material 2, and magnetostrictive material 3 are thermally diffused together ( Figure 9 The "Ni thermal diffusion bonding" in the text is related to the bonding process. Figure 9 "Ni bonding" in the text), when only magnetostrictive material 3 is used ( Figure 9Compared to the "Fe-Co system" (as in the text), the power generation was increased at all vibration frequencies. Furthermore, it was confirmed that when bonding was performed, the power generation was increased at vibration frequencies other than near the resonant frequency compared to when only magnetostrictive material 3 was used. Additionally, it was confirmed that when pure iron (as the soft magnetic material 2) and magnetostrictive material 3 were bonded, the decrease in power generation before and after the resonant frequency was reduced compared to when only magnetostrictive material 3 was used.

[0056] These results show that by joining soft magnetic material 2, which has a negative magnetostriction coefficient, and magnetostrictive material 3, which has a positive magnetostriction coefficient, the power generation capacity is improved. Furthermore, it is found that when soft magnetic material 2 and magnetostrictive material 3 are joined by thermal diffusion bonding, the power generation capacity is further improved compared to the case of adhesive bonding due to residual stress after cooling.

[0057] When thermal diffusion bonding is performed on pure Ni as soft magnetic material 2 and magnetostrictive material 3 ( Figure 9 (Ni thermal diffusion bonding) When pure iron, as soft magnetic material 2, and magnetostrictive material 3 are thermally diffused together ( Figure 6 (pure iron thermal diffusion bonding) Figure 7 The terms "Ni + pure iron thermal diffusion bonding" and "NiFe + pure iron thermal diffusion bonding" are mentioned. Figure 8 Comparing the results of the "NiCo + pure iron thermal diffusion bonding" method, it can be seen that the power generation is slightly greater when pure Ni (as soft magnetic material 2) and magnetostrictive material 3 are thermally diffused bonded. This is believed to be due to the following reason: by bonding magnetostrictive materials 3 with magnetostrictive coefficients of different signs, it is possible to utilize the inverse magnetostrictive effect caused by the compressive and tensile stresses generated simultaneously by vibration. Example 6

[0058] for Figure 5 The vibration power generation device 10 shown was used in an experiment to measure the power generation relative to the vibration of a vibrating body using a vibration section 13. This vibration section 13 uses pure Ni, which has a negative magnetostriction coefficient, as a soft magnetic material 2, and an Fe-8% mass Al alloy, which has a positive magnetostriction coefficient, as a magnetostrictive material 3. In the experiment, the length, width, and thickness of each vibration section 13 were set to 70 mm, 6 mm, and 1 mm, and the resonant frequency was adjusted to approximately 50 Hz. Furthermore, the vibration section 13 was formed by thermal diffusion bonding of the soft magnetic material 2 and the magnetostrictive material 3.

[0059] Figure 10 The results of power generation measurements are shown when the vibration frequency of the vibrating body is varied. Additionally, for comparison, in... Figure 10The results are also shown when the vibrating part 13 is formed solely from a magnetostrictive material 3 of Fe-8 mass% Al alloy. Figure 10 As shown, it was confirmed that when pure Ni, as the soft magnetic material 2, and magnetostrictive material 3 are joined together ( Figure 10 The "Fe-AlNi thermal diffusion bonding" in the text is different from the case of only magnetostrictive material 3 ( Figure 10 Compared to the "Fe-Al system" in [the text], the power generation was increased at all vibration frequencies. Furthermore, it was confirmed that when pure Ni (as soft magnetic material 2) and magnetostrictive material 3 were combined, the decrease in power generation before and after the resonant frequency was reduced compared to when only magnetostrictive material 3 was used. From this result, it can be seen that although compared to [the text], [the power generation] is [increased]... Figure 9 The results are slightly worse when using Fe-Co alloys, but when using Fe-Al alloys as magnetostrictive material 3, the power generation capacity is also improved by combining soft magnetic material 2 and magnetostrictive material 3. Example 7

[0060] for Figure 5 The vibration power generation device 10 shown was used in an experiment to measure the power generation relative to the vibration of a vibrating body using a vibration section 13. This vibration section 13 uses a Ni-20% Co alloy (coercivity: 1 A / cm) with a negative magnetostriction coefficient as the soft magnetic material 2, and an Fe-70% Co alloy with a positive magnetostriction coefficient as the magnetostrictive material 3. In the experiment, the length, width, and thickness of each vibration section 13 were set to 70 mm, 6 mm, and 1 mm, and the resonant frequency was adjusted to approximately 50 Hz. Furthermore, the vibration section 13 was formed by thermal diffusion bonding of the soft magnetic material 2 and the magnetostrictive material 3.

[0061] Figure 11 The results of power generation measurements are shown when the vibration frequency of the vibrating body is varied. Additionally, for comparison, in... Figure 11 The results are also shown when the vibrating part 13 is formed solely from a magnetostrictive material 3 of Fe-70 mass% Co alloy. For example... Figure 11 As shown, it was confirmed that when the soft magnetic material 2 and the magnetostrictive material 3 are joined together ( Figure 11 The "FeCo+NiCo thermal diffusion bonding" in the text is different from the case of only magnetostrictive material 3 ( Figure 11 Compared to the "Fe-Co system" in [the study], the power generation was increased at all vibration frequencies. Furthermore, it was confirmed that combining the soft magnetic material 2 and the magnetostrictive material 3 reduced the decrease in power generation before and after the resonant frequency compared to using only the magnetostrictive material 3. These results indicate that, although compared to [the study], [the power generation] increased at all vibration frequencies. Figure 9The results are slightly worse than when using pure Ni, but when using a Ni-20% Co alloy as the magnetostrictive material 2, the power generation capacity is also improved by combining the soft magnetic material 2 and the magnetostrictive material 3.

[0062] [Reference Example] for Figure 5 The vibration power generation device 10 shown was used in an experiment to measure the power generation relative to the vibration of the vibrating body using a vibration section 13. This vibration section 13 used a non-magnetic material SUS304 instead of the soft magnetic material 2, and an Fe-70% Co alloy as the magnetostrictive material 3. Two types of vibration sections 13 were used: one formed by bonding the soft magnetic material 2 and the magnetostrictive material 3 through thermal diffusion bonding; and another formed by bonding the soft magnetic material 2 and the magnetostrictive material 3 together. In the experiment, the length of each vibration section 13 was set to 70 mm, the width to 6 mm, and the thickness to 1 mm, and the resonant frequency was adjusted to approximately 50 Hz.

[0063] Figure 12 The results of power generation measurements are shown when the vibration frequency of the vibrating body is varied. Additionally, for comparison, in... Figure 12 The results are also shown when the vibrating part 13 is formed solely from a magnetostrictive material 3 of Fe-70 mass% Co alloy. For example... Figure 12 As shown, it was confirmed that when the non-magnetic material SUS304 and the magnetostrictive material 3 are thermally diffused together, ( Figure 12 The "SUS304 bonding" in the text refers to the bonding process (when performing the bonding). Figure 12 (SUS304 bonding) and only magnetostrictive material 3 ( Figure 12 Compared to the "Fe-Co system" (as in the text), the power generation was increased at all vibration frequencies. Furthermore, it was confirmed that when bonding was performed, the power generation was increased at vibration frequencies other than the resonant frequency compared to when only magnetostrictive material 3 was used. Additionally, it was confirmed that when the non-magnetic material SUS304 and magnetostrictive material 3 were bonded, the decrease in power generation before and after the resonant frequency was reduced compared to when only magnetostrictive material 3 was used.

[0064] These results show that, although the power generation capacity is slightly lower when the non-magnetic material and the magnetostrictive material 3 are joined, compared to the case using the soft magnetic material 2, the power generation capacity is improved. Furthermore, it is found that, when the non-magnetic material and the magnetostrictive material 3 are joined by thermal diffusion, the residual stress after cooling further improves the power generation capacity compared to the case of bonding.

[0065] [Regarding the driver in embodiments of the present invention] Figure 13 and Figure 14The driver 20 according to an embodiment of the present invention is shown. like Figure 13 As shown, the driver 20 has the same structure as the vibration power generation device 10 of the embodiment of the present invention, and includes a housing 11, a support 12, a vibration part 13, a hammer 14, a magnet 15, and a vibration coil 21. Furthermore, in the following description, the same reference numerals are used for structures identical to those in the vibration power generation device 10 of the embodiment of the present invention, and repeated descriptions are omitted.

[0066] The vibrating coil 21 has a vibrating section 13, which is composed of an energy conversion component 1, passing through its inner side, and the vibrating coil 21 is positioned near the center of the vibrating section 13. The vibrating coil 21 is configured to vibrate the vibrating section 13 by means of the magnetostrictive effect of the magnetostrictive material 3 when an electric current flows through it.

[0067] In the driver 20, when current flows through the vibrating coil 21, the magnetization of the magnetostrictive material 3 changes due to the current, thus enabling the vibrating section 13 to vibrate through the magnetostrictive effect of the magnetostrictive material 3. Furthermore, at this time, the vibration efficiency is improved compared to the case where only the magnetostrictive material 3 is used, due to the synergistic effect of the magnetization behavior of the soft magnetic material 2 and the magnetostrictive phenomenon of the magnetostrictive material 3. In addition, since the vibrating section 13 is formed by combining the solid soft magnetic material 2 and the solid magnetostrictive material 3, the vibration performance is stable and unwavering compared to the case where it is made of liquid material.

[0068] like Figure 13 As shown, in the driver 20, the vibrating body 41 can be vibrated by bringing the vibrating body 41 into contact with the housing 11 and the hammer 14 mounted at the front end of the vibrating part 13 of the cantilever beam.

[0069] In addition, such as Figure 14 As shown in (a), the driver 20 may also not have a hammer 14, but instead form a double-support beam (two-end beam, two-end fixed beam, two-end support beam) that is also fixed at the other end 13b of the vibrating part 13. In this case, in order to efficiently transmit the vibration to the vibrated body 41, it is preferable that at least one of the support 12 that fixes one end 13a of the vibrating part 13 and the second support 12b that fixes the other end 13b is made of an elastic material.

[0070] In addition, such as Figure 14As shown in (b), the driver 20 may also have a soft magnetic yoke 22 that is magnetically coupled to and extends from the vibrating part 13, with the vibration coil 21 wound around the yoke 22 instead of the vibrating part 13. In this case, the vibrating part 13 can be vibrated via the yoke 22 by means of the magnetostrictive effect of the magnetostrictive material 3. Furthermore, since the vibration coil 21 is not wound around the vibrating part 13, the vibrating part 13 can be inserted into a narrower portion, allowing the vibrating object 41 located at the insertion site to vibrate.

[0071] The driver 20 can be used in any situation as long as it is accompanied by vibration. The driver 20 can be used, for example, in the steering wheel of a car or in the seat of an HMI installed to prevent careless driving or drowsy driving; as a vibration source for a vibratory drill; in health devices such as low-frequency therapy; as a vibrator for a mobile phone; as a vibration source for using a vibrating object (wall, table, cone, paper cup, etc.) as a speaker; as a buzzer; as a vibration-based alarm; as a noise canceller or silencer speaker; as a vibration canceller; as a pest / animal repellent that produces a mosquito-like sound; as an ultrasonic sonar; as a fish detector; as headphones or speakers for bone conduction hearing aids; as a foamer for soda or beer; as a cleaning device in piping; as an ultrasonic bathtub; as a dishwashing machine; as an ultrasonic cleaner; as a humidifier; as a residual stress relief device during welding; as a vibrating pen; as a vibrating windshield wiper for cars; as a vibrating motor; as a conveyor for parts feeders; as a skid shield slide; as a high-frequency tuning fork; as an ultrasonic acupressure massager; as an ultrasonic cutter; as a controller for a video game console; as a vibrating alarm clock; as an ion generating device; as a vaporizing device; as a vibrating screen; or as their vibration source.

[0072] In addition, such as Figure 14 As shown in (c), the driver 20 may also consist solely of a vibrating part 13, which is composed of an energy conversion component 1. In this case, the vibrating part 13 can be vibrated by approaching or contacting the electromagnetic field modulator 42, which is composed of a part or object that changes the electromagnetic field. Therefore, by installing it on the bottom of a pot, pan, or similar appliance, when using an electromagnetic cooking device with the electromagnetic field modulator 42, the bottom of the pot, pan, or similar appliance can vibrate to prevent burning. Explanation of reference numerals in the attached figures

[0073] 1-Energy conversion components; 1a - Incision; 2- Soft magnetic materials; 3-Magnetostrictive materials; 10-Vibration power generation device; 11-Shell; 12-Support section; 13-Vibrating part; 14-Hammer; 15-Magnet; 16- Generating coil; 20-Driver; 21-Vibration coil; 22-Magnetic yoke; 31-Pillar; 32-Neodyne magnet; 41 - The vibrating body; 42-Electromagnetic field variable body.

Claims

1. An energy conversion component, characterized in that, It is formed by bonding a solid soft magnetic material with a solid magnetostrictive material through thermal diffusion bonding, hot rolling, or hot drawing. The magnetostrictive material is composed of Fe-Co alloys, Fe-Al alloys, Ni, Ni-Fe alloys, or Ni-Co alloys. The coercivity of the soft magnetic material is below 3 A / cm, and the absolute value of the magnetostriction coefficient of the magnetostrictive material is above 20 ppm. The magnetization of soft magnetic materials can be changed by the magnetization change caused by the inverse magnetostriction effect.

2. The energy conversion component according to claim 1, characterized in that, Either the soft magnetic material or the magnetostrictive material is composed of an Fe-Co alloy or an Fe-Al alloy with a positive magnetostriction coefficient, and the other of the soft magnetic material and the magnetostrictive material is composed of a Ni-0 to 20% by mass Fe alloy or a Ni-Co alloy with a negative magnetostriction coefficient.

3. The energy conversion component according to claim 2, characterized in that, The soft magnetic material and the magnetostrictive material are joined together under an applied load.

4. A vibration power generation device, characterized in that, It has a vibrating part composed of the energy conversion component described in any one of claims 1 to 3. The magnetostrictive material generates electricity through the inverse magnetostrictive effect produced by the vibration of the vibrating part.

5. The vibration power generation device according to claim 4, characterized in that, The vibrating part has one or more portions where stress concentrates during vibration.

6. A force sensor device, characterized in that, have: The sensor unit comprises the energy conversion component as described in any one of claims 1 to 3; and The force detection unit detects the change in magnetization caused by the inverse magnetostriction effect of the magnetostrictive material when the sensor unit is deformed, and calculates the force acting on the sensor unit based on the change in magnetization.

7. The force sensor device according to claim 6, characterized in that, The force detection unit has a magnetic sensor disposed near the magnetostrictive material, and the magnetic sensor detects the change in magnetization as leakage flux.

8. The force sensor device according to claim 6, characterized in that, The force detection unit has a detection coil disposed near the magnetostrictive material, and the change in magnetization is detected by the detection coil as a change in impedance.

9. The force sensor device according to claim 7 or 8, characterized in that, The sensor unit has one or more stress concentration points when the force is applied.

10. A driver, characterized in that, have: The vibrating part, which is composed of the energy conversion component according to any one of claims 1 to 3; and A vibration coil is configured to allow current to flow through it, thereby utilizing the magnetostrictive effect of the magnetostrictive material to cause the vibration part to vibrate.

11. The driver according to claim 10, characterized in that, The vibrating coil is wound around the vibrating part, or around a magnetic yoke that is magnetically coupled to the vibrating part.

Images