Zinc tin oxide transparent electrothermal material and preparation method and application thereof

By using zinc tin oxide transparent electrothermal thin films and roll-to-roll magnetron sputtering technology, the problems of high cost, difficulty in balancing light transmittance and conductivity, and low production efficiency of transparent electrothermal materials have been solved. This has resulted in high light transmittance, high electrothermal stability, and ease of industrial production, making it suitable for fields such as construction, transportation, and electronic display panels.

CN122640872APending Publication Date: 2026-08-25CHINA CONSTR EIGHT ENG DIV CORP LTD
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Patent Information

Application Number
CN202610701210.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-05-20
Publication Date
2026-08-25

AI Technical Summary

Technical Problem

Existing transparent electrothermal materials suffer from high cost, difficulty in balancing light transmittance and conductivity, low production efficiency, and poor consistency, making it difficult to meet the needs of high-end applications.

Method used

A transparent electrothermal thin film made of zinc tin oxide (ZTO) is used. The film is composed of zinc oxide and tin oxide in a specific molar ratio. Combined with roll-to-roll magnetron sputtering, oxygen sputtering and air annealing are introduced during the preparation process to form a stable thin film structure.

Benefits of technology

It achieves low cost, high light transmittance (≥85%), high electrothermal stability (resistance change rate ≤5% after 1000h of energization at 100℃, resistance change rate ≤8% after 100 temperature cycles from -40℃ to 80℃), and is easy to mass-produce in the industrial sector, making it suitable for various transparent heating scenarios.

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Abstract

This invention discloses a transparent zinc tin oxide (ZTO) electrothermal film comprising zinc oxide and tin oxide in a molar ratio of 6:4 to 8:2, with a film thickness of 50–200 nm. The film exhibits a transmittance ≥85% at 550 nm, a sheet resistance of 10–50 Ω / □, and resistivity changes of no more than 5% and 8% after 1000 h of energization at 100°C and 100 cycles at -40°C to 80°C, respectively. This invention also discloses a transparent electrothermal material containing this film, a method for preparing the material using roll-to-roll magnetron sputtering, and its application in transparent heating devices such as architectural glass, automotive windshields, electronic display panels, and medical equipment. This invention replaces expensive In with low-cost Zn / Sn, and through optimized target ratios, roll-to-roll sputtering in an oxygen-containing sputtering atmosphere, and an oxygen-containing atmosphere annealing process, achieves a balance between low cost, high electrothermal stability, high transmittance, and easy industrial mass production of the transparent electrothermal material.
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