Radio frequency pulse power supply for radio frequency carbon dioxide laser

Abstract

The invention discloses a radio-frequency pulse power supply for a radio-frequency carbon dioxide laser, and the power supply comprises an input unit which inputs a radio-frequency signal; the first-stage power amplification unit is used for receiving the radio frequency signal, amplifying power and outputting a first-stage amplified radio frequency signal; the first-stage power distribution unit receives the first-stage amplification radio frequency signal and equally divides the first-stage amplification radio frequency signal into two paths of first-stage distribution radio frequency signals with the same power for output; the second-stage power distribution units are arranged in pairs, receive the first-stage distribution radio-frequency signals, uniformly divide the first-stage distribution radio-frequency signals into two paths of second-stage distribution radio-frequency signals with the same power through voltage reduction and transformation, and output the two paths of second The second-stage power amplification unit receives one path of second-stage distribution radio frequency signal, amplifies power and outputs a second-stage amplification radio frequency signal; the power synthesis unit is used for receiving the four paths of secondary amplification radio-frequency signals and synthesizing the four paths of secondary amplification radio-frequency signals into high-power radio-frequency signals for output through boost transformation; and the output unit receives and outputs the high-power radio frequency signal. Through multi-stage amplification and multi-stage synthesis, pulse signal output with hundreds of watts to kilowatt peak power is realized.

Description

Technical Field

[0001] This invention belongs to the field of high-frequency power electronics technology, and is particularly applicable to power supply systems for radio frequency excited carbon dioxide lasers. Specifically, it is a radio frequency pulse power supply for radio frequency carbon dioxide lasers based on a multi-level synthesis architecture. Background Technology

[0002] In the existing technology, the RF power supply for RF CO2 lasers typically adopts a single-tube power amplification architecture. The output power of RF power supplies based on this architecture is limited, making it difficult to meet the increasingly high power output requirements of industrial-grade lasers. At the same time, the power combining schemes in the existing technology may have phase mismatch problems, which can easily lead to excessive power combining losses, affecting the overall electro-optical conversion efficiency of the laser and hindering the performance optimization and application expansion of RF CO2 lasers. Summary of the Invention

[0003] The purpose of this invention is to address the problems existing in the prior art by providing a radio frequency pulse power supply for radio frequency carbon dioxide lasers.

[0004] The objective of this invention is achieved through the following technical solution:

[0005] An RF pulse power supply for an RF carbon dioxide laser, the RF pulse power supply comprising:

[0006] The input unit is used to input radio frequency signals to the first-stage power amplifier unit;

[0007] The first-stage power amplifier unit receives the radio frequency signal and amplifies its power by 3-6 times, outputting a first-stage amplified radio frequency signal;

[0008] The first-stage power distribution unit receives the first-stage amplified RF signal and divides it equally into two first-stage distributed RF signal outputs with the same power.

[0009] The secondary power distribution unit is set in pairs. Each receives one primary distribution RF signal and divides it into two secondary distribution RF signals with the same power output after step-down transformation.

[0010] The secondary power amplifier unit receives the corresponding secondary distribution RF signal and amplifies the power of the secondary distribution RF signal by 20-30 times, and outputs the secondary amplified RF signal;

[0011] The power combining unit simultaneously receives four secondary amplified RF signals and combines them into a high-power RF signal output after boosting and transformer conversion.

[0012] The output unit receives high-power radio frequency signals, filters out harmonics and high-frequency noise in the high-power radio frequency signals, and then outputs them.

[0013] The input unit includes an RF signal input terminal for inputting RF signals, a first capacitor and a first inductor for transmitting RF signals, and a second capacitor for filtering RF signals. The RF signal input terminal is sequentially connected to the first capacitor and the first inductor via a line. One end of the second capacitor is grounded, and the other end is bypassed and connected to the line between the first capacitor and the first inductor. The RF signal input from the RF signal input terminal is transmitted through the first capacitor, filtered by the second capacitor, and then transmitted through the first inductor to the first-stage power amplifier unit.

[0014] The first-stage power amplification unit includes a first-stage radio frequency (RF) power amplification module and a first-stage pulse width modulation (PWM) module. The PWM module, connected to the line between the first-stage RF power amplification module and the input unit, is used to turn the first-stage RF power amplification module on and off. The first-stage RF power amplification module includes a first RF power amplifier capable of amplifying the RF signal by several times, a fourth capacitor for transmitting the amplified RF signal, the gate of the first RF power amplifier being connected to the input unit to receive the RF signal, the source being grounded, and the drain being coupled through the fourth capacitor to output the amplified RF signal. The first-stage PWM module includes a first PWM modulator for adjusting the gate voltage of the first RF power amplifier, a third resistor acting as a potentiometer, and a second resistor for transmitting the gate voltage. The first PWM modulator is connected to one end of the third resistor, and the other end of the third resistor is grounded. One end of the second resistor is connected to the third resistor, and the other end is connected to the line between the gate of the first RF power amplifier and the input unit.

[0015] The first-stage pulse width modulation module is equipped with a signal feedback unit and a first power supply unit. The two ends of the signal feedback unit are respectively connected to the gate and drain of the first RF power amplifier, and the first power supply unit is connected to the drain of the first RF power amplifier. The signal feedback unit includes a first resistor and a third capacitor. One end of the first resistor is connected to the line between the gate of the first RF power amplifier and the input unit, and the connection point of the first resistor is located in front of the connection point of the first-stage pulse width modulation module. The other end is connected to one end of the third capacitor, and the other end of the third capacitor is connected to the line between the drain of the first RF power amplifier and a fourth capacitor. The first power supply unit includes a DC power supply for supplying power to the first RF power amplifier and a second inductor for filtering the DC power output. The DC power supply is connected to the drain of the first RF power amplifier through the second inductor. A sixteenth capacitor with a voltage stabilization and filtering function is configured on the first power supply unit. One end of the sixteenth capacitor is grounded, and the other end is connected to the line between the second inductor and the drain of the first RF power amplifier.

[0016] The primary power distribution unit includes a magnetic ring power divider and a thirteenth resistor connected in parallel. The magnetic ring power divider is connected to the primary power amplification unit through a line to receive the primary amplified radio frequency signal and divide it into two primary distribution radio frequency signals. The thirteenth resistor is used to balance the two primary distribution radio frequency signals. The two ends of the thirteenth resistor located on the output side of the primary power distribution unit are respectively connected to the corresponding secondary power distribution units.

[0017] Each secondary power distribution unit includes a step-down transformer and two sets of capacitors of different specifications that match the step-down transformer. The step-down transformer and the two sets of capacitors are connected in parallel. One end of the step-down transformer, located on the input side of the secondary power distribution unit, is connected to the primary power distribution unit to receive the corresponding primary distribution RF signal and split it into two outputs. The other end is grounded. The two sets of capacitors connected in parallel are used to cooperate with the step-down transformer to split the primary distribution RF signal into two secondary distribution RF signals of equal power. The two ends of the capacitors located on the output side of the secondary power distribution unit are connected to the corresponding two sets of secondary power amplifier units through lines to output the secondary distribution RF signal.

[0018] The secondary power amplification unit includes an RF power amplification module and a pulse width modulation module. The pulse width modulation module, connected to the line between the RF power amplification module and the secondary power distribution unit, is used to turn the RF power amplification module on and off. The RF power amplification module includes an RF power amplifier capable of amplifying the secondary distribution RF signal by several times, a copper inductor for transmitting the secondary distribution RF signal, and a capacitor for filtering out noise in the secondary amplified RF signal. The gate of the RF power amplifier is connected to the output terminal of the secondary power distribution unit through the copper inductor to receive the secondary distribution RF signal. The source is grounded, and the drain is connected to a capacitor with one end grounded through a line to output the secondary amplified RF signal with noise filtered out by the capacitor. The pulse width modulation module includes a pulse width modulator for adjusting the gate voltage of the RF power amplifier, a resistor as a potentiometer, and a resistor for transmitting the gate voltage. The pulse width modulator is connected to one end of the resistor as a potentiometer, and the other end of the resistor as a potentiometer is grounded. One end of the resistor for transmitting the gate voltage is connected to the resistor as a potentiometer, and the other end is connected to the line between the gate of the RF power amplifier and the copper inductor.

[0019] The RF power amplifier module is matched with a power supply unit connected to the drain of the corresponding RF power amplifier. The power supply unit includes a DC power supply for powering the RF power amplifier and an inductor for filtering the DC power output. The DC power supply is connected to the drain of the RF power amplifier through the inductor. The power supply unit is also equipped with a capacitor that performs voltage regulation and filtering. One end of the capacitor is grounded and the other end is connected to the line between the corresponding inductor and the DC power supply.

[0020] The power combining unit includes paired boost combining modules and magnetic ring power combiners. The input terminals of each boost combining module are connected to two corresponding secondary power amplifier units via lines. The two boost combining modules are connected to the magnetic ring power combiner via lines. The magnetic ring power combiner is connected to the output unit via lines. A twelfth resistor is arranged between the boost combining module and the magnetic ring power combiner. The twelfth resistor, which is connected in parallel with the magnetic ring power combiner, is used to balance the two radio frequency signals output by the two boost combining modules.

[0021] The step-up synthesis module includes a step-up transformer. The two ends of the input side of the step-up transformer are respectively connected to two corresponding two-stage power amplifier units through lines. One end of the output side of the step-up transformer is grounded and the other end is connected to one input terminal of the magnetic ring power synthesizer through a line. A grounding capacitor is arranged on the line between the step-up transformer and the twelfth resistor. The grounding capacitor is used to match the step-up transformer and shunt the harmonics in the radio frequency signal output by the step-up transformer to ground.

[0022] The output unit includes a ninth inductor, a fifteenth capacitor, and a radio frequency signal output terminal. One end of the ninth inductor is connected to the output terminal of the magnetic ring power combiner via a line, and the other end is connected to the radio frequency signal output terminal via a line. The fifteenth capacitor, with one end grounded, is connected to the line between the ninth inductor and the radio frequency signal output terminal via a line.

[0023] The present invention has the following advantages over the prior art:

[0024] This invention constructs an RF pulse power amplifier circuit through modules such as input amplification, power distribution, power amplification, and boost synthesis. The weak input RF signal is initially amplified by an RF power amplifier, then split into stages by a magnetic ring power divider and a step-down transformer, further amplified by an RF power amplifier, and finally synthesized in stages by a step-up transformer and a magnetic ring power combiner. This achieves multi-stage amplification and synthesis of the RF signal, ultimately outputting a high-power pulse signal through power superposition. This output achieves peak power pulse signals ranging from hundreds of watts to kilowatts, solving the problem of limited output power in existing RF power supplies based on single-tube power amplifier architectures. Simultaneously, a bias voltage is set for each RF power amplifier, and the voltage magnitude is adjusted by a potentiometer to solve problems such as phase mismatch during power synthesis in existing technologies, effectively improving the stability of power synthesis and expanding the application of RF CO2 lasers in high-precision scenarios. Attached Figure Description

[0025] Appendix Figure 1 This is a schematic diagram of the radio frequency pulse power supply for a radio frequency carbon dioxide laser according to the present invention.

[0026] Where: RF IN—RF signal input terminal; C1—first capacitor; C2—second capacitor; C3—third capacitor; C4—fourth capacitor; C5—fifth capacitor; C6—sixth capacitor; C7—seventh capacitor; C8—eighth capacitor; C9—ninth capacitor; C10—tenth capacitor; C11—eleventh capacitor; C12—twelfth capacitor; C13—thirteenth capacitor; C14—fourteenth capacitor; C15—fifteenth capacitor; C16—sixteenth capacitor; C17—seventeenth capacitor; C18—eighteenth capacitor; C19—nineteenth capacitor; C20—twentieth capacitor; L1—first inductor; L2—second inductor; L3—third inductor; L4—fourth inductor; L5—fifth inductor; L6—sixth inductor; L7—seventh inductor; L8—eighth inductor; L9—ninth inductor; R1—first resistor; R2—second resistor; R3—third resistor; R4—fourth resistor; R5—Fifth resistor; R6—Sixth resistor; R7—Seventh resistor; R8—Eighth resistor; R9—Ninth resistor; R10—Tenth resistor; R11—Eleventh resistor; R12—Twelfth resistor; R13—Thirteenth resistor; PWM1—First pulse width modulator; Q1—First RF power amplifier; PWM2—Second pulse width modulator; Q2—Second RF power amplifier; PWM3—Third pulse width modulator; Q3—Third RF power amplifier; PWM4—Fourth pulse width modulator; Q4—Fourth RF power amplifier; PWM5—Fifth pulse width modulator; Q5—Fifth RF power amplifier; T1—First buck transformer; T2—Second buck transformer; T3—First boost transformer; T4—Second boost transformer; T5—Magnetic ring power divider; T6—Magnetic ring power combiner; Port—RF signal output terminal. Detailed Implementation

[0027] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that the invention will be thorough and complete, and the concept of the exemplary embodiments will be fully conveyed to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore their detailed description will be omitted.

[0028] The terms “a,” “one,” “the,” and “the” are used to indicate the existence of one or more elements / components / etc.; the terms “including” and “having” are used to indicate an open-ended meaning of inclusion and that other elements / components / etc. may exist in addition to the listed elements / components / etc.

[0029] like Figure 1The diagram shows an RF pulse power supply for an RF carbon dioxide laser. The RF pulse power supply includes: an input unit, a first-stage power amplification unit, a first-stage power distribution unit, a second-stage power distribution unit, a second-stage power amplification unit, a power combining unit, and an output unit. The input unit inputs an RF signal to the first-stage power amplification unit. The first-stage power amplification unit receives the RF signal and amplifies its power by 3-6 times, outputting a first-stage amplified RF signal. The first-stage power distribution unit receives the first-stage amplified RF signal and equally divides it into two first-stage distributed RF signals of equal power for output. The second-stage power distribution units are arranged in pairs, each receiving one first-stage distributed RF signal and equally dividing it into two second-stage distributed RF signals of equal power after step-down transformation. The second-stage power amplification unit receives its corresponding second-stage distributed RF signal and amplifies its power by 20-30 times, outputting a second-stage amplified RF signal. The power combining unit simultaneously receives four second-stage amplified RF signals and combines them into a high-power RF signal after step-up transformation for output. The output unit receives the high-power RF signal, filters out harmonics and high-frequency noise from the high-power RF signal, and then outputs the signal.

[0030] The input unit includes an RF signal input terminal RF IN for inputting RF signals, a first capacitor C1 (1nF) and a first inductor L1 for transmitting RF signals, and a second capacitor C2 (100pF) for filtering RF signals. The RF signal input terminal RF IN is sequentially connected to the first capacitor C1 and the first inductor L1 via a line. One end of the second capacitor C2 is grounded, and the other end is bypassed and connected to the line between the first capacitor C1 and the first inductor L1. The first inductor L1 is connected to the gate of the first RF power amplifier Q1 via a line. The RF signal input from the RF signal input terminal RF IN is filtered by the second capacitor C2 during the process of being transmitted from the first capacitor C1 to the first inductor L1, and then transmitted from the first inductor L1 to the first RF power amplifier Q1 for power amplification.

[0031] Furthermore, the first-stage power amplification unit includes a first-stage radio frequency (RF) power amplification module and a first-stage pulse width modulation (PWM) module. The PWM module, connected to the line between the first-stage RF power amplification module and the input unit, is used to turn the first-stage RF power amplification module on and off. The first-stage RF power amplification module includes a first RF power amplifier Q1 capable of amplifying the RF signal by several times, and a fourth capacitor C4 (1nF) for transmitting the amplified RF signal. The gate of the first RF power amplifier Q1 is connected to the input unit to receive the RF signal, the source is grounded, and the drain is coupled through the fourth capacitor C4 to output the amplified RF signal. The first-stage PWM module includes a first pulse width modulator PWM1 for adjusting the gate voltage of the first RF power amplifier Q1, a third resistor R3 (2000Ω) as a potentiometer, and a second resistor R2 (100Ω) for transmitting the gate voltage. The first pulse width modulator PWM1 is connected to one end of the third resistor R3, and the other end of the third resistor R3 is grounded. One end of the second resistor R2 is connected to the third resistor R3, and the other end is connected to the line between the gate of the first RF power amplifier Q1 and the input unit.

[0032] The first-level pulse width modulation module is also matched with a signal feedback unit and a first power supply unit. The two ends of the signal feedback unit are respectively connected to the gate and drain of the first RF power amplifier Q1, and the first power supply unit is connected to the drain of the first RF power amplifier Q1. The signal feedback unit includes a first resistor R1 (390Ω) and a third capacitor C3 (2200pF). One end of the first resistor R1 is connected to the line between the gate of the first RF power amplifier Q1 and the input unit, and the connection point of the first resistor R1 is located in front of the connection point of the first-stage pulse width modulation module. The other end is connected to one end of the third capacitor C3. The other end of the third capacitor C3 is connected to the line between the drain of the first RF power amplifier Q1 and the fourth capacitor C4. The first power supply unit includes a 48V DC power supply for the first RF power amplifier Q1 and a second inductor L2 (a multi-hole magnetic ring inductor) for filtering the DC power output. The DC power supply is connected to the drain of the first RF power amplifier Q1 through the second inductor L2. The first power supply unit is equipped with a sixteenth capacitor C16 (63V, 470μF electrolytic capacitor) that plays a voltage regulation and filtering role. One end of the sixteenth capacitor C16 is grounded, and the other end is connected to the line between the second inductor L2 and the drain of the first RF power amplifier Q1.

[0033] Furthermore, the primary power distribution unit includes a magnetic ring power divider T5 and a thirteenth resistor 13 (100Ω) connected in parallel. The magnetic ring power divider T5 is connected to the fourth capacitor C4 through a line to receive the primary amplified RF signal and divide it into two primary distribution RF signals. The thirteenth resistor 13 is used to balance the two primary distribution RF signals. The two ends of the thirteenth resistor 13 located on the output side of the primary power distribution unit are respectively connected to the step-down transformer in the corresponding secondary power distribution unit.

[0034] Furthermore, the secondary power distribution unit comprises two sets. One set includes a first step-down transformer T1, a fifth capacitor C5 (1nF), and a sixth capacitor C6 (200pF). The other set includes a second step-down transformer T2, a seventh capacitor C7 (1nF), and an eighth capacitor C8 (200pF). The first step-down transformer T1, the fifth capacitor C5, and the sixth capacitor C6 are arranged in parallel, as are the second step-down transformer T2, the seventh capacitor C7, and the eighth capacitor C8. One end of the first step-down transformer T1, located on the input side of the secondary power distribution unit, is connected to the primary power distribution unit to receive the corresponding primary distribution RF signal and split it into two outputs. The other end is grounded. The fifth capacitor C5 and the sixth capacitor C6 are used to cooperate with the first step-down transformer T1 to split the primary distribution RF signal into two secondary distribution RF signals of equal power. The two ends of the sixth capacitor C6, located on the output side of the secondary power distribution unit, are connected to the copper inductors in the corresponding two sets of secondary power amplifier units through lines to output the secondary distribution RF signal. Similarly, one end of the second step-down transformer T2, located on the input side of the secondary power distribution unit, is connected to the primary power distribution unit to receive the corresponding primary distribution RF signal and split it into two outputs, while the other end is grounded. The seventh capacitor C7 and the eighth capacitor C8 are used in conjunction with the second step-down transformer T2 to split the primary distribution RF signal into two secondary distribution RF signals of equal power. The two ends of the eighth capacitor C8, located on the output side of the secondary power distribution unit, are respectively connected to the copper inductors in the two sets of secondary power amplifier units through lines to output the secondary distribution RF signal.

[0035] Furthermore, there are four sets of secondary power amplification units. The first set of secondary power amplification units includes a second RF power amplification module, a second pulse width modulation module, and a second power supply unit matching the second RF power amplification module. The second RF power amplification module includes a second RF power amplifier Q2 that can amplify the secondary distribution RF signal by several times, an eighth inductor L8 for transmitting the secondary distribution RF signal, and a ninth capacitor C9 (1nF) for filtering out noise in the secondary amplified RF signal. The gate of the second RF power amplifier Q2 is connected to one end of the sixth capacitor C6 on the output side of the secondary power distribution unit through the eighth inductor L8 to receive the secondary distribution RF signal. The source is grounded, and the drain is connected to the ninth capacitor C9, which is grounded at one end, through a line and outputs the secondary amplified RF signal with noise filtered out by the ninth capacitor C9. The second pulse width modulation module includes a second pulse width modulator PWM2 that adjusts the gate voltage of the second RF power amplifier Q2, and an eighth inductor L8 that acts as a potentiometer. The system includes a 2000Ω resistor R8, a 100Ω ninth resistor for transmitting the gate voltage, a second pulse width modulator (PWM2) connected to one end of the eighth resistor R8, and the other end of the eighth resistor R8 grounded. One end of the ninth resistor R9 is connected to the middle of the eighth resistor R8 and its position can be adjusted; the other end is connected to the line between the gate of the second RF power amplifier Q2 and the eighth inductor L8. The second power supply unit includes a 48V DC power supply for the second RF power amplifier Q2, and a third inductor L3 for filtering the DC power output. The DC power supply is connected to the drain of the second RF power amplifier Q2 through the third inductor L3, and the connection point of the third inductor L3 is located on the line between the drain of the second RF power amplifier Q2 and the ninth capacitor C9. In addition, a seventeenth capacitor C17 is configured on the second power supply unit to perform voltage regulation and filtering. One end of the seventeenth capacitor C17 is grounded, and the other end is connected to the line between the corresponding third inductor L3 and the 48V DC power supply.

[0036] The second-stage power amplification unit includes a third RF power amplification module and a third pulse width modulation module. The third RF power amplification module includes a third RF power amplifier Q3 that amplifies the secondary distribution RF signal by several times, a fifth inductor L5 for transmitting the secondary distribution RF signal, and a tenth capacitor C10 (1nF) for filtering out noise in the secondary amplified RF signal. The gate of the third RF power amplifier Q3 is connected to the other end of the sixth capacitor C6 on the output side of the secondary power distribution unit through the fifth inductor L5 to receive the secondary distribution RF signal. The source is grounded, and the drain is connected to the tenth capacitor C6, which is grounded at one end, through a line. The capacitor C10 outputs a secondary amplified RF signal with noise filtered out by the tenth capacitor C10; the third pulse width modulation module includes a third pulse width modulator PWM3 that adjusts the gate voltage of the third RF power amplifier Q3, a fourth resistor R4 (2000Ω) as a potentiometer, and a sixth resistor R6 (100Ω) that transmits the gate voltage. The third pulse width modulator PWM3 is connected to one end of the fourth resistor R4, and the other end of the fourth resistor R4 is grounded. One end of the sixth resistor R6 is connected to the middle of the fourth resistor R4 and its position can be adjusted. The other end is connected to the line between the gate of the third RF power amplifier Q3 and the fifth inductor L5.

[0037] The third group of secondary power amplification units includes a fourth RF power amplification module and a fourth pulse width modulation module. The fourth RF power amplification module includes a fourth RF power amplifier Q4 that amplifies the secondary distribution RF signal by several times, a sixth inductor L6 for transmitting the secondary distribution RF signal, and an eleventh capacitor C11 (1nF) for filtering out noise in the secondary amplified RF signal. The gate of the fourth RF power amplifier Q4 is connected to one end of the eighth capacitor C8 on the output side of the corresponding secondary power distribution unit through the sixth inductor L6 to receive the secondary distribution RF signal. The source is grounded, and the drain is connected to the eleventh capacitor C8, which is grounded at one end, through a line. Capacitor C11 outputs a secondary amplified RF signal with noise filtered out by the eleventh capacitor C11; the fourth pulse width modulation module includes a fourth pulse width modulator PWM4 that adjusts the gate voltage of the fourth RF power amplifier Q4, a fifth resistor R5 (2000Ω) as a potentiometer, and a seventh resistor R7 (100Ω) that transmits the gate voltage. The fourth pulse width modulator PWM4 is connected to one end of the fifth resistor R5, and the other end of the fifth resistor R5 is grounded. One end of the seventh resistor R7 is connected to the middle of the fifth resistor R5 and its position can be adjusted, and the other end is connected to the line between the gate of the fourth RF power amplifier Q4 and the sixth inductor L6.

[0038] The fourth group of secondary power amplification units includes a fifth RF power amplification module, a fifth pulse width modulation module, and a fifth power supply unit matching the fifth RF power amplification module. The fifth RF power amplification module includes a fifth RF power amplifier Q5 that amplifies the secondary distribution RF signal by several times, a seventh inductor L7 for transmitting the secondary distribution RF signal, and a twelfth capacitor C12 (1nF) for filtering out noise in the secondary amplified RF signal. The gate of the fifth RF power amplifier Q5 is connected to one end of the eighth capacitor C8 on the output side of the corresponding secondary power distribution unit through the seventh inductor L7 to receive the secondary distribution RF signal. The source is grounded, and the drain is connected to the twelfth capacitor C12, which is grounded at one end, and outputs the secondary amplified RF signal with noise filtered out by the twelfth capacitor C12. The fifth pulse width modulation module includes a fifth pulse width modulator PWM5 that adjusts the gate voltage of the fifth RF power amplifier Q5, and a tenth resistor R10 (2000Ω) as a potentiometer. The eleventh resistor R11 (100Ω) transmits the gate voltage. The fifth pulse width modulator PWM5 is connected to one end of the tenth resistor R10, and the other end of the tenth resistor R10 is grounded. One end of the eleventh resistor R11 is connected to the middle of the tenth resistor R10 and its position can be adjusted. The other end is connected to the line between the gate of the fifth RF power amplifier Q5 and the seventh inductor L7. The fifth power supply unit includes a 48V DC power supply for the fifth RF power amplifier Q5 and a fourth inductor L4 for filtering the DC power output. The DC power supply is connected to the drain of the fifth RF power amplifier Q5 through the fourth inductor L4, and the connection point of the fourth inductor L4 is located on the line between the drain of the fifth RF power amplifier Q5 and the twelfth capacitor C12. In addition, the fifth power supply unit is equipped with an eighteenth capacitor C18 that plays a role in voltage regulation and filtering. One end of the eighteenth capacitor C18 is grounded, and the other end is connected to the line between the corresponding fourth inductor L4 and the 48V DC power supply.

[0039] Furthermore, the power combining unit includes two sets of boost combining modules and a magnetic ring power combiner T6. The first set of boost combining modules includes a first boost transformer T3, and the second set of boost combining modules includes a second boost transformer T4. The two input terminals of the first boost transformer T3 are respectively connected to the drain of the second RF power amplifier Q2 and the drain of the third RF power amplifier Q3 to combine the two-stage amplified RF signals output by the second RF power amplifier Q2 and the third RF power amplifier Q3. The two input terminals of the second boost transformer T4 are respectively connected to the drain of the fourth RF power amplifier Q4 and the drain of the fifth RF power amplifier Q5 to combine the two-stage amplified RF signals output by the fourth RF power amplifier Q4 and the fifth RF power amplifier Q5. The output terminals of the first boost transformer T3 and the second boost transformer T4 are respectively connected to the two input terminals of the magnetic ring power combiner T6. The output terminal of the magnetic ring power combiner T6 is connected to the ninth inductor L9 in the output unit through a line. A twelfth resistor R12 is arranged between the first step-up transformer T3 and the second step-up transformer T4 and the magnetic ring power combiner T6. The twelfth resistor R12, which is set in parallel with the magnetic ring power combiner T6, is used to balance the two radio frequency signals output by the first step-up transformer T3 and the second step-up transformer T4. The twelfth resistor R12 is a microwave resistor (100Ω / 100W). In addition, a grounded thirteenth capacitor C13 (27pF) is arranged on the line between the twelfth resistor R12 and the first step-up transformer T3, and a grounded fourteenth capacitor C14 (27pF) is arranged on the line between the twelfth resistor R12 and the second step-up transformer T4. The thirteenth capacitor C13 and the fourteenth capacitor C14 have low impedance to high-frequency signals and can shun the harmonics in the high-frequency signals to ground.

[0040] Furthermore, the output unit includes a ninth inductor L9, a fifteenth capacitor C15, and an RF signal output port. One end of the ninth inductor L9 is connected to the output of the magnetic ring power combiner T6 via a line, and the other end is connected to the RF signal output port via a line. The fifteenth capacitor C15, with one end grounded, is connected to the line between the ninth inductor L9 and the RF signal output port via a line. The ninth inductor L9 has a high impedance to high-frequency signals, preventing harmonics from passing through while allowing the fundamental signal to be transmitted without loss. The fifteenth capacitor C15 further filters out residual high-frequency noise that the ninth inductor L9 cannot completely block, thereby filtering out harmonics in the high-frequency RF signal output by the magnetic ring power combiner T6, making the output spectrum cleaner, and preventing high-frequency harmonics from damaging the laser discharge electrodes, thus extending the laser's lifespan.

[0041] In the above technical solution, the step-down transformer reduces voltage by 2:1, and the step-up transformer increases voltage by 1:2.

[0042] Furthermore, the specifications of the components used in the above technical solutions may be set as needed and are not limited to the above limitations.

[0043] Example

[0044] The peak power of the RF signal input at the RF IN terminal is 8W. The peak power of the RF signal is amplified to 30W by the first RF power amplifier Q1. The first-stage amplified RF signal is continuously distributed by the magnetic ring power divider T5, the first step-down transformer T1 and the second step-down transformer T2, and the peak power of the second-stage distributed RF signals at the input terminals of the second RF power amplifier Q2, the third RF power amplifier Q3, the fourth RF power amplifier Q4 and the fifth RF power amplifier Q5 is 7W each. The peak power of the second-stage amplified RF signals output by the second RF power amplifier Q2, the third RF power amplifier Q3, the fourth RF power amplifier Q4 and the fifth RF power amplifier Q5 is 150W each. The second-stage amplified RF signals are combined and boosted by the first step-up transformer T3 and the second step-up transformer T4, and then combined and boosted by the magnetic ring power combiner T6 to form a high-power RF signal with a peak power of 600W. The high-power RF signal is output after filtering out harmonics and high-frequency noise.

[0045] This invention constructs an RF pulse power amplifier circuit through modules such as input amplification, power distribution, power amplification, and boost synthesis. The weak input RF signal is initially amplified by an RF power amplifier, then split into stages by a magnetic ring power divider and a step-down transformer, further amplified by an RF power amplifier, and finally synthesized in stages by a step-up transformer and a magnetic ring power combiner. This achieves multi-stage amplification and synthesis of the RF signal, ultimately outputting a high-power pulse signal through power superposition. This output achieves peak power pulse signals ranging from hundreds of watts to kilowatts, solving the problem of limited output power in existing RF power supplies based on single-tube power amplifier architectures. Simultaneously, a bias voltage is set for each RF power amplifier, and the voltage magnitude is adjusted by a potentiometer to solve problems such as phase mismatch during power synthesis in existing technologies, effectively improving the stability of power synthesis and expanding the application of RF CO2 lasers in high-precision scenarios.

[0046] In this embodiment of the invention, the term "multiple" refers to two or more, unless otherwise explicitly defined. The terms "install," "connect," and "fix" should be interpreted broadly. For example, "connect" can mean a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention based on the specific circumstances.

[0047] In the description of the embodiments of the present invention, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or unit referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention.

[0048] In the description of this specification, the terms "an embodiment," "a preferred embodiment," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0049] The above embodiments are merely illustrative of the technical concept of the present invention and should not be construed as limiting the scope of protection of the present invention. Any modifications made to the technical solutions based on the technical concept proposed in this invention shall fall within the scope of protection of this invention. Technologies not covered in this invention can be implemented using existing technologies.

Claims

1. A radio frequency pulse power supply for a radio frequency carbon dioxide laser, characterized in that: The radio frequency pulse power supply includes: The input unit is used to input radio frequency signals to the first-stage power amplifier unit; The first-stage power amplifier unit receives the radio frequency signal and amplifies its power by 3-6 times, outputting a first-stage amplified radio frequency signal; The first-stage power distribution unit receives the first-stage amplified RF signal and divides it equally into two first-stage distributed RF signal outputs with the same power. The secondary power distribution unit is set in pairs. Each receives one primary distribution RF signal and divides it into two secondary distribution RF signals with the same power output after step-down transformation. The secondary power amplifier unit receives the corresponding secondary distribution RF signal and amplifies the power of the secondary distribution RF signal by 20-30 times, and outputs the secondary amplified RF signal; The power combining unit simultaneously receives four secondary amplified RF signals and combines them into a high-power RF signal output after boosting and transformer conversion. The output unit receives high-power radio frequency signals, filters out harmonics and high-frequency noise in the high-power radio frequency signals, and then outputs them.

2. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 1, characterized in that: The input unit includes a radio frequency signal input terminal (RF IN) for inputting radio frequency signals, a first capacitor (C1) and a first inductor (L1) for transmitting radio frequency signals, and a second capacitor (C2) for filtering radio frequency signals. The radio frequency signal input terminal (RF IN) is sequentially connected to the first capacitor (C1) and the first inductor (L1) through a line. One end of the second capacitor (C2) is grounded, and the other end is bypassed and connected to the line between the first capacitor (C1) and the first inductor (L1). The radio frequency signal input from the radio frequency signal input terminal (RF IN) is transmitted through the first capacitor (C1), filtered by the second capacitor (C2), and then transmitted to the first-stage power amplifier unit through the first inductor (L1).

3. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 1, characterized in that: The first-stage power amplification unit includes a first-stage radio frequency power amplification module and a first-stage pulse width modulation module. The first-stage pulse width modulation module, connected to the line between the first-stage radio frequency power amplification module and the input unit, is used to turn the first-stage radio frequency power amplification module on and off. The first-stage radio frequency power amplification module includes a first radio frequency power amplifier (Q1) capable of amplifying the radio frequency signal by several times, and a fourth capacitor (C4) for transmitting the first-stage amplified radio frequency signal. The gate of the first radio frequency power amplifier (Q1) is used to connect to the input unit to receive the radio frequency signal, the source is grounded, and the drain is coupled to output the first-stage amplified radio frequency signal through the fourth capacitor (C4). The first-stage pulse width modulation module includes a first pulse width modulator (PWM1) for adjusting the gate voltage of the first radio frequency power amplifier (Q1), a third resistor (R3) as a potentiometer, and a second resistor (R2) for transmitting the gate voltage. The first pulse width modulator (PWM1) is connected to one end of the third resistor (R3), and the other end of the third resistor (R3) is grounded. One end of the second resistor (R2) is connected to the third resistor (R3), and the other end is connected to the line between the gate of the first radio frequency power amplifier (Q1) and the input unit.

4. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 3, characterized in that: The first-stage pulse width modulation module is equipped with a signal feedback unit and a first power supply unit. The two ends of the signal feedback unit are respectively connected to the gate and drain of the first RF power amplifier (Q1), and the first power supply unit is connected to the drain of the first RF power amplifier (Q1). The signal feedback unit includes a first resistor (R1) and a third capacitor (C3). One end of the first resistor (R1) is connected to the line between the gate of the first RF power amplifier (Q1) and the input unit, with the connection point of the first resistor (R1) located in front of the connection point of the first-stage pulse width modulation module. The other end is connected to one end of the third capacitor (C3). The other end of (C3) is connected to the line between the drain of the first RF power amplifier (Q1) and the fourth capacitor (C4); the first power supply unit includes a DC power supply for the first RF power amplifier (Q1) and a second inductor (L2) for filtering the DC power output of the DC power supply. The DC power supply is connected to the drain of the first RF power amplifier (Q1) through the second inductor (L2); and a sixteenth capacitor (C16) is configured on the first power supply unit to perform voltage regulation and filtering functions. One end of the sixteenth capacitor (C16) is grounded and the other end is connected to the line between the second inductor (L2) and the drain of the first RF power amplifier (Q1).

5. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 1, characterized in that: The first-level power distribution unit includes a magnetic ring power divider (T5) and a thirteenth resistor (13) connected in parallel. The magnetic ring power divider (T5) is connected to the first-level power amplification unit through a line to receive the first-level amplified radio frequency signal and divide it into two first-level distribution radio frequency signals. The thirteenth resistor (13) is used to balance the two first-level distribution radio frequency signals. The two ends of the thirteenth resistor (13) located on the output side of the first-level power distribution unit are respectively connected to the corresponding second-level power distribution units.

6. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 1, characterized in that: Each secondary power distribution unit includes a step-down transformer and two sets of capacitors of different specifications that match the step-down transformer. The step-down transformer and the two sets of capacitors are connected in parallel. One end of the step-down transformer, located on the input side of the secondary power distribution unit, is connected to the primary power distribution unit to receive the corresponding primary distribution RF signal and split it into two outputs. The other end is grounded. The two sets of capacitors connected in parallel are used to cooperate with the step-down transformer to split the primary distribution RF signal into two secondary distribution RF signals of equal power. The two ends of the capacitors located on the output side of the secondary power distribution unit are connected to the corresponding two sets of secondary power amplifier units through lines to output the secondary distribution RF signal.

7. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 1, characterized in that: The secondary power amplification unit includes an RF power amplification module and a pulse width modulation module. The pulse width modulation module, connected to the line between the RF power amplification module and the secondary power distribution unit, is used to turn the RF power amplification module on and off. The RF power amplification module includes an RF power amplifier capable of amplifying the secondary distribution RF signal by several times, a copper inductor for transmitting the secondary distribution RF signal, and a capacitor for filtering out noise in the secondary amplified RF signal. The gate of the RF power amplifier is connected to the output terminal of the secondary power distribution unit through the copper inductor to receive the secondary distribution RF signal. The source is grounded, and the drain is connected to a capacitor with one end grounded through a line to output the secondary amplified RF signal with noise filtered out by the capacitor. The pulse width modulation module includes a pulse width modulator for adjusting the gate voltage of the RF power amplifier, a resistor as a potentiometer, and a resistor for transmitting the gate voltage. The pulse width modulator is connected to one end of the resistor as a potentiometer, and the other end of the resistor as a potentiometer is grounded. One end of the resistor for transmitting the gate voltage is connected to the resistor as a potentiometer, and the other end is connected to the line between the gate of the RF power amplifier and the copper inductor.

8. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 7, characterized in that: The RF power amplifier module is matched with a power supply unit connected to the drain of the corresponding RF power amplifier. The power supply unit includes a DC power supply for powering the RF power amplifier and an inductor for filtering the DC power output. The DC power supply is connected to the drain of the RF power amplifier through the inductor. The power supply unit is also equipped with a capacitor that performs voltage regulation and filtering. One end of the capacitor is grounded and the other end is connected to the line between the corresponding inductor and the DC power supply.

9. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 1, characterized in that: The power combining unit includes a pair of boost combining modules and a magnetic ring power combiner (T6). The input terminals of each boost combining module are connected to two corresponding secondary power amplifier units via lines. The two boost combining modules are connected to the magnetic ring power combiner (T6) via lines. The magnetic ring power combiner (T6) is connected to the output unit via lines. A twelfth resistor (R12) is arranged between the boost combining module and the magnetic ring power combiner (T6). The twelfth resistor (R12) connected in parallel with the magnetic ring power combiner (T6) is used to balance the two radio frequency signals output by the two boost combining modules.

10. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 9, characterized in that: The step-up synthesis module includes a step-up transformer. The two ends of the input side of the step-up transformer are respectively connected to the two corresponding two-stage power amplifier units through lines. One end of the output side of the step-up transformer is grounded and the other end is connected to one input terminal of the magnetic ring power combiner (T6) through a line. A grounding capacitor is arranged on the line between the step-up transformer and the twelfth resistor (R12). The grounding capacitor is used to match the step-up transformer and shunt the harmonics in the radio frequency signal output by the step-up transformer to ground.

11. The radio frequency pulse power supply for a radio frequency carbon dioxide laser according to claim 1, characterized in that: The output unit includes a ninth inductor (L9), a fifteenth capacitor (C15), and a radio frequency signal output terminal (Port). One end of the ninth inductor (L9) is connected to the output terminal of the magnetic ring power combiner (T6) through a line, and the other end is connected to the radio frequency signal output terminal (Port) through a line. The fifteenth capacitor (C15), with one end grounded, is connected to the line between the ninth inductor (L9) and the radio frequency signal output terminal (Port) through a line.

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