Laser pulse shaping device, laser equipment and laser pulse shaping method

Abstract

The invention relates to the technical field of laser processing, and particularly provides a laser pulse shaping device, laser equipment and a laser pulse shaping method, and the device comprises a first connecting piece, a second connecting piece and a light blocking piece; the first connecting piece is configured to be connected with the pre-amplifying device and output first light; the first light comprises a first laser pulse and continuous light; the second connecting pieces and the first connecting pieces are arranged at intervals; the second connecting piece is configured to be connected with the main amplifying device and input a second laser pulse to the main amplifying device; the pulse width of the second laser pulse is smaller than that of the first laser pulse; the light blocking piece is arranged between the first connecting piece and the second connecting piece; the light blocking piece is provided with a light blocking part, the light blocking piece can keep rotation of target frequency and target time delay relative to the first light, continuous light is blocked through the light blocking part, the first laser pulse is shaped, and a second laser pulse is obtained. The laser is shaped and continuous light is blocked through the light blocking piece, the peak power is effectively improved, and the machining quality and efficiency are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser processing, in particular to a laser pulse shaping device, a laser device and a laser pulse shaping method. BACKGROUND

[0002] In the field of glass processing, when using a laser to cut glass, the peak power of the laser is required to be very high. The continuous light component in the interval time of laser pulses is one of the key factors restricting the peak power of the laser.

[0003] Taking a current nanosecond pulse laser as an example, it often combines the use of a pre-amplification light path and a main amplification light path. By controlling the length of the active optical fiber in the pre-amplification light path, the signal-to-noise ratio is reduced, and the proportion of laser components such as amplified spontaneous emission (ASE) is reduced, so as to improve the peak power of the laser.

[0004] However, this method cannot completely eliminate the continuous light in the interval time of laser pulses, resulting in limited improvement of the peak power of the laser. Therefore, the current laser with high peak power cannot meet the increasingly strict requirements of glass processing, and the processing quality and efficiency are poor. SUMMARY

[0005] The laser pulse shaping device, the laser device and the laser pulse shaping method provided by the embodiments of the present application at least solve the problem of low laser peak power of a conventional laser, which leads to poor processing quality and low efficiency. By setting a light blocking member to shape the laser pulse, the peak power of the laser is effectively improved, and the processing quality and efficiency are improved.

[0006] In a first aspect, the present application provides a laser pulse shaping device, comprising a first connecting member configured to connect a pre-amplification device and output a first light; wherein the first light comprises a first laser pulse and continuous light; a second connecting member, which is arranged at intervals with the first connecting member; the second connecting member is configured to connect a main amplification device and input a second laser pulse to the main amplification device; wherein the pulse width of the second laser pulse is smaller than the pulse width of the first laser pulse; a light blocking member is arranged between the first connecting member and the second connecting member; the light blocking member is provided with a light blocking part, and the light blocking member is configured to rotate at a target frequency and a target time delay relative to the first light, so as to block the continuous light through the light blocking part and shape the first laser pulse to obtain the second laser pulse.

[0007] In one embodiment of the present application, two light-blocking members are provided, and the two light-blocking members are arranged in sequence along a first direction; the light-blocking portions of the two light-blocking members are arranged in staggered manner along the rotation direction of the light-blocking members; and the first direction is parallel to the arrangement direction of the first connecting member and the second connecting member.

[0008] In one embodiment of the present application, at least one light-blocking member is configured to be rotatable relative to another light-blocking member to adjust the pulse width range shaped by the light-blocking portion.

[0009] In one embodiment of the present application, at least one light-blocking member is configured to be movable relative to another light-blocking member along the first direction.

[0010] In one embodiment of the present application, the light-blocking member is further provided with a light-transmitting portion, which is arranged as a light-transmitting hole or an attenuation component.

[0011] In one embodiment of the present application, the light-transmitting portion comprises two shaping side edges; the two shaping side edges are arranged in sequence and in spaced manner along the rotation direction of the light-blocking member; and the spacing dimension of the two shaping side edges in the rotation direction of the light-blocking member gradually decreases along the direction perpendicular to the rotation axis of the light-blocking member.

[0012] In one embodiment of the present application, the light-blocking member is configured to be movable relative to the first connecting member and the second connecting member along the direction perpendicular to the rotation axis of the light-blocking member, or / and, the first connecting member and the second connecting member are configured to be movable relative to the light-blocking member.

[0013] In one embodiment of the present application, the light-transmitting portion and the light-blocking portion of the light-blocking member are each provided with a plurality of portions; the plurality of light-transmitting portions and the plurality of light-blocking portions are arranged in sequence and in alternating manner along the rotation direction of the light-blocking member.

[0014] In one embodiment of the present application, further comprising: a rotary driving member arranged between the first connecting member and the second connecting member; the driving end of the rotary driving member is connected to the light-blocking member to drive the light-blocking member to rotate; and the rotation speed of the rotary driving member is configured to be adjustable to adjust the size of the target frequency.

[0015] In one embodiment of the present application, further comprising: a controller electrically connected to the rotary driving member; the controller is configured to emit a first control signal and a second control signal; the rotary driving member is configured to, in the case of receiving the first control signal, arrange the light-blocking portion of the light-blocking member between the first connecting member and the second connecting member to block the first light; and, in the case of receiving the second control signal, make the light-blocking member rotate at the target frequency and the target time delay relative to the first light.

[0016] In one embodiment of the present application, the first connecting member comprises a first collimator and a first optical fiber, the first optical fiber is connected to the first collimator, and the first optical fiber is configured to be connected to the pre-amplification device; the second connecting member comprises a second collimator and a second optical fiber, the light blocking member is arranged between the first collimator and the second collimator; the second optical fiber is connected to the second collimator, and the second optical fiber is configured to be connected to the main amplification device.

[0017] In one embodiment of the present application, further comprising: a packaging shell; the first collimator, the light blocking member and the second collimator are arranged in the packaging shell, and the first collimator and the second collimator are connected to the packaging shell.

[0018] In a second aspect, the present application further provides a laser device comprising a pre-amplification device, a main amplification device, and the laser pulse shaping device of any one of the above.

[0019] In a third aspect, the present application further provides a laser pulse shaping method applied to the laser device of any one of the above, comprising the steps of: in response to a third control signal, starting the pre-amplification device to make the first connecting member connected to the pre-amplification device output first light; wherein the first light comprises a first laser pulse and continuous light; the second connecting member is arranged apart from the first connecting member, and the second connecting member is connected to the main amplification device; a light blocking member is arranged between the first connecting member and the second connecting member, and the light blocking member is provided with a light blocking part; in response to a second control signal, controlling the light blocking member to rotate relative to the first light at a target frequency and a target time delay, so as to block the continuous light through the light blocking part and shape the first laser pulse to obtain a second laser pulse; wherein the pulse width of the second laser pulse is smaller than the pulse width of the first laser pulse; and the second connecting member inputs the second laser pulse to the main amplification device.

[0020] In one embodiment of the present application, before the step of, in response to a third control signal, starting the pre-amplification device to make the first connecting member connected to the pre-amplification device output first light, further comprising the step of: in response to a first control signal, controlling the light blocking part of the light blocking member to be arranged between the first connecting member and the second connecting member to block the first light.

[0021] The above technical solution of the present application has the following beneficial effects compared with the prior art:

[0022] The laser pulse shaping device, laser equipment, and laser pulse shaping method described in this invention utilize a rotating light-blocking component that maintains the target frequency and target delay relative to the first light beam. The light-blocking portion of the component blocks continuous light within the first beam, simultaneously shaping the first laser pulse to obtain a second laser pulse. Firstly, adjusting the laser pulse width effectively increases the final peak power. Simultaneously, blocking the continuous light prevents premature energy consumption, further enhancing the final peak power, enabling the output laser to perform high-quality, efficient glass processing. Secondly, the rotating light-blocking component facilitates heat dissipation, offers high fault tolerance, and has strong laser energy handling capability. Finally, the light-blocking component is low-cost, small in size, easy to maintain, and compatible with lasers of different spot diameters. Attached Figure Description

[0023] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention. In the drawings:

[0024] Figure 1 This is one of the structural schematic diagrams of the laser pulse shaping device in a preferred embodiment of the present invention.

[0025] Figure 2 This is one of the structural schematic diagrams of the light-blocking element in a preferred embodiment of the present invention.

[0026] Figure 3 This is a schematic diagram of the laser pulse shaping result in a preferred embodiment of the present invention.

[0027] Figure 4 This is the second schematic diagram of the laser pulse shaping device in a preferred embodiment of the present invention.

[0028] Figure 5 This is the second schematic diagram of the structure of the light-blocking element in a preferred embodiment of the present invention.

[0029] Figure 6 This is the third schematic diagram of the structure of the light-blocking element in a preferred embodiment of the present invention.

[0030] Figure 7 This is one of the schematic diagrams of the movable adjustment structure of the laser pulse shaping device in a preferred embodiment of the present invention.

[0031] Figure 8 This is the second schematic diagram of the moving adjustment structure of the laser pulse shaping device in a preferred embodiment of the present invention.

[0032] Figure 9 This is the fourth schematic diagram of the structure of the light-blocking element in a preferred embodiment of the present invention.

[0033] Figure 10is a schematic diagram of laser pulse amplitude promotion results in a preferred embodiment of the present application.

[0034] Figure 11 is a schematic diagram of a laser device in a preferred embodiment of the present application.

[0035] Figure 12 is a schematic diagram of a laser pulse shaping method in a preferred embodiment of the present application.

[0036] Wherein, the above drawings include the following reference signs: D1, first direction; 10, first connecting piece; 11, first collimator; 12, first optical fiber; 20, second connecting piece; 21, second collimator; 22, second optical fiber; 30, light blocking piece; 31, light blocking part; 32, light transmission hole; 321, first shaping side; 33, attenuation part; 331, second shaping side; 40, rotary driving piece; 50, controller; 60, packaging shell; 70, pre-amplification device; 80, main amplification device. DETAILED DESCRIPTION

[0037] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0038] It should be noted that the terms used herein are only intended to describe specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and it should also be understood that the terms "comprise" and / or "include" as used in the specification indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0039] The relative arrangement of components and steps, numerical expressions and values set forth in these embodiments do not limit the scope of the present application unless otherwise specifically stated. At the same time, it should be understood that the sizes of the various parts shown in the drawings are not drawn in proportion to the actual proportions. Techniques, methods and devices known to those of ordinary skill in the relevant art can not be discussed in detail, but should be considered as part of the authorized specification where appropriate. In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of exemplary embodiments can have different values. It should be noted that similar reference signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0040] It should be noted that the particles of the laser medium are excited to a high energy level state, but these particles will not always remain at a high energy level, and a part of the particles will jump back to a low energy level and release photons, i.e. spontaneous emission. These photons, after being amplified by the laser amplifier, form spontaneous emission amplified light (ASE light).

[0041] The spontaneous emission amplified light is continuous, and as long as the pump provides energy, the spontaneous emission amplified light will always produce and consume energy, regardless of whether the laser outputs pulses.

[0042] The energy of the pulse laser is concentrated, that is, most of the energy is released in a very short pulse time. The peak power = energy / pulse width, for example, the energy of a 1 ns pulse is concentrated in 10 -9 seconds. Due to the continuous consumption of the energy provided by the main pump by the spontaneous emission amplified light in the pulse interval, the energy that can be stored in the laser medium for pulse use is reduced, resulting in a decrease in the peak power of the final laser.

[0043] The related nanosecond pulse fiber laser reduces the signal-to-noise ratio and the proportion of spontaneous emission amplified light and other laser components by controlling the length of the active optical fiber in the pre-amplification optical path, but cannot be completely eliminated, and the effect of increasing the peak power of the laser is limited. Among them, the signal-to-noise ratio is used to represent the light component, and the higher the signal-to-noise ratio, the greater the proportion of the required light component, and the better the light source.

[0044] Low-peak-power lasers often have poor processing results when facing high processing requirements of glass: low efficiency during processing, and poor quality of processed products.

[0045] In order to solve the above problems, referring to Figure 1 and Figure 2 , an embodiment of the present application provides a laser pulse shaping device, comprising a first connecting piece 10, a second connecting piece 20 and a light blocking piece 30.

[0046] The first connecting piece 10 is configured to connect a pre-amplification device 70 and output first light. The first light includes first laser pulses and continuous light. The second connecting piece 20 is configured to connect a main amplification device 80 and input second laser pulses to the main amplification device 80.

[0047] The pre-amplification device 70 is used in cooperation with the main amplification device 80. The pre-amplification device 70 is preferably set as a pre-amplification optical path device, which mainly includes a pre-amplification pump source and a pre-amplification optical path structure, and is used for realizing high-gain amplification of a small signal. The main amplification device 80 is preferably set as a main amplification optical path device, which mainly includes a main amplification pump source and a main amplification optical path structure, and is used for realizing high-power gain amplification of the light signal output by the pre-amplification optical path device. The pre-amplification optical path structure and the main amplification optical path structure both include some lenses, such as mirrors, lenses, etc., and the pre-amplification pump source and the main amplification pump source are responsible for energy supply.

[0048] In operation, the pre-amplification device 70 provides laser with required wavelength, quality stability and other parameters, which is the first laser pulse in the embodiment of the present application. The first laser pulse output by the pre-amplification device 70 is input to the main amplification device 80, and the main amplification device 80 injects energy into the first laser pulse to amplify it into laser with higher power.

[0049] In the embodiment of the present application, the first connecting member 10 and the second connecting member 20 are respectively arranged to connect corresponding devices to realize transmission of laser pulses. Exemplarily, the two connecting members can be arranged as optical fibers or a combination of optical fibers and collimators. The first connecting member 10 and the second connecting member 20 can be respectively provided with independent fixing structures to realize fixing, or the first connecting member 10, the second connecting member 20 and the light blocking member 30 can be packaged together through a shell as long as the two members can smoothly transmit laser pulses.

[0050] However, at the same time of generating the first laser pulse, continuous light such as ASE light is also generated due to spontaneous radiation and other reasons. When processing glass, the laser required is concentratedly used. In the pulse interval, the continuous light continuously consumes the main pump energy, reduces the peak power of the final laser, and further affects the processing quality and processing efficiency of the glass.

[0051] Therefore, in the embodiment of the present application, the light blocking member 30 is arranged to ensure high peak power of the final laser. Specifically, the second connecting member 20 is arranged to be spaced apart from the first connecting member 10, and the light blocking member 30 is arranged between the first connecting member 10 and the second connecting member 20. The light blocking member 30 can be provided with an independent fixing structure to realize fixing, or the light blocking member 30 and the two connecting members can be packaged together through a shell.

[0052] The light blocking member 30 is provided with a light blocking part 31, and a person skilled in the art can arrange the number of light blocking parts 31 according to actual needs, for example, one or more.

[0053] Exemplarily, the light blocking part 31 can be a light blocking sheet or a light attenuation sheet with a specific refractive index. In this way, the manufacturing time of the light blocking member 30 is short, the material cost is low, the volume is small, which is beneficial to the miniaturization of the laser equipment, and the light blocking member 30 is easy to maintain and does not need to be repeatedly adjusted. In this way, the light hitting the light blocking part 31 is blocked and cannot pass through the light blocking member 30, and the light not hitting the light blocking part 31 is not blocked and can pass through the light blocking member 30.

[0054] The light blocking member 30 is configured to rotate relative to the first light to maintain the target frequency and the target time delay. Exemplarily, a driver such as a motor can be arranged to drive the light blocking member 30 to rotate.

[0055] Wherein, the target frequency can be set according to the frequency of the first laser pulse and the required frequency of the second laser pulse, while keeping the structure of other components unchanged, thereby ensuring that the light-blocking part 31 of the light-blocking piece 30 can block the continuous light and let the first laser pulse pass. For example, a relative frequency coefficient can be set when driving the light-blocking piece 30 to rotate, based on the first laser pulse. The relative frequency coefficient is equal to the frequency of the first laser pulse divided by the frequency of the second laser pulse.

[0056] The target delay time can be set according to the pulse width of the first laser pulse and the required pulse width of the second laser pulse. The target delay time mainly includes a first delay time and a second delay time.

[0057] The first delay time requires the light-blocking part 31 to delay for a certain time after blocking the continuous light, thereby also blocking the rising edge of the first laser pulse to shape the rising edge.

[0058] The second delay time is the length of time from when the light-blocking part 31 completes the shaping of the rising edge of the first laser pulse and the avoidance of the first laser pulse to when it resumes blocking again. It can also be understood as the light transmission time when the first laser pulse is not blocked. A suitable second delay time can be set to make the light-blocking part 31 resume blocking in advance, thereby also blocking the falling edge of the first laser pulse to shape the falling edge.

[0059] In this way, the light-blocking part 31 of the light-blocking piece 30 can shape the first laser pulse to obtain the second laser pulse, and the pulse width of the second laser pulse is smaller than that of the first laser pulse.

[0060] For example, if the frequency of the first laser pulse is 120KHz and the full pulse width is 500ns, the relative frequency coefficient is set to 2, the first delay time is 50ns, and the second delay time is 400ns, then the frequency of the obtained second laser pulse is 60KHz and the full pulse width is 400ns.

[0061] In the first aspect, the light-blocking part 31 of the light-blocking piece 30 can shape the first laser pulse based on the light-blocking characteristics of the light-blocking part 31 before the first light enters the second connecting piece 20 and enters the main amplifying device 80, thereby adjusting the pulse width of the first laser pulse.

[0062] For example, the light blocking can be implemented on the rising edge or / and the falling edge of the first laser pulse to obtain a second laser pulse with a target pulse shape. In this case, the power of the first laser pulse can be regarded as a parabola opening downward, that is, the power of the first laser pulse changes from low to high and then from high to low, and there is a power switching process. Generally, a certain range of the part from low to high is referred to as a rising edge, and a certain range of the part from high to low is referred to as a falling edge.

[0063] In this way, there are three cases, that is, the light blocking is implemented only on the rising edge of the first laser pulse, the light blocking is implemented only on the falling edge of the first laser pulse, and the light blocking is implemented on the rising edge and the falling edge of the first laser pulse respectively. The three cases can compress the pulse width of the first laser pulse.

[0064] It can be understood that the peak power of laser is equal to the pulse energy divided by the pulse width. In the case that the pulse energy is constant and the pulse width is compressed by the light blocking member 30, the peak power of laser is improved.

[0065] It should be noted that, in addition to shaping each first laser pulse, the target rotation frequency can also be set to shape a pulse train including a plurality of first laser pulses.

[0066] In the second aspect, the light blocking part 31 of the light blocking member 30 can block the continuous light based on the light blocking characteristics of the light blocking part 31 during the process that the first light is input to the second connecting member 20, so as to avoid the continuous light from entering the main amplifying device 80 together with the shaped second laser pulse.

[0067] In this way, the continuous light can be effectively prevented from consuming the main pump energy in advance. The peak power of laser is equal to the pulse energy divided by the pulse width. In the case that the pulse width is compressed and the pulse energy is no longer consumed, the peak power of laser is effectively improved. The finally output laser can be used to process glass with high quality and high efficiency.

[0068] In the third aspect, the light blocking member 30 is rotating during the operation, and has a strong laser energy bearing capacity. Specifically, when the light blocking member 30 rotates, the air near the light blocking member 30 has a relative flow rate, which facilitates heat dissipation of the light blocking member 30 itself. At the same time, even if the light blocking member 30 deviates due to heat, machining error or the like, the influence of the deviation can be slowed down by controlling the rotation speed of the light blocking member 30, so that the fault tolerance is high.

[0069] In the fourth aspect, the light blocking member 30 has different shapes and sizes of light blocking parts 31 and rotation frequencies according to actual laser settings, so as to be compatible with lasers with different spot diameters. Compared with the mode locking scheme limited by the diameter of the optical fiber and the acousto-optic modulator (AOM) or electro-optic modulator (EOM) limited by the size of the crystal in the related art, the light blocking member 30 is particularly suitable for lasers with large-diameter spots.

[0070] Referring to Figure 3 as shown, Figure 3 is a schematic diagram of the laser pulse shaping result. Figure 3 In the first light shown in the middle, the plurality of downward curves of the openings are the first laser pulses, and the dashed lines between the adjacent two first laser pulses represent the continuous light, such as ASE light, of the pulse interval. By setting the light-blocking piece 30 that can keep the target frequency and the target delay rotation relative to the first light, the light-blocking part 31 of the light-blocking piece 30 is used to block the continuous light and shape the first laser pulse, and the final laser with higher peak power can be obtained.

[0071] The laser pulse shaping device provided by the application, by setting the light-blocking piece 30 that can keep the target frequency and the target delay rotation relative to the first light, the light-blocking part 31 of the light-blocking piece 30 is used to block the continuous light in the first light, and the first laser pulse in the first light is shaped to obtain the second laser pulse. First, the adjustment of the laser pulse width can effectively improve the final peak power, and the continuous light is blocked and cannot consume energy in advance, further improving the final peak power, so that the final output laser can process glass with high quality and high efficiency. Secondly, the rotating light-blocking piece 30 can realize heat dissipation, has high fault tolerance and strong laser energy bearing capacity. Finally, the light-blocking piece 30 has low cost, small size and is easy to maintain, and can realize compatibility of lasers with different spot diameters.

[0072] Referring to Figure 4 and Figure 5 as shown, the laser pulse shaping device provided by the application, in some embodiments, the light-blocking piece 30 is provided with two, and the two light-blocking pieces 30 are sequentially arranged along the first direction D1. Along the rotation direction of the light-blocking piece 30, the light-blocking parts 31 of the two light-blocking pieces 30 are arranged in a staggered manner. Wherein, the first direction D1 is parallel to the arrangement direction of the first connecting piece 10 and the second connecting piece 20. Preferably, the rotation axis of the light-blocking piece 30 is parallel to the first direction D1, and the two light-blocking pieces 30 are arranged with the same rotation axis.

[0073] The light-blocking piece 30 shapes different first laser pulses based on the shape and size of the light-blocking part 31 itself and the target frequency of rotation. For the first laser pulse with a relatively wide pulse width, such as tens of nanoseconds or hundreds of nanoseconds, a light-blocking piece 30 can be directly used to shape the pulse width and eliminate the continuous light. For the first laser pulse with a relatively narrow pulse width, the machining requirement of the light-blocking piece 30 is relatively high when only one light-blocking piece 30 is used, resulting in increased cost.

[0074] To this end, for the first laser pulse with a relatively narrow pulse width, the embodiment of the present application sets two light blocking pieces 30, and sets the light blocking parts 31 of the two light blocking pieces 30 to be kept staggered in the rotation direction of the light blocking piece 30. Through the cooperation of the two light blocking pieces 30, one light blocking part 31 of one light blocking piece 30 and one light blocking part 31 of the other light blocking piece 30 limit a narrower gap, so as to adapt to the first laser pulse with a relatively narrow pulse width. On this basis, the processing difficulty of the light blocking part 31 on a single light blocking piece 30 is effectively reduced, so as to save processing time and material cost.

[0075] In actual use, a larger number of light blocking pieces 30 can also be set, such as three, four, five, etc., and preferably only two.

[0076] Among them, the two light blocking pieces 30 can be rotationally driven by the same driver, or an independent driver can be provided for each light blocking piece 30 to realize rotational driving. In continuous light blocking and shaping, the two light blocking pieces 30 are kept synchronous rotation.

[0077] Further, referring to Figure 4 and Figure 5 As shown, in some embodiments of the laser pulse shaping device of the present application, at least one light blocking piece 30 is configured to be rotatable relative to the other light blocking piece 30 to adjust the pulse width range shaped by the light blocking part 31. Thus, there are three cases.

[0078] First, the first light blocking piece 30 is configured to be rotatable relative to the second light blocking piece 30. Second, the second light blocking piece 30 is configured to be rotatable relative to the first light blocking piece 30. Third, both light blocking pieces 30 are configured to be rotatable relative to the other light blocking piece 30.

[0079] Here, the rotation direction of the light blocking piece 30 is preferably the original rotation direction, or the opposite direction of the original rotation direction. In the case where the two light blocking parts 31 are relatively close, the pulse width of the second laser pulse is correspondingly smaller; on the contrary, in the case where the two light blocking parts 31 are relatively far apart, the pulse width of the second laser pulse is correspondingly larger. After adjustment, the two light blocking pieces 30 are synchronously rotated.

[0080] In glass processing, different products or even different parts of the same product may require different lasers. On this basis, there may be different requirements for the pulse width of the second laser pulse. By configuring at least one light blocking piece 30 to be rotatable relative to the other light blocking piece 30, the pulse width range shaped by the light blocking part 31 can be adjusted, the optimal relative angle α can be set according to actual needs, and the most suitable second laser pulse can be obtained, thereby increasing the compatibility of the device for different processing needs.

[0081] The laser pulse shaping device, in some embodiments, the light blocking piece 30 is further provided with a light passing part for passing light. The light passing part can be provided as a light passing hole 32 or an attenuation part 33.

[0082] Referring to Figure 6 Fig. 2, in some embodiments, the light blocking piece 30 is provided with a light passing hole 32, for example, the shape of the light passing hole 32 can be set according to actual needs, for example, the light passing hole 32 can be set as a round hole, a square hole, a trapezoidal hole, a triangular hole, etc. In the case of setting multiple light blocking pieces 30, it is preferred to set two light blocking pieces 30 to be the same, including setting the shapes of the light passing holes 32 of the two to be the same.

[0083] Preferably, the light passing hole 32 includes two first shaping side edges 321. Along the rotation direction of the light blocking piece 30, the two first shaping side edges 321 are sequentially spaced apart. Along the direction perpendicular to the rotation axis of the light blocking piece 30, the spacing size of the two first shaping side edges 321 in the rotation direction of the light blocking piece 30 gradually decreases.

[0084] It can be understood that the spacing size of the two first shaping side edges 321 in the rotation direction of the light blocking piece 30 has two cases in total. First, along the direction perpendicular to the rotation axis of the light blocking piece 30, from the rotation center of the light blocking piece 30 to the edge, the spacing size of the two first shaping side edges 321 in the rotation direction of the light blocking piece 30 gradually decreases. For example, in Figure 6 , X1 and X2 respectively indicate the spacing size of the first shaping side edge 321. Second, along the direction perpendicular to the rotation axis of the light blocking piece 30, from the edge of the light blocking piece 30 to the rotation center, the spacing size of the two first shaping side edges 321 in the rotation direction of the light blocking piece 30 gradually decreases.

[0085] In the case of setting the light passing hole 32 with two first shaping side edges 321, it is convenient for the two light blocking pieces 30 to cooperate with each other to achieve flexible adjustment of the pulse width range of the shaped light blocking part 31.

[0086] Preferably, the shape of the light passing hole 32 is set as an isosceles trapezoidal hole, and the two waists of the isosceles trapezoid are the two first shaping side edges 321.

[0087] Referring to Figure 6 Fig. 3, in some embodiments of the laser pulse shaping device, the light passing hole 32 and the light blocking part 31 of the light blocking piece 30 are both provided with multiple ones. Along the rotation direction of the light blocking piece 30, the multiple light passing holes 32 and the multiple light blocking parts 31 are sequentially and alternately arranged.

[0088] It can be understood that the first shaping side 321 of the light transmission hole 32 at this time can also be understood as the side of the two light blocking parts 31 adjacent to the light transmission hole 32. By arranging a plurality of light transmission holes 32 and a plurality of light blocking parts 31, the switching of light transmission and light blocking can be more efficient, the flexible adaptation of the first light can be realized, and the requirement of the light blocking piece 30 for the rotating speed is reduced.

[0089] Further, referring to Figure 7 The laser pulse shaping device provided by the application, in some embodiments, the light blocking piece 30 is configured to be movable relative to the first connecting piece 10 and the second connecting piece 20, or / and the first connecting piece 10 and the second connecting piece 20 are configured to be movable relative to the light blocking piece 30, in the direction perpendicular to the rotating axis of the light blocking piece 30.

[0090] Thus, there are three cases. First, only the light blocking piece 30 is configured to be movable relative to the first connecting piece 10 and the second connecting piece 20. Second, the first connecting piece 10 and the second connecting piece 20 are configured to be movable relative to the light blocking piece 30. Third, the light blocking piece 30 is movable relative to the first connecting piece 10 and the second connecting piece 20, and the first connecting piece 10 and the second connecting piece 20 are movable relative to the light blocking piece 30.

[0091] The specific movement adjustment mode of the light blocking piece 30, the first connecting piece 10 and the second connecting piece 20 can be set according to actual needs. For example, when using independent structures to fix each component, a driver can be added to the corresponding fixing structure, or a guide rail and a guide rail clamp can be added to realize movement adjustment. When using the packaging shell 60 to package each component, a plurality of adjustment hole positions can be pre-set on the packaging shell 60, so as to realize movement adjustment by replacing the hole position of the component.

[0092] Taking the isosceles trapezoidal light transmission hole 32 as an example, in the direction perpendicular to the rotating axis of the light blocking piece 30, the corresponding interval size of the two first shaping sides 321 in the rotating direction of the light blocking piece 30 is also different when the light blocking piece 30 is moved relative to the first connecting piece 10 and the second connecting piece 20, or the first connecting piece 10 and the second connecting piece 20 are moved relative to the light blocking piece 30.

[0093] Thus, the pulse width range shaped by the light blocking part 31 can be adjusted to obtain the most suitable second laser pulse, and the compatibility of the device for different processing requirements is increased.

[0094] It should be noted that the movement adjustment of each component in the direction perpendicular to the rotating axis of the light blocking piece 30 can be used in cooperation with the scheme of adjusting the pulse width range by relative rotation between the light blocking piece 30, or can be used independently.

[0095] Referring to Figure 8As shown, in some embodiments, the laser pulse shaping device described in the present application is configured such that at least one light blocking member 30 is movable relative to another light blocking member 30 along the first direction D1.

[0096] In this way, there are three cases. First, the first light blocking member 30 is movable relative to the second light blocking member 30. Second, the second light blocking member 30 is movable relative to the first light blocking member 30. Third, both light blocking members 30 are movable.

[0097] In this way, there are three cases. First, the first light blocking member 30 is movable relative to the second light blocking member 30. Second, the second light blocking member 30 is movable relative to the first light blocking member 30. Third, both light blocking members 30 are movable.

[0098] In actual use, taking a collimator as an example, collimators of different specifications have different working distance requirements along the first direction D1, for example, 8 cm or 10 cm. By configuring the light blocking member 30 to be movable along the first direction D1, different collimators can be compatible, so that when there is a demand, only the collimator needs to be replaced without replacing the entire device.

[0099] Meanwhile, in some special cases, it may be necessary to add other components between the pre-amplification device 70 and the main amplification device 80, such as a filter, an aperture, etc. In this case, the light blocking member 30 movable along the first direction D1 can facilitate functional expansion.

[0100] Finally, in batch manufacturing, there may be differences in laser light pulses, and in order to ensure consistent shaping effects of rising edges and falling edges of light pulses, the spacing position of the light blocking member 30 along the first direction D1 may be fine-tuned. Directly configuring the light blocking member 30 to be movable along the first direction D1 can effectively increase the fault tolerance of the device.

[0101] Reference Figure 9 As shown, in some embodiments, the laser pulse shaping device described in the present application is configured such that at least one light blocking member 30 is movable relative to another light blocking member 30 along the first direction D1.

[0102] The attenuation component 33 is preferably a light attenuation sheet, and can also be coated on a flat lens, such as a 1 to 1.1 micron reflective or absorptive film layer. The refractive index of the attenuation component 33 can be set to 1.35, 1.37, 1.42, 1.45, 1.47, etc.

[0103] Further, the attenuation component 33 and the light blocking part 31 of the light blocking piece 30 are both provided in multiple. Along the rotation direction of the light blocking piece 30, the multiple attenuation components 33 and the multiple light blocking parts 31 are alternately arranged in sequence. By providing multiple attenuation components 33 and multiple light blocking parts 31, the switching of light transmission and light blocking can be more efficient, the flexible adaptation of the first light can be realized, and the requirement of the light blocking piece 30 for the rotation speed is reduced.

[0104] Further, the attenuation component 33 includes two second shaping side edges 331. Along the rotation direction of the light blocking piece 30, the two second shaping side edges 331 are sequentially and spaced apart. Along the direction perpendicular to the rotation axis of the light blocking piece 30, the spacing size of the two second shaping side edges 331 in the rotation direction of the light blocking piece 30 gradually decreases.

[0105] It can be understood that the spacing size of the two second shaping side edges 331 in the rotation direction of the light blocking piece 30 has two cases in total. First, along the direction perpendicular to the rotation axis of the light blocking piece 30, from the rotation center of the light blocking piece 30 to the edge, the spacing size of the two second shaping side edges 331 in the rotation direction of the light blocking piece 30 gradually decreases. Second, along the direction perpendicular to the rotation axis of the light blocking piece 30, from the edge of the light blocking piece 30 to the rotation center, the spacing size of the two second shaping side edges 331 in the rotation direction of the light blocking piece 30 gradually decreases.

[0106] In the case of providing the light transmission hole 32 with two second shaping side edges 331, the two light blocking pieces 30 can be conveniently matched with each other to realize flexible adjustment of the pulse width range of the light blocking part 31 shaping. Preferably, the shape of the attenuation component 33 is set to a fan shape or a fan ring shape.

[0107] Similarly to the light transmission hole 32, in the case of providing the attenuation component 33, the light blocking piece 30 can also be set to be movable relative to the first connecting piece 10 and the second connecting piece 20 along the direction perpendicular to the rotation axis of the light blocking piece 30, or / and the first connecting piece 10 and the second connecting piece 20 can be set to be movable relative to the light blocking piece 30 along the direction perpendicular to the rotation axis of the light blocking piece 30. In this way, flexible adjustment of the pulse width is realized.

[0108] It can be understood that whether the light transmission hole 32 or the attenuation component 33 is provided, the number of light blocking pieces 30 can be set according to actual needs. In the case of providing multiple light blocking pieces 30, the relative rotation and relative movement between the light blocking pieces 30 can also be set according to actual needs.

[0109] The laser pulse shaping device according to the present application, in some embodiments, further comprises a rotating driver 40. The rotating driver 40 is disposed between the first connecting member 10 and the second connecting member 20. The driving end of the rotating driver 40 is connected to the light blocking member 30 to drive the light blocking member 30 to rotate. The rotating driver 40 and the light blocking member 30 can be disposed one-to-one or one-to-many.

[0110] Further, in some embodiments, the rotating speed of the rotating driver 40 is configured to be adjustable to adjust the size of the target frequency.

[0111] It can be understood that the peak power of the laser is equal to the pulse energy of the laser divided by the pulse width, and the pulse energy is equal to the average power divided by the target frequency. By adjusting the rotating speed of the rotating driver 40, the size of the target frequency can be adjusted, and then the pulse energy is adjusted. That is, by reducing the frequency, the pulse energy is increased, and then the peak power is increased.

[0112] Preferably, the rotating driver is configured as a motor, and the transmission between the motor and the light blocking member 30 belongs to the prior art and will not be described in detail.

[0113] Referring to Figure 11 The laser pulse shaping device according to the present application, in some embodiments, further comprises a controller 50. The controller 50 is electrically connected to the rotating driver 40, for example, wired or wireless connection.

[0114] The controller 50 is configured to emit a second control signal. The rotating driver 40 is configured to make the light blocking member 30 rotate at the target frequency and the target delay relative to the first light in the case of receiving the second control signal.

[0115] If necessary, the target frequency and the target delay can be adjusted by adjusting the second control signal. The signal control of the controller 50 and the rotating driver 40 belongs to the prior art, and the specific principle will not be described in detail.

[0116] In the related art, a pre-start signal is usually sent to the pre-pumping source and the main pumping source in advance, so that the pumping source pumps energy in advance, the population inversion number in the active optical fiber reaches the desired degree, that is, the active optical fiber stores energy in advance. When a subsequent working signal (for example, a third control signal) is received, the first pulse of the laser can consume the population inversion number in the active optical fiber, and then the first pulse amplitude can be increased to the ideal value, and the first pulse amplitude is improved.

[0117] Because the glass precision machining requires high first pulse amplitude, the current of the pump source is larger during pre-starting, and the population inversion number in the active optical fiber is more. However, more population inversion number will cause ASE light in the pre-amplification light path. The ASE light is transmitted to the main amplification light path in the form of continuous light, thereby consuming the inverted population number in the main amplification light path, amplifying the light power, and then the laser is output from the main amplification light path and hits the surface of the workpiece to be machined.

[0118] From the process effect, before the first pulse is output, there is already a hundred milliwatt laser leakage, thereby leaving a not small scratch on the relatively sensitive and fragile workpiece, and a large number of defective workpieces are generated, and the product yield is low. Meanwhile, the first pulse is also affected, and the amplitude is relatively low.

[0119] In order to solve the problem, further, the controller 50 is also configured to emit a first control signal. The rotary driving member 40 is also configured to, in the case that the first control signal is received, make the light-blocking part 31 of the light-blocking member 30 be arranged between the first connecting member 10 and the second connecting member 20 to block the first light.

[0120] In this way, the light-blocking part 31 blocks the first light before the first pulse is output, and avoids the ASE light from escaping and consuming the inverted population number in the main amplification light path. In this way, referring to Figure 10 It is shown that the first pulse amplitude can be improved, and the light leakage phenomenon is avoided, and the workpiece to be machined is prevented from being damaged by light leakage. As a reference, the main amplification light path of a conventional MOPA laser can be pumped in advance at a very low level, about 1 W. By arranging the light-blocking part 31 to block the first light before the first pulse is output, the first pulse amplitude can be improved to about 6 W. This effectively improves the stability and service life of the device.

[0121] Referring to Figure 11 It is shown that, in some embodiments, the first connecting member 10 includes a first collimator 11 and a first optical fiber 12. The first optical fiber 12 is connected to the first collimator 11, and the first optical fiber 12 is configured to be connected to the pre-amplification device 70. The second connecting member 20 includes a second collimator 21 and a second optical fiber 22. The light-blocking member 30 is arranged between the first collimator 11 and the second collimator 21. The second optical fiber 22 is connected to the second collimator 21, and the second optical fiber 22 is configured to be connected to the main amplification device 80. In this way, the light is transmitted through the corresponding optical fibers and the pre-amplification device 70 or the main amplification device 80. At the same time, the two collimators cooperate with each other to collimate the light and realize the conversion between the optical fiber and the transmission in space, so as to realize the shaping and blocking of the continuous light.

[0122] Further, referring to Figure 11 It is shown that, in some embodiments, the laser pulse shaping device further includes an encapsulation shell 60. The first collimator 11, the light-blocking member 30, and the second collimator 21 are all arranged in the encapsulation shell 60.

[0123] Thus, the mechanical protection of the internal components is achieved by the packaging housing 60, while facilitating the modular production of the device. The first collimator 11 and the second collimator 21 are both connected to the packaging housing 60, preferably detachably connected. In the case of the rotary driver driving the light-blocking member 30, the packaging housing 60 is preferably connected by the rotary driver. The controller 50 can be arranged outside the packaging housing 60 and achieve signal transmission with the corresponding components by wired or wireless means, or the controller 50 can be arranged together in the packaging housing 60.

[0124] If necessary, additional drivers, guide rails and other components can be arranged on the packaging housing 60 to achieve the adjustment of the collimator and the light-blocking member 30.

[0125] On the other hand, referring to Figure 11 The embodiment of the present application also provides a laser device, which comprises a pre-amplification device 70, a main amplification device 80, and the laser pulse shaping device described in any one of the above embodiments. The laser device described in the present application has the beneficial effects of the laser pulse shaping device described in the above embodiments, and the laser device also has all the beneficial effects, which will not be repeated here.

[0126] Preferably, the controller 50 is configured to emit a third control signal. The pre-amplification device 70 is configured to start and output the first light when receiving the third control signal.

[0127] Preferably, the controller 50 is configured to emit a fourth control signal. The pre-amplification device 70 and the main amplification device 80 are both configured to start the main pump source for advance pumping when receiving the fourth control signal.

[0128] On the other hand, referring to Figure 12 The embodiment of the present application also provides a laser pulse shaping method, which is applied to the laser device described in any one of the above embodiments. The laser pulse shaping method comprises the steps of:

[0129] First, in response to the third control signal, the pre-amplification device 70 is started to make the first connecting member 10 connected to the pre-amplification device 70 output the first light. The first light comprises the first laser pulse and the continuous light. The second connecting member 20 is arranged spaced apart from the first connecting member 10, and the second connecting member 20 is connected to the main amplification device 80. The light-blocking member 30 is arranged between the first connecting member 10 and the second connecting member 20, and the light-blocking member 30 is provided with the light-blocking part 31.

[0130] Secondly, in response to the second control signal, the controller 50 controls the rotation of the light-blocking part 30 relative to the first light to keep the target frequency and the target time delay, so as to block the continuous light through the light-blocking part 31 and shape the first laser pulse to obtain a second laser pulse. The pulse width of the second laser pulse is smaller than that of the first laser pulse.

[0131] Finally, the second connecting part 20 inputs the second laser pulse to the main amplification device 80.

[0132] Wherein, the sending sequence of the second control signal and the third control signal can also be inversed, or both of them are sent at the same time.

[0133] In some embodiments of the laser pulse shaping method, in response to the third control signal, the pre-amplification device 70 is started to make the first connecting part 10 connected with the pre-amplification device 70 output the first light, and the method further comprises the step of: in response to the first control signal, the light-blocking part 31 of the light-blocking part 30 is controlled to be arranged between the first connecting part 10 and the second connecting part 20 to block the first light. Wherein, the light-blocking part 31 mainly blocks the continuous light emitted by the pre-amplification device 70.

[0134] Working principle:

[0135] Taking the trapezoidal light hole 32 as an example, before the glass processing, the pulse width range of the light-blocking part 30 and the spacing between adjacent light-blocking parts 30 are set according to the processing requirements of the workpiece to be processed.

[0136] Secondly, the controller 50 emits the first control signal to make the light-blocking part 31 of the light-blocking part 30 arranged between the first collimator 11 and the second collimator 21.

[0137] Then, the controller 50 emits the fourth control signal to start the pre-amplification device 70 and the main amplification device 80 to realize the advance pumping. In this process, the pre-amplification device 70 will emit ASE light due to the large number of particle inversion numbers. However, since the light-blocking part 31 is set in advance to block the ASE light, it will not consume the inversion particle number in the main amplification path and damage the workpiece to be processed, which effectively ensures the high product yield.

[0138] Subsequently, the controller 50 emits the third control signal and the second control signal, and the pre-amplification device 70 outputs the first light, which includes the first laser pulse and the continuous light. At the same time, the light-blocking part 30 rotates relative to the first light to keep the target frequency and the target time delay, so as to block the continuous light through the light-blocking part 31 and shape the first laser pulse to obtain a second laser pulse.

[0139] Finally, the second laser pulses enter the main amplification device 80 from the second collimator 21. In the main amplification device 80, the amplitude of the first second laser pulse can be effectively improved, and the peak power of each second laser pulse can also be effectively improved. In this way, the machining quality is higher, and the efficiency is high.

[0140] For the purposes of the description hereinafter, the terms "upper", "bottom", "lower", "over", and "under", are defined with respect to the orientation of the described device or element when mounted in its usual position for use or operation, as shown in the figures. It is to be understood that the spatially relative terms are intended to encompass different orientations of the device in its operation or use in different ways. For example, if the device described in the figures is inverted, the device described as "above" or "above" other devices or structures would then be oriented "below" or "below" other devices or structures. As such, the exemplary term "above" can include both the above and below orientations. The device can also be oriented in other ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0141] In addition, it should be noted that the use of "first", "second", and the like words to qualify elements is only for the convenience of distinguishing the corresponding elements, and the above words have no special meaning unless otherwise stated, and therefore cannot be understood as limiting the scope of protection of the present application.

[0142] The above only is the preferred embodiment of the present application, and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A laser pulse shaping device, characterized by, Comprising: a first connecting member configured to connect a pre-amplification device and output a first light; wherein the first light comprises first laser pulses and continuous light; a second connecting member arranged apart from the first connecting member; the second connecting member is configured to connect a main amplification device and input second laser pulses to the main amplification device; wherein the pulse width of the second laser pulses is smaller than the pulse width of the first laser pulses; a light blocking member arranged between the first connecting member and the second connecting member; the light blocking member is provided with a light blocking portion, and the light blocking member is configured to rotate relative to the first light to maintain a target frequency and a target time delay, so as to block the continuous light through the light blocking portion and shape the first laser pulses to obtain the second laser pulses.

2. The laser pulse shaping device according to claim 1, wherein: the light blocking member is provided with two light blocking members arranged in sequence along a first direction; the light blocking portions of the two light blocking members are arranged in a staggered manner along the rotation direction of the light blocking member; wherein the first direction is parallel to the arrangement direction of the first connecting member and the second connecting member.

3. The laser pulse shaping device according to claim 2, wherein: at least one of the light blocking members is configured to rotate relative to the other light blocking member to adjust the pulse width range shaped by the light blocking portion.

4. The laser pulse shaping device according to claim 2, wherein: at least one of the light blocking members is configured to move relative to the other light blocking member along the first direction.

5. The laser pulse shaping device according to any one of claims 1 to 4, wherein: the light blocking member is further provided with a light passing portion, and the light passing portion is provided as a light passing hole or an attenuation component.

6. The laser pulse shaping device according to claim 5, wherein: the light passing portion comprises two shaping side edges; the two shaping side edges are arranged in sequence and spaced apart along the rotation direction of the light blocking member; and the spacing size of the two shaping side edges in the rotation direction of the light blocking member gradually decreases along a direction perpendicular to the rotation axis of the light blocking member.

7. The laser pulse shaping device according to claim 6, wherein: the light blocking member is configured to move relative to the first connecting member and the second connecting member along a direction perpendicular to the rotation axis of the light blocking member, or / and the first connecting member and the second connecting member are configured to move relative to the light blocking member.

8. The laser pulse shaping device according to claim 5, wherein: the light passing portion and the light blocking portion of the light blocking member are each provided with a plurality of portions; and the plurality of light passing portions and the plurality of light blocking portions are arranged in sequence and alternately along the rotation direction of the light blocking member.

9. The laser pulse shaper device according to any one of claims 1 to 4, wherein, Further comprising: a rotary drive member arranged between the first connecting member and the second connecting member; a driving end of the rotary drive member is connected to the light blocking member to drive the light blocking member to rotate; and the rotation speed of the rotary drive member is configured to be adjustable to adjust the size of the target frequency.

10. The laser pulse shaper device of claim 9, wherein, Further comprising: a controller electrically connected to the rotary drive member; The controller is configured to emit a first control signal and a second control signal; The rotating driver is configured to, in response to the first control signal, set the light-blocking part of the light-blocking member between the first connecting member and the second connecting member to block the first light; and in response to the second control signal, keep the light-blocking member rotating at the target frequency and the target time delay relative to the first light.

11. The laser pulse shaping device according to any one of claims 1 to 4, wherein: The first connecting member comprises a first collimator and a first optical fiber, the first optical fiber is connected to the first collimator, and the first optical fiber is configured to be connected to the pre-amplification device; The second connecting member comprises a second collimator and a second optical fiber, the light-blocking member is arranged between the first collimator and the second collimator, the second optical fiber is connected to the second collimator, and the second optical fiber is configured to be connected to the main amplification device. Further comprising:

12. The laser pulse shaper device of claim 11, wherein, a packaging shell; The first collimator, the light-blocking member, and the second collimator are arranged in the packaging shell, and the first collimator and the second collimator are connected to the packaging shell. The laser pulse shaping device comprises a pre-amplification device, a main amplification device, and any one of the laser pulse shaping devices according to claims 1 to 12.

13. A laser apparatus, characterized by comprising: The method comprises the steps of:

14. A method of laser pulse shaping applied to the laser device of claim 13, characterized in that, in response to a third control signal, starting the pre-amplification device to make the first connecting member connected to the pre-amplification device output first light; wherein the first light comprises a first laser pulse and continuous light; the second connecting member is arranged apart from the first connecting member, and the second connecting member is connected to the main amplification device; a light-blocking member is arranged between the first connecting member and the second connecting member, and the light-blocking member is provided with a light-blocking part; in response to a second control signal, controlling the light-blocking member to rotate at a target frequency and a target time delay relative to the first light, so as to block the continuous light through the light-blocking part and shape the first laser pulse to obtain a second laser pulse; wherein the pulse width of the second laser pulse is smaller than the pulse width of the first laser pulse; The second connecting member inputs the second laser pulse to the main amplification device. Before the step of, in response to a third control signal, starting the pre-amplification device to make the first connecting member connected to the pre-amplification device output first light, the method further comprises the step of:

15. The method of laser pulse shaping according to claim 14, wherein, in response to a first control signal, controlling the light-blocking part of the light-blocking member to be arranged between the first connecting member and the second connecting member to block the first light. ​

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