Anti-vibration guide rail with double strong electromagnetism
By employing a dual-strong electromagnetic levitation device and liquid cooling temperature control, the problems of high-frequency vibration suppression and high wear in mechanical vibration damping guides have been solved, achieving a guide rail effect with high stability and high precision.
Patent Information
- Application Number
- CN202511868407.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-11
- Publication Date
- 2026-01-23
AI Technical Summary
Existing mechanical vibration damping guides suffer from weak high-frequency vibration suppression capabilities and significant mechanical contact wear, leading to decreased positioning accuracy and frequent maintenance.
Employing a dual strong electromagnetic levitation device and a liquid-cooled temperature control mechanism, the guide rail achieves high stability and precision through electromagnetic levitation between the outer and inner enveloping electromagnetic plates, combined with temperature correction of the liquid-cooled plate.
It effectively isolates low-frequency vibrations of 1-50Hz and high-frequency vibrations of 100-500Hz, reduces friction and wear, ensures positioning accuracy within ±0.5μm, and improves the long-term stability and precision of the equipment.
Smart Images
Figure CN121382785A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application belongs to the technical field of anti-vibration and shock absorption, and particularly relates to a double strong electromagnetic anti-vibration guide rail. BACKGROUND
[0002] As a core moving part in the fields of precision manufacturing, optical detection and semiconductor lithography, the anti-vibration performance, positioning accuracy and long-term stability of the anti-vibration guide rail directly determine the machining and detection accuracy of the equipment.
[0003] The existing mainstream mechanical shock absorption guide rail mainly depends on springs, dampers or rubber pads to realize vibration isolation, and its core defects are as follows: first, the high-frequency vibration suppression capability is weak, the natural frequency of the mechanical structure is usually lower than 50Hz, and the high-frequency vibration generated during equipment operation cannot be effectively absorbed, resulting in slight shaking of the object table, and the deformation recovery of the mechanical damping depends on the elasticity of the material, so that the stress cannot be quickly offset in the face of sudden impact vibration, and the object table is easily instantaneously deviated; second, there is mechanical contact wear, the guide rail and the object table are transmitted through mechanical parts such as sliding blocks and balls, and after long-term operation, the clearance is easily generated due to wear, the positioning accuracy is attenuated from the initial ±1μm to ±5μm or more, and frequent maintenance and calibration are required. SUMMARY
[0004] The application aims to provide a double strong electromagnetic anti-vibration guide rail to solve the problems of weak vibration suppression capability and large mechanical contact wear, and to realize the effects of high stability and high precision.
[0005] According to the above idea, the technical scheme adopted by the application is to provide a double strong electromagnetic anti-vibration guide rail, which comprises a first heavy suspension device, an electromagnetic guide rail base, a second heavy suspension device and an object carrying module. The inner envelope electromagnetic plate of the first heavy suspension device is suspended under the electromagnetic interaction of the outer envelope electromagnetic plate; the inner envelope electromagnetic plate and the electromagnetic guide rail base are fixedly connected; the second heavy suspension device is arranged in the double-sided limiting groove of the electromagnetic guide rail base, and the permanent magnet plate of the object carrying module is arranged above the second heavy suspension device.
[0006] Preferably, the first heavy suspension device comprises an outer envelope electromagnetic plate and an inner envelope electromagnetic plate, and the inner envelope electromagnetic plate and the outer envelope electromagnetic plate are both provided with electromagnetic coils.
[0007] Further, the outer envelope electromagnetic plate and the inner envelope electromagnetic plate are suspended and confined by the electromagnetic force between the electromagnetic coils.
[0008] Preferably, the electromagnetic guide rail base comprises a base, a double-sided limiting groove, a laser generator and a laser receiver. Preferably, the base is made of a non-magnetic material.
[0009] Preferably, the base is marble.
[0010] Preferably, the inside of the base is provided with a through double-side limiting groove, and the upper surface of the double-side limiting groove is provided with a laser generator and a laser receiver.
[0011] Further, the laser emitted by the laser generator is reflected to the laser receiver through the mirror body.
[0012] Preferably, the outer surface of the base is the same in shape and size as the inner surface of the inner envelope electromagnetic plate, and the base is embedded and fixed on the inner surface of the inner envelope electromagnetic plate.
[0013] Preferably, the second re-suspension device comprises a mirror body, a track groove and a liquid cooling disc.
[0014] Preferably, the upper surface of the mirror body is provided with the track groove, the lower surface of the mirror body is provided with the liquid cooling disc, the liquid cooling disc is provided with a wire groove, and the inside of the liquid cooling disc is further provided with a cooling pipeline.
[0015] Further, the cooling pipeline is filled with cooling liquid, and the temperature of the second re-suspension device is adjusted according to the angle of the laser received by the laser receiver until the laser receiver receives the complete laser signal again.
[0016] Further, the mirror body and the liquid cooling disc are bonded together through fixing glue.
[0017] Further, the liquid cooling disc is fixed in the double-side limiting groove.
[0018] Preferably, the object carrying module comprises an object carrying table, an object carrying hole, a permanent magnet plate and a limiting plate, the upper surface of the object carrying table is provided with the object carrying hole, the two sides of the upper surface of the object carrying table are further provided with the limiting plate, and the lower part of the object carrying table is provided with the permanent magnet plate.
[0019] Preferably, the lower surface of the permanent magnet plate is provided with a protrusion, the shape and size of the protrusion are consistent with the track groove, and the permanent magnet plate is inserted into the double-side limiting groove.
[0020] Further, the permanent magnet plate keeps a gap between the protrusion and the track under the action of the second re-suspension device, so as to reduce friction.
[0021] The present application has the following beneficial effects: 1. The first re-suspension device of the present application generates repulsion force by means of the electromagnetic coils with opposite polarity between the outer envelope electromagnetic plate and the inner envelope electromagnetic plate, drives the electromagnetic guide rail base to stably suspend, effectively isolates the ground 1-50Hz low-frequency vibration, and avoids that the vibration is transmitted to the upper structure through solid contact; the second re-suspension device utilizes the electromagnetic coupling between the electromagnetic coil in the wire groove of the liquid cooling disc and the permanent magnet plate of the object carrying module to generate upward suspension repulsion force, so that the protrusion of the permanent magnet plate keeps a certain gap with the track groove to reduce running vibration.
[0022] 2、The application adopts laser installation inside the base, calculates the influence of temperature on the track groove by light deflection, and corrects the temperature by the cooling liquid in the liquid cooling disc, ensures the precise matching of the convex of the permanent magnet plate and the shape and size of the track groove, reduces the friction, and further realizes the effect of high precision. BRIEF DESCRIPTION OF DRAWINGS
[0023] Figure 1 It is the overall structure diagram of the application.
[0024] Figure 2 It is the structure diagram of the first re-suspension device of the application.
[0025] Figure 3 It is the arrangement schematic diagram of the electromagnetic coil inside the electromagnetic plate.
[0026] Figure 4 It is the structure diagram of the electromagnetic guide rail base of the application.
[0027] Figure 5 It is the structure diagram of the second re-suspension device of the application.
[0028] Figure 6 It is the structure diagram of the liquid cooling disc of the application.
[0029] Figure 7 It is the structure diagram of the object carrying module of the application.
[0030] Reference signs: The first re-suspension device 100, the electromagnetic guide rail base 200, the second re-suspension device 300, the object carrying module 400, the outer envelope electromagnetic plate 11, the inner envelope electromagnetic plate 12, the electromagnetic coil 13, the base 21, the double-side limiting groove 22, the laser generator 23, the laser receiver 24, the mirror surface body 31, the track groove 32, the liquid cooling disc 33, the cooling pipeline 331, the wire groove 332, the object carrying table 41, the object carrying hole 42, the permanent magnet plate 43, the limiting plate 44 and the convex 441. DETAILED DESCRIPTION
[0031] The exemplary embodiments will be described in detail hereinbelow with reference to the drawings. In the following description, the same numbers are used to denote the same elements, unless otherwise indicated. The embodiments described in the following exemplary embodiments are not meant to represent all embodiments consistent with the application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of the application as detailed in the appended claims.
[0032] The terminology used in the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the application pertains. The description and drawings thereof are not intended to limit the scope of the present application, and the present application is not construed as being limited to the embodiments described herein. Words such as "one" or "the" used in conjunction with a recited feature can mean that there is only one, or that there can be more than one. The use of "including," "containing," or "comprising" in the description or claims of this application or the like are not to be construed as implying that there are no additional features except those expressly, directly, or implicitly mentioned prior to such an expression or clause. The use of "adapted to" or "configured to" herein is meant as open and inclusive language that is intended to express that the stated feature is being rendered capable to do something, actually or essentially, or being operated under certain conditions. The use of "comprising" or "including" or "containing" or "having" is intended to encompass the presence of one or more features, integers, steps, operations, objects, biological or chemical moieties, ingredients or components, but do not exclude the presence of one or more other features, integers, steps, operations, objects, biological or chemical moieties, ingredients or components.
[0033] The application provides a double strong electromagnetic anti-vibration guide rail, comprising a first suspension device 100, an electromagnetic guide rail base 200, a second suspension device 300 and a carrier module 400. The inner envelope electromagnetic plate 12 of the first suspension device 100 is suspended under the electromagnetic action of the outer envelope electromagnetic plate 11; the inner envelope electromagnetic plate 12 and the electromagnetic guide rail base 200 are fixedly connected; the second suspension device 300 is fixedly arranged in the double-side limiting groove 22 of the electromagnetic guide rail base 200, and the permanent magnet plate 43 of the carrier module 400 is arranged above the second suspension device 300.
[0034] The application suspends the electromagnetic guide rail base 200 and the carrier module 400 by designing the double electromagnetic shockproof system, that is, the first suspension device 100 and the second suspension device 300, so that the ground and running vibration received by the guide rail is reduced; meanwhile, the influence of the temperature of the object on the track groove 32 is calculated by using light deflection, and the temperature is corrected by the liquid cooling disc 33, so that the deformation degree of the track groove 32 is ensured, and the high-precision effect is further realized.
[0035] The application will be described in detail below with reference to the accompanying drawings Figures 1 to 7 The application provides a double strong electromagnetic anti-vibration guide rail.
[0036] As Figure 1As shown, the application provides a double strong electromagnetic anti-vibration guide rail, mainly including four parts: the first heavy suspension device 100, the electromagnetic guide rail base 200, the second heavy suspension device 300 and the object carrying module 400, wherein the first heavy suspension device 100 is used as the base of the whole device, and the electromagnetic guide rail base 200 of the anti-vibration guide rail is suspended and lifted in the air by the electromagnetic force between the outer envelope electromagnetic plate 11 and the inner envelope electromagnetic plate 12, preventing the interference of vibration; the inside of the electromagnetic guide rail base 200 is provided with a double-sided limiting groove 22, and the double-sided limiting groove 22 is provided with the second heavy suspension device 300, and the second heavy suspension device 300 also gives upward force to the object carrying module 400 through electromagnetic force, so that there is a gap between the convex 441 of the permanent magnet plate 43 and the track groove 32, reducing friction.
[0037] As shown in Figure 2 and Figure 3 The first heavy suspension device 100 in the embodiment includes an outer envelope electromagnetic plate 11 and an inner envelope electromagnetic plate 12, the side walls of the outer envelope electromagnetic plate 11 and the inner envelope electromagnetic plate 12 are both inclined inward, and the inside of the outer envelope electromagnetic plate 11 and the inner envelope electromagnetic plate 12 is provided with a plurality of electromagnetic coils 13, the axial direction of the electromagnetic coils 13 is perpendicular to the surface of the outer envelope electromagnetic plate 11 and the inner envelope electromagnetic plate 12, and the polarity of the electromagnetic coils 13 of the outer envelope electromagnetic plate 11 and the inner envelope electromagnetic plate 12 will generate repulsion when energized.
[0038] As shown in Figure 4 In the embodiment, the electromagnetic guide rail base 200 is a trapezoidal structure, including a base 21, a double-sided limiting groove 22, a laser generator 23 and a laser receiver 24. The base 21 plays a supporting role for the object carrying module 400, and the inside of the base 21 is provided with a double-sided limiting groove 22, and the upper surface of the double-sided limiting groove 22 is provided with a plurality of laser generators 23 for emitting laser and a plurality of laser receivers 24 for detecting reflected laser.
[0039] As shown in Figure 5 and Figure 6As shown, in the embodiment, the second re-suspension device 300 includes a mirror body 31, a track groove 32, a liquid cooling disc 33, a cooling pipeline 331 and a wire groove 332. The track groove 32 for guiding the object carrying module 400 is arranged on one side of the upper surface of the mirror body 31. The upper surface of the mirror body 31 can reflect the laser emitted by the laser generator 23. The mirror body 31 is adhered to the liquid cooling disc 33 by an adhesive. The wire groove 332 for placing the electromagnetic coil 13 is arranged above the liquid cooling disc 33. The electromagnetic coil 13 generates a reaction force to make the object carrying module 400 have an upward trend. During the operation of the device, the track groove 32 plays a guiding role for the object carrying module 400. When the temperature changes greatly, the mirror body 31 and the track groove 32 are deformed, and the laser signal received by the laser receiver 24 is deflected. At this time, the cooling pipeline 331 of the liquid cooling disc 33 is filled with cooling liquid to cool the mirror body 31 and the track groove 32 until the laser receiver 24 receives complete laser signals, thereby ensuring the accuracy of the guide rail as a whole.
[0040] As Figure 7 As shown, in the embodiment, the object carrying module 400 includes an object carrying table 41, an object carrying hole 42, a permanent magnet plate 43, a limiting plate 44 and a protrusion 441. The object carrying table 41 is embedded in the electromagnetic guide rail base 200. The object carrying hole 42 is used for placing objects. The limiting plate 44 is arranged on both sides of the upper surface of the object carrying table 41 to prevent the object carrying table 41 from collapsing due to the overloading of the objects carried in the object carrying table 41. The permanent magnet plate 43 is arranged on both sides below the object carrying table 41 and can extend into the double-sided limiting groove 22. The permanent magnet plate 43 is subjected to the electromagnetic force in the second re-suspension device 300 to support the object carrying table 41 upward. The shape and size of the protrusion 441 on the surface of the permanent magnet plate 43 are matched with the track groove 32 to limit the movement direction of the object carrying module 400.
[0041] DETAILED DESCRIPTION AND PRINCIPLES The double strong electromagnetic anti-vibration guide rail of the application realizes high anti-vibration and high precision based on the triple synergistic mechanism of "double electromagnetic suspension anti-vibration + laser-liquid cooling synergistic shape control + non-contact limiting guidance", and the core principle is that: in the first suspension device 100, the outer envelope electromagnetic plate 11 and the inner envelope electromagnetic plate 12 generate radial and axial repulsive force through the internal electromagnetic coil 13 with opposite polarity, accurately balance the total weight of the electromagnetic guide rail base 200, so that the base 21 is stably suspended to isolate the ground 1-50Hz low-frequency vibration and avoid the transmission of vibration through solid contact; in the second suspension device 300, the electromagnetic coil 13 in the wire groove 332 of the liquid cooling disc 33 forms electromagnetic coupling with the permanent magnet plate 43 of the object carrying module 400, generates upward suspension repulsive force, and makes the protrusion 441 of the permanent magnet plate 43 keep 0.1-0.3mm non-contact gap with the track groove 32, which not only isolates the 100-500Hz high-frequency vibration when the object carrying table 41 runs, but also eliminates mechanical friction and wear; at the same time, the laser generator 23 on the double-sided limiting groove 22 of the base 21 emits collimated laser, which is reflected by the mirror body 31 and captured by the laser receiver 24, the track groove 32 deformation amount is derived through the spot offset amount, and the cooling liquid with corresponding temperature and flow is introduced into the internal cooling pipeline 331 of the liquid cooling disc 33 to control the temperature fluctuation of the track groove 32 within ±0.5℃ to correct the deformation; in addition, the protrusion 441 of the permanent magnet plate 43 and the track groove 32 are matched in shape and size, and the permanent magnet plate 43 is inserted into the double-sided limiting groove 22, which cooperatively restricts the movement of the object carrying module 400 only along the length direction of the track groove 32, avoiding lateral deviation, and finally realizes efficient isolation of vibration, accurate control of track size and stable movement of the object carrying table through the linkage of various mechanisms, achieving the effects of high anti-vibration, high precision and low loss.
[0042] Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. It is intended that the present application cover any and all variations of the application that come within the scope of the present application along with its general principles and features. The specification and examples are to be construed as merely illustrative of the present application and not limitative of the true scope and spirit of the application.
[0043] It is understood that the application is not limited to the precise construction and method described above and illustrated in the drawings, and that various modifications and changes can be made by those skilled in the art without departing from the scope of the application. The scope of the application is limited only by the claims that follow.
Claims
1. A vibration-resistant guide rail with dual strong electromagnetic fields, characterized in that, It includes a first levitation device (100), an electromagnetic rail base (200), a second levitation device (300), and a cargo module (400); The inner enveloping electromagnetic plate (12) of the first heavy levitation device (100) is suspended under the electromagnetic action of the outer enveloping electromagnetic plate (11); The inner envelope electromagnetic plate (12) and the electromagnetic rail base (200) are fixedly connected; a second suspension device (300) is fixedly installed in the double-sided limiting groove (22) of the electromagnetic rail base (200), and the permanent magnet plate (43) of the cargo module (400) is suspended above the second suspension device (300).
2. The anti-vibration guide rail with dual strong electromagnetic field according to claim 1, characterized in that, The first heavy suspension device (100) includes an outer enveloping electromagnetic plate (11) and an inner enveloping electromagnetic plate (12), and both the outer enveloping electromagnetic plate (11) and the inner enveloping electromagnetic plate (12) are provided with a number of electromagnetic coils (13).
3. The anti-vibration guide rail with dual strong electromagnetic field according to claim 1, characterized in that, The electromagnetic rail base (200) includes a base (21), a double-sided limiting groove (22), a laser generator (23), and a laser receiver (24). The base (21) has a through double-sided limiting groove (22) inside, and the laser generator (23) and laser receiver (24) are provided on the upper surface of the double-sided limiting groove (22).
4. The anti-vibration guide rail with dual strong electromagnetic field according to claim 3, characterized in that, The outer surface shape and size of the base (21) are the same as the inner surface of the inner envelope electromagnetic plate (12), and the base (21) is embedded and fixed on the inner surface of the inner envelope electromagnetic plate (12).
5. The anti-vibration guide rail with dual strong electromagnetic field according to claim 1, characterized in that, The second levitation device (300) includes a mirror body (31) for reflecting laser light, a track groove (32) and a liquid cooling plate (33); The upper surface of the mirror body (31) is provided with a track groove (32), and the lower surface of the mirror body (31) is fixedly connected to the liquid cooling plate (33). The liquid cooling plate (33) is fixedly installed in the double-sided limiting groove (22). The liquid cooling plate (33) is provided with a wire groove (332), and an electromagnetic coil (13) is provided in the wire groove (332). The liquid cooling plate (33) is provided with a cooling pipe (331) inside.
6. The anti-vibration guide rail with dual strong electromagnetic field according to claim 1, characterized in that, The loading module (400) includes a loading stage (41), a loading hole (42), a permanent magnet plate (43), and a limiting plate (44). The loading stage (41) has a loading hole (42) on its upper surface, and limiting plates (44) are provided on both sides of the upper surface of the loading stage (41). The loading stage (41) has a permanent magnet plate (43) at its lower part.
7. The anti-vibration guide rail with dual strong electromagnetic field according to claim 6, characterized in that, The lower surface of the permanent magnet plate (43) is provided with a protrusion (441), the shape and size of which are consistent with the track groove (32), and the permanent magnet plate (43) is inserted into the double-sided limiting groove (22).