Correction method of electron microscope scanning image, product and equipment

By extracting corner matching pairs from electron microscope scanned images and performing perspective transformation and distortion compensation model correction, the geometric distortion problem of electron microscope scanned images is solved, realizing automated and accurate distortion correction, improving detection efficiency and accuracy, and reducing costs.

CN122289087APending Publication Date: 2026-06-26DONGFANG JINGYUAN ELECTRON LTD
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Patent Information

Application Number
CN202610352640.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-20
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

In semiconductor manufacturing, geometric distortion of electron microscopy scan images leads to a decrease in the accuracy and reliability of defect detection. Existing technologies struggle to achieve automated and precise distortion correction, and are also costly.

Method used

By acquiring electron microscope scan images and design layouts, corner matching pairs are extracted, perspective transformation matrices are estimated for perspective correction, and a distortion compensation model is established to achieve global distortion compensation and output distortion-corrected images.

Benefits of technology

It significantly improves the spatial accuracy and automated correction capability of electron microscope scanning images, reduces correction costs, meets the high-throughput requirements of semiconductor manufacturing, and improves detection efficiency and accuracy.

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Abstract

The invention provides an electron microscope scanning image correction method, a product and equipment. The method comprises the following steps: acquiring a to-be-corrected electron microscope scanning image and a design layout corresponding to the to-be-corrected electron microscope scanning image, and extracting an ideal electron microscope scanning image of an area corresponding to the to-be-corrected electron microscope scanning image from the design layout; determining an angular point matching pair between the to-be-corrected electron microscope scanning image and the ideal electron microscope scanning image, and estimating according to the angular point matching pair to obtain a perspective transformation matrix between the to-be-corrected electron microscope scanning image and the ideal electron microscope scanning image; performing perspective correction on the to-be-corrected electron microscope scanning image by using the perspective transformation matrix to obtain a perspective correction electron microscope scanning image; and outputting a perspective correction electron microscope scanning image. By means of the method, rapid analysis and compensation of the SEM image can be achieved, the geometric distortionless image is output, the process does not need to depend on hardware calibration parameters, and therefore the space accuracy and the automatic correction capacity of the SEM image are remarkably improved.
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