Test device for bias power supplies

Abstract

The utility model provides a kind of test device of bias power supply. Test device includes control panel, power supply module and control module. Power supply module is used to power supply control panel and control module, control panel and control module are electrically connected, control module is connected with the control port of bias power supply by connector, and the interface definition of connector is consistent with the interface definition of the control port of bias power supply, control module is used to monitor and adjust the output power of bias power supply. Compared with prior art, the utility model is connected with the control port of bias power supply by connector, and the interface definition of connector and the interface definition of control port are kept consistent, so that test device can control bias power supply output, and facilitate subsequent maintenance test.

Description

Technical Field

[0001] This utility model relates to the field of power supply detection technology, and in particular to a test device for a bias power supply. Background Technology

[0002] In the semiconductor manufacturing field, ion implantation is one of the core steps in chip manufacturing to achieve doping and adjust the electrical properties of materials. Ion implantation equipment accelerates the ion beam using a high-voltage electric field, precisely implanting it onto the wafer surface. The bias power supply (BIAS power supply), as a key module of the ion implantation equipment, is primarily responsible for providing high-precision, high-stability voltage and current output for the acceleration and deflection of the ion beam. The performance of the bias power supply (BIAS power supply) directly determines the energy control, dose uniformity, and process repeatability of ion implantation, and is a crucial technical support for ensuring the yield and reliability of semiconductor devices.

[0003] However, existing bias power supplies are highly dependent on the main control system of the ion implantation equipment. Their operating parameters (such as output voltage, current threshold, and pulse frequency) are entirely controlled by the equipment's host computer or integrated control unit, lacking their own independent human-machine interface or control panel. While this design meets the integrated control requirements during normal equipment operation, it exposes serious shortcomings in equipment maintenance, fault diagnosis, and offline testing scenarios. For example, when the bias power supply needs maintenance due to an abnormal shutdown, technicians must reconnect it to the ion implantation equipment for functional testing. However, the equipment itself may be unable to provide a testing environment due to maintenance of other modules or production scheduling conflicts. This dependence leads to low efficiency in offline maintenance of the bias power supply and may even prolong equipment downtime due to the inability to verify the repair effect in a timely manner, adversely affecting the continuous operation of the semiconductor production line.

[0004] In view of this, it is indeed necessary to propose a test device for the bias power supply to solve the above problems. Utility Model Content

[0005] To achieve the above objectives, this utility model provides a bias power supply testing device that can control the bias power supply offline for testing.

[0006] To address this, the present invention provides a test device for a bias power supply, comprising: a control panel, a power supply module, and a control module. The power supply module supplies power to the control panel and the control module, which are electrically connected. The control module is connected to the control port of the bias power supply via a connector, and the interface definition of the connector is consistent with the interface definition of the control port of the bias power supply. The control module is used to monitor and adjust the output power of the bias power supply.

[0007] Optionally, the control module includes an electrically connected control circuit and a monitoring circuit. The control circuit is used to start the bias power supply and adjust its output power, and the monitoring circuit is used to provide feedback on the real-time status of the bias power supply.

[0008] Optionally, the control circuit includes a power-on switch circuit and a current setting and display circuit. The power supply module is electrically connected to the power-on switch circuit and the current setting and display circuit respectively. The power-on switch circuit is used to control the start and stop of the bias power supply, and the current setting and display circuit is used to adjust the output power of the bias power supply.

[0009] Optionally, the power-on switch circuit includes a switch, a first resistor, and a ground terminal. The enable positive pin of the connector is connected to the power supply module through the switch; the enable negative pin of the connector is connected to the ground terminal through the first resistor.

[0010] Optionally, the current setting and display circuit includes an adjustable resistor and a first voltmeter. One end of the connector is connected to the first voltmeter, and the other end of the connector is connected to the sliding end of the adjustable resistor. The input end of the adjustable resistor is connected to the power supply module, and the output end of the adjustable resistor is grounded.

[0011] Optionally, the monitoring circuit includes a power-on indicator circuit, which includes a first transistor, a first light-emitting diode, and a second resistor. One pin of the connector is connected to the base of the first transistor, the collector of the first transistor is grounded, the emitter of the first transistor is connected to the cathode of the first light-emitting diode, and the anode of the first light-emitting diode is connected to the power supply module through the second resistor. The on / off state of the first light-emitting diode indicates the start and stop of the bias power supply.

[0012] Optionally, the monitoring circuit also includes an overheat fault indicator circuit, which includes a second transistor, a second light-emitting diode, and a third resistor. One pin of the connector is connected to the base of the second transistor, the collector of the second transistor is grounded, the emitter of the second transistor is connected to the cathode of the second light-emitting diode, and the anode of the second light-emitting diode is connected to the power supply module through the third resistor.

[0013] Optionally, the monitoring circuit may also include an output voltage monitoring circuit, which includes a second voltmeter, with one pin of the connector connected to the second voltmeter.

[0014] Optionally, the monitoring circuit also includes an output current monitoring circuit, which includes a third voltmeter. The other pin of the connector is connected to the third voltmeter. The output current value of the output current monitoring circuit is obtained by multiplying the displayed voltage value of the third voltmeter by a preset coefficient.

[0015] Optionally, the control panel integrates the operating components and display components from the control module.

[0016] Compared with the prior art, the technical solution of the embodiments of this utility model has the following beneficial effects:

[0017] The testing device of this invention connects to the control port of the bias power supply via a connector, and the interface definition of the connector is consistent with that of the control port. This allows the testing device to monitor and adjust the output of the bias power supply through the control module, facilitating subsequent maintenance and testing. In other words, testers do not need to install the bias power supply into the IMP machine for testing; they can directly control and test the bias power supply through the testing device, thus significantly improving the convenience of testing. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the working principle of a test device for a bias power supply conforming to a preferred embodiment of the present utility model.

[0019] Figure 2 This is a structural block diagram of the control module conforming to a preferred embodiment of the present utility model;

[0020] Figure 3 This is a circuit diagram of the connector in the bias power supply testing device conforming to a preferred embodiment of the present utility model;

[0021] Figure 4 This is a schematic diagram of the control panel in the bias power supply testing device according to a preferred embodiment of the present invention.

[0022] The components in the attached diagram are labeled as follows:

[0023] 1. Control panel; 2. Control switch; 3. Adjustment knob; 4. Display meter; 5. Power output indicator light; 6. Power overheat alarm indicator light.

[0024] 100. Control module; 110. Control circuit; 120. Monitoring circuit; 1101. Power on switch circuit; 1102. Current setting and display circuit; 1201. Power on indicator circuit; 1202. Overheat fault indicator circuit; 1203. Output voltage monitoring circuit; 1204. Output current monitoring circuit. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and / or processing steps closely related to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0027] Additionally, it should be noted that the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0028] Please see Figures 1 to 4 As shown, an embodiment of this utility model provides a testing device for a bias power supply. The testing device controls the bias power supply (BIAS power supply), enabling it to continue outputting voltage and current even after being disconnected from the IMP (ion implantation) equipment, greatly improving testing flexibility. Testers no longer need to install the bias power supply into the IMP equipment; they can directly control and test the bias power supply through the testing device, significantly enhancing testing convenience.

[0029] In this embodiment, the testing device includes a power supply module and a control module 100 installed inside the housing. The testing device also includes a control panel 1 installed on the outside of the housing. The power supply module is a power supply VCC. The power supply VCC supplies power to the control panel 1 and the control module 100. Specifically, the power supply VCC is a 10V DC power supply, and the testing device has a device power supply connector J2 connected to the power supply VCC.

[0030] In other embodiments, the test device may also be connected to an external power supply VCC, which is a 10V DC power supply.

[0031] The control panel 1 and the control module 100 are electrically connected. The control panel integrates the operating components and display components of the control module 100. The control panel 1 is equipped with a control switch 2, an adjustment knob 3, a power output indicator light 5, a power overheat alarm indicator light 6, and two sets of display meters 4. The control switch 2 and adjustment knob 3 are the operating components. The power output indicator light 5, the power overheat alarm indicator light 6, and the two sets of display meters 4 are the display components. The control switch 2, adjustment knob 3, and display meters 4 are connected to the circuit board of the control module 100 via wires. The power output indicator light 5 and the power overheat alarm indicator light 6 are electrically connected to the control module 100. Each set of display meters 4 is equipped with two digital tubes, used to display the current setting and the output voltage values ​​of the display meter circuit 1102, the output voltage monitoring circuit 1203, and the output current monitoring circuit 1204, respectively, to achieve real-time monitoring of key parameters of the bias power supply.

[0032] The test device's housing is equipped with a connector, through which the control module 100 connects to the control port of the bias power supply. The control module 100 is used to monitor and adjust the output power of the bias power supply. Specifically, the connector connects to the control port of the bias power supply via a connecting cable, and the connector's interface definition is consistent with the custom control port defined in the bias power supply's operation manual, enabling plug-and-play functionality. The connecting cable uses a 25-pin connector, directly connecting to the bias power supply control port via a dedicated cable to construct a closed-loop control system. This minimizes the control signal transmission path, effectively reducing signal attenuation and electromagnetic interference, and ensuring high-precision execution of control commands. Due to the consistent interface definition, when the connector is connected to the bias power supply's control port, the test device can accurately transmit control signals to the bias power supply, achieving control of the bias power supply's output voltage and current. This setup allows the test device to control the bias power supply's output voltage and current to the set parameters.

[0033] In this embodiment, the connector is a DB25 connector J1. The DB25 connector J1 includes 25 pins, designated J1-1, J1-2, J1-3, J1-4, J1-5…J1-25. Pins J1-1, J1-6, J1-7, J1-11, J1-16, J1-17, J1-18, J1-19, J1-20, J1-21, J1-22, J1-23, J1-24, and J1-25 are undefined (NC). Pins J1-8, J1-10, J1-12, and J1-14 are ground pins (GND). Pin J1-2 is the enable positive pin (Enable+). Pin J1-3 is the enable negative pin (Enable-). Pin J1-4 is the bias power output indicator signal pin (POWER ON SENSE). Pin J1-5 is the over-temperature indicator signal pin (Over Temperature). Pins J1-9 are for current programming signals (I Prgm). Pins J1-13 are for voltage monitoring signals (voltage feedback). Pins J1-15 are for current monitoring signals (current feedback).

[0034] The connector is a 25-pin wire. Pins J1-8, J1-10, J1-12, and J1-14, indicating ground, are connected to the "Signal Ground" pin of the bias power supply control port via the connector. Pin J1-2, indicating positive enable, is connected to the "Enable Positive" pin of the bias power supply control port via the connector. Pin J1-3, indicating negative enable, is connected to the "Enable Negative" pin of the bias power supply control port via the connector. Pin J1-4, indicating the bias power supply output indicator signal, is connected to the "Power Output Indicator Signal" pin of the bias power supply control port via the connector. Pin J1-5, indicating the overheat indicator signal, is connected to the "Overheat Indicator Signal" pin of the bias power supply control port via the connector. Pin J1-9, indicating the current programming signal, is connected to the "Current Programming Signal" pin of the bias power supply control port via the connector. Pin J1-13, indicating the voltage monitoring signal, is connected to the "Voltage Monitoring Signal" pin of the bias power supply control port via the connector. The J1-15 pin, which indicates the current monitoring signal, is connected to the "current monitoring signal" pin of the bias power supply control port via a connecting wire.

[0035] Please see Figure 2 As shown, the control module 100 includes a control circuit 110 and a monitoring circuit 120 that are electrically connected to each other. The control circuit 110 includes functions for starting the bias power supply and adjusting its output power. The monitoring circuit 120 provides feedback on the real-time status of the bias power supply.

[0036] The control circuit 110 includes a power-on switch circuit 1101 and a current setting and display circuit 1102. The power supply module is electrically connected to the power-on switch circuit 1101 and the current setting and display circuit 1102 respectively to supply power to them.

[0037] The power-on switch circuit 1101 is used to control the start and stop (on / off) of the bias power supply. Specifically, the power-on switch circuit 1101 includes a switch K1 and a first resistor R1. Pins J1-2 are connected to the power supply VCC through switch K1. Switch K1 can be a single-pole double-throw switch or a single-pole single-throw switch. Pins J1-3 are connected to the ground terminal of the power-on switch circuit 1101 through the first resistor R1. The function of the first resistor R1 is to limit the current and prevent damage to the control circuit 110 inside the bias power supply. The control switch 2 is connected to the contact operation terminal of switch K1 through a mechanical linkage structure. The mechanical linkage structure forms a rigid motion coupling, converting the physical displacement of the control switch 2 into the contact action of switch K1. Swinging the control switch 2 on the control panel 1 drives switch K1 to close, turning on the output of the bias power supply. Similarly, swinging the control switch 2 in the opposite direction drives switch K1 to disconnect from the power supply VCC, so that the bias power supply stops outputting. This control method features fast response and high stability, ensuring that the power supply quickly and accurately turns the output on or off upon receiving a signal. Furthermore, the high-level signal control method facilitates interfacing with other circuit modules, improving the overall system integration and compatibility.

[0038] The current setting and display circuit 1102 is used to adjust the output power of the bias power supply. The current setting and display circuit 1102 includes an adjustable resistor RP1 and a first voltmeter V1. Pins J1-9 are connected to the sliding end of the adjustable resistor RP1. The input terminal of the adjustable resistor RP1 is connected to the power supply VCC, and the output terminal of the adjustable resistor RP1 is grounded. The other end of pin J1-9 is connected to the positive terminal of the first voltmeter V1, and the negative terminal of the first voltmeter V1 is grounded, ensuring that the measurement circuit is at the same potential as the main circuit of the bias power supply, avoiding measurement errors or equipment failures caused by common-mode voltage. The testing device can test whether the power supply function is normal by setting the output current value of the bias power supply. When the bias power supply is turned on, by adjusting the resistance value of the adjustable resistor RP1, a voltage divider is applied to the power supply VCC through the adjustable resistor RP1. This voltage divider value is the current programming voltage, and thus the corresponding current value of the bias power supply output. Simultaneously, the first voltmeter V1 displays the voltage on pin J1-9 to indicate the magnitude of the current programming voltage, and the voltage value is displayed through the display head 4. In maintenance scenarios where the bias power supply is disconnected from the machine tool, technicians can directly simulate the current command signal sent by the machine tool's main control system by adjusting the adjustable resistor RP1. Combined with the real-time feedback from the first voltmeter V1, this allows for rapid verification of the power supply's output response capability. For example, by continuously adjusting the adjustable resistor RP1 and observing whether the actual output current of the bias power supply changes synchronously and linearly, it can be determined whether the power supply's current closed-loop control function is normal. This solution replaces the inefficient traditional maintenance method that relies on the machine tool's host computer or external complex signal generators, reducing the time spent on functional testing. In this embodiment, the voltage on pins J1-9 can vary between 0-10V, ensuring that the second voltmeter V2 can operate within a safe and stable range, avoiding instrument damage or inaccurate readings caused by excessively high or low voltage.

[0039] Furthermore, the adjustable resistor RP1 is the regulating element in the circuit, while the adjusting knob 3 is an operating component mounted on the control panel and mechanically coupled to the adjustable resistor RP1. The adjusting knob 3 directly drives the resistance change of the adjustable resistor RP1 through physical rotation.

[0040] The monitoring circuit 120 includes a power-on indicator circuit 1201, an overheat fault indicator circuit 1202, an output voltage monitoring circuit 1203, and an output current monitoring circuit 1204.

[0041] The power-on indicator circuit 1201 includes a first transistor Q1, a first light-emitting diode (LED1), and a second resistor R2. Pin J1-4 is connected to the base of the first transistor Q1, the collector of the first transistor Q1 is grounded, the emitter of the first transistor Q1 is connected to the cathode of the first LED1, and the anode of the first LED1 is connected to the power supply VCC through the second resistor R2. The second resistor R2 acts as a current-limiting protection element in the circuit, limiting the current flowing through the first LED1 and preventing potential safety hazards such as damage to the first LED1 or a short circuit due to excessive current. This design not only extends the lifespan of the first LED1 but also improves the overall safety performance of the circuit.

[0042] The power-on indicator circuit 1201 indicates the start / stop of the bias power supply by the on / off state of the first light-emitting diode (LED1). The first LED1 is at least partially exposed on the control panel 1; that is, the power output indicator 5 is the first LED1. When the bias power supply under test is on, the power-on indicator circuit 1201 controls the first LED1 to light up, i.e., the power output indicator 5 illuminates. When the bias power supply under test is off, the power-on indicator circuit 1201 controls the first LED1 to not light up, and the power output indicator 5 does not illuminate. When the bias power supply is on, a low-level signal from the bias power supply is transmitted to the base of the first transistor Q1, turning on the first transistor Q1, which in turn illuminates the first LED1, and the power output indicator 5 on the control panel 1 illuminates, indicating that the bias power supply output is on, i.e., the bias power supply is in working condition. When the bias power supply is off, a high-level signal from the bias power supply will be transmitted to the base of the first transistor Q1. The first transistor Q1 will not conduct, and the first light-emitting diode LED1 will not light up. The power output indicator 5 on the control panel 1 will be off, indicating that the bias power supply output is not turned on.

[0043] The overheat fault indicator circuit 1202 includes a second transistor Q2, a second light-emitting diode (LED2), and a third resistor R3. Pin J1-5 is connected to the base of the second transistor Q2, and the collector of the second transistor Q2 is connected to ground. The emitter of the transistor Q2 is connected to the cathode of the second LED2, and the anode of the second LED2 is connected to the power supply VCC through the third resistor R3. The third resistor R3 plays a crucial current-limiting protection role in the circuit, limiting the current flowing through the second LED2 and preventing damage to the LED2 or short circuits due to excessive current. The second LED2 is at least partially exposed on the control panel 1 for easy observation by the user; that is, the power overheat alarm indicator 6 is the second LED2. When the tested power supply overheats, the overheat fault indicator circuit 1202 controls the second LED2 to illuminate, promptly issuing a warning signal and effectively preventing equipment damage or safety accidents caused by overheating. Specifically, when the bias power supply overheats, a low-level signal from the bias power supply is transmitted to the base of the second transistor Q2, turning on the second transistor Q2. This causes the second LED2 to light up, and the power supply overheat alarm indicator 6 to illuminate, indicating that the bias power supply temperature is too high. When the bias power supply temperature is normal, a high-level signal from the bias power supply is transmitted to the base of the second transistor Q2, turning on the transistor. This causes the second LED2 to not light up, and the power supply overheat alarm indicator 6 to remain off, indicating that the bias power supply temperature is normal.

[0044] The output voltage monitoring circuit 1203 includes a second voltmeter V2. One pin of the connector is connected to the second voltmeter V2. Pins J1-13 are connected to the positive terminal of the second voltmeter V2, and the negative terminal of the second voltmeter V2 is grounded. When the bias power supply is output, the voltage feedback signal of the bias power supply is transmitted to J1-13, and the second voltmeter V2 displays the voltage on J1-13, showing the voltage value on J1-13 through the display head 4. The voltage range of J1-13 is 0~10V. When the bias power supply output voltage is abnormal, such as exceeding the set range or fluctuating excessively, the second voltmeter V2 will be able to immediately reflect this change. By observing the value on the display head 4, operators can promptly detect voltage output faults and take appropriate measures to repair them.

[0045] The output current monitoring circuit 1204 includes a third voltmeter V3. Pins J1-15 are connected to the positive terminal of the third voltmeter V3, and the negative terminal of the third voltmeter V3 is grounded. When the bias power supply is output, a current feedback signal is transmitted to pins J1-15, and the third voltmeter V3 displays the voltage at pins J1-15. The voltage value is shown on display head 4, and the voltage range of pins J1-15 is 0~10V. The actual current value of pins J1-15 = coefficient × the voltage value displayed by the third voltmeter V3. The coefficient is determined according to the specifications and model of the power supply. After conversion, the operator can obtain the current status. By observing the reading on display head 4, the operator can promptly detect current abnormalities and take corresponding measures for fault warning and diagnosis.

[0046] The working process of the testing device is as follows:

[0047] The connector on the test device is connected to the control port of the device under test (bias power supply) via a connecting wire, and the interface definition of the connector is consistent with the interface definition of the control port. When the control switch 2 on the control panel 1 is swung up / down, the switch K1 in the power-on switch circuit 1101 is closed, generating a high-level signal and turning on the output of the bias power supply. When the bias power supply is in use, a 208V AC power supply is connected to the input terminal of the bias power supply, and the output terminal of the bias power supply is connected to a DC load. When the bias power supply is turned on, a low-level signal from the bias power supply is transmitted to the base of the first transistor Q1 in the power-on indicator circuit 1201. The first transistor Q1 conducts, and the first light-emitting diode LED1 illuminates, and the power output indicator 6 on the control panel 1 lights up, indicating that the bias power supply output is turned on and the bias power supply is in working condition.

[0048] The testing device can test the normal functioning of the power supply by setting the output current value of the bias power supply. Specifically, by rotating the adjustment knob 3, the resistance value of the adjustable resistor RP1 is adjusted, thereby changing the current programming voltage of the bias power supply, and thus changing the output current of the bias power supply, achieving complete control of the bias power supply. When the bias power supply outputs, the voltage feedback signal is transmitted to J1-13, and the second voltmeter V2 displays the voltage on J1-13. The operator can directly obtain the voltage of the bias power supply through the display meter 4. By observing the reading of the display meter 4, the operator can promptly detect voltage abnormalities and take corresponding measures for fault warning and diagnosis. When the bias power supply outputs, the current feedback signal is transmitted to pin J1-15, and the third voltmeter V3 displays the voltage on pin J1-15. The actual current value of pin J1-15 = coefficient × the voltage value displayed by the third voltmeter V3. After conversion, the operator can obtain the current status of the current supply. Operators can observe the reading of the third voltmeter V3 through the display head 4 to promptly detect abnormal current and take corresponding measures for fault warning and diagnosis.

[0049] In summary, the testing device of this invention connects to the control port of the bias power supply via a connector, ensuring consistency between the connector's interface definition and the control port's interface definition. The connector and the control port of the bias power supply are connected via a connecting cable, enabling the testing device to control and monitor the output of the bias power supply through the control module 100, facilitating subsequent maintenance and testing. In other words, testing personnel do not need to install the bias power supply into the IMP machine for testing; they can directly control and test the bias power supply through the testing device, significantly improving testing convenience.

[0050] The above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model.

Claims

1. A testing device for a bias power supply, characterized in that, include: The system includes a control panel, a power supply module, and a control module. The power supply module supplies power to the control panel and the control module, which are electrically connected. The control module is connected to the control port of the bias power supply via a connector, and the interface definition of the connector is consistent with the interface definition of the control port of the bias power supply. The control module is used to monitor and adjust the output power of the bias power supply.

2. The test apparatus for the bias power supply according to claim 1, characterized in that, The control module includes a control circuit and a monitoring circuit that are electrically connected. The control circuit is used to start the bias power supply and adjust its output power, and the monitoring circuit is used to provide feedback on the real-time status of the bias power supply.

3. The test apparatus for the bias power supply according to claim 2, characterized in that, The control circuit includes a power-on switch circuit and a current setting and display circuit. The power supply module is electrically connected to the power-on switch circuit and the current setting and display circuit respectively. The power-on switch circuit is used to control the start and stop of the bias power supply, and the current setting and display circuit is used to adjust the output power of the bias power supply.

4. The test apparatus for the bias power supply according to claim 3, characterized in that, The power-on switch circuit includes a switch, a first resistor, and a ground terminal. The enable positive pin of the connector is connected to the power supply module through the switch; the enable negative pin of the connector is connected to the ground terminal through the first resistor.

5. The test apparatus for the bias power supply according to claim 3, characterized in that, The current setting and display circuit includes an adjustable resistor and a first voltmeter. One path of the connector is connected to the first voltmeter, and the other path of the connector is connected to the sliding end of the adjustable resistor. The input end of the adjustable resistor is connected to the power supply module, and the output end of the adjustable resistor is grounded.

6. The test apparatus for the bias power supply according to claim 2, characterized in that, The monitoring circuit includes a power-on indicator circuit, which includes a first transistor, a first light-emitting diode (LED), and a second resistor. One pin of the connector is connected to the base of the first transistor, the collector of the first transistor is grounded, the emitter of the first transistor is connected to the cathode of the first LED, and the anode of the first LED is connected to the power supply module through the second resistor. The on / off state of the first LED indicates the start / stop of the bias power supply.

7. The test apparatus for the bias power supply according to claim 2, characterized in that, The monitoring circuit also includes an overheating fault indicator circuit, which includes a second transistor, a second light-emitting diode, and a third resistor. One pin of the connector is connected to the base of the second transistor, the collector of the second transistor is grounded, the emitter of the second transistor is connected to the cathode of the second light-emitting diode, and the anode of the second light-emitting diode is connected to the power supply module through the third resistor.

8. The test apparatus for the bias power supply according to claim 2, characterized in that, The monitoring circuit further includes an output voltage monitoring circuit, which includes a second voltmeter, and one pin of the connector is connected to the second voltmeter.

9. The test apparatus for the bias power supply according to claim 2, characterized in that, The monitoring circuit also includes an output current monitoring circuit, which includes a third voltmeter. The other pin of the connector is connected to the third voltmeter. The output current value of the output current monitoring circuit is obtained by multiplying the displayed voltage value of the third voltmeter by a preset coefficient.

10. The test apparatus for the bias power supply according to any one of claims 1 to 9, characterized in that, The control panel integrates the operating components and display components of the control module.

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