A high voltage leakage test isolation communication module for a semiconductor test system

By designing the high-voltage leakage test isolation communication module of the semiconductor test system, the voltage-regulated isolation connection branch and digital isolator is used to isolate the communication ports of the high-voltage tester and the robot PLC, and the communication fault problem caused by spike pulses is solved, achieving more stable communication and anti-interference capabilities.

CN112305289BActive Publication Date: 2025-05-06上海芯哲微电子科技股份有限公司
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
CN202011297943.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-11-19
Publication Date
2025-05-06
Estimated Expiration
2040-11-19

AI Technical Summary

Technical Problem

During semiconductor testing, communication between the high-voltage tester and the robot is disrupted or restarted due to spike pulses, and the combination of high-voltage tests and robots of different devices frequently leads to communication failures.

Method used

A high-voltage leakage test isolation communication module for semiconductor testing system is designed. The communication port between the high-voltage tester and the robot PLC is isolated through two voltage-regulated isolation connection branches and a 2-channel digital isolator, and the signal is transmitted through optoelectronic devices and capacitor coupling devices.

Benefits of technology

The reference ground between the high-voltage tester and the robot PLC is effectively isolated, avoiding the interference of spike pulses on communication, solving the problem of communication failure, and improving the stability and anti-interference ability of the system.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN112305289B_ABST
    Figure CN112305289B_ABST
Patent Text Reader

Abstract

The invention discloses a high-voltage leakage test isolation communication module for a semiconductor test system, including two voltage-stabilizing isolation connection branches and a 2-channel digital isolator, each voltage-stabilizing isolation connection branch is respectively composed of a voltage stabilizer, an inverter, and a photoelectric coupler, and a manipulator PLC has two digital signal output terminals, which are connected to the start signal input terminal and the reset signal input terminal of a high-voltage tester through two voltage-stabilizing isolation connection branches in a one-to-one correspondence; the two digital signal output terminals of the high-voltage tester are connected to the two digital signal input terminals of the manipulator PLC through the 2-channel digital isolator. The invention solves the problem of BIN errors caused by high voltage serialization into PCB in various high-voltage tests and manipulator communications.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The invention relates to the field of semiconductor test communication devices, in particular to a high-voltage leakage test isolation communication module of a semiconductor test system. Background Art

[0002] The medium and high voltage MOSFET, IGBT and other types of devices of digital isolators in the field of integrated circuit testing need to be tested for their surface insulation withstand voltage or internal chip material withstand voltage. Depending on the product, the withstand voltage test ranges from 500V to 10000V. The batch withstand voltage test of products will use an automated sorting system. Almost all automated sorting systems on the market use PLC industrial control systems. During the withstand voltage test of the product, the spike pulses of the test system will be inserted into the PLC industrial control system, causing communication BIN disorder or restart failure. Due to historical and technical reasons, many equipment manufacturers also consider the cost of testing. Each mechanical mobile phone provider and high-voltage tester provider has different levels of spike pulse shielding and isolation. In order to test different products, there will be new combinations between the high-voltage tester and the manipulator at regular intervals, so communication failures will occur each time a new combination is used. The isolation communication module device of the present invention is invented to address these problems that occur in the actual product testing process; Summary of the invention

[0003] The purpose of the present invention is to provide a high-voltage leakage test isolation communication module for a semiconductor test system, which can effectively isolate the reference grounds of the communication port of a high-voltage tester and the communication port of a manipulator, and the communication between signals is transmitted using photoelectric devices and capacitive coupling devices.

[0004] In order to achieve the above object, the technical solution adopted by the present invention is:

[0005] A high-voltage leakage test isolation communication module of a semiconductor test system is used for communication connection between a high-voltage tester and a manipulator PLC, characterized in that it includes two voltage-stabilizing isolation connection branches and a 2-channel digital isolator, the manipulator PLC has two digital signal output terminals that respectively output digital signals, one of which is used as a start signal and the other as a reset signal, each voltage-stabilizing isolation connection branch is respectively composed of a voltage stabilizer, an inverter, and a photoelectric coupler, the two digital signal output terminals of the manipulator PLC are connected to the input terminals of the voltage stabilizers in the two voltage-stabilizing isolation connection branches in a one-to-one correspondence, and the collector terminals of the photoelectric couplers in the two voltage-stabilizing isolation connection branches are respectively connected to the start signal input terminal and the reset signal input terminal of the high-voltage tester, thereby making the start signal output by the manipulator PLC sequentially sent to the start signal input terminal of the high-voltage tester through the voltage stabilizer, the inverter, and the photoelectric coupler in one of the voltage-stabilizing isolation connection branches, and the reset signal output by the manipulator PLC sequentially sent to the reset signal input terminal of the high-voltage tester through the voltage stabilizer, the inverter, and the photoelectric coupler in the other voltage-stabilizing isolation connection branch;

[0006] When the semiconductor test passes, the high voltage tester outputs a digital signal as a pass signal through one of its digital signal output terminals. When the semiconductor test fails, the high voltage tester outputs a digital signal as a fail signal through another digital signal output terminal. The two digital signal output terminals of the high voltage tester are connected one-to-one with the two input terminals of the 2-channel digital isolator. The two output terminals of the 2-channel digital isolator are connected one-to-one with the two digital signal input terminals of the robot PLC. As a result, the two digital signals output by the high voltage tester are respectively sent to the robot PLC through the 2-channel digital isolator.

[0007] The high-voltage leakage test isolation communication module of the semiconductor test system is characterized by: it also includes a multi-pin connector, and the manipulator PLC digital signal output end and the two voltage-stabilizing isolation connection branches, and the manipulator PLC digital signal input end and the 2-channel digital isolator are respectively connected through the connector.

[0008] The high-voltage leakage test isolation communication module of the semiconductor test system is characterized in that the power supply end of the inverter in the two voltage-stabilizing isolation connection branches, one power supply end of the 2-channel digital isolator, and the power supply end of the connector are respectively connected to the manipulator PLC and powered by the manipulator PLC.

[0009] The high-voltage leakage test isolation communication module of the semiconductor test system is characterized in that the start signal input terminal and the reset signal input terminal of the high-voltage tester are respectively connected to switches, and then connected to the serial port of the high-voltage tester and then connected to the digital ground.

[0010] The high-voltage leakage test isolation communication module of the semiconductor test system is characterized in that the digital signal output terminals of the high-voltage tester for outputting pass signals and fail signals are respectively connected to switches, and then connected to the serial port of the high-voltage tester and then to digital ground, and transient diodes are respectively connected between the two digital signal output terminals of the high-voltage tester and the serial port.

[0011] The high-voltage leakage test isolation communication module of the semiconductor test system is characterized in that the other power supply end of the 2-channel digital isolator is connected to the power supply through an independent voltage regulator chip.

[0012] The high-voltage leakage test isolation communication module of the semiconductor test system is characterized in that: the voltage-stabilizing isolation connection branch and the 2-channel digital isolator are integrated on a circuit board in the same metal shell, wherein the connector is arranged on the surface of the metal shell for connection to an external manipulator PLC, and the surface of the metal shell is provided with wiring terminals corresponding to the start signal, reset signal, pass signal, and fail signal for connection to an external high-voltage tester.

[0013] The isolated communication module device provided by the present invention has a simple and beautiful appearance, low cost, strong driving ability and anti-interference ability, and solves the problem of BIN errors caused by high voltage serially entering PCB in various high-voltage tests and manipulator communications. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a block diagram of the module principle of the present invention.

[0015] Figure 2 It is a circuit structure diagram of the module of the present invention.

[0016] Figure 3 It is the external view of the module structure of the present invention.

[0017] Figure 4 It is a structural explosion diagram of the module of the present invention.

[0018] Figure 5 This is a timing diagram of the module test process of the present invention, wherein:

[0019] (a) is a timing diagram of the PASS signal, and (b) is a timing diagram of the FALL signal. DETAILED DESCRIPTION

[0020] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0021] like Figure 1As shown, a high-voltage leakage test isolation communication module of a semiconductor test system is used for communication connection between a high-voltage tester and a manipulator PLC, including two voltage-stabilizing isolation connection branches and a 2-channel digital isolator. The manipulator PLC has two digital signal output terminals that respectively output digital signals, wherein one digital signal is used as a start signal and the other digital signal is used as a reset signal. Each voltage-stabilizing isolation connection branch is respectively composed of a voltage regulator, an inverter, and a photoelectric coupler. The two digital signal output terminals of the manipulator PLC are connected to the input terminals of the voltage regulators in the two voltage-stabilizing isolation connection branches in a one-to-one correspondence. The collector terminals of the photoelectric couplers in the two voltage-stabilizing isolation connection branches are respectively connected to the start signal input terminal and the reset signal input terminal of the high-voltage tester, thereby enabling the start signal output by the manipulator PLC to be sequentially sent to the start signal input terminal of the high-voltage tester through the voltage regulator, the inverter, and the photoelectric coupler in one of the voltage-stabilizing isolation connection branches, and the reset signal output by the manipulator PLC to be sequentially sent to the reset signal input terminal of the high-voltage tester through the voltage regulator, the inverter, and the photoelectric coupler in the other voltage-stabilizing isolation connection branch;

[0022] When the semiconductor test passes, the high voltage tester outputs a digital signal as a pass signal through one of its digital signal output terminals. When the semiconductor test fails, the high voltage tester outputs a digital signal as a fail signal through another digital signal output terminal. The two digital signal output terminals of the high voltage tester are connected one-to-one with the two input terminals of the 2-channel digital isolator. The two output terminals of the 2-channel digital isolator are connected one-to-one with the two digital signal input terminals of the robot PLC. As a result, the two digital signals output by the high voltage tester are respectively sent to the robot PLC through the 2-channel digital isolator.

[0023] The present invention also includes a multi-pin connector, and the manipulator PLC digital signal output end and the two voltage-stabilizing isolation connection branches, and the manipulator PLC digital signal input end and the 2-channel digital isolator are respectively connected through the connector.

[0024] In the present invention, the power supply end of the inverter in the two voltage-stabilizing isolation connection branches, one power supply end of the 2-channel digital isolator, and the power supply end of the connector are respectively connected to the manipulator PLC and are powered by the manipulator PLC.

[0025] In the present invention, the start signal input terminal and the reset signal input terminal of the high voltage tester are respectively connected to switches, and then connected to the serial port of the high voltage tester and then to the digital ground.

[0026] In the present invention, digital signal output terminals of the high voltage tester for outputting pass signals and fail signals are respectively connected to switches, and then connected to a serial port of the high voltage tester and then to a digital ground, and transient diodes are respectively connected between the two digital signal output terminals of the high voltage tester and the serial port.

[0027] In the present invention, the other power supply end of the 2-channel digital isolator is connected to the power supply through an independent voltage stabilizing chip.

[0028] like Figure 2 As shown, the high-voltage tester described in the present invention is a Changsheng CS9916A high-voltage tester. One of the voltage-stabilizing isolation connection branches in the present invention includes a first voltage regulator U3 with a model number of YB203H, a first inverter U7 with a model number of 74HC04, and a first photocoupler U1. Another voltage-stabilizing isolation connection branch includes a second voltage regulator U4 with a model number of YB203H, a second inverter U8 with a model number of 74HC04, and a second photocoupler U2. The model of the 2-channel water isolator U6 is IS3720HS. The connector in the present invention is a 25-pin connector J1 with a model number of DB25.

[0029] One digital signal output terminal of the robot PLC outputs a TTL level digital signal as a start signal START, and the other digital signal output terminal outputs a TTL level digital signal as a reset signal RESET. The two digital signal output terminals of the robot PLC are connected to the 16th and 19th pins of the connector J1 one by one, and the 25th pin of the connector J1 is connected to the analog ground.

[0030] The 16th pin of the connector J1 is connected to the Vin pin (input end) of the first voltage regulator U3 in a voltage stabilizing isolation connection branch, the Vin pin of the first voltage regulator U3 is also connected to the analog ground through the capacitor C2, the GND pin of the first voltage regulator U3 is connected to the analog ground, the Vout pin of the first voltage regulator U3 is connected to the input end of the first inverter U7 through a resistor, and the Vout pin of the first voltage regulator U3 is also connected to the analog ground through the capacitor C1, the output end of the first inverter U7 is connected to the anode end of the first photocoupler U1, the cathode end of the first photocoupler U1 is connected to the analog ground, the emitter end of the first photocoupler U1 is connected to the digital ground, and the collector of the first photocoupler U1 is connected to the start signal START input end of the high voltage tester.

[0031] Pin 19 of connector J1 is connected to the Vin pin (input end) of the second voltage regulator U4 in another voltage stabilizing isolation connection branch, the Vin pin of the second voltage regulator U4 is also connected to the analog ground through capacitor C4, the GND pin of the second voltage regulator U4 is connected to the analog ground, the Vout pin of the second voltage regulator U4 is connected to the input end of the second inverter U8 through a resistor, and the Vout pin of the second voltage regulator U4 is also connected to the analog ground through capacitor C3, the output end of the second inverter U8 is connected to the anode end of the second photocoupler U2, the cathode end of the second photocoupler U2 is connected to the analog ground, the emitter end of the second photocoupler U2 is connected to the digital ground, and the collector of the second photocoupler U2 is connected to the reset signal RESET input end of the high voltage tester.

[0032] The power supply ends of the first inverter U7 and the second inverter U8 and the first pin (power supply end) of the connector J1 are respectively connected to the analog signal output end of the robot PLC, and the robot PLC provides a +5V voltage. At the same time, the VDDB pin of the 2-channel digital isolator U6 is also powered by a +5V voltage provided by the robot PLC.

[0033] When the semiconductor test passes, the high-voltage tester outputs a digital signal as a pass signal PASS through one of its digital signal output terminals; when the semiconductor test fails, the high-voltage tester outputs a digital signal as a fail signal FALL through another digital signal output terminal. The input terminal VI1 pin of the 2-channel digital isolator U6 is connected to the digital signal output terminal of the high-voltage tester that outputs the pass signal PASS, the input terminal VI2 pin of the 2-channel digital isolator U6 is connected to the digital signal output terminal of the high-voltage tester that outputs the fail signal FALL, the GNDA pin of the 2-channel digital isolator U6 is connected to the digital ground, the GNDB pin of the 2-channel digital isolator U6 is connected to the analog ground, the output terminal VO1 pin of the 2-channel digital isolator U6 is connected to the 23rd pin of the connector J1, the output terminal VO2 pin of the 2-channel digital isolator U6 is connected to the 24th pin of the connector J1, and the two digital signal input terminals of the robot PLC are connected to the 23rd pin and the 24th pin of the connector J1 in a one-to-one correspondence.

[0034] The VDDA pin of the 2-channel digital isolator U6 is connected to the Vout pin of the third voltage regulator chip U5 model YB203H, the Vin pin of the third voltage regulator chip U5 is connected to the external +24V power supply, the Vin pin of the third voltage regulator chip U5 is connected to the digital ground through the capacitor C5, the Vout pin of the third voltage regulator chip U5 is connected to the digital ground through the capacitor C6, and the GND pin of the third voltage regulator chip U5 is connected to the digital ground.

[0035] The start signal START input terminal of the high-voltage tester is connected to switch k1, and the reset signal RESET input terminal is connected to switch k2, and then they are connected to the serial port COM of the high-voltage tester and then to the digital ground. The digital signal output terminal of the high-voltage tester for outputting the pass signal PASS is connected to switch k5, and the digital signal output terminal for outputting the fail signal FALL is connected to switch k4, and then they are connected to the serial port COM of the high-voltage tester and then to the digital ground. One digital signal output terminal of the high-voltage tester is connected to the cathode of the transient diode TVS1, and the other digital signal output terminal is connected to the cathode of the transient diode TVS2. The anodes of the transient diodes TVS1 and TVS2 are connected to the digital ground respectively through the serial port COM of the high-voltage tester. The isolation communication module device of the present invention has a built-in TVS tube overvoltage protection, which can prevent the user from hot-plugging the test machine or the manipulator power supply and damaging the corresponding connected board;

[0036] like Figure 3 , Figure 4 As shown, in the present invention, each voltage regulator, inverter, optocoupler and 2-channel digital isolator are integrated on the same circuit board 2, and the circuit board is arranged in the metal shell 1. The shell adopts a metal shell with strong shock resistance, which is also conducive to anti-static interference. The connector J1 is arranged on the surface of the metal shell, and the corresponding pins of the connector J1 are connected to the corresponding pins of the voltage regulator and the 2-channel digital isolator inside the metal shell 1, and the corresponding end of the external manipulator PLC is connected to the corresponding pin of the connector J1. At the same time, a plurality of wiring terminals 3 are arranged on the surface of the metal shell 1, and these wiring terminals 3 are partially connected to the corresponding ends of the high-voltage tester outputting the start signal STAR, the reset signal RESET, the pass signal PASS, and the fail signal FALL. The optocoupler and the 2-channel digital isolator are connected to the corresponding wiring terminals inside the metal shell 1. In addition, these wiring terminals 3 also include wiring terminals for +5V voltage and wiring terminals for connecting the serial port COM of the high-voltage tester, so as to facilitate the corresponding connection of the corresponding parts inside the metal shell 1.

[0037] The working process of the present invention is as follows:

[0038] The present invention can effectively isolate the reference grounds of the communication port of the high-voltage tester and the communication port of the manipulator PLC, and the communication between the signals is transmitted by using a photoelectric device and a capacitive coupling device, and includes the following steps:

[0039] 1) When using the present invention, follow the signal wiring instructions on the upper shell of the module, connect the test machine signal to the left port terminal of the module, and connect the signal of the manipulator PLC to the connector J1;

[0040] 2) The changes of the two TTL high and low level signals START and RESET output by the robot PLC are used to supply the two TTL level signals START and RESET required by the high voltage tester through the isolation and conversion circuit of the module. Similarly, after the high voltage tester completes the test of the device, it gives two TTL high and low levels of PASS or FAIL according to the test results of the device, and supplies them to the robot PLC through the 2-channel digital isolator; then the robot generates corresponding actions to classify the good and bad products in the test products.

[0041] High voltage test communication timing is as follows Figure 5 As shown:

[0042] 1. At the START end of the manipulator PLC connector J1, when its level is a high-level input state of 5V-48V, its signal is stabilized by the first voltage regulator U3 and outputs a constant high level of 5V. After passing through the first inverter U7, the level input to the ANODE end of the first photocoupler U1 is low. At this time, the level of the COLLECTOR end of the first photocoupler U1 remains unchanged, and the high-voltage tester is not triggered; when the level of the START port of the connector J1 is a low-level input state of 0V, its signal is stabilized by the first voltage regulator U3 and outputs a constant low level of 0V. After passing through the first inverter U7, the level input to the ANODE end of the first photocoupler U1 is high. At this time, the level of the COLLECTOR end of the first photocoupler U1 is pulled low, and the high-voltage tester is triggered to produce an action.

[0043] 2. When the high-voltage tester is triggered to produce an action, the tester starts to power on and test at the set time. According to the set product parameter specifications, the high-voltage tester makes a judgment and sends a PASS or FAIL signal, which is transmitted to the VI1 and VI2 ports of the 2nd digital isolator U6. The signal is coupled and output in positive phase to the ports VO1 and VO2, and then transmitted to the corresponding pins of the connector J1, and then sent to the robot PLC for identification.

[0044] 3. Within a certain period of time after the robot PLC receives the PASSA or FAIL signal, its corresponding port will send a corresponding signal, and the RESET port of the connector J1 will therefore obtain a level. When its level is a high-level input state of 5V-48V, its signal is stabilized by the second voltage regulator U4 and outputs a constant high level of 5V. The level input to the second photocoupler U2 after passing through the second inverter U8 is a low level. At this time, the level of the COLLECTOR end of the second photocoupler U2 remains unchanged, and the high-voltage tester is not triggered; if the level of the RESET port is a low-level input state of 0V, its signal is stabilized by the second voltage regulator U4 and outputs a constant low level of 0V. The level input to the ANODE end of the second photocoupler U2 after passing through the second inverter U8 is a high level. At this time, the level of the COLLECTOR end of the second photocoupler U2 is pulled low, and the high-voltage tester is triggered to produce an action.

[0045] The above forms a complete high-voltage test sorting action; this cycle;

[0046] The embodiments described in the present invention are merely descriptions of the preferred implementation modes of the present invention, and are not intended to limit the concept and scope of the present invention. Without departing from the design concept of the present invention, various modifications and improvements made to the technical solutions of the present invention by engineers and technicians in this field should fall within the protection scope of the present invention. The technical contents for which protection is sought in the present invention have all been recorded in the claims.

Claims

1. A high voltage leakage test isolation communication module for a semiconductor test system, used for communication connection between a high voltage tester and a manipulator PLC, characterized in that: It includes two voltage-stabilizing isolation connection branches and a 2-channel digital isolator. The manipulator PLC has two digital signal output terminals that respectively output digital signals, one of which is used as a start signal and the other as a reset signal. Each voltage-stabilizing isolation connection branch is composed of a voltage stabilizer, an inverter, and a photoelectric coupler. The two digital signal output terminals of the manipulator PLC are connected to the input terminals of the voltage stabilizers in the two voltage-stabilizing isolation connection branches in a one-to-one correspondence. The collector terminals of the photoelectric couplers in the two voltage-stabilizing isolation connection branches are respectively connected to the start signal input terminal and the reset signal input terminal of the high-voltage tester, thereby allowing the start signal output by the manipulator PLC to be sequentially sent to the start signal input terminal of the high-voltage tester through the voltage stabilizer, inverter, and photoelectric coupler in one of the voltage-stabilizing isolation connection branches, and the reset signal output by the manipulator PLC to be sequentially sent to the reset signal input terminal of the high-voltage tester through the voltage stabilizer, inverter, and photoelectric coupler in the other voltage-stabilizing isolation connection branch; When the semiconductor test passes, the high-voltage tester outputs a digital signal as a pass signal through one of its digital signal output terminals. When the semiconductor test fails, the high-voltage tester outputs a digital signal as a fail signal through another digital signal output terminal. The two digital signal output terminals of the high-voltage tester are connected to the two input terminals of the 2-channel digital isolator in a one-to-one correspondence. The two output terminals of the 2-channel digital isolator are connected to the two digital signal input terminals of the manipulator PLC in a one-to-one correspondence. Thus, the two digital signals output by the high-voltage tester are respectively sent to the manipulator PLC through the 2-channel digital isolator. It also includes a multi-pin connector, and the manipulator PLC digital signal output end and the two voltage-stabilized isolation connection branches, and the manipulator PLC digital signal input end and the 2-channel digital isolator are connected respectively through the connector; The digital signal output terminals of the high voltage tester for outputting pass signals and fail signals are respectively connected to switches, and then connected to the serial port of the high voltage tester and then to digital ground, and transient diodes are respectively connected between the two digital signal output terminals of the high voltage tester and the serial port; The voltage-stabilizing isolation connection branch and the 2-channel digital isolator are integrated on a circuit board in the same metal shell, wherein the connector is arranged on the surface of the metal shell for connection with an external robot PLC, and the surface of the metal shell is provided with wiring terminals corresponding to the start signal, reset signal, pass signal, and fail signal for connection with an external high-voltage tester.

2. The high voltage leakage test isolation communication module of a semiconductor test system according to claim 1, characterized in that: The power supply end of the inverter in the two voltage-stabilizing isolation connection branches, one power supply end of the 2-channel digital isolator, and the power supply end of the connector are respectively connected to the robot PLC and are powered by the robot PLC.

3. The high voltage leakage test isolation communication module of a semiconductor test system according to claim 1, characterized in that: The start signal input terminal and the reset signal input terminal of the high voltage tester are respectively connected to switches, and then connected to the serial port of the high voltage tester and then connected to the digital ground.

4. The high voltage leakage test isolation communication module of a semiconductor test system according to claim 1, characterized in that: The other power supply terminal of the 2-channel digital isolator is connected to a power supply through an independent voltage regulator chip.

Citation Information

Patent Citations

  • Device of double-manipulator conjunction synchronous operation

    CN201331542Y

  • Test equipment and communication device thereof

    CN203965471U

  • High-voltage electric leakage test isolation communication module of semiconductor test system

    CN213600771U