Seal valve mechanism and semiconductor processing apparatus

By designing a phased motion control system for the valve plate unit, and utilizing a fixed frame, valve plate, movable seat, swing arm, and elastic components, the vacuum valve mechanism achieves smooth closure and flexible sealing, solving the vibration problem caused by rigid impact in existing technologies and improving operational stability and sealing reliability.

CN121761132BActive Publication Date: 2026-06-09CHANGSHU ZHAOHENGZHONGLI PRECISION MASCH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHANGSHU ZHAOHENGZHONGLI PRECISION MASCH CO LTD
Filing Date
2026-02-28
Publication Date
2026-06-09

AI Technical Summary

Technical Problem

The existing vacuum valve mechanism vibrates due to rigid impact when closed, affecting operational stability.

Method used

The valve plate unit includes a fixed frame, valve plate, movable seat, swing arm, elastic element and drive device. The valve plate is closed smoothly and sealed flexibly through phased motion control to avoid rigid impact.

Benefits of technology

It effectively overcomes the vibration problem caused by rigid impact, and improves the operational stability and sealing reliability of the sealing valve mechanism.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a sealing valve mechanism and a semiconductor processing equipment, and belongs to the technical field of valve mechanisms.The sealing valve mechanism comprises a valve body and a valve plate unit.The valve body is provided with a valve port.The valve plate unit comprises a fixing frame, a valve plate, a first movable seat, a second movable seat, a swing arm, an elastic piece and a driving device.The sealing valve mechanism of the application realizes smooth closing and flexible sealing of the valve plate through stage-by-stage motion control, and effectively overcomes the vibration problem caused by rigid impact in the prior art.
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Citation Information

Patent Citations

  • Gate valve

    CN104321569A

  • Rectangular gate valve

    KR101092138B1

  • Gate valve

    KR1020130098476A