Process for producing ZnkIn2Ok+3:Sn ceramics at low temperatures

Abstract

The invention relates to processes for producing semiconductor materials and can be used in semiconductor technology.The process for producing ZnkIn2Ok+3:Sn ceramics at low temperatures consists in sintering ZnO, In2O3 and SnO2or Sn powders in a closed volume, wherein sintering is carried out at a temperature of 500÷1000°C by the chemical transport reaction, with the participation, as a transport agent, of HCl or HBr or HI at a pressure of 0.01÷10 atm, and with the participation of H2at a pressure of ≤10 atm, and the concentration of SnO2or Sn powder is 0.5÷10 at.%.