Radar-based positioning for robotic systems

Abstract

An apparatus comprising: at least one emitter configured to emit energy; and at least one receiver configured to receive the emitted energy, wherein the at least one emitter is attached to at least one of a robot arm, an end effector of the robot arm, a substrate on the robot arm, or a substrate processing module; and the at least one receiver is attached to at least one of the robot arm, the end effector of the robot arm, the substrate on the robot arm, or the substrate processing module.

Description

Background

[0001] 〔Technical Field〕 Exemplary and non - limiting embodiments generally relate to robots, and more particularly, to a positioning system for robots.

[0002] 〔Brief Description of the Related Art〕 U.S. Patent No. 9,196,518 discloses an adaptive placement system and method for a substrate transfer robot, which is hereby incorporated by reference in its entirety. Abstract

[0003] The following abstract is intended to be merely exemplary. This abstract is not intended to limit the claims.

[0004] According to one aspect, an exemplary embodiment is provided in an apparatus. The apparatus includes at least one emitter configured to emit energy and at least one receiver configured to receive the emitted energy. The at least one emitter is attached to at least one of a robot arm, an end - effector of the robot arm, a substrate on the robot arm, or a substrate processing module, and the at least one receiver is attached to at least one of the robot arm, the end - effector of the robot arm, the substrate on the robot arm, or the substrate processing module.

[0005] In another embodiment, an exemplary method is provided, which includes mounting at least one emitter on at least one of a robotic arm, an end effector of the robotic arm, a substrate on the robotic arm, or a substrate processing module, and mounting at least one receiver on at least one of the robotic arm, the end effector of the robotic arm, the substrate on the robotic arm, or the substrate processing module. The at least one emitter is configured to emit energy, and the at least one receiver is configured to receive the emitted energy.

[0006] In another embodiment, an exemplary method is provided, which includes emitting energy from an emitter and receiving the emitted energy by a receiver, wherein at least one emitter is mounted on at least one of a robotic arm, an end effector of the robotic arm, a substrate on the robotic arm, or a substrate processing module, and at least one receiver is mounted on at least one of the robotic arm, the end effector of the robotic arm, the substrate on the robotic arm, or the substrate processing module. The method further relates to the substrate processing module, at least partially based on the energy received by the at least one receiver. The position and / or range and / or angle and / or velocity of the substrate, The position, and / or range, and / or angle, and / or speed of the robot arm, The position, and / or range, and / or angle, and / or velocity of the end effector, The further includes determining at least one of the above, or determining the position of the substrate on the end effector and / or the robot arm. [Brief explanation of the drawing]

[0007] The aforementioned embodiments and other features will be described in the following description along with the attached drawings.

[0008] [Figure 1] This is a schematic top view illustrating an exemplary embodiment that includes features as described herein.

[0009] [Figure 2A] Figure 1 is a side view of a part of the robot shown.

[0010] [Figure 2B] Figure 2A is a schematic cross-sectional view of the robot shown.

[0011] [Figure 3] This is a schematic top view showing an example of a system for use in the embodiment shown in Figure 1.

[0012] [Figure 4] This is a schematic top view showing an example of a system for use in the embodiment shown in Figure 1.

[0013] [Figure 5] This is a schematic top view showing an example of a system for use in the embodiment shown in Figure 1.

[0014] [Figure 6] This is a schematic top view showing an example of a system for use in the embodiment shown in Figure 1.

[0015] [Figure 7] This is a schematic top view showing an example of a system for use in the embodiment shown in Figure 1.

[0016] [Figure 8] This is a schematic top view showing an example of a system for use in the embodiment shown in Figure 1.

[0017] [Figure 9] This is a schematic top view showing an example of a system for use in the embodiment shown in Figure 1. Detailed description of the embodiment

[0018] Referring to Figure 1, a schematic top view of a substrate processing apparatus 30 incorporating features of an exemplary embodiment is shown. While the features are described with reference to the exemplary embodiment shown in the drawing, it should be understood that the features can be embodied in many alternative forms of the embodiment. In addition, elements or materials of any preferred size, shape, or type may be used.

[0019] The substrate processing apparatus 30 generally comprises a substrate transport chamber 32, a substrate processing module 16, a load lock 18', an Equipment Front End Module (EFEM) 20 having a substrate cassette lifter 22, and a linear robot 34 having a two-link arm 36 and a robot drive unit 38 (see Figures 2A and 2B). The apparatus 30 is connected to a controller 40 having at least one processor 42 and at least one memory 44 containing computer program code 46. Figure 1 is an example of a linear robot with a two-link arm in a compact retracted position.

[0020] Referring also to FIGS. 2A and 2B, the two-link arm 36 generally includes an upper arm 90 and an end effector 92 rotatably connected to the upper arm 90 and joint 94. The robot drive unit 38 includes first and second motors 52, 54, and corresponding first and second encoders 56, 58 are connected to the housing 60 and drive first and second shafts 62, 64, respectively. Here, the shaft 62 can be connected to a pulley 66, and the shaft 64 can be connected to the upper arm 90. Here, the shafts 62, 64 can be concentric or arranged in another way. In an alternative embodiment, any suitable drive unit can be provided. The housing 60 can communicate with a chamber 68. Here, the bellows 70, the chamber 68, and the interior of the housing 60 separate the vacuum environment 72 from the atmospheric environment 74. The housing 60 can slide in the Z direction as a carriage on a slide 76. Here, a lead screw or other suitable vertical or linear Z drive unit 78 can be provided to selectively move the housing 60 and the two-link arm 36 connected thereto in the Z direction 80. The robot 34 is mounted on a linear transport device 98 configured to move the robot 36 along a linear path inside the chamber 32 as indicated by the arrow 100 in FIG. 1. This can use, for example, rails or magnetic levitation.

[0021] The latest semiconductor process technologies are always encouraging more devices to be packed into smaller packages. Processing smaller devices requires better position repeatability and accuracy from wafer processing equipment. Conventional wafer processing robots use encoder-based position feedback to track the position on the input side of the mechanical arm link mechanism or transmission, but mainly rely on the repeatability of the mechanical transmission to deliver the payload at the output side of the link mechanism or transmission at a repeatable and accurate position. Some systems use external sensors to measure the wafer position relative to the commanded robot position, but this method also depends on the accuracy of the mechanical transmission.

[0022] In an exemplary embodiment having the features as described in this specification, the sensor can be disposed on the output side of a linkage mechanism or a mechanical transmission. This sensor measures the location of the payload (such as a substrate) relative to the actual end effector of the robot and / or measures the position of the robot relative to the mechanism around the movement point, and / or enables the robot control system, due to wafer placement, to adapt to mechanisms changes over time such as initial wafer position, wafer misalignment, or deflection due to mechanical wear, thermal expansion, or payload weight, and then verify the wafer delivery position relative to the movement point. One method for this type of sensing is to use a local radar system attached to the robot base, arm, or end effector that can view or sense the robot payload or the robot environment. Another exemplary method is to attach a radar to the system and measure the robot or substrate position.

[0023] Referring to FIG. 3, a schematic top view showing an exemplary embodiment is presented. A robot arm 36 is shown holding a substrate 14 on an end effector 92 and positioning the substrate 14 within a processing module 16. The robot arm 36 includes a radar emitter and receiver 200 on the robot arm 36. The radar emitter and receiver 200 is configured to emit radio waves as indicated by 202 and then detect reflected waves 204 from the substrate 14 and reflected waves 206 from the processing chamber 16. The reflected waves 204, 206 detected by the radar emitter and receiver 200 can be used to determine the location, range, angle, or velocity of the substrate 14 and the processing chamber. This can be relative to the robot arm 36 and / or relative to each other. In an alternative embodiment, an optical system or a sonar system can be used instead of a radar. Alternatively, a combination of these systems or any other non-contact sensing system can be used.

[0024] Referring also to Figure 4, as an alternative to the system shown in Figure 3, or in addition to the system shown in Figure 3, the processing module 16 may include one or more radar emitters and receivers 200 on the inner wall of the processing module 16. Figure 4 shows three radar emitters and receivers 200 on the inner wall of the processing module 16. The radar emitters and receivers 200 are configured to emit radio waves as indicated by 202 and then detect reflected waves 204 from the substrate 14 (which may also be an end effector 92). The reflected waves 204, 206 detected by the radar emitters and receivers 200 may be used to determine the location, range, angle, or velocity of the substrate 14 (and end effector 92) relative to the processing chamber 16. In alternative embodiments, an optical system may be used instead of radar, or a sonar system may be used. Alternatively, a combination of these systems or any other non-contact detection systems may be used.

[0025] Referring also to Figure 5, another exemplary embodiment is shown. This can be used separately from the embodiments shown in Figures 3 and 4, or in addition to the features of those embodiments. A robotic arm 36 is shown that holds the substrate 14 on the end effector 92 and positions the substrate 14 within the processing module 16. The robotic arm 36 is equipped with a radar emitter 208 on the robotic arm 36. The radar emitter 208 is configured to emit radio waves as indicated by 202. The radio waves 202 are detected by a receiver 210 on the wall of the processing module 16. The radio waves 202 can be used to determine the location, range, angle, or velocity of the substrate 14 and the end effector 92. In alternative embodiments, an optical system may be used instead of radar, or a sonar system may be used. Alternatively, a combination of these systems or any other non-contact sensing systems may be used.

[0026] Referring also to Figure 6, another exemplary embodiment is shown. This can be used separately from the embodiments shown in Figures 3 to 5, or in addition to the features of those embodiments. A robotic arm 36 is shown that holds the substrate 14 on the end effector 92 and positions the substrate 14 within the processing module 16. The robotic arm 36 is equipped with a radar receiver 212 on the robotic arm 36. The processing module 16 is equipped with a radar transmitter 214 on the wall of the processing module 16. The radar transmitter 214 is configured to emit radio waves as indicated by 202. The radio waves 202 are detected by the receiver 212. The radio waves 202 can be used to determine the location, range, angle, or speed of the substrate 14 and the end effector 92. In alternative embodiments, an optical system may be used instead of radar, or a sonar system may be used. Alternatively, a combination of these systems or any other non-contact sensing systems may be used.

[0027] See also Figure 7, which shows another exemplary embodiment. This can be used separately from the embodiments shown in Figures 3 to 6, or in addition to the features of those embodiments. A robotic arm 36 is shown that holds the substrate 14 on the end effector 92 and positions the substrate 14 within the processing module 16. This figure shows the procured substrate or Circuit board fixing device , and indicates the endpoint location to be measured. Radar emitters(s) and receivers(s) 200 are transported by the robot 36 or Circuit board fixing device It may be positioned above. The radar emitter and receiver 200 are configured to emit radio waves as indicated by 202 and then detect reflected waves 206 from the processing chamber 16. The reflected waves 206 detected by the radar emitter and receiver 200 may be used to determine location, range, angle, or speed. In alternative embodiments, an optical system may be used instead of radar, or a sonar system may be used. Alternatively, a combination of these systems or any other non-contact detection systems may be used.

[0028] See also Figure 8, which shows another exemplary embodiment. This can be used separately from the embodiments shown in Figures 3 to 7, or in addition to the features of those embodiments. A robotic arm 36 is shown that holds the substrate 14 on the end effector 92 and positions the substrate 14 within the processing module 16. This figure shows the procured substrate or Circuit board fixing device , and indicates the endpoint location to be measured by the system or robot. The radar emitter(s) 208 indicates the substrate or transported by the robot. Circuit board fixing device The receiver(s) 210 is located on the processing module 16, and the receiver(s) 212 is located on the robot 36. Radio waves 202 and 206 may be used to determine location, range, angle, or speed. In alternative embodiments, an optical system may be used instead of radar, or a sonar system may be used. Alternatively, a combination of these systems or any other non-contact detection systems may be used.

[0029] See also Figure 9, which shows another exemplary embodiment. This can be used separately from the embodiments shown in Figures 3 to 8, or in addition to the features of those embodiments. A robotic arm 36 is shown that holds the substrate 14 on the end effector 92 and positions the substrate 14 within the processing module 16. This figure shows the system or robot to be procured, and the substrate or Circuit board fixing device The radar receiver(s) 230 indicates the endpoint location to be measured. The radar receiver(s) 230 is used to measure the substrate or transported by the robot 36. Circuit board fixing device The emitter(s) 200 are positioned on top of the robot or system. The radio waves 202 may be used to determine location, range, angle, or speed. In alternative embodiments, an optical system may be used instead of radar, or a sonar system may be used. Alternatively, a combination of these systems or any other non-contact detection systems may be used.

[0030] Radar-based positioning for robotic systems may be used for, but are not limited to, the following purposes: • Detection of substrate presence • Circuit board damage detection • Measurement of substrate position relative to robotic arm or system mechanism • Correction of substrate position for robot arm or system mechanism • Measuring the position of robot endpoints relative to the system mechanism or surroundings. • Detection of changes in robot position, velocity, acceleration, and vibration over time. • Detection of changes in the environment, physical dimensions, shape, or position. • Mechanical setup of robots and teaching, certification, or adjustment of reference positions. • Teaching, authentication, or adjustment of the robot's movement position. • Fault detection within the robot workspace • Safety interlock authentication (slot valve door open / close authentication before robot arm extension) Error recovery, robot location within the system, payload location, damaged payload, robot mechanism performance / damage after collision • The presence of human operators, maintenance technicians, collaborative robots / machines, or AGVs in the robot workspace.

[0031] The sensor mounting configuration may be arranged in the following configurations, but is not limited to these. • Radar emitters (or multiple emitters) and receivers (or multiple receivers) attached to the robot (see, for example, Figure 3). • Radar emitters (or multiple emitters) and receivers (or multiple receivers) attached to the system (see, for example, Figure 4). • Radar emitters (or multiple emitters) attached to the robot and receivers (or multiple receivers) attached to the system (see, for example, Figure 5). • Radar emitters (or more) attached to the system and receivers (or more) attached to the robot (see, for example, Figure 6).

[0032] An exemplary apparatus may be provided, comprising at least one emitter configured to emit energy and at least one receiver configured to receive the emitted energy. The at least one emitter is mounted on at least one of a robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module. The at least one receiver is mounted on at least one of a robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module.

[0033] The emitted energy may include at least one of radio waves, optical energy, or sound energy.

[0034] The at least one emitter and the at least one receiver may comprise a transceiver configured to emit emitted energy and receive reflected energy as received energy.

[0035] The at least one receiver may be configured to receive emitted energy as reflected energy reflected from at least one of a robot arm, an end effector on the robot arm, a substrate on the robot arm, or a substrate processing module.

[0036] The at least one emitter may be mounted on a robotic arm, and the at least one receiver may be mounted on a robotic arm.

[0037] The at least one emitter may comprise a plurality of emitters. The plurality of emitters are mounted in a chamber of the substrate processing module and each has a different energy transfer direction. All of the energy transfer directions are directed toward the center of the substrate positioning area within the chamber.

[0038] The at least one emitter may be mounted on a robotic arm, and the at least one receiver may be mounted on a substrate processing module. The at least one receiver comprises a plurality of receivers, which are positioned at different angular positions with respect to the center of the chamber of the substrate processing module.

[0039] The at least one emitter may be mounted on a substrate processing module. The at least one emitter comprises a plurality of emitters. The plurality of emitters are arranged at different angular positions with respect to the center of the chamber of the substrate processing module. The at least one receiver is mounted on a robotic arm.

[0040] The at least one emitter and the at least one receiver may be mounted on a substrate.

[0041] The at least one emitter may be mounted on a substrate. The at least one receiver may comprise a plurality of receivers. The plurality of receivers are positioned at different angular positions with respect to the center of the chamber of the substrate processing module.

[0042] The at least one emitter may be mounted on a robot arm and a substrate processing module. The at least one emitter comprises a plurality of emitters. The plurality of emitters on the substrate processing module are arranged at different angular positions with respect to the center of the chamber of the substrate processing module. The at least one receiver is located on the substrate.

[0043] An exemplary method may be provided, which includes mounting at least one emitter on at least one of a robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module, and mounting at least one receiver on at least one of the robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module. The at least one emitter is configured to emit energy, and the at least one receiver is configured to receive the emitted energy.

[0044] The at least one emitter and the at least one receiver may comprise a transceiver configured to emit emitted energy and receive reflected energy as received energy.

[0045] The receiver may be configured to receive emitted energy as reflected energy reflected from at least one of the following: a robot arm, an end effector on the robot arm, a substrate on the robot arm, or a substrate processing module.

[0046] The at least one emitter may be mounted on a robot arm. The at least one receiver may be mounted on a robot arm. The at least one emitter may comprise a plurality of emitters. The plurality of emitters are mounted on a chamber of a substrate processing module and each has a different energy transfer direction. All of the energy transfer directions are directed toward the center of the substrate positioning area in the chamber. The at least one emitter may be mounted on a robot arm, and the at least one receiver is mounted on a substrate processing module. The at least one receiver may comprise a plurality of receivers. The plurality of receivers are positioned at different angular positions with respect to the center of the chamber of the substrate processing module. The at least one emitter may be mounted on a substrate processing module. The at least one emitter may comprise a plurality of emitters. The plurality of emitters are positioned at different angular positions with respect to the center of the chamber of the substrate processing module. The at least one receiver may be mounted on a robot arm. The at least one emitter and the at least one receiver may be mounted on a substrate. The at least one emitter may be mounted on a substrate. The at least one receiver may comprise a plurality of receivers. The plurality of receivers may be positioned at different angular positions with respect to the center of the chamber of the substrate processing module. The at least one emitter may be mounted on the robot arm and the substrate processing module. The at least one emitter may comprise a plurality of emitters. The plurality of emitters on the substrate processing module may be positioned at different angular positions with respect to the center of the chamber of the substrate processing module. The at least one receiver may be located on the substrate.

[0047] An exemplary method may be provided, comprising emitting energy from at least one emitter and receiving the emitted energy by at least one receiver. The at least one emitter is mounted on at least one of a robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module, and the at least one receiver is mounted on at least one of the robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module. The method may include determining at least one of the following relative to the substrate processing module: the position, and / or range, and / or angle, and / or velocity of the substrate, the position, and / or range, and / or angle, and / or velocity of the robotic arm, and the position, and / or range, and / or angle, and / or velocity of the end effector, at least in part on the energy received by the at least one receiver. Alternatively, it may include determining the position of the substrate on the end effector and / or the robotic arm, at least in part on the energy received by the at least one receiver.

[0048] An exemplary apparatus may be provided, comprising at least one processor and at least one non-temporary memory containing computer program code. The at least one memory and the computer program code may, by at least one processor, cause the apparatus to emit energy from an emitter and receive the emitted energy by a receiver. Here, the at least one emitter is mounted on at least one of a robot arm, an end effector of a robot arm, a circuit board on a robot arm, or a circuit board processing module, and the at least one receiver is mounted on at least one of a robot arm, an end effector of a robot arm, a circuit board on a robot arm, or a circuit board processing module. The aforementioned at least one memory and computer program code are further processed by at least one processor into the device. At least one of the following may be determined based at least in part on the energy received by the at least one receiver: the position and / or range and / or angle and / or speed of the substrate relative to the substrate processing module, the position and / or range and / or angle and / or speed of the robot arm, and the position and / or range and / or angle and / or speed of the end effector. Alternatively, the position of the substrate on the end effector and / or robot arm may be determined based at least in part on the energy received by the at least one receiver.

[0049] An exemplary apparatus may be provided. The apparatus comprises means for emitting energy from an emitter and means for receiving the emitted energy by a receiver. The at least one emitter is mounted on at least one of a robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module, and the at least one receiver is mounted on at least one of a robotic arm, an end effector of a robotic arm, a substrate on a robotic arm, or a substrate processing module. The apparatus may further comprise means for determining at least one of the following relative to the substrate processing module: the position, and / or range, and / or angle, and / or velocity of a substrate; the position, and / or range, and / or angle, and / or velocity of a robotic arm; and the position, and / or range, and / or angle, and / or velocity of an end effector, at least in part on the energy received by the at least one receiver. The apparatus may also comprise means for determining the position of the end effector and / or the substrate on a robotic arm, at least in part on the energy received by the at least one receiver.

[0050] It should be understood that the above description is merely illustrative. Various alternatives and modifications may be devised by those skilled in the art. For example, the features enumerated in various dependent claims may be combined with each other in any preferred combination(s). In addition, features from the different embodiments described above may be selectively combined into a new embodiment. Accordingly, the description is intended to encompass all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. PCB processing module and A robotic arm that transports a substrate into the substrate processing module, Multiple emitters configured to release energy, At least one receiver configured to receive the emitted energy, A device comprising the following, wherein the robot arm has an end effector, and the end effector has a handle portion that connects to other links of the robot arm and a substrate holding portion, The plurality of emitters are mounted in the chamber of the substrate processing module, each having a different energy transfer direction, and all of these energy transfer directions are directed toward the center of the substrate positioning area within the chamber. The at least one receiver is - The handle portion, - A substrate on the robot arm or a substrate fixing device for the robot arm, It is attached to at least one of the following: Device.

2. PCB processing module and A robotic arm that transports a substrate into the substrate processing module, Multiple emitters configured to release energy, At least one receiver configured to receive the emitted energy, A device comprising the following, wherein the robot arm has an end effector, and the end effector has a handle portion that connects to other links of the robot arm and a substrate holding portion, The plurality of emitters are mounted on the substrate processing module, and each is positioned at a different angular position with respect to the center of the chamber of the substrate processing module. The at least one receiver is located on the handle portion. Device.

3. PCB processing module and A robotic arm that transports a substrate into the substrate processing module, At least one emitter configured to release energy, A plurality of receivers configured to receive the emitted energy, A device comprising the following, wherein the robot arm has an end effector, and the end effector has a handle portion that connects to other links of the robot arm and a substrate holding portion, The at least one emitter is attached to a substrate on the robot arm or to a substrate fixing device on the robot arm. Each of the aforementioned plurality of receivers - The handle portion, - The aforementioned substrate processing module, At least one of them is attached, and each is positioned at a different angular position with respect to the center of the chamber of the substrate processing module, Device.

4. PCB processing module and A robotic arm that transports a substrate into the substrate processing module, Multiple emitters configured to release energy, At least one receiver configured to receive the emitted energy, A device comprising the following, wherein the robot arm has an end effector, and the end effector has a handle portion that connects to other links of the robot arm and a substrate holding portion, The plurality of emitters are all mounted on the substrate processing module, and each is positioned at a different angular position with respect to the center of the chamber of the substrate processing module. The at least one receiver is located on a substrate on the robot arm or on a substrate fixing device of the robot arm. The device further includes another emitter attached to the handle portion. Device.

5. The released energy is Radio waves, Optical energy, • Sound energy, The apparatus according to any one of claims 1 to 4, comprising at least one of the following.

6. A method for manufacturing an apparatus comprising a substrate processing module, a robotic arm for transporting substrates into the substrate processing module, a plurality of emitters configured to emit energy, and at least one receiver configured to receive the emitted energy, wherein the robotic arm has an end effector, the end effector has a handle portion connected to other links of the robotic arm, and a substrate holding portion, and the method is The plurality of emitters are mounted in the chamber of the substrate processing module; - The handle portion, - A substrate on the robot arm or a substrate fixing device for the robot arm, Attaching the at least one receiver to at least one of them; This includes, however, the plurality of emitters each have a different energy transfer direction, and all of the energy transfer directions are directed toward the center of the substrate positioning area within the chamber. method.

7. A method for manufacturing an apparatus comprising a substrate processing module, a robotic arm for transporting substrates into the substrate processing module, a plurality of emitters configured to emit energy, and at least one receiver configured to receive the emitted energy, wherein the robotic arm has an end effector, the end effector has a handle portion connected to other links of the robotic arm, and a substrate holding portion, and the method is The plurality of emitters are attached to the substrate processing module; The at least one receiver is attached to the handle portion; This includes, however, the plurality of emitters are each positioned at different angular positions with respect to the center of the chamber of the substrate processing module. method.

8. A method for manufacturing an apparatus comprising a substrate processing module, a robotic arm for transporting a substrate into the substrate processing module, at least one emitter configured to emit energy, and a plurality of receivers configured to receive the emitted energy, wherein the robotic arm has an end effector, the end effector having a handle portion connected to other links of the robotic arm, and a substrate holding portion, and the method is Attaching the at least one emitter to a substrate on the robot arm or to a substrate fixing device of the robot arm; Each of the aforementioned plurality of receivers, - The handle portion, - The aforementioned substrate processing module, To attach to at least one of them; This includes, however, the plurality of receivers are each positioned at different angular positions with respect to the center of the chamber of the substrate processing module. method.

9. A method for manufacturing an apparatus comprising a substrate processing module, a robotic arm for transporting substrates into the substrate processing module, a plurality of emitters configured to emit energy, and at least one receiver configured to receive the emitted energy, wherein the robotic arm has an end effector, the end effector has a handle portion connected to other links of the robotic arm, and a substrate holding portion, and the method is The plurality of emitters are attached to the substrate processing module; The at least one receiver is attached to the substrate on the robot arm or to the substrate fixing device of the robot arm; This includes, however, the plurality of emitters are each positioned at different angular positions with respect to the center of the chamber of the substrate processing module. The method further includes attaching another emitter to the handle portion. method.

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