Process equipment

Abstract

The present invention provides a process equipment that helps to suppress the wear of the top end. The process equipment includes a support plate (200) of a centerless grinding device (10A). The support plate (200) has: a top end (400) that contacts a workpiece (W); a main body (300) that supports the top end (400); and a deformation control part (340) that promotes the bending of the main body (300) caused by the load applied to the top end (400).

Description

Technical Field

[0001] The invention relates to a process equipment. Background Art

[0002] The process equipment includes a fixture and a tool. The fixture is used for positioning the workpiece, etc. The tool is used for processing the workpiece. In one example, the process equipment is composed of a main body and a top end. The main body supports the top end. The top end contacts the workpiece. Patent document 1 shows an example of an existing fixture.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2005-1045.

[0006] Problem that the invention aims to solve

[0007] In process equipment, it is desired to suppress wear of the tip portion. Summary of the invention

[0008] An object of the present invention is to provide a process equipment that helps suppress wear of a tip portion.

[0009] Solutions for solving problems

[0010] The process equipment according to the present invention comprises: a tip portion that contacts a workpiece; a main body portion that supports the tip portion; and a deformation control portion that promotes bending of the main body portion caused by a load applied to the tip portion.

[0011] According to the process equipment described above, stress is less likely to be generated locally at the tip portion due to the bending of the main body portion, thereby suppressing wear of the tip portion.

[0012] In one example of the process equipment, the main body includes: a first main body, which is fixed to a supporting part that supports the main body; and a second main body, which is arranged between the first main body and the top end, and the deformation control part is configured to promote bending of the second main body.

[0013] According to the above process equipment, the main body is easy to bend.

[0014] In an example of the process equipment, the deformation control unit includes: a first control unit that promotes bending of the second body portion by setting a length of the second body portion.

[0015] According to the above process equipment, the deformation control portion can be easily formed.

[0016] In one example of the process equipment, the first control unit includes the second body unit that is longer than the first body unit.

[0017] According to the above process equipment, the second body portion is easily bent.

[0018] In one example of the process equipment, the deformation control unit includes a second control unit that promotes the deformation of the second main body portion by partially changing the cross-sectional shape of the second main body portion.

[0019] According to the above process equipment, the deformation control portion can be easily formed.

[0020] In one example of the process equipment, the second control unit includes a recessed portion provided in the second main body portion.

[0021] According to the above process equipment, the deformation control portion can be easily formed.

[0022] In one example of the process equipment, the recessed portion is configured to be along a second reference direction orthogonal to a first reference direction in which the main body portion and the tip portion are arranged.

[0023] According to the above process equipment, the second body portion can be easily and uniformly bent.

[0024] In one example of the process equipment, the tip portion includes a sintered body.

[0025] According to the above process equipment, the wear resistance of the tip portion is improved.

[0026] In one example of the process equipment, the elastic modulus of the tip portion is larger than the elastic modulus of the body portion.

[0027] According to the above process equipment, the top end portion is less likely to be deformed.

[0028] In one example of the process equipment, the process equipment includes a fixture.

[0029] According to the above process equipment, the tip portion supporting the workpiece is less likely to wear.

[0030] In one example of the process equipment, the fixture includes a thin plate.

[0031] According to the above-mentioned process equipment, a thin workpiece can be appropriately supported.

[0032] In one example of the process equipment, the fixture includes a support plate of a centerless grinding device.

[0033] According to the above process equipment, local wear is unlikely to occur at the tip portion.

[0034] Effects of the Invention

[0035] The process equipment according to the present invention helps to suppress the wear of the top end portion. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a diagram showing a machine tool including the process equipment according to the first embodiment.

[0037] Figure 2 It is a diagram showing a machine tool including the process equipment according to the second embodiment.

[0038] Figure 3 This is the front view of the pallet.

[0039] Figure 4 It is a cross-sectional view of a pallet, etc.

[0040] Figure 5 Graph showing stress distribution of the non-controlling pallet.

[0041] Figure 6 Represents the stress distribution of the pallet.

[0042] Figure 7 It is a rear view of the support plate of the embodiment.

[0043] Figure 8 It is a diagram showing a machine tool including the process equipment according to the third embodiment.

[0044] Fig. 9 It is a cross-sectional view of a scraper, etc. DETAILED DESCRIPTION

[0045] (First Embodiment)

[0046] like Figure 1 As shown, for example, the process equipment 100 is assembled to the machine tool 10. A rectangular coordinate system is used in the description of the process equipment 100. A plane including the X-axis and the Y-axis represents a top view of the process equipment 100. A plane including the X-axis and the Z-axis represents a front view of the process equipment 100. A plane including the Y-axis and the Z-axis represents a side view of the process equipment 100. A direction parallel to the Z-axis is a first reference direction. A direction parallel to the X-axis is a second reference direction. A direction parallel to the Y-axis is a third reference direction.

[0047] The process equipment 100 includes a fixture 100A and a tool 100B. The machine tool 10 processes the workpiece W. The workpiece W includes, for example, metal, wood, and stone. The processing performed by the machine tool 10 includes, for example, cutting, punching, grinding, lapping, rolling, forging, and bending. The fixture 100A assembled in the machine tool 10 guides or determines the position of the workpiece W or the tool. The tool 100B assembled in the machine tool 10 processes the workpiece W.

[0048] The process equipment 100 includes a main body 110 and a top portion 120. The main body 110 and the top portion 120 are arranged, for example, in a first reference direction. The main body 110 supports the top portion 120. The top portion 120 is in contact with the workpiece W. The top portion 120 is, for example, a member smaller than the main body 110. The process equipment 100 further includes a joint 130. The joint 130 joins the main body 110 and the top portion 120. The structure of the joint 130 is shown by way of example. In the first example, the joint 130 joins the main body 110 and the top portion 120 by metallurgical bonding. In the second example, the joint 130 joins the main body 110 and the top portion 120 by mechanical bonding. In the third example, the joint 130 joins the main body 110 and the top portion 120 by chemical bonding. In the fourth example, the joint 130 joins the main body 110 and the top portion 120 by at least two of the first to third examples.

[0049] The main body 110 includes a first main body 111. The support portion 20 includes a fixing portion 30. The first main body 111 is fixed to the fixing portion 30. The fixing portion 30 is configured to be able to detach the main body 110. In a state where the first main body 111 is fixed to the fixing portion 30, the support portion 20 supports the main body 110. The fixing portion 30 includes, for example, a coupling structure 31 or a clamping device 40. The structure of the coupling structure 31 is shown by way of example. In the first example, the coupling structure 31 fixes the first main body 111 to the fixing portion 30 using a fastener 31A with a screw. In the second example, the coupling structure 31 fixes the first main body 111 to the fixing portion 30 using tolerance fitting.

[0050] The main body 110 includes a second main body 112. The first main body 111 and the second main body 112 are arranged in a first reference direction. The second main body 112 is provided between the first main body 111 and the top end 120. The joint 130 joins the second main body 112 and the top end 120. An example is given to show the relationship between the first main body 111 and the second main body 112. In the first example, the first main body 111 and the second main body 112 are formed as a whole. In the second example, the first main body 111 and the second main body 112, which are separately formed, are joined to each other. The method of joining the first main body 111 and the second main body 112 includes, for example, the same method as the method of joining the main body 110 and the top end 120 by the joint 130.

[0051] The length relationship between the main body 110 and the tip 120 in relation to the first reference direction is shown by way of example. In the first example, the length of the main body 110 is longer than the length of the tip 120. The first example includes the following eleventh to fourteenth examples. In the eleventh example, the lengths of the first main body 111 and the second main body 112 are both longer than the length of the tip 120. In the twelfth example, the length of the first main body 111 is longer than the length of the tip 120, and the length of the second main body 112 is less than the length of the tip 120. In the thirteenth example, the length of the second main body 112 is longer than the length of the tip 120, and the length of the first main body 111 is less than the length of the tip 120. In the fourteenth example, the lengths of the first main body 111 and the second main body 112 are both less than the length of the tip 120. In the second example, the length of the main body 110 is shorter than the length of the tip 120. In the third example, the length of the main body 110 is equal to the length of the tip 120.

[0052] The length relationship between the first body portion 111 and the second body portion 112 in the eleventh example, the fourteenth example, the second example, and the third example is shown. In the first example, the length of the first body portion 111 is longer than the length of the second body portion 112. In the second example, the length of the first body portion 111 is shorter than the length of the second body portion 112. In the third example, the length of the first body portion 111 is equal to the length of the second body portion 112.

[0053] The top portion 120 includes a contact surface 121 that contacts the workpiece W. In one example, the contact surface 121 is configured to have high wear resistance. The top portion 120 is, for example, made of a hard material. The top portion 120 is, for example, a sintered body. The sintered body is, for example, a diamond sintered body, a cubic boron nitride sintered body, a ceramic sintered body, or a superhard alloy. The elastic modulus of the top portion 120 is greater than the elastic modulus of the main body 110. The elastic modulus is, for example, a longitudinal elastic modulus. The top portion 120 is, for example, a cube, a triangular pyramid, a pyramid, a prism, an octahedron, a cylinder, a cone, or a sphere, or a geometric body similar to these geometric bodies. The contact surface 121 includes one or more faces that constitute the top portion 120.

[0054] In the case where the process equipment 100 is a fixture 100A, the main body 110 of the fixture 100A is, for example, a plate, a rod, a column, or a table. The type of plate is, for example, a steel plate. The type of steel plate distinguished by the rolling method is, for example, a cold-rolled steel plate or a hot-rolled steel plate. The type of steel plate distinguished by the plate thickness is, for example, a thin plate, a medium plate, a thick plate, or an extremely thick plate. A load is applied to the top end 120 of the fixture 100A by the relative movement between the workpiece W supported by the fixture 100A and the fixture 100A. The load applied to the top end 120 of the fixture 100A is transmitted to the main body 110 of the fixture 100A.

[0055] When the process equipment 100 is a tool 100B, the main body 110 of the tool 100B is, for example, a plate, a rod, or a column. A load is applied to the top end 120 of the tool 100B by the relative movement between the workpiece W processed by the tool 100B and the tool 100B. The load applied to the top end 120 of the tool 100B is transferred to the main body 110 of the tool 100B. Hereinafter, the load applied to the process equipment 100 by the relative movement between the process equipment 100 and the workpiece W is referred to as a "load during use".

[0056] The process equipment 100 includes a deformation control unit 140 that promotes deformation of the main body 110 caused by a load during use. The deformation control unit 140 promotes deformation of the main body 110 to suppress the generation of local stress at the top end 120. The deformation of the main body 110 is, for example, bending of the main body 110. With the deformation of the main body 110, the load during use is borne in a larger range of the main body 110, suppressing the generation of local stress at the top end 120. This helps to suppress wear of the top end 120.

[0057] The deformation control unit 140 includes, for example, at least one of a first control unit 141 and a second control unit 142. The first control unit 141 and the second control unit 142 are configured to promote the bending of the main body 110 by different methods, respectively. The first control unit 141 is configured to promote the bending of the main body 110 by setting the length of the main body 110. The first control unit 141 includes a main body 110 having a length greater than a reference length. The reference length is determined so that it appropriately promotes the bending of the main body 110. The reference length is determined, for example, based on one or more of the material of the main body 110, the cross-sectional shape of the main body 110, and the size of the load during use.

[0058] The second control portion 142 is configured to promote the bending of the main body 110 by partially changing the cross-sectional shape of the main body 110. The second control portion 142 includes, for example, at least one of a recessed portion, a through portion, and a hollow portion. The recessed portion is configured to open on the surface of the main body 110. The through portion is configured to define a space that penetrates the main body 110. The hollow portion is formed inside the main body 110.

[0059] (Second Embodiment)

[0060] like Figure 2 As shown, for example, the process equipment 100 is assembled to a centerless grinding device 10A. The centerless grinding device 10A is an example of a machine tool 10. The elements of the second embodiment corresponding to the elements of the first embodiment are given the same reference numerals as the elements of the first embodiment. The workpiece W is, for example, made of a hard material. The workpiece W is, for example, a sintered body. The sintered body is, for example, a diamond sintered body, a cubic boron nitride sintered body, a ceramic sintered body, or a superhard alloy.

[0061] The centerless grinding device 10A includes a grinding wheel 11, an adjusting wheel 12, a first supporting shaft 13, a second supporting shaft 14, a table 15, a supporting part 20, and a process equipment 100. The table 15 supports the first supporting shaft 13 and the second supporting shaft 14 through a bearing. The first supporting shaft 13 supports the grinding wheel 11. The grinding wheel 11 rotates around the central axis of the first supporting shaft 13. The grinding wheel 11 grinds the workpiece W. The adjusting wheel 12 rotates around the central axis of the second supporting shaft 14. The adjusting wheel 12 adjusts the rotation speed of the workpiece W. The supporting part 20 is fixed to the table 15. The supporting part 20 includes a guide part. The guide part is configured to guide the workpiece W being transported. The guide part includes a set of guide surfaces along the transport direction of the workpiece W. A space for arranging the workpiece W is formed between the guide surface on one side and the guide surface on the other side. The feeding method of the workpiece W is, for example, through feed or infeed. In the through-feed grinding, the workpiece W is fed in a predetermined conveying direction by the regulating wheel 12 .

[0062] In a plane perpendicular to the central axis of the first support shaft 13, the direction perpendicular to the height direction of the centerless grinding device 10A is referred to as the width direction of the centerless grinding device 10A. The direction perpendicular to the height direction and the width direction of the centerless grinding device 10A is referred to as the depth direction of the centerless grinding device 10A. The grinding wheel 11 and the regulating wheel 12 are arranged in the width direction with a gap. Between the grinding wheel 11 and the regulating wheel 12, a configuration space 16 for configuring the workpiece W is formed.

[0063] The process equipment 100 includes a fixture 100A for supporting a workpiece W. The fixture 100A includes a pallet 200. The pallet 200 is arranged below the arrangement space 16 in a manner capable of supporting the workpiece W. The pallet 200 is fixed to the support portion 20 by a fixing portion 30. The pallet 200 supports the workpiece W. The workpiece W supported by the pallet 200 is in contact with the pallet 200, the grinding wheel 11, and the adjusting wheel 12, respectively.

[0064] The height direction of the pallet 200 is parallel to the first reference direction. The width direction of the pallet 200 is parallel to the second reference direction. The thickness direction of the pallet 200 is parallel to the third reference direction. In one example, the height direction of the pallet 200 is parallel to the height direction of the centerless grinding device 10A. The width direction of the pallet 200 is parallel to the depth direction of the centerless grinding device 10A. The thickness direction of the pallet 200 is parallel to the width direction of the centerless grinding device 10A.

[0065] Figure 3 A front view of the pallet 200 is shown. Figure 4The cross section of the pallet 200 parallel to the height direction and thickness direction of the pallet 200 is shown. The pallet 200 includes a main body 300, a tip 400, and a joint 210. The joint 210 joins the main body 300 and the tip 400. The structure of the joint 210 is based on the structure of the joint 130 of the first embodiment.

[0066] The main body 300 is, for example, a steel plate. The type of steel plate distinguished by the rolling method is, for example, a cold-rolled steel plate. The type of steel plate distinguished by the plate thickness is, for example, a thin plate. The main body 300 includes a first main body 310 and a second main body 320. The first main body 310 and the second main body 320 are arranged in a first reference direction.

[0067] The first body portion 310 is fixed to the fixing portion 30. The fixing portion 30 is configured to be detachable from the body portion 110. The support portion 20 supports the body portion 300 while the first body portion 310 is fixed to the fixing portion 30. The fixing portion 30 includes, for example, a coupling structure 31. The coupling structure 31 uses a fastener 31A with a screw and a nut 31B to fix the first body portion 310 to the fixing portion 30. The second body portion 320 is provided between the first body portion 310 and the top portion 400. The coupling portion 210 couples the second body portion 320 and the top portion 400.

[0068] The relationship between the first body portion 310 and the second body portion 320 is shown by way of example. In the first example, the first body portion 310 and the second body portion 320 are formed as one body. In the second example, the first body portion 310 and the second body portion 320, which are formed separately, are joined to each other. The manner in which the first body portion 310 and the second body portion 320 are joined includes, for example, the same manner as the manner in which the body portion 300 and the tip portion 400 are joined by the joining portion 210.

[0069] The relationship between the lengths of the main body 300 and the tip 400 in relation to the first reference direction follows the relationship between the lengths of the main body 110 and the tip 120 of the first embodiment. The relationship between the lengths of the first main body 310 and the second main body 320 in relation to the first reference direction follows the relationship between the lengths of the first main body 111 and the second main body 112 of the first embodiment.

[0070] The surface 330 of the main body 300 includes a first main surface 331, a second main surface 332, a side surface 333, an upper surface 334, and a bottom surface 335. One of the first main surface 331 and the second main surface 332 corresponds to the front side of the main body 300. The other of the first main surface 331 and the second main surface 332 corresponds to the back side of the main body 300. In one example, the first main surface 331 corresponds to the front side of the main body 300. The second main surface 332 corresponds to the back side of the main body 300. The upper surface 334 includes the bonding portion 210.

[0071] The top portion 400 is, for example, a plate of a superhard alloy. The elastic modulus of the top portion 400 is greater than the elastic modulus of the main body portion 300. The elastic modulus is, for example, a longitudinal elastic modulus. The surface 410 of the top portion 400 includes a first principal surface 411, a second principal surface 412, a side surface 413, a bottom surface 414, and a contact surface 420. One side of the first principal surface 411 and the second principal surface 412 corresponds to the front side of the top portion 400. The other side of the first principal surface 411 and the second principal surface 412 corresponds to the back side of the top portion 400. In one example, the first principal surface 411 corresponds to the front side of the top portion 400. The second principal surface 412 corresponds to the back side of the top portion 400. The contact surface 420 corresponds to the upper surface of the top portion 400. The bottom surface 414 is included in the joint 210.

[0072] The contact surface 420 supports the workpiece W. The contact surface 420 is configured to have high wear resistance. The portion of the top end 400 that includes the contact surface 420 is a diamond sintered body. The contact surface 420 is composed of a diamond sintered body. The contact surface 420 is a plane. In the side view of the support plate 200, the contact surface 420 is inclined relative to the first reference direction. The contact surface 420 includes a first long side 420A and a second long side 420B that are parallel to the second reference direction. The first long side 420A is equivalent to the boundary between the contact surface 420 and the first main surface 411. The second long side 420B is equivalent to the boundary between the contact surface 420 and the second main surface 412. The contact surface 420 is inclined from the first long side 420A to the second long side 420B in a manner away from the bottom surface 414. In one example, the pallet 200 is arranged such that the first long side 420A is adjacent to the regulating wheel 12 and the second long side 420B is adjacent to the grinding wheel 11 with respect to the width direction of the centerless grinding device 10A.

[0073] The height of the pallet 200 is the length of the pallet 200 associated with the first reference direction. The width of the pallet 200 is the length of the pallet 200 associated with the second reference direction. The thickness of the pallet 200 is the length of the pallet 200 associated with the third reference direction. In one example, the height of the pallet 200 is the distance between the bottom surface 335 of the main body 300 and the second long side 420B of the contact surface 420. The width of the pallet 200 is the distance between the side surface 333 of one side of the main body 300 and the side surface 333 of the other side, or the distance between the side surface 413 of one side of the top end 400 and the side surface 413 of the other side. The thickness of the pallet 200 is the distance between the first main surface 331 and the second main surface 332 of the main body 300, or the distance between the first main surface 411 and the second main surface 412 of the top end 400. In one example, the thickness of the main body 300 is equal to the thickness of the top end 400. The thickness of the pallet 200 is selected according to the diameter of the workpiece W. When the workpiece W is a thin rod, the thickness of the pallet 200 is thin according to the diameter of the workpiece W.

[0074] The relationship between the height of the pallet 200 and the width of the pallet 200 is shown by way of example. In the first example, the height of the pallet 200 is shorter than the width of the pallet 200. In the second example, the height of the pallet 200 is longer than the width of the pallet 200. In the third example, the height of the pallet 200 is equal to the width of the pallet 200. The relationship between the size of the main body 300 and the size of the top end 400 is shown by way of example. The height of the main body 300 is higher than the height of the top end 400. The width of the main body 300 is equal to the width of the top end 400. The thickness of the main body 300 is equal to the thickness of the top end 400.

[0075] The first body portion 310 includes a through portion 311 on which a part of the fastener 31A with a screw is disposed. The through portion 311 is configured to define a space penetrating the first body portion 310 in the third reference direction. The through portion 311 is opened on the first main surface 331 and the second main surface 332. The through portion 311 includes, for example, at least one of a groove penetrating the first body portion 310 and a hole penetrating the first body portion 310.

[0076] The support portion 20 includes a configuration portion 21, a reference surface 22, and a through hole 23. The configuration portion 21 includes a first configuration surface 21A and a second configuration surface 21B arranged at intervals in the width direction of the centerless grinding device 10A. A configuration space 21C for configuring the first main body 310 is formed between the first configuration surface 21A and the second configuration surface 21B. The reference surface 22 faces the direction in which the workpiece W is configured. The through hole 23 is formed so that a fastener 31A with a screw can be configured.

[0077] The first body portion 310 is arranged in the arrangement space 21C. The screw-attached fastener 31A is arranged in the through hole 23 of the support portion 20 and the through portion 311 of the first body portion 310. The first body portion 310 is clamped into the arrangement portion 21 by the nut 31B engaging the external thread portion of the screw-attached fastener 31A. The first arrangement surface 21A is pressed against the first main surface 331 of the first body portion 310, and the second arrangement surface 21B is pressed against the second main surface 332 of the first body portion 310. The second body portion 320 protrudes in the height direction of the centerless grinding device 10A relative to the reference surface 22 of the support portion 20.

[0078] When the workpiece W is processed by the centerless grinding device 10A, the grinding wheel 11 and the adjusting wheel 12 rotate in the same direction. The workpiece W rotates in the opposite direction to the grinding wheel 11 and the adjusting wheel 12 while being supported by the contact surface 420 of the support plate 200. The grinding wheel 11 and the adjusting wheel 12 perform relative motion with the workpiece W. The portion of the workpiece W that contacts the grinding wheel 11 (hereinafter referred to as the "grinding object portion WA") is ground by the grinding wheel 11. Through grinding, the roundness of the grinding object portion WA becomes higher. Along with the relative motion of the grinding wheel 11 and the adjusting wheel 12 with the workpiece W, a load is applied to the top end portion 400 of the support plate 200 during use. The load applied to the top end portion 400 during use is transmitted to the main body 300.

[0079] The support plate 200 includes a deformation control portion 340 that promotes the bending of the main body 300 caused by the load during use. The deformation control portion 340 promotes the deformation of the main body 300 in order to suppress the generation of local stress at the top end 400. With the bending of the main body 300, the load during use is borne in a larger range of the main body 300, suppressing the generation of local stress at the top end 400. This helps to suppress the wear of the top end 400.

[0080] The deformation control unit 340 includes at least one of a first control unit 341 and a second control unit 342. Figure 4 In the illustrated example, the deformation control unit 340 includes a first control unit 341 and a second control unit 342. The first control unit 341 and the second control unit 342 are configured to promote bending of the main body 300 by different methods.

[0081] The first control unit 341 is configured to promote bending of the main body 300 by setting the length of the second main body 320. The first control unit 341 includes a second main body 320 having a length greater than a reference length. The reference length is determined so as to appropriately promote bending of the main body 300. The reference length is determined, for example, based on one or more of the material of the main body 300, the cross-sectional shape of the main body 300, and the size of the load during use. The height HA of the second main body 320 is the distance between a portion of the main body 300 corresponding to the reference plane 22 of the support 20 and the upper surface 334 of the main body 300. The height HA of the second main body 320 is equivalent to the length of the main body 300 protruding in the first reference direction relative to the reference plane 22 of the support 20.

[0082] The second control portion 342 is configured to promote the bending of the main body 300 by partially changing the cross-sectional shape of the second main body 320. The second control portion 342 includes, for example, at least one of a recessed portion, a through portion, and a hollow portion. The recessed portion is configured to open on the surface of the second main body 320. The through portion is configured to define a space that penetrates the second main body 320. The hollow portion is formed inside the second main body 320.

[0083] exist Figure 4 In the example, the second control unit 342 includes a recess 321 provided in the second main body 320. The structure of the recess 321 is shown by way of example. In the first example, the recess 321 includes one or more grooves that are longer in a specified direction. The specified direction is, for example, the width direction of the pallet 200, or a direction intersecting the width direction of the pallet 200. In the second example, the recess 321 includes one or more recesses that have a more isotropic shape than the grooves. A plurality of recesses are, for example, arranged in a specified direction. The specified direction is, for example, the width direction of the pallet 200, or a direction intersecting the width direction of the pallet 200. In the third example, the recess 321 includes the structures of the first and second examples.

[0084] Examples of where the recess 321 is formed in the second main body 320 are shown. In the first example, the recess 321 is provided on the first main surface 331. In the second example, the recess 321 is provided on the second main surface 332. In the third example, the recess 321 is provided on both the first main surface 331 and the second main surface 332.

[0085] The positions of the recessed portion 321 with respect to the height direction of the pallet 200 are shown as examples. In the first example, the recessed portion 321 is provided in a portion of the second body portion 320 including a portion adjacent to the first body portion 310. In the second example, the recessed portion 321 is provided in a portion of the second body portion 320 including a portion adjacent to the joint portion 210. In the third example, the recessed portion 321 is provided between the position of the first example and the position of the second example.

[0086] exist Figure 4 In the example shown, the recess 321 includes a groove 322 that is longer in the width direction of the pallet 200. The groove 322 is arranged on the second main surface 332. The groove 322 is recessed toward the first main surface 331 relative to the second main surface 332. The groove 322 is open on the second main surface 332. The length of the groove 322 related to the width direction of the pallet 200 is referred to as the length of the groove 322. The length of the groove 322 related to the height direction of the pallet 200 is referred to as the width of the groove 322. The length of the groove 322 related to the thickness direction of the pallet 200 is referred to as the depth of the groove 322.

[0087] The length of the groove 322 is shown by way of example. In the first example, the length of the groove 322 is equal to the width of the main body 300. The groove 322 opens at the side surface 333 of the main body 300. In the second example, the length of the groove 322 is shorter than the width of the main body 300 and longer than the height of the main body 300. In the third example, the length of the groove 322 is shorter than the width of the main body 300 and also shorter than the height of the main body 300. In the fourth example, the length of the groove 322 is shorter than the width of the main body 300 and equal to the height of the main body 300.

[0088] The width of the groove 322 is shown by way of example. In the first example, the width of the groove 322 is longer than the height of the top portion 400. In the second example, the width of the groove 322 is shorter than the height of the top portion 400. In the third example, the width of the groove 322 is equal to the height of the top portion 400. In the fourth example, the width of the groove 322 is longer than the height of the first body portion 310. In the fifth example, the width of the groove 322 is shorter than the height of the first body portion 310. In the sixth example, the width of the groove 322 is equal to the height of the first body portion 310.

[0089] The width setting method, which is a setting method of the width of the groove 322 related to the length direction of the groove 322, is divided into, for example, a first width setting method and a second width setting method. In the portion where the first width setting method is applied, the width of the groove 322 is a constant value in the length direction of the groove 322. In the portion where the second width setting method is applied, the width of the groove 322 varies depending on the location of the groove 322 in the length direction.

[0090] The structure of the groove 322 associated with the width setting method is shown by way of example. In the first example, the first width setting method is applied to the entire groove 322. In the second example, the second width setting method is applied to the entire groove 322. In the third example, the groove 322 includes a portion to which the first width setting method is applied, and a portion to which the second width setting method is applied. The number of portions to which the first width setting method is applied is one or more. The number of portions to which the second width setting method is applied is one or more. In the case where the groove 322 includes multiple portions to which the first width setting method is applied, the widths of the portions are equal, or different. In the case where the groove 322 includes multiple portions to which the second width setting method is applied, the shapes of the portions are equal, or different.

[0091] The depth of the groove 322 is shown by way of example. In the first example, the depth of the groove 322 is shallower than half the thickness of one main body 310. In the second example, the depth of the groove 322 is equal to half the thickness of one main body 310. In the third example, the depth of the groove 322 is deeper than half the thickness of one main body 310.

[0092] The depth setting method, which is a setting method of the depth of the groove 322 related to the length direction of the groove 322, is divided into, for example, a first depth setting method and a second depth setting method. In the portion where the first depth setting method is applied, the depth of the groove 322 is a constant value in the length direction of the groove 322. In the portion where the second depth setting method is applied, the depth of the groove 322 varies depending on the location in the length direction of the groove 322.

[0093] The structure of the groove 322 associated with the depth setting method is shown by way of example. In the first example, the first depth setting method is applied to the entire groove 322. In the second example, the second depth setting method is applied to the entire groove 322. In the third example, the groove 322 includes a portion to which the first depth setting method is applied, and a portion to which the second depth setting method is applied. The number of portions to which the first depth setting method is applied is one or more. The number of portions to which the second depth setting method is applied is one or more. In the case where the groove 322 includes a plurality of portions to which the first depth setting method is applied, the depths of the portions are equal, or different. In the case where the groove 322 includes a plurality of portions to which the second depth setting method is applied, the shapes of the portions are equal, or different.

[0094] When processing the workpiece W, a load is applied to the top end 400 of the pallet 200 during use, and stress is generated in the top end 400. The stress distribution of the top end 400 is different between the pallet 200 including the deformation control part 340 and the pallet not including the deformation control part 340 (hereinafter referred to as the "non-control pallet"). The structure of the non-control pallet is different from that of the pallet 200 in the following points, and has the same structure as the pallet 200 in other points. The same symbols are given to the common elements of each pallet. The height of the second main body 320 of the non-control pallet is substantially 0. That is, the main body 300 of the non-control pallet does not include the second main body 320. The joint 210 of the non-control pallet joins the first main body 310 and the top end 400. When the non-control pallet is fixed to the support part 20, only the top end 400 protrudes relative to the reference surface 22 of the support part 20.

[0095] Reference Figure 5 , Figure 6 An example of the analysis results related to the stress of the pallet 200 and the top end portion 400 of the non-control pallet is described. The level of stress generated in the pallet 200 is divided into four levels from the first to the fourth level. Each level represents the magnitude of the relative stress in each of the pallet 200 and the non-control pallet. The stress included in the first level is the largest among the four levels. The stress included in the second level is second only to the first level. The stress included in the third level is second only to the second level. The stress included in the fourth level is 0 or substantially 0. The area where the stress of the first level is distributed is called the "first area R1". The area where the stress of the second level is distributed is called the "second area R2". The area where the stress of the third level is distributed is called the "third area R3". The area where the stress of the fourth level is distributed is called the "fourth area R4".

[0096] The contact surface 420 is divided into, for example, a first contact surface 421, a second contact surface 422, a third contact surface 423, and a fourth contact surface 424. The first contact surface 421 contacts the grinding target portion WA of the workpiece W. The second contact surface 422 is located on both sides of the first contact surface 421 in a manner of clamping the first contact surface 421 in the width direction of the pallet 200. That is, the contact surface 420 includes two second contact surfaces 422. The third contact surface 423 is located on both sides of the second contact surface 422 in a manner of clamping the first contact surface 421 and the second contact surface 422 in the width direction of the pallet 200. That is, the contact surface 420 includes two third contact surfaces 423. The fourth contact surface 424 is located on both sides of the third contact surface 423 in a manner of clamping the first to third contact surfaces 421 to 423 in the width direction of the pallet 200. That is, the contact surface 420 includes two fourth contact surfaces 424. The fourth contact surface 424 is developed between the third contact surface 423 and the short side 420C of the contact surface 420. The length of the first contact surface 421 related to the width direction of the pallet 200 corresponds to the length of the grinding target portion WA of the workpiece W. The lengths of the second to fourth contact surfaces 422 to 424 related to the width direction of the pallet 200 are arbitrarily set. In one example, the lengths of the second to fourth contact surfaces 422 to 424 are equal. The division of the contact surface 420 and the relationship between the lengths of the contact surfaces 421 to 424 are also common to non-control pallets.

[0097] like Figure 5 As shown, in the non-controlled pallet, the first region R1 is distributed in a range near the center of the first contact surface 421. The second region R2 is distributed in a range adjacent to the first region R1 in the first contact surface 421. The third region R3 is distributed in a range adjacent to the second region R2 in the first contact surface 421. The fourth region R4 is distributed in the second to fourth contact surfaces 422 to 424. In such a non-controlled pallet, stress is concentratedly distributed on the first contact surface 421.

[0098] exist Figure 6 In the illustrated pallet 200, the first region R1 is distributed over the entire first contact surface 421 and a portion of the second contact surface 422. The second region R2 is distributed over the range adjacent to the first region R1 in the second contact surface 422, and over the range adjacent to the second contact surface 422 in the third contact surface 423. The third region R3 is distributed over the range adjacent to the second region R2 in the third contact surface 423, and over the range adjacent to the third contact surface 423 in the fourth contact surface 424. The fourth region R4 is distributed over the range adjacent to the third region R3 in the fourth contact surface 424. The range in which the fourth region R4 is distributed is near the short side 420C in the fourth contact surface 424. In such a pallet 200, stress is generated over substantially the entire contact surface 420, and it is difficult for the stress to be concentrated on the first contact surface 421. This helps to suppress wear of the top end portion 400.

[0099] (Example)

[0100] An embodiment of the workpiece W and the pallet 200 will be described. Figure 7 A rear view of a support plate 200 of an embodiment is shown. The workpiece W is a rod of a diamond sintered body. The final product obtained from the workpiece W after grinding is, for example, a shaft supporting a rotating body. The rotating body is, for example, made of a hard material. The rotating body is, for example, a sintered body. The sintered body is, for example, a diamond sintered body, a cubic boron nitride sintered body, a ceramic sintered body, or a superhard alloy. In one example, the rotating body is a scoring wheel for scoring a brittle material substrate. The diameter of the workpiece W is, for example, within a range of less than 2 mm.

[0101] The main body 300 of the support plate 200 is a cold-rolled steel plate. The top end 400 of the support plate 200 is a superhard alloy. A portion of the top end 400 including the contact surface 420 is a diamond sintered body. The joining method of the joint 210 is brazing or mechanical bonding. The thickness of the support plate 200 is thinner according to the diameter of the workpiece W. According to the plate thickness, the type of the support plate 200 is a thin plate. The thickness of the support plate 200 is, for example, included in the range of less than 2 mm.

[0102] The diameter of the workpiece W is 0.8 mm. The height of the support plate 200 is 12.4 mm. The width of the support plate 200 is 26 mm. The thickness of the support plate 200 is 0.6 mm. The height of the main body 300 is 9.2 mm. The width of the main body 110 is 26 mm. The thickness of the main body 300 is 0.6 mm. The height of the first main body 310 is 4.5 mm. The height of the second main body 320 is 4.7 mm. The height of the top portion 400 is 3.2 mm. The width of the top portion 400 is 26 mm. The thickness of the top portion 400 is 0.6 mm. The length of the groove 322 is 26 mm. The width of the groove 322 is 3 mm. The depth of the groove 322 is 0.25 mm.

[0103] The through portion 311 of the first main body portion 310 includes a plurality of grooves 312. The grooves 312 are longer in the height direction of the pallet 200. The grooves 312 include a first end 312A, a second end 312B, and a straight portion 312C. The shape of the first end 312A of the groove 312 is a semicircle corresponding to the shape of the fastener 31A with a screw. The second end 312B of the groove 312 is open at the bottom surface 335 of the main body portion 300. The straight portion 312C is formed between the first end 312A and the second end 312B. The length of the straight portion 312C is 2.6 mm. The width of the straight portion 312C is 3.2 mm. The radius of curvature of the first end 312A is 1.6 mm.

[0104] (Third Embodiment)

[0105] like Figure 8 As shown, for example, the process equipment 100 is assembled to a scraper processing equipment device 10B. The scraper processing equipment device 10B is an example of a machine tool 10. Elements of the third embodiment corresponding to elements of the first embodiment are given the same reference numerals as the elements of the first embodiment.

[0106] The workpiece W is, for example, made of a hard material. The workpiece W is, for example, a sintered body. The sintered body is, for example, a diamond sintered body, a cubic boron nitride sintered body, a ceramic sintered body, or a superhard alloy. The scraper processing equipment 10B includes a device body 50, a support part 20, and a process equipment 100. The device body 50 includes a table 51 and a driving part 52. The table 51 supports the workpiece W. The driving part 52 is fixed to the table 51. The supporting part 20 is combined with the driving part 52.

[0107] The process equipment 100 includes a tool 100B for processing a workpiece W. The tool 100B includes a scraper 500. The fixing portion 30 of the support portion 20 includes a clamping device 40. The clamping device 40 is provided at the top end of the support portion 20. The scraper 500 is fixed to the support portion 20 by the fixing portion 30. The driving portion 52 moves the support portion 20 in a predetermined scanning direction so that the scraper 500 scans relative to the workpiece W. The workpiece W is processed by scanning the scraper 500.

[0108] In the front view of the scraper processing device 10B, the direction perpendicular to the height direction of the scraper processing device 10B is referred to as the width direction of the scraper processing device 10B. The direction perpendicular to the height direction and the width direction of the scraper processing device 10B is referred to as the depth direction of the scraper processing device 10B. In one example, the predetermined scanning direction is parallel to the width direction of the scraper processing device 10B.

[0109] The height direction of the scraper 500 is parallel to the first reference direction. The width direction of the scraper 500 is parallel to the second reference direction. The thickness direction of the scraper 500 is parallel to the third reference direction. In one example, the height direction of the scraper 500 is parallel to the height direction of the scraper processing equipment 10B. The width direction of the scraper 500 is parallel to the depth direction of the scraper processing equipment 10B. The thickness direction of the scraper 500 is parallel to the width direction of the scraper processing equipment 10B.

[0110] Fig. 9 The cross section of the scraper 500 and the like parallel to the height direction and the thickness direction of the scraper 500 is shown. The scraper 500 includes a main body 600, a tip 700, and a joint 510. The joint 510 joins the main body 600 and the tip 700. The structure of the joint 510 is based on the structure of the joint 130 of the first embodiment.

[0111] The main body 600 is, for example, a steel plate. The type of steel plate distinguished by the rolling method is, for example, a cold-rolled steel plate. The type of steel plate distinguished by the plate thickness is, for example, a thin plate. The main body 600 includes a first main body 610 and a second main body 620. The first main body 610 and the second main body 620 are arranged in a first reference direction.

[0112] The first body 610 is fixed to the fixing portion 30. The fixing portion 30 is configured to be detachable from the first body 610. The support portion 20 supports the body 600 while the first body 610 is fixed to the fixing portion 30. The second body 620 is provided between the first body 610 and the top end 700. The joint portion 510 joints the second body 620 and the top end 700.

[0113] The relationship between the first main body 610 and the second main body 620 is shown by way of example. In the first example, the first main body 610 and the second main body 620 are formed as one body. In the second example, the first main body 610 and the second main body 620, which are formed separately, are joined. The method of joining the first main body 610 and the second main body 620 includes, for example, the same method as the method of joining the main body 600 and the top end 700 by the joint 510.

[0114] The relationship between the lengths of the main body 600 and the tip 700 in relation to the first reference direction follows the relationship between the lengths of the main body 110 and the tip 120 of the first embodiment. The relationship between the lengths of the first main body 610 and the second main body 620 in relation to the first reference direction follows the relationship between the lengths of the first main body 111 and the second main body 112 of the first embodiment.

[0115] The surface 630 of the main body 600 includes a first main surface 631, a second main surface 632, a side surface 633, an upper surface 634, and a bottom surface 635. One of the first main surface 631 and the second main surface 632 corresponds to the front surface of the main body 600. The other of the first main surface 631 and the second main surface 632 corresponds to the back surface of the main body 600. In one example, the first main surface 631 corresponds to the front surface of the main body 600. The second main surface 632 corresponds to the back surface of the main body 600. The upper surface 634 is included in the joint 510.

[0116] The top portion 700 is, for example, a plate of superhard alloy. The elastic modulus of the top portion 700 is greater than the elastic modulus of the main body 600. The elastic modulus is, for example, a longitudinal elastic modulus. The surface 710 of the top portion 700 includes a first principal surface 711, a second principal surface 712, a side surface 713, a bottom surface 714, and a contact surface 720. One side of the first principal surface 711 and the second principal surface 712 corresponds to the front side of the top portion 700. The other side of the first principal surface 711 and the second principal surface 712 corresponds to the back side of the top portion 700. In one example, the first principal surface 711 corresponds to the front side of the top portion 700. The second principal surface 712 corresponds to the back side of the top portion 700. The first principal surface 711 is located in front of the second principal surface 712 in a prescribed scanning direction. The contact surface 720 corresponds to the upper surface of the top portion 700. The bottom surface 714 is included in the joint 510.

[0117] The contact surface 720 processes the workpiece W. The contact surface 720 is configured to have high wear resistance. The portion of the top portion 700 including the contact surface 720 is a diamond sintered body. The contact surface 720 is composed of a diamond sintered body. The contact surface 720 is a plane. In the side view of the scraper 500, the contact surface 720 is inclined relative to the first reference direction. The contact surface 720 includes a first side 720A, a second side 720B and a top 720C parallel to the second reference direction. The first side 720A is equivalent to the boundary between the contact surface 720 and the first main surface 711. The second side 720B is equivalent to the boundary between the contact surface 720 and the second main surface 712. The contact surface 720 is respectively arranged between the top 720C and the first side 720A, and between the top 720C and the second side 720B. The contact surface 720 is inclined from the first side 720A or the second side 720B toward the top 720C.

[0118] The height of the scraper 500 is the length of the scraper 500 associated with the first reference direction. The width of the scraper 500 is the length of the scraper 500 associated with the second reference direction. The thickness of the scraper 500 is the length of the scraper 500 associated with the third reference direction. In one example, the height of the scraper 500 is the distance between the bottom surface 635 of the main body 600 and the top 720C of the contact surface 720. The width of the scraper 500 is the distance between the side surface 633 on one side and the side surface 633 on the other side of the main body 600, or the distance between the side surface 713 on one side and the side surface 713 on the other side of the top end 700. The thickness of the scraper 500 is the distance between the first main surface 631 and the second main surface 632 of the main body 600, or the distance between the first main surface 711 and the second main surface 712 of the top end 700. In one example, the thickness of the main body 600 is equal to the thickness of the top end 700.

[0119] The relationship between the height of the scraper 500 and the width of the scraper 500 is shown by way of example. In the first example, the height of the scraper 500 is shorter than the width of the scraper 500. In the second example, the height of the scraper 500 is longer than the width of the scraper 500. In the third example, the height of the scraper 500 is equal to the width of the scraper 500. The relationship between the size of the main body 600 and the size of the top end 700 is shown by way of example. The height of the main body 600 is higher than the height of the top end 700. The width of the main body 600 is equal to the width of the top end 700. The thickness of the main body 600 is equal to the thickness of the top end 700.

[0120] The clamping device 40 includes a configuration portion 41 and a reference surface 42. The configuration portion 41 includes a first configuration surface 41A and a second configuration surface 41B arranged at intervals in the width direction of the scraper processing equipment 10B. A configuration space 41C for configuring the first main body 610 is formed between the first configuration surface 41A and the second configuration surface 41B. The reference surface 42 faces the direction in which the workpiece W is configured.

[0121] The first main body 610 is arranged in the arrangement space 41C. The first main body 610 is clamped into the arrangement portion 41. The first arrangement surface 41A is pressed against the first main surface 631 of the first main body 610, and the second arrangement surface 41B is pressed against the second main surface 632 of the first main body 610. The second main body 620 protrudes in the height direction of the scraper processing equipment 10B relative to the reference surface 42 of the clamping device 40.

[0122] When the scraper processing device 10B processes the workpiece W, the workpiece W moves in a predetermined scanning direction relative to the scraper 500. The scraper 500 and the workpiece W move relative to each other. With the relative movement of the scraper 500 and the workpiece W, a load is applied to the top end 700 of the scraper 500 during use. The load applied to the top end 700 during use is transmitted to the main body 600.

[0123] The scraper 500 includes a deformation control portion 640 that promotes bending of the main body 600 caused by a load during use. The deformation control portion 640 promotes deformation of the main body 600 to suppress the generation of local stress in the tip 700. With the bending of the main body 600, the load during use is borne in a larger range of the main body 600, suppressing the generation of local stress in the tip 700. This helps to suppress wear of the tip 700.

[0124] The deformation control unit 640 includes at least one of a first control unit 641 and a second control unit 642. Fig. 9 In the example shown, the deformation control unit 640 includes a first control unit 641 and a second control unit 642. The first control unit 641 and the second control unit 642 are configured to promote bending of the main body 600 by different methods.

[0125] The first control unit 641 is configured to promote the bending of the main body 600 by setting the length of the second main body 620. The first control unit 641 includes a second main body 620 having a length greater than a reference length. The reference length is determined so as to appropriately promote the bending of the main body 600. The reference length is determined, for example, based on one or more of the material of the main body 600, the cross-sectional shape of the main body 600, and the size of the load during use. The height HB of the second main body 620 is the distance between the portion of the main body 600 corresponding to the reference plane 22 of the support portion 20 and the upper surface 634 of the main body 600. The height HB of the second main body 620 is equivalent to the length of the main body 600 protruding in the first reference direction relative to the reference plane 22 of the support portion 20.

[0126] The second control portion 642 is configured to promote the bending of the main body 600 by partially changing the cross-sectional shape of the second main body 620. The second control portion 642 includes, for example, at least one of a recessed portion, a through portion, and a hollow portion. The recessed portion is configured to open on the surface of the second main body 620. The through portion is configured to define a space that penetrates the second main body 620. The hollow portion is formed inside the second main body 620.

[0127] exist Fig. 9 In the example shown, the second control portion 642 includes a recess 621 provided in the second main body portion 620. The structure of the recess 621 is shown by way of example. In the first example, the recess 621 includes one or more grooves that are longer in a specified direction. The specified direction is, for example, the width direction of the scraper 500, or a direction intersecting the width direction of the scraper 500. In the second example, the recess 621 includes one or more recesses that have the same shape in each direction compared to the grooves. A plurality of recesses are, for example, arranged in a specified direction. The specified direction is, for example, the width direction of the scraper 500, or a direction intersecting the width direction of the scraper 500. In the third example, the recess 621 includes the structures of the first and second examples.

[0128] Examples of where the recess 621 is formed in the second main body 620 are shown. In the first example, the recess 621 is provided on the first main surface 631. In the second example, the recess 621 is provided on the second main surface 632. In the third example, the recess 621 is provided on both the first main surface 631 and the second main surface 632.

[0129] The positions of the recessed portion 621 with respect to the height direction of the scraper 500 are shown as examples. In the first example, the recessed portion 621 is provided in a portion of the second body portion 620 including a portion adjacent to the first body portion 610. In the second example, the recessed portion 621 is provided in a portion of the second body portion 620 including a portion adjacent to the joint portion 510. In the third example, the recessed portion 621 is provided between the position of the first example and the position of the second example.

[0130] Fig. 9 The recessed portion 621 of the first example shown includes a groove 622 that is longer in the width direction of the scraper 500. The groove 622 is provided on the second main surface 632. The groove 622 is recessed relative to the second main surface 632 toward the first main surface 631. The groove 622 opens on the second main surface 632. The length of the groove 622 related to the width direction of the scraper 500 is referred to as the length of the groove 622. The length of the groove 622 related to the height direction of the scraper 500 is referred to as the width of the groove 622. The length of the groove 622 related to the thickness direction of the scraper 500 is referred to as the depth of the groove 622.

[0131] The length of the groove 622 is shown by way of example. In the first example, the length of the groove 622 is equal to the width of the main body 600. The groove 622 opens at the side 633 of the main body 600. In the second example, the length of the groove 622 is shorter than the width of the main body 600 and longer than the height of the main body 600. In the third example, the length of the groove 622 is shorter than the width of the main body 600 and also shorter than the height of the main body 600. In the fourth example, the length of the groove 622 is shorter than the width of the main body 600 and equal to the height of the main body 600.

[0132] The width of the groove 622 is shown by way of example. In the first example, the width of the groove 622 is longer than the height of the top portion 700. In the second example, the width of the groove 622 is shorter than the height of the top portion 700. In the third example, the width of the groove 622 is equal to the height of the top portion 700. In the fourth example, the width of the groove 622 is longer than the height of the first body portion 610. In the fifth example, the width of the groove 622 is shorter than the height of the first body portion 610. In the sixth example, the width of the groove 622 is equal to the height of the first body portion 610.

[0133] In one example, the width setting method as a setting method of the width of the groove 622 related to the length direction of the groove 622 can adopt the same width setting method as the width setting method of the second embodiment. The structure of the groove 622 associated with the width setting method can adopt the same structure as the groove 322 associated with the width setting method of the second embodiment.

[0134] The depth of the groove 622 is shown by way of example. In the first example, the depth of the groove 622 is shallower than half the thickness of the first body portion 610. In the second example, the depth of the groove 622 is equal to half the thickness of the first body portion 610. In the third example, the depth of the groove 622 is deeper than half the thickness of the first body portion 610.

[0135] In one example, the depth setting method as a setting method of the depth of the groove 622 related to the length direction of the groove 622 can adopt the same depth setting method as the depth setting method of the second embodiment. The structure of the groove 622 associated with the depth setting method can adopt the same structure as the groove 322 associated with the depth setting method of the second embodiment.

[0136] When processing the workpiece W, a load is applied to the top portion 700 of the scraper 500 during use, generating stress at the top portion 700. The stress distribution at the top portion 700 is different between the scraper 500 including the deformation control portion 640 and the scraper not including the deformation control portion 640 (hereinafter referred to as the "non-controlled scraper"). The structure of the non-controlled scraper is different from that of the scraper 500 in the following points, and has the same structure as the scraper 500 in other points. The same mark is given to the common elements of each pallet. The height of the second main body 620 of the non-controlled scraper is substantially 0. That is, the main body 600 of the non-controlled scraper does not include the second main body 620. The joint 510 of the non-controlled scraper joins the first main body 610 and the top portion 700. When the non-controlled scraper is fixed in the clamping device 40, only the top portion 700 protrudes relative to the reference surface 42 of the clamping device 40.

[0137] The stress distribution of the tip portion 700 of the non-controlled scraper when processing the workpiece W follows the stress distribution of the tip portion 400 of the non-controlled support plate in the second embodiment. In the non-controlled scraper, stress is concentratedly distributed in a portion of the contact surface 720. The stress distribution of the tip portion 700 of the scraper 500 when processing the workpiece W follows the stress distribution of the tip portion 400 of the support plate 200 in the second embodiment. In the scraper 500, stress is generated in substantially the entire contact surface 720, and stress is less likely to be concentrated in a portion of the contact surface 720. This helps to suppress wear of the tip portion 700.

[0138] In addition, the purpose of the description of the above-mentioned embodiments is not to limit the methods that can be adopted by the process equipment according to the present invention. The process equipment according to the present invention can adopt methods different from the methods exemplified in the embodiments. One example is a method of replacing, changing or omitting a part of the structure of the embodiment, or adding a new structure to the embodiment.

[0139] Description of Reference Numerals

[0140] 10A: Centerless grinding device

[0141] 100: Process Equipment

[0142] 100A: Clamp

[0143] 200: Pallet

[0144] 300: Main body

[0145] 310: First main body

[0146] 320: Second main body

[0147] 321: concave part

[0148] 340: Deformation Control Department

[0149] 400: Top

[0150] W: Workpiece

Claims

1. A process equipment having: A top portion, which contacts the workpiece; a main body portion supporting the top end portion; and a deformation control portion that promotes bending of the main body portion caused by a load applied to the tip portion, The main body comprises: a first main body portion fixed to a support portion supporting the main body portion, and a second main body portion disposed between the first main body portion and the top end portion, The deformation control portion is configured to promote bending of the second main body portion. The deformation control part includes: a second control part, which promotes the bending of the second main body part by changing the partial cross-sectional shape of the second main body part; The second control unit includes a recessed portion disposed on the second main body. The recessed portion is configured to open on the side surface of the main body portion along a second reference direction orthogonal to the first reference direction in which the main body portion and the tip portion are arranged. The recess comprises a groove, The process equipment is a support plate of a centerless grinding device.

2. The process equipment according to claim 1, wherein: The deformation control portion includes a first control portion configured to promote bending of the second main body portion by setting a length of the second main body portion.

3. The process equipment according to claim 2, wherein: The first control portion includes the second main body portion that is longer than the first main body portion in the first reference direction.

4. The process equipment according to any one of claims 1 to 3, wherein: The tip portion includes a sintered body.

5. The process equipment according to any one of claims 1 to 3, wherein: The elastic modulus of the tip portion is greater than the elastic modulus of the body portion.

6. The process equipment according to claim 5, wherein: The support plate is a thin plate.

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