An ultraviolet broadband high numerical aperture large field of view total reflection microscope objective
By optimizing the four-mirror total reflection structure and aspherical mirror design, the shortcomings of ultraviolet-band microscope objectives in terms of high numerical aperture and large field of view, low obstruction rate and compact structure have been solved, realizing a high-efficiency imaging and easy-to-manufacture ultraviolet broadband microscope objective.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SUZHOU UNIV
- Filing Date
- 2026-04-16
- Publication Date
- 2026-06-09
AI Technical Summary
Existing technologies make it difficult to simultaneously achieve high numerical aperture, large field of view, low obstruction rate, and compact structure in total internal reflection microscope objectives in the ultraviolet band.
The four-mirror total internal reflection structure is adopted. The first objective lens consists of a convex mirror and a concave mirror to form the intermediate image plane. The second objective lens consists of two concave mirrors to image the intermediate image plane onto the object plane. By optimizing the focal length ratio and aperture ratio of the mirrors and combining them with aspherical mirrors, a high numerical aperture and a large field of view are achieved, and the obstruction coefficient and axial distance are optimized.
It achieves the unity of high numerical aperture and large field of view, reduces the difficulty of processing and the complexity of assembly and adjustment, ensures imaging quality, and covers a wide ultraviolet spectrum.
Smart Images
Figure CN122172434A_ABST
Abstract
Claims
1. A wide-band ultraviolet high numerical aperture large field-of-view total internal reflection microscope objective, characterized in that, Along the optical axis from the image side to the object side, the following are included in sequence: The first objective lens consists of a first reflecting mirror and a second reflecting mirror arranged sequentially from the image side to the object side along the optical axis OA. It is used to receive parallel light and form an intermediate image plane. The second objective lens consists of a third and a fourth reflecting mirror arranged sequentially from the image side to the object side along the optical axis OA, and is used to image the intermediate image plane onto the object plane. Wherein, the first reflecting mirror is a convex mirror with negative optical power; the second reflecting mirror is a concave mirror with positive optical power; the third reflecting mirror is a concave mirror with positive optical power; and the fourth reflecting mirror is a concave mirror with positive optical power. Parallel light passes sequentially through the second central through-hole of the second reflector and then enters the first reflector. It is reflected by the first reflector back to the second reflector, and then reflected again by the second reflector to form an intermediate image plane. Subsequently, the light passes sequentially through the first central through-hole of the first reflector and the fourth central through-hole of the fourth reflector and then enters the third reflector. It is reflected by the third reflector back to the fourth reflector, and then reflected again by the fourth reflector, before passing through the third central through-hole of the third reflector to reach the object plane.
2. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to claim 1, characterized in that: The microscope objective has a focal length of f, the first objective has a focal length of f_front, and the second objective has a focal length of f_back. f_front and f_back satisfy the following relationship: 0.5 < |f_front / f| < 3, and 1 < |fback / f| < 4.
3. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to claim 1 or 2, characterized in that, The magnification β between the intermediate image plane and the object plane satisfies: 0.4 < |β| < 0.
8.
4. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to any one of claims 1-3, characterized in that, The focal length of the first reflector is f_mirror1, the focal length of the second reflector is f_mirror2, the focal length of the third reflector is f_mirror3, and the focal length of the fourth reflector is f_mirror4. f_mirror1, f_mirror2, and f_mirror3 satisfy the following relationship: 2 < |fmirror2 / fmirror1| < 5; 2<|fmirror3 / fmirror4|<7; 3.5 < |fmirror3 / fmirror1| < 8; 0.5 < |fmirror4 / fmirror1| < 3.
5. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to any one of claims 1-4, characterized in that, The first reflector has a mirror diameter of D_mirror1, the second reflector has a mirror diameter of D_mirror2, the third reflector has a mirror diameter of D_mirror3, and the fourth reflector has a mirror diameter of D_mirror4. D_mirror1, D_mirror2, and D_mirror3 satisfy the following relationship: 5 <Dmirror2 / Dmirror1< 12; 0.55 <Dmirror3 / Dmirror4< 1; 1.2 <Dmirror3 / Dmirror1< 5; 2.5 <Dmirror4 / Dmirror1< 6。 6. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to any one of claims 1-5, characterized in that, The occlusion coefficient of the central through-hole of the first reflector is 0.05-0.2, the occlusion coefficient of the central through-hole of the second reflector is 0.08-0.35, the occlusion coefficient of the central through-hole of the third reflector is 0.15-0.4, and the occlusion coefficient of the central through-hole of the fourth reflector is 0.15-0.35; the ratio of the numerical aperture NA of the object plane to the maximum occlusion rate is greater than 2.
5.
7. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to any one of claims 1-6, characterized in that, The axial distance from the first reflector to the second reflector is Z_M1-M2, and the axial distance from the intermediate image plane to the second reflector is Z_M2-IM'. Z_M1-M2 and Z_M2-IM' satisfy the following relationship: 0.9 < Z_M1-M2 / Z_M2-IM' < 1.1; and the axial distance from the intermediate image plane to the first reflector is 0mm-5mm.
8. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to any one of claims 1-7, characterized in that, The axial distance between the third reflecting mirror and the object plane satisfies: ； Where ZM3-IM represents the axial distance between the third mirror and the object-side field of view; DM3 represents the mirror diameter of the third mirror; and NA is the numerical aperture of the entire objective lens.
9. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to any one of claims 1-8, characterized in that, The microscope objective operates in the wavelength range of 200nm-13um, has a numerical aperture (NA) ≥0.9, a field of view diameter ≥1mm, and a full-field RMS wavefront error of less than 0.06λ at a dominant wavelength of 260nm.
10. The ultraviolet broadband high numerical aperture large field-of-view total internal reflection microscope objective according to claim 1, characterized in that, The reflecting surfaces of the first, second, third, and fourth reflectors are all aspherical.