Control method of crown block handling system and related device

Abstract

The application provides a control method of a crane transportation system and related devices, applied to a control terminal, the control terminal being in communication connection with the crane transportation system, the crane transportation system comprising a track, a crane and a process machine, the track comprising a main track, at least one auxiliary track arranged in parallel with the main track, and a divergent track connecting between the main track and the auxiliary track, the main track being arranged above the process machine, and at least one side of the auxiliary track being provided with a temporary storage position; the method comprises: in response to a transportation request for a target wafer box, generating a transportation task; and in response to the transportation task being a cross-track transportation task, controlling the target crane to switch driving between the main track and the auxiliary track via the divergent track to execute the cross-track transportation task. In this way, the congestion problem on the same track can be effectively solved, and the overall transportation efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of material transportation technology, specifically to a control method and related devices for an overhead crane handling system. Background Technology

[0002] In cleanrooms for semiconductor manufacturing, overhead hoist transfer (OHT) machines are typically used to move front-opening unified pods (FOUPs) between process stations. After completing a process at one station, the FOUP is moved by the hoist to the next process station. However, the next process station may not have available FOUP ports at that moment, requiring temporary storage space. Currently, overhead buffers (OHBs) are typically built next to the overhead rail by adding lifting points and racks. This approach does not affect the footprint of the process stations and provides temporary storage space for FOUPs at a relatively low cost, ensuring buffer space before and after each process station for temporary FOUP storage.

[0003] However, some problems still exist in the existing technology. There is a process machine under a track and a temporary storage position next to it. When a crane picks up a wafer box and wants to put it into the temporary storage position, the crane will stop in front of the temporary storage position and perform the unloading action, which causes the crane behind to slow down or stop and wait for the crane in front to leave before it can continue to move forward, which greatly reduces the overall efficiency of the handling system. Summary of the Invention

[0004] This application provides a control method and related apparatus for an overhead crane transport system, aiming to reduce the waiting time caused by the overhead crane picking up and placing wafer boxes at the temporary storage position in the prior art, and improve the overall transport efficiency.

[0005] In a first aspect, embodiments of this application provide a control method for an overhead crane transport system, applied to a control terminal. The control terminal is communicatively connected to the overhead crane transport system. The overhead crane transport system includes a track, an overhead crane, and a process machine. The track includes a main track, at least one auxiliary track arranged parallel to the main track, and a branch track connecting the main track and the auxiliary track. The main track is erected above the process machine, and at least one side of the auxiliary track is provided with a temporary storage position. The method includes: In response to a handling request for a target wafer cassette, a handling task is generated, which includes a pick-up location and a drop-off location; In response to the fact that the transport task is an inter-track transport task, the control target crane switches between the main track and the auxiliary track via the branch track to perform the inter-track transport task. The inter-track transport task refers to a transport task in which the picking position is a temporary storage position or the putting position is a temporary storage position.

[0006] Secondly, embodiments of this application provide a control device for an overhead crane transport system, applied to a control terminal. The control terminal is communicatively connected to the overhead crane transport system. The overhead crane transport system includes a track, an overhead crane, and a process machine. The track includes a main track, at least one auxiliary track arranged parallel to the main track, and a branch track connecting the main track and the auxiliary track. The main track is erected above the process machine, and at least one side of the auxiliary track is provided with a temporary storage position. The device includes: The first response unit is used to generate a handling task in response to a handling request for a target wafer cassette, the handling task including a pickup location and a drop location; The second response unit is used to respond to the fact that the handling task is an inter-track handling task, and to control the target crane to switch between the main track and the auxiliary track via the branch track to perform the inter-track handling task. The inter-track handling task refers to a handling task in which the picking position is a temporary storage position or the putting position is a temporary storage position.

[0007] Thirdly, embodiments of this application provide an electronic device including a processor, a memory, and one or more programs, the one or more programs being stored in the memory and configured to be executed by the processor, the programs including instructions for performing steps in the method as described in the first aspect of embodiments of this application.

[0008] Fourthly, embodiments of this application provide a computer-readable storage medium having a computer program or instructions stored thereon, wherein the computer program or instructions, when executed by a processor, implement the steps of the method described in the first aspect of embodiments of this application.

[0009] As can be seen, in this embodiment, a novel overhead crane handling system is constructed by connecting the main track and the auxiliary track arranged parallel to the main track via branch tracks, and setting up temporary storage positions on at least one side of the auxiliary track. Based on this overhead crane handling system, the control terminal generates handling tasks containing pick-up / placement locations through handling requests, thereby identifying cross-track handling needs and controlling the overhead crane to switch between the main and auxiliary tracks via the branch tracks to execute the handling tasks. This effectively solves the congestion problem on the same track and improves overall handling efficiency. Attached Figure Description

[0010] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0011] Figure 1 This is a schematic diagram of the temporary storage layout of a prior art solution provided in an embodiment of this application; Figure 2 This is a structural block diagram of a control system provided in an embodiment of this application; Figure 3 This is a schematic diagram of a track architecture provided in an embodiment of this application; Figure 4 This is a schematic diagram of another track architecture provided in an embodiment of this application; Figure 5 This is a schematic diagram of another track architecture provided in the embodiments of this application; Figure 6 This is a flowchart illustrating a control method for an overhead crane transport system provided in an embodiment of this application; Figure 7 This is a schematic diagram of a temporary storage bit number provided in an embodiment of this application; Figure 8 This is a structural block diagram of a control device for an overhead crane transport system provided in an embodiment of this application; Figure 9 This is a structural block diagram of a control device for another overhead crane transport system provided in an embodiment of this application; Figure 10 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0012] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0013] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0014] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0015] In existing technologies, such as Figure 1 As shown, temporary storage positions are usually located on the left and right sides of the track. When the overhead crane in front needs to pick up or put down the wafer cassette in the temporary storage position, the overhead crane behind must slow down or stop, which increases the handling time of the overhead crane behind and affects the overall handling efficiency.

[0016] To address the aforementioned problems, this application provides a control method and related apparatus for an overhead crane transport system.

[0017] Please see Figure 2 , Figure 2 This is a structural block diagram of a control system provided in an embodiment of this application. For example... Figure 2 As shown, the control system 20 includes a control terminal 21 and a crane transport system 22. The control terminal 21 is communicatively connected to the crane transport system 22 to enable data interaction between the two systems. The crane transport system 22 includes a track 221, a crane 222, and a process platform 223.

[0018] In one embodiment, please refer to Figure 3 , Figure 3 This is a schematic diagram of a track architecture provided in an embodiment of this application. For example... Figure 3 As shown, track 221 includes a main track 30, an auxiliary track 31, and a branch track 32. The auxiliary track 31 is arranged parallel to the main track 30. Temporary storage positions 33 are provided on both sides of the auxiliary track 31. A branch track 32 connects the main track 30 and the auxiliary track 31.

[0019] In another embodiment, please refer to Figure 4 , Figure 4 This is a schematic diagram of another track architecture provided in an embodiment of this application. For example... Figure 4 As shown, track 221 includes a main track 30, an auxiliary track 31 and a branch track 32. The auxiliary track 31 is arranged parallel to the main track 30. A temporary storage position 33 is provided on one side of the auxiliary track 31. Two branch tracks 32 connect the main track 30 and the auxiliary track 31.

[0020] The number of temporary storage locations depends on the length of the track and the location that the overhead crane can access, and is designed based on the specific conditions and needs of the workshop.

[0021] Furthermore, such as Figure 5 As shown, a temporary storage position 33 can also be set on one side of the main track 30, depending on the number of temporary storage units required by the workshop for the wafer cassettes in the process. However, the priority of the temporary storage position 33 on the main track 30 should be set to the lowest to avoid obstructing the handling of other overhead cranes during retrieval.

[0022] In practical applications, the layout of the track structure can be designed differently based on the specific conditions of the workshop, and no single limitation is made here.

[0023] Although not shown in the above example diagrams, it can be understood that the main track is erected above the process equipment to support the overhead crane in performing wafer cassette loading and unloading operations on the process equipment, and the installation position of the auxiliary track needs to avoid the higher process equipment to ensure the safe passage of the overhead crane.

[0024] The following describes a control method for an overhead crane transport system provided by an embodiment of this application.

[0025] Please see Figure 6 , Figure 6 This is a flowchart illustrating a control method for an overhead crane transport system provided in an embodiment of this application. The method is applied to, for example... Figure 2 The control terminal 21 shown is as follows: Figure 6 As shown, the method includes: S601 generates a handling task in response to a handling request for a target wafer cassette.

[0026] The handling request is used to indicate that there is a handling requirement for the target wafer box. The handling task includes a pick-up location and a place location. The pick-up location refers to the current location of the target wafer box, which requires an overhead crane to arrive empty and perform a wafer box grabbing action. The place location refers to the target location of the target wafer box, which requires an overhead crane to move the target wafer box to the location and perform a wafer box placement action.

[0027] Each process station is equipped with a task queue to manage the order in which wafer cassettes need to perform process tasks on that station. When a wafer cassette completes its process task on the first process station, its marker is removed from the head of the first task queue corresponding to that first process station. Simultaneously, the target process station for the wafer cassette's next process task is obtained, and the wafer cassette's marker is added to the end of the second task queue corresponding to the target process station. When the wafer cassette's marker becomes the head of the second task queue, it proceeds to the target process station to perform the process task. Based on this process management, the control terminal can obtain the task queue through communication with the process stations and comprehensively determine the handling request by combining the location information of the corresponding wafer cassettes.

[0028] S602, in response to the fact that the transport task is an inter-track transport task, the target crane is controlled to switch between the main track and the auxiliary track via the branch track to perform the inter-track transport task.

[0029] The cross-track transport task refers to a type of task where the overhead crane needs to switch between the main and auxiliary tracks to complete the transport. Specifically, it refers to a transport task where the picking location or the placing location is a temporary storage location. For example, when the picking location is a temporary storage location, since there is no actual business need to transport the wafer from one temporary storage location to another, the placing location is the target process machine corresponding to the next process task of the target wafer box. In this case, the overhead crane needs to go to the auxiliary track to pick up the target wafer box from the temporary storage location, then switch to the main track via the branch track, and transport it to the target process machine via the main track to place the target wafer box, thus completing the cross-track transport task. Additionally, when the delivery location is a temporary storage location, similar to the example above, since there is no actual business need to move the wafer from the temporary storage location to the temporary storage location, the retrieval location is the first process machine corresponding to the current process task. The corresponding actual business situation is that the target wafer box has completed the process task of the current station and needs to be temporarily stored. At this time, the overhead crane needs to go to the main track to grab the target wafer box on the first process machine, and then switch to the auxiliary track via the branch track to travel to the temporary storage location and place the wafer box, thus completing the cross-track transport task.

[0030] As can be seen, in this embodiment, a novel overhead crane handling system is constructed by connecting the main track and the auxiliary track arranged parallel to the main track via branch tracks, and setting up temporary storage positions on at least one side of the auxiliary track. Based on this overhead crane handling system, the control terminal generates handling tasks containing pick-up / placement locations through handling requests, thereby identifying cross-track handling needs and controlling the overhead crane to switch between the main and auxiliary tracks via the branch tracks to execute the handling tasks. This effectively solves the congestion problem on the same track and improves overall handling efficiency.

[0031] In one possible example, generating a transport task in response to a transport request for a target wafer cassette includes: generating a first transport task in response to a first transport request for a target wafer cassette; the first transport request is used to indicate that the target wafer cassette is at the first temporary storage location and at the head of the task queue of the target process equipment, and the first transport task refers to a transport task with the picking location at the first temporary storage location and the placing location at the target process equipment.

[0032] Specifically, when the target wafer cassette is in the first temporary storage position and at the head of the task queue of the target process equipment, a first transport request is triggered, indicating that there is a need to transport the target wafer cassette from the first temporary storage position to the target process equipment. In response to the first transport request, the control terminal generates a first transport task containing a first transport route, where the pick-up location of the first transport route is the first temporary storage position, and the placement location is the target process equipment.

[0033] Furthermore, the first transport task is a cross-track transport task. The control terminal will control the target crane to travel to the first temporary storage position and perform a wafer box grabbing operation. Then, the target wafer box will be transported along the first transport route, passing through the branch track and switching from the auxiliary track to the main track. Finally, it will travel along the main track to the target process equipment and perform a wafer box placement operation to complete the first transport task and realize the wafer box transport from the first temporary storage position to the target process equipment.

[0034] As can be seen, in this example, the control terminal generates a corresponding first transport task by responding to the first transport request from the first temporary storage position to the target process machine, and then controls the target crane to switch between the main and auxiliary tracks via the branch track to execute the above-mentioned first transport task. This avoids the waiting problem between the crane performing the temporary storage position pick-up and place task and the crane performing the process machine pick-up and place task, thereby improving the overall transport efficiency.

[0035] In one possible example, generating a transport task in response to a transport request for a target wafer cassette includes: generating a second transport task in response to a second transport request for the target wafer cassette; the second transport request is used to indicate that the target wafer cassette has completed a process task at a first process station and is at the head of the task queue of the target process station, and the second transport task refers to a transport task with the pickup location at the first process station and the placement location at the target process station.

[0036] Specifically, when a target wafer cassette completes its current process task at the first process station, the system obtains the target process station corresponding to the next process task for the target wafer cassette and adds the target wafer cassette's marker to the end of the task queue corresponding to the target process station. If the target wafer cassette's marker is at the beginning of the target process station's task queue (meaning there are no other wafer cassette markers in the target process station's task queue), it indicates that the target wafer cassette can directly proceed to the target process station for its next process task, triggering a second transport request. This means the target wafer cassette needs to be transported from the first process station to the target process station. In response to this second transport request, the control terminal generates a second transport task containing a second transport route. The pick-up location for the second transport route is the first process station, and the placement location is the target process station.

[0037] Furthermore, the second transport task is not an inter-track transport task. The control terminal will control the target crane to travel to the first process station and perform a wafer box grabbing operation. Then, according to the second transport route, the target wafer box will be transported along the main track to the target process station and a wafer box placement operation will be performed to complete the above-mentioned second transport task and realize the wafer box transport from the first process station to the target process station.

[0038] As can be seen, in this example, the control terminal generates a corresponding second transport task by responding to the second transport request from the first process station to the target process station, and then controls the target crane to travel along the main track to perform the second transport task. This avoids the waiting problem between the crane performing the temporary storage position retrieval task and the crane performing the process station retrieval task, thus improving the overall transport efficiency.

[0039] In one possible example, generating a transport task in response to a transport request for a target wafer cassette includes: allocating a target temporary storage location for the target wafer cassette in response to a third transport request for the target wafer cassette, and generating a third transport task based on the target temporary storage location; the third transport request is used to indicate that the target wafer cassette has completed a process task at a first process station and is not at the head of the task queue of the target process station, and the third transport task refers to a transport task with the picking location at the first process station and the placing location at the target temporary storage location.

[0040] When a target wafer cassette completes its current process task at the first process station, the system obtains the target process station corresponding to the next process task for the target wafer cassette and adds the target wafer cassette's marker to the end of the task queue corresponding to the target process station. If the target wafer cassette's marker is not at the beginning of the task queue of the target process station, it indicates that the target wafer cassette cannot proceed to the target process station for the next process task and needs to be temporarily stored at a temporary storage location. In other words, there is a need to move the target wafer cassette from the first process station to the temporary storage location. In response to the aforementioned third transport request, the control terminal allocates a target temporary storage location for the target wafer cassette and generates a third transport task containing a third transport route based on the target temporary storage location. The pickup location of the third transport route is the first process station, and the placement location is the target temporary storage location.

[0041] Furthermore, the third transport task is a cross-track transport task. The control terminal will control the target crane to travel to the first process station and perform a wafer box grabbing operation. Then, according to the third transport route, the target wafer box is transported through the branch track and switched from the main track to the auxiliary track. Finally, it travels along the auxiliary track to the target temporary storage position and performs a wafer box placement operation, thus completing the above-mentioned third transport task and realizing the transport of wafer boxes from the first process station to the target temporary storage position.

[0042] As can be seen, in this example, the control terminal, in response to the third transport request from the first process equipment to the temporary storage position, allocates a target temporary storage position to the target wafer cassette and generates a corresponding third transport task. Then, it controls the target crane to switch between the main and auxiliary tracks via branch tracks to execute the aforementioned third transport task. This avoids the waiting problem between the crane performing the temporary storage position pick-and-place task and the crane performing the process equipment pick-and-place task, thereby improving the overall transport efficiency.

[0043] In one possible example, allocating a target temporary storage location to the target wafer cassette includes: determining the main track corresponding to the first process equipment as the target main track; determining a target auxiliary track from at least one auxiliary track connected to the target main track; and determining a target temporary storage location from the temporary storage locations of the target auxiliary track.

[0044] Upon responding to the third handling request, the control terminal determines that the target wafer cassette needs to be moved from the first process station to a temporary storage location. It then selects a target temporary storage location from all available temporary storage locations and allocates it to the target wafer cassette to determine the specific placement position. Specifically, the target main track is first selected in the track system, then a target auxiliary track is selected from the various auxiliary tracks connected to the target main track, and finally a temporary storage location is chosen on that target auxiliary track.

[0045] In this example, identifying the main track corresponding to the pickup location, i.e., the first process machine, as the target main track can shorten the path length of this handling task and improve handling efficiency. Furthermore, a target auxiliary track is determined from the auxiliary tracks connected to this target main track. For example, the auxiliary track closest to the port of the first process machine can be selected as the target auxiliary track, further shortening the travel distance of the overhead crane from the first process machine to the target auxiliary track, reducing handling time, and improving the efficiency of a single handling task.

[0046] As can be seen, in this example, after responding to the third handling request, the control terminal determines the main track corresponding to the first process machine as the target main track, and then sequentially filters out the target auxiliary track and the target temporary storage position on the target auxiliary track, which can shorten the path length of this handling task and improve handling efficiency.

[0047] In one possible example, allocating a target temporary storage bit to the target wafer cassette includes: determining the main track corresponding to the target process equipment as the target main track; determining a target auxiliary track from at least one auxiliary track connected to the target main track; and determining a target temporary storage bit from the temporary storage bits of the target auxiliary track.

[0048] In this example, the main track corresponding to the process equipment for the next process task of the target wafer cassette is designated as the target main track. This shortens the path length for the next transport task of the target wafer cassette, improving the overall workflow efficiency. Furthermore, a target auxiliary track is determined from the auxiliary tracks connected to the target main track. For example, the auxiliary track closest to the port of the target process equipment can be selected as the target auxiliary track. This further shortens the travel distance of the overhead crane from the target temporary storage position on the target auxiliary track to the target process equipment in the next transport task, reducing transport time and improving the overall workflow efficiency.

[0049] As can be seen in this example, after responding to the third handling request, the control terminal determines the main track corresponding to the target process machine as the target main track, and then sequentially selects the target auxiliary track and the target temporary storage position on the target auxiliary track. This can shorten the path length of the next handling task for the target wafer cassette and improve the overall process efficiency.

[0050] In one possible example, determining the target temporary storage position from the temporary storage positions of the target auxiliary track includes: obtaining a temporary storage position allocation queue of the target auxiliary track, the temporary storage position allocation queue including multiple temporary storage position groups arranged in ascending order of group number, each temporary storage position group including multiple temporary storage positions arranged in ascending order of position number with fixed intervals, the group number referring to the position number of the first temporary storage position in the corresponding temporary storage position group; and determining the first temporary storage position in the temporary storage position allocation queue that is not occupied as the target temporary storage position.

[0051] Once the temporary storage positions on one side of the auxiliary track are set up, a temporary storage position allocation queue for the auxiliary track can be set based on the number of temporary storage positions, so that the crane can pick up and place wafer boxes on the auxiliary track in the order specified by the temporary storage position allocation queue.

[0052] Specifically, all temporary storage positions on the auxiliary track are sequentially numbered along the extension direction of the auxiliary track, such as... Figure 7 As shown, there are 9 temporary storage positions on the right side of the auxiliary track, numbered sequentially from top to bottom, for example, the top one is 1 and the bottom one is 9. In other embodiments, they can also be numbered sequentially from bottom to top, for example, the bottom one is 1 and the top one is 9; this is not a unique limitation.

[0053] Next, the aforementioned temporary storage bits are divided into multiple temporary storage bit groups according to fixed intervals, and the temporary storage bits in each group are arranged in ascending order of position number. Taking a position interval of 2 as an example, the above 9 temporary storage bits can be divided into 3 temporary storage bit groups, namely {1, 4, 7}, {2, 5, 8}, and {3, 6, 9}. The group number of each temporary storage bit group is the position number of the first temporary storage bit in the group. For example, the group number of {1, 4, 7} is 1, the group number of {2, 5, 8} is 2, and the group number of {3, 6, 9} is 3.

[0054] Finally, the temporary storage groups are arranged in ascending order of their group numbers to obtain the temporary storage allocation queue, namely {1, 4, 7, 2, 5, 8, 3, 6, 9}. When determining the target temporary storage location, the control terminal identifies the first unoccupied temporary storage location in the allocation queue as the target temporary storage location. For example, if temporary storage location 1 is occupied (meaning another wafer cell has been placed there), and temporary storage location 4 is unoccupied, then temporary storage location 4 is identified as the target temporary storage location.

[0055] As can be seen, in this example, the hierarchical allocation method of the temporary storage allocation queue realizes the automated allocation of temporary storage positions, effectively avoiding the congestion problem when multiple cranes are simultaneously performing pick-up and drop operations on the auxiliary track, ensuring smooth passage and safe operation of the auxiliary track, improving the overall efficiency of wafer handling, and being compatible with track layouts with different numbers of temporary storage positions, thus enhancing the universality of the solution.

[0056] For examples consistent with the above embodiments, please refer to... Figure 8 , Figure 8 This is a structural block diagram of a control device for an overhead crane transport system provided in an embodiment of this application, as shown below. Figure 8As shown, the control device 80 of the overhead crane handling system includes: a first response unit 801, which generates a handling task in response to a handling request for a target wafer cassette, the handling task including a pickup position and a drop position; and a second response unit 802, which controls the target overhead crane to switch between the main track and the auxiliary track via the branch track to execute the cross-track handling task in response to the handling task being a cross-track handling task, the cross-track handling task referring to a handling task where the pickup position is a temporary storage position or the drop position is a temporary storage position.

[0057] In one possible example, regarding the generation of a transport task in response to a transport request for a target wafer cassette, the first response unit 801 is specifically configured to: generate a first transport task in response to a first transport request for a target wafer cassette; the first transport request is used to characterize the target wafer cassette as being at the first temporary storage location and at the head of the task queue of the target process equipment, and the first transport task refers to a transport task with the pickup location at the first temporary storage location and the placement location at the target process equipment.

[0058] In one possible example, regarding the generation of a transport task in response to a transport request for a target wafer cassette, the first response unit 801 is specifically configured to: generate a second transport task in response to a second transport request for a target wafer cassette; the second transport request is used to characterize that the target wafer cassette has completed a process task at a first process station and is at the head of the task queue of the target process station, and the second transport task refers to a transport task with the pickup location at the first process station and the placement location at the target process station.

[0059] In one possible example, regarding the generation of a transport task in response to a transport request for a target wafer cassette, the first response unit 801 is specifically configured to: allocate a target temporary storage location for the target wafer cassette in response to a third transport request for the target wafer cassette, and generate a third transport task based on the target temporary storage location; the third transport request is used to indicate that the target wafer cassette has completed a process task at the first process equipment and is not at the head of the task queue of the target process equipment, and the third transport task refers to a transport task with the picking location at the first process equipment and the placing location at the target temporary storage location.

[0060] In one possible example, in allocating a target temporary storage bit to the target wafer cassette, the first response unit 801 is specifically configured to: determine that the main track corresponding to the first process station is the target main track; determine a target auxiliary track from at least one auxiliary track connected to the target main track; and determine a target temporary storage bit from the temporary storage bits of the target auxiliary track.

[0061] In one possible example, in allocating a target temporary storage bit to the target wafer cassette, the first response unit 801 is specifically configured to: determine that the main track corresponding to the target process equipment is a target main track; determine a target auxiliary track from at least one auxiliary track connected to the target main track; and determine a target temporary storage bit from the temporary storage bits of the target auxiliary track.

[0062] In one possible example, regarding the determination of the target temporary storage position from the temporary storage positions of the target auxiliary track, the first response unit 801 is specifically configured to: obtain the temporary storage position allocation queue of the target auxiliary track, the temporary storage position allocation queue including multiple temporary storage position groups arranged in ascending order of group number, each temporary storage position group including multiple temporary storage positions arranged in ascending order of position number with fixed position intervals, the group number referring to the position number of the first temporary storage position in the corresponding temporary storage position group; and determine the first temporary storage position in the temporary storage position allocation queue that is not occupied as the target temporary storage position.

[0063] It is understood that since the method embodiments and the device embodiments are different presentations of the same technical concept, the content of the method embodiment section in this application should be adapted to the device embodiment section in a synchronous manner, and will not be repeated here.

[0064] When using integrated units, such as Figure 9 As shown, Figure 9 This is a structural block diagram of a control device for another overhead crane transport system provided in an embodiment of this application. Figure 9 In this document, the control device 80 of the overhead crane transport system includes a processing module 82 and a communication module 81. The processing module 82 controls and manages the actions of the control device of the overhead crane transport system, for example, executing the steps of the first response unit 801 and the second response unit 802, and / or performing other processes of the technology described herein. The communication module 81 supports interaction between the control device of the overhead crane transport system and other devices. Figure 9 As shown, the control device of the overhead crane transport system may also include a storage module 83, which is used to store the program code and data of the control device of the overhead crane transport system.

[0065] All relevant content in each scenario involved in the above method embodiments can be referenced from the functional descriptions of the corresponding functional modules, and will not be repeated here. The control device 80 of the above-mentioned overhead crane transport system can perform the above-mentioned... Figure 6 The control method of the overhead crane transport system shown.

[0066] Based on the description of the above method and device embodiments, please refer to... Figure 10 , Figure 10 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 10 The illustrated electronic device includes a memory 1001, a processor 1002, a communication interface 1003, and a bus 1004. The memory 1001, processor 1002, and communication interface 1003 are interconnected via the bus 1004. Specifically, the electronic device may refer to the control terminal 21 in the above embodiment.

[0067] The memory 1001 may be a read-only memory (ROM), a static storage device, a dynamic storage device, or a random access memory (RAM).

[0068] The memory 1001 can store programs. When the program stored in the memory 1001 is executed by the processor 1002, the processor 1002 and the communication interface 1003 are used to execute the various steps of the control method of the overhead crane transport system of the present application embodiment.

[0069] The processor 1002 may be a general-purpose central processing unit (CPU), microprocessor, application specific integrated circuit (ASIC), graphics processing unit (GPU), or one or more integrated circuits, used to execute relevant programs to achieve the functions required by the units in the electronic device of this application embodiment, or to execute the control method of the overhead crane transport system of this application method embodiment.

[0070] The processor 1002 can also be an integrated circuit chip with signal processing capabilities. In implementation, each step of the control method for the overhead crane transport system of this application can be completed by the integrated logic circuits in the hardware of the processor 1002 or by instructions in software form. The processor 1002 can also be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. It can implement or execute the methods, steps, and logic block diagrams disclosed in the embodiments of this application. The general-purpose processor can be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of this application can be directly implemented by a hardware decoding processor, or implemented by a combination of hardware and software modules in the decoding processor. The software modules can be located in random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, or other mature storage media in the art. The storage medium is located in the memory 1001. The processor 1002 reads the information in the memory 1001 and, in conjunction with its hardware, performs the functions required by the units included in the electronic device of this application embodiment, or executes the control method of the overhead crane transport system of the method embodiment of this application.

[0071] The communication interface 1003 uses transceiver devices, such as, but not limited to, transceivers, to enable communication between electronic devices and other devices or communication networks. For example, data can be acquired through the communication interface 1003.

[0072] Bus 1004 may include a pathway for transmitting information between various components of an electronic device (e.g., memory 1001, processor 1002, communication interface 1003).

[0073] It should be noted that, although Figure 10 The illustrated electronic device only shows the memory 1001, processor 1002, and communication interface 1003. However, those skilled in the art should understand that in specific implementations, the electronic device may also include other components necessary for normal operation. Furthermore, depending on specific needs, those skilled in the art should understand that the electronic device may also include hardware components for implementing other additional functions. Moreover, those skilled in the art should understand that the electronic device may only include the components necessary for implementing the embodiments of this application, and may not necessarily include... Figure 10 All the devices shown.

[0074] This application also provides a computer storage medium storing a computer program / instructions thereon, which, when executed by a processor, implements some or all of the steps of any of the methods described in the above method embodiments.

[0075] In the several embodiments provided in this application, it should be understood that the disclosed methods and apparatus can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for example, the division of units is merely a logical functional division, and there may be other division methods in actual implementation; for example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces, or indirect coupling or communication connection between devices or units, and may be electrical, mechanical, or other forms.

[0076] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0077] In the above embodiments, implementation can be achieved, in whole or in part, through software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented, in whole or in part, as a computer program product. This computer program product includes one or more computer instructions. When these computer program instructions are loaded and executed on a computer, all or part of the flow or function according to the embodiments of this application is generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in or transmitted through a computer-readable storage medium. The computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, digital subscriber line) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium accessible to a computer or a data storage device such as a server or data center that integrates one or more available media. The available medium can be a read-only memory, or random access memory, or a magnetic medium, such as a floppy disk, hard disk, magnetic tape, magnetic disk, or an optical medium, such as a digital universal optical disc, or a semiconductor medium, such as a solid-state drive.

[0078] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

[0079] The device embodiments described above are merely illustrative. The units and modules described as separate components may or may not be physically separate. Furthermore, some or all of the units and modules can be selected to achieve the purpose of this embodiment, depending on actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0080] While this application discloses the above information, it is not limited thereto. Any person skilled in the art can easily conceive of variations or substitutions without departing from the spirit and scope of this application, and can make various alterations and modifications, including combinations of the different functions and implementation steps described above, as well as software and hardware implementation methods, all of which are within the protection scope of this application.

Claims

1. A control method for an overhead crane transport system, characterized in that, The method is applied to a control terminal, which is communicatively connected to the overhead crane transport system. The overhead crane transport system includes a track, an overhead crane, and a process machine. The track includes a main track, at least one auxiliary track arranged parallel to the main track, and a branch track connecting the main track and the auxiliary track. The main track is erected above the process machine, and at least one side of the auxiliary track is provided with a temporary storage position. In response to a handling request for a target wafer cassette, a handling task is generated, which includes a pick-up location and a drop-off location; In response to the fact that the transport task is an inter-track transport task, the control target crane switches between the main track and the auxiliary track via the branch track to perform the inter-track transport task. The inter-track transport task refers to a transport task in which the picking position is a temporary storage position or the putting position is a temporary storage position.

2. The method according to claim 1, characterized in that, The process of generating a handling task in response to a handling request for a target wafer cassette includes: In response to a first handling request for a target wafer cassette, a first handling task is generated; the first handling request is used to indicate that the target wafer cassette is at the first temporary storage position and at the head of the task queue of the target process equipment, and the first handling task refers to a handling task with the picking position at the first temporary storage position and the placing position at the target process equipment.

3. The method according to claim 1, characterized in that, The process of generating a handling task in response to a handling request for a target wafer cassette includes: In response to a second handling request for a target wafer cassette, a second handling task is generated; the second handling request is used to indicate that the target wafer cassette has completed a process task at a first process station and is at the head of the task queue of the target process station; the second handling task refers to a handling task where the picking location is the first process station and the placing location is the target process station.

4. The method according to claim 1, characterized in that, The process of generating a handling task in response to a handling request for a target wafer cassette includes: In response to a third handling request for a target wafer cassette, a target temporary storage location is allocated to the target wafer cassette, and a third handling task is generated based on the target temporary storage location; the third handling request is used to indicate that the target wafer cassette has completed a process task at the first process station and is not at the head of the task queue of the target process station, and the third handling task refers to a handling task with the picking location at the first process station and the placing location at the target temporary storage location.

5. The method according to claim 4, characterized in that, The step of allocating target temporary storage bits to the target wafer cassette includes: The main track corresponding to the first process equipment is determined as the target main track; The target auxiliary track is determined from at least one auxiliary track connected to the target main track; The target temporary storage position is determined from the temporary storage position of the target auxiliary track.

6. The method according to claim 4, characterized in that, The step of allocating target temporary storage bits to the target wafer cassette includes: The main track corresponding to the target process machine is determined as the target main track; The target auxiliary track is determined from at least one auxiliary track connected to the target main track; The target temporary storage position is determined from the temporary storage position of the target auxiliary track.

7. The method according to claim 5 or 6, characterized in that, Determining the target temporary storage bit from the temporary storage bit of the target auxiliary track includes: Obtain the temporary storage position allocation queue of the target auxiliary track. The temporary storage position allocation queue includes multiple temporary storage position groups arranged in ascending order of group number. Each temporary storage position group includes multiple temporary storage positions arranged in ascending order of position number with fixed position intervals. The group number refers to the position number of the first temporary storage position in the corresponding temporary storage position group. The first unoccupied temporary storage bit in the temporary storage allocation queue is determined as the target temporary storage bit.

8. A control device for an overhead crane transport system, characterized in that, The device is applied to a control terminal, which is communicatively connected to the overhead crane transport system. The overhead crane transport system includes a track, an overhead crane, and a process machine. The track includes a main track, at least one auxiliary track arranged parallel to the main track, and a branch track connecting the main track and the auxiliary track. The main track is erected above the process machine, and at least one side of the auxiliary track is provided with a temporary storage position. The device includes: The first response unit is used to generate a handling task in response to a handling request for a target wafer cassette, the handling task including a pickup location and a drop location; The second response unit is used to respond to the fact that the handling task is an inter-track handling task, and to control the target crane to switch between the main track and the auxiliary track via the branch track to perform the inter-track handling task. The inter-track handling task refers to a handling task in which the picking position is a temporary storage position or the putting position is a temporary storage position.

9. An electronic device, characterized in that, It includes a processor, a memory, and one or more programs, said one or more programs being stored in the memory and configured to be executed by the processor, said programs including instructions for performing the steps in the method as claimed in any one of claims 1-7.

10. A computer-readable storage medium having a computer program or instructions stored thereon, characterized in that, When the computer program or instructions are executed by a processor, they implement the steps of the method according to any one of claims 1-7.

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