A device for removing bubbles from pickling tank

Abstract

The present invention discloses a pickling tank bubble removal device, which relates to the field of bubble removal technology and includes a pump, an acid filter, a shunt pipe, a guide structure and a bubble breaking structure, wherein the acid filter is located on the upper side of the pump, and the pump is connected to the acid filter, and the liquid outlet of the acid filter is connected to the shunt pipe; the shunt pipe includes a first pipe and a second pipe, one end of the first pipe is connected to the liquid outlet, and the other end of the first pipe is connected to one end of the second pipe, wherein a liquid reflux surface and a bubble breaking structure provided on the lower side of the liquid reflux surface are provided on the inner wall of one end of the second pipe, and a guide structure is further provided on the inner wall of one end of the second pipe, and the guide structure and the bubble breaking structure are directly opposite. It utilizes the driving force of the simple shunt pipe and the pump to produce the effect of separating liquid bubbles, thereby achieving the specific effect of removing bubbles when transporting various solvents or mixed solutions to the wafer wet process area.

Description

Technical Field

[0001] The present invention relates to the technical field of degassing, in particular to a device for removing bubbles from a pickling tank. Background Art

[0002] In the field of semiconductor manufacturing, especially in wet processes, various solutions are routinely used, such as acids, alkalis, organic solutions, and special processing slurries. These solvents or mixed solutions are used in semiconductor wafer processing processes such as cleaning, etching, electroplating, polishing, and grinding. Relevant literature in both academia and industry indicates that during wet processes, bubbles generated between the wafer and the solution before and after the reaction can cause unresolved defects in the product upon contact, leading to product damage or the need for scrapping. Therefore, a device has been developed that can remove bubbles in the liquid pipelines of wet processes. Summary of the Invention

[0003] The object of the present invention is to provide a pickling tank bubble removal device for solving the above-mentioned technical problems.

[0004] The technical solution adopted in the present invention is as follows:

[0005] A pickling tank bubble removal device comprises a pump, an acid filter, a diversion pipeline, a flow guide structure and a bubble breaking structure, wherein the acid filter is located on the upper side of the pump, the pump is connected to the acid filter, and the liquid outlet of the acid filter is connected to the diversion pipeline;

[0006] The shunt pipeline includes a first pipeline and a second pipeline, one end of the first pipeline is connected to the liquid outlet, and the other end of the first pipeline is connected to one end of the second pipeline, wherein a liquid return surface and a bubble breaking structure provided on the lower side of the liquid return surface are provided on the inner wall of one end of the second pipeline, and a guide structure is also provided on the inner wall of one end of the second pipeline, and the guide structure is opposite to the bubble breaking structure.

[0007] Preferably, the first pipeline is perpendicular to the second pipeline.

[0008] Preferably, a heating buffer is further included, which is located on the upper side of the pump and connects the pump and the acid filter.

[0009] As a further preference, it further includes a mainstream pipeline, and the heating buffer and the acid liquid filter, the heating buffer and the pump, and the pump and the acid liquid filter are respectively connected through the mainstream pipeline.

[0010] As a further preference, it also includes a mounting frame, and the pump, the acid filter and the heating buffer are respectively arranged on the mounting frame, wherein the pump is arranged in the mounting frame, the acid filter and the heating buffer are respectively arranged at the upper end of the mounting frame, and the acid filter is located on one side of the heating buffer.

[0011] As a further preference, it further includes a first plate for fixing the valve component, and the mainstream pipeline between the heating buffer and the pump and the mainstream pipeline between the pump and the acid filter are respectively fixed to the mounting frame through the first plate for fixing the valve component.

[0012] Preferably, a weight block is further included, and the weight block is provided on one side of the pump.

[0013] As a further preference, it further includes a second plate for fixing the valve component, wherein the heating buffer is fixed to the mounting frame through the second plate for fixing the valve component.

[0014] Preferably, the liquid reflux surface is an arc-shaped surface structure.

[0015] The above technical solution has the following advantages or beneficial effects:

[0016] (1) In the present invention, a simple diversion pipeline and the driving force of the pump can be used to separate the bubbles, thereby achieving the specific purpose of removing bubbles when transporting various solvents or mixed solutions to the wafer wet process area;

[0017] (2) In the present invention, the diversion pipeline can be used to transport the liquid to the designated wet process section, and the second pipeline can take the bubbles in the solution (carrying a small amount of solution) away from the liquid reflux surface area, and the gravity difference and tension effect of the liquid and bubbles are used to settle the solution in the liquid reflux surface area, thereby reducing unnecessary solution residue in the second pipeline;

[0018] (3) The bubble removal device of the present invention can be widely used in equipment that requires a wet process. Its simple configuration method can be widely integrated with related equipment and has a high degree of compatibility.

[0019] (4) The bubble removal device of the present invention can be widely used in wet process equipment that needs to be integrated. Its mechanism of action can separate bubbles in the wet process, reduce the process defects caused by bubbles in the wafer process caused by the residual bubbles in the reaction solution in wet processes such as cleaning, etching, electroplating, grinding, polishing, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the pickling tank bubble removal device of the present invention;

[0021] Figure 2 This is a schematic structural diagram of the pickling tank bubble removal device of the present invention when no mounting frame is provided;

[0022] Figure 3 It is a structural schematic diagram of the diversion pipeline in the present invention.

[0023] In the figure: 1. Pump; 2. Acid filter; 201. Liquid outlet; 202. Filter assembly holder; 3. Diverter pipe; 301. First pipe; 302. Second pipe; 4. Flow guide structure; 5. Bubble breaking structure; 6. Liquid return surface; 7. Heating buffer; 8. Main pipeline; 9. Mounting frame; 10. Plate for first fixed valve member; 11. Weight block; 12. Plate for second fixed valve member. DETAILED DESCRIPTION

[0024] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0025] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like indicate positions or locations based on those shown in the accompanying drawings. These terms are intended solely to facilitate and simplify the description of the present invention and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not intended to indicate or imply relative importance.

[0026] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific contexts.

[0027] Figure 1 It is a structural schematic diagram of the pickling tank bubble removal device of the present invention; Figure 2 This is a schematic structural diagram of the pickling tank bubble removal device of the present invention when no mounting frame is provided; Figure 3It is a structural diagram of the diversion pipeline in the present invention, such as Figure 1-3 FIG. 1 shows a preferred embodiment of a pickling tank bubble removal device, comprising a pump 1, an acid filter 2, a diversion pipeline 3, a flow guide structure 4, and a bubble breaking structure 5. The acid filter 2 is located on the upper side of the pump 1, and the pump 1 is connected to the acid filter 2. The liquid outlet 201 of the acid filter 2 is connected to the diversion pipeline 3.

[0028] The diversion pipeline 3 includes a first pipeline 301 and a second pipeline 302. One end of the first pipeline 301 is connected to the liquid outlet 201, and the other end of the first pipeline 301 is connected to one end of the second pipeline 302. A liquid return surface 6 and a bubble breaking structure 5 provided on the inner wall of one end of the second pipeline 302 are provided. A guide structure 4 is also provided on the inner wall of one end of the second pipeline 302. The guide structure 4 is opposite to the bubble breaking structure 5. In this embodiment, Figure 3 As shown, the liquid return surface 6 is an arc-shaped surface structure, the first pipeline 301 and the second pipeline 302 are perpendicular to each other, and the first pipeline 301 and the second pipeline 302 are connected by a chimeric interface, the first pipeline 301 is set horizontally, and the second pipeline 302 is set vertically. The guide structure 4 is a guide plate and is tilted from top to bottom toward the side close to the bubble breaking structure 5. Figure 3 As shown, a flow guide structure 4 is provided on the inner wall of one end of the first pipeline 301 close to the second pipeline 302, and a liquid return surface 6 and a bubble breaking structure 5 are provided on the inner wall of one end of the first pipeline 301 away from the first pipeline 301, wherein the upper end of the bubble breaking structure 5 is located at a position higher than the highest point of the flow guide structure 4. The bubble breaking structure 5 in this embodiment is as shown in FIG. Figure 3 As shown, the bubble-breaking structure 5 is a beveled block structure, and the lower end of this block structure has a first tip, and the side of the block structure near the flow-guiding structure 4 has a second tip, and this second tip protrudes upwards and is higher than the position of the highest point of the flow-guiding structure 4. In use, the pump 1 transports the acid mixture to the acid filter 2 for filtration, and enters the first pipeline 301 by the liquid outlet 201 of the acid filter 2, but then enters the second pipeline 302, and is guided by the flow-guiding structure 4. Under the continuous action of the pump 1, the separation of liquid and bubbles is achieved at one end of the acid mixture second pipeline 302, and the separated bubbles float to the liquid return surface 6 area, and under the action of the bubble-breaking structure 5, the bubbles are broken, and the broken bubbles and the acid mixture remaining on the bubbles flow back into the second pipeline 302 under the action of the liquid return surface 6 and mix with the remaining acid mixtures, and then enters the pickling tank by the other end of the second pipeline 302.

[0029] Furthermore, as a preferred embodiment, the first pipeline 301 is perpendicular to the second pipeline 302. Figure 3As shown, the first pipeline 301 is arranged horizontally, and the second pipeline 302 is arranged vertically.

[0030] Furthermore, as a preferred embodiment, the pickling tank debubbling device further includes a heating buffer 7, which is located above the pump 1 and connects the pump 1 to the acid filter 2. In this embodiment, the heating buffer 7 is used to heat the acid mixture and also acts as a buffer for the acid mixture. The heating buffer 7 can automatically supply liquid to prevent interruptions in the liquid supply caused by a malfunction of the pump 1. The provision of the heating buffer 7 ensures continuous liquid supply, avoiding the phenomenon of intermittent liquid supply that causes a large number of bubbles.

[0031] Furthermore, as a preferred embodiment, the pickling tank bubble removal device also includes a mainstream pipeline 8, and the heating buffer 7 and the acid liquid filter 2, the heating buffer 7 and the pump 1, and the pump 1 and the acid liquid filter 2 are respectively connected by a mainstream pipeline 8.

[0032] Furthermore, as a preferred embodiment, the pickling tank bubble removal device also includes a mounting frame 9, and the pump 1, the acid filter 2 and the heating buffer 7 are respectively arranged on the mounting frame 9, wherein the pump 1 is arranged in the mounting frame 9, the acid filter 2 and the heating buffer 7 are respectively arranged at the upper end of the mounting frame 9, and the acid filter 2 is located on one side of the heating buffer 7.

[0033] Furthermore, as a preferred embodiment, the pickling tank debubbling device further includes a first fixed valve plate 10. The main flow pipe 8 between the heating buffer 7 and the pump 1, and the main flow pipe 8 between the pump 1 and the acid filter 2, are each fixed to the mounting frame 9 via a first fixed valve plate 10. In this embodiment, the first fixed valve plate 10 is used to clamp and secure the main flow pipe 8, thereby dissipating vibration stress in the main flow pipe 8 and further reducing the generation of bubbles.

[0034] Furthermore, as a preferred embodiment, the pickling tank bubble removal device also includes a weight block 11, which is provided on one side of the pump 1. The weight block 11 is used to lower the center of gravity of the pump 1, improve the stability of the pump 1, reduce the vibration of the pump 1, and further reduce the generation of bubbles.

[0035] Furthermore, as a preferred embodiment, the pickling tank debubbling device further includes a second valve fixing plate 12, wherein the heating buffer 7 is fixed to the mounting frame 9 via the second valve fixing plate 12. In this embodiment, the second valve fixing plate 12 is used to fix the heating buffer 7 and also to decompose the vibration stress of the heating buffer 7, thereby reducing the generation of bubbles.

[0036] Further, as a preferred embodiment, Figure 2As shown, a filter assembly holder 202 is provided at the upper end of the acid filter 2 for fixedly connecting the acid filter 2 to an external device. The filter assembly holder 202 is provided to maintain the stress distribution at the upper end of the acid filter 2 .

[0037] The above description is only a preferred embodiment of the present invention and does not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A pickling tank bubble removal device, characterized in that: The pump comprises a pump, an acid filter, a shunt pipe, a flow guide structure and a bubble breaking structure, wherein the acid filter is located on the upper side of the pump, the pump is connected to the acid filter, and the liquid outlet of the acid filter is connected to the shunt pipe; The diversion pipeline includes a first pipeline and a second pipeline, one end of the first pipeline is connected to the liquid outlet, and the other end of the first pipeline is connected to one end of the second pipeline, wherein a liquid return surface and a bubble breaking structure provided on the lower side of the liquid return surface are provided on the inner wall of one end of the second pipeline, and a flow guiding structure is further provided on the inner wall of one end of the second pipeline, and the flow guiding structure is directly opposite to the bubble breaking structure; The apparatus further comprises a heating buffer, the heating buffer being located on the upper side of the pump and connecting the pump and the acid filter; and a mainstream pipeline, wherein the heating buffer and the acid filter, the heating buffer and the pump, and the pump and the acid filter are respectively connected via a mainstream pipeline. The upper end of the bubble-breaking structure is located at a position higher than the highest point of the guide structure. The bubble-breaking structure is a beveled block structure. The lower end of the block structure has a first tip, and the block structure has a second tip on the side close to the guide structure. The second tip protrudes upward and is higher than the highest point of the guide structure.

2. The pickling tank bubble removal device according to claim 1, characterized in that: The first pipeline is perpendicular to the second pipeline.

3. The pickling tank bubble removal device according to claim 1, characterized in that: It also includes a mounting frame, and the pump, acid filter and heating buffer are respectively arranged on the mounting frame, wherein the pump is arranged in the mounting frame, the acid filter and the heating buffer are respectively arranged at the upper end of the mounting frame, and the acid filter is located on one side of the heating buffer.

4. The pickling tank bubble removal device according to claim 3, characterized in that: It also includes a first plate for fixing the valve component. The main pipeline between the heating buffer and the pump and the main pipeline between the pump and the acid filter are respectively fixed to the mounting frame through the first plate for fixing the valve component.

5. The pickling tank bubble removal device according to claim 1, characterized in that: It also includes a weight block, which is provided on one side of the pump.

6. The pickling tank bubble removal device according to claim 3, characterized in that: It also includes a second valve fixing plate, wherein the heating buffer is fixed to the mounting frame through the second valve fixing plate.

7. The pickling tank bubble removal device according to claim 1, characterized in that: The liquid reflux surface is an arc-shaped surface structure.

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