An apparatus and method for manufacturing a spectral gradient filter array
By combining microfluidic chip templates and "S-shaped" microchannel array layers, and utilizing spin coating and 3D printing technologies, the efficient fabrication of spectral gradient filter arrays was achieved. This solved the problems of complex processes and high costs in existing technologies, and enabled the efficient fabrication and improved yield of spectral gradient filter arrays.
Patent Information
- Application Number
- CN202610447056.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-04-07
- Publication Date
- 2026-07-10
AI Technical Summary
Existing filter array fabrication technologies are complex, have low yields, are expensive, and can only produce one-dimensional gradient filters, which is insufficient to meet the needs of multispectral and hyperspectral cameras.
By employing microfluidic chip templates and "S-shaped" microchannel array layers, combined with spin coating, 3D printing, and microfluidic reaction technology, a gradient reaction in a two-dimensional array-confined space is achieved to prepare a spectral gradient filter array.
The fabrication process of spectral gradient filter arrays has been simplified, costs have been reduced, and the consistency of spectral gradient has been ensured, thereby improving the yield.
Smart Images
Figure CN122362567A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of filter technology, and in particular to a fabrication apparatus and method for a spectral gradient filter array. Background Technology
[0002] A filter array is a spectral modulation device. Materials with different spectral properties form an array, giving image sensors spectral sensing capabilities. For example, an RGB color camera uses red, green, and blue filters arranged in a Bayer pattern, allowing each pixel to have three channels of color information. Compared to a monochrome camera that can only record light intensity information, this significantly improves object classification capabilities. In some multispectral and hyperspectral cameras, by introducing more types of filters, such as using a 3×3 array, the image further gains metamerism resolution. However, traditional filter arrays are composed of bandpass filters. They are typically fabricated in batches using complex, multi-step processes such as photolithography, etching, and vapor deposition to form the array. This technology faces application barriers due to its complex processes, low yield, and high cost, necessitating the development of new filter array fabrication methods.
[0003] With the development of artificial intelligence technology, spectral gradient filters of various types, such as long-pass, short-pass, and broadband transmission, can also be used to reconstruct the spectral information of the target under test. However, existing methods can only prepare one-dimensional gradient filters. For example, spectral gradient filter structures can be prepared by performing gradient chemical reactions in a one-dimensional confined space (References: Adv Mater, 2022, 34(44): e2203250; Nanophotonics, 2024, 13(18): 3599-607).
[0004] In summary, existing filter array fabrication technologies generally involve photolithography to create a protective mask on a substrate, followed by the fabrication of a filter array of one material using methods such as evaporation or vapor deposition. Then, new protective masks are fabricated, and filter arrays of other materials are fabricated in batches. This technology suffers from drawbacks such as numerous process steps, low yield, and high cost. Summary of the Invention
[0005] This application provides an apparatus and method for fabricating a spectral gradient filter array to solve the problems mentioned in the background art.
[0006] To address the above problems, in a first aspect, this application provides an apparatus for fabricating a spectral gradient filter array, comprising: Filter array substrate and microfluidic chip template; The microfluidic chip template includes: A connecting component includes a feeding unit and a discharging unit, wherein the feeding unit includes a feeding end and a discharging end, and the discharging unit includes a return end and a waste end; An "S-shaped" microchannel array layer is disposed between the feeding unit and the discharging unit; The feeding unit is connected to the microfluidic reaction system through the feeding end and to the "S-shaped" microchannel array layer through the discharge end; the discharge unit is connected to the "S-shaped" microchannel array layer through the return end, and the waste end of the discharge unit discharges waste through the microfluidic reaction system.
[0007] Secondly, a method for fabricating a spectral gradient filter array is provided. The spectral gradient filter array is fabricated using the fabrication apparatus for a spectral gradient filter array as described above. The fabrication method includes the following steps: S1. Fabrication of a single-material filter array substrate: Single-material filter substrates are prepared by spin coating or inkjet printing, and single-material filter array substrates are formed by electron beam or ion beam etching. S2. A microfluidic chip template containing an "S-shaped" microchannel array layer is prepared by 3D printing. The "S-shaped" microchannel array layer includes 2n "S-shaped" microchannel sub-array layers, where n is an integer ≥ 1. The channel width of the “S-shaped” microchannel subarray layer is 5~50μm; S3. Prepare the reaction medium and carry out the microfluidic reaction between the filter array substrate and the reaction solution. After reacting for 5~60 minutes, remove the filter array substrate, clean and dry it to obtain a spectral gradient filter array.
[0008] Preferably, the "S-shaped" microchannel array layer is used to bond the filter array substrate; The end of the "S-shaped" microchannel array layer away from the filter array substrate is connected to a microfluidic reaction system, and the microfluidic reaction system is connected to the "S-shaped" microchannel array layer through a connecting component; The connecting component includes a feeding unit and a discharging unit. The feeding unit includes a feeding end and a discharging end, and the feeding unit includes at least one branch structure. The discharging end is connected to at least two of the “S-shaped” microfluidic channel subarray layers through the branch structure. The discharge unit includes a return end and a waste end, and the discharge unit includes at least one branch structure. The return end is connected to at least two of the “S-shaped” microfluidic channel subarray layers through the branch structure. An "S-shaped" microfluidic channel subarray layer includes a microfluidic inlet and a microfluidic outlet. The microfluidic inlet is connected to the discharge end, and the microfluidic outlet is connected to the return end. The microfluidic inlet and microfluidic outlet are located at the endpoints of the diagonal of the "S-shaped" microfluidic channel subarray.
[0009] Preferably, the branch structure is a "Y-shaped" branch convergence structure, the discharge end is connected to at least two of the "S-shaped" microfluidic channel subarray layers through the "Y-shaped" branch convergence structure, and the return end is connected to at least two of the "S-shaped" microfluidic channel subarray layers through the "Y-shaped" branch convergence structure.
[0010] Preferably, in step S3, the microfluidic reaction between the filter array substrate and the reaction solution includes the following steps: The "S-shaped" microchannel array layer of the microfluidic chip template is bonded and pressed tightly with the filter array substrate to form a closed reaction channel; The reaction medium is pumped into the feed unit through the microfluidic reaction system. The reaction medium flows sequentially through the feed unit, the microchannel array layer, and the discharge unit, and is finally discharged from the waste end of the discharge unit, thus completing the microfluidic reaction.
[0011] Preferably, the axial directions of the microfluidic inlet and microfluidic outlet of the "S-shaped" microfluidic channel subarray layer are perpendicular to the plane of the "S-shaped" microfluidic channel array layer.
[0012] Preferably, in S2, the multiple "S-shaped" microfluidic channel subarray layers are arranged in a matrix array.
[0013] Preferably, the reaction medium is in the form of a gas or a liquid.
[0014] Preferably, when the reaction medium is a gas, the channel width of the "S-shaped" microchannel subarray layer is 5~25μm; When the reaction medium is a liquid, the channel width of the "S-shaped" microchannel subarray layer is 20~50μm.
[0015] The beneficial effects of the technical solution provided in this application include: This application provides a fabrication apparatus and method for a spectral gradient filter array. It can utilize a chemical reaction confined by an "S-shaped" microchannel to fabricate a spectral modulation material with a gradient in a sub-region. By confining the space with a two-dimensional array, a spectral gradient filter array is fabricated on a filter substrate, thereby achieving the fabrication of a spectral gradient filter array in one step. This effectively solves the problem of local ion concentration imbalance and ensures the consistency of the spectral gradient of the filter array, while significantly reducing the complexity and cost of the fabrication process. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 A flowchart illustrating the fabrication method of the spectral gradient filter array provided in this application; Figure 2 This is a schematic diagram of the fabrication apparatus for the spectral gradient filter array provided in Embodiment 1 of this application; Figure 3 This is an exploded view of the fabrication apparatus for the spectral gradient filter array provided in Embodiment 1 of this application; Figure 4 This is a schematic diagram of the internal structure of the microfluidic chip template provided in Embodiment 1 of this application; Figure 5 for Figure 4 A schematic diagram after flipping to the bottom (where the "S-shaped" microchannel array layer is located); Figure 6 A schematic diagram of the flow direction of the reaction medium during the microfluidic reaction in Embodiment 1 provided for this application; Figure 7 This is a schematic diagram of the changes in the filter array substrate before and after the microfluidic reaction. From left to right, these are the changes before, during, and after the reaction.
[0018] In the diagram: 1. Microfluidic chip template; 2. Filter array substrate; 3. "S-shaped" microchannel array layer; 4. "S-shaped" microchannel subarray layer; 401. Microfluidic inlet; 402. Microfluidic outlet; 5. Feeding unit; 501. Feeding end; 502. Discharge end; 6. Discharge unit; 601. Return end; 602. Waste end. Detailed Implementation
[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0020] See Figures 1-7 As shown, this application provides a fabrication apparatus and method for a spectral gradient filter array.
[0021] Example This invention provides a method for fabricating a spectral gradient filter array, which includes the following steps: S1. Fabrication of a single-material filter array substrate 2: A one-step spin coating method was used to spin-coat the perovskite precursor solution onto the glass substrate, so that the solution was evenly spread on the surface of the glass substrate: the perovskite precursor solution was spread on the glass substrate and spin-coating was started. First, spin-coating was carried out at 500 r / min for 5 s, and then at 3000 r / min for 40 s. At the 20th second of spin-coating, chlorobenzene anti-solvent was quickly added dropwise. After spin coating, the film was placed on a hot plate at 100°C and annealed for 10 minutes to form a perovskite film. The perovskite thin film was etched according to a pre-designed pattern using ion beam etching technology to form the filter array substrate 2. The ion beam energy was 500 eV, the etching time was 20 minutes, and the etching process was carried out in a vacuum environment with a vacuum degree of 10. -4 Pa.
[0022] S2. A microfluidic chip template 1 containing an "S-shaped" microchannel array layer 3 is fabricated using 3D printing, wherein the width of the "S-shaped" microchannel is 10 μm. See [link to documentation]. Figure 4 and Figure 5 As shown, the template surface is a semi-closed microchannel array layer. The "S-shaped" microchannel array layer 3 includes four "S-shaped" microchannel sub-array layers 4, which are arranged in a matrix array (e.g., Figure 3 As shown, all are 3x3 subarrays. Figure 3 The area within the dashed box represents a 3x3 subarray. Specifically, in combination Figures 2-4 as well as Figure 6 As shown, the "S-shaped" microchannel array layer 3 is used to bond the filter array substrate 2. The end of the "S-shaped" microchannel array layer 3 away from the filter array substrate 2 is connected to a microfluidic reaction system. The microfluidic reaction system and the "S-shaped" microchannel array layer 3 are connected through a connecting component.
[0023] Meanwhile, this embodiment provides the specific structure of the fabrication apparatus for a spectral gradient filter array: the fabrication apparatus includes a filter array substrate and a microfluidic chip template, wherein the specific structure of the microfluidic chip template 1 is as follows: See Figure 4 and Figure 5 As shown, each “S-shaped” microfluidic channel subarray layer 4 has a microfluidic inlet 401 and a microfluidic outlet 402 at both ends, and is located at the diagonal position of the “S-shaped” microfluidic channel subarray layer 4.
[0024] The connecting assembly includes a feeding unit 5 and a discharging unit 6, wherein the feeding unit 5 includes a feeding end 501 and a discharging end 502, and the feeding unit 5 has a three-branch structure, such as... Figure 4 As shown, the discharge end 502 is connected to the microfluidic inlet 401 of the four “S-shaped” microfluidic channel subarray layers 4 through a branch structure; the discharge unit 6 includes a return end 601 and a waste end 602, and the discharge unit 6 has three branch structures. The return end 601 is connected to the microfluidic outlet 402 of the four “S-shaped” microfluidic channel subarray layers 4 through the branch structure.
[0025] That is, the microfluidic inlet 401 is connected to the discharge end 502, the microfluidic outlet 402 is connected to the return end 601, and the axial direction of the microfluidic inlet 401 and the microfluidic outlet 402 is perpendicular to the plane where the “S-shaped” microfluidic channel array layer 3 is located.
[0026] The microfluidic chip template 1 has multiple "Y-shaped" branching structures inside. The microfluidic inlets 401 of all the "S-shaped" microfluidic channel subarray layers 4 are finally connected to the outlet end 502 through the "Y-shaped" branching structures and gathered to the feed end 501 (not the feeding direction, but the structure of the template). The microfluidic outlets of all the "S-shaped" microfluidic channel subarray layers 4 are finally gathered to the waste end 602 through the return end 601 via the "Y-shaped" branching structures.
[0027] S3. Prepare the reaction solution and carry out the microfluidic reaction between the filter array substrate 2 and the reaction solution. After reacting for 10 minutes, remove the filter, clean and dry it to obtain the spectral gradient filter array. The "S-shaped" microchannel array layer 3 of the microfluidic chip template 1 is bonded and pressed tightly with the filter array substrate 2 to form a closed reaction channel; See Figure 6 As shown, the reaction medium is pumped into the feed unit 5 through the microfluidic reaction system. The reaction medium flows through the feed unit 5, the microchannel array layer, and the discharge unit 6 in sequence, and is finally discharged from the waste end 602 through the microfluidic reaction system, thus completing the microfluidic reaction.
[0028] See Figure 2 and Figure 3 As shown, it is a schematic diagram of the connection between the filter array substrate 2 and the reaction solution in a microfluidic reaction. Figure 2 After the filter array substrate 2 is bonded and pressed tightly with the microchannel array template, the reaction medium (gas) is slowly pumped into the feed end 501 of the microchannel array template, while the reaction waste gas is slowly pumped out from the waste end 602 of the microchannel array template. The filter array substrate 2 and the reaction solution will gradually undergo a chemical reaction. After reacting for 10 minutes, the filter is removed, cleaned and dried to obtain a spectral gradient filter array.
[0029] Specifically: A hydrobromic acid-acetic acid solution (HBr solution dissolved in acetic acid at a weight ratio of 33%) is used, leveraging its high-speed evaporation properties as the gas source for the exchange reaction. After the MAPbI3 thin film substrate is bonded and pressed tightly to the "S-shaped" microchannel array layer 3 of the microchannel array template, it is connected to the microfluidic reaction system. The volatilized HBr gas is slowly pumped into the inlet of the "S-shaped" microchannel sub-array layer 4 via the feed unit 5, while the reaction waste gas is slowly pumped out of the outlet of the "S-shaped" microchannel sub-array layer 4 via the discharge unit 6. The MAPbI3 on the filter array substrate 2 and the HBr gas in the microchannel will gradually undergo anion exchange reactions. The HBr gas is gradually consumed in the microchannel, its concentration decreasing along the gas flow direction, thus reducing the reaction rate. At different positions along each "S"-shaped microchannel sub-array layer, the reaction yields reaction products (MAPbI3) with different anion ratios. x Br 3-x (The x-value gradually changes from 0 to 1 along the microchannel direction). After a period of reaction, the following result is obtained: Figure 7 The array of spectral gradient filters shown.
[0030] It should be noted that this application does not impose specific requirements on the structural design of the microchannel array template (e.g., using 5*5 or 7*7 subarrays instead of 3*3 subarrays, having a larger number of subarrays, using 3-branch or 4-branch structures instead of Y-shaped branch structures, etc.), does not limit the material type of the filter array substrate 2, and the specific chemical reaction is not limited to the anion exchange reaction between MAPbI3 and HBr gas. Furthermore, the degree of curvature of the microchannels in the "S-shaped" microchannel subarray layer 4 is described in [reference needed]. Figure 4 and Figure 5 As shown, the angle is preferably 90°.
[0031] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.
Claims
1. An apparatus for fabricating a spectral gradient filter array, characterized in that, It includes a filter array substrate and a microfluidic chip template; The microfluidic chip template includes: A connecting component includes a feeding unit and a discharging unit, wherein the feeding unit includes a feeding end and a discharging end, and the discharging unit includes a return end and a waste end; An "S-shaped" microchannel array layer is disposed between the feeding unit and the discharging unit; The feeding unit is connected to the microfluidic reaction system through the feeding end and to the "S-shaped" microchannel array layer through the discharge end; the discharge unit is connected to the "S-shaped" microchannel array layer through the return end, and the waste end of the discharge unit discharges waste through the microfluidic reaction system.
2. A method for fabricating a spectral gradient filter array, characterized in that, The spectral gradient filter array is fabricated using the fabrication apparatus for the spectral gradient filter array described in claim 1, and the fabrication method includes the following steps: S1. Fabrication of a single-material filter array substrate: Single-material filter substrates are prepared by spin coating or inkjet printing, and single-material filter array substrates are formed by electron beam or ion beam etching. S2. A microfluidic chip template containing an "S-shaped" microchannel array layer is prepared by 3D printing. The "S-shaped" microchannel array layer includes 2n "S-shaped" microchannel sub-array layers, where n is an integer ≥ 1. The channel width of the "S-shaped" microchannel subarray layer is 5~50μm; S3. Prepare the reaction medium and carry out the microfluidic reaction between the filter array substrate and the reaction solution. After reacting for 5~60 minutes, remove the filter array substrate, clean and dry it to obtain a spectral gradient filter array.
3. The method for fabricating a spectral gradient filter array as described in claim 2, characterized in that: The "S-shaped" microchannel array layer is used to bond the filter array substrate; The feeding unit includes at least one branch structure, and the discharge end is connected to at least two of the "S-shaped" microfluidic channel subarray layers through the branch structure. The discharge unit includes at least one branch structure, and the return end is connected to at least two of the "S-shaped" microchannel subarray layers through the branch structure. An "S-shaped" microfluidic channel subarray layer includes a microfluidic inlet and a microfluidic outlet. The microfluidic inlet is connected to the discharge end, and the microfluidic outlet is connected to the return end. The microfluidic inlet and microfluidic outlet are located at the endpoints of the diagonal of the "S-shaped" microfluidic channel subarray.
4. The method for fabricating a spectral gradient filter array as described in claim 3, characterized in that: The branch structure is a "Y-shaped" branch convergence structure. The discharge end is connected to at least two of the "S-shaped" microfluidic channel sub-array layers through the "Y-shaped" branch convergence structure. The return end is connected to at least two of the "S-shaped" microfluidic channel sub-array layers through the "Y-shaped" branch convergence structure.
5. The method for fabricating a spectral gradient filter array as described in claim 3, characterized in that: The axial directions of the microfluidic inlet and microfluidic outlet of the "S-shaped" microfluidic channel subarray layer are perpendicular to the plane of the "S-shaped" microfluidic channel array layer.
6. The method for fabricating a spectral gradient filter array as described in claim 2, characterized in that: In step S3, the microfluidic reaction between the filter array substrate and the reaction solution includes the following steps: The "S-shaped" microchannel array layer of the microfluidic chip template is bonded and pressed tightly with the filter array substrate to form a closed reaction channel; The reaction medium is pumped into the feed unit through the microfluidic reaction system. The reaction medium flows sequentially through the feed unit, the "S-shaped" microchannel array layer, and the discharge unit, and is finally discharged from the waste end of the discharge unit, thus completing the microfluidic reaction.
7. The method for fabricating a spectral gradient filter array as described in claim 2, characterized in that: In S2, multiple "S-shaped" microfluidic channel subarray layers are arranged in a matrix array.
8. The method for fabricating a spectral gradient filter array as described in claim 2, characterized in that: The reaction medium is in the form of a gas or a liquid.
9. The method for fabricating a spectral gradient filter array as described in claim 8, characterized in that: When the reaction medium is a gas, the channel width of the "S-shaped" microchannel subarray layer is 5~25μm; When the reaction medium is a liquid, the channel width of the "S-shaped" microchannel subarray layer is 20~50μm.