Spinner table and second frame unit support member

The spinner table design accommodates both 8-inch and 12-inch workpieces using a first and second frame unit with a detachable support member, simplifying the process of switching between sizes and reducing operational complexity.

JP7883933B2Active Publication Date: 2026-07-02DISCO CORP
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Patent Information

Application Number
JP2022180591
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2022-11-10
Publication Date
2026-07-02
Estimated Expiration
2042-11-10

AI Technical Summary

Technical Problem

Current cleaning methods require changing the spinner table for each different size of the workpiece, making the process cumbersome and complex.

Method used

A spinner table design that can accommodate both 8-inch and 12-inch workpieces by using a first frame unit with a first ring frame and a second frame unit with a larger ring frame, supported by a detachable second frame unit support member, which includes a disc-shaped base and pendulum clamps, allowing for easy switching between sizes without replacing the spinner table.

Benefits of technology

Reduces the complexity of operations required to accommodate different workpiece sizes by enabling the spinner table to handle both 8-inch and 12-inch wafers without needing to change the spinner table.

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Smart Images

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Patent Text Reader

Abstract

To provide a spinner table capable of suppressing the complication of work corresponding to a change in size of a workpiece to be cleaned.SOLUTION: A spinner table 1 includes a base 2, and a first support portion 10 that is fixed to the central region of the upper surface of the base 2 and has a suction holding portion 11 that suction-holds a workpiece 201, and is provided with a plurality of first pendulum clamps 15 on its outer periphery that hold a first ring frame of a first frame unit, and the first support portion 10 has an opening 22 into which the first support portion 10 is inserted, and a plurality of second pendulum clamps 23 on its outer periphery that hold a second ring frame 203-2 of a second frame unit 200-2 by centrifugal force when the spinner table 1 is rotating, and is inserted into the opening 22 of a ring-shaped second frame unit support member 20 that is fixed to the base 2, and exposes the suction holding portion 11.SELECTED DRAWING: Figure 10
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Citation Information

Patent Citations

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