Multi-cavity test structure, system and method for thin film penetration detection

Abstract

The present disclosure provides a multi-chamber test structure, system and method for thin film permeation detection, including at least one group of test units, each group of test units including two symmetrically arranged test chambers, each test chamber forming a preset acute angle with a fixed bottom surface, and when there are multiple groups of test units, the multiple groups of test units are arranged in parallel side by side in sequence; the test chamber includes a first test chamber and a second test chamber, and the space between the first test chamber and the second test chamber is used to place a sample to be tested; the first test chamber is provided with at least one test gas pipeline interface, and the second test chamber is provided with at least one detection pipeline interface; the present disclosure can ensure the stability of temperature, humidity and flow in the test chamber, thereby ensuring the accuracy of test data, and has a simple and compact structure and is easy to operate.

Description

Technical Field

[0001] The present disclosure relates to the technical field of thin film penetration testing, and in particular to a multi-cavity test structure, system, and method for thin film penetration testing. Background Art

[0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art.

[0003] When conducting thin film penetration testing, the equipment needs to be preheated and the sample needs to be pre-treated, so the entire test process takes a long time. To improve testing efficiency, multiple test chambers are usually set up on the same equipment to conduct tests simultaneously.

[0004] The inventors of the present disclosure have discovered that in current multi-chamber testing equipment, multiple test chambers are generally arranged horizontally or vertically in parallel. These structures take up a lot of space, are inconvenient to operate, and are not conducive to temperature and humidity control. Furthermore, film permeation testing requires testing the permeability of a film under specific conditions such as temperature, humidity, pressure, and flow rate. The accuracy and stability of temperature, humidity, pressure, and flow rate significantly affect the test results. The current arrangement of multiple test chambers results in significant temperature and humidity differences between the test chambers, leading to significant errors in the test data between the multiple test chambers. Summary of the Invention

[0005] In order to address the deficiencies of the prior art, the present disclosure provides a multi-cavity test structure, system and method for thin film penetration detection, which can ensure the stability of temperature, humidity and flow in the test chamber, thereby ensuring the accuracy of test data, and has a simple, compact structure and easy operation.

[0006] In order to achieve the above objectives, the present disclosure adopts the following technical solutions:

[0007] A first aspect of the present disclosure provides a multi-cavity test structure for thin film penetration detection.

[0008] A multi-cavity test structure for film penetration detection includes at least one group of test units. Each group of test units includes two symmetrically arranged test cavities. Each test cavity forms a preset acute angle with a fixing bottom surface.

[0009] As some possible implementations, multiple groups of test units are arranged in parallel in sequence.

[0010] As some possible implementations, the test cavity includes a first test cavity and a second test cavity, and the sample to be tested is placed between the first test cavity and the second test cavity;

[0011] The first test cavity is provided with at least one test gas pipeline interface, and the second test cavity is provided with at least one detection pipeline interface.

[0012] As a further limitation, the test cavity further includes a pressing mechanism, and a movable end of the pressing mechanism is in contact with or fixed to an outer side wall of the first test cavity.

[0013] As a further limitation, the first test cavity is movably connected to the fixing piece on the fixing bottom surface.

[0014] As a further limitation, a preset acute angle is formed between the second test cavity and the fixing bottom surface, and each second test cavity is fixedly connected to the fixing bottom surface via a first connecting member.

[0015] As a further limitation, the second test cavity is fixed on the fixing bottom surface by a fixing member.

[0016] As a further limitation, the sample to be tested is clamped by a sample clamping device, which includes a tray, a magnetic backing plate, and a ferromagnetic pressure plate, each of which has a through hole, and a groove is formed along the outer periphery of the through hole of the tray, and the magnetic backing plate is fixedly disposed in the groove;

[0017] The ferromagnetic pressing plate is configured to clamp the sample between the ferromagnetic pressing plate and the magnetic backing plate, and the through holes of the tray, the magnetic backing plate and the ferromagnetic pressing plate are coaxially arranged.

[0018] As a further limitation, the sample to be tested is clamped by a sample clamping device, which includes a tray, a magnetic backing plate, and a ferromagnetic pressure plate, each of which has a through hole, a groove is formed along the outer periphery of the through hole of the tray, and the ferromagnetic pressure plate is fixedly disposed in the groove of the tray;

[0019] The magnetic backing plate is configured to clamp the sample between the magnetic backing plate and the ferromagnetic pressing plate, and the through holes of the tray, the magnetic backing plate and the ferromagnetic pressing plate are coaxially arranged.

[0020] As a further limitation, a preset acute angle is formed between the second test cavity and the fixing bottom surface, and the two second test cavities in each group of test units are fixedly connected via a second connecting member.

[0021] As a further limitation, the extension lines of the ends of the two second test cavities in each group of test units away from the fixing bottom surface intersect.

[0022] As a further limitation, the extension lines of the ends of the two second test cavities in each group of test units facing the fixing bottom surface intersect.

[0023] As a further limitation, at least one liquid circulation pipeline is provided in the first test cavity and / or the second test cavity, and the first test cavity and / or the second test cavity is connected to the constant temperature liquid supply device through a liquid circulation pipeline interface.

[0024] A second aspect of the present disclosure provides a thin film permeability testing system, comprising the multi-cavity testing structure for thin film permeability detection according to the first aspect of the present disclosure.

[0025] A third aspect of the present disclosure provides a method for operating a multi-cavity test structure for thin film penetration testing, utilizing the multi-cavity test structure for thin film penetration testing described in the first aspect of the present disclosure;

[0026] Placing a test sample in at least one test chamber for testing includes the following steps:

[0027] The pressing mechanism presses the first test cavity and the test sample onto the second test cavity, and the cavities of the first test cavity and the second test cavity are connected only through the test sample;

[0028] The test gas enters the first test chamber through the test gas pipeline interface provided in the first test chamber, and then enters the second test chamber after passing through the test sample. The second test chamber is connected to the sensor through the detection pipeline interface;

[0029] The data collected by the sensor is used to analyze the permeated gas and complete the test.

[0030] Compared with the prior art, the present invention has the following advantages:

[0031] 1. The multi-chamber test structure, system, and method provided by the present disclosure, by arranging the test chambers at a preset angle to the fixed bottom surface and arranging multiple groups side by side, makes the structure more compact and has high space utilization. It can also realize the testing of multiple test samples in the same batch under the same conditions, greatly improving the stability of the test results.

[0032] 2. In the multi-cavity test structure, system and method provided by the present disclosure, the angle between the test cavity and the fixing bottom surface is acute, which facilitates the layout and sampling operations and makes the operation more convenient.

[0033] 3. The multi-cavity test structure, system and method provided by the present disclosure have a test cavity at a certain angle to the fixed bottom surface, and there is a large space between the two test cavities and outside, which can be used to form an air duct, making it easier to control the temperature and humidity of the test cavity.

[0034] 4. The publicly provided multi-cavity test structure, system and method can realize the circulation of constant temperature liquid in the test cavity by setting up a liquid circulation pipeline. Through the combined temperature control of air temperature control and water bath, the temperature control is more accurate and uniform, further improving the accuracy of the penetration test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The accompanying drawings, which constitute a part of the present disclosure, are used to provide a further understanding of the present disclosure. The exemplary embodiments of the present disclosure and their descriptions are used to explain the present disclosure and do not constitute an improper limitation to the present disclosure.

[0036] Figure 1 Schematic diagram of the test unit structure of the multi-cavity test structure for thin film penetration detection provided in Example 1 of the present disclosure.

[0037] Figure 2 Schematic diagram of the multi-cavity test structure for thin film penetration detection provided in Example 1 of the present disclosure.

[0038] Figure 3 Schematic diagram of the test unit structure of the multi-cavity test structure for thin film penetration detection provided in Example 3 of the present disclosure.

[0039] Figure 4 Schematic diagram of the multi-cavity test structure for thin film penetration detection provided in Example 3 of the present disclosure.

[0040] Figure 5 A side view of a film penetration detection system provided in Example 5 of the present disclosure.

[0041] Figure 6 This is a rear view of the film penetration detection system provided in Example 5 of the present disclosure.

[0042] Figure 7 This is a schematic structural diagram of the sample clamping device provided in Example 6 of the present invention.

[0043] Figure 8 This is a schematic diagram of the assembly of the sample clamping device provided in Example 6 of the present invention.

[0044] Figure 9 This is a schematic structural diagram of the sample clamping device provided in Example 7 of the present invention.

[0045] Figure 10 This is a schematic diagram of the assembly of the sample clamping device provided in Example 7 of the present invention.

[0046] 100, test chamber; 101, clamping mechanism; 102, upper test chamber; 103, test sample; 104, lower test chamber; 105, upper test chamber circulating water connector; 106, lower test chamber circulating water connector; 107, upper test chamber air line connector; 108, lower test chamber air line connector; 109, fixing seat; 201, crossbeam;

[0047] 1. Upper cover; 2. Hinge; 3. First thermostat; 4. Cylinder; 5. Cylinder frame; 6. Second thermostat; 7. Insulation board; 8. Third thermostat; 9. Rear insulation board; 10. Lower chamber; 11. Bottom foot; 12. Sensor; 13. Computer terminal; 14. Pipeline; 15. Test chamber structure; 16. Light receiver; 17. Light transmitter; 18. Press plate; 19. Test specimen; 20. Magnetic pad; 21. Tray. DETAILED DESCRIPTION

[0048] The present disclosure will be further described below with reference to the accompanying drawings and embodiments.

[0049] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of the present disclosure. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present disclosure belongs.

[0050] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present disclosure. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0051] In the present disclosure, terms such as "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "side", "bottom", etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. They are merely relational words determined for the convenience of describing the structural relationships of the various parts or elements of the present disclosure, and do not specifically refer to any part or element in the present disclosure, and should not be understood as limitations on the present disclosure.

[0052] In this disclosure, terms such as "fixed connection," "connected," and "connection" should be interpreted broadly to mean a fixed connection, an integral connection, or a detachable connection; a direct connection or an indirect connection through an intermediary. Relevant researchers or technicians in this field may determine the specific meaning of these terms in this disclosure based on specific circumstances, and they should not be construed as limiting this disclosure.

[0053] In the absence of conflict, the embodiments of the present disclosure and the features thereof may be combined with each other.

[0054] Example 1:

[0055] like Figure 1As shown, embodiment 1 of the present disclosure provides a multi-cavity test structure for thin film penetration detection, and the multi-cavity test structure includes one or more test units, such as two, three or more test units.

[0056] Each test unit includes two test chambers 100. The two test chambers 100 are placed symmetrically and connected in the middle by a crossbeam 201 (second connecting member). The two groups of test chambers 100 are placed at opposite acute angles. Each test chamber 100 includes a lower test chamber 104, an upper test chamber 102, a clamping mechanism 101 and a fixing seat 109.

[0057] It is understandable that in some other embodiments, each test cavity 100 is fixedly connected to the fixed bottom surface through a longitudinal beam (first connecting member), and in this case, there is no need to use a cross beam to connect the test cavity; of course, there may be both cross beams and longitudinal beams to further improve the fixing effect of the test cavity.

[0058] In this embodiment, the horizontal beam is parallel to the fixing bottom surface, and the vertical beam is perpendicular to the fixing bottom surface.

[0059] It can be understood that in some other embodiments, the cross beams and longitudinal beams may have a preset angle with the fixing bottom surface, as long as the test cavity can be fixed, and the angle may be 20°, 30°, 45° or any other angle; at the same time, the cross beams and longitudinal beams may not be horizontal or vertical, and may have a certain curvature or be special-shaped rods. There is no specific limitation on their structure here, as long as the test cavity can be fixed. Those skilled in the art can make a choice according to the specific working conditions, and no further details will be given here.

[0060] In this embodiment, the fixing seat 109 is fixed on the fixing bottom surface, and the outer side wall of the lower test chamber 104 is fixedly connected to the fixing seat 109 .

[0061] In this embodiment, the fixed connection method can be bonding, that is, fixing with a sticky material such as glue. It can be understood that in some other embodiments, the fixed connection method can also be a falcon connection, or a snap connection, or other fixing methods. Of course, the fixing seat can also be set to be integrally formed with the fixing bottom surface or integrally formed with the test lower cavity 104. As long as the fixing seat can be fixed to the fixing bottom surface and the test lower cavity 104, technical personnel in this field can make a choice according to the specific working conditions, and will not go into details here.

[0062] In this embodiment, the fixing bottom surface is specifically the upper surface of a horizontal plate in the test box for accommodating the test structure. It can be understood that in some other embodiments, the fixing bottom surface can be a horizontal surface or a horizontal bottom surface. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0063] The upper test chamber 102 is provided with one or more upper test chamber gas path connectors 107 , and the lower test chamber 104 is provided with one or more lower test chamber gas path connectors 108 .

[0064] In this embodiment, after the test lower chamber 104 in the test chamber is installed on the fixing seat 109, the extension lines of the two test lower chambers in each group of test units away from the fixing bottom surface intersect, and the angle α between the test lower chamber 104 and the fixing bottom surface is an acute angle.

[0065] In this embodiment, the angle α is preferably 45°. It can be understood that in some other embodiments, the angle can also be any acute angle, such as 20°, 30°, 60° or 80°, etc., which can make the setting of the test cavity more compact and facilitate the layout operation. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0066] It can be understood that in some other embodiments, the angle α between the test lower chamber 104 and the fixing bottom surface is a right angle, that is, the test lower chamber 104 is perpendicular to the fixing bottom surface. Those skilled in the art can make a choice according to specific working conditions, which will not be repeated here.

[0067] The upper test chamber 102 is installed on the pressing mechanism 101 . During testing, the pressing mechanism 101 presses the upper test chamber 102 and the test sample 103 onto the lower test chamber 104 .

[0068] The clamping mechanism 101 is provided with driving components such as a cylinder mechanism, an electric cylinder mechanism, an electromagnetic drive mechanism or a hydraulic drive mechanism to automatically clamp the test sample. Those skilled in the art can choose according to specific working conditions, which will not be described here.

[0069] In this embodiment, the clamping mechanism includes a fixing member, a clamping plate and a handle, wherein the fixing member is fixedly connected to the fixing bottom surface, and the clamping plate is hinged to the fixing member;

[0070] One side of the clamping plate contacts the outer wall of the test upper chamber 102, and the other side of the clamping plate is connected to the driving end of the cylinder mechanism, electric cylinder mechanism, electromagnetic drive mechanism or hydraulic drive mechanism. The handle is hinged to the clamping plate through the connecting plate, and the clamping mechanism 101 can be rotated through the handle.

[0071] In this embodiment, the active area of the pressing mechanism is the outer side of each test unit.

[0072] In this embodiment, the connecting plate can cover the connection between the first test cavity and the second test cavity, thereby further improving the pressing effect.

[0073] In this embodiment, at least one liquid circulation pipeline is provided in the upper test chamber and / or the lower test chamber, and the upper test chamber and / or the lower test chamber is connected to the constant temperature liquid supply device through the liquid circulation pipeline interface.

[0074] In this embodiment, the liquid can be water, and the constant temperature liquid supply device can be a constant temperature water tank. Of course, in some other embodiments, the liquid can also be other liquids with better temperature control effects. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0075] In this embodiment, the liquid circulation pipe is arranged in the outer wall interlayer of the test upper chamber and / or the test lower chamber, that is, the temperature in the test chamber is controlled by achieving constant temperature control of the outer wall interlayer of the test chamber.

[0076] It can be understood that in some other embodiments, the liquid circulation pipeline is arranged on the inner surface of the upper test chamber and / or the lower test chamber, that is, the temperature control in the test chamber is achieved by directly conducting heat to the air in the chamber. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0077] When conducting a film permeation test, the test gas enters the test upper chamber 102 through the test upper chamber gas path connector 107 set on the test upper chamber 102, and enters the test lower chamber 104 after passing through the test sample 103. The test lower chamber gas path connector 108 is connected to the sensor to analyze the permeated gas, completing the entire test process.

[0078] like Figure 2 As shown, in this embodiment, multiple test units are arranged in parallel to form a multi-cavity test structure, which greatly improves the compactness of the test structure and enables better testing of more samples in a limited space.

[0079] Example 2:

[0080] Embodiment 2 of the present disclosure provides a thin film permeability testing system, including the multi-cavity testing structure for thin film permeability detection provided by embodiment 1 of the present disclosure.

[0081] Example 3:

[0082] like Figure 3 As shown, embodiment 3 of the present disclosure provides a multi-cavity test structure for thin film penetration detection, and the multi-cavity test structure includes one or more test units, such as two, three or more test units.

[0083] Each test unit includes two test chambers 100 . The two test chambers 100 are symmetrically placed, and the two groups of test chambers 100 are placed facing each other at acute angles. Each test chamber 100 includes a lower test chamber 104 , an upper test chamber 102 , a pressing mechanism 101 and a fixing seat 109 .

[0084] It is understandable that in some other embodiments, each test cavity 100 is fixedly connected to the fixing bottom surface via a longitudinal beam.

[0085] In this embodiment, the longitudinal beam is perpendicular to the fixing bottom surface.

[0086] It can be understood that in some other embodiments, the longitudinal beam and the fixing bottom surface may have a preset angle, as long as the test cavity can be fixed, the angle may be 20° or 30° or 45° or any other angle; at the same time, the longitudinal beam may not be vertical, may have a certain curvature or be a special-shaped rod. There is no specific limitation on its structure here, as long as the test cavity can be fixed. Those skilled in the art can make a choice according to the specific working conditions, and no further details will be given here.

[0087] In this embodiment, the fixing seat 109 is fixed on the fixing bottom surface, and the outer side wall of the lower test chamber 104 is fixedly connected to the fixing seat 109 .

[0088] In this embodiment, the fixed connection method can be bonding, that is, fixing with a sticky material such as glue. It can be understood that in some other embodiments, the fixed connection method can also be a falcon connection, or a snap connection, or other fixing methods. Of course, the fixing seat can also be set to be integrally formed with the fixing bottom surface or integrally formed with the test lower cavity 104. As long as the fixing seat can be fixed to the fixing bottom surface and the test lower cavity 104, technical personnel in this field can make a choice according to the specific working conditions, and will not go into details here.

[0089] In this embodiment, the fixing bottom surface is specifically the upper surface of a horizontal plate in the test box for accommodating the test structure. It can be understood that in some other embodiments, the fixing bottom surface can be a horizontal surface or a horizontal bottom surface. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0090] The upper test chamber 102 is provided with one or more upper test chamber gas path connectors 107 , and the lower test chamber 104 is provided with one or more lower test chamber gas path connectors 108 .

[0091] In this embodiment, after the test lower chamber 104 in the test chamber is installed on the fixing seat 109, the extension lines of one end of the two test lower chambers in each group of test units facing the fixing bottom surface intersect, and the angle α between the test lower chamber 104 and the fixing bottom surface is an acute angle.

[0092] In this embodiment, the angle α is preferably 45°. It can be understood that in some other embodiments, the angle can also be any acute angle, such as 20°, 30°, 60° or 80°, etc., which can make the setting of the test cavity more compact and facilitate the layout operation. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0093] It can be understood that in some other embodiments, the angle α between the test lower chamber 104 and the fixing bottom surface is a right angle, that is, the test lower chamber 104 is perpendicular to the fixing bottom surface. Those skilled in the art can make a choice according to specific working conditions, which will not be repeated here.

[0094] The upper test chamber 102 is installed on the pressing mechanism 101 . During testing, the pressing mechanism 101 presses the upper test chamber 102 and the test sample 103 onto the lower test chamber 104 .

[0095] The clamping mechanism 101 is provided with driving components such as a cylinder mechanism, an electric cylinder mechanism, an electromagnetic drive mechanism or a hydraulic drive mechanism to automatically clamp the test sample. Those skilled in the art can choose according to specific working conditions, which will not be described here.

[0096] In this embodiment, the clamping mechanism includes a fixing member, a clamping plate and a handle, wherein the fixing member is fixedly connected to the fixing bottom surface, and the clamping plate is hinged to the fixing member;

[0097] One side of the clamping plate contacts the outer wall of the test upper chamber 102, and the other side of the clamping plate is connected to the driving end of the cylinder mechanism, electric cylinder mechanism, electromagnetic drive mechanism or hydraulic drive mechanism. The handle is hinged to the clamping plate through the connecting plate, and the clamping mechanism 101 can be rotated through the handle.

[0098] In this embodiment, the active area of the pressing mechanism is the inner side of each test unit.

[0099] In this embodiment, the connecting plate can cover the connection between the upper test cavity and the lower test cavity, thereby further improving the pressing effect.

[0100] In this embodiment, at least one liquid circulation pipeline is provided in the upper test chamber and / or the lower test chamber, and the upper test chamber and / or the lower test chamber is connected to the constant temperature liquid supply device through the liquid circulation pipeline interface.

[0101] In this embodiment, the liquid can be water, and the constant temperature liquid supply device can be a constant temperature water tank. Of course, in some other embodiments, the liquid can also be other liquids with better temperature control effects. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0102] In this embodiment, the liquid circulation pipe is arranged in the outer wall interlayer of the test upper chamber and / or the test lower chamber, that is, the temperature in the test chamber is controlled by achieving constant temperature control of the outer wall interlayer of the test chamber.

[0103] It can be understood that in some other embodiments, the liquid circulation pipeline is arranged on the inner surface of the upper test chamber and / or the lower test chamber, that is, the temperature control in the test chamber is achieved by directly conducting heat to the air in the chamber. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0104] When conducting a film permeation test, the test gas enters the test upper chamber 102 through the test upper chamber gas path connector 107 set on the test upper chamber 102, and enters the test lower chamber 104 after passing through the test sample 103. The test lower chamber gas path connector 108 is connected to the sensor to analyze the permeated gas, completing the entire test process.

[0105] like Figure 4 As shown, in this embodiment, multiple test units are arranged in parallel to form a multi-cavity test structure, which greatly improves the compactness of the test structure and enables better testing of more samples in a limited space.

[0106] Example 4:

[0107] Embodiment 4 of the present disclosure provides a thin film permeability testing system, including the multi-cavity testing structure for thin film penetration detection provided by Embodiment 3 of the present disclosure.

[0108] Example 5:

[0109] like Figure 5 and Figure 6 As shown, embodiment 5 of the present disclosure provides a thin film transmittance testing system, comprising: an upper cover 1, a test chamber mechanism 15, a thermal insulation plate 7, and a rear thermal insulation plate 9, wherein the test chamber mechanism 15 is connected to the sensor 12 through a pipe 14, the upper cover 1 is movably connected to the rear thermal insulation plate 9, and the upper cover 1 is connected to the movable end of the driving mechanism;

[0110] The insulation plate 7 is connected to the side wall of the rear insulation plate 9. The test cavity is arranged in a closed first space formed by the upper cover 1, the insulation plate 7 and the rear insulation plate 9. At least one first temperature control device 3 is provided on the rear insulation plate 9, and a first air flow channel is provided in the upper cover 1, which is respectively connected to the first temperature control device 3 and the first space.

[0111] It is understandable that in some other embodiments, the insulation board and the rear insulation board can also be interchangeable, that is, the insulation board can also be an insulation board, the insulation board can also be an insulation board, and both can also be insulation boards or both can be insulation boards.

[0112] In this embodiment, the insulation board 7 and the rear insulation board 9 are both multi-layer boards, the inner wall layer is made of insulation material, and the outer wall is made of ordinary material. It can be understood that in some other embodiments, the insulation board 7 and the rear insulation board 9 can also be single-layer boards. The multi-layer boards can be made of tightly fitted boards, or there can be gaps between the layers to achieve better insulation effects. Those skilled in the art can make choices based on specific working conditions, which will not be elaborated here.

[0113] In this embodiment, the rear insulation board 9 is an integral board member, which is used to form the first space and the second space respectively.

[0114] It can be understood that in some other embodiments, the rear insulation plate 9 may also include a first sub-plate and a second sub-plate, both of which are connected to the insulation plate 7, and the test cavity is arranged in the first space formed by the insulation plate 7, the cover body and the first sub-plate, and the support plate is connected to the insulation plate 7, and the sensing element is arranged in the enclosed second space formed by the support plate, the insulation plate 7 and the second sub-plate. Of course, the rear insulation plate 9 can also be composed of more sub-plates, as long as the first space and the second space can be formed. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0115] It can be understood that in some other embodiments, the rear insulation plate 9 includes a first sub-plate and a second sub-plate, the first sub-plate and the second sub-plate are connected, the insulation plate 7 is connected to the side wall of the first sub-plate or the second sub-plate, the test cavity is arranged in the first space formed by the insulation plate 7, the cover body and the first sub-plate, and the support plate is connected to the insulation plate 7, and the sensor element is arranged in the enclosed second space formed by the support plate, the insulation plate 7 and the second sub-plate; of course, the rear insulation plate 9 can also be composed of more sub-plates, as long as the first space and the second space can be formed. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0116] In this embodiment, the test chamber mechanism 15 adopts the multi-cavity test structure described in Example 1 or Example 3.

[0117] In this embodiment, the first air flow channel may be a cavity in the upper cover 1. It is understandable that in some other embodiments, the first air flow channel may also be a plurality of channel branches, each channel branch being connected to the first temperature control device 3 and the first space.

[0118] In this embodiment, the thermal insulation board 7 is vertically fixedly connected to the side wall of the rear thermal insulation board 9 , and the thermal insulation board 7 is embedded in the side wall of the rear thermal insulation board 9 .

[0119] It can be understood that in some other embodiments, the side walls of the insulation board 7 and the rear insulation board 9 are at any angle, and the angle can be 10°, 20°, or 30°, etc. Those skilled in the art can design it according to the specific working conditions, which will not be repeated here.

[0120] It can be understood that in some other embodiments, the insulation board 7 is fixedly connected to the inner side surface of the rear insulation board 9, and the fixed connection method can be bonding, welding, snap connection, or other fixed connection methods, as long as the insulation board and the rear insulation board 9 can be fixed; of course, the insulation board and the rear insulation board can also be made into one piece, or the insulation board can be inserted and passed through the rear insulation board and then fixed to the outer wall of the rear insulation board by a fixing part. Those skilled in the art can design it according to the specific working conditions, which will not be repeated here.

[0121] In this embodiment, the rear insulation board 9 is fixed with a cylinder frame 5, and the cylinder 4 is fixed with the cylinder frame. When the cylinder 4 contracts, the upper cover 1 is driven to open, and when the cylinder 4 extends, the upper cover 1 is driven to close.

[0122] It is understandable that in some other embodiments, the cylinder can also be replaced by a rotary clamping cylinder, a lifting motor, or a lifting and rotating device, as long as it can drive the rotation of the cover body. Technical personnel in this field can select and design it according to specific working conditions, which will not be repeated here.

[0123] At least one second temperature control device is provided on the insulation board, and a second airflow channel is provided on the insulation board, communicating with the second temperature control device and the first space, respectively. The first and second temperature control devices can generate temperature-controlled gas, which flows through the upper and lower portions of the test chamber structure 15. The temperature-controlled gas generated by the first temperature control device 3 flows within the upper cover 1.

[0124] In this embodiment, a light emitter 17 and a light receiver 16 that cooperate with each other are provided on both sides of the test cavity on the insulation board, and both the light emitter and the light receiver are communicatively connected to the computer terminal 13. The light emitted by the light emitter 17 is received by the light receiver 16. When an object is blocked between the light emitter and the light receiver, the upper cover cannot be closed, which can effectively prevent the upper cover from crushing the human body when it falls; the sensor element is also communicatively connected to the computer terminal, and the computer terminal analyzes the penetration structure based on the data detected by the sensor element.

[0125] In this embodiment, the computer terminal 13 is a computer with a touch screen, and the touch screen is arranged on the outside of the support plate. It can be understood that in some other embodiments, the computer terminal 13 can also be an ordinary computer with a display controlled by a keyboard and a mouse. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0126] It also includes a support plate connected to the insulation plate, and the support plate is connected to the side of the insulation plate away from the test cavity. The sensing element is arranged in a closed second space formed by the support plate, the insulation plate and the insulation plate. The cavity where the second space is located is the lower cavity 10.

[0127] At least one third temperature controller 8 is provided on the insulation board, and the third temperature control device is connected to the second space in the lower cavity. The temperature control gas generated by the third temperature controller 8 circulates in the second space in the lower cavity 10.

[0128] In this embodiment, the first thermostat, the second thermostat and the third thermostat all use semiconductor electronic thermostats, and there are two of them, both of which work at the same time or one of them works; a first temperature sensor is provided in the first space, and a second temperature sensor is provided in the second space. The first thermostat, the second thermostat, the third thermostat, the first temperature sensor and the second temperature sensor are all communicatively connected to the computer terminal, and the computer terminal controls the operation of the first thermostat and the second thermostat according to the temperature value detected by the first temperature sensor, and the computer terminal controls the operation of the third thermostat according to the temperature value detected by the second temperature sensor.

[0129] It is understandable that in some other embodiments, the first thermostat, the second thermostat and the third thermostat may all be one or more units, and those skilled in the art may make a selection based on specific working conditions, which will not be elaborated here.

[0130] It can be understood that in some other embodiments, there can be two or more first temperature sensors and second temperature sensors. When there are more than two first temperature sensors or second temperature sensors, the average value of each first temperature sensor is used as the temperature of the space, and the average value of each second temperature sensor is used as the temperature of the space.

[0131] Example 6:

[0132] Example 6 of the present disclosure provides a multi-cavity test structure, the other structures of which are the same as those in Example 1 or Example 3, and the sample between the upper test cavity and the lower test cavity is clamped by a sample clamping device;

[0133] like Figure 7 and 8 Said sample holding device comprises a pressing plate 18 with a through hole, a magnetic backing plate 20 with a through hole and a tray 21 with a through hole;

[0134] In this embodiment, a groove corresponding to the magnetic pad 20 is opened along the outer periphery of the through hole on the upper side of the tray 21 , and the magnetic pad 20 has glue on the bottom and is adhered to the groove on the tray 21 .

[0135] The pressing plate 18 has ferromagnetic properties, and the magnetic pad 20 is magnetic. The sample 19 is placed on the magnetic pad 20, and the pressing plate 18 is placed on the sample 19. Through magnetic adsorption, the pressing plate 18 presses the sample 19 tightly on the magnetic pad 20.

[0136] In this embodiment, the through holes of the pressing plate 18 , the magnetic pad 20 and the tray 21 are coaxially arranged, and the apertures of the through holes are the same. At this time, the through holes of the pressing plate 18 , the magnetic pad 20 and the tray 21 are all facing the sample 19 .

[0137] It is understandable that in some other embodiments, the through holes of the pressure plate 18, the magnetic pad 20 and the tray 21 may only partially face the sample 19, as long as it can ensure that the gas can pass through the sample. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0138] In this embodiment, the groove on the tray 21 is a groove that is connected end to end along the edge of the through hole. It can be understood that in some other embodiments, the groove can also be a groove that is not connected end to end along the edge of the through hole, such as occupying 1 / 2 or 3 / 4 or 5 / 8 of the edge of the through hole. As long as it can achieve effective clamping of the sample, technical personnel in this field can make a choice according to the specific working conditions, and will not go into details here.

[0139] It is understandable that in some other embodiments, the grooves may also be a plurality of slots intermittently arranged along the periphery of the through hole, and the magnetic pad is fixed by protrusions on the bottom of the magnetic pad that cooperate with the slots.

[0140] In this embodiment, the tray is circular; the through hole and the groove are also circular, and the magnetic pad is an annular pad that matches the groove on the tray. The annular pad is directly embedded in the groove and fixed by glue.

[0141] It is understandable that in some other embodiments, the tray can also be in other shapes, such as square, rectangular, etc., and the shape of the pressure plate can be in other shapes, such as square, rectangular, trapezoidal, etc.; the through holes and grooves can also be in other shapes, such as square, elliptical or trapezoidal or rectangular, etc., as long as the magnetic pad matches the groove and the pressure plate can cooperate with the magnetic pad to clamp the sample, technical personnel in this field can proceed according to the specific working conditions, and will not go into details here.

[0142] It can be understood that in some other embodiments, the groove is a card slot that completely matches the magnetic pad, and fixation is achieved by tight engagement between the groove and the magnetic pad. In this case, there is no need to fix it with glue. Of course, those skilled in the art can choose other fixing methods, such as snap connection or integrated design, etc., which will not be repeated here.

[0143] It is understandable that in some other embodiments, the tray 21 may also have ferromagnetic properties, and the magnetic pad 20 is directly adsorbed into the groove on the tray 21 through magnetic action.

[0144] Example 7:

[0145] like Figure 9 and Figure 10 As shown, embodiment 7 of the present disclosure provides a multi-cavity test structure, and other structures are the same as those in embodiment 1 or embodiment 3. The sample between the upper test cavity and the lower test cavity is clamped by a sample clamping device, including a pressure plate 18 with a through hole, a magnetic backing plate 20 with a through hole, and a tray 21 with a through hole;

[0146] A groove corresponding to the pressing plate 18 is opened along the outer periphery of the through hole on the upper side of the tray 21. There is glue on the bottom of the pressing plate 18, which is pasted in the groove on the tray 21. The pressing plate 18 has ferromagnetic properties and the magnetic pad 20 has magnetism. The sample 19 is placed on the pressing plate 18, and the magnetic pad 20 is placed on the sample 19. Through magnetic adsorption, the magnetic pad 20 presses the sample 19 tightly on the pressing plate 18.

[0147] In this embodiment, the through holes of the pressing plate 18 , the magnetic pad 20 and the tray 21 are coaxially arranged, and the apertures of the through holes are the same. At this time, the through holes of the pressing plate 18 , the magnetic pad 20 and the tray 21 are all facing the sample 19 .

[0148] It is understandable that in some other embodiments, the through holes of the pressure plate 18, the magnetic pad 20 and the tray 21 may only partially face the sample 19, as long as it can ensure that the gas can pass through the sample. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0149] In this embodiment, the groove on the tray 21 is a groove that is connected end to end along the edge of the through hole. It can be understood that in some other embodiments, the groove can also be a groove that is not connected end to end along the edge of the through hole, such as occupying 1 / 2 or 3 / 4 or 5 / 8 of the edge of the through hole. As long as it can achieve effective clamping of the sample, technical personnel in this field can make a choice according to the specific working conditions, and will not go into details here.

[0150] It is understandable that in some other embodiments, the grooves may also be a plurality of slots intermittently arranged along the periphery of the through hole, and the pressing plate is fixed by protrusions on the bottom of the pressing plate that cooperate with the slots.

[0151] In this embodiment, the tray is circular, the through hole and the groove are also circular, and the pressure plate is an annular pressure plate that matches the groove on the tray. The annular pressure plate is directly embedded in the groove and fixed by glue.

[0152] It can be understood that in some other embodiments, the tray can also be in other shapes, such as square, rectangular, etc., and the shape of the pressure plate can be in other shapes, such as square, rectangular, trapezoidal, etc.; the through holes and grooves can also be in other shapes, such as square, elliptical or trapezoidal or rectangular, etc., as long as the pressure plate matches the groove and the pressure plate can cooperate with the magnetic pad to clamp the sample, technical personnel in this field can proceed according to the specific working conditions, and will not go into details here.

[0153] It can be understood that in some other embodiments, the groove is a card slot that completely matches the pressure plate, and fixation is achieved by the tight engagement of the groove and the pressure plate. In this case, there is no need to fix it with glue. Of course, those skilled in the art can choose other fixing methods, such as snap connection or integrated design, etc., which will not be repeated here.

[0154] It is understandable that in some other embodiments, the tray 21 may also be magnetic, and the pressing plate 18 is directly adsorbed into the groove on the tray 21 through the magnetic effect.

[0155] Example 8:

[0156] Embodiment 8 of the present disclosure provides a working method of a multi-cavity test structure for thin film penetration detection, using the multi-cavity test structure for thin film penetration detection described in Embodiment 1, Embodiment 3, Embodiment 6, or Embodiment 7 of the present disclosure;

[0157] Placing a test sample in at least one test chamber for testing includes the following steps:

[0158] The pressing mechanism presses the first test cavity and the test sample onto the second test cavity, and the cavities of the first test cavity and the second test cavity are connected only through the test sample;

[0159] The test gas enters the first test chamber through the test gas pipeline interface provided in the first test chamber, and then enters the second test chamber after passing through the test sample. The second test chamber is connected to the sensor through the detection pipeline interface;

[0160] The data collected by the sensor is used to analyze the permeated gas and complete the test.

[0161] The foregoing description is merely a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present disclosure shall be included within the scope of protection of the present disclosure.

Claims

1. A multi-cavity test structure for thin film penetration detection, characterized in that: The device comprises at least one group of test units, each group of test units comprising two symmetrically arranged test cavities, each test cavity forming a preset acute angle with the fixing bottom surface, and the space between the two test cavities and the outside forming an air duct; The test cavity includes a first test cavity and a second test cavity. The first test cavity is mounted on a clamping mechanism. The clamping mechanism includes a fixing member, a clamping plate, and a handle. The fixing member is fixedly connected to the fixing bottom surface, and the clamping plate is hinged to the fixing member. One side of the clamping plate contacts the outer wall of the first test cavity, and the other side of the clamping plate is connected to the driving end of the driving mechanism. The handle is hinged to the clamping plate through the connecting plate, and the clamping mechanism is rotated by the handle. The active area of the pressing mechanism is the outside of each test unit, and the connecting plate can cover the connection between the first test cavity and the second test cavity.

2. The multi-cavity test structure for thin film penetration detection according to claim 1, characterized in that: Multiple groups of test units are arranged in parallel in sequence.

3. The multi-cavity test structure for thin film penetration detection according to claim 1, characterized in that: The first test cavity and the second test cavity are used to place the sample to be tested; The first test cavity is provided with at least one test gas pipeline interface, and the second test cavity is provided with at least one detection pipeline interface.

4. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: The test cavity further includes a pressing mechanism, a movable end of the pressing mechanism is in contact with or fixed to an outer side wall of the first test cavity.

5. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: The first test cavity is movably connected to the fixing piece on the fixing bottom surface.

6. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: A preset acute angle is formed between the second test cavity and the fixing bottom surface, and each second test cavity is fixedly connected to the fixing bottom surface via a first connecting member.

7. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: The second test cavity is fixed on the fixing bottom surface through a fixing piece.

8. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: The sample to be tested is clamped by a sample clamping device, which includes a tray with through holes, a magnetic pad and a ferromagnetic pressure plate. A groove is opened along the outer periphery of the tray through hole, and the magnetic pad is fixedly arranged in the groove; The ferromagnetic pressing plate is configured to clamp the sample between the ferromagnetic pressing plate and the magnetic backing plate, and the through holes of the tray, the magnetic backing plate and the ferromagnetic pressing plate are coaxially arranged.

9. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: The sample to be tested is clamped by a sample clamping device, which includes a tray, a magnetic backing plate and a ferromagnetic pressure plate, each of which has a through hole. A groove is opened along the outer periphery of the through hole of the tray, and the ferromagnetic pressure plate is fixedly arranged in the groove of the tray; The magnetic backing plate is configured to clamp the sample between the magnetic backing plate and the ferromagnetic pressing plate, and the through holes of the tray, the magnetic backing plate and the ferromagnetic pressing plate are coaxially arranged.

10. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: A preset acute angle is formed between the second test cavity and the fixing bottom surface, and the two second test cavities in each group of test units are fixedly connected via a second connecting member.

11. The multi-cavity test structure for thin film penetration detection according to claim 10, characterized in that: The extension lines of the ends of the two second test cavities in each group of test units away from the fixed bottom surface intersect; 12. The multi-cavity test structure for thin film penetration detection according to claim 10, characterized in that: Extension lines of one end of the two second test cavities in each group of test units facing the fixing bottom surface intersect.

13. The multi-cavity test structure for thin film penetration detection according to claim 3, characterized in that: At least one liquid circulation pipeline is provided in the first test cavity and / or the second test cavity. The first test cavity and / or the second test cavity is communicated with the constant temperature liquid supply device through a liquid circulation pipeline interface.

14. A thin film transmittance testing system, characterized in that: The multi-cavity test structure for film penetration detection comprises the upper cover, the thermal insulation board and the rear thermal insulation board according to any one of claims 1 to 13; The insulation plate is connected to the side wall of the rear insulation plate, the test cavity is arranged in a closed first space formed by the upper cover, the insulation plate and the rear insulation plate, at least one first temperature control device is provided on the rear insulation plate, and a first air flow channel is provided in the upper cover and is respectively connected to the first temperature control device and the first space; At least one second temperature control device is provided on the rear insulation plate, and a second air flow channel is provided on the insulation plate, which is respectively connected to the second temperature control device and the first space. The first temperature control device and the second temperature control device generate temperature control gas, and the temperature control gas flow flows in the upper and lower parts of the multi-cavity test structure. The test chamber further includes a support plate connected to the rear insulation plate, and the support plate is connected to a side of the insulation plate away from the test chamber. The sensing element is disposed in a sealed second space formed by the support plate, the insulation plate, and the rear insulation plate. The cavity where the second space is located is the lower cavity. At least one third temperature control device is provided on the insulation board, and the third temperature control device is connected to the second space in the lower cavity, and the temperature control gas generated by the third temperature control device circulates in the second space in the lower cavity; A light emitter and a light receiver are provided on both sides of the test cavity on the insulation board. The light emitted by the light emitter is received by the light receiver. When an object is blocked between the light emitter and the light receiver, the upper cover cannot be closed.

15. A method for operating a multi-cavity test structure for thin film penetration detection, characterized in that: A multi-cavity test structure for thin film penetration detection using any one of claims 1 to 13; Placing a test sample in at least one test chamber for testing includes the following steps: The pressing mechanism presses the first test cavity and the test sample onto the second test cavity, and the cavities of the first test cavity and the second test cavity are connected only through the test sample; The test gas enters the first test chamber through the test gas pipeline interface provided in the first test chamber, and then enters the second test chamber after passing through the test sample. The second test chamber is connected to the sensor through the detection pipeline interface; The data collected by the sensor is used to analyze the permeated gas and complete the test.

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