Die bonding swing arm device

Abstract

The invention relates to a die bonding swing arm device which comprises a main shaft rotating motor which is fixed on a base below, and the output end of the bottom of the main shaft rotating motor is connected with a rotating main shaft which can rotate around a vertical axis; the two independent lifting modules are symmetrically and fixedly mounted on the left side and the right side of the rotating main shaft by taking the axis of the rotating main shaft as a symmetric center; and the two swing arm assemblies are installed on the swing arm fixing bases of the two lifting modules correspondingly, and a suction cup is installed at the tail end of each swing arm assembly. According to the double-swing-arm alternating parallel operation mode, crystal taking and crystal fixing actions are almost synchronously carried out, the theoretical carrying efficiency is nearly doubled compared with that of a single swing arm, and the equipment productivity is greatly improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor packaging or LED die bonding equipment, and particularly relates to a die bonding swing arm device. BACKGROUND

[0002] In semiconductor packaging and LED manufacturing, the die bonding process needs to quickly and accurately transfer the chip from the wafer disc to the designated position of the substrate. The traditional die bonding equipment adopts a single swing arm structure, and its working process has an inherent serial timing of "taking material - moving - placing material - returning". During the swing arm returning to the taking material position, there is an idle stroke waiting, which restricts the further improvement of the production rhythm.

[0003] To improve efficiency, some double swing arm schemes appear in the prior art, which usually adopt two independent swing arm mechanisms or drive two swing arms by one driving source. However, these schemes have complex structures, and it is difficult to balance the motion synchronization and independence of the two swing arms, and the dynamic balance is poor, which is easy to produce vibration in high-speed reciprocating motion, affecting the positioning accuracy and long-term operation stability. In addition, the position detection system is usually single, and it is difficult to meet the needs of origin calibration and precise control of full stroke in high-speed motion at the same time.

[0004] In view of the above defects, the present design person actively researches and innovates to create a die bonding swing arm device, so that it has more industrial utilization value. SUMMARY

[0005] To solve the above technical problems, the purpose of the present application is to provide a die bonding swing arm device.

[0006] To achieve the above purpose, the present application adopts the following technical scheme:

[0007] The die bonding swing arm device comprises:

[0008] A main shaft rotating motor is fixed on the bottom seat below, and the output end of the bottom thereof is connected with a rotating main shaft which can rotate around a vertical axis;

[0009] Two independent lifting modules are symmetrically and fixedly installed on the left and right sides of the rotating main shaft with the axis of the rotating main shaft as the center of symmetry;

[0010] Each lifting module comprises a linear guide mechanism and a voice coil motor which drives the swing arm fixed seat on the linear guide mechanism to move in the vertical direction;

[0011] Two swing arm assemblies are respectively installed on the swing arm fixed seats of the two lifting modules, and a suction disc is installed at the end of each swing arm assembly;

[0012] The main shaft rotating motor drives the rotating main shaft and two lifting module groups and the swing arm assembly fixed on the rotating main shaft to rotate as a whole to alternately switch the working positions of the two suction cups.

[0013] As a further improvement of the present application, the linear guide mechanism comprises two guide rails fixed on the rotating main shaft respectively at the front and rear sides of the voice coil motor and a sliding block slidingly matched with the guide rails, the sliding block is installed on a sliding block connecting plate, and the sliding block connecting plate is connected with the swing arm fixed seat.

[0014] As a further improvement of the present application, the balance auxiliary mechanism comprises a tension spring, an upper tension spring pulling block and a lower tension spring hook, the upper tension spring pulling block is fixed on the rotating main shaft, the lower tension spring hook is fixed on the sliding block connecting plate, and the tension spring is connected between the upper tension spring pulling block and the lower tension spring hook.

[0015] As a further improvement of the present application, a first slot type photoelectric sensor is installed on the inner side of the base, and a plurality of first photoelectric sensing pieces adapted to the first slot type photoelectric sensor are installed on the rotating main shaft on the inner side of the base along the circumferential direction.

[0016] As a further improvement of the present application, a second photoelectric sensing piece is installed on the sliding block connecting plate on one side, and a second slot type photoelectric sensor adapted to the second photoelectric sensing piece is installed on the rotating main shaft on the side of the second photoelectric sensing piece.

[0017] As a further improvement of the present application, a grating ruler is installed on the sliding block connecting plate on one side, and a grating ruler reading head adapted to the grating ruler is installed on the reading head mounting seat of the rotating main shaft on the side of the grating ruler.

[0018] As a further improvement of the present application, the swing arm assembly comprises a first swing arm and a second swing arm from inside to outside, the first swing arm is installed on the swing arm fixed seat, and the second swing arm is installed on the first swing arm.

[0019] As a further improvement of the present application, the vacuum air paths of the two suction cups are independently controllable.

[0020] As a further improvement of the present application, the main shaft rotating motor is a servo motor or a stepping motor.

[0021] By the above-mentioned scheme, the present application has at least the following advantages:

[0022] The double-swing-arm alternating and parallel operation mode of the present application enables the wafer picking and die bonding actions to be almost synchronous, the theoretical carrying efficiency is increased by nearly one time compared with the single-swing-arm mode, and the equipment productivity is greatly improved.

[0023] This invention adopts a symmetrical modular design centered on a rotating spindle, with dual guide rails and a tension spring gravity balance mechanism, which ensures excellent inertial balance, low vibration, and sufficient rigidity of the entire system during high-speed rotation and reciprocating lifting, thus guaranteeing long-term stability and accuracy.

[0024] The invention features independent control of the dual swing arms, independent air path for the suction cup, and adjustable swing arm length, enhancing the equipment's ability to adapt to different products and processes.

[0025] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the following are preferred embodiments of the present invention described in detail with reference to the accompanying drawings. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of a die-bonding swing arm device according to the present invention;

[0028] Figure 2 yes Figure 1 A structural schematic diagram of the lifting module and swing arm assembly on the right side of the image;

[0029] Figure 3 yes Figure 1 A schematic diagram of the lifting module and swing arm assembly on the left side of the image.

[0030] The meanings of the labels in the figures are as follows.

[0031] 1. Main spindle rotary motor; 2. Base; 3. Rotary spindle; 4. Lifting module; 5. Swing arm assembly; 6. First slotted photoelectric sensor; 7. Voice coil motor; 8. Swing arm fixing seat; 9. Slider connecting plate; 10. Slider; 11. Guide rail; 12. Second photoelectric sensor; 13. Second slotted photoelectric sensor; 14. First swing arm; 15. Second swing arm; 16. Suction cup; 17. Grating ruler; 18. Grating ruler reading head; 19. Reading head mounting seat; 20. Tension spring; 21. Upper tension spring pull block; 22. Lower tension spring hook. Detailed Implementation

[0032] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0033] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0034] First embodiment of the present invention:

[0035] like Figures 1-3 As shown, a die-bonding swing arm device of this embodiment includes a spindle rotation motor 1 fixed on a lower base 2. The output end of the spindle rotation motor 1 is connected to and drives a rotating spindle 3 that can rotate around a vertical axis.

[0036] On the left and right sides of the rotating main shaft 3, with its central axis as the center of symmetry, two independent lifting modules 4 are symmetrically and fixedly installed.

[0037] Each lifting module 4 includes a linear guide mechanism and a voice coil motor 7 for driving. The voice coil motor 7 is responsible for driving the swing arm fixed seat 8 located on the linear guide mechanism to move in the vertical direction.

[0038] The linear guide mechanism consists of two guide rails 11 and a slider 10 that cooperates with them. The two guide rails 11 are fixed on the rotating main shafts 3 on the front and rear sides of the voice coil motor 7, respectively, while the slider 10 slides up and down with the guide rails 11. The slider 10 is mounted on the slider connecting plate 9, which is then connected to the swing arm fixing seat 8.

[0039] To further optimize motion performance, the device is also equipped with a balance assist mechanism, which consists of a tension spring 20, an upper tension spring block 21, and a lower tension spring hook 22. The upper tension spring block 21 is fixed on the rotating main shaft 3, the lower tension spring hook 22 is fixed on the slider connecting plate 9, and the tension spring 20 is connected between the two to provide an upward balancing pull.

[0040] Rotational position detection is achieved as follows: a first slotted photoelectric sensor 6 is installed on the inner side of the base 2, and several first photoelectric sensor sheets adapted to the first slotted photoelectric sensor 6 and used for triggering signals are installed on the rotating main shaft 3 on the inner side of the base 2 along its circumferential direction.

[0041] For detecting the lifting position, the system adopts a hybrid scheme: a second photoelectric sensor 12 is installed on the slider connecting plate 9 on one side, and a second slotted photoelectric sensor 13 adapted to it and used to detect a specific height is installed on the rotating spindle 3 on one side of the second photoelectric sensor 12; a grating ruler 17 is installed on the slider connecting plate 9 on the other side, and a grating ruler reading head 18 adapted to it and used for real-time precise position feedback is installed on the rotating spindle 3 on one side of the grating ruler 17 via a reading head mounting seat 19.

[0042] Two swing arm assemblies 5 are respectively installed on the swing arm fixing seats 8 of the two lifting modules 4. Each swing arm assembly 5 includes a first swing arm 14 and a second swing arm 15 from the inside to the outside. The first swing arm 14 is directly installed on the swing arm fixing seat 8, and the second swing arm 15 is installed on the first swing arm 14 to extend the working range.

[0043] At the end of each swing arm assembly 5, a suction cup 16 for picking up and placing chips is installed, and the vacuum paths of the two suction cups 16 are independently controllable to achieve their own independent picking and releasing actions.

[0044] In this device, the spindle rotary motor 1, which can be a servo motor or a stepper motor, has the core function of driving the rotary spindle 3 and the two lifting modules 4 and the swing arm assembly 5 fixed on it to rotate as a whole, thereby realizing the alternating switching of the working positions of the two suction cups 16; at the same time, the two voice coil motors 7 can independently drive their respective corresponding swing arm assemblies 5 to perform precise up and down movements, and finally improve the die bonding and handling efficiency by alternating parallel operation of the two workstations.

[0045] The second embodiment of the present invention:

[0046] like Figures 1-3 As shown, this embodiment provides a highly efficient and stable die-bonding double-swing arm device, the core structure and connection relationship of which are as follows:

[0047] Main frame and drive: The spindle rotary motor 1 (a high-precision servo motor is selected in this embodiment) is firmly fixed to the horizontal base 2 by its mounting bracket. The rotary spindle 3 is connected to the output end of the motor through a coupling, and can rotate precisely around its vertical axis under the drive of the motor.

[0048] Lifting Mechanism: Two identical lifting modules 4 are fixed symmetrically to both sides of the main shaft 3, with the axis of rotation as the center of symmetry, via robust mounting brackets. Each lifting module 4 constitutes an independent vertical motion unit.

[0049] Drive and Guidance: The voice coil motor 7 is vertically fixed to the bracket. On its front and rear sides, a high-precision linear guide rail 11 is vertically fixed to the bracket. Each guide rail 11 is equipped with a slider 10 that can slide up and down along it. A rigid slider connecting plate 9 is simultaneously fixedly connected to both the front and rear sliders 10, thus forming a stable motion platform. The mover (output rod) of the voice coil motor 7 is directly connected to the middle of this slider connecting plate 9, achieving direct drive.

[0050] Gravity Balancing Mechanism: To optimize dynamic performance, a balancing auxiliary mechanism is installed in each lifting module 4, located opposite the voice coil motor 7. An upper tension spring block 21 is fixed to the top of the module support (fixed to the associated structure of the rotating spindle 3). A lower tension spring hook 22 is fixed to the corresponding position on the slider connecting plate 9. A tension spring 20 with a certain preload is connected at both ends to the upper tension spring block 21 and the lower tension spring hook 22, respectively. By rationally designing the spring constant and initial length of the tension spring 20, when the slider connecting plate 9 and the load are in the middle of their stroke, the upward pulling force it provides can basically balance most of the weight of the moving parts (including the slider connecting plate 9, the swing arm fixing seat 8, the swing arm assembly 5, etc.). This significantly reduces the load on the voice coil motor 7, enabling it to drive the load movement more quickly and smoothly, and reducing heat generation.

[0051] Installation interface: The swing arm fixing seat 8 is fixed on the front side of the slider connecting plate 9 and is used to install the swing arm assembly 5.

[0052] Swing arm and end effector: The swing arm assembly 5 adopts a two-section structure to balance rigidity and adjustability. The inner end of the first swing arm 14 is mounted on the swing arm mounting base 8 via fasteners. The second swing arm 15 is mounted on the outer end of the first swing arm 14 via a fine-tuning mechanism (such as a waist-shaped hole, set screw, etc.), and its end is equipped with a vacuum suction cup 16. The two suction cups 16 are respectively connected to independent vacuum generators and air circuit control valves, enabling independent pickup and release. The two swing arm assemblies 5 and their drive modules are completely symmetrical.

[0053] Position detection system: This device is equipped with a sophisticated hybrid position detection system to ensure accurate and reliable motion control.

[0054] Rotation angle detection: A first slotted photoelectric sensor 6 is installed on the inner wall of the base 2. On the circumferential surface at the corresponding height of the rotating spindle 3, multiple first photoelectric sensor plates (not individually labeled in the figure) are installed at equal intervals along the circumference. When the spindle rotates, the sensor plates pass through the grooves of the first slotted photoelectric sensor 6 in sequence, generating pulse signals, which are used to measure the rotation angle or determine the rotation origin.

[0055] Left-side lifting position detection: A second photoelectric sensor 12 is installed on the slider connecting plate 9 of the left-side lifting module 4. A second slotted photoelectric sensor 13 is fixed on the rotating main shaft 3, with its groove aligned with the movement trajectory of the second photoelectric sensor 12. When the left-side swing arm rises to a specific height, the sensor blocks the light path, generating a precise switching signal, which serves as the origin or reversing point of the movement on that side.

[0056] Right-side lifting position detection: A high-precision grating ruler 17 is vertically attached to the slider connecting plate 9 of the right-side lifting module 4. A reading head mounting base 19 is fixed on the rotating spindle 3, on which a grating ruler reading head 18 is mounted, with its reading surface facing the scale surface of the grating ruler 17. When the right-side swing arm rises or falls, the reading head 18 can read the absolute or incremental position signal with nanometer-level resolution in real time, realizing full closed-loop precision control.

[0057] Control System: The device also includes an integrated control system (not shown in the figure). This control system is connected via wiring to all sensing and actuating elements, including the main spindle rotary motor 1, two voice coil motors 7, vacuum valves of the two suction cups 16, the first slotted photoelectric sensor 6, the second slotted photoelectric sensor 13, and the grating ruler reading head 18. Based on a preset program and real-time feedback signals, it coordinates and controls the operation of the entire device. The structure and working principle of the aforementioned integrated control system are all mature and conventional technologies in the field, and the presence or absence of the integrated control system has no impact on the core content of the technical solution of this embodiment; therefore, it will not be elaborated further here.

[0058] The working process of this embodiment:

[0059] Assume the initial state: the left swing arm assembly 5 is located at the upper "material picking station", and the right swing arm assembly 5 is located at the lower "die bonding station".

[0060] Parallel job startup:

[0061] Left-side material handling: The control system instructs the left voice coil motor 7 to actuate, driving the left slider connecting plate 9 and the left swing arm assembly 5 to move smoothly downwards along the guide rail 11. The tension spring 20 provides upward auxiliary force, making the movement light and fast. When the second photoelectric sensor 12 enters the groove of the second slotted photoelectric sensor 13, the origin signal is triggered, and the swing arm stops precisely at the material handling height. The left suction cup 16 connects to the vacuum and picks up a chip. Subsequently, the voice coil motor 7 drives the swing arm to rise a short distance to a safe height.

[0062] Right side preparation: Meanwhile, the right side swing arm may be in the rising process after placement or is already at a safe height above the die bonding station.

[0063] Workstation switching:

[0064] After the left-side material is picked up, the control system commands the spindle rotation motor 1 to start. The motor drives the rotating spindle 3 and all components fixed to it (two lifting modules 4 and swing arm assembly 5) to rotate precisely 180 degrees as a whole. During the rotation, the first slotted photoelectric sensor 6 monitors the angle of the first photoelectric sensor. After the rotation is completed, the left swing arm that originally carried the chip is moved to the lower die bonding station, while the right swing arm that was originally at the die bonding station (with the chip already placed) is moved to the upper material picking station.

[0065] A new round of parallel tasks:

[0066] Right-side material handling: As rotation nears completion, the control system begins planning the right-side action. Once in position, the right-side voice coil motor 7 is immediately instructed to drive the right-side swing arm downwards. The right side utilizes a linear encoder 17 and a reading head 18 for fully closed-loop position control, ensuring precise positioning to the material handling height. The right-side suction cup 16 then picks up the new chip.

[0067] Left-side unloading: Almost simultaneously with right-side unloading, the control system command has reached the left swing arm of the die-bonding station, which descends. After being positioned at the origin by the second slotted photoelectric sensor 13, it moves to the die-bonding height. The left-side suction cup 16 shuts off the vacuum (or switches to air blowing) and precisely releases the chip onto the substrate that has been coated with adhesive.

[0068] After the left and right sides complete their movements, their respective voice coil motors 7 drive the swing arms to rise to a safe height, preparing for the next cycle. The tension spring 20 also provides assistance during the ascent and effectively suppresses rebound when the arms reach their stop.

[0069] Cycle continues:

[0070] The control system then instructs the spindle rotary motor 1 to drive the entire assembly to rotate 180 degrees, and the workstations are swapped again. This process repeats continuously, forming a continuous "material handling-placement" assembly line operation.

[0071] As can be seen from the above working process, the device in this embodiment achieves a high degree of overlap and seamless connection between the two swing arms through ingenious mechanical design, efficient power and balance system and precise multi-path feedback control. While significantly improving efficiency, it ensures that every pick-up and drop action is high-speed, stable and accurate.

[0072] The dual-arm alternating parallel operation mode of this invention enables crystal picking and bonding to be performed almost simultaneously, theoretically doubling the handling efficiency compared to a single-arm system, thus significantly increasing equipment capacity. Employing a symmetrical modular design centered on the rotating spindle, with dual guide rails and a tension spring gravity balance mechanism, the entire system exhibits excellent inertial balance, low vibration, and sufficient rigidity during high-speed rotation and reciprocating lifting, ensuring long-term stability and precision maintenance. Independent control of the dual arms, independent air paths for the suction cups, and adjustable arm length enhance the equipment's adaptability to different products and processes.

[0073] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0074] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0075] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A die-bonding swing arm device, characterized in that, include: A spindle rotary motor (1) is fixed on a base (2) below, and its bottom output end is connected to a rotary spindle (3) that can rotate around a vertical axis; Two independent lifting modules (4) are symmetrically and fixedly installed on the left and right sides of the rotating main shaft (3) with the axis of the rotating main shaft (3) as the center of symmetry; Each of the lifting modules (4) includes a linear guide mechanism and a voice coil motor (7) that drives the swing arm fixing seat (8) located on the linear guide mechanism to move in the vertical direction; Two swing arm assemblies (5) are respectively installed on the swing arm fixing seats (8) of the two lifting modules (4), and a suction cup (16) is installed at the end of each swing arm assembly (5); The main spindle motor (1) drives the main spindle (3) and the two lifting modules (4) and swing arm assembly (5) fixed thereon to rotate as a whole, so as to alternately switch the working positions of the two suction cups (16); the two voice coil motors (7) independently drive the corresponding swing arm assembly (5) to move up and down.

2. The die-bonding swing arm device as described in claim 1, characterized in that, The linear guide mechanism includes two guide rails (11) fixed on the rotating main shafts (3) on the front and rear sides of the voice coil motor (7) respectively, and a slider (10) that slides up and down with the guide rails (11). The slider (10) is mounted on the slider connecting plate (9), and the slider connecting plate (9) is connected to the swing arm fixing seat (8).

3. The die-bonding swing arm device as described in claim 2, characterized in that, It also includes a balancing auxiliary mechanism, which includes a tension spring (20), an upper tension spring block (21), and a lower tension spring hook (22); the upper tension spring block (21) is fixed on the rotating main shaft (3), the lower tension spring hook (22) is fixed on the slider connecting plate (9), and the tension spring (20) is connected between the upper tension spring block (21) and the lower tension spring hook (22).

4. The die-bonding swing arm device as described in claim 1, characterized in that, A first slotted photoelectric sensor (6) is installed on the inner side of the base (2), and several first photoelectric sensing sheets adapted to the first slotted photoelectric sensor (6) are installed on the rotating main shaft (3) inside the base (2) along the circumferential direction.

5. The die-bonding swing arm device as described in claim 2, characterized in that, A second photoelectric sensor (12) is installed on the slider connecting plate (9) on one side, and a second slotted photoelectric sensor (13) adapted to it is installed on the rotating spindle (3) on one side of the second photoelectric sensor (12).

6. The die-bonding swing arm device as described in claim 1, characterized in that, A grating ruler (17) is installed on the slider connecting plate (9) on one side, and a grating ruler reading head (18) adapted to it is installed on the reading head mounting seat (19) of the rotating spindle (3) on one side of the grating ruler (17).

7. The die-bonding swing arm device as described in claim 1, characterized in that, The swing arm assembly (5) includes a first swing arm (14) and a second swing arm (15) from the inside to the outside. The first swing arm (14) is mounted on the swing arm fixing seat (8), and the second swing arm (15) is mounted on the first swing arm (14).

8. The die-bonding swing arm device as described in claim 1, characterized in that, The vacuum paths of the two suction cups (16) are independently controllable.

9. The die-bonding swing arm device as described in claim 1, characterized in that, The spindle rotary motor (1) is a servo motor or a stepper motor.

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