Electron beam microscope

By positioning the scintillator body near the object plane and the light detector along the axis of symmetry, the electron beam microscope efficiently detects backscattered electrons, addressing the detection inefficiencies of conventional designs and maintaining magnetic field symmetry.

DE102024002909B4Active Publication Date: 2026-06-11CARL ZEISS MICROSCOPY GMBH
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Patent Information

Authority / Receiving Office
DE Β· DE
Patent Type
Patents
Current Assignee / Owner
CARL ZEISS MICROSCOPY GMBH
Filing Date
2024-09-10
Publication Date
2026-06-11

AI Technical Summary

Technical Problem

Conventional electron beam microscopes face challenges in efficiently detecting a large proportion of backscattered electrons due to the positioning of the scintillator body and light detector, which affects the symmetry of the magnetic objective lens and reduces the detection efficiency of light generated by these electrons.

Method used

The electron beam microscope is designed with a scintillator body positioned close to the object plane and a light detector located along the axis of symmetry between the edge of the magnet coil and the object plane, eliminating the need for a light guide through the magnet coil or yoke, and optimizing the positioning of the light detector to enhance detection efficiency.

Benefits of technology

This configuration allows for improved detection of backscattered electrons by positioning the light detector closer to the scintillator body, maintaining the symmetry of the magnetic field, and increasing the detection probability of light generated by the scintillator, thereby enhancing the overall detection efficiency.

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Abstract

Electron beam microscope, including: an electron beam source (3) configured to produce an electron beam (9); an object holder (21) configured to hold an object (19) at an object location (27) on which the electron beam (9) hits; a magnetic objective lens (23) for focusing the electron beam (9) in an object plane (25), wherein the magnetic objective lens (23) has a magnetic coil (31) and a yoke (33) with a first pole end (35) and a second pole end (37), each extending around an axis of symmetry (29) of the magnetic objective lens (23); and a first electron detector (41) configured to detect electrons produced by the electron beam (9) at the object (19); the first electron detector (41) comprises: a scintillator arrangement (60) with a scintillator body (61) arranged such that electrons generated at the object location (27) collide with the scintillator body (61), wherein the scintillator body (61) is formed from a scintillator material which generates light (65) with incident electrons (45), and a light detector (63) configured to detect light (65) generated by the scintillator body (61) and convert it into electrical signals; and wherein the light detector (63) is arranged along the axis of symmetry (29) between the scintillator body (61) and the object plane (25).
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