Ptychographic imaging technique and system

Abstract

The invention relates to an imaging method and an imaging system for carrying out this method. The object of the invention is to provide an improved multispectral ptychographic imaging method and a corresponding system. To this end, the imaging method of the invention comprises the following process steps: generation of at least partially coherent electromagnetic radiation (3) containing spectral components at at least two different wavelengths; spatial separation of the spectral components of the electromagnetic radiation, in particular by angular dispersion; generation of structured illumination beams (9) by selecting one of the spectral components at a time using a structured aperture (8a, 8b, 8c); movement of an object (6) in a direction transverse to the path of the illumination beams (9) into a plurality of positions;Detecting an intensity pattern for each of the positions, wherein the intensity patterns are generated by scattering and / or diffraction of the illumination rays (9) at the object (6) in a detection plane; and reconstructing an image of the object (6) from the detected intensity patterns, wherein an image of the object (6) is calculated for each of the at least two wavelengths using a ptychographic reconstruction algorithm.

Description

[0001] The invention relates to a ptychographic imaging method and an imaging system for carrying out the method.

[0002] Ptychography is a computer-aided imaging method in which images are generated by processing two or more intensity patterns created by the diffraction or scattering of at least partially coherent light at an object through interference. The intensity patterns are generated by a constant illumination function (e.g., the focus geometry of the illumination radiation or the geometry of an aperture / stop) that moves laterally relative to the object by a known amount, i.e., with a component perpendicular to the path of the light beam. The intensity patterns occur at a distance from the object, so the diffracted or scattered light waves of the illumination radiation propagate, superimpose, and interfere with each other to generate the intensity patterns.

[0003] Ptychography can be performed with any at least partially coherent radiation, including visible light, X-rays, extreme ultraviolet (XUV), or electron beams. Unlike conventional lens imaging, ptychography is not affected by lens-related aberrations. The generation of intensity patterns is generally lensless. This is particularly important for imaging at very short wavelengths (<100 nm), where it is difficult and expensive to manufacture high-quality lenses with high numerical aperture.

[0004] Another advantage of ptychography is its ability to image transparent objects. This is because the method responds to the phase of the illumination radiation that passes through the object. In the case of visible-light biological microscopy, this means that cells do not need to be stained or labeled to create contrast.

[0005] Although the diffracted or scattered illumination radiation is detected as an intensity pattern in ptychography, the mathematical constraint of the translational invariance of the illumination, combined with the known lateral displacements between them, means that the phase of the wave field can be reconstructed by computer using an inverse calculation (ptychographic reconstruction algorithm). This allows all information about the wave field of the diffracted or scattered illumination radiation (amplitude and phase) to be recovered, and nearly perfect and quantitative images of the object can be obtained with a spatial resolution significantly smaller than the size of the illuminated area on the object. The requirements for the illumination optics are comparatively low (J. Rodenburg and A. Maiden, “Ptychography” in “Springer Handbook of Microscopy”, edited by P.W. Hawkes and J.C. H.).Spence , Springer International Publishing, 2019, pages 819 to 904).

[0006] In recent years, laser-driven coherent radiation sources in the extreme ultraviolet (XUV) range have experienced a tremendous performance increase, making high-resolution ptychography possible on a laboratory scale. The latest implementations achieve resolution down to the sub-20 nm range and allow imaging with quantitative amplitude and phase contrast, including spatially resolved material identification based on the measured complex refractive index.

[0007] The light sources typically used for ptychography are inherently broadband. However, only a small portion of this broad spectrum is usually utilized through spectral filtering. This has the disadvantage that a large part of the light output is lost unused.

[0008] Multispectral imaging allows spectroscopic information about the object under investigation to be obtained, which is useful for many applications (DA Shapiro et al., “Chemical composition mapping with nanometre resolution by soft X-ray microscopy,” Nat. Photonics, Vol. 8, No. 10, pages 765-769).

[0009] In recent years, ptychographic reconstruction algorithms have been developed that also work with spectrally broadband illumination radiation. These algorithms allow spectroscopic information to be extracted from the object under investigation (DJ Batey, D. Claus, and JM Rodenburg, "Information multiplexing in ptychography," Ultramicroscopy, Vol. 138, pp. 13-21). This method is also known as multi-wavelength ptychography (MWP). MWP algorithms can reconstruct the phase delay and transmission within the object as a function of wavelength. The intensity patterns generated and detected by superimposing the different spectral components of the illumination radiation are thus evaluated in such a way that the contributions of the various spectral components are separated. However, this method has the disadvantage that the MWP reconstruction algorithm is susceptible to noise and other measurement inaccuracies.The reason for this is that broadband illumination radiation leads to intensity patterns that can be described by a superposition of many monochromatic, coherent diffraction patterns. Using MWP, the different monochromatic components that make up the measured intensity pattern must be reconstructed. Thus, image generation in MWP involves a complex inverse problem that is significantly more difficult and time-consuming to solve compared to monochromatic ptychography.

[0010] The object of the invention is to provide an improved multispectral ptychographic imaging method and a corresponding system.

[0011] The invention solves this problem through an imaging method comprising the following process steps: - Generation of at least partially coherent electromagnetic radiation containing spectral components at at least two different wavelengths, - spatial separation of the spectral components of electromagnetic radiation, - Generating structured illumination beams by selecting one of the spectral components at a time using a structured aperture, - Moving an object in a direction perpendicular to the path of the lighting rays into a plurality of positions, - Detecting an intensity pattern for each of the positions, wherein the intensity patterns are generated by scattering and / or diffraction of the illumination rays at the object in a detection plane, and - Reconstructing an image of the object from the detected intensity patterns, whereby an image of the object is calculated for each of the at least two wavelengths using a ptychographic reconstruction algorithm.

[0012] Furthermore, the invention solves the problem through an imaging system with - an illumination light source designed to generate at least partially coherent electromagnetic radiation containing spectral components at at least two different wavelengths, - a separating element designed for the spatial separation of the spectral components of electromagnetic radiation, - a mask with at least one structured aperture, designed to generate structured illumination beams by selecting one of the spectral components at a time using the structured aperture, - a positioning element designed to move the object in a direction perpendicular to the path of the lighting beams, - a planar detector designed to detect intensity patterns generated by scattering or diffraction of the illumination radiation at the object in a detection plane defined by the plane of the planar detector, - a control unit designed to control the positioning element and the area detector in such a way that the object is moved sequentially into two or more predetermined positions and multiple intensity patterns are detected, with each of the positions being assigned a detected intensity pattern, and - a computer equipped with software to reconstruct an image of the object from the detected intensity patterns for each of the at least two wavelengths using a ptychographic reconstruction algorithm.

[0013] The invention further develops the conventional imaging technique of ptychography. Illumination radiation is generated to illuminate the object under investigation, and the object is successively moved into a plurality of positions with a directional component perpendicular to the path of the illumination beams. The intensity patterns generated by scattering and / or refraction at the object in a detection plane are detected for each of the positions. Finally, an image of the object is calculated from the detected intensity patterns using a ptychographic reconstruction algorithm.

[0014] According to the invention, the spectral components of the broadband electromagnetic radiation used to illuminate the object are spatially separated. This can be achieved, for example, by angular dispersion (using a diffraction grating or a prism), so that the different spectral components exhibit different directions of propagation. Other methods of splitting the electromagnetic radiation into spatially separated components, each assigned to specific wavelengths or wavelength ranges, are also conceivable, such as by beam splitters in combination with spectrally selective filters.

[0015] In one possible embodiment of the imaging system according to the invention, the separating element is therefore advantageously an angle-dispersive optical element arranged in the beam path between the illumination light source and the mask, in particular a diffraction grating or a prism.

[0016] The invention is based on combining the spatial separation of the spectral components with the generation of structured illumination beams by selecting one of the spectral components at a time using a structured aperture. Due to the spatial separation, each illumination beam is assigned a spectral component of the originally generated electromagnetic radiation, and the structured aperture used for selection ensures that each illumination beam is structured accordingly. The use of structured illumination beams improves image quality compared to unstructured beams (e.g., Gaussian beams) (M. Guizar-Sicairos, M. Holler, A. Diaz, J. Vila-Comamala, O. Bunk, and A. Menzel, “Role of the illumination spatial-frequency spectrum for ptychography,” Phys. Rev. B, Vol. 86, No. 10, p. 100-103; M. Odstrčil, M. Lebugle, M. Guizar-Sicairos, C. David, and M.Holler, “Towards optimized illumination for high-resolution ptychography,” Opt. Express, Vol. 27, No. 10, p. 14981). This is primarily due to the fact that structuring the beam increases the angular spectrum. Since the measured diffraction pattern can be described as a convolution of the object angular spectrum with the illumination angular spectrum, a structured beam results in a larger convolution kernel. This has several advantages. The larger angular spectrum allows for a higher diffraction-limited resolution; the intensity pattern is distributed more evenly across the area detector, thus reducing the dynamic range requirements of the area detector; furthermore, the structured illumination beams lead to better convergence of the ptychographic reconstruction algorithm used.

[0017] In the invention, a structured aperture is any optical component that modifies the intensity, phase, or polarization distribution of the illumination beam across its cross-section in order to shape the beam in a targeted manner. For this purpose, the structured aperture has at least one of the following spatially varying properties: • Transmission and absorption: Electromagnetic radiation (light) is only allowed to pass through certain areas of the aperture; certain other areas of the aperture block or attenuate the light, creating shadow patterns or intensity profiles (as with an aperture). • Phase modulation: The electromagnetic radiation experiences spatially different phase shifts due to the structured aperture, leading to corresponding modifications of the wavefront. • Polarization: The polarization direction of the light is selectively changed in different areas of the aperture.

[0018] With regard to the MWP, an advantage of the invention is that, after spatial separation of the different spectral components using various structured apertures, differently structured illumination beams can be generated. This means that the illumination beams exhibit different amplitudes, phases, and / or polarization profiles at different wavelengths or in different wavelength ranges, thus simplifying and clarifying the reconstruction problem. Intuitively, this can be explained by the fact that the wavelength-dependent structuring of the illumination beams encodes the spectral components, making it easier for the ptychographic reconstruction algorithm to separate the contributions of the different spectral components to the detected intensity patterns.In other words, one insight of the invention is that the inverse problem underlying image reconstruction can be significantly better conditioned by the wavelength-dependent structuring of the illumination rays according to the invention.

[0019] The invention can, in principle, be implemented in two different ways: In one possible configuration, the illumination beams can be generated by sequentially selecting different spectral components using the structured aperture and detecting corresponding intensity patterns for the wavelengths associated with each spectral component. For each wavelength, an image of the object is reconstructed from the intensity patterns assigned to that wavelength. In this variant, a single aperture can be used to select a spectral component and spatially structure the illumination beam. By adjusting, for example, an angle-dispersive optical element used for spatial separation of the spectral components, or the aperture itself, ptychography measurements for many different wavelengths can be performed monochromatically and sequentially (serially).This allows spatially resolved spectroscopic information about the object to be obtained. In this case, it is not necessary to use an MWP algorithm; a normal, monochromatic ptychographic reconstruction algorithm is sufficient.

[0020] In another possible embodiment, multiple illumination beams are generated simultaneously by parallel selection of spectral components using several structured apertures. Advantageously, the apertures assigned to the different spectral components can be structured differently to encode the different spectral components differently, as described above. The intensity patterns are detected while the object is illuminated with the multiple beams simultaneously. This variant of the invention requires multiple apertures. In this case, an MWP algorithm is used for reconstruction. This makes it possible to measure the object's transmission function for multiple wavelengths simultaneously (in parallel) with just one ptychography measurement.

[0021] To implement this variant, the imaging system used can advantageously employ a mask positioned perpendicular to the beam path between the separating element and the object, featuring several structured apertures arranged side-by-side and / or one above the other. In this case, the selection of a specific spectral component is achieved according to the aperture's position on the mask. Multiple apertures can be arranged as an array. The apertures on the mask can have different structures, so that the illumination beams assigned to the different wavelengths are structured differently. In combination with the aperture positioning, the parallel selection of different spectral components can thus be encoded differently by the structuring, as described above.

[0022] Advantageously, the detection of intensity patterns, as is common in ptychography, can be performed without imaging optics. Imaging errors of optical components thus play no role in the imaging process. If optical components are used for illuminating the object, i.e., for directing the illumination beams onto a specific area of ​​the object, these should be as achromatic as possible with respect to the different illumination wavelengths. In the imaging system of the invention, for example, a focusing optic can be arranged in the beam path between the separating element and the mask, which is designed to focus the illumination beams onto the object.

[0023] In a preferred embodiment, areas of the object illuminated by the light beams in adjacent positions should spatially overlap. This overlap is advantageous for conditioning the image reconstruction based on the intensity patterns.

[0024] The imaging method according to the invention is suitable for illumination wavelengths in the range between 0.01 nm and 3 mm, preferably in the X-ray range, the XUV range, the VIS range, the IR range, the midIR range or the THz range. This covers the relevant practical application areas of the invention.

[0025] In one possible embodiment, the imaging system according to the invention can be designed such that the separating element and the mask can be variably aligned and / or positioned relative to each other in order to vary the spectral components selected by means of the mask. For example, the angle-dispersive optical element can be rotatable about an axis oriented perpendicular to the plane of the beam path.

[0026] Exemplary embodiments of the invention are explained in more detail below with reference to the drawings. They show Fig. 1: Schematic representation of an imaging system according to the invention in a first embodiment (transmission setup); Fig. 2: Schematic representation of an imaging system according to the invention in a second embodiment (reflection setup); Fig. 3: Schematic representation of masks with structured apertures for use according to the invention.

[0027] The Fig. 1 and Fig. Figures 2 and 2 each schematically depict an imaging system 1 for multispectral ptychography. The system 1 comprises a broadband illumination light source 2 that emits coherent electromagnetic radiation 3 with spectral components at at least two different wavelengths. In the path of the electromagnetic radiation 3 is an angle-dispersive optical element 4, for example, a diffraction grating, which acts as a separating element for the spatial separation of the spectral components of the electromagnetic radiation 3. The angle-dispersive optical element 4 imparts different emission directions to the individual spectral components. Following the angle-dispersive optical element 4 in the beam path is a focusing optic 5, for example, a toroidal mirror, which focuses the electromagnetic radiation 3' after the spectrally selective spatial separation.Between the focusing optics 5 and the object 6, in the beam path - at the focus of the optics 5 - there is a mask 7, with several structured apertures 8a, 8b, 8c (in the . Fig. 1 and Fig. 2 below, each shown enlarged). The different structuring of the apertures 8a, 8b, 8c is schematically illustrated by various geometric shapes. The mask 7 with the structured apertures 8a, 8b, 8c generates structured illumination beams 9 according to their respective spatial arrangement in the beam path by selecting one of the spectral components each time. A positioning element 10 (only in Fig. The positioning element 10 (shown in Figure 2), for example an XY piezo positioning stage, is designed for the two-dimensional movement of the object 6 with directional components perpendicular to the path of the illumination beams 9. Finally, the imaging system 1 includes an area detector 11, for example a CCD element, which serves to detect intensity patterns generated by scattering or diffraction of the illumination beams 9 at the object 6 in a detection plane defined by the plane of the area detector 11. A control unit (not shown) controls the positioning element 10 and the area detector 11, so that the object 6 is moved sequentially to two or more predefined positions and several intensity patterns are detected by the area detector 11, with each position corresponding to a detected intensity pattern.Finally, a computer (not shown) reconstructs an image of object 6 for each of the at least two wavelengths from the detected intensity patterns using a ptychographic reconstruction algorithm (MWP algorithm).

[0028] Imaging system 1 of the Fig. 2 differs from that of the Fig. 1 by the fact that in Fig. 2. The area detector 11 detects the light reflected from the object 6, while the area detector 11 is in Fig. 1 measures the light transmitted through object 6. Since the light in Fig. 2 is reflected in the direction of the mask 7, which has a large rectangular aperture 8d through which the reflected light can pass and then be detected by the area detector 11.

[0029] The invention is based on the fact that the spectral components of the electromagnetic radiation from the illumination light source 2 are spatially separated from one another on the mask 7, which is located directly in front of the object 6, by means of the angle-dispersive optical element 4 in conjunction with the focusing optics 5. The structured (e.g., nanostructured) apertures 8a, 8b, 8c are located on the mask 7, with which the desired wavelength is selected. The angle-dispersive optical element 4, the focusing optics 5, and the mask 7 can all be moved by positioners (not shown). This allows different wavelengths to be selected or a wavelength range to be sampled (scanned). The mask 7 can be a simple amplitude mask, a phase mask, or a combined element.Mask 7 is placed directly in front of object 6, so that the near-field transmission of apertures 8a, 8b, 8c leads to exposure of the object. Image generation is lensless, using ptychography as described above. A corresponding image is reconstructed for each wavelength used.

[0030] The Fig. Figure 3 schematically shows two examples of masks 7, which are used in the described imaging systems 1 ( Fig. 1, Fig. 2) can be used. The dispersive separation of the spectral wavelengths in the examples shown works in such a way that the wavelength varies in the vertical direction, i.e., from top to bottom across the mask 7. In the left example, three differently structured apertures are arranged one above the other, which are assigned to the different wavelengths λ1, λ2, λ3 according to their vertical position. The illumination beams generated at the three wavelengths are structured differently accordingly. According to the invention, this results in improved multispectral image reconstruction. In the right example of the Fig.Figure 3 shows that mask 7 has an array of nine structured apertures. The different structures are schematically illustrated by different geometric shapes. As can be seen, the apertures, arranged side by side in a row, are slightly offset from each other in the vertical direction, i.e., in the direction of the spatial separation of the spectral components. This makes it possible to generate differently structured illumination beams at a total of nine different wavelengths λ1 to λ9, with a spectral resolution that is greater than would otherwise be expected based on the sizes of the individual apertures.

[0031] The key advantage of the invention over the prior art is that many microscopic images for different wavelengths can be measured and reconstructed quickly. The spatially separated structuring of the illumination beams at the different wavelengths simplifies the reconstruction and thus significantly improves the resulting image quality. Simultaneous (parallel) measurement at multiple wavelengths allows for a substantial speed advantage over conventional methods. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited non-patent literature

[0000] J. Rodenburg and A. Maiden, „Ptychography“ in „Springer Handbook of Microscopy“, herausgegeben von P. W. Hawkes und J. C. H. Spence , Springer International Publishing, 2019, Seiten 819 bis 904

[0005] D. A. Shapiro et al., „Chemical composition mapping with nanometre resolution by soft X-ray microscopy,“ Nat. Photonics, Band. 8, Nr. 10, Seiten 765-769

[0008] D. J. Batey, D. Claus, and J. M. Rodenburg, „Information multiplexing in ptychography,“ Ultramicroscopy, Band 138, Seiten 13-21

[0009] M. Guizar-Sicairos, M. Holler, A. Diaz, J. Vila-Comamala, O. Bunk, and A. Menzel, „Role of the illumination spatial-frequency spectrum for ptychography,“ Phys. Rev. B, Band 86, Nr. 10, Seite 100103; M. Odstrčil, M. Lebugle, M. Guizar-Sicairos, C. David, and M. Holler, „Towards optimized illumination for high-resolution ptychography,“ Opt. Express, Band 27, Nr. 10, Seite 14981

[0016]

Claims

[1] Imaging techniques with the following process steps: - Generation of at least partially coherent electromagnetic radiation (3) containing spectral components at at least two different wavelengths, - spatial separation of the spectral components of electromagnetic radiation, - Generating structured illumination beams (9) by selecting one of the spectral components at a time using a structured aperture (8a, 8b, 8c), - Moving an object (6) in a direction perpendicular to the path of the illumination rays (9) into a plurality of positions, - Detecting an intensity pattern for each of the positions, wherein the intensity patterns are generated by scattering and / or diffraction of the illumination rays (9) at the object (6) in a detection plane, and - Reconstructing an image of the object (6) from the detected intensity patterns, wherein for each of the at least two wavelengths an image of the object (6) is calculated using a ptychographic reconstruction algorithm. [2] Method according to claim 1, wherein the spatial separation of the spectral components is carried out by angular dispersion. [3] Method according to claim 1 or 2, wherein the illumination beams (9) are generated by successively selecting different spectral components using the structured aperture (8a, 8b, 8c) and accordingly successively detecting intensity patterns for the wavelengths assigned to the spectral components, wherein for each wavelength an image of the object (6) is reconstructed from the intensity patterns assigned to that wavelength. [4] Method according to claim 1 or 2, wherein several illumination beams (9) are generated simultaneously by selecting spectral components using several structured apertures (8a, 8b, 8c). [5] Method according to claim 3 or 4, wherein the apertures (8a, 8b, 8c) assigned to the different spectral components are structured differently. [6] Method according to claim 4 or 5, wherein the intensity patterns are detected while the object (6) is illuminated simultaneously with the multiple illumination beams (9). [7] Imaging method according to any one of claims 1 to 5, wherein the detection of the intensity patterns is carried out without imaging optics. [8] Imaging method according to any one of claims 1 to 7, wherein the different wavelengths are in the range between 0.01 nm and 3 mm, preferably in the X-ray range, in the XUV range, in the VIS range, in the IR range, in the midIR range or in the THz range. [9] Imaging method according to any one of claims 1 to 8, wherein in adjacent positions the illuminated parts of the object (6) are spatially overlapped by the illumination beams (9). [10] Imaging system for carrying out the method according to any one of claims 1 to 9, comprising - an illumination light source (2) designed to generate at least partially coherent electromagnetic radiation (3) containing spectral components at at least two different wavelengths, - a separating element (4) designed for spatial separation of the spectral components of the electromagnetic radiation (3), - a mask (7) with at least one structured aperture (8a, 8b, 8c), designed to generate structured illumination beams (9) by selecting one of the spectral components by means of the structured aperture (8a, 8b, 8c), - a positioning element (10) designed to move the object (6) in a direction perpendicular to the path of the lighting beams (9), - a planar detector (11) designed to detect intensity patterns generated by scattering or diffraction of the illumination radiation (9) at the object (6) in a detection plane defined by the plane of the planar detector (11), - a control unit designed to control the positioning element (10) and the area detector (11) in such a way that the object is moved sequentially into two or more predetermined positions and several intensity patterns (9) are detected, each of the positions being assigned a detected intensity pattern (9), and - a computer which is set up by software to reconstruct an image of the object (6) for each of the at least two wavelengths from the detected intensity patterns (9) using a ptychographic reconstruction algorithm. [11] Imaging system according to claim 10, wherein the separating element (4) is an angle-dispersive optical element arranged in the beam path between the illumination light source (2) and the mask (7), in particular a diffraction grating or a prism. [12] Imaging system according to claim 10 or 11, wherein the mask (7) arranged in the beam path between the separating element (4) and the object (6) has several structured apertures (8a, 8b, 8c) arranged next to and / or above each other. [13] Imaging system according to claim 12, wherein the apertures (8a, 8b, 8c) are structured differently, such that the illumination beams (9) assigned to the different wavelengths are structured differently. [14] Imaging system according to one of claims 10 to 13, wherein the separating element (4) and the mask (7) can be variably aligned and / or positioned relative to each other in order to vary the spectral components selected by means of the mask (7). [15] Imaging system according to one of claims 10 to 14, comprising a focusing optic (5) arranged in the beam path between the separating element (4) and the mask (7), designed to focus the illumination beams (9) on the object (6).

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