Dehumidifier heat recovery device and silicon carbide production workshop air conditioning system

Abstract

According to the dehumidifier heat recovery device and the silicon carbide production workshop air conditioning system, a heat exchange pipeline is additionally arranged on a dehumidifier, when the heat exchange pipeline communicates with a heat exchanger, heat exchange can be conducted with a heat exchange coil of an existing workshop fresh air conditioner, and therefore heat of the dehumidifier is transferred to the fresh air conditioner, and the heat recovery efficiency of the dehumidifier is improved. The heat exchange pipeline is used for preheating inlet air of the fresh air conditioner, the requirement that the fresh air conditioner needs to heat air in the low-temperature environment is met, heat recovery of the dehumidifier is achieved, and the heating requirement of the fresh air conditioner is lowered; in this way, a medium in the heat exchange pipeline can absorb heat in the heat exchanger, the cooling effect on air in the dehumidification channel can be achieved, the refrigeration pipeline only needs to operate when the cooling effect of the heat exchange pipeline cannot meet the requirement, the operation duration of the refrigeration pipeline can be shortened, the load is reduced, and energy saving is achieved.

Description

Technical Field

[0001] The present application relates to the technical field of silicon carbide production, and in particular to a dehumidifier heat recovery device and an air conditioning system for a silicon carbide production workshop. Background Art

[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances.

[0003] Existing silicon carbide production workshops generally use dehumidifiers for dehumidification before air enters. Since the temperature of the dehumidifier's moisture absorption zone is high after high-temperature regeneration, the air passing through the dehumidifier's moisture absorption zone generally needs to be cooled by a refrigeration system before being sent into the workshop. The refrigeration system needs to run continuously, and the energy consumption is relatively high. Utility Model Content

[0004] The purpose of this application is to provide a dehumidifier heat recovery device and a silicon carbide production workshop air-conditioning system, which can reduce the operating time of the refrigeration pipeline, reduce the load, and achieve energy saving.

[0005] The embodiments of the present application can be implemented as follows:

[0006] In the first aspect, the utility model provides a dehumidifier heat recovery device, comprising a dehumidifier, a refrigeration pipeline and a heat exchange pipeline; the dehumidifier has a dehumidification channel and a heat exchanger located in the dehumidification channel; the refrigeration pipeline and the heat exchange pipeline are connected in parallel to the heat exchanger, the heat exchange pipeline is used to exchange heat with the heat exchange coil of the fresh air air conditioner, and the refrigeration pipeline is used to provide chilled water, wherein one of the heat exchange pipeline and the refrigeration pipeline is connected to the heat exchanger.

[0007] In an optional embodiment, the outlet and inlet of the heat exchanger are respectively connected to a first three-way valve and a second three-way valve, the inlet of the heat exchange pipeline and the inlet of the refrigeration pipeline are connected to the first three-way valve, the outlet of the heat exchange pipeline and the outlet of the refrigeration pipeline are respectively connected to the second three-way valve, and the first three-way valve and the second three-way valve are used to enable either the heat exchange pipeline or the refrigeration pipeline to be connected to the heat exchanger.

[0008] In an optional embodiment, the heat exchange pipeline includes a heat exchange pipe and a first opening and closing valve and a preheating coil arranged on the heat exchange pipe, the inlet end of the heat exchange pipe is connected to the outlet of the heat exchanger, the outlet end of the heat exchange pipe is connected to the inlet of the heat exchanger, and the preheating coil is used for heat exchange with the heat exchange coil of the fresh air air conditioner.

[0009] In an optional embodiment, there are two first on-off valves, and the preheating coil is located between the two first on-off valves.

[0010] In an optional embodiment, the refrigeration circuit includes a refrigeration pipe and a second on-off valve and a refrigerator arranged on the refrigeration pipe, the inlet end of the refrigeration pipe is connected to the outlet of the heat exchanger, and the outlet end of the refrigeration pipe is connected to the inlet of the heat exchanger.

[0011] In an optional embodiment, there are two second on-off valves, and the refrigerator is located between the two second on-off valves.

[0012] In an optional embodiment, a first temperature sensor is provided in the dehumidification channel at a position downstream of the moisture absorption zone, and the heat exchange pipeline has a second temperature sensor.

[0013] In an optional embodiment, there are two heat exchangers in the dehumidification channel, and the two heat exchangers are respectively located upstream and downstream of the moisture absorption zone in the dehumidification channel.

[0014] In an optional embodiment, the dehumidifier is a rotary dehumidifier, further comprising a rotary wheel and a regeneration channel, the rotary wheel is respectively the moisture absorption zone and the regeneration zone, and the regeneration zone is located in the regeneration channel;

[0015] The two heat exchangers are respectively a first heat exchanger and a second heat exchanger, and in the dehumidification channel, a first primary filter, the first heat exchanger, the moisture absorption zone, a first fan, a second heat exchanger, an air supply heater, a medium efficiency filter and a high efficiency filter are sequentially distributed;

[0016] In the regeneration channel, the second primary filter, the regeneration heater, the regeneration zone and the second fan are arranged in sequence.

[0017] In a second aspect, the utility model provides an air conditioning system for a silicon carbide production workshop, comprising a dehumidifier heat recovery device as described in any one of the aforementioned embodiments.

[0018] Compared with the prior art, the beneficial effects of the embodiments of the present application include, for example:

[0019] By adding a heat exchange pipeline to the dehumidifier, the heat exchange pipeline can exchange heat with the heat exchange coil of the fresh air air-conditioning in the existing workshop when it is connected to the heat exchanger, thereby transferring the heat of the dehumidifier to the fresh air air-conditioning to preheat the intake air of the fresh air air-conditioning, meet the requirement of the fresh air air-conditioning to heat the air in a low-temperature environment, realize heat recovery of the dehumidifier, and reduce the heating demand of the fresh air air-conditioning. In addition, the temperature of the medium in the heat exchange pipeline will decrease after transferring the heat to the fresh air air-conditioning. In this way, the medium in the heat exchange pipeline can absorb the heat in the heat exchanger, and can cool down the air in the dehumidification channel. In this way, the refrigeration pipeline only needs to operate when the cooling and cooling effect of the heat exchange pipeline cannot meet the requirements, which can reduce the operating time of the refrigeration pipeline, reduce the load, and achieve energy saving. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 This is a schematic diagram of a heat recovery device for a dehumidifier according to an embodiment of the present application;

[0022] Figure 2 This is a schematic diagram of the dehumidifier according to an embodiment of the present application.

[0023] Icons: 10-dehumidifier; 11-dehumidification channel; 110-heat exchanger; 111-first heat exchanger; 112-second heat exchanger; 113-first primary filter; 114-first fan; 115-air supply heater; 116-medium efficiency filter; 117-high efficiency filter; 12-rotor; 120-moisture absorption zone; 121-regeneration zone; 13-regeneration channel; 130-primary filter; 131-regeneration heater; 132-second fan; 20-refrigeration pipeline; 21-refrigeration pipeline; 22-second on-off valve; 23-refrigerator; 30-heat exchange pipeline; 31-heat exchange pipeline; 32-first on-off valve; 33-preheating coil; 40-first three-way valve; 50-second three-way valve. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0027] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0028] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0030] Combine the following Figure 1 and Figure 2 , some embodiments of the present application are described in detail. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0031] An embodiment of the present application discloses an air conditioning system for a silicon carbide production workshop, which includes a fresh air air conditioner and a dehumidifier heat recovery device.

[0032] The dehumidifier heat recovery device includes a dehumidifier 10, a refrigeration pipeline 20 and a heat exchange pipeline 30; the dehumidifier 10 has a dehumidification channel 11 and a heat exchanger 110 located in the dehumidification channel 11; the refrigeration pipeline 20 and the heat exchange pipeline 30 are connected in parallel to the heat exchanger 110, the heat exchange pipeline 30 is used to exchange heat with the heat exchange coil of the fresh air air conditioner, and the refrigeration pipeline 20 is used to provide chilled water, wherein one of the heat exchange pipeline 30 and the refrigeration pipeline 20 is connected to the heat exchanger 110.

[0033] In this way, the embodiment of the present application adds a heat exchange pipeline 30 to the dehumidifier 10. When the heat exchange pipeline 30 is connected to the heat exchanger 110, it can exchange heat with the heat exchange coil of the fresh air air conditioner in the existing workshop, thereby transferring the heat of the dehumidifier 10 to the fresh air air conditioner to preheat the intake air of the fresh air air conditioner, meet the requirement of the fresh air air conditioner to heat the air in a low temperature environment, realize heat recovery of the dehumidifier 10, and reduce the heating demand of the fresh air air conditioner. In addition, the temperature of the medium in the heat exchange pipeline 30 will decrease after transferring the heat to the fresh air air conditioner. In this way, the medium in the heat exchange pipeline 30 can absorb the heat in the heat exchanger 110, and can cool down the air in the dehumidification channel 11. In this way, the refrigeration pipeline 20 only needs to operate when the cooling and cooling effect of the heat exchange pipeline 30 cannot meet the requirements, which can reduce the operating time of the refrigeration pipeline 20, reduce the load, and achieve energy saving.

[0034] In detail, in order to achieve that either the heat exchange pipeline 30 or the refrigeration pipeline 20 can be connected to the heat exchanger 110, a first three-way valve 40 and a second three-way valve 50 are respectively connected to the outlet and the inlet of the heat exchanger 110, the inlet of the heat exchange pipeline 30 and the inlet of the refrigeration pipeline 20 are connected to the first three-way valve 40, and the outlet of the heat exchange pipeline 30 and the outlet of the refrigeration pipeline 20 are respectively connected to the second three-way valve 50. In this way, the first three-way valve 40 and the second three-way valve 50 can be used to achieve that either the heat exchange pipeline 30 or the refrigeration pipeline 20 can be connected to the heat exchanger 110.

[0035] Specifically, the outlet of the heat exchanger 110 is connected to the A port of the first three-way valve 40, the B port of the first three-way valve 40 is connected to the inlet of the refrigeration pipeline 20, and the C port of the first three-way valve 40 is connected to the inlet of the heat exchange pipeline 30; the A port of the second three-way valve 50 is connected to the outlet of the refrigeration pipeline 20, the B port of the second three-way valve 50 is connected to the inlet of the heat exchanger 110, and the C port of the second three-way valve 50 is connected to the outlet of the heat exchange pipeline 30.

[0036] In this way, when the A port and the B port of the first three-way valve 40 are connected and the C port is blocked, and the A port and the B port of the second three-way valve 50 are connected and the C port is blocked, the refrigeration pipeline 20 is connected to the heat exchanger 110 and the heat exchange pipeline 30 is blocked from the heat exchanger 110, and the refrigeration pipeline 20 is operated to cool the air in the dehumidification channel 11 through the refrigeration pipeline 20. When the A port and the C port of the first three-way valve 40 are connected and the B port is blocked, and the B port and the C port of the second three-way valve 50 are connected and the A port is blocked, the heat exchange pipeline 30 is connected to the heat exchanger 110 and the refrigeration pipeline 20 is blocked from the heat exchanger 110, and the heat exchange pipeline 30 is operated to transfer the heat of the air in the dehumidification channel 11 to the heat exchange coil of the fresh air air conditioner.

[0037] In this embodiment, the heat exchange pipeline 30 includes a heat exchange pipeline 31 and a first on-off valve 32 and a preheating coil 33 arranged on the heat exchange pipeline 31. The inlet end of the heat exchange pipeline 31 is connected to the C port of the first three-way valve 40, that is, the inlet end of the heat exchange pipeline 31 is connected to the outlet of the heat exchanger 110 through the first three-way valve 40, and the outlet end of the heat exchange pipeline 31 is connected to the B port of the second three-way valve 50, that is, the outlet end of the heat exchange pipeline 31 is connected to the inlet of the heat exchanger 110 through the second three-way valve 50. The preheating coil 33 is used to perform heat exchange with the heat exchange coil of the fresh air air conditioner, and the first on-off valve 32 can control the conduction or cutoff of the heat exchange pipeline 31 to more accurately control whether the medium enters the preheating coil 33.

[0038] Optionally, there are two first on-off valves 32, and the preheating coil 33 is located between the two first on-off valves 32. In this way, the medium can enter the preheating coil 33 or be discharged from the preheating coil 33 only when the A port and the C port of the first three-way valve 40 are connected and the B port is blocked, and the B port and the C port of the second three-way valve 50 are connected and the A port is blocked, and the two first on-off valves 32 are opened, so as to achieve more precise control.

[0039] There are two heat exchangers 110 in the dehumidification channel 11 of this embodiment, and the two heat exchangers 110 are respectively located upstream and downstream of the dehumidification zone 120 in the dehumidification channel 11. In this way, the heat exchange pipeline 30 and the refrigeration pipeline 20 can not only cool down the air after passing through the dehumidification zone 120, but also cool down the air that has not passed through the dehumidification zone 120.

[0040] Optionally, the dehumidifier 10 is a rotary wheel 12-type dehumidifier 10, further including a rotary wheel 12 and a regeneration channel 13, the rotary wheel 12 respectively including a moisture absorption zone 120 and a regeneration zone 121, and the regeneration zone 121 is located in the regeneration channel 13; the two heat exchangers 110 are respectively a first heat exchanger 111 and a second heat exchanger 112, and in the dehumidification channel 11, a first primary filter 113, a first heat exchanger 111, a moisture absorption zone 120, a first fan 114, a second heat exchanger 112, an air supply heater 115, a medium efficiency filter 116 and a high efficiency filter 117 are distributed in sequence; in the regeneration channel 13, a second primary filter 130, a regeneration heater 131, a regeneration zone 121 and a second fan 132 are arranged in sequence.

[0041] Among them, the primary filter 130 is the first line of defense, mainly used to capture larger dust particles, hair, dandruff, insects and other coarse particles in the air. It can adopt the filtration efficiency grade of G4. G4 usually refers to a filtration efficiency grade of primary air filters that meet the European EN779 standard. "G" means that the filter belongs to the "coarse efficiency" (Grau) category, that is, the primary filter 130, which mainly filters larger particles. "4" is the efficiency grade number of this type of filter, indicating its filtration efficiency. In the EN779 standard, the G4 grade requires that the gravimetric efficiency (Arrestance) of particles ≥1.0μm reaches at least 70%, that is, it can capture at least 70% of particles with a particle size of 1.0μm and above in the air.

[0042] The medium efficiency filter 116 is mainly used to capture smaller dust particles in the air, such as pollen, smoke, bacteria, some virus carriers, etc. The filtration efficiency level of F8 can be used. F8 usually refers to a filtration efficiency level of primary air filters that meet the European EN779 standard. "F" means that the filter belongs to the "fine efficiency" (Fein) category, that is, the medium efficiency filter 116, which mainly filters smaller particles. "8" is the efficiency grade number of this type of filter, indicating its filtration efficiency. In the EN779 standard, the F8 grade requires that the weight efficiency (Arrestance) of particles ≥1.0μm reaches at least 80%, and the counting efficiency (Efficiency) of particles ≥0.4μm reaches at least 80%, that is, it can capture at least 80% of particles with a particle size of 1.0μm and above and a particle size of 0.4μm and above in the air.

[0043] The high-efficiency filter 117 is mainly used to capture tiny dust particles, bacteria, viruses, aerosols and other tiny particles in the air. It can use the filtration efficiency level of H13, which refers to a filtration efficiency level of high-efficiency air filters (HEPA filters) that meet the European EN1822 standard. "H" means that the filter belongs to the "High Efficiency" category, that is, the HEPA filter, which mainly filters very small particles. "13" is the efficiency grade number of this type of filter, indicating its filtration efficiency. In the EN1822 standard, the H13 grade requires that the counting efficiency (Efficiency) of particles ≥0.12μm reaches at least 99.95%, that is, it can capture at least 99.95% of particles with a particle size of 0.12μm and above in the air.

[0044] In this embodiment, the refrigeration pipeline 20 includes a refrigeration pipeline 21, a second on-off valve 22 and a refrigerator 23 arranged on the refrigeration pipeline 21, the inlet end of the refrigeration pipeline 21 is connected to the B port of the first three-way valve 40, that is, the inlet end of the refrigeration pipeline 21 is connected to the outlet of the heat exchanger 110 through the first three-way valve 40, and the outlet end of the refrigeration pipeline 21 is connected to the A port of the second three-way valve 50, that is, the outlet end of the refrigeration pipeline 21 is connected to the inlet of the heat exchanger 110 through the second three-way valve 50. The second on-off valve 22 can control the conduction or cutoff of the refrigeration pipeline 21 to more accurately control whether the medium enters the refrigerator 23.

[0045] Optionally, there are two second on-off valves 22, and the refrigerator 23 is located between the two second on-off valves 22. In this way, the medium can enter the refrigerator 23 or be discharged from the refrigerator 23 only when the A port and the B port of the first three-way valve 40 are connected and the C port is blocked, and the A port and the B port of the second three-way valve 50 are connected and the C port is blocked, and when the two second on-off valves 22 are open, so as to achieve more precise control.

[0046] Of course, in order to more accurately control the selective operation of the heat exchange pipeline 30 and the refrigeration pipeline 20, a first temperature sensor is arranged in the dehumidification channel 11 at a position downstream of the moisture absorption zone 120, and a second temperature sensor is arranged on the heat exchange pipe 31 of the heat exchange pipeline 30. In this way, the conduction mode of the three-way valve and the opening and closing properties of the on-off valve can be accurately controlled by the detection results of the first temperature sensor and the second temperature sensor.

[0047] For example, when the first temperature value detected by the first temperature sensor is higher than the second temperature value detected by the second temperature sensor by a preset difference of 6°C, 7°C, 8°C, 9°C or 10°C, the heat exchange pipeline 30 runs and the refrigeration pipeline 20 stops. Conversely, when the first temperature value is not higher than the second temperature value by the preset difference, the refrigeration pipeline 20 runs.

[0048] In summary, this embodiment adds a heat exchange pipeline 30 to the dehumidifier 10. When the heat exchange pipeline 30 is connected to the heat exchanger 110, it can exchange heat with the heat exchange coil of the fresh air air conditioner in the existing workshop, thereby transferring the heat of the dehumidifier 10 to the fresh air air conditioner to preheat the intake air of the fresh air air conditioner, meet the requirement of the fresh air air conditioner to heat the air in a low temperature environment, realize heat recovery of the dehumidifier 10, and reduce the heating demand of the fresh air air conditioner. In addition, the temperature of the medium in the heat exchange pipeline 30 will decrease after transferring the heat to the fresh air air conditioner. In this way, the medium in the heat exchange pipeline 30 can absorb the heat in the heat exchanger 110, and can cool down the air in the dehumidification channel 11. In this way, the refrigeration pipeline 20 only needs to operate when the cooling and cooling effect of the heat exchange pipeline 30 cannot meet the requirements, which can reduce the operating time of the refrigeration pipeline 20, reduce the load, and achieve energy saving.

[0049] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A dehumidifier heat recovery device, characterized in that: The invention comprises a dehumidifier (10), a refrigeration pipeline (20) and a heat exchange pipeline (30); the dehumidifier (10) has a dehumidification channel (11) and a heat exchanger (110) located in the dehumidification channel (11); the refrigeration pipeline (20) and the heat exchange pipeline (30) are connected in parallel to the heat exchanger (110); the heat exchange pipeline (30) is used for heat exchange with a heat exchange coil of a fresh air air conditioner; the refrigeration pipeline (20) is used for providing chilled water; wherein one of the heat exchange pipeline (30) and the refrigeration pipeline (20) is connected to the heat exchanger (110).

2. The dehumidifier heat recovery device according to claim 1, characterized in that: The outlet and the inlet of the heat exchanger (110) are respectively connected to a first three-way valve (40) and a second three-way valve (50); the inlet of the heat exchange pipeline (30) and the inlet of the refrigeration pipeline (20) are connected to the first three-way valve (40); the outlet of the heat exchange pipeline (30) and the outlet of the refrigeration pipeline (20) are respectively connected to the second three-way valve (50); the first three-way valve (40) and the second three-way valve (50) are used to enable the heat exchange pipeline (30) and the refrigeration pipeline (20) to selectively communicate with the heat exchanger (110).

3. The dehumidifier heat recovery device according to claim 2, characterized in that: The heat exchange pipeline (30) comprises a heat exchange pipeline (31), a first on-off valve (32) and a preheating coil (33) arranged on the heat exchange pipeline (31); the inlet end of the heat exchange pipeline (31) is connected to the outlet of the heat exchanger (110); the outlet end of the heat exchange pipeline (31) is connected to the inlet of the heat exchanger (110); and the preheating coil (33) is used for performing heat exchange with the heat exchange coil of the fresh air air conditioner.

4. The dehumidifier heat recovery device according to claim 3, characterized in that: There are two first on-off valves (32), and the preheating coil (33) is located between the two first on-off valves (32).

5. The dehumidifier heat recovery device according to claim 2, characterized in that: The refrigeration pipeline (20) comprises a refrigeration pipeline (21), a second on-off valve (22) and a refrigerator (23) arranged on the refrigeration pipeline (21); the inlet end of the refrigeration pipeline (21) is connected to the outlet of the heat exchanger (110), and the outlet end of the refrigeration pipeline (21) is connected to the inlet of the heat exchanger (110).

6. The dehumidifier heat recovery device according to claim 5, characterized in that: There are two second on-off valves (22), and the refrigerator (23) is located between the two second on-off valves (22).

7. The dehumidifier heat recovery device according to claim 1, characterized in that: A first temperature sensor is arranged in the dehumidification channel (11) at a position downstream of the moisture absorption zone (120), and the heat exchange pipeline (30) has a second temperature sensor.

8. The dehumidifier heat recovery device according to claim 1, characterized in that: The dehumidification channel (11) has two heat exchangers (110), and the two heat exchangers (110) are respectively located upstream and downstream of the moisture absorption zone (120) in the dehumidification channel (11).

9. The dehumidifier heat recovery device according to claim 8, characterized in that: The dehumidifier (10) is a rotary wheel (12) type dehumidifier (10), further comprising a rotary wheel (12) and a regeneration channel (13), wherein the rotary wheel (12) is respectively divided into the moisture absorption zone (120) and the regeneration zone (121), and the regeneration zone (121) is located in the regeneration channel (13); The two heat exchangers (110) are respectively a first heat exchanger (111) and a second heat exchanger (112); in the dehumidification channel (11), a first primary filter (113), the first heat exchanger (111), the moisture absorption zone (120), a first fan (114), the second heat exchanger (112), an air supply heater (115), a medium efficiency filter (116) and a high efficiency filter (117) are sequentially distributed; In the regeneration channel (13), the second primary filter (130), the regeneration heater (131), the regeneration zone (121) and the second fan (132) are arranged in sequence.

10. An air conditioning system for a silicon carbide production workshop, characterized in that: It comprises the dehumidifier heat recovery device as described in any one of claims 1-9.

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