A multi-piece independent shutter device

Abstract

The utility model relates to vacuum coating equipment technical field especially relates to a kind of multi-piece independent baffle device, including rotating sample stage, lifting driving part and multiple baffle assembly;Lifting driving part is located above rotating sample stage, and the output end of lifting driving part is connected with the upper pin shaft of the downward arrangement;Baffle assembly includes rotating lower pin shaft and baffle, and the below of rotating sample stage is connected with supporting plate, rotating lower pin shaft penetrates and is rotatably connected on supporting plate, and the bottom of rotating lower pin shaft is connected with baffle, and the top of rotating lower pin shaft extends and is provided with rotating handle inwardly;Baffle assembly rotates with rotating sample stage, when needing to open and close baffle, lifting driving part drives upper pin shaft to move down, rotating lower pin shaft contacts with upper pin shaft, and upper pin shaft pushes rotating lower pin shaft to rotate, to realize the separate opening and closing of baffle, to be suitable for the situation that substrate needs partial shielding.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a multi-plate independent baffle device. Background Technology

[0002] A rotating sample stage device for vacuum coating typically includes a vacuum chamber, a drive unit, a rotating sample stage, and a baffle. The vacuum chamber provides the vacuum environment required for coating; the drive unit is located above the chamber and drives the rotating sample stage to rotate; a substrate can be mounted on the rotating sample stage; and the baffle is located below the sample clamping section to shield the substrate during the coating process.

[0003] In the field of vacuum coating equipment technology, as the manufacturing industry's requirements for coated products increase, the problems of traditional baffle devices are becoming increasingly prominent.

[0004] In vacuum coating operations, under normal circumstances, only one baffle is set up. Therefore, it can only control the baffle to completely block the vacuum coating operation or not block it at all, which is not suitable for situations that require partial blocking. Even if a half-baffle or a four-piece baffle is used, it usually rotates synchronously, that is, it either completely blocks or does not block at all, which is also not suitable for situations that require partial blocking.

[0005] If the coating area cannot be precisely controlled, product performance will be affected. Therefore, developing a device that can open and close the baffle independently and is suitable for partial substrate shading has become a key problem that urgently needs to be solved in this field. Utility Model Content

[0006] To address the shortcomings of existing technologies, this invention develops a multi-plate independent baffle device. This invention achieves the independent opening and closing of each baffle by using the coordinated movement of an upper pin and a rotating lower pin to drive the rotating lower pin, thus making it suitable for situations where the substrate needs to be partially shaded.

[0007] The technical solution to the technical problem solved by this utility model is as follows:

[0008] This application provides a multi-piece independent baffle device, including a rotating sample stage, a lifting drive component, and multiple sets of baffle assemblies;

[0009] The lifting drive is located above the rotating sample stage, and the output end of the lifting drive is connected to an upper pin shaft facing downward.

[0010] Each baffle assembly includes a rotating lower pin and a baffle. A support plate is connected below the rotating sample stage. The rotating lower pin passes through and is rotatably connected to the support plate. The bottom end of the rotating lower pin is connected to the baffle. A rotating handle is provided on the top end of the rotating lower pin extending inward.

[0011] The baffle assembly rotates together with the rotating sample stage. When the baffle needs to be opened or closed, the lifting drive drives the upper pin to move down. The rotating lower pin rotates with the rotating sample stage and comes into contact with the upper pin. The upper pin pushes the rotating lower pin to rotate due to the relative movement of the two, thereby realizing the individual opening and closing of each baffle.

[0012] As an improvement to the above solution, the rotating lower pin is connected through a self-lubricating bearing to the edge of the support plate.

[0013] As an improvement to the above solution, the multi-plate independent baffle device further includes a rotary drive component, which drives the rotating sample stage to rotate.

[0014] As an improvement to the above solution, the multi-plate independent baffle device further includes a vacuum chamber, and the rotary drive and the lifting drive are installed together above the vacuum chamber via a sealing flange.

[0015] As an improvement to the above solution, the rotary drive includes a servo motor and a rotating shaft. The servo motor is connected to the rotating shaft via a synchronous belt and a synchronous pulley. The rotating shaft is connected to the sealing flange via a bearing seat and extends into the vacuum chamber. Its bottom end is fixedly connected to the rotating sample stage.

[0016] As an improvement to the above solution, the lifting drive component is a telescopic cylinder.

[0017] As an improvement to the above solution, the end of the baffle connected to the rotating lower pin is provided with an installation groove, and a spring positioning pin is installed in the installation groove. The spring positioning pin includes a pin body, a spring and a positioning ball. The spring is embedded in the pin body and the positioning ball is connected to the upper end of the spring. The bottom surface of the support plate is provided with multiple positioning grooves that are adapted to the top of the positioning ball. The positioning ball moves into the positioning groove to achieve the positioning of the baffle.

[0018] As an improvement to the above solution, the number of baffle assemblies is four. When all four baffles are in the closed state, the four baffles work together to completely cover the substrate on the rotating sample stage.

[0019] Compared with existing technologies, the above solution has the following advantages or beneficial effects:

[0020] This application utilizes a lifting drive component to drive an upper pin shaft, which works in conjunction with a rotating lower pin shaft to rotate, thereby causing the baffle to open and close independently. This design can precisely control the shielding range, achieving both complete and partial shielding of the substrate, meeting the diverse coating needs of different products and improving the applicability of the device. Attached Figure Description

[0021] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0022] Figure 1 This is a schematic diagram of the multi-piece independent baffle device in this embodiment.

[0023] Figure 2 This is a schematic diagram of the structure of the multi-plate independent baffle device in this embodiment when all four baffles are open. Figure 1 .

[0024] Figure 3 This is a schematic diagram of the structure of the multi-plate independent baffle device in this embodiment when all four baffles are open. Figure 2 .

[0025] Figure 4 This is a schematic diagram of the structure of the multi-plate independent baffle device involved in this embodiment when one baffle is closed. Figure 1 .

[0026] Figure 5 This is a schematic diagram of the structure of the multi-plate independent baffle device involved in this embodiment when one baffle is closed. Figure 2 .

[0027] Figure 6 This is a schematic diagram of the structure of the multi-plate independent baffle device involved in this embodiment when two baffles are closed. Figure 1 .

[0028] Figure 7 This is a schematic diagram of the structure of the multi-plate independent baffle device involved in this embodiment when two baffles are closed. Figure 2 .

[0029] Figure 8 This is a partial structural schematic diagram of the multi-piece independent baffle device involved in this embodiment.

[0030] Figure 9 This is a schematic diagram of the baffle assembly involved in this embodiment.

[0031] Figure 10 This is a schematic diagram of the spring positioning pin involved in this embodiment.

[0032] In the diagram: A. Vacuum chamber; 1. Rotary sample stage; 2. Baffle assembly; 21. Rotating lower pin; 22. Rotating handle; 23. Baffle; 231. First baffle; 232. Second baffle; 233. Third baffle; 234. First baffle; 3. Support plate; 4. Telescopic cylinder; 5. Upper pin; 6. Rotary drive component; 61. Servo motor; 62. Rotating shaft; 63. Synchronous belt; 64. Synchronous belt pulley; 65. Bearing seat; 7. Sealing flange; 8. Spring positioning pin; 81. Pin body; 82. Positioning ball; 9. Positioning groove. Detailed Implementation

[0033] To clearly illustrate the technical features of this solution, the present invention will be described in detail below through specific embodiments and in conjunction with the accompanying drawings. The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Furthermore, the present invention may repeat reference numerals and / or letters in different examples. This repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. It should be noted that the components illustrated in the drawings are not necessarily drawn to scale. The present invention omits descriptions of well-known components and processing techniques and processes to avoid unnecessarily limiting the present invention. The terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] See Figures 1-7 This embodiment provides a multi-plate independent baffle device, including a vacuum chamber A, a driving device, a rotating sample stage 1, and a baffle assembly 2.

[0035] The driving device includes a rotary drive 6 and a lifting drive, which are mounted together above the vacuum chamber A via a sealing flange 7. The rotating sample stage 1 and the baffle assembly 2 are both located inside the vacuum chamber A. The rotary drive 6 drives the rotating sample stage 1 to rotate.

[0036] The lifting drive includes a telescopic cylinder 4 mounted above the sealing flange 7. The output end of the telescopic cylinder 4 is fixedly connected to an upper pin 5, which extends downward to the top of the rotating sample stage 1. The telescopic cylinder 4 can drive the upper pin 5 to move up and down.

[0037] There are four sets of baffle assemblies 2. Each set of baffle assemblies 2 includes a rotating lower pin 21 and a baffle 23. A support plate 3 is fixedly connected to the bottom of the rotating sample stage 1. The rotating lower pin 21 passes through and is rotatably connected to the edge of the support plate 3 through a self-lubricating bearing, and its bottom end is fixedly connected to the baffle 23. A rotating handle 22 is provided extending inward from the top of the rotating lower pin 21.

[0038] During operation, the servo motor 61 drives the rotating sample stage 1 to rotate, and the baffle assembly 2 rotates together with the rotating sample stage 1. When it is necessary to open or close the baffle 23, the telescopic cylinder 4 drives the upper pin 5 to move downward. At this time, as the rotating sample stage 1 rotates, the lower pin 21 will contact the rotating handle 22. The rotating sample stage 1 continues to rotate, and the relative movement between the upper pin 5 and the rotating lower pin 21 causes the upper pin 5 to push the rotating handle 22 to rotate, thereby realizing the opening and closing of the baffle 23. When the baffle 23 does not need to be opened or closed, the telescopic cylinder 4 drives the upper pin 5 to move upward, so that it does not contact the rotating handle 22. By using the upper pin 5 and the rotating lower pin 21 in combination, either baffle 23 can be opened or closed independently, which is suitable for situations where the substrate needs to be partially shielded during vacuum coating.

[0039] The four baffles are arranged sequentially as a first baffle 231, a second baffle 232, a third baffle 233, and a fourth baffle 234. The first baffle 231 and the third baffle 233 are closed by rotating the sample stage 1 counterclockwise (viewed from above). The second baffle 232 and the fourth baffle 234 are closed by rotating the sample stage 1 clockwise (viewed from above). The first baffle 231 and the third baffle 233 are opened by rotating the sample stage 1 clockwise (viewed from above). The baffles 2 and 4 are opened by rotating the sample stage 1 counterclockwise (viewed from above).

[0040] The four sets of baffle assemblies 2 cooperate with each other. When all four baffles 23 are in the closed state, the four baffles 23 cooperate to completely block the substrate on the rotating sample stage 1.

[0041] The rotary drive component 6 includes a servo motor 61 and a rotating shaft 62. The servo motor 61 is connected to the rotating shaft 62 via a synchronous belt 63 and a synchronous pulley 64. The rotating shaft 62 is connected to the sealing flange 7 via a bearing housing 65 and extends into the vacuum chamber A, with its bottom end fixedly connected to the rotating sample stage 1. During operation, the servo motor 61 drives the rotating shaft 62 to rotate via the synchronous belt 63, thereby driving the rotating sample stage 1 to rotate.

[0042] See Figures 8-10 The end of the baffle 23 connected to the rotating lower pin 21 has an installation groove, in which a spring positioning pin 8 is installed. The spring positioning pin 8 includes a pin body 81, a spring (not shown in the figure), and a positioning ball 82. The spring is embedded in the pin body 81, and the positioning ball 82 is connected to the upper end of the spring. Two positioning grooves 9 are provided on the bottom surface of the support plate 3, which are used for positioning the baffle 23 in the open state and the closed state, respectively.

[0043] When the baffle 23 is fully open or fully closed, the top of the positioning ball 82 is located in the positioning groove 9. After the baffle 23 rotates, the positioning ball 82 disengages from the positioning groove 9 and is pressed downward by the support plate 3, rotating towards the next positioning groove 9 until it enters the next positioning groove 9 for positioning. The positioning of the baffle 23 in its open and closed state is achieved by the spring positioning pin 8 and the positioning groove 9, avoiding the situation where the baffle 23 is offset due to the centrifugal force generated by the rotation of the rotating sample stage 1.

[0044] Although the specific embodiments of the utility model have been described above in conjunction with the accompanying drawings, this is not intended to limit the scope of protection of the utility model. Based on the technical solution of the utility model, various modifications or variations that can be made by those skilled in the art without creative effort are still within the scope of protection of the utility model.

Claims

1. A multi-plate independent baffle device, characterized in that: Includes a rotating sample stage, a lifting drive, and multiple sets of baffle assemblies; The lifting drive is located above the rotating sample stage, and the output end of the lifting drive is connected to an upper pin shaft facing downward. Each baffle assembly includes a rotating lower pin and a baffle. A support plate is connected below the rotating sample stage. The rotating lower pin passes through and is rotatably connected to the support plate. The bottom end of the rotating lower pin is connected to the baffle. A rotating handle is provided on the top end of the rotating lower pin extending inward. The baffle assembly rotates together with the rotating sample stage. When the baffle needs to be opened or closed, the lifting drive drives the upper pin to move downward. The rotating lower pin rotates with the rotating sample stage and contacts the upper pin. The upper pin pushes the rotating lower pin to rotate due to the relative movement of the two. When the baffle does not need to be opened or closed, the upper pin moves upward, thereby realizing the individual opening and closing of each baffle.

2. The multi-plate independent baffle device according to claim 1, characterized in that: The rotating lower pin is connected to the edge of the support plate through a self-lubricating bearing.

3. The multi-piece independent baffle device according to claim 1, characterized in that: The multi-plate independent baffle device also includes a rotary drive component, which drives the rotating sample stage to rotate.

4. The multi-plate independent baffle device according to claim 3, characterized in that: The multi-plate independent baffle device also includes a vacuum chamber, and the rotary drive and the lifting drive are mounted together above the vacuum chamber via a sealing flange.

5. A multi-piece independent baffle device according to claim 4, characterized in that: The rotary drive includes a servo motor and a rotating shaft. The servo motor is connected to the rotating shaft via a synchronous belt and a synchronous pulley. The rotating shaft is connected to the sealing flange via a bearing seat and extends into the vacuum chamber. Its bottom end is fixedly connected to the rotating sample stage.

6. The multi-piece independent baffle device according to claim 1, characterized in that: The lifting drive component is a telescopic cylinder.

7. The multi-plate independent baffle device according to claim 1, characterized in that: The baffle is provided with an installation groove at one end connected to the rotating lower pin. A spring positioning pin is installed in the installation groove. The spring positioning pin includes a pin body, a spring and a positioning ball. The spring is embedded in the pin body and the positioning ball is connected to the upper end of the spring. The bottom surface of the tray has multiple positioning grooves that are adapted to the top of the positioning ball. The positioning ball moves into the positioning groove to achieve the positioning of the baffle.

8. The multi-plate independent baffle device according to claim 1, characterized in that: The number of baffle assemblies is four. When all four baffles are in the closed state, the four baffles work together to completely cover the substrate on the rotating sample stage.

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