Frame aggregation for multi-beam raster scanning microscope

By employing image acquisition and parallel processing techniques from a multi-beam particle grating scanning microscope, the distortion and blurring problems caused by image drift were resolved, enabling the generation of high-resolution, high-signal-to-noise-ratio composite images and improving data processing efficiency.

CN122422904APending Publication Date: 2026-07-17CARL ZEISS MULTISEM GMBH
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Patent Information

Application Number
CN202480080613.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-12-20
Filing Date
2024-11-19
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In multi-beam particle grating scanning microscopy, image drift-induced distortion and blurring, especially inaccurate alignment and artifact formation during frame averaging, affect the quality of composite images.

Method used

By controlling a multi-beam particle grating scanning microscope to simultaneously acquire image sequences from multiple fields of view, determining image registration parameter values, and performing image registration based on spatial and temporal neighborhood relationships, applying filters to discard noisy images, and employing super-resolution algorithms and parallel computing techniques, efficient image aggregation and stitching are achieved.

Benefits of technology

It improves image resolution and signal-to-noise ratio, reduces artifacts, enables higher quality composite image generation, and increases data throughput and processing speed.

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Abstract

各种示例涉及用于多光束光栅扫描显微镜的多个图像(1051、1052、1053、154)的帧聚合。如果需要,可以评估和调整图像配准参数。这产生更好的图像配准,导致整体复合图像的更好质量。
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Citation Information

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