Cleanroom structure coupled vibration isolation system and coupled vibration isolation method

Abstract

This invention relates to the field of vibration control technology and discloses a structural coupling vibration isolation system and method for cleanrooms. The system is installed on the floor slab of a building structure and includes an isolation support frame system, a quasi-zero stiffness main support unit, a segmented viscous damper, and a nonlinear tuned mass damping module. The isolation support frame is lowered in the middle to form a suspended foundation pit. The quasi-zero stiffness unit effectively isolates external low-frequency vibrations. The segmented damper achieves low-resistance, high-energy-dissipation limiting for micro-vibrations and large displacements. The equipment base acts as a tuned mass block to adaptively absorb internal resonant energy. This invention, by constructing a coordinated structural coupling vibration control system, can simultaneously achieve ultra-low frequency vibration isolation, wideband adaptive vibration absorption, and seismic safety protection, making it suitable for micro-vibration control scenarios of precision equipment in semiconductor cleanrooms.

Description

Technical Field

[0001] This invention relates to the field of vibration control technology, specifically to a cleanroom structure coupling vibration isolation system and coupling vibration isolation method. Background Technology

[0002] As semiconductor manufacturing processes advance towards nanometer and sub-nanometer precision, core equipment such as lithography machines and electronic metrology equipment are extremely sensitive to environmental vibrations. Cleanrooms must simultaneously meet the dual requirements of daily micro-vibration control and structural safety under rare earthquakes. Existing vibration isolation technologies have the following shortcomings:

[0003] 1. Traditional building structures use rigid connections to fix equipment to waffle slabs. Under earthquake action, the building acceleration is directly transmitted to the equipment, and it is difficult to isolate ultra-low frequency micro-vibrations of the foundation below 1Hz, which can easily cause low frequency resonance of the floor slab.

[0004] 2. The natural frequency of conventional air spring vibration isolation tables is usually 1Hz-2Hz. The passive isolation capability of ultra-low frequency is insufficient, and the active control architecture has problems such as heat generation and electromagnetic interference, which affect the constant temperature and humidity and electromagnetic compatibility environment of clean rooms.

[0005] 3. Traditional viscous dampers have a static friction dead zone, and under micro-vibration conditions, they exhibit rigid vibration transmission, which reduces the micro-vibration isolation effect and cannot simultaneously meet the requirements of low resistance during micro-vibration and limiting during large-scale earthquakes.

[0006] 4. The effective bandwidth of the linearly tuned mass damper is narrow. When the load change of the plant causes the frequency of the main structure to drift, it is prone to detuning and cannot achieve wideband adaptive vibration absorption.

[0007] The aforementioned defects mean that existing cleanroom vibration isolation solutions cannot simultaneously achieve ultra-low frequency passive vibration isolation, low-resistance conduction of micro-vibrations, wideband adaptive vibration absorption, and large-earthquake limit protection, making it difficult to meet the usage requirements of high-end semiconductor manufacturing facilities. Summary of the Invention

[0008] The purpose of this invention is to provide a cleanroom structural coupling vibration isolation system and a coupling vibration isolation method to solve the above-mentioned defects in the prior art.

[0009] To achieve the above objectives, the present invention provides the following technical solution:

[0010] This invention proposes a cleanroom structural coupling vibration isolation system, arranged on the building's floor slab. Its features include an isolation support frame system, quasi-zero stiffness main support units, stroke-segmented viscous dampers, and a nonlinear tuned mass damping module. The isolation support frame system is a centrally sunken structure forming a suspended foundation pit. The quasi-zero stiffness main support unit array is arranged between the isolation support frame system and the building's floor slab. The stroke-segmented viscous dampers are arranged in parallel between the isolation support frame system and the building's floor slab for limiting micro-vibrations with low resistance and large displacements with high energy consumption. The nonlinear tuned mass damping module couples the core process equipment base as a tuning mass block with the isolation support frame system. The nonlinear tuned mass damping module and the quasi-zero stiffness main support units form a coordinated nonlinear coupling vibration control system, enabling the system to simultaneously isolate external low-frequency vibrations and absorb internal structural resonance energy.

[0011] Preferably, the isolation support frame system is a bridge structure, including load-bearing structures on both sides, a sunken load-bearing base plate, longitudinal beams, transverse beams, and diagonal braces; the sunken load-bearing base plate is laterally connected between the load-bearing structures on both sides, and together with the load-bearing structures on both sides, it encloses the suspended foundation pit; the longitudinal beams and transverse beams are set on the top of the load-bearing structures on both sides and orthogonally assembled to form a load-bearing grid, and the load-bearing grid covers the area above the sunken load-bearing base plate; the diagonal braces are fixed in the load-bearing grid and connect the longitudinal beams and transverse beams.

[0012] Preferably, an elevated movable floor 2 is laid on top of the isolation support frame system, and a physical avoidance area is opened at the location of the suspended foundation pit corresponding to the elevated movable floor 2; the base of the core process equipment passes through the physical avoidance area and is suspended in the suspended foundation pit, without rigid contact with the elevated movable floor 2.

[0013] Preferably, the quasi-zero stiffness main support unit includes an upper fixed base, a lower fixed base, a non-magnetic bearing ball, and a permanent magnet array; the upper fixed base and the lower fixed base are provided with nonlinear variable curvature geometric concave surface structures on their respective inner sides, and the non-magnetic bearing ball is sandwiched between the two concave surface structures; two symmetrical permanent magnet arrays are provided, the two permanent magnet arrays are coaxial and respectively embedded in the upper fixed base and the lower fixed base, and the two permanent magnet arrays are arranged with the same poles facing each other to generate magnetic repulsion negative stiffness.

[0014] Preferably, the permanent magnet array is a single-sided magnetic array structure, with the strong magnetic field side facing the non-magnetic bearing sphere and the weak magnetic field side facing the external environment; at the static equilibrium position, the positive stiffness provided by the nonlinear variable curvature geometric concave structure and the magnetic repulsion negative stiffness provided by the permanent magnet array are coupled and canceled out.

[0015] Preferably, the segmented viscous damper is arranged directly below the sunken bearing base plate and includes a cylinder, a piston assembly, a transmission push rod, and viscous fluid. The cylinder has an enlarged fluid bypass groove in the middle section, and the two ends of the cylinder smoothly contract into narrow-diameter regions. The piston assembly has micro-throttling orifices, and the piston assembly is fixedly connected to the transmission push rod. Under micro-vibration conditions, the piston assembly is located within the fluid bypass groove, and the damping force approaches zero. Under large displacement conditions, the piston assembly enters the narrow-diameter region, forcing the viscous fluid to squeeze through the micro-throttling orifices to excite a nonlinear high-shear damping force.

[0016] Preferably, the nonlinear tuning mass damping module includes a nonlinear elastic connector, which connects the core process equipment base to the isolation support frame system; the equivalent restoring force of the nonlinear elastic connector satisfies the nonlinear model formula, achieving adaptive matching of the tuning frequency; the nonlinear model formula is: F s =k1x+k3x³, where k1 is the linear stiffness coefficient and k3 is the nonlinear stiffness coefficient.

[0017] Preferably, energy dissipation units are installed in parallel within the suspended foundation pit. One end of each energy dissipation unit is connected to the base of the core process equipment, and the other end is connected to the inner wall of the suspended foundation pit. Flexible isolation joint areas are set around the perimeter of the isolation support frame system. All pipelines of the plant airflow and fluid system that cross the flexible isolation joint areas, including fresh air, circulating air, exhaust air, process fluid, special gas, and chilled water, are equipped with flexible universal joints or flexible compliant sections.

[0018] Preferably, a cleanroom structure coupling vibration isolation method, implemented based on the aforementioned cleanroom structure coupling vibration isolation system, includes:

[0019] Under micro-vibration conditions, when the relative displacement between the isolation support frame system and the building structural floor slab satisfies At that time, the quasi-zero stiffness main support unit provides low equivalent stiffness support to achieve isolation of external ultra-low frequency vibration;

[0020] Under moderate amplitude conditions, when the relative displacement between the isolation support frame system and the building structural floor slab satisfies At that time, the nonlinear tuned mass damping module adjusts the equivalent stiffness of the system through the stiffness adaptive characteristics of the nonlinear elastic connector, so that the tuning frequency tracks the frequency change of the main structure and absorbs the resonant energy inside the structure.

[0021] Under large displacement conditions, when the relative displacement between the isolation support frame system and the building structural floor slab satisfies When the stroke segmented viscous damper enters a high-damping state, it outputs nonlinear damping force to achieve structural displacement limitation and energy dissipation.

[0022] in, This is the displacement threshold at which the nonlinear tuned mass damping module begins to significantly participate in the system's vibration response. This is the critical displacement of the piston assembly as it enters the narrow-diameter region from the fluid bypass channel.

[0023] Preferably, the displacement of the support frame system is isolated by flexible isolation joints or flexible compliant sections to prevent tearing of pipelines for fresh air, circulating air, exhaust air, process fluids, special gases, and chilled water; and the resonant energy is converted into heat energy dissipation through energy dissipation units.

[0024] The beneficial effects of this invention are as follows:

[0025] (1) Significantly improved ultra-low frequency vibration isolation capability. This invention cancels out the positive and negative stiffness of the quasi-zero stiffness main support unit, making the system's equivalent dynamic stiffness approach zero, which can effectively isolate ultra-low frequency foundation vibrations below 1Hz, solving the problem that traditional vibration isolation systems cannot achieve ultra-low frequency passive isolation.

[0026] (2) Wideband adaptive suppression of structural resonance. This invention uses the base of the core process equipment as a tuned mass block, combined with a nonlinear tuned mass damping module, to achieve wideband adaptive vibration absorption and solve the problem of easy detuning of traditional linear tuned mass dampers.

[0027] (3) Adaptive damping protection for micro-vibration and large earthquake conditions. This invention achieves low resistance for micro-vibration and high damping for large displacement by using a segmented viscous damper, which solves the problem that traditional dampers can not simultaneously control micro-vibration and ensure earthquake safety by rigidly transmitting vibration during micro-vibration.

[0028] (4) External vibration isolation and internal vibration absorption work in tandem. This invention achieves both external low-frequency vibration isolation and internal resonance energy absorption through a nonlinear coupled vibration control system, thus providing an integrated solution to the dual needs of cleanroom micro-vibration control and earthquake protection. Attached Figure Description

[0029] Figure 1 This is a macroscopic cross-sectional view of the cleanroom structure coupling vibration isolation system of the present invention;

[0030] Figure 2 This is a plan view of the isolation support frame system and the quasi-zero stiffness main support unit of the present invention;

[0031] Figure 3 This is a cross-sectional view of the internal structure of the quasi-zero stiffness main support unit of the present invention;

[0032] Figure 4 This is a cross-sectional view of the stroke-segmented viscous damper structure of the present invention;

[0033] Figure 5 This is a cross-sectional view of the nonlinear tuned mass damping module structure of the present invention;

[0034] Figure 6 This is a schematic diagram of the system integration of the secondary dynamic decoupling architecture of the present invention.

[0035] The corresponding labels in the diagram are as follows: 100, Building shell; 110, Waffle plate; 111, Building structural floor slab; 120, Lower factory building; 130, Mezzanine; 140, Production floor; 200, Isolation support frame system; 210, Longitudinal beam; 220, Horizontal beam; 230, Diagonal brace; 240, Foundation pit support; 300, Quasi-zero stiffness main support unit; 310, Upper fixed base; 320, Lower fixed base; 330, Non-magnetic load-bearing ball; 340, Permanent magnet array; 400, Segmented stroke viscous damper; 410, Cylinder block; 420, Fluid bypass channel; 430, Piston assembly; 440, Micro-throttling. 450, Drive push rod, 460, Viscous fluid, 500, Main body of cleanroom, 510, High-efficiency air filter ceiling, 520, Raised floor one, 530, Raised floor two, 600, Flexible isolation joint area, 610, Flexible universal joint or flexible compliant section, 620, Fresh air, 630, Circulating air, 640, Exhaust air, 650, Process fluid, 660, Special gas, 670, Chilled water, 700, Nonlinear tuned mass damping module, 710, Core process equipment base, 720, Nonlinear elastic connector, 730, Energy dissipation unit housing, 740, Drive push rod. Detailed Implementation

[0036] The present invention will be further described below with reference to the embodiments. It should be noted that these are merely examples and descriptions of the inventive concept. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the inventive concept or exceed the scope defined in the claims, they should all be considered to fall within the protection scope of the present invention.

[0037] Example 1:

[0038] like Figures 1-6 As shown, the cleanroom structural coupling vibration isolation system of the present invention is installed as a whole above the building structural floor slab 111 to form a "room within a room" type high-cleanliness microenvironment.

[0039] The system includes an isolation support frame system 200, a quasi-zero stiffness main support unit 300, a stroke segmented viscous damper 400, and a nonlinear tuned mass damping module 700.

[0040] The isolation support frame system 200 is a centrally sunken structure that forms a suspended foundation pit; the quasi-zero stiffness main support unit 300 array is set between the isolation support frame system 200 and the building structure floor slab 111; the stroke segmented viscous damper 400 is set in parallel between the isolation support frame system 200 and the building structure floor slab 111 to achieve low resistance, large displacement and high energy consumption limit.

[0041] The nonlinear tuned mass damping module 700 couples the core process equipment base 710 as a tuned mass block with the isolation support frame system 200. The nonlinear tuned mass damping module 700 and the quasi-zero stiffness main support unit 300 form a nonlinear coupled vibration control system that works in tandem, enabling the system to simultaneously isolate external low-frequency vibrations and absorb internal resonant energy.

[0042] This invention's system, through the positive and negative stiffness coupling cancellation of the quasi-zero stiffness main support unit, brings the system's equivalent dynamic stiffness close to zero, effectively isolating ultra-low frequency foundation vibrations below 1Hz and solving the problem that traditional vibration isolation systems cannot achieve passive isolation at ultra-low frequencies. It uses the core process equipment base as a tuned mass block, combined with a nonlinear tuned mass damping module, to achieve wideband adaptive vibration absorption, solving the problem of detuning in traditional linear tuned mass dampers. Through a stroke-segmented viscous damper, it achieves low resistance during micro-vibrations and high damping limit during large displacements, solving the problem of rigid vibration transmission during micro-vibrations in traditional dampers, which cannot simultaneously address micro-vibration control and seismic safety. Through a nonlinear coupled vibration control system, it simultaneously achieves external low-frequency vibration isolation and internal resonant energy absorption, comprehensively addressing the dual needs of cleanroom micro-vibration control and seismic protection.

[0043] Example 2:

[0044] I. Overall System Architecture and Macro Decoupling Environment.

[0045] like Figures 1-6 As shown, the main building consists of an outer shell 100, waffle slabs 110 or structural floor slabs 111, a lower-level factory 120, a mezzanine 130, and a production floor 140. The outer shell 100 encloses the entire factory building, serving as the external envelope. The production floor 140 is located at the top of the factory building and houses the cleanroom and core process equipment. The mezzanine 130 is located below the production floor 140 and is used to house factory pipelines and auxiliary equipment. The lower-level factory 120 is located below the mezzanine 130 and forms the ground floor area of ​​the factory building. The waffle slabs 110 or structural floor slabs 111 are laid horizontally on the production floor 140, serving as the main load-bearing structure of the production floor 140.

[0046] The present invention discloses a cleanroom structural coupling vibration isolation system. The overall concept is to dynamically decouple the main body 500 of the cleanroom, which includes equipment such as precision photolithography and electronic metrology, from the building structural floor slab 111 at the physical level. That is, the entire system is installed above the building structural floor slab 111 corresponding to the production floor 140, forming a "room within a room" type high-cleanliness microenvironment.

[0047] This invention discloses a cleanroom structural coupling vibration isolation system, comprising an isolation support frame system 200, a quasi-zero stiffness main support unit 300, a stroke-segmented viscous damper 400, and a nonlinear tuned mass damping module 700. In terms of macroscopic layout, the system erects the isolation support frame system 200 on the structural floor slab 111. This isolation support frame system 200, acting as an integral load-bearing platform with extremely high in-plane stiffness, supports the main cleanroom body 500 upwards, thereby forming a highly clean microenvironment within the building shell 100 that can be levitated as a whole.

[0048] II. Isolation Support Framework System.

[0049] The isolation support frame system 200 is a centrally sunken structure that forms a suspended foundation pit. For example... Figure 1 , Figure 2 As shown, the isolation support frame system 200 is mainly a bridge structure assembled from high-strength structural steel or aluminum alloy profiles. It consists of load-bearing structures on both sides, a sunken load-bearing base plate, longitudinal beams 210, transverse beams 220, diagonal braces 230, and pit supports 240. The sunken load-bearing base plate is horizontally connected between the load-bearing structures on both sides, forming a suspended pit. The pit supports 240 are arranged inside the suspended pit to assist in support positioning. The longitudinal beams 210 and transverse beams 220 are set on the top of the load-bearing structures on both sides, orthogonally assembled to form a large-span load-bearing grid, covering the area above the sunken load-bearing base plate. The diagonal braces 230 are fixed in the load-bearing grid and connect the longitudinal beams 210 and transverse beams 220 to resist horizontal shear forces, prevent the frame from undergoing rhomboid torsional deformation, and ensure the overall rigidity and integrity of the structure.

[0050] III. Quasi-zero stiffness main support unit.

[0051] The quasi-zero stiffness main support unit 300 is the core of this system to achieve ultra-low frequency micro-vibration isolation. The array is set between the isolation support frame system 200 and the building structure floor slab 111.

[0052] like Figure 3As shown, the quasi-zero stiffness main support unit 300 includes an upper fixed base 310, a lower fixed base 320, a non-magnetic bearing ball 330, and a permanent magnet array 340. Both the upper fixed base 310 and the lower fixed base 320 have precision-machined nonlinear variable curvature geometric concave structures on their inner sides. The non-magnetic bearing ball 330 is sandwiched between the two concave structures, providing nonlinear geometric positive stiffness through relative rolling and climbing. The permanent magnet array 340 is symmetrically and coaxially embedded inside the upper fixed base 310 and the lower fixed base 320, with the upper and lower poles facing each other to generate magnetic repulsion negative stiffness. The permanent magnet array 340 adopts a single-sided magnetic array structure, with the strong magnetic field side facing the non-magnetic bearing ball 330 to generate repulsion, and the weak magnetic field side facing the external environment to seal the magnetic field lines, avoiding electromagnetic interference to magnetically sensitive equipment such as lithography machines.

[0053] Near the system's static equilibrium position, the positive stiffness provided by the geometric concave surface and the negative stiffness provided by the permanent magnet array 340 couple and cancel each other out, causing the equivalent dynamic stiffness of the quasi-zero stiffness main support unit 300 to approach zero. This extends the lower limit of the vibration isolation frequency band to below 1Hz, effectively cutting off ultra-low frequency environmental vibrations transmitted from the foundation. The specific mechanism of the parallel connection of positive and negative stiffness is as follows:

[0054] (1) Geometric stiffness: When the upper frame is subjected to a vertical static load or a small horizontal displacement occurs, the non-magnetic bearing ball 330 rolls and climbs relative to the concave structure. The change in gravitational potential energy provides nonlinear geometric restoring force (i.e., positive stiffness) in the vertical and horizontal directions.

[0055] (2) Magnetic repulsion negative stiffness: Permanent magnet array 340 is symmetrically and coaxially embedded inside the upper fixed base 310 and the lower fixed base 320. The single-sided magnetic focusing design makes its strong magnetic field side face the non-magnetic load-bearing ball 330 area, generating a strong repulsive force to offset part of the static load and exhibiting significant negative stiffness characteristics; at the same time, its weak magnetic field side faces the external environment, effectively sealing the magnetic field lines and avoiding electromagnetic interference to process equipment such as extreme ultraviolet lithography machines in the clean room that are extremely sensitive to magnetic fields.

[0056] (3) Quasi-zero stiffness state: By accurately calibrating the concave curvature and the air gap of the magnet, the positive stiffness provided by the geometric structure and the negative stiffness provided by the magnetic array are superimposed and cancel each other out near the static equilibrium position of the system. At this time, the equivalent dynamic stiffness of the system is extremely low, which can broaden the lower limit of the passive vibration isolation frequency to below 1Hz, effectively cutting off the ultra-low frequency environmental background waves transmitted over long distances by the foundation soil.

[0057] IV. Segmented viscous damper.

[0058] The segmented viscous damper 400 is installed in parallel between the isolation support frame system 200 and the building structure floor slab 111 to achieve low resistance and high energy consumption limit for micro-vibration and large displacement.

[0059] like Figure 4 As shown, the segmented viscous damper 400 is concealed directly beneath the sunken support base plate and includes a cylinder 410, a fluid bypass channel 420, a piston assembly 430, a micro-throttling orifice 440, a drive push rod 450, and viscous fluid 460. The internal cross-section of the cylinder 410 changes non-linearly and continuously, with an enlarged diameter fluid bypass channel 420 in the middle section, and the two ends of the internal cavity smoothly contracting into narrow-diameter regions. The piston assembly 430 has a micro-throttling orifice 440 and is fixedly connected to the drive push rod 450, which moves synchronously with the isolation support frame system 200.

[0060] When faced with minute vibration disturbances ranging from nanometers to micrometers, the piston assembly 430 is located within the fluid bypass groove 420 in the middle section of the cylinder. In this state, the viscous fluid 460 mainly flows around the piston assembly 430 via the bypass gap, resulting in extremely low fluid shear resistance. The equivalent additional damping force generated by the system at this damper approaches zero. This low-resistance state can effectively coordinate with the micro-vibration isolation characteristics of the quasi-zero stiffness main support unit 300, thereby preventing high-frequency micro-vibrations from being rigidly transmitted to the isolation support frame system through the damper.

[0061] Rare major earthquake condition (throttling and high energy consumption state): When a strong earthquake or accidental impact causes the horizontal displacement of the isolation support frame system 200 to exceed the preset safety threshold, the piston assembly 430 rushes out of the fluid bypass channel 420 and enters the narrow diameter area at both ends of the cylinder. At this time, the external bypass path is physically closed, and the viscous fluid 460 is forced to squeeze through the tiny throttling orifice 440 on the piston at an extremely high flow rate, instantly generating a huge viscous shear damping force that grows nonlinearly, converting the structural kinetic energy into heat energy dissipation, thereby forcibly constraining the absolute displacement of the cleanroom and preventing pipeline breakage or equipment overturning.

[0062] This invention achieves a multi-level collaborative control mechanism through structural response: When the system is in a micro-vibration condition, the structural amplitude is small, and the quasi-zero stiffness main support unit 300, through positive and negative stiffness coupling, makes the equivalent stiffness approach zero, significantly reducing the system's natural frequency, thereby effectively isolating external low-frequency vibrations; as the vibration amplitude increases, the system enters a medium-amplitude condition, and the nonlinear tuned mass damping module 700 begins to dominate the response. Its nonlinear elastic connector 720 exhibits stiffness that varies with amplitude, enabling the tuning frequency to adaptively match the main structure frequency within a certain range, thus continuously absorbing resonant energy over a wide frequency band; when the vibration displacement further increases and exceeds a preset threshold... During this process, the segmented viscous damper 400 switches from a low-resistance state to a high-resistance state, rapidly dissipating system energy through high-shear fluid damping and limiting structural displacement to prevent instability or structural failure. Thus, the system is dominated by quasi-zero stiffness elements, nonlinear tuned mass damping modules, and segmented dampers at different vibration stages, forming a multi-level collaborative control mechanism from vibration isolation and absorption to energy dissipation and limiting.

[0063] V. Main body of the cleanroom.

[0064] like Figure 1 As shown, the isolation support frame system 200 supports the main body of the cleanroom 500 upwards. The main body of the cleanroom 500 includes a high-efficiency air filter ceiling 510, a raised access floor 1 520, and a raised access floor 2 530. The high-efficiency air filter ceiling 510 is located above the top of the frame, achieving high-efficiency air filtration in the cleanroom. The raised access floor 1 520 is a conventional raised access floor for cleanrooms, and the raised access floor 2 530 is laid flat on top of the isolation support frame system 200, with a physical avoidance area created directly above the suspended pit.

[0065] VI. Isolation Support Framework System.

[0066] Combination Figure 1 The isolation support frame system 200 is surrounded by a flexible isolation joint area 600. The fresh air 620, circulating air 630, exhaust air 640, process fluid 650, special gas 660 and chilled water 670 pipelines that cross the flexible isolation joint area 600 are all equipped with flexible universal joints or flexible compliant sections 610. The flexible universal joints or flexible compliant sections 610 provide deformation redundancy for the pipelines, preventing the pipelines from being pulled apart when the isolation support frame system 200 undergoes large displacement movements, thus ensuring the cleanroom environment and production safety.

[0067] The plant's airflow and fluid system consists of fresh air 620, recirculated air 630, exhaust air 640, process fluid 650, special gas 660, and chilled water 670. Its specific structure and connection relationships are as follows:

[0068] like Figure 1 As shown, the plant's airflow and fluid system includes pipelines for fresh air 620, recirculated air 630, exhaust air 640, process fluid 650, special gases 660, and chilled water 670. The plant's airflow and fluid system is mainly located within the mezzanine 130 and is connected to the main cleanroom 500 and core process equipment in the production layer 140 via vertical pipelines, reserved manholes, or perforated structures. It provides air circulation, temperature and humidity control, process media supply, special gas supply, and equipment cooling to the main cleanroom 500.

[0069] Among them, the fresh air 620 is used to replenish the main body of the cleanroom 500 with treated fresh air; the circulating air 630 is used to maintain the air circulation inside the cleanroom and form clean air supply through the high-efficiency air filter ceiling 510; the exhaust air 640 is used to exhaust the process waste gas or excess air inside the cleanroom; the process fluid 650 is used to provide the liquid medium required for production to the core process equipment; the special gas 660 is used to provide the gas medium required for the process to the core process equipment; and the chilled water 670 is used to exchange heat and cool the cleanroom air conditioning system or the core process equipment.

[0070] A flexible isolation joint area 600 is set around the perimeter of the isolation support frame system 200. The flexible isolation joint area 600 is located between the main building structure and the isolation support frame system 200, and is used to form a structural decoupling gap, so that the isolation support frame system 200 can generate a small relative displacement with respect to the building structure floor slab 111, without rigidly colliding or rigidly connecting with the surrounding building structure.

[0071] Where various plant pipelines cross the flexible isolation joint area 600, flexible universal joints or flexible compliant sections 610 are installed. One end of the flexible universal joint or flexible compliant section 610 is connected to the pipeline on the side of the main building structure, and the other end is connected to the pipeline on the side of the isolation support frame system 200 or the main body of the cleanroom 500, thereby forming a flexible transition connection between the main building structure and the isolation support frame system 200.

[0072] Specifically, the fresh air 620 duct is drawn from the fresh air handling system on the main building side, crosses the flexible isolation joint area 600 via a flexible universal joint or flexible compliant section 610, and then connects to the air supply system of the main cleanroom 500; the recirculated air 630 duct is connected to the high-efficiency air filter ceiling 510 or return air duct to form a recirculated airflow inside the cleanroom; the exhaust air 640 duct is drawn from the main cleanroom 500, crosses the flexible isolation joint area 600 via a flexible universal joint or flexible compliant section 610, and then connects to the exhaust air system on the main building side.

[0073] Process fluid 650, special gas 660, and chilled water 670 pipelines are led out from the plant supply system on the main building side. Before entering the main cleanroom section 500 or core process equipment supported by the isolation support frame system 200, they are all transitionally connected via flexible universal joints or flexible compliant sections 610. The aforementioned flexible connection structure can accommodate the axial expansion and contraction, lateral shear, and angular rotational displacement of the isolation support frame system 200 relative to the building structural floor slab 111.

[0074] Through the above arrangement, the plant airflow and fluid system ensures the normal air supply, return, exhaust, media supply, gas supply, and cooling functions of the cleanroom while avoiding rigid constraints on the isolation support frame system 200 by the plant pipelines. When external vibrations are transmitted from the building structure floor slab 111, the elastic universal joints or flexible compliant sections 610 can weaken the transmission of vibrations along the pipelines to the main body of the cleanroom 500 and core process equipment, preventing the plant pipelines from becoming a bypass transmission path for vibrations.

[0075] When an earthquake, impact, or large relative displacement occurs in the isolation support frame system 200, the flexible universal joint or flexible compliant section 610 can release pipeline deformation, preventing the fresh air 620, circulating air 630, exhaust air 640, process fluid 650, special gas 660, and chilled water 670 pipelines from being pulled apart, leaking, failing to seal, or being damaged at connection points, thereby improving the reliability of the cleanroom system under micro-vibration control conditions and large displacement safety protection conditions.

[0076] VII. Nonlinear tuned mass damping module.

[0077] The nonlinear tuned mass damping module 700 couples the core process equipment base 710 as a tuned mass block with the isolation support frame system 200. The nonlinear tuned mass damping module 700 and the quasi-zero stiffness main support unit 300 form a nonlinear coupled vibration control system that works in tandem, enabling the system to simultaneously isolate external low-frequency vibrations and absorb internal resonant energy.

[0078] Combination Figure 5 , Figure 6 The nonlinear tuned mass damping module 700 includes a core process equipment base 710, a nonlinear elastic connector 720, an energy dissipation unit housing 730, and a transmission push rod 740.

[0079] The main body of the core process equipment is flush with the raised access floor 530 and has no rigid contact with it. The base 710 of the core process equipment is suspended in the suspended pit through the physical avoidance area and is used as a controlled tuned mass block to ensure that the equipment base can move freely relative to the raised access floor 530 without being interfered with by deformation.

[0080] The nonlinear elastic connector 720 connects the core process equipment base 710 to the sunken load-bearing base plate or load-bearing structure of the isolation support frame system 200. The nonlinear elastic connector 720 has Duffing oscillator characteristics, and the equivalent restoring force meets F. s=k1x + k3x³, where k1 is the linear stiffness coefficient and k3 is the nonlinear stiffness coefficient. The equivalent stiffness adaptively drifts when the system amplitude changes, so that the tuning frequency matches the resonant frequency of the main structure. Energy dissipation units are set in parallel in the suspended foundation pit. The energy dissipation unit is enclosed by a shell 730. The transmission push rod 740 connects the energy dissipation unit to the core process equipment base 710. One end of the energy dissipation unit is connected to the core process equipment base 710, and the other end is connected to the inner wall of the suspended foundation pit, converting the captured resonant energy into heat dissipation.

[0081] By using the quasi-zero stiffness main support unit 300 with a variable curved surface and magnet, the geometric positive stiffness and magnetic repulsion negative stiffness are superimposed in parallel at the static equilibrium position, which greatly reduces the equivalent dynamic stiffness of the system, extends the lower limit of the vibration isolation frequency band to low frequencies, effectively isolates the low-frequency background micro-vibrations transmitted from the foundation, and improves the operational stability of precision equipment in the cleanroom.

[0082] A central sunken bridge-type isolation support frame system 200 is adopted to form a suspended foundation pit. The base 710 of the core process equipment is suspended in the foundation pit and serves as a tuning mass block. There is no need to configure additional large-mass vibration absorption components, saving clean production space. At the same time, the overall center of gravity of the "room within a room" system is lowered, which improves the overturning stability under horizontal seismic action.

[0083] The nonlinear elastic connector 720 with Duffing oscillator characteristics is adopted, and the equivalent stiffness is adaptively adjusted with the amplitude. Compared with the traditional linear tuned mass damper, it can track the resonant frequency of the main structure and extract energy in a wider frequency band, reducing the risk of detuning.

[0084] The segmented viscous damper 400 adopts a variable cross-section cylinder 410 design, which has low resistance in micro-vibration conditions and high damping in large displacement conditions, realizing adaptive switching of working conditions, avoiding rigid transmission of micro-vibration, and ensuring structural safety under seismic conditions.

[0085] Example 3:

[0086] like Figures 1-6 As shown, the cleanroom structure coupling vibration isolation method disclosed in this invention is implemented based on the cleanroom structure coupling vibration isolation system disclosed in Example 2, and includes the following steps:

[0087] 1. External ultra-low frequency vibration isolation under micro-vibration conditions: When the relative displacement between the isolation support frame system (200) and the building structure floor slab (111) satisfies At that time, the geometric positive stiffness and magnetic negative stiffness of the quasi-zero stiffness main support unit 300 are coupled and canceled out, providing low equivalent stiffness support and isolating the ultra-low frequency external vibrations below 1Hz transmitted by the building structure floor slab 111; wherein The displacement threshold at which the nonlinear tuned mass damping module 700 begins to significantly participate in the vibration response.

[0088] 2. Intrinsic resonance absorption under medium amplitude conditions: when the relative displacement satisfies At that time, through the nonlinear tuned mass damping module 700, with the core process equipment base 710 as the tuned mass block, and utilizing the stiffness adaptive drift characteristics of the nonlinear elastic connector 720, the resonant frequency of the main structure is matched in real time, absorbing the internal resonant energy of the isolation support frame system 200 and the elevated movable floor 2 530.

[0089] 3. Energy consumption under large displacement conditions: When the relative displacement meets the following requirements... At this time, the segmented viscous damper 400 enters a high-damping state, and the piston assembly 430 enters the narrow-diameter region through the fluid bypass channel 420, outputting a nonlinear damping force to limit structural displacement and dissipate energy; whereby The critical displacement for switching the damping state of piston assembly 430;

[0090] 4. Pipeline safety protection: The flexible isolation joint area 600 and the flexible universal joint or flexible compliant section 610 are adapted to the isolation support frame system 200 to prevent displacement, thus preventing the pipelines of fresh air 620, circulating air 630, exhaust air 640, process fluid 650, special gas 660, and chilled water 670 from tearing; the resonant energy is converted into heat energy dissipation through the energy dissipation unit.

[0091] When the system is running, it is in a micro-vibration condition ( When the amplitude increases, the quasi-zero stiffness main support unit 300 provides low equivalent stiffness support through positive and negative stiffness coupling, cutting off the ultra-low frequency vibration transmitted by the building structure floor slab 111; as the amplitude increases, it enters the medium amplitude condition ( The nonlinear tuned mass damping module 700 uses the core process equipment base 710 as a mass block. Through the stiffness adaptive characteristics of the nonlinear elastic connector 720, it matches the resonant frequency of the main structure in real time and absorbs internal resonant energy. When encountering large displacement conditions such as earthquakes ( The piston assembly 430 of the segmented viscous damper 400 enters the narrow-diameter region through the fluid bypass channel 420, switching to a high-damping state. Energy is rapidly dissipated and displacement is limited through high-shear fluid damping, preventing structural instability or damage. Thus, the system is dominated by quasi-zero stiffness units, nonlinear tuned mass damping modules, and segmented dampers at different vibration stages, forming a multi-level collaborative control mechanism from vibration isolation and absorption to energy dissipation and limiting. Flexible isolation joints and elastic universal joints or flexible compliant sections 610 ensure the safety of various pipelines, ultimately achieving the dual goals of cleanroom micro-vibration control and seismic protection.

[0092] The above is an exemplary description of the invention. Obviously, the specific implementation of the invention is not limited to the above-described manner. Any non-substantial improvement made using the inventive concept and technical solution of the invention, or the direct application of the inventive concept and technical solution to other situations without modification, is within the protection scope of the invention.

Claims

1. A cleanroom structural coupling vibration isolation system, arranged on a building structural floor slab (111), characterized in that, It includes an isolation support frame system (200), a quasi-zero stiffness main support unit (300), a stroke segmented viscous damper (400), and a nonlinear tuned mass damping module (700); the isolation support frame system (200) is a central sunken structure that forms a suspended foundation pit; The quasi-zero stiffness main support unit (300) array is arranged between the isolation support frame system (200) and the building structure floor slab (111); the stroke segmented viscous damper (400) is arranged in parallel between the isolation support frame system (200) and the building structure floor slab (111) for micro-vibration low resistance, large displacement high energy consumption limit; the nonlinear tuned mass damping module (700) couples the core process equipment base (710) as a tuned mass block with the isolation support frame system (200). The nonlinear tuned mass damping module (700) and the quasi-zero stiffness main support unit (300) constitute a nonlinear coupled vibration control system with upper and lower coordination, so that the system can simultaneously achieve isolation of external low-frequency vibration and absorption of internal resonant energy of the structure.

2. The cleanroom structural coupling vibration isolation system according to claim 1, characterized in that, The isolation support frame system (200) has a bridge structure, including load-bearing structures on both sides, a sunken load-bearing base plate, longitudinal beams (210), transverse beams (220), and diagonal braces (230). The sunken load-bearing base plate is horizontally connected between the load-bearing structures on both sides and encloses the suspended foundation pit with the load-bearing structures on both sides. The longitudinal beams (210) and transverse beams (220) are set on the top of the load-bearing structures on both sides and are orthogonally assembled to form a load-bearing grid. The load-bearing grid covers the area above the sunken load-bearing base plate. The diagonal braces (230) are fixed in the load-bearing grid and connect the longitudinal beams (210) and transverse beams (220).

3. The cleanroom structural coupling vibration isolation system according to claim 1, characterized in that, The top of the isolation support frame system (200) is covered with an elevated movable floor 2 (530), and the elevated movable floor 2 (530) has a physical avoidance area corresponding to the location of the suspended foundation pit; the core process equipment base (710) passes through the physical avoidance area and hangs in the suspended foundation pit, without rigid contact with the elevated movable floor 2 (530).

4. A cleanroom structural coupling vibration isolation system according to claim 1, characterized in that, The quasi-zero stiffness main support unit (300) includes an upper fixed base (310), a lower fixed base (320), a non-magnetic bearing ball (330), and a permanent magnet array (340). The upper fixed base (310) and the lower fixed base (320) are provided with nonlinear variable curvature geometric concave surface structures on their inner sides, and the non-magnetic bearing ball (330) is sandwiched between the two concave surface structures. There are two symmetrical permanent magnet arrays (340), which are coaxial and embedded in the upper fixed base (310) and the lower fixed base (320) respectively. The two permanent magnet arrays (340) are arranged with the same poles facing each other to generate magnetic repulsion negative stiffness.

5. A cleanroom structural coupling vibration isolation system according to claim 4, characterized in that, The permanent magnet array (340) is a single-sided magnetic array structure, with the strong magnetic field side facing the non-magnetic bearing sphere (330) and the weak magnetic field side facing the external environment; at the static equilibrium position, the positive stiffness provided by the nonlinear variable curvature geometric concave structure is coupled and canceled out by the magnetic repulsion negative stiffness provided by the permanent magnet array (340).

6. A cleanroom structural coupling vibration isolation system according to claim 2, characterized in that, The segmented viscous damper (400) is arranged directly below the sunken bearing base plate and includes a cylinder (410), a piston assembly (430), a transmission push rod (450), and viscous fluid (460). The cylinder (410) has an enlarged fluid bypass groove (420) in the middle section of its inner cavity, and the two ends of the inner cavity smoothly contract into a narrow diameter region. The piston assembly (430) is provided with a micro throttling orifice (440), and the piston assembly (430) is fixedly connected to the transmission push rod (450). Under micro-vibration conditions, the piston assembly (430) is located in the fluid bypass groove (420), and the damping force approaches zero. Under large displacement conditions, the piston assembly (430) enters the narrow diameter region, forcing the viscous fluid (460) to squeeze through the micro throttling orifice (440) to excite a nonlinear high shear damping force.

7. A cleanroom structural coupling vibration isolation system according to claim 1, characterized in that, The nonlinear tuning mass damping module (700) includes a core process equipment base (710) and a nonlinear elastic connector (720). The nonlinear elastic connector (720) connects the core process equipment base (710) to the isolation support frame system (200). The equivalent restoring force of the nonlinear elastic connector (720) satisfies the nonlinear model formula, realizing adaptive matching of the tuning frequency. The nonlinear model formula is: F s =k1x+k3x³, where k1 is the linear stiffness coefficient and k3 is the nonlinear stiffness coefficient.

8. A cleanroom structural coupling vibration isolation system according to claim 7, characterized in that, Energy dissipation units are connected in parallel within the suspended foundation pit. One end of the energy dissipation unit is connected to the base (710) of the core process equipment, and the other end is connected to the inner wall of the suspended foundation pit. Flexible isolation joint areas (600) are set around the periphery of the isolation support frame system (200). Each pipeline of the plant airflow and fluid system that crosses the flexible isolation joint area (600), including fresh air (620), circulating air (630), exhaust air (640), process fluid (650), special gas (660), and chilled water (670), is equipped with a flexible universal joint or a flexible compliant section (610).

9. A method for structural coupling and vibration isolation in a cleanroom, characterized in that, Implemented based on the cleanroom structural coupling vibration isolation system according to any one of claims 1-8, comprising: Under micro-vibration conditions, when the relative displacement between the isolation support frame system (200) and the building structural floor slab (111) satisfies At that time, the quasi-zero stiffness main support unit (300) provides low equivalent stiffness support to achieve isolation of external ultra-low frequency vibration; Under moderate amplitude conditions, when the relative displacement between the isolation support frame system (200) and the building structural floor slab (111) satisfies At that time, the nonlinear tuned mass damping module (700) adjusts the equivalent stiffness of the system through the stiffness adaptive characteristics of the nonlinear elastic connector (720), so that the tuning frequency tracks the frequency change of the main structure and absorbs the resonant energy inside the structure. Under large displacement conditions, when the relative displacement between the isolation support frame system (200) and the building structural floor slab (111) satisfies When the stroke segmented viscous damper (400) enters a high-damping state, it outputs nonlinear damping force to achieve structural displacement limitation and energy dissipation. in, The displacement threshold at which the nonlinear tuned mass damping module (700) begins to significantly participate in the system's vibration response is given. The critical displacement for the piston assembly (430) to enter the narrow diameter region from the fluid bypass channel (420).

10. A method for structural coupling and vibration isolation in a cleanroom according to claim 9, characterized in that, By using flexible isolation gap area (600) and adapting to the flexible universal joint or flexible compliant section (610) to isolate the displacement of the support frame system (200), the tearing of pipelines for fresh air (620), circulating air (630), exhaust air (640), process fluid (650), special gas (660), and chilled water (670) is prevented; and the resonant energy is converted into heat energy dissipation through the energy dissipation unit.

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