Method, computer program product and computer system for generating a sample inspection recipe
DE102025101008A1Undetermined Publication Date: 2026-07-16CARL ZEISS SMT GMBH
Patent Information
- Application Number
- DE102025101008
- Authority / Receiving Office
- DE · DE
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-01-14
- Publication Date
- 2026-07-16
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Abstract
A computer-implemented method for generating a sample inspection recipe for defect inspection of a photolithographic sample for a photolithographic inspection tool, comprising the following steps: providing (21) a design data file for a photolithographic sample, providing a virtual photolithographic inspection tool, simulating (24) at least one virtual image of the photolithographic sample using the virtual photolithographic inspection tool and the design data file, and generating (28) the sample inspection recipe and its corresponding tool parameters that can be used to inspect the photolithographic sample, based on the virtual aerial image (33, 35, 36, 37, 38, 39, 40) of the photolithographic sample.
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Citation Information
Patent Citations
Computer-implemented method for detecting defects in an object comprising integrated circuit patterns, and corresponding computer program product, computer-readable medium, and system utilizing such methods.
DE102023104378A1
Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit
US10042248B2
Intra-Die Defect Detection
US20160321800A1
Methods and systems for utilizing design data in combination with inspection data
US9401014B2
Computer implemented method for the detection of defects in an imaging dataset of an object comprising integrated circuit patterns, computer-readable medium, computer program product and a system making use of such methods
WO2024160623A1