Precision printing micro-nano structure film transfer printing method and preparation method of pre-coloring mold

Abstract

The invention relates to the technical field of flexible electronics and advanced printing, in particular to a precision printing micro-nano structure film transfer printing method and a preparation method of a pre-coloring mold, and aims to solve the problems that the coloring effect of a micro-nano structure coloring process is difficult to control and the production efficiency is poor. According to the technical scheme, the method is characterized in that a pre-coloring mold is provided, a micro-nano structure layer with a target pattern is arranged on the surface of the pre-coloring mold, and a concave cavity of the micro-nano structure layer is filled with a color material; a curable material is arranged on the surface of the bearing base material; the pre-coloring mold and the bearing base material are oppositely combined for curing, and the fused color material and the curable material are jointly cured to form a coloring curing layer with a micro-nano structure; the color material is accurately metered through the concave cavity, it is ensured that the color is uniform and consistent, smooth demolding is facilitated after the color material and the curable material are fused and cured, and the wear resistance, scratch resistance and aging resistance are enhanced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of flexible electronics and advanced printing, in particular to a method for transferring a precisely printed micro-nano structure film and a method for preparing a pre-coloring mold. BACKGROUND

[0002] In the prior art, the post-filling process has become the mainstream scheme for coloring micro-nano structures due to its compatibility with the morphology of micro-nano structures. This process usually first uses nano-imprinting technology to precisely form a micro-nano structure, such as a micron-scale groove or a nanometer-scale hole, on the surface of a substrate to obtain a predetermined morphology. Then, through subsequent steps such as inkjet printing, capillary filling, or coating, ink material containing colorants is filled into the formed micro-nano structure, so that the surface of the substrate presents a pattern of the target color.

[0003] However, in actual production, the post-filling process exposes many defects:

[0004] Firstly, the forming and coloring processes of micro-nano structures are independent of each other, increasing the complexity of the production process. The cumbersome process significantly increases the manufacturing cost and reduces the production efficiency. The characteristics of step-by-step operation and the batch processing mode make it difficult to match the demand for large-scale continuous production in a roll-to-roll mode.

[0005] Secondly, the color uniformity of micro-nano structure coloring is difficult to control. Ink flows and fills inside the micro-nano structure mainly by capillary action, which is influenced by various factors such as structure size, ink viscosity, and surface tension. The coloring effect is difficult to accurately control, often resulting in uneven filling, local vacancies, or bubble residues, which adversely affect the optical consistency of the product.

[0006] Thirdly, there is a risk of color contamination. When filling different color areas in steps, the ink of adjacent areas can easily penetrate and cause color contamination. Moreover, the post-filling process cannot completely remove the residual ink on the surface of the substrate, which further causes contamination.

[0007] Therefore, a new technical solution is proposed to solve the problems in the prior art. SUMMARY

[0008] The purpose of the present application is to provide a method for transferring a precisely printed micro-nano structure film and a method for preparing a pre-coloring mold, to solve the problems of difficult control of coloring effect and poor production efficiency in the coloring process of micro-nano structures in the prior art.

[0009] The technical solution of the present application is a method for transferring a precisely printed micro-nano structure film, comprising the following steps:

[0010] S1, filling color in pre-coloring mold: providing a pre-coloring mold, setting a micro-nano structure layer with a target pattern on the surface of the pre-coloring mold, and filling color material into the recessed cavity of the micro-nano structure layer;

[0011] S2, providing a bearing substrate: setting a curable material layer on the surface of the bearing substrate;

[0012] S3, pressure transfer and synchronous curing: the side surface of the pre-coloring mold filled with color material is matched with the side surface of the bearing substrate provided with the curable material, pressure is applied to make the curable material contact and fuse with the color material in the recessed cavity, and then the fused curable material is cured using a curing device, so that the color material and the curable material are jointly cured to form a colored and cured layer with micro-nano structure;

[0013] S4, demolding: separating the pre-coloring mold from the bearing substrate, the colored and cured layer is attached to the side surface of the bearing substrate close to the pre-coloring mold, and a target product with a colored target pattern is obtained.

[0014] Preferably, in step S3, when the pre-coloring mold and the bearing substrate are matched, the color material is transferred into the curable material, and after the curable material is cured, the color material is released from the recessed cavity of the micro-nano structure together with the curable material.

[0015] Preferably, the viscosity of the curable material is greater than the viscosity of the color material.

[0016] Preferably, the viscosity of the color material is 3000-10000 mPa·s.

[0017] Preferably, in step S2, the curable material layer is coated on the surface of the bearing substrate by a coating roller, in step S3, pressure is applied to the pre-coloring mold by a pressure roller, and in step S4, the pre-coloring mold is separated from the bearing substrate by a separation roller.

[0018] Preferably, the color material is filled into the recessed cavity by a doctor blade device or a dispensing device and then is scraped flat by the doctor blade device, and the color material includes at least one of ink, metal, pigment, and dye.

[0019] The application also discloses a preparation method of the pre-coloring mold.

[0020] M1, preparing a smooth mirror surface on the surface of a substrate;

[0021] M2, microstructure pattern graphization: setting a photoresist layer on the mirror surface, writing the microstructure pattern into the photoresist layer, presenting the microstructure pattern in the photoresist layer by developing, and transferring the microstructure pattern to the mirror surface to form a micro-nano structure layer;

[0022] M3, anti-adhesion treatment: setting an anti-adhesion film layer on the surface of the micro-nano structure layer to obtain the pre-coloring mold.

[0023] Preferably, the way of writing the microstructure pattern into the photoresist layer in step M2 includes mask exposure or laser direct writing, and the way of transferring the microstructure pattern to the mirror surface is dry ion etching process.

[0024] Preferably, the preparation process of the anti-adhesion film layer in step M3 is magnetron sputtering process, and the anti-adhesion film layer includes at least one of fluorine-containing polymer film, diamond-like carbon-based film, silicon-based compound film, metal oxide modified film, and metal nitride modified film.

[0025] Preferably, the substrate in step M1 is a round roller or a flat plate.

[0026] Compared with the prior art, the present application has the following advantages:

[0027] (1) The pre-coloring mold precisely measures the color material by means of the corresponding recessed cavity of the surface micro-nano structure layer, completely solves the problems of uneven filling, bubbles, color mixing and surface contamination in traditional processes, guarantees the uniformity and consistency of color presentation, and the mirror substrate and the anti-adhesion film layer are beneficial to the fusion and curing of the color material and the curable material after demolding, the color material is embedded and packaged in the cured layer, and the wear resistance, scratch resistance and anti-aging performance of the target product are strengthened; through the adjustment of microstructure pattern parameters and the combination of various color materials, flexible combination of structural color and chemical color is realized, which is suitable for flexible display, anti-fake identification, outdoor decoration and other fields, and the pre-coloring mold has good durability and reusability, which is convenient for mass production of target products.

[0028] (2) The precision printing micro-nano structure film transfer method integrates microstructure forming and color transfer by integrated transfer, eliminates multiple complicated processes such as post-filling and cleaning, is suitable for roll-to-roll production, greatly improves production efficiency and reduces comprehensive cost, and can also reduce pollutant emissions.

[0029] (3) Compared with using a flat plate as the substrate of the pre-coloring mold, using a round roller as the substrate of the pre-coloring mold can make the whole transfer process suitable for roll-to-roll continuous production, further improving the production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0030] The present application will be further described below in conjunction with the drawings and examples:

[0031] Figure 1 The flowchart of the preparation method of the pre-coloring mold of the present application;

[0032] Figure 2Structure schematic diagram of pre-coloring mold with round roller for the base body of the present application;

[0033] Figure 3 Structure schematic diagram of pre-coloring mold with flat plate for the base body of the present application;

[0034] Figure 4 Flow chart of the precise printing micro-nano structure film transfer method of the present application;

[0035] Figure 5 Structure schematic diagram of the precise printing micro-nano structure film transfer device of the present application;

[0036] Figure 6 Structure schematic diagram of the precise printing micro-nano structure film transfer device without rack of the present application;

[0037] Figure 7 For Figure 3 Enlarged view of A in the middle;

[0038] Figure 8 For Figure 3 Enlarged view of B in the middle.

[0039] Wherein: 1, pre-coloring mold; 11, base body; 12, plating layer; 13, micro-nano structure layer; 131, concave cavity; 2, color material; 3, bearing substrate; 4, curing equipment; 5, coloring and curing layer; 6, target product; 7, coating roller; 8, compression roller; 9, separation roller; 10, doctor blade device. DETAILED DESCRIPTION

[0040] The content of the present application will be further described in detail in combination with specific embodiments:

[0041] As Figures 1-3 shown, the preparation method of the pre-coloring mold 1 comprises the following steps:

[0042] M1, preparing a smooth mirror surface on the surface of the base body 11;

[0043] M2, microstructure pattern patterning: setting a photoresist layer on the mirror surface, then writing the microstructure pattern into the photoresist layer, presenting the microstructure pattern in the photoresist through development, then transferring the microstructure pattern to the mirror surface to form a micro-nano structure layer 13;

[0044] M3, anti-adhesion treatment: setting an anti-adhesion film layer on the surface of the micro-nano structure layer 13 to obtain the pre-coloring mold 1.

[0045] In step M1, a smooth mirror surface can be prepared by electroplating and polishing the substrate 11 surface or by directly polishing it to a mirror surface. After electroplating on the substrate 11 surface, a coating layer 12 is formed, which includes at least one of a metal reflective layer, a semiconductor material layer, and a dielectric layer. In step M2, the microstructure pattern is written into the photoresist layer by mask exposure or laser direct writing. The microstructure pattern is transferred to the mirror surface by a dry ion etching process. The thickness of the photoresist layer is 2-3 μm, and the microstructure pattern is at the micron and nanometer scale. In step M3, the anti-adhesion film layer is prepared by magnetron sputtering. The anti-adhesion film layer includes at least one of a fluoropolymer film, a silicon-based compound film, a metal oxide modified film, and a metal nitride modified film.

[0046] By improving the flatness of the surface of the pre-colored mold 1 through a smooth mirror surface, the surface energy of the pre-colored mold 1 is reduced, the adhesion of the pre-colored mold 1 to the curable material during the transfer process is reduced, the demolding resistance is reduced, and the anti-adhesion film layer is uniformly covered on the surface of the micro-nano structure layer 13, protecting the graphic structure of the micro-structure pattern from external contamination, and reducing the residue of color material 2 in the recessed cavity 131, ensuring the consistency of the micro-structure pattern transferred each time, thereby extending the service life of the pre-colored mold 1.

[0047] like Figures 2-7 As shown, the precision printing method for micro / nano structure thin film transfer includes the following steps:

[0048] S1. Filling color in pre-colored mold 1: Provide pre-colored mold 1, and set a micro-nano structure layer 13 with target pattern on the surface of pre-colored mold 1, and fill the recessed cavity 131 of micro-nano structure layer 13 with color material 2.

[0049] S2, Provide a carrier substrate 3: Apply a curable material to the surface of the carrier substrate 3;

[0050] S3, Pressure Transfer and Synchronous Curing: The surface of the pre-colored mold 1 filled with the color material 2 is aligned with the surface of the substrate 3 on which the curable material is provided. Pressure is applied to make the curable material contact and fuse with the color material 2 in the recessed cavity 131. The color material 2 is transferred into the curable material. Then, the curing equipment 4 is used to cure it. After the curable material is cured, the color material 2 is released from the recessed cavity 131 along with the curable material. The fused color material 2 and the curable material are cured together to form a colored curing layer 5 with a micro-nano structure.

[0051] S4. Demolding: Separate the pre-colored mold 1 from the carrier substrate 3. The coloring curing layer 5 is attached to the side surface of the carrier substrate 3 near the pre-colored mold 1 to obtain the target product 6 with the coloring target pattern.

[0052] The color material 2 can be filled into the recessed cavity 131 by the scraping device 10 or the dispensing device and then scraped flat by the scraping device 10. The color material 2 includes at least one of ink, metal, pigment and dye. In at least one embodiment, the color material 2 is conductive silver paste. The viscosity of the curable material is greater than the viscosity of the color material 2. The viscosity of the color material 2 is 500-1200 mPa·s. The high molecular weight molecular structure of the color material 2 is cross-linked while the low molecular weight molecular structure is partially open. During the curing after pressing, the low molecular weight molecular structure of the color material 2 and the pre-coated curable material are completely cross-linked after being exposed to light by the curing device 4. This allows the color material 2 to be tightly bonded to the substrate 3 and then transferred out from the pre-colored mold 1.

[0053] The amount of color material 2 is precisely measured through the recessed cavity 131 of the rigid structure of the pre-colored mold 1. Combined with the fusion and curing of the curable material and color material 2 during the transfer process, the color material 2 is directly embedded inside the color curing layer 5. This solves the problem of color depth difference caused by uneven ink flow in the post-filling process. The color material 2 is encapsulated inside the cured curable material to form embedded coloring. Compared with surface coating or post-filling coloring methods, it can significantly improve the product's anti-aging, corrosion resistance and other weather resistance, as well as wear resistance and scratch resistance. The integrated transfer process eliminates the cleaning and drying steps of traditional post-filling, reduces the use and emission of organic solvents such as ink diluents, and reduces environmental pollution. The anti-adhesion film layer on the surface of the pre-colored mold 1 can reduce wear, allowing the pre-colored mold 1 to be reused multiple times, further reducing the material consumption and time cost of producing the target product 6.

[0054] Example 1

[0055] The pre-colored mold 1 uses a circular roller as the substrate 11 to prepare a colored diffraction film.

[0056] like Figures 1-3 As shown, the method for preparing the pre-colored mold 1 includes the following steps:

[0057] M1. Prepare a smooth mirror surface on the surface of the substrate 11: The substrate 11 is a steel round roller with a diameter of 200mm. Electroplating is performed on the surface of the substrate 11 to form a plating layer 12 with a thickness of 100μm. The plating layer 12 is an oxygen-free copper layer. The surface of the plating layer 12 is polished to a mirror surface.

[0058] M2. Microstructure patterning: A 3μm thick photoresist layer is formed by coating a positive photoresist on the surface of the electroplated layer 12. A flexible film mask is used to write the microstructure pattern into the photoresist layer. After development, a microstructure pattern with a grating pattern of 1μm period is formed. The microstructure pattern is transferred to the surface of the electroplated layer 12 to a depth of 300nm by reactive ion etching. Then, the residual photoresist layer is removed to form the micro-nano structure layer 13.

[0059] M3, Anti-adhesion treatment: An anti-adhesion film is deposited on the surface of the electroplated layer 12 with microstructure patterns by magnetron sputtering. The anti-adhesion film is a 50nm thick fluorinated diamond-like carbon film, thereby forming a micro-nano structure layer 13.

[0060] like Figures 2-7 As shown, the precision printing method for micro / nano structure thin film transfer includes the following steps:

[0061] S1. Filling the pre-colored mold 1 with color: Using the pre-colored mold 1 with the micro-nano structure layer 13, the color material 2 is applied to the surface of the pre-colored mold 1. The color material 2 is a green UV curable ink with a viscosity of 500 mPa·s. The pre-colored mold 1 is rotated counterclockwise and the color material 2 is filled into the recessed cavity 131 of the micro-nano structure layer 13 by the scraping device 10. The scraping device 10 is a steel scraper. The scraping device 10 then scrapes the surface of the micro-nano structure layer 13 and removes the excess color material 2 from the raised part of the micro-nano structure layer 13.

[0062] S2. Provide a substrate 3: The substrate 3 is a transparent PET film. A curable material layer is coated on the surface of the substrate 3 by rotating the coating roller 7 counterclockwise. The curable material layer is a curable UV resin with a viscosity of 5000 mPa·s and a thickness of 2-3μm. The viscosity of the curable material is greater than that of the color material 2.

[0063] S3. Pressure Transfer and Synchronous Curing: The surface of the pre-colored mold 1 filled with the color material 2 is aligned with the surface of the substrate 3 on which the curable material is provided. Pressure is applied to the pre-colored mold 1 by rotating the pressure roller 8 clockwise, so that the curable material and the color material 2 in the recessed cavity 131 come into contact and fuse. The pressure is 0.8MPa. The color material 2 is transferred into the curable material. Then, the curing device 4 array is used to irradiate and cure it on the side close to the substrate 3. The curing device 4 is an ultraviolet curing lamp. After the curable material is cured, the color material 2 is released from the recessed cavity 131 along with the curable material. The fused color material 2 and the curable material are cured together to form a colored curing layer 5 with a micro-nano structure.

[0064] S4. Demolding: The pre-colored mold 1 is separated from the carrier substrate 3 by rotating the separation roller 9 clockwise. The coloring and curing layer 5 is attached to the surface of the carrier substrate 3 near the pre-colored mold 1, resulting in a PET film with a bright green diffraction effect, which can be used in packaging anti-counterfeiting, decorative films, flexible circuit boards and other fields.

[0065] The aforementioned circular roller, coating roller 7, pressure roller 8, and separating roller 9 are all driven by motors. The circular roller is used as the pre-coloring mold 1 of the substrate 11, which is suitable for the high continuity production of roll-to-roll films. It can efficiently process flexible substrates in batches, further reducing the material consumption and time cost of producing the target product 6.

[0066] Example 2

[0067] The pre-colored mold 1 uses a flat plate as the substrate 11 to prepare multi-color micro trademarks.

[0068] like Figure 1 and Figure 3 As shown, the method for preparing the pre-colored mold 1 includes the following steps:

[0069] M1. Prepare a smooth mirror surface on the surface of substrate 11: Substrate 11 is a silicon wafer, polished to a mirror surface, with a surface roughness Ra≤0.02μm;

[0070] M2. Microstructure patterning: A 3μm thick photoresist layer is set on the mirror surface. Microstructure patterns are written into the photoresist layer by electron beam photolithography on the mirror side of the substrate 11 using laser direct writing to create a master. The microstructure patterns are presented in the photoresist by development. Then, the microstructure patterns are transferred to the mirror surface by electroforming to obtain a nickel plate mold with a micro-nano structure layer 13. The microstructure pattern of the micro-nano structure layer 13 is a grating pattern with a period of 1μm.

[0071] M3, Anti-adhesion treatment: A perfluorosilane self-assembled monolayer is deposited on one side surface of the nickel plate mold with micro-nano structure layer 13 as an anti-adhesion film layer to obtain the pre-colored mold 1.

[0072] like Figures 3-7 As shown, the precision printing method for micro / nano structure thin film transfer includes the following steps:

[0073] S1. Filling color in pre-colored mold 1: Using the above-mentioned pre-colored mold 1, using a precision dispensing device, fill different colored materials 2 into different recessed cavities 131 of the pre-colored mold 1 respectively. The colored materials 2 are red ink and blue ink with a viscosity of 1000 mPa·s, and then scrape the whole surface with a scraping device 10.

[0074] S2. Provide a substrate 3: The substrate 3 is a transparent PET film. A curable material layer is coated on the surface of the substrate 3 by a coating roller 7. The curable material layer is a curable UV resin with a viscosity of 5000 mPa·s and a thickness of 2-3μm. The viscosity of the curable material is greater than that of the color material 2.

[0075] S3. Pressure Transfer and Synchronous Curing: The surface of the pre-colored mold 1 filled with the color material 2 is aligned with the surface of the substrate 3 on which the curable material is provided. Pressure is applied to the pre-colored mold 1 by the pressure roller 8 to make the curable material contact and fuse with the color material 2 in the recessed cavity 131. The pressure is 0.8MPa, and the color material 2 is transferred into the curable material. Then, the curing device 4 array is used to irradiate and cure it on the side close to the substrate 3. The curing device 4 is an ultraviolet curing lamp with an ultraviolet light wavelength of 365nm. After the curable material is cured, the color material 2 is released from the recessed cavity 131 along with the curable material. The fused color material 2 and the curable material are cured together to form a colored curing layer 5 with a micro-nano structure.

[0076] S4. Demolding: The pre-colored mold 1 is separated from the carrier substrate 3 by the separation roller 9. The color curing layer 5 is attached to the surface of the carrier substrate 3 on the side close to the pre-colored mold 1, and finally a micro trademark with red and blue colors, clear boundaries and no color bleeding pattern is obtained, which is suitable for anti-counterfeiting of high-end brands.

[0077] The pre-colored mold 1 utilizes a recessed cavity 131 to precisely measure the color material 2, effectively solving problems such as uneven filling, air bubbles, color bleeding, and surface contamination in traditional processes, ensuring uniform and consistent color presentation. The mirror substrate 11 and anti-adhesion film layer facilitate smooth demolding after the color material 2 is fused and cured with the curable material, allowing the color material 2 to be embedded and encapsulated in the cured layer, enhancing the wear resistance, scratch resistance, and anti-aging properties of the target product 6. At the same time, the pre-colored mold 1 is durable and reusable, providing convenience for the large-scale mass production of the target product 6. The precision printing micro-nano structure thin film transfer method adopts integrated transfer technology, completing the microstructure forming and color transfer simultaneously, eliminating cumbersome processes such as post-filling and cleaning, and adapting to roll-to-roll production mode. This not only significantly improves production efficiency and reduces overall costs but also reduces pollutant emissions. By adjusting the microstructure pattern parameters and combining multiple color materials 2, structural colors and chemical colors can be flexibly matched, making it widely applicable to flexible displays, anti-counterfeiting labels, outdoor decoration, decorative films, flexible circuit boards, and other fields.

[0078] The above embodiments are merely illustrative of the technical concept and features of the present invention, intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and should not be construed as limiting the scope of protection of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of the present invention is defined by the appended claims rather than the foregoing description, and thus all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within the present invention.

Claims

1. A method for precision printing of micro- and nano-structured thin film transfer, characterized in that, The method comprises the following steps: S1, filling color in a pre-coloring mold (1): providing a pre-coloring mold (1) provided with a micro-nano structure layer (13) having a target pattern on the surface, and filling color material (2) into the recessed cavity (131) of the micro-nano structure layer (13); S2, providing a carrier substrate (3): providing a curable material on the surface of the carrier substrate (3); S3, pressure transfer and synchronous curing: the side surface of the pre-coloring mold (1) filled with color material (2) is matched with the side surface of the carrier substrate (3) provided with a curable material, pressure is applied to make the curable material contact and fuse with the color material (2) in the recessed cavity (131), and then a curing device (4) is used for curing, the fused color material (2) and the curable material are cured together to form a colored cured layer (5) with micro-nano structure; S4, demolding: separating the pre-coloring mold (1) from the carrier substrate (3), the colored cured layer (5) is attached to the side surface of the carrier substrate (3) close to the pre-coloring mold (1), and a target product (6) with a colored target pattern is obtained.

2. The method according to claim 1, wherein: In step S3, when the pre-coloring mold (1) and the carrier substrate (3) are matched, the color material (2) is transferred to the curable material, and after the curable material is cured, the color material (2) is released from the recessed cavity (131) together with the curable material.

3. The method of claim 1, wherein the method further comprises: The viscosity of the curable material is greater than the viscosity of the color material (2).

4. The method of claim 1, wherein: The viscosity of the color material (2) is 500-1200 mPa·s.

5. The method of claim 1, wherein: In step S2, the curable material layer is coated on the surface of the carrier substrate (3) by a coating roller (7), in step S3, pressure is applied to the pre-coloring mold (1) by a pressure roller (8), and in step S4, the pre-coloring mold (1) is separated from the carrier substrate (3) by a separation roller (9).

6. The method of claim 1, wherein: The color material (2) is filled into the recessed cavity (131) by a doctor blade device (10) or a dispensing device and is then completely scraped flat by the doctor blade device (10), and the color material (2) includes at least one of ink, metal, pigment, and dye.

7. Process for the production of a precoloured mould (1) according to any one of claims 1 to 6, characterised in that, The method comprises the following steps: M1, preparing a smooth mirror surface on the surface of a substrate (11); M2, microstructure pattern graphization: providing a photoresist layer on the mirror surface, writing the microstructure pattern into the photoresist layer, presenting the microstructure pattern in the photoresist through development, and transferring the microstructure pattern to the mirror surface to form a micro-nano structure layer (13); M3, anti-adhesion treatment: providing an anti-adhesion film layer on the surface of the micro-nano structure layer (13) to obtain a pre-coloring mold (1).

8. The method of claim 6, wherein: In step M2, the microstructure pattern is written into the photoresist layer in a manner including mask exposure or laser direct writing, and the microstructure pattern is transferred to the mirror surface in a dry ion etching process.

9. The method of claim 6, wherein: In step M3, the anti-adhesion film layer is prepared by a magnetron sputtering process, and the anti-adhesion film layer includes at least one of a fluoropolymer film, a diamond-like carbon-based film, a silicon-based compound film, a metal oxide modified film, and a metal nitride modified film.

10. The method of claim 6, wherein: The substrate (11) in step M1 is a round roll or a flat plate.

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