Surface pressure display device, surface pressure display method, and program

Abstract

This surface pressure display device comprises: a reception unit that receives detection data from a surface pressure measurement tool passed through a conveyance path for conveying a substrate; and an arithmetic unit that calculates the surface pressure applied to the substrate, on the basis of the detection data. The arithmetic unit: identifies, on the basis of the conveyance speed calculated on the basis of time variation in the detection data received by the reception unit, the position in the conveyance direction with respect to rows of a plurality of pressure detection units aligned in the width direction of the conveyance path, at respectively different times; rearranges detection signals of the respective rows identified at the respective times in the order of conveyance direction position; and generates a surface pressure image on the basis of the detection signals of the rows in correspondence with the conveyance direction position.

Description

Surface pressure display device, surface pressure display method and program

[0001] The present disclosure relates to a surface pressure display device, a surface pressure display method, and a program.

[0002] Patent Document 1 discloses a surface pressure measuring tool that is passed through a conveying path along which a glass sheet is conveyed and that measures the surface pressure applied to the glass sheet in the conveying path.

[0003] Japanese Utility Model Registration No. 3224354

[0004] In Patent Document 1, a computer analyzes detected pressure data and obtains a visualized pressure distribution. However, Patent Document 1 does not take into consideration the possibility of the computer visualizing the pressure distribution with higher resolution.

[0005] The present disclosure has been devised in view of the above-described conventional situation, and aims to visualize surface pressure with high precision.

[0006] The present disclosure provides a surface pressure display device comprising: a receiving unit that receives detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction; a calculation unit that calculates a surface pressure applied to the substrate based on the detection data; and a display unit that displays an image showing the calculated surface pressure, wherein the surface pressure measurement tool comprises a plurality of pressure detection units arranged in a matrix form that detects pressure, and the detection data includes detection signals detected by each of the plurality of pressure detection units, and the calculation unit calculates a transport speed of the transport path based on a time change in the detection data received by the receiving unit, identifies positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at different times based on the transport speed, sorts the detection signals of each row identified at each time in order of position in the transport direction, and generates an image showing the surface pressure applied to the substrate based on the detection signals of each row that correspond to the sorted positions in the transport direction, and displays it on the display unit.

[0007] The present disclosure also provides a surface pressure display method that receives detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction, calculates a surface pressure applied to the substrate based on the detection data, and displays an image showing the calculated surface pressure, wherein the surface pressure measurement tool has a plurality of pressure detection units arranged in a matrix form that detects pressure, and the detection data includes detection signals detected by each of the plurality of pressure detection units, calculates a transport speed of the transport path based on a change over time in the received detection data, identifies positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at different times based on the transport speed, rearranges the detection signals of each row identified at each time in order of position in the transport direction, and generates and displays an image showing the surface pressure applied to the substrate based on the detection signals of each row that correspond to the rearranged positions in the transport direction.

[0008] The present disclosure also provides a program for causing a computing device to calculate a transport speed of a transport path based on a time change in detection data received from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction, the surface pressure measurement tool having a plurality of pressure detection units arranged in a matrix form that detects pressure, the detection data including detection signals detected by each of the plurality of pressure detection units, specifying, based on the transport speed, positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at different times, rearranging the detection signals of each row specified at each time in order of position in the transport direction, and generating and displaying an image showing the surface pressure applied to the substrate based on the detection signals of each row that correspond to the rearranged positions in the transport direction.

[0009] The present disclosure also provides a surface pressure display device comprising: a receiving unit that receives detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction; a calculation unit that calculates a surface pressure applied to the substrate based on the detection data; and a display unit that displays an image showing the calculated surface pressure, wherein the surface pressure measurement tool comprises a plurality of pressure detection units arranged in a matrix form that detects pressure, and the detection data includes detection signals detected by each of the plurality of pressure detection units, and the calculation unit calculates a transport speed of the transport path based on a change over time in the detection data received by the receiving unit, adjusts a sampling rate at which each of the plurality of pressure detection units detects pressure based on the transport speed so that each row of the plurality of pressure detection units lined up in the width direction of the transport path can detect pressure at the same position on the transport path, and generates an image showing the surface pressure applied to the substrate based on the detection signals of each row, and displays it on the display unit.

[0010] Any combination of the above components, and conversion of the expression of the present disclosure into a method, device, system, storage medium, computer program, etc., are also valid aspects of the present disclosure.

[0011] According to the present disclosure, surface pressure can be visualized with high precision.

[0012] 1 is a schematic perspective view of a substrate cleaning apparatus in which a surface pressure measurement tool according to a first embodiment is used. FIG. 2 is a schematic side view of a substrate cleaning apparatus in which a surface pressure measurement tool according to a first embodiment is used. FIG. 3 is a perspective view of a surface pressure measurement tool according to a first embodiment. FIG. 4 is an exploded perspective view of the surface pressure measurement tool according to the first embodiment. FIG. 5 is a cross-sectional view taken along the line A-A in FIG. 3. FIG. 6 is a functional block diagram illustrating a control unit of the surface pressure measurement tool according to the first embodiment. FIG. 7 is a schematic diagram illustrating a visualized pressure distribution in the substrate cleaning apparatus. FIG. 7 is a perspective view of a surface pressure measurement tool according to a second embodiment. FIG. 8 is a functional block diagram illustrating a control unit of the surface pressure measurement tool according to the second embodiment. FIG. 9 is a schematic diagram illustrating a visualized pressure distribution based on one row of detection data. FIG. 10 is a schematic diagram illustrating transportation of the surface pressure measurement tool according to the second embodiment. FIG. 11 is a graph illustrating time changes in detection signals measured by the surface pressure measurement tool according to the second embodiment. FIG. 12 is a schematic diagram illustrating an example of rearrangement of detection data according to the second embodiment. FIG. 13 is a schematic diagram illustrating a visualized pressure distribution based on 16 rows of detection data. FIG. 14 is a flowchart illustrating processing by a computer according to the second embodiment. FIG. 15 is a schematic diagram illustrating transportation of a surface pressure measurement tool according to a modified example of the second embodiment.

[0013] Hereinafter, various embodiments that specifically disclose a surface pressure display device, a surface pressure display method, and a program according to the present disclosure will be described in detail, with appropriate reference to the drawings. However, more detailed explanation than necessary may be omitted. For example, detailed explanations of already well-known matters and redundant explanations of substantially identical configurations may be omitted. This is to avoid unnecessary redundancy in the following explanation and to facilitate understanding by those skilled in the art. Note that the accompanying drawings and the following explanation are provided to enable those skilled in the art to fully understand the present disclosure, and are not intended to limit the subject matter recited in the claims.

[0014] First Embodiment First, a substrate cleaning apparatus 10 using a surface pressure measuring tool 50 according to the first embodiment will be described. Fig. 1 is a schematic perspective view of the substrate cleaning apparatus 10 using the surface pressure measuring tool 50 according to the first embodiment. Fig. 2 is a schematic side view of the substrate cleaning apparatus 10 using the surface pressure measuring tool 50 according to the first embodiment.

[0015] As shown in Figures 1 and 2, a substrate cleaning device 10 has a transport path 11 for transporting a glass plate (substrate), and this transport path 11 is provided with a disk cleaning unit 13, a roller cleaning unit 15, and an air knife 17.

[0016] The substrate cleaning apparatus 10 is an apparatus for cleaning rectangular glass plates. The glass plates cleaned by this substrate cleaning apparatus 10 are made of an alkali-free glass material used for flat panel displays (FPDs) such as LCDs (Liquid Crystal Displays) or OLEDs (Organic Light Emitting Diodes). The substrate cleaning apparatus 10 cleans the top and bottom surfaces of horizontally transported glass plates, particularly the top surface on which various processes and machining are performed.

[0017] The transport path 11 includes a plurality of transport rollers 23 stretched across parallelly arranged frames 21, and these transport rollers 23 transport the glass plate to be cleaned in one direction, that is, the transport direction X. The transport path 11 also includes pinch rollers 25 arranged above and below, and the glass plate is sandwiched between the pinch rollers 25 from above and below and sent to the disk cleaning unit 13 and roller cleaning unit 15 located downstream.

[0018] The disk cleaning unit 13 has a plurality of disk brushes 31 arranged vertically. The disk brushes 31 are arranged above and below the conveying path 11 in a direction perpendicular to the conveying direction X of the glass plate, and each rotates around a vertical axis. The roller cleaning unit 15 has a roller brush 33. The roller brush 33 rotates around a horizontal axis perpendicular to the conveying direction X of the glass plate on the upper side of the conveying path 11. The disk cleaning unit 13 and the roller cleaning unit 15 are equipped with nozzles (not shown) that spray cleaning liquid onto the upper and lower surfaces of the glass plate. In the disk cleaning unit 13, the upper and lower surfaces of the glass plate are cleaned by the rotation of each disk brush 31, and in the roller cleaning unit 15, the upper surface of the glass plate is cleaned by the rotation of the roller brush 33.

[0019] The air knife 17 is provided downstream of the roller cleaning unit 15. This air knife 17 blows air onto the glass sheet to blow off and remove cleaning liquid adhering to the glass sheet after cleaning. This air knife 17 is arranged with a gap G1 between it and the transport rollers 23 of the transport path 11. Here, this gap G1 is larger than the thickness of the glass sheet being transported, for example, 3.5 mm. Although not shown in FIGS. 1 and 2 , air knives 17 are provided not only at the top but also at the bottom of the transport path 11 to remove cleaning liquid from the top and bottom surfaces of the glass sheet.

[0020] The glass sheet that has been cleaned in the disk cleaning unit 13 and the roller cleaning unit 15 and from which the cleaning liquid has been removed by the air knife 17 passes through a gap G2 between upper and lower partition walls 37 installed at the downstream end of the conveying path 11 and is sent to the next process, etc. Here, the gap G2, like the gap G1, is also set to a dimension larger than the thickness of the glass sheet to be conveyed, and is set to, for example, 3.5 mm.

[0021] Next, a description will be given of the surface pressure measurement tool 50 according to the first embodiment. Fig. 3 is a perspective view of the surface pressure measurement tool 50 according to the first embodiment. Fig. 4 is an exploded perspective view of the surface pressure measurement tool 50 according to the first embodiment. Fig. 5 is a cross-sectional view taken along line A-A in Fig. 3.

[0022] As shown in FIGS. 3 and 4, the surface pressure measuring tool 50 according to this embodiment includes a surface pressure sensor 51 and a support plate 61.

[0023] The surface pressure sensor 51 includes a sensor unit 53 and a control unit 55. The sensor unit 53 is formed in a rectangular shape and is made of, for example, a flexible printed circuit (FPC), in which a conductor pattern is formed on a flexible and insulating resin sheet. A plurality of sheet-like pressure detection units 57 are arranged along the width direction at the front edge of the sensor unit 53. These pressure detection units 57 are made of pressure-sensitive resistor elements or piezoelectric elements and are capable of measuring loads of, for example, 30 g or less. In other words, the pressure detection units 57 can detect pressure.

[0024] These pressure detection units 57 are connected to a conductor pattern formed on a flexible printed wiring board that constitutes the sensor unit 53. The sensor unit 53 has a wiring unit 59 at its rear end, and a control unit 55 is attached to this wiring unit 59. The control unit 55 is a control board on which various electronic components that constitute a control circuit are mounted on a printed wiring board. The control unit 55 is also provided with a button battery for driving the control circuit. Detection signals from the pressure detection units 57 of the surface pressure sensor 51 are input to the control unit 55, and the control unit 55 performs various processes on the input detection signals.

[0025] The support plate 61 is made of a metal plate such as stainless steel or aluminum, and is formed in a rectangular shape in a plan view. A sensor arrangement area 65 is provided on the upper surface of the support plate 61, and the sensor unit 53 of the surface pressure sensor 51 is placed on this sensor arrangement area 65 and adhered with double-sided adhesive tape or the like. Note that a plastic plate, a glass plate, or the like may also be used as the support plate 61.

[0026] An accommodation hole 67 consisting of a rectangular hole penetrating from the front to the back is formed in the support plate 61 rearward of the sensor arrangement area 65. This accommodation hole 67 has an inner shape larger than the outer shape of the control unit 55 of the surface pressure sensor 51. The control unit 55 of the surface pressure sensor 51 is fitted into and accommodated in this accommodation hole 67.

[0027] The surface pressure measuring tool 50 is housed in a waterproof cover 71. The waterproof cover 71 is formed, for example, from a transparent resin sheet that is waterproof and flexible.

[0028] Since the cleaning liquid used in the substrate cleaning apparatus 10 has a wide pH range, from acidic to alkaline, it is preferable that the waterproof cover 71 be acid-resistant and alkali-resistant. Furthermore, since a slurry-like cleaning liquid is used, it is preferable that the waterproof cover 71 have excellent mechanical properties, such as abrasion resistance. Therefore, it is preferable that the waterproof cover 71 be formed from a resin sheet made of a fluororesin such as PTFE (polytetrafluoroethylene), ETFE (ethylene tetrafluoroethylene), or FEP (fluoroethylene propylene), TPU (thermoplastic polyurethane), or silicone resin.

[0029] The waterproof cover 71 has a front cover 73 and a back cover 75 each formed in a rectangular shape. With the surface pressure measurement tool 50 disposed between the front cover 73 and the back cover 75, the front cover 73 and the back cover 75 are fixed over the entire periphery in the circumferential direction by welding or bonding with an adhesive around the periphery of the front cover 73 and the back cover 75. As a result, the periphery of the surface pressure measurement tool 50 is covered by the waterproof cover 71 and made waterproof.

[0030] An opening / closing window 79 having an opening / closing piece 77 is formed in the front cover 73 of the waterproof cover 71. The opening / closing window 79 is provided above the accommodating hole 67 in the front cover 73. The opening / closing piece 77 is formed by forming a cut around the periphery of the accommodating hole 67 excluding the side of the wiring portion 59 of the surface pressure sensor 51, and the opening / closing piece 77 makes the opening / closing window 79 openable and closable. By opening the opening / closing window 79, the sensor unit 55 accommodated in the accommodating hole 67 can be exposed. The opening / closing window 79 is sealed and closed by adhering the periphery of the opening / closing piece 77 to the front cover 73 with waterproof tape (not shown).

[0031] As shown in FIG. 5 , the control unit 55 accommodated in the accommodation hole 67 has a thickness equal to or less than the thickness of the support plate 61 and does not protrude from the front or rear surfaces of the support plate 61. The thickness T (see FIG. 5 ) of the surface pressure measurement tool 50, including the waterproof cover 71, is thinner than the minimum gap in the transport path 11 across the entire area in a plan view. In this embodiment, the gap G1 between the transport rollers 23 and the gap G2 between the air knife 17, which are set to the same dimensions, are the minimum gaps in the transport path 11. Therefore, the thickness T of the surface pressure measurement tool 50 is smaller than these gaps G1 and G2. For example, if the gaps G1 and G2 are 3.5 mm, the thickness T of the surface pressure measurement tool 50 is smaller than 3.5 mm so as not to interfere with the air knife 17 and the partition wall 37 during transport in the substrate cleaning apparatus 10. The thickness T of the surface pressure measurement tool 50 is preferably 2.0 mm or less.

[0032] Next, the functions of the surface pressure measurement tool 50 will be described. FIG. 6 is a functional block diagram illustrating the control unit 55 of the surface pressure measurement tool 50. As shown in FIG. 6, the control unit 55 of the surface pressure measurement tool 50 includes a voltage divider 81, an LPF (low-pass filter) 83, an ADC (analog-to-digital converter) 85, and a peripheral data transmitter (communication unit) 87. In the control unit 55, the detection signal from the pressure detection unit 57 of the sensor unit 53 is divided by the voltage divider 81, noise is removed by the LPF 83, and the signal is then digitally converted by the ADC 85. The control unit 55 then transmits the digitally converted detection signal from the peripheral data transmitter 87. The detection data including the detection signal transmitted from the control unit 55 is received by a peripheral data receiver 93 provided in the computer (external device) 110 and input to the computer 91. The computer 91 analyzes the input detection data from the control unit 55 of the surface pressure measurement tool 50.

[0033] 1 and 2, the surface pressure measuring tool 50 is fed from the upstream side of the substrate cleaning apparatus 10. Then, the surface pressure measuring tool 50 is transported in the transport direction X by the transport rollers 23 of the transport path 11, and is further sandwiched between the pinch rollers 25 and sent to the disk cleaning unit 13 and the roller cleaning unit 15. The surface pressure measuring tool 50 then passes between the disk brushes 31 of the disk cleaning unit 13 and below the roller brushes 33 of the roller cleaning unit 15. Thereafter, the surface pressure measuring tool 50 passes through the cleaning liquid removal region of the gap G1 in which the air knife 17 is installed, passes through the gap G2 in the partition wall 37, and is sent to the next process, etc.

[0034] In this way, the surface pressure measuring tool 50 transported by the substrate cleaning apparatus 10 transmits detection data including a detection signal of the pressure detected by the pressure detection unit 57 of the sensor unit 53 from the BLE (Bluetooth (registered trademark) Low Energy) peripheral data transmission unit 87 of the control unit 55 one by one along the transport path 11. This transmitted detection data is received by the BLE central data receiving unit 93 and sent to the computer 110 connected to the BLE central data receiving unit 93 so as to be able to communicate data with it. The computer 110 may be equipped with the BLE central data receiving unit 93. Hereinafter, the BLE central data receiving unit 93 may be referred to as a receiving unit.

[0035] The computer 110 analyzes the received detection data to obtain a visualized pressure distribution. The pressure distribution visualized by the computer 110 is displayed on a display unit 113 connected to the computer 110 so as to enable data communication. The display unit 113 is, for example, a display. The computer 110 may also include the display unit 113. The computer 110 includes a processor 111 and a memory 112, and various functions of the computer 110 are realized by the processor 111 and the memory 112 working together. Hereinafter, the processor 111 may also be referred to as a calculation unit. Also, hereinafter, the computer 110 may also be referred to as a surface pressure display device. The measurement sampling rate of this surface pressure measurement tool 50 is, for example, 50 ms.

[0036] FIG. 7 is a schematic diagram showing a visualized pressure distribution in the substrate cleaning apparatus 10. The visualized pressure distribution shown in FIG. 7 is displayed on the display unit 113. As shown in FIG. 7 , the pressure distribution visualized based on the detection signal detected by the surface pressure measurement tool 50 shows that the surface pressure is higher at the pinch point P1 held by the pinch roller 25, the contact point P2 of the disk brush 31 in the disk cleaning unit 13, and the contact point P3 of the roller brush 33 in the roller cleaning unit 15, compared to other areas. In other words, a user visually checking the visualized pressure distribution displayed on the display unit 113, for example, can confirm that in the substrate cleaning apparatus 10, the pinch roller 25, the disk brush 31 of the disk cleaning unit 13, and the roller brush 33 of the roller cleaning unit 15 are in balanced contact with the glass plate being transported.

[0037] In this way, by referring to the pressure distribution based on the detection signal detected by the surface pressure measuring tool 50, it is possible to easily check whether or not the pinch rollers 25, the disc brush 31, the roller brush 33, etc. are in contact with the conveyed glass plate, and the contact pressure. This allows the pinch rollers 25, the disc brush 31, the roller brush 33, etc. of the substrate cleaning apparatus 10 to be accurately positioned, thereby achieving good cleaning performance for the glass plate.

[0038] As described above, according to the surface pressure measurement tool 50 of this embodiment, the surface pressure sensor 51 is mounted on one surface of the support plate 61 in an overlapping manner, and the control unit 55 of the surface pressure sensor 61 is housed in the accommodation hole 67 of the support plate 61. The thickness of the entire area in a plan view is made thinner than the smallest gaps G, G2 of the conveying path 11. Therefore, this surface pressure measurement tool 50 can be fed into the conveying path 11 having the narrow gaps G1, G2 for conveying the glass sheet, and thereby the sensor unit 53 having the multiple pressure detection units 57 of the surface pressure sensor 51 can measure the surface pressure on the glass sheet in the conveying path 11 with high accuracy across the conveying direction X.

[0039] Furthermore, the control unit 55 of the surface pressure measuring tool 50 has a peripheral data transmitting unit 87 that communicates with a central data receiving unit 93 provided in a computer 91, which is an external device. This eliminates the need for a cable to extract detected data from the control unit 55, and also simplifies the structure of the control unit 55, allowing for a lower profile.

[0040] Furthermore, the surface pressure measuring tool 50 is covered on all sides by a waterproof cover 71 made of a waterproof resin sheet, so that the surface pressure can be smoothly measured by passing it through the transport path 11 of the substrate cleaning device 10 in which a liquid such as a cleaning liquid is used.

[0041] Moreover, the waterproof cover 71 has an opening / closing window 79 that can be opened and closed by an opening / closing piece 77 at a position facing the accommodation hole 67. Therefore, by opening the opening / closing window 79 of the waterproof cover 71 to expose the control unit 55 inside the accommodation hole 67, it becomes easy to perform maintenance on the control unit 55, such as replacing the battery.

[0042] In the first embodiment, the sensor unit 53 has a plurality of pressure detection units 57 arranged in a row along the width direction, but the arrangement and number of the pressure detection units 57 in the sensor unit 53 are not limited to being arranged in a row along the width direction. In the following second embodiment, a surface pressure measurement tool 50A (see FIG. 8) including a sensor unit 53A (see FIG. 8) in which a plurality of pressure detection units 57 are arranged in a matrix, and a method for visualizing the surface pressure measured by the surface pressure measurement tool 50A with high resolution will be described. In the description of the surface pressure measurement tool 50A etc. according to the second embodiment, the description of the same content as the surface pressure measurement tool 50 according to the first embodiment will be simplified or omitted, and the description will focus on the differences.

[0043] (Embodiment 2) Fig. 8 is a perspective view of a surface pressure measurement tool 50A according to embodiment 2. The surface pressure measurement tool 50A includes a plurality of pressure detection units 57 arranged in a matrix to detect pressure. In the surface pressure measurement tool 50 according to embodiment 1, the plurality of pressure detection units 57 are arranged in a row in the width direction of the conveying path 11, in other words, in a direction perpendicular to the conveying direction X, in the sensor unit 53. Hereinafter, a row formed by arranging a plurality of pressure detection units 57 in a row in the width direction of the conveying path 11 may be referred to as a pressure detection row. In the surface pressure measurement tool 50A according to embodiment 2, a plurality of pressure detection rows (e.g., pressure detection rows 100) are arranged in multiple rows along the conveying direction X in the sensor unit 53A.

[0044] FIG. 9 is a functional block diagram illustrating the control unit 55 of the surface pressure measurement tool 50A according to the second embodiment. The control unit 55 of the surface pressure measurement tool 50A according to the second embodiment has the same configuration as the control unit 55 of the surface pressure measurement tool 50 according to the first embodiment described with reference to FIG. 6. In the control unit 55, the detection signals from the pressure detection units 57 of the sensor unit 53A are divided by the voltage divider 81, noise is removed by the LPF unit 83, and the signals are digitally converted by the ADC unit 85. The control unit 55 then transmits the digitally converted detection signals from the BLE peripheral data transmitter 87. The detection data including the detection signals transmitted from the control unit 55 is received by the BLE central data receiver 93 and input to the computer 91. The processor 111 of the computer 110 calculates the surface pressure applied to the glass plate based on the detection data. An image showing the surface pressure calculated by the processor 111, in other words, a visualized pressure distribution, is displayed on the display unit 113. Hereinafter, detection data including detection signals from each of the multiple pressure detection units 57 included in one pressure detection array may be referred to as the detection data of that pressure detection array. For example, detection data from the pressure detection array 100 refers to detection data including detection signals from each of the multiple pressure detection units 57 included in the pressure detection array 100. Furthermore, detection data for one array refers to detection data from one pressure detection array. Furthermore, in this specification, the terms "image showing surface pressure" and "visualized pressure distribution" are used synonymously.

[0045] FIG. 10 is a schematic diagram showing a pressure distribution visualized based on one array of detection data. The visualized pressure distribution shown in FIG. 10 represents the surface pressure calculated by the computer 110 based on the detection signals detected by one pressure detection array among the multiple pressure detection units 57 arranged in the sensor unit 53A of the surface pressure measurement tool 50A. For example, contact points 120 and 121 are locations where the disk brush (e.g., the disk brush 31 of the substrate cleaning apparatus 10) and the surface pressure measurement tool 50A come into contact. Based on the pressure distribution visualized based on one array of detection data, it can be seen that the surface pressure at the location where the surface pressure measurement tool 50A and the disk brush come into contact is higher than at other locations. However, the pressure distribution visualized based on the detection signals of one pressure detection array, in other words, an image showing the surface pressure, may have lower image quality than an image showing the surface pressure generated based on the detection signals of multiple pressure detection arrays. The pressure distribution visualized based on the detection signals of multiple pressure detection arrays will be described with reference to FIG. 11 .

[0046] Fig. 11 is a schematic diagram showing a visualized pressure distribution based on detection data for 16 rows. The visualized pressure distribution shown in Fig. 11 shows the surface pressure calculated by the computer 110 based on detection signals detected by multiple pressure detection rows among the multiple pressure detection units 57 arranged in the sensor unit 53A of the surface pressure measurement tool 50A. Note that the pressure distribution shown in Fig. 10 and the pressure distribution shown in Fig. 11 show pressure distributions at the same position (e.g., the same position on the transport path 11 of the substrate cleaning apparatus 10). From the pressure distribution shown in Fig. 11, it can be confirmed that the disc brush and the surface pressure measurement tool 50A have come into contact, for example, at contact point 120 and contact point 121, as with the pressure distribution shown in Fig. 10.

[0047] A pressure distribution visualized based on one row of detection data, such as that shown in FIG. 10 , may be less precise than a pressure distribution visualized based on multiple rows of detection data, such as that shown in FIG. 11 . For example, in the pressure distribution shown in FIG. 10 , contact between the disc brush and the surface pressure measurement tool 50A at the contact point 121 can be confirmed, but the outline of the contact point 121 appears blurred. However, in the pressure distribution shown in FIG. 11 , the outline of the contact point 121 appears clearer than in the case of FIG. 10 . This is because the image quality of the pressure distribution visualized based on the detection signal is limited by the sampling rate at which the detection signal is detected. For example, in the first embodiment, the sampling rate of the surface pressure measurement tool 50 was 50 ms. In this case, the surface pressure measurement tool 50 moves along the conveying path 11 in the conveying direction X during the 50 ms between when a detection signal is detected by a pressure detection array consisting of multiple pressure detection units 57 and when a detection signal is detected again by the pressure detection array. Therefore, during the 50 ms between the detection of a detection signal and the next detection, no pressure applied to the surface pressure measurement tool 50 is detected. As a result, the image quality of the pressure distribution visualized based on one row of detection data may be low depending on the sampling rate. However, by using a method described later with reference to Figures 12 to 15, an image showing the surface pressure generated based on the detection signals of multiple pressure detection rows, such as the pressure distribution shown in Figure 11, can be generated with higher resolution than an image showing the surface pressure generated based on the detection signals of a single pressure detection row.

[0048] For simplicity, the following description will be given using a surface pressure measurement tool 50B equipped with four pressure detection arrays. FIG. 12 is a schematic diagram illustrating the transportation of the surface pressure measurement tool 50B according to the second embodiment. Although the surface pressure measurement tool 50B is depicted in a simplified form, it has the same configuration as the surface pressure measurement tool 50A except for the number of pressure detection arrays. The surface pressure measurement tool 50B includes a pressure detection array 131, a pressure detection array 132, a pressure detection array 133, and a pressure detection array 134. Although not shown in FIG. 12, the surface pressure measurement tool 50B is transported along the transport path 11 in the positive direction of the x-axis. The positive direction of the x-axis coincides with the transport direction X. A disc brush 130 is provided on the transport path 11. FIG. 12 illustrates the surface pressure measurement tool 50B when the time t from the start of transport is 0, when the time t is Δk, and when the time t is 2Δk. In the example of FIG. 12, the sampling rate is Δk.

[0049] At this time, for example, each of the multiple pressure detection units 57 included in the pressure detection array 131 detects the pressure applied by the disc brush 130 when the time t is Δk. Also, each of the multiple pressure detection units 57 included in the pressure detection array 131 detects the pressure applied by the disc brush 130 when the time t is 2Δk. However, each of the multiple pressure detection units 57 included in the pressure detection array 131 cannot detect the pressure applied by the disc brush 130 between the time Δk and 2Δk. As a result, the surface pressure visualized based on the detection signals of one array of the pressure detection array 131 may have low image quality.

[0050] However, if the position in the x-axis direction for each pressure detection array can be identified at each different time while the surface pressure measurement tool 50B is being transported, the computer 110 can perform the following. That is, the computer 110 can rearrange the detection data, including the detection signals detected by each pressure detection array whose position was identified at each time, in order of position in the x-axis direction, based on the magnitude relationship between the positions of the pressure detection arrays in the x-axis direction. As a result, even if there is a position where one pressure detection array cannot detect a detection signal due to the sampling rate being limited, the computer 110 can visualize the pressure distribution with higher resolution using the detection signals at that position detected by another pressure detection array.

[0051] In order to identify the position of each pressure detection array in the x-axis direction at a specific time, the computer 110 calculates the conveying speed of the conveying path 11. For ease of explanation, it is assumed that the pressure detection arrays 131, 132, 133, and 134 pass through the same location on the conveying path 11 at a constant speed. Under this assumption, for example, the time change in the detection signal detected by the pressure detection array 131 and the time change in the detection signal detected by the pressure detection array 134 are shifted by a predetermined time, as shown in FIG.

[0052] FIG. 13 is a graph illustrating the change over time in the detection signal measured by the surface pressure measuring tool 50B according to the second embodiment. In the graph shown in FIG. 13, the horizontal axis represents time and the vertical axis represents the detection signal. A characteristic 140 represents the change over time in the detection signal detected by the pressure detection array 131. More precisely, the characteristic 140 represents the change over time in the average value of the detection signals detected by each of the multiple pressure detection units 57 included in the pressure detection array 131. A characteristic 141 represents the change over time in the detection signal detected by the pressure detection array 134. More precisely, the characteristic 141 represents the change over time in the average value of the detection signals detected by each of the multiple pressure detection units 57 included in the pressure detection array 134.

[0053] The delay time τ between the characteristics 140 and 141 can be calculated using, for example, a cross-correlation function between the characteristics 140 and 141. For example, the cross-correlation function R ｘｙ [τ] can be calculated by the following formula (1).

[0054]

[0055] Considering x[t] in equation (1) as characteristic 140 and y[t+τ] as characteristic 141, R ｘｙ The delay time τ can be determined as the τ at which the value of [τ] is maximum. Note that in equation (1), the time t can take values ​​from 1 to N, which is a natural number equal to or greater than 2, but is not limited to this. The delay time τ between the characteristic 140 and the characteristic 141 is, in other words, the delay time τ between the pressure detection array 131 and the pressure detection array 134.

[0056] The distance between each of the pressure detection rows is known in advance, so the computer 110 can calculate the conveying speed of the conveying path 11 based on the distance between the pressure detection rows 131 and 134 and the delay time τ.

[0057] When the computer 110 can calculate the conveying speed of the conveying path 11, it can identify the position of the surface pressure measurement tool 50B in the x-axis direction relative to each pressure detection array at different times while the surface pressure measurement tool 50B is being conveyed on the conveying path 11 based on the time at which each pressure detection array detected a detection signal, in other words, the sampling time, and the conveying speed.The computer 110 can then sort the detection data including the detection signals detected by each pressure detection array and generate a high-resolution image that visualizes the surface pressure.The sampling time of the detection signal may be included in the detection data.

[0058] Next, an example of rearrangement of detection data detected by the surface pressure measuring tool 50B will be described with reference to Fig. 14. Fig. 14 is a schematic diagram illustrating an example of rearrangement of detection data according to the second embodiment.

[0059] In the example of FIG. 14 , for ease of explanation, one column of detection data is represented by a square. Within the square, numbers are shown before and after a hyphen. The number before the hyphen is one of 1, 2, 3, or 4. When a 1 is shown before the hyphen in a square, that square indicates detection data detected by the pressure detection column 131. When a 2 is shown before the hyphen in a square, that square indicates detection data detected by the pressure detection column 132. When a 3 is shown before the hyphen in a square, that square indicates detection data detected by the pressure detection column 133. When a 4 is shown before the hyphen in a square, that square indicates detection data detected by the pressure detection column 134.

[0060] The numbers shown after the hyphens indicate different times while the surface pressure measuring tool 50B is being transported on the transport path 11. In the example of FIG. 14 , the numbers after the hyphens are natural numbers equal to or greater than 1. When a hyphen is followed by 1 in a certain box, the box indicates that the time is t １ In addition, if a hyphen is followed by 2 in a box, the box indicates that the time is t ２ In the example of FIG. 14, the detection data detected at t １ , t ２ and t ３ is the sampling time.

[0061] Specifically, the detection data 1-1 is １ More precisely, the detection data is detected from the pressure detection array 131 at time t １ The detection data 2-1 is an average value of the detection signals detected by each of the plurality of pressure detection units 57 included in the pressure detection array 131 at time t １ The detected data 3-1 is the detected data from the pressure detection column 132 at time t １ The detected data 4-1 is the detected data from the pressure detection column 133 at the time t １ This is the detection data detected from the pressure detection column 134 at time .

[0062] When the computer 110 receives and acquires detection data from the surface pressure measurement tool 50B, it determines the format of the detection data. For example, the computer 110 determines that the detection data is in CSV (Comma Separated Values) format. However, the detection data is not limited to the CSV format.

[0063] The computer 110 further determines the data structure of the detection data. The data structure corresponds to the number of pressure detection arrays and the number of pressure detection units 57 included in the pressure detection arrays in the surface pressure measurement tool 50B. With regard to the detection data received from the surface pressure measurement tool 50B, the computer 110 determines that the detection data at a certain time has a structure including 4×10 pieces of data. Note that, here, it is assumed that the surface pressure measurement tool 50B has four pressure detection units 57 in the conveying direction X and ten pressure detection units 57 in the width direction of the conveying path 11 perpendicular to the conveying direction X, and therefore the detection data including the detection signals detected by each pressure detection unit 57 has a 4×10 data structure. However, the data structure of the detection data is not limited to the above structure.

[0064] For ease of explanation, the computer 110 will treat the detection data including the detection signals detected by the pressure detection units 57 included in one pressure detection array as one array of detection data. For example, detection data 1-1 shown in FIG. 14 is detection data including the detection signals detected by the pressure detection units 57 included in the pressure detection array 131. The detection data 1-1 is also detected when the time is t １ This is the detection data detected at the time.

[0065] The surface pressure measuring tool 50B is passed through the conveying path 11 and accumulates the detection data for a predetermined distance or a predetermined period of time. Then, the surface pressure measuring tool 50B transmits the accumulated detection data to the computer 110. The computer 110 receives the detection data as the time t １ The detected data is detected at time t ２ The detected data is detected at time t ３ The detection data at different times, such as the detection data detected at time t1, t2, t3, t4, t5, t6, t7, t8, t9, t10, t11, t12, t13, t14, t15, t16, t17, t18, t19, t20, t21, t22, t23, t24,

[0066] The computer 110 expands the received detection data in chronological order. For example, when the detection data detected by the pressure detection column 131 is expanded in chronological order, it is arranged as detection data 1-1, detection data 1-2, detection data 1-3, detection data 1-4, detection data 1-5, and detection data 1-6. Here, depending on the sampling rate of the surface pressure measurement tool 50B, if the pressure distribution is visualized based only on the data detected by the pressure detection column 131, the image showing the pressure distribution may have low image quality. This is because, for example, when the time is t ２ The position of the pressure detection array 131 in the x-axis direction at time t ３ This is because there is a possibility that the pressure distribution in the gap between the position of the pressure detection array 131 in the x-axis direction at time t １ If the position of the pressure detection array 132 in the x-axis direction at time t corresponds to the gap, the pressure distribution in the gap can be visualized. １ The position of the pressure detection array 131 in the x-axis direction at time t may be expressed as the position of detection data 1-1. For example, the position of detection data 3-3 is ３ In addition, when simply referring to the position of the detection data, this expression refers to the position in the x-axis direction of the pressure detection array 133 at which the detection data is detected.

[0067] The computer 110 calculates the conveying speed of the conveying path 11 and identifies the position of each piece of detection data at each time based on the calculated conveying speed. As a result, the computer 110 identifies, for example, that the position of detection data 2-1 is between the positions of detection data 1-2 and detection data 1-3. At this time, the computer 110 may use the position of detection data 1-1 as a reference and identify the positions of detection data other than detection data 1-1 as relative positions to the position of detection data 1-1.

[0068] The computer 110 rearranges the detection data in order of position in the x-axis direction based on the position of each detection data at each identified time. The computer 110 generates and outputs an image showing the surface pressure based on each detection signal included in the rearranged detection data. The output image is displayed on the display unit 113.

[0069] Next, a process flow in which the computer 110 outputs an image indicating the surface pressure based on detection data detected by the surface pressure measurement tool 50B will be described with reference to Fig. 15. Fig. 15 is a flowchart showing the process of the computer 110 according to the second embodiment. Of the processes shown in Fig. 15, the process of step S150 is performed by the surface pressure measurement tool 50B, and the processes other than step S150 are executed by the computer 110.

[0070] Each pressure detecting unit 57 included in the surface pressure measuring tool 50B passed through the conveyance path 11 acquires and accumulates the detected detection signals (step S150). After being conveyed a predetermined distance or a predetermined period of time, the surface pressure measuring tool 50B transmits detection data including the accumulated detection signals to the computer 110.

[0071] The BLE central data receiving unit 93 of the computer 110 receives the detection data transmitted from the surface pressure measuring tool 50B and including the detection signal acquired by the surface pressure measuring tool 50B in step S150 (step S151).

[0072] The processor 111 of the computer 110 determines the format and structure of the detection data based on the detection data received in step S151 (step S152). This allows the computer 110 to determine that the detection data at a certain time has a 4x10 structure. In other words, the computer 110 can recognize that the surface pressure measurement tool 50B has four pressure detection columns. Also, in step S152, the computer 110 can identify the sampling rate.

[0073] Next, the computer 110 calculates the conveying speed of the conveying path 11 by the following processes from step S153 to step S159.

[0074] The processor 111 of the computer 110 specifies at least one combination of two different pressure detection columns (step S153). For example, the processor 111 specifies the combination of the pressure detection columns 131 and 132. The processor 111 may specify two or more combinations of pressure detection columns. For example, the processor 111 may specify the combination of the pressure detection columns 131 and 132, the combination of the pressure detection columns 132 and 133, and the combination of the pressure detection columns 131 and 134.

[0075] The processor 111 determines whether or not the provisional transport speed has been calculated based on all combinations of at least one pair of pressure detection arrays specified in step S153 (step S154). For example, if the combination of the pressure detection arrays 131 and 132 as the first pair and the combination of the pressure detection arrays 131 and 134 as the second pair are specified in step S153, the processor 111 determines whether or not the calculation of the provisional transport speed based on the first pair and the calculation of the provisional transport speed based on the second pair are both completed. Note that the provisional transport speed is a transport speed calculated as a provisional value in step S158, which will be described later.

[0076] If the processor 111 determines that a provisional conveying speed has been calculated based on all combinations of at least one pressure detection row combination specified in step S153 (step S154; YES), it proceeds to step S159.

[0077] If the processor 111 determines that a provisional conveying speed has not been calculated based on all combinations of at least one pressure detection column combination specified in step S153 (step S154; NO), it selects a combination from the combinations specified in step S153 for which a provisional conveying speed has not been calculated (step S155).

[0078] The processor 111 calculates a cross-correlation function of the average values ​​of pressure detected by each of the pressure detection arrays included in the combination selected in step S155 (step S156). For example, a case will be described in which the processor 111 selects the combination of the pressure detection array 131 and the pressure detection array 134 in step S155. In this case, the processor 111 calculates a cross-correlation function between the time change in the average value of the detection signals detected by each of the multiple pressure detection units 57 included in the pressure detection array 131 and the time change in the average value of the detection signals detected by each of the multiple pressure detection units 57 included in the pressure detection array 131. In other words, the processor 111 calculates a cross-correlation function between the characteristics 140 and 141 shown in FIG. 13. Furthermore, as shown in FIG. 13, the characteristics 140 and 141 are shifted by a predetermined time, which is the delay time τ.

[0079] The processor 111 calculates the delay time τ based on the cross-correlation function calculated in step S156 (step S157).

[0080] The processor 111 calculates a tentative conveying speed of the conveying path 11 based on the delay time τ calculated in step S157 and a predetermined distance between the two pressure detection rows included in the combination selected in step S155 (step S158).

[0081] The processor 111 returns to step S154 and determines whether or not the calculation of the provisional transport speed in the process of step S158 has been completed based on all the combinations of pressure detection rows specified in step S153.

[0082] If the processor 111 determines that the calculation of the provisional conveying speed in the processing of step S158 has been completed based on all the combinations of pressure detection rows specified in step S153, the processor 111 proceeds to the processing of step S159.

[0083] The processor 111 calculates the average value of the provisional transport speeds as the transport speed (step S159). For example, if three combinations of pressure detection arrays are specified in step S153, the processor 111 calculates three provisional transport speeds by repeating the processes from step S154 to step S158. Then, the processor 111 sets the average value of the three provisional transport speeds as the transport speed. Note that if the processor 111 specifies only one combination of pressure detection arrays in step S153, the processor 111 treats the provisional transport speed calculated in step S158 as the so-called true value of the transport speed.

[0084] The computer 110 can calculate the conveying speed of the conveying path 11 by the above-described processing from S153 to S159.

[0085] The processor 111 identifies the position of each piece of detection data at each different time based on the conveying speed calculated in step S159 and the sampling time of the detection signal included in each piece of detection data (step S160). At this time, the processor 111 may identify, for example, the position in the conveying direction X with respect to the pressure detection array 131 at the start of measurement, that is, when the surface pressure measurement tool 50B passes through the conveying path 11 and the pressure detection array 131 first detects a detection signal, as the measurement start point. Then, the processor 111 may identify the relative position of each piece of detection data at each different time with respect to the measurement start point.

[0086] The processor 111 rearranges the positions of each detection data identified at each different time in step S160 in the order of the position in the conveying direction X, and generates an image showing the surface pressure based on the detection signal included in each detection data corresponding to the rearranged position in the conveying direction X, and outputs the image to the display unit 113 (step S161).

[0087] In this way, the processor 111 can calculate the conveying speed of the conveying path 11 based on the time change in the detection data including the detection signals received by the BLE central data receiving unit 93. Then, based on the conveying speed, the processor 111 can identify the position in the conveying direction X relative to each row of the multiple pressure detection units 57 arranged in the width direction of the conveying path 11 (i.e., each pressure detection row) at each different time. The processor 111 can then rearrange the detection data including the detection signals detected by each pressure detection row identified at each time in order of position in the conveying direction X. The processor 111 can then generate an image showing the surface pressure applied to the glass sheet based on the detection data including the detection signals of each pressure detection row corresponding to the rearranged position in the conveying direction X. The processor 111 can then display the generated image on the display unit 113. This allows the surface pressure applied to the glass sheet to be visualized with high resolution.

[0088] Furthermore, the processor 111 can identify the position in the conveying direction X relative to each pressure detection row as follows: That is, the processor 111 can identify the position in the conveying direction X relative to each row of the multiple pressure detection sections 57 lined up in the width direction of the conveying path 11 at each different time based on the sampling time at which the pressure detection sections 57 detect pressure, which is included in the detection data including the detection signal received by the BLE central data receiving section 93, and the calculated conveying speed.

[0089] The processor 111 can also calculate the conveying speed of the conveying path 11 as follows. That is, the processor 111 can calculate a cross-correlation function between the average value of the detection signals detected by each of the multiple pressure detection units 57 included in the first column (e.g., pressure detection column 131) of the pressure detection columns and the average value of the detection signals detected by each of the multiple pressure detection units 57 included in the second column (e.g., pressure detection column 134) of the pressure detection columns, based on the time change in detection data including detection signals received by the BLE central data receiving unit 93. The processor 111 can then calculate the delay time at which the value of the cross-correlation function is maximized as the delay time between the first column and the second column. The processor 111 can then calculate the conveying speed of the conveying path 11 based on the delay time and the distance between the first column and the second column.

[0090] Furthermore, the processor 111 can calculate the conveying speed of the conveying path 11 with higher accuracy as follows. That is, the processor 111 can specify multiple combinations of two different pressure detection columns and calculate the delay time for each of the specified multiple combinations. The processor 111 can then calculate a tentative conveying speed for each of the specified multiple combinations. The processor 111 can then calculate the average value of the tentative conveying speeds calculated for each of the specified multiple combinations as the conveying speed.

[0091] In the above-described second embodiment, the pressure detection rows of the surface pressure measurement tool 50 do not acquire detection signals at the same position in the conveying direction X on the conveying path 11. Therefore, in the second embodiment, the computer 110 rearranges the detection data in order to generate a high-resolution image showing the surface pressure.

[0092] If each of pressure detection columns 131, 132, 133, and 134 acquires a detection signal at the same position in the conveying direction X, the accuracy of measuring the pressure at that position by surface pressure measurement tool 50B will be higher than the measurement accuracy when each pressure detection column does not acquire a detection signal at the same position in the conveying direction X.

[0093] An example of improving the pressure measurement accuracy of the surface pressure measurement tool 50B will be described with reference to Fig. 16. Fig. 16 is a schematic diagram illustrating transportation of the surface pressure measurement tool 50B according to a modification of the second embodiment.

[0094] In the example of FIG. 16, when the time t from the start of conveyance of the surface pressure measuring tool 50B is Δk, the pressure detection column 131 is x ４ Then, when the time t is 2Δk, the pressure detection array 132 acquires a detection signal at the position x ４ After that, although not shown in FIG. 16, the pressure detection array 133 and the pressure detection array 134 also acquire detection signals at the position x ４ In this way, the detection signal is acquired at the position of x ４The computer 110 averages the detection signals acquired by the pressure detection rows, and the surface pressure measurement tool 50B measures x. ４ The measurement accuracy of the pressure at the position x is improved. ４ Not only the position of x １ Position of x ２ Position of x ３ The measurement accuracy at each of the positions is similarly improved.

[0095] However, as in the example of Fig. 16, the probability that each pressure detection array of the surface pressure measurement tool 50B acquires a detection signal at the same position is low. Therefore, by adjusting the measurement sampling rate of the surface pressure measurement tool 50B in advance, it becomes possible for each pressure detection array of the surface pressure measurement tool 50B to acquire a detection signal at the same position.

[0096] As described in the second embodiment, the computer 110 can calculate the conveying speed of the conveying path 11. Based on the calculated conveying speed, the computer 110 may calculate a sampling rate at which each pressure detection array of the surface pressure measurement tool 50B can acquire a detection signal at the same position on the conveying path 11. The sampling rate of the measurement by the surface pressure measurement tool 50B is then adjusted to the sampling rate calculated by the computer 110, thereby improving the accuracy of pressure measurement by the surface pressure measurement tool 50B. This adjustment may be performed by the computer 110 or by the user.

[0097] In this way, the computer 110 may adjust the sampling rate at which each of the multiple pressure detection units 57 detects pressure based on the calculated conveying speed so that each row of the multiple pressure detection units 57 arranged in the width direction of the conveying path 11, i.e., each pressure detection row, can detect pressure at the same position on the conveying path 11. Then, the computer 110 may generate an image showing the surface pressure applied to the glass sheet based on the detection signal detected by each pressure detection row, and display the image on the display unit 113.

[0098] As described above, the present specification describes the following: [1] A surface pressure display device including a receiving unit that receives detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction, a calculation unit that calculates a surface pressure applied to the substrate based on the detection data, and a display unit that displays an image showing the calculated surface pressure, wherein the surface pressure measurement tool includes a plurality of pressure detection units arranged in a matrix to detect pressure, the detection data includes detection signals detected by each of the plurality of pressure detection units, and the calculation unit calculates a transport speed of the transport path based on a time change in the detection data received by the receiving unit, identifies positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at different times based on the transport speed, sorts the detection signals for each row identified at each time in order of position in the transport direction, and generates an image showing the surface pressure applied to the substrate based on the detection signals for each row corresponding to the sorted positions in the transport direction, and displays it on the display unit. [2] The surface pressure display device according to [1], wherein the calculation unit determines the positions of the plurality of pressure detection units in the conveying direction relative to each of the rows lined up in the width direction of the conveying path at different times based on the conveying speed and sampling times at which the pressure detection units detect pressure, which are included in the detection data received by the receiving unit. [3] The calculation unit calculates a cross-correlation function between an average value of detection signals detected by each of the plurality of pressure detection units included in a first row of the rows and an average value of detection signals detected by each of the plurality of pressure detection units included in a second row of the rows, based on changes over time in the detection data received by the receiving unit, calculates a delay time at which the value of the cross-correlation function is maximum as a delay time between the first row and the second row, and calculates the conveying speed of the conveying path based on the delay time and the distance between the first row and the second row.[4] The surface pressure display device according to [3], wherein the calculation unit specifies a plurality of combinations of two mutually different columns from among the columns, calculates the delay time for each of the plurality of combinations, calculates a tentative conveying speed for each of the plurality of combinations, and sets the conveying speed to an average value of the tentative conveying speeds calculated for each of the plurality of combinations. [5] A surface pressure display method comprising: receiving detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction; calculating a surface pressure applied to the substrate based on the detection data; and displaying an image showing the calculated surface pressure, wherein the surface pressure measurement tool comprises a plurality of pressure detection units arranged in a matrix to detect pressure; the detection data includes detection signals detected by each of the plurality of pressure detection units; calculating a transport speed of the transport path based on a change over time in the received detection data; identifying positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at different times based on the transport speed; sorting the detection signals of each row identified at each time in order of position in the transport direction; and generating and displaying an image showing the surface pressure applied to the substrate based on the detection signals of the row corresponding to the sorted positions in the transport direction. [6] A program for causing a computing device to calculate a transport speed of a transport path based on a time change in detection data received from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction, the surface pressure measurement tool having a plurality of pressure detection units arranged in a matrix to detect pressure, the detection data including detection signals detected by each of the plurality of pressure detection units, specifying, based on the transport speed, positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at each different time, sorting the detection signals of each row specified at each time in order of position in the transport direction, and generating and displaying an image showing the surface pressure applied to the substrate based on the detection signals of each row corresponding to the sorted positions in the transport direction.[7] A surface pressure display device comprising: a receiving unit that receives detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction; a calculation unit that calculates a surface pressure applied to the substrate based on the detection data; and a display unit that displays an image showing the calculated surface pressure, wherein the surface pressure measurement tool comprises a plurality of pressure detection units arranged in a matrix to detect pressure, the detection data includes detection signals detected by each of the plurality of pressure detection units, and the calculation unit calculates a transport speed of the transport path based on a time change in the detection data received by the receiving unit, adjusts a sampling rate at which each of the plurality of pressure detection units detects pressure based on the transport speed so that each row of the plurality of pressure detection units lined up in the width direction of the transport path can detect pressure at the same position on the transport path, and generates an image showing the surface pressure applied to the substrate based on the detection signals of each row, and displays it on the display unit.

[0099] The functions of the various embodiments described above can also be realized by supplying programs and applications for realizing the functions of the various embodiments described above to a system or device using a network or storage medium, etc., and having one or more processors in the computer of that system or device read and execute the programs.

[0100] Furthermore, the functions of the various embodiments described above may be realized by a circuit that realizes one or more functions (for example, an Application Specific Integrated Circuit (hereinafter referred to as "ASIC") or an FPGA).

[0101] Although various embodiments of the present disclosure have been described above with reference to the drawings, it goes without saying that the present disclosure is not limited to such examples. It is clear that a person skilled in the art can conceive of various modifications, alterations, substitutions, additions, deletions, and equivalents within the scope of the claims, and it is understood that these also naturally fall within the technical scope of the present disclosure. Furthermore, the components of the various embodiments described above may be combined in any manner as long as they do not deviate from the spirit of the invention.

[0102] For example, in the various embodiments described above, the control unit 55 is equipped with a button battery, but a rechargeable battery such as a secondary battery may be installed instead of the button battery, and the rechargeable battery may be contactlessly charged using electromagnetic induction.

[0103] Furthermore, the control unit 55 may be provided with a memory and a connector for extracting the detection data, and the detection data stored in the memory after the detection operation may be acquired by the computer 110 via a cable connected to the connector. Furthermore, the memory may be made detachable, and the detection data may be acquired by the computer 110 from the memory detached from the control unit 55 after the detection operation.

[0104] In the various embodiments described above, examples have been given of the case where the surface pressure measuring tool 50 according to embodiment 1 and the surface pressure measuring tool 50A and surface pressure measuring tool 50B according to embodiment 2 are applied to the substrate cleaning apparatus 10 that cleans substrates such as glass plates transported along the transport path 11. However, the surface pressure measuring tool 50 according to embodiment 1 and the surface pressure measuring tool 50A and surface pressure measuring tool 50B according to embodiment 2 are not limited to the substrate cleaning apparatus 10, and can be applied to various devices that have a transport path with a narrow gap that transports substrates such as glass plates along the transport direction X.

[0105] Furthermore, the surface pressure measurement tool 50, the surface pressure measurement tool 50A, and the surface pressure measurement tool 50B can also be used for other applications, such as measuring the pressing force of a polishing head in a rotary polishing device that polishes a substrate with a rotating polishing head, measuring the surface pressure in a lamination device that laminates a sheet on a substrate such as a glass plate, detecting warpage in which warpage of a substrate is measured along the substrate such as a glass plate, measuring the clamping force in a film nip that clamps and feeds a film between a pair of rollers, and measuring the pressure of a collet in a die bonding device.

[0106] Furthermore, the substrates transported along the transport path 11 are not limited to glass plates, but may be made of metal, ceramic, or resin, for example.

[0107] This application is based on a Japanese patent application (Patent Application No. 2024-063433) filed on April 10, 2024, the contents of which are incorporated herein by reference.

[0108] The present disclosure is useful as a surface pressure display device, a surface pressure display method, and a program.

[0109] 11 Conveying path 50, 50A, 50B Surface pressure measuring tool 51 Surface pressure sensor 53, 53A Sensor section 55 Control section 57 Pressure detection section 61 Support plate 67 Accommodation hole section 71 Waterproof cover 77 Opening / closing piece 79 Opening / closing window section 87 BLE peripheral data transmitting section 93 BLE central data receiving section 100, 131, 132, 133, 134 Pressure detection row 110 Computer 111 Processor 112 Memory 113 Display section G1, G2 Gap T Thickness X Conveying direction

Claims

1. A surface pressure display device comprising: a receiving unit that receives detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction; a calculation unit that calculates the surface pressure applied to the substrate based on the detection data; and a display unit that displays an image showing the calculated surface pressure, wherein the surface pressure measurement tool comprises a plurality of pressure detection units arranged in a matrix form that detects pressure; the detection data includes detection signals detected by each of the plurality of pressure detection units; the calculation unit: calculates a transport speed of the transport path based on changes over time in the detection data received by the receiving unit; identifies, at different times based on the transport speed, positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path; sorts the detection signals of each row identified at each time in order of position in the transport direction; and generates an image showing the surface pressure applied to the substrate based on the detection signals of each row that correspond to the sorted positions in the transport direction, and displays it on the display unit.

2. The surface pressure display device according to claim 1, wherein the calculation unit determines the positions of the plurality of pressure detection units in the conveying direction relative to each row aligned in the width direction of the conveying path at each different time based on the sampling time at which the pressure detection units detect pressure and the conveying speed, which are included in the detection data received by the receiving unit.

3. The surface pressure display device according to claim 1, wherein the calculation unit calculates a cross-correlation function between an average value of the detection signals detected by each of the plurality of pressure detection units included in a first column of the columns and an average value of the detection signals detected by each of the plurality of pressure detection units included in a second column of the columns based on the change over time of the detection data received by the receiving unit, calculates the delay time at which the value of the cross-correlation function is maximum as the delay time between the first column and the second column, and calculates the transport speed of the transport path based on the delay time and the distance between the first column and the second column.

4. The surface pressure display device according to claim 3, wherein the calculation unit specifies a plurality of combinations of two mutually different columns from among the columns, calculates the delay time for each of the plurality of combinations, calculates a tentative conveying speed for each of the plurality of combinations, and sets the conveying speed to an average value of the tentative conveying speeds calculated for each of the plurality of combinations.

5. A surface pressure display method comprising: receiving detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction; calculating a surface pressure applied to the substrate based on the detection data; and displaying an image showing the calculated surface pressure, wherein the surface pressure measurement tool comprises a plurality of pressure detection units arranged in a matrix to detect pressure; the detection data includes detection signals detected by each of the plurality of pressure detection units; calculating a transport speed of the transport path based on changes over time in the received detection data; identifying positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at different times based on the transport speed; sorting the detection signals of each row identified at each time in order of position in the transport direction; and generating and displaying an image showing the surface pressure applied to the substrate based on the detection signals of each row corresponding to the sorted positions in the transport direction.

6. A program for causing a computing device to calculate a transport speed of a transport path based on time changes in detection data received from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction, the surface pressure measurement tool having a plurality of pressure detection units arranged in a matrix for detecting pressure, the detection data including detection signals detected by each of the plurality of pressure detection units, specifying positions in the transport direction for each row of the plurality of pressure detection units lined up in the width direction of the transport path at different times based on the transport speed, rearranging the detection signals of each row specified at each time in order of position in the transport direction, and generating and displaying an image showing the surface pressure applied to the substrate based on the detection signals of each row corresponding to the rearranged positions in the transport direction.

7. A surface pressure display device comprising: a receiving unit that receives detection data from a surface pressure measurement tool passed through a transport path that transports a substrate in a predetermined transport direction; a calculation unit that calculates the surface pressure applied to the substrate based on the detection data; and a display unit that displays an image showing the calculated surface pressure, wherein the surface pressure measurement tool comprises a plurality of pressure detection units arranged in a matrix to detect pressure, the detection data includes detection signals detected by each of the plurality of pressure detection units, the calculation unit calculates the transport speed of the transport path based on time changes in the detection data received by the receiving unit, adjusts the sampling rate at which each of the plurality of pressure detection units detects pressure based on the transport speed so that each row of the plurality of pressure detection units lined up in the width direction of the transport path can detect pressure at the same position on the transport path, and generates an image showing the surface pressure applied to the substrate based on the detection signals of each row and displays it on the display unit.

Images