A kind of turbine governing stage blade anti solid particle erosion coating protection device and method

Abstract

A coating protection device and method for turbine regulating stage blades against solid particle erosion is disclosed, relating to the field of turbine blade treatment technology. A workpiece motion control mechanism, located at the top of the coating chamber, clamps the workpiece and sample and controls their rotation, while also being connected to a bias power supply. The evaporation source, located at the bottom of the coating chamber, consists of a crucible, deflection coil, electron gun, and high-current ion source. A vacuum and gas supply system evacuates the coating chamber and supplies reactive and working gases to the coating chamber and the high-current ion source. A water and power supply system provides water cooling and power to all components. A control system is used for real-time control and adjustment of various process parameters. Based on high-current ion-enhanced electron beam evaporation coating technology, through the coordinated operation of the evaporation source and the workpiece motion control mechanism, a coating protection can be applied to turbine stage blades, thereby improving the blades' resistance to solid particle erosion and ensuring the safety and stability of the unit's operation.

Description

Technical Field

[0001] This invention relates to the field of turbine blade treatment technology, specifically a coating protection device and method for turbine regulating stage blades to resist solid particle erosion. Background Technology

[0002] Steam turbines are a core component of thermal power plants, and their operating status directly determines the reliability of the entire system. However, when the unit operates under high temperature and high pressure conditions, oxide scale particles often detach from the inner walls of the boiler and steam pipelines. These hard particles migrate with the high-speed steam flow, causing continuous mechanical impact and abrasion on the surface of the turbine's flow passage components—a phenomenon known as "solid particle erosion." This phenomenon is a key factor inducing premature failure of the regulating stage blades and threatening the safety of the unit. Therefore, there is an urgent need for an effective protective technology to improve the resistance of the turbine's regulating stage blades to solid particle erosion, ensuring the safety and stability of the unit's operation.

[0003] Several existing technologies exist for protecting turbine blades against solid particle corrosion: CN102628379A discloses a particle separation device in the working fluid of a flue gas turbine, which protects against solid particle corrosion by reducing the number of particles entering the flue gas turbine; CN1554856A discloses stationary and moving turbine nozzle blades and their heat treatment methods for preventing solid particle corrosion, which involves boronizing and tempering the steel surface to protect against solid particle corrosion; CN112342492B discloses a method for boronizing 2Cr12NiW1Mo1V turbine nozzles, which improves the solid particle corrosion resistance of heat-resistant stainless steel turbine nozzles by designing appropriate heat treatment processes during boronizing; CN102345099A discloses a method for preparing a multilayer anti-pitting coating on the surface of turbine blade materials, which uses arc ion plating technology to deposit pure Ti and TiN on the blade surface. A composite coating composed of TiAlN is used to protect against solid erosion; CN114807846A discloses a gradient multilayer protective coating against solid particle erosion and its preparation method. It also uses arc ion plating to deposit a composite coating composed of pure Ti, TiN and TiAlN. By improving the technology, an additional TiN-Ti-TiN stress absorption layer with a gradient sandwich structure is deposited in the TiAlN layer, which improves the protection against multi-angle, high-temperature and high-intensity erosion; CN113403582A discloses a nanocrystalline multilayer hard film resistant to solid particle erosion for steam turbine blades and its preparation method. It uses multi-arc ion plating physical vapor deposition to sequentially deposit a Cr base layer, a TiAl transition layer, a TiAlN transition layer and a TiAlCrCN solid particle erosion resistant film layer to prepare a nanocrystalline multilayer hard film on the surface of the steam turbine blade to protect against solid particle erosion.

[0004] In summary, in the existing field of solid particle erosion protection for turbine regulating stage blades, there is still no solid particle erosion protection scheme that uses high-current ion-enhanced electron beam evaporation coating technology to deposit protective coatings, and there is still room for further optimization. Summary of the Invention

[0005] To address the shortcomings of the prior art, this invention provides a coating protection device and method for turbine regulating stage blades against solid particle erosion. Based on high-current ion-enhanced electron beam evaporation coating technology, the device utilizes the coordinated operation of the evaporation source and the workpiece motion control mechanism to perform coating protection on turbine stage blades, thereby improving the blades' resistance to solid particle erosion and ensuring the safety and stability of the unit's operation.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A coating protection device for turbine regulating stage blades to resist solid particle erosion includes a coating chamber, a workpiece motion control mechanism, an evaporation source, a vacuum and gas supply system, a water and power supply system, and a control system.

[0008] The coating chamber is a sealed vacuum chamber equipped with a heater;

[0009] The workpiece motion control mechanism is located at the top of the coating chamber and can clamp the workpiece and sample and control their rotation. It is also connected to a bias power supply to apply bias voltage.

[0010] The evaporation source consists of an independent crucible, a deflection coil, an electron gun, and a high-current ion source. The crucible is located in the middle of the bottom of the coating chamber. The target material is located on one side of the bottom of the coating chamber. The deflection coil is located between the crucible and the electron gun, so that the electron beam emitted by the electron gun can be deflected and bombarded on the target material in the crucible. The high-current ion source is located on the opposite side of the bottom of the coating chamber.

[0011] The vacuum and gas supply system is connected to the top of the coating chamber through a gas extraction pipe to perform vacuuming, and is connected to the coating chamber and the high-current ion source through a gas supply pipeline to supply reaction gas and working gas.

[0012] The water and power supply system provides water cooling for the electron gun and high-current ion source, and provides power to all components.

[0013] The control system establishes signal connections with each component for real-time control and adjustment of various process parameters during the deposition process.

[0014] Furthermore, the workpiece motion control mechanism adopts two symmetrically arranged metal turntables driven by a motor, and fixtures are respectively installed at the center positions of the two metal turntables.

[0015] Furthermore, the gas supply section of the vacuum and gas supply system adopts a combination gas cylinder and is equipped with a pressure reducing valve and a gas flow meter.

[0016] Furthermore, a throttle valve is installed inside the air extraction pipe.

[0017] A method for coating protection of turbine regulating stage blades against solid particle erosion includes the following steps:

[0018] Step 1, Pre-treatment of workpieces and samples: Select turbine regulating stage blades as workpieces and prepare corresponding furnace samples. Remove oil and particulate contamination from the surface of the workpieces and furnace samples by solvent cleaning and / or ultrasonic cleaning. After cleaning, dry the workpieces and furnace samples and seal and shield the non-coated areas.

[0019] Step 2, clamping and vacuuming: Install the workpiece and the furnace sample on the workpiece motion control mechanism and start its rotation. Fill the crucible with target material, seal the coating chamber and evacuate until the background vacuum required by the process is reached and heat it to maintain the working temperature range.

[0020] Step 3, High-current ion beam cleaning: Introduce working gas into the high-current ion source, start the high-current ion source to generate an ion beam, and start the bias power supply to apply bias voltage to the workpiece and the furnace sample. The ion beam cleans the surface of the workpiece and the furnace sample.

[0021] Step 4, Depositing the bonding layer: Under the continuous action of the high-current ion source, the evaporation source is turned on to bombard the target material with electron beam evaporation. The electron beam emitted by the electron gun is deflected by the deflection coil to bombard the target material in the crucible, forming a deposition environment in the coating chamber where the evaporated material and the ion beam work together. By adjusting and controlling the way the working gas and the reaction gas are introduced, the bonding layer is deposited on the surface of the workpiece and the sample in the furnace using the high-current ion enhanced electron beam evaporation coating process.

[0022] Step 5: Deposit anti-solid particle erosion protective coating: On the basis of the binder layer, continue to maintain the operation of the evaporation source and the high-current ion source, and continue to deposit a single-layer, composite-layer or multi-layer gradient structure anti-solid particle erosion protective coating by adjusting the flow rate and combination of the working gas and the reaction gas.

[0023] Step 6, Cooling, Removal and Performance Verification: After the coating deposition is completed, turn off the coating protection device and wait for it to cool down and dissipate heat and return to atmospheric pressure. Then, remove the coated workpiece and the furnace sample and perform material characterization and testing on the furnace sample.

[0024] Compared with the prior art, the beneficial effects of the present invention are:

[0025] 1. This invention uses high-current ion-enhanced electron beam evaporation coating technology, which can obtain a high-density, high-adhesion coating at a lower substrate temperature, and the stress is controllable with fewer surface defects, effectively reducing the risk of coarsening, strength reduction and deformation of the blade substrate during the treatment process;

[0026] 2. The coating prepared by this invention has low surface roughness, thin thickness and uniform distribution, which can achieve better solid particle erosion protection effect with a lower coating thickness and has less impact on the aerodynamic performance of the regulating stage blades.

[0027] 3. The selection of working gas and crucible target material in this invention is flexible, and the material and structural design have a high degree of freedom. It is easy to realize multi-layer and gradient coating design, and can better cope with the erosion conditions of solid particles from multiple angles, high heat and high intensity. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the coating protection device of the present invention;

[0029] Figure 2 This is a flowchart of the coating protection method of the present invention.

[0030] In the diagram: 1. Coating chamber; 2. Workpiece motion control mechanism; 3. Fixture; 4. Crucible; 5. Deflection coil; 6. Gas supply line; 7. Electron gun; 8. High-current ion source; 9. Gas extraction line. Detailed Implementation

[0031] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0032] like Figure 1 As shown, a coating protection device for turbine regulating stage blades against solid particle erosion includes a coating chamber 1, a workpiece motion control mechanism 2, an evaporation source, a vacuum and gas supply system, a water and power supply system, and a control system. The connection relationships and structural features of each component are as follows:

[0033] The coating chamber 1 is a sealed vacuum chamber, which can be equipped with an additional heater to regulate and maintain the internal working temperature, providing a stable temperature environment for coating deposition.

[0034] The workpiece motion control mechanism 2 is located on two opposite side walls at the top of the coating chamber 1. Its main body consists of two symmetrically arranged metal turntables driven by a motor. Clamps 3 are respectively installed at the center of the two turntables for clamping and positioning the blade workpiece and sample. The blade workpiece and sample, held in place by the clamps 3, can rotate with the metal turntables to ensure the uniformity of the coating on the blade workpiece and sample. Furthermore, the workpiece motion control mechanism 2 is connected to a bias power supply, which can set the bias voltage applied to the blade workpiece and sample according to process requirements.

[0035] The evaporation source is arranged at the bottom of the coating chamber 1 and consists of an independently corresponding crucible 4, a deflection coil 5, an electron gun 7, and a high-current ion source 8, wherein:

[0036] The crucible 4 is located at the bottom center of the coating chamber 1 and is used to hold the target material to be evaporated;

[0037] The electron gun 7 is located on one side of the bottom of the coating chamber 1 and is used to generate a high-energy-density electron beam.

[0038] The deflection coil 5 is located between the corresponding crucible 4 and the electron gun 7 and is on the electron beam emission path of the electron gun 7. The magnetic field it generates is perpendicular to the electron beam emission direction and is used to deflect the electron beam emitted by the electron gun 7 to accurately bombard the target material in the crucible 4.

[0039] The high-current ion source 8 is located at the bottom of the coating chamber 1 on the opposite side, and is used to generate a high-intensity ion beam to activate the reactive gas and the metal atoms evaporated by the electron beam.

[0040] The vacuum and gas supply system consists of two parts: a vacuum pump unit and a gas supply unit. It is an external connection system and is not shown in the diagram.

[0041] The vacuum pump unit is connected to the top of the coating chamber 1 through the air extraction pipe 9, and is used to perform vacuum treatment inside the coating chamber 1 to create a vacuum environment. A throttle valve is installed in the air extraction pipe 9, and the working air pressure inside the coating chamber 1 can be controlled by adjusting the opening of the throttle valve.

[0042] The gas supply group uses a combination gas cylinder and is equipped with a pressure reducing valve and a gas flow meter. After the gas supplied by the combination gas cylinder flows out, it is reduced by the pressure reducing valve and the flow rate is precisely controlled by the gas flow meter. The gas supply group is connected to the coating chamber 1 and the high-current ion source 8 through the gas supply pipeline 6. It is used to introduce reaction gas into the coating chamber 1 and at the same time to introduce working gas (usually argon) into the high-current ion source 8.

[0043] The water supply and power supply system consists of two parts: a water supply group and a power supply group. It is an external connection system and is not shown in the diagram.

[0044] The water supply unit is connected to the electron gun 7 and the high-current ion source 8 respectively. It removes the heat generated during the operation of the equipment by circulating cooling water, ensuring the stable operation of the equipment.

[0045] The power supply group is connected to the workpiece motion control mechanism 2, the evaporation source, the vacuum pump group, the water supply group and the control system respectively, and is used to provide a stable working power for each component.

[0046] The control system establishes signal connections with the water and power supply system, the vacuum and gas supply system, the evaporation source and the workpiece motion control mechanism 2, respectively, and is used to control and adjust various process parameters in real time during the deposition process.

[0047] like Figures 1-2 As shown, a coating protection method for turbine regulating stage blades against solid particle erosion is described, and its process is combined with... Figure 2 As shown, it includes the following steps:

[0048] Step 1: Pre-processing of workpieces and samples;

[0049] Select the turbine regulating stage blades to be coated as workpieces and prepare corresponding furnace-fed samples. Pre-treat the workpieces and furnace-fed samples by solvent cleaning and / or ultrasonic cleaning to remove surface oil and particulate contamination. If necessary, use mechanical polishing or sandblasting to remove oxide scale and weak bonding layers. After cleaning, dry the workpieces and furnace-fed samples and seal and shield the non-coated areas.

[0050] Step 2: Clamping and vacuuming;

[0051] The pretreated workpiece and the furnace sample are fixed on the metal turntable of the workpiece motion control mechanism 2 by the clamp 3. The workpiece motion control mechanism 2 is started to rotate. The target material required for high-current ion-enhanced electron beam coating is installed in the crucible 4 of the evaporation source. The coating chamber 1 is closed and sealed. The vacuum pump group is started and the coating chamber 1 is evacuated through the evacuation pipe 9 until the background vacuum degree required by the process is reached. The workpiece and the furnace sample are heated by the heater and kept stably within the working temperature range suitable for the coating process.

[0052] Step 3: High-current ion beam cleaning;

[0053] Start the gas supply group and introduce working gas into the high-current ion source 8 through the gas supply pipeline 6. Start the high-current ion source 8 to generate an ion beam and start the bias power supply to apply an appropriate bias voltage to the workpiece and the sample sheet in the furnace. Before the electron beam evaporation begins, the ion beam cleans the surface of the workpiece and the sample sheet in the furnace to remove residual contaminant layer and weak bonding layer, forming an activated surface that is conducive to the subsequent coating adhesion.

[0054] Step 4: Deposit the bonding layer;

[0055] With the continuous action of the high-current ion source 8, the evaporation source is turned on to bombard the target material with electron beam evaporation. The electron beam emitted by the electron gun 7 is deflected by the deflection coil 5 to bombard the target material in the crucible 4, forming a deposition environment in the coating chamber 1 where the evaporating material and the ion beam work together. The gas supply group is adjusted and controlled to regulate the introduction of working gas and reaction gas. A dense adhesive layer is deposited on the surface of the workpiece and the sample sheet in the furnace using the high-current ion-enhanced electron beam evaporation coating process. This adhesive layer is used to improve the bonding strength between the overall coating and the turbine regulating stage blade substrate and to buffer the stress between the coating and the substrate.

[0056] Step 5: Deposit a protective coating against solid particle erosion;

[0057] Based on the bonding layer, the evaporation source and the high-current ion source 8 continue to operate. By adjusting the flow rate and combination of the working gas and the reaction gas, the high-current ion-enhanced electron beam evaporation coating process is used to deposit an anti-solid particle erosion protective coating. This anti-solid particle erosion protective coating can be designed as a single layer, composite layer or multi-layer gradient structure according to requirements to obtain the comprehensive performance required for the turbine regulating stage blades to meet the solid particle erosion conditions.

[0058] Step 6: Cooling, wafer removal, and performance verification;

[0059] After the anti-solid particle erosion protective coating is deposited, the coating protection device is turned off. After the coating protection device cools down and atmospheric pressure is restored, the coated workpiece and the furnace sample are taken out. The furnace sample is then subjected to material characterization and testing to verify whether the deposition effect meets the design requirements.

[0060] Example

[0061] Taking the deposition of a TiAlN multilayer composite coating on the surface of a steam turbine regulating stage blade as an example, the method of the present invention will be described in detail below:

[0062] (1) Select the turbine regulating stage moving blade as the workpiece and prepare the corresponding furnace sample. Heat the deionized water to about 50°C, add cleaning agent and rust inhibitor, and perform spray cleaning, ultrasonic fine cleaning and ultrasonic rinsing in sequence. After cleaning, blow dry with compressed air or nitrogen and dry in an 80°C oven for about 30 minutes. After cooling to room temperature, seal the non-coating areas such as tenons and mounting surfaces with aluminum foil tape or metal shielding parts, leaving only the leading edge, windward surface and blade tip areas to be coated.

[0063] (2) Fix the pretreated blade workpiece and the furnace sample onto the fixture 3 of the workpiece motion control mechanism 2, set the rotation speed to about 10s per revolution, fill the crucible 4 with TiAl mixture target material (Ti:Al atomic ratio pre-mixed to 1:1), seal the coating chamber 1, start the vacuum pump group to evacuate through the evacuation pipe 9 until the background vacuum is better than 5.0×10-3 Pa, then turn on the heater to raise the temperature of coating chamber 1 and stabilize it at an operating temperature of about 450°C.

[0064] (3) Argon gas is introduced into the high-current ion source 8 through the gas supply line 6 at a flow rate of about 300 SCCM. The gas pressure in the coating chamber 1 is controlled at about 0.4 Pa through the throttle valve. The high-current ion source 8 is turned on and the current is set to about 80 A. At the same time, a pulse negative bias voltage (amplitude about -800 V, frequency 50 kHz, duty cycle 50%) is applied to the workpiece motion control mechanism 2 by the bias power supply. High-energy argon ions are used to bombard and clean the surface of the blade workpiece and the sample sheet in the furnace for about 30 minutes to obtain a clean and activated coating interface.

[0065] (4) After cleaning, keep the rotation speed of the workpiece motion control mechanism 2 constant, lower the workpiece bias voltage to about -100V, continuously supply argon gas through the gas supply line 6, adjust the working gas pressure to about 0.3Pa, turn on the electron gun 7, and let the electron beam be deflected by the deflection coil 5 to bombard the TiAl mixture target material in the crucible 4. Under the assistance of the high current ion source 8 (current about 60A), a multi-cycle TiAl / TiAlN gradient bonding layer is deposited. Each cycle includes:

[0066] ① Only argon gas is introduced, and the TiAl metal layer is deposited for about 10 minutes;

[0067] ② Nitrogen gas is introduced into the argon atmosphere to deposit the TiAl-TiAlN transition layer for about 5 minutes;

[0068] ③Increase the nitrogen flow rate and deposit the TiAlN hard layer for about 10 minutes;

[0069] ④ Readjust the argon / nitrogen ratio and deposit the buffer transition layer for about 5 minutes.

[0070] The above process is one cycle (about 30 minutes). In this embodiment, three cycles are repeated, with a total deposition time of about 90 minutes, to obtain a multilayer gradient bonding layer composed of a TiAl metal layer, a TiAl-TiAlN transition layer and a TiAlN hard layer.

[0071] (5) After the binder layer is deposited, continue using the TiAl mixture target in crucible 4, adjust the power of electron gun 7 to stabilize the evaporation rate, and introduce argon gas at approximately 80 SCCM and nitrogen gas at approximately 200 SCCM through gas supply line 6 to control the working pressure at approximately 0.25 Pa. At the same time, turn on the high-current ion source 8 (current approximately 70 A) to provide Ar + / N +A mixed high-current ion beam is used, and the workpiece bias voltage is maintained at approximately -80V. Under these conditions, TiAlN functional layers are deposited by reacting TiAl with nitrogen as a protective coating against solid particle erosion. By periodically fine-tuning the nitrogen flow rate and ion source current, TiAlN forms a nanoscale micro-multilayer structure in the thickness direction. In this embodiment, the total deposition time is approximately 60 minutes, and the thickness of the protective coating against solid particle erosion is approximately 8~10μm.

[0072] (6) After deposition, the electron gun 7, high-current ion source 8 and bias power supply are turned off in sequence, and the gas supply through the gas supply line 6 is stopped. The coating chamber 1 is allowed to cool naturally to less than 80°C under vacuum. Then, the gas is slowly filled through the gas extraction line 9 in conjunction with the vacuum pump group to restore the coating chamber 1 to atmospheric pressure. The coating chamber 1 is opened and the coated blade workpiece and the furnace sample are taken out. The microstructure, film thickness, microhardness and film-substrate adhesion of the furnace sample are tested. Accelerated erosion test is carried out in the solid particle erosion test device to evaluate the anti-solid particle erosion performance of the combination of TiAl / TiAlN multilayer gradient adhesive layer and TiAlN functional layer.

[0073] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of the equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0074] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A turbine governing stage blade protection device against solid particle erosion, characterized in that: It includes a coating chamber (1), a workpiece motion control mechanism (2), an evaporation source, a vacuum and gas supply system, a water and power supply system, and a control system; The coating chamber (1) is a closed vacuum chamber equipped with a heater; The workpiece motion control mechanism (2) is located at the top of the coating chamber (1) and can clamp the workpiece and sample and control its rotation. It is also connected to a bias power supply to apply bias voltage. The evaporation source consists of an independent crucible (4), a deflection coil (5), an electron gun (7), and a high-current ion source (8). The crucible (4) is located at the bottom center of the coating chamber (1). The deflection coil (5) is located between the crucible (4) and the electron gun (7) so that the electron beam emitted by the electron gun (7) can be deflected and bombarded on the target material inside the crucible (4). The high-current ion source (8) is located on the opposite side of the bottom of the coating chamber (1). The vacuum and gas supply system is connected to the top of the coating chamber (1) through the gas extraction pipe (9) to perform vacuuming, and is connected to the coating chamber (1) and the high-current ion source (8) through the gas supply pipe (6) to supply reaction gas and working gas; The water and power supply system provides water cooling for the electron gun (7) and the high-current ion source (8), and provides working power for each component; The control system establishes signal connections with each component for real-time control and adjustment of various process parameters during the deposition process.

2. A turbine governing stage blade protection against solid particle erosion according to claim 1, characterized in that: The workpiece motion control mechanism (2) adopts two symmetrically arranged metal turntables driven by a motor, and the center positions of the two metal turntables are respectively equipped with fixtures (3).

3. A turbine governing stage blade protection against solid particle erosion according to claim 1, characterized in that: The gas supply section of the vacuum and gas supply system uses a combination gas cylinder and is equipped with a pressure reducing valve and a gas flow meter.

4. A turbine governing stage blade protection against solid particle erosion according to claim 1, characterized in that: A throttle valve is installed inside the air extraction pipe (9).

5. A method of protecting turbine control stage blades from erosion by solid particles by means of a coating, characterized in that: According to claim 1, the coating protection device for turbine regulating stage blades against solid particle erosion includes the following steps: Step 1, Pre-treatment of workpieces and samples: Select turbine regulating stage blades as workpieces and prepare corresponding furnace samples. Remove oil and particulate contamination from the surface of the workpieces and furnace samples by solvent cleaning and / or ultrasonic cleaning. After cleaning, dry the workpieces and furnace samples and seal and shield the non-coated areas. Step 2, clamping and vacuuming: Install the workpiece and the sample sheet with the furnace on the workpiece motion control mechanism (2) and start the rotation. Fill the target material in the crucible (4), seal the coating chamber (1) and vacuum until the background vacuum degree required by the process is reached and heat it to maintain it within the working temperature range. Step 3, high-current ion beam cleaning: introduce working gas into the high-current ion source (8), start the high-current ion source (8) to generate ion beam, and start the bias power supply to apply bias voltage to the workpiece and the furnace sample, and perform ion beam cleaning on the surface of the workpiece and the furnace sample through the ion beam. Step 4, Deposit Adhesive Layer: Under the continuous action of the high-current ion source (8), the evaporation source is turned on to bombard the target material with electron beam evaporation. The electron beam emitted by the electron gun (7) is deflected by the deflection coil (5) to bombard the target material in the crucible (4). A deposition environment is formed in the coating chamber (1) by the combined action of the evaporation material and the ion beam. By adjusting and controlling the way the working gas and the reaction gas are introduced, the adhesive layer is deposited on the surface of the workpiece and the sample sheet in the furnace using the high-current ion enhanced electron beam evaporation coating process. Step 5: Deposit anti-solid particle erosion protective coating: On the basis of the bonding layer, continue to maintain the operation of the evaporation source and the high-current ion source (8), and continue to deposit single-layer, composite-layer or multi-layer gradient structure anti-solid particle erosion protective coating by adjusting the flow rate and combination of working gas and reaction gas. Step 6, Cooling, Removal and Performance Verification: After the coating deposition is completed, turn off the coating protection device and wait for it to cool down and dissipate heat and return to atmospheric pressure. Then, remove the coated workpiece and the furnace sample and perform material characterization and testing on the furnace sample.

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