A multi-chamber plasma experimental system based on uniform electrode distance adjustment

Abstract

This application relates to the field of plasma reaction devices and discloses a multi-chamber plasma experimental system based on unified electrode spacing adjustment. The system includes a first plastic plate, with uniformly distributed reaction vessels fixedly connected to the top of the first plastic plate. Telescopic vessels are slidably connected to the inner diameter of each reaction vessel, and second plastic plates are fixedly connected to the top of each telescopic vessel. A sample inlet is fixedly connected to the bottom of each reaction vessel, penetrating the first plastic plate. The system also includes a reaction control system comprising an inlet control module, a sample inlet control module, and a metal plate distance control module. The distance between the second and first plastic plates is adjusted via the metal plate distance control module, thereby adjusting the position of the metal plates and thus the discharge spacing. Real-time control of various reaction conditions in each reaction vessel allows for simultaneous degradation experiments of the same pollutant under different conditions, facilitating control experiments.

Description

Technical Field

[0001] This invention relates to the field of plasma reaction device technology, specifically to a multi-chamber plasma experimental system based on uniform electrode spacing adjustment. Background Technology

[0002] Plasma reaction is a process in which chemical reactions or compounds are synthesized, decomposed, oxidized, reduced, nitrided, or carbonized in a continuous high-temperature plasma flow. Plasma is obtained through electroded DC or AC arc discharge or electrodeless high-frequency discharge such as radio frequency or microwave. In the synthesis of new materials, plasma is often used to prepare ultrafine powders, which can strengthen and improve the brittleness of inorganic materials. This method, introduced into inorganic materials science, explores and studies grain refinement, dispersion strengthening, and fiber reinforcement of inorganic materials, significantly improving their performance. Furthermore, this method has wide applications in the purification of refractory metals and nonmetals, as well as in the semiconductor industry, ultrapure materials, and superconducting materials.

[0003] However, under current laboratory conditions, when conducting comparative experiments to verify the reaction of reactants under different reaction conditions in a plasma environment, it is necessary to use multiple sets of plasma reactors simultaneously. This makes it inconvenient to observe the comparative experiments and makes it impossible to achieve real-time unified control of the reaction conditions in each plasma reactor. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a multi-chamber plasma experimental system based on unified pole pitch adjustment, which solves the problem that multiple sets of plasma reactors need to be used simultaneously for reaction in control experiments, making experimental observation inconvenient.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a multi-chamber plasma experimental system based on unified electrode spacing adjustment, comprising a first insulating plate, at least two uniformly distributed reaction vessels fixedly connected to the top of the first insulating plate, a telescopic vessel slidably fitted inside each reaction vessel, the tops of the telescopic vessels being fixedly connected to the same second insulating plate, a metal electrode plate fixedly attached to the center of the second insulating plate and connected to a grounding wire. A sample injection vessel is fixed to the bottom of each reaction vessel and penetrates the first insulating plate, with a high-voltage electrode at the bottom of the sample injection vessel. A control cylinder is disposed outside the reaction vessel, with the two ends of the cylinder connected to the first insulating plate and the second insulating plate respectively.

[0006] By integrating multiple independent and structurally linked reaction chambers on the same platform, using control cylinders to synchronously adjust the electrode spacing, and cooperating with independent sample injection and gas injection control systems, it is possible to conduct multiple sets of control experiments under different reaction conditions simultaneously in a single device, overcoming the problems of operational errors and inconvenient observation caused by the traditional use of multiple devices in combination.

[0007] Preferably, it also includes a reaction control system, which includes an air intake control module, a sample injection control module, and a metal plate distance control module.

[0008] Preferably, the air intake control module includes a flow control unit, a sample injection control module, and a valve port control unit. The sample injection control module is connected to the air intake pipe via a pipeline. The sample injection control module is equipped with a flow control unit and a valve port control unit. The flow control unit is used to control the flow rate of the air entering the air intake pipe. The sample injection control module is used to control different gases entering the air intake pipe. The valve port control unit is used to control the connection state between the air intake pipe and the air outlet pipe.

[0009] Preferably, the injection control module includes a liquid reactant injection unit, a catalyst injection unit, and a solid reactant injection unit. The liquid reactant injection unit includes both same-type liquid injection and different-type liquid injection. The injection tube is connected to a multi-port interface at the opposite end to the injection vessel. Two connectors of the multi-port interface are respectively connected to the same-type liquid injection and the different-type liquid injection. The same-type liquid injection is used to inject the same type of liquid reactant into the injection vessel, and the different-type liquid injection is used to inject different types of liquid reactants into the injection vessel.

[0010] Preferably, the catalyst injection unit includes a same catalyst injection unit and a different catalyst injection unit. The same catalyst injection unit and the different catalyst injection unit are respectively connected to two of the connectors of the multi-port connector. The same catalyst injection unit is used to inject the same type of catalyst into the grounding wire, and the different catalyst injection unit is used to inject different types of catalyst into the grounding wire.

[0011] Preferably, the solid reactant injection unit includes a same solid injection unit and a different solid injection unit. The same solid injection unit and the different solid injection unit are respectively connected to two of the connectors of the multi-port connector. The same solid injection unit is used to inject the same type of solid reactant into the grounding wire, and the different solid injection unit is used to inject different types of solid reactant into the grounding wire.

[0012] Preferably, the metal plate distance control module is electrically connected to the control cylinder, and is used to control the operation of the control cylinder to adjust the distance between the second plastic plate and the first plastic plate.

[0013] Preferably, the high-voltage power supply is electrically connected to the high-voltage electrode to supply power to the high-voltage electrode so as to achieve discharge of the high-voltage electrode.

[0014] Working principle: First, the reactants enter the sample injection vessel through the sample injection tube, and the catalyst can also enter the sample injection vessel through the sample injection tube. The reaction atmosphere can enter the reaction vessel through the gas inlet pipe. At this time, the control cylinder can be activated to drive the corresponding second plastic plate to move up and down, so that the telescopic vessel slides inside the reaction vessel, thereby adjusting the distance between the metal plate and the first plastic plate, and thus controlling the discharge distance. During plasma reaction, the high-voltage electrode discharges to treat the sample container, causing the reactants to undergo a vigorous oxidation-reduction reaction and degradation. The degraded substances are discharged from the outlet tube, or they can be circulated through the flow between the inlet and outlet tubes. The sample control module can control the type of atmosphere entering the inlet tube to create different atmospheric environments within the reaction container. The flow control unit can control the gas flow rate entering the inlet tube to control the gas concentration. The valve control unit can control the flow state of the gas in the inlet and outlet tubes. The same liquid sample is used to add the same type of liquid reactant to the sample container, while different liquid sample is used to inject different types of liquid reactants. Different reaction atmospheres are created through the gas inlet control module, and the sample control module can automatically control the introduction of different types of reactants into the sample container for convenient control experiments. Real-time adjustment of various reaction conditions in each reaction container is also possible.

[0015] This invention provides a multi-chamber plasma experimental system based on unified pole gap adjustment. It has the following advantages: 1. This invention firstly adjusts the distance between the second and first plastic plates using a metal plate distance control module, thereby adjusting the position of the metal plate and thus the discharge distance. Simultaneously, it creates different reaction atmospheres using an air intake control module and automatically controls the introduction of different types of reactants into the reaction vessel for convenient control experiments. By controlling the reaction conditions in each reaction vessel in real time, it is possible not only to conduct degradation experiments of the same pollutant under different experimental conditions simultaneously, but also to conduct degradation experiments of different pollutants under the same experimental conditions simultaneously, facilitating control experiments. Attached Figure Description

[0016] Figure 1 This is a perspective view of the present invention; Figure 2 This is an exploded view of the entire invention; Figure 3 This is an exploded view of the reaction vessel of the present invention; Figure 4 This is a block diagram of the reaction control system of the present invention.

[0017] The components include: 1. First plastic plate; 2. Reaction vessel; 3. Control cylinder; 4. Second plastic plate; 5. Grounding wire; 6. High-voltage electrode; 7. Sample inlet tube; 8. Sample outlet tube; 9. Telescopic tank; 10. Gas inlet pipe; 11. Gas outlet pipe; 12. Metal plate; 13. Reaction control system; 14. Gas inlet control module; 15. Sample inlet control module; 16. Metal plate distance control module; 17. High-voltage power supply; 141. Flow control unit; 142. Sample inlet control module; 143. Valve port control unit; 151. Liquid reactant sample inlet unit; 152. Catalyst sample inlet unit; 153. Solid reactant sample inlet unit; 1511. Same liquid sample inlet; 1512. Different liquid sample inlet; 1521. Same catalyst sample inlet; 1522. Different catalyst sample inlet; 1531. Same solid sample inlet; 1532. Different solid sample inlet; 18. Sample inlet vessel. Detailed Implementation

[0018] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Example: Combination Figure 1 The present invention discloses a multi-chamber plasma experimental system based on uniform pole distance adjustment, comprising a first plastic plate 1, a reaction vessel 2 uniformly distributed on the top of the first plastic plate 1, two control cylinders 3 being disposed outside the reaction vessel 2 and fixedly connected to the first plastic plate 1 respectively, a telescopic vessel 9 being slidably connected to the inner diameter of each reaction vessel 2, the top of each telescopic vessel 9 being fixedly connected to the same second plastic plate 4, a metal sheet 12 being fixedly connected to the center of the second plastic plate 4, and a grounding wire 5 being fixedly connected to the metal sheet 12.

[0020] Specifically, both the first plastic plate 1 and the second plastic plate 4 are made of high-purity polytetrafluoroethylene or Teflon insulating material with a thickness of 15-20mm, possessing excellent resistance to high-voltage breakdown, high temperature, and ozone corrosion. Their surfaces are finely polished, with a roughness Ra≤0.4μm to reduce contaminant adhesion during the experiment. The control cylinder 3 preferably uses a precision guide rod cylinder from the SMC brand, with a positioning accuracy of ±0.05mm. Driven by the electrical signal of the metal plate distance control module 16, the cylinder can precisely and smoothly adjust the parallel distance between the second plastic plate 4 and the first plastic plate 1. The extreme distance adjustment range is set to 0-50mm, thereby achieving precise and uniform control of the plasma discharge distance in all reaction vessels at the millimeter or even micrometer level. Furthermore, a dynamic sealing structure with double fluororubber O-rings is installed between the sliding contact surfaces of the reaction vessel 2 and the telescopic vessel 9 to ensure good airtightness within the chamber during vertical sliding adjustment of the extreme distance, withstanding pressures ranging from -0.1MPa to 0.5MPa.

[0021] Combination Figure 2 and Figure 3 The reaction vessel 2 is fixedly connected to a sample inlet 18 at its bottom end, and the sample inlet 18 penetrates the first plastic plate 1. A high-voltage electrode 6 is provided at the bottom end of the sample inlet 18. A high-voltage power supply 17 is also included, which is electrically connected to the high-voltage electrode 6 to supply power to the high-voltage electrode 6 for discharge. The telescopic vessel 9 is fixedly connected to an inlet pipe 10 penetrating its side wall on one side and an outlet pipe 11 penetrating its side wall on the other side. The sample inlet 18 is fixedly connected to an inlet pipe 7 penetrating its side wall on one side and an outlet pipe 8 penetrating its side wall on the other side.

[0022] Specifically, the high-voltage electrode 6 is made of corona-resistant tungsten-copper alloy or titanium alloy rod, typically 2-5 mm in diameter, with the end machined into a needle-like or flat-topped conical shape to enhance the tip discharge effect and reduce the breakdown voltage. The high-voltage power supply 17 can be a CTP-2000K low-temperature plasma experimental power supply, with an output voltage continuously adjustable from 0-30 kV and a frequency adjustment range of 5-20 kHz. The sample inlet tube 7, sample outlet tube 8, gas inlet tube 10, and gas outlet tube 11 are all made of 316L stainless steel or quartz glass tubes with an outer diameter of 6 mm or 8 mm, and the tube openings are equipped with standard compression fittings for quick assembly and disassembly of the tubing. During assembly, the high-voltage electrode 6 is vertically inserted into the center of the bottom of the sample inlet container 18 and sealed with high-voltage insulating adhesive; the metal sheet 12, used as the grounding electrode, is made of copper and silver-plated to improve conductivity and oxidation resistance. During operation, the reaction atmosphere is introduced through the inlet pipe 10, and the reactants enter the sample injection tank 18 through the sample injection pipe 7. By applying high pressure, a uniform and stable glow discharge or dielectric barrier discharge can be excited between the metal sheet 12 and the high-voltage electrode 6, which will cause the reactants to undergo violent oxidation-reduction degradation. The treated liquid / solid products are discharged through the sample outlet pipe 8, and the gaseous byproducts are discharged through the gas outlet pipe 11. Alternatively, an external peristaltic pump can be connected to realize the closed-loop circulation of materials.

[0023] Combination Figure 4 The system also includes a reaction control system 13, which comprises an inlet control module 14, a sample injection control module 15, and a metal plate distance control module 16. The inlet control module 14 includes a flow control unit 141, a sample injection control module 142, and a valve control unit 143, used to control the type, flow rate, and pipeline connectivity of the gas entering the inlet pipe 10. The sample injection control module 15 includes a liquid reactant injection unit 151, a catalyst injection unit 152, and a solid reactant injection unit 153. The sample injection pipe 7 is connected to multiple ports, respectively connecting to the same liquid injection 1511 and different liquid injections 1512, the same catalyst injection 1521 and different catalyst injections 1522, and the same solid injection 1531 and different solid injections 1532.

[0024] Specifically, the central processing unit of the reaction control system 13 can use a Siemens S7-1200 series PLC controller, paired with an industrial touchscreen of 10 inches or larger to achieve visual human-machine interaction. The flow control unit 141 in the air intake control module 14 preferably uses a high-precision mass flow controller from the Alicat brand, with a response time of less than 50ms and a flow control accuracy of ±0.8% of the set value; the valve control unit 143 consists of a corrosion-resistant miniature solenoid valve assembly. For the sample injection control module 15, its multi-port interface uses an integrated Teflon multi-position rotary switching valve array. During multivariate control experiments, researchers can preset the sample injection program with a single touch on the touchscreen: for example, instructing the system to open the pipeline of the same liquid injection 1511, allowing all chambers to precisely flow with equal amounts and concentrations of simulated wastewater; simultaneously, starting different catalyst injections 1522, injecting TiO2 into reaction vessel 1 and ZnO into reaction vessel 2; at this time, the cylinder is linked through the metal plate distance control module 16 to ensure that the high-pressure electrode distance of all chambers is absolutely consistent. This highly integrated automated fluid and electromechanical control logic completely eliminates environmental interference variables such as differences in electric field distribution and human error in sample injection volume that are caused by piecing together experiments from multiple independent devices in traditional methods. This results in parallel comparative experiments with extremely high scientific accuracy and reliability.

[0025] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A multi-chamber plasma experimental system based on unified pole pitch adjustment, comprising a first plastic plate (1), characterized in that, The top of the first plastic plate (1) is fixedly connected to a uniformly distributed reaction vessel (2). The inner diameter of the reaction vessel (2) is slidably connected to a telescopic vessel (9). The top of each telescopic vessel (9) is fixedly connected to a second plastic plate (4). A metal sheet (12) is fixedly connected to the center of the second plastic plate (4). A grounding wire (5) is fixedly connected to the metal sheet (12). Two control cylinders (3) are provided on the outside of the reaction vessel (2), and the control cylinders (3) are fixedly connected to the first plastic plate (1). A sample injection vessel (18) is fixedly connected to the bottom of the reaction vessel (2). (18) Penetrating the first plastic plate (1), a high voltage electrode (6) is provided at the bottom of the sample injection tank (18), an air inlet pipe (10) is fixedly connected to one side of the telescopic tank (9) and the air inlet pipe (10) penetrates the telescopic tank (9), an air outlet pipe (11) is fixedly connected to the other side of the telescopic tank (9) and the air outlet pipe (11) penetrates the telescopic tank (9), a sample injection pipe (7) is fixedly connected to one side of the sample injection tank (18) and the sample injection pipe (7) penetrates the sample injection tank (18), and an outlet pipe (8) is fixedly connected to the other side of the sample injection tank (18) and the outlet pipe (8) penetrates the sample injection tank (18).

2. The multi-chamber plasma experimental system based on unified pole pitch adjustment according to claim 1, characterized in that, It also includes a reaction control system (13), which includes an air intake control module (14), a sample injection control module (15), and a metal plate distance control module (16).

3. The multi-chamber plasma experimental system based on unified pole pitch adjustment according to claim 1, characterized in that, The air intake control module (14) includes a flow control unit (141), a sample injection control module (142), and a valve port control unit (143). The sample injection control module (142) is connected to the air intake pipe (10) through a pipe. The sample injection control module (142) is equipped with a flow control unit (141) and a valve port control unit (143). The flow control unit (141) is used to control the flow rate of the air intake pipe (10). The sample injection control module (142) is used to control different gases to enter the air intake pipe (10). The valve port control unit (143) is used to control the connection state between the air intake pipe (10) and the air outlet pipe (11).

4. The multi-chamber plasma experimental system based on unified pole pitch adjustment according to claim 1, characterized in that, The injection control module (15) includes a liquid reactant injection unit (151), a catalyst injection unit (152), and a solid reactant injection unit (153). The liquid reactant injection unit (151) includes a same liquid injection (1511) and a different liquid injection (1512). The injection tube (7) is connected to a multi-port interface at the opposite end to the injection tank (18). Two connectors of the multi-port interface are respectively connected to the same liquid injection (1511) and the different liquid injection (1512). The same liquid injection (1511) is used to inject the same type of liquid reactant into the injection tank (18), and the different liquid injection (1512) is used to inject different types of liquid reactants into the injection tank (18).

5. A multi-chamber plasma experimental system based on unified pole pitch adjustment according to claim 4, characterized in that, The catalyst injection unit (152) includes a same catalyst injection (1521) and a different catalyst injection (1522). The same catalyst injection (1521) and the different catalyst injection (1522) are respectively connected to two of the connectors of the multi-port connector. The same catalyst injection (1521) is used to inject the same type of catalyst into the grounding wire (5), and the different catalyst injection (1522) is used to inject different types of catalyst into the grounding wire (5).

6. A multi-chamber plasma experimental system based on unified pole pitch adjustment according to claim 4, characterized in that, The solid reactant injection unit (153) includes a same solid injector (1531) and a different solid injector (1532). The same solid injector (1531) and the different solid injector (1532) are respectively connected to two of the connectors of the multi-port connector. The same solid injector (1531) is used to inject the same type of solid reactant into the grounding wire (5), and the different solid injector (1532) is used to inject different types of solid reactant into the grounding wire (5).

7. A multi-chamber plasma experimental system based on unified pole pitch adjustment according to claim 1, characterized in that, The metal plate distance control module (16) is electrically connected to the control cylinder (3) and is used to control the operation of the control cylinder (3) to adjust the distance between the second plastic plate (4) and the first plastic plate (1).

8. A multi-chamber plasma experimental system based on unified pole pitch adjustment according to claim 1, characterized in that, The high-voltage power supply (17) is electrically connected to the high-voltage electrode (6) to supply power to the high-voltage electrode (6) so as to achieve the discharge of the high-voltage electrode (6).

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