Liquid ejection head and liquid ejection device

Abstract

The present invention provides a liquid ejection head and a liquid ejection device that suppress a deterioration in the image quality while maintaining a high resolution. The liquid ejection head is characterized by including: a first pressure chamber that extends in a first direction and applies pressure to a liquid; a second pressure chamber that extends in the first direction and applies pressure to the liquid; a nozzle flow path that communicates with a nozzle for ejecting the liquid; a first communication flow path that extends in a second direction orthogonal to the first direction and communicates the first pressure chamber and the nozzle flow path; and a second communication flow path that extends in the second direction and communicates the second pressure chamber and the nozzle flow path. The nozzle flow path has: a first portion that extends in the first direction and communicates with the first communication flow path; and a second portion that extends in a third direction that intersects the first direction and is orthogonal to the second direction and communicates with the first portion, and the angle formed by the first direction and the third direction is greater than 0 degrees and less than 90 degrees.

Description

Technical Field

[0001] The present invention relates to a liquid ejection head and a liquid ejection device. Background Art

[0002] As described in Patent Document 1, there has hitherto been known a technique related to a liquid ejection head that supplies a liquid in a pressure chamber to a nozzle flow path and ejects the liquid from a nozzle communicating with the nozzle flow path.

[0003] In the above prior art, a change in the internal pressure of a certain nozzle flow path affects the ink ejection from a nozzle flow path adjacent to the certain nozzle flow path, which may deteriorate the image quality of an image formed by ink dots. If the thickness of the partition wall between the nozzle flow paths is increased, although the influence from the adjacent nozzle flow path described above becomes smaller, the pitch between the nozzles also increases by an amount corresponding to the amount of the thickened partition wall, which may reduce the dot resolution.

[0004] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2013 - 184372 Summary of the Invention

[0005] In order to solve the above problems, a liquid ejection head according to a preferred aspect of the present invention is characterized by including: a first pressure chamber that extends in a first direction and applies pressure to a liquid; a second pressure chamber that extends in the first direction and applies pressure to the liquid; a nozzle flow path that communicates with a nozzle for ejecting the liquid; a first communication flow path that extends in a second direction orthogonal to the first direction and communicates the first pressure chamber and the nozzle flow path; and a second communication flow path that extends in the second direction and communicates the second pressure chamber with the nozzle flow path, where the nozzle flow path has: a first portion that extends in the first direction and communicates with the first communication flow path; and a second portion that extends in a third direction that intersects the first direction and is orthogonal to the second direction and communicates with the first portion, and an angle formed by the first direction and the third direction is greater than 0 degrees and less than 90 degrees.

[0006] The liquid ejection device according to a preferred embodiment of the present invention is characterized by comprising: a first pressure chamber that extends in a first direction and applies pressure to a liquid; a second pressure chamber that extends in the first direction and applies pressure to the liquid; a nozzle flow path that communicates with a nozzle for ejecting the liquid; a first communication flow path that extends in a second direction orthogonal to the first direction and communicates the first pressure chamber and the nozzle flow path; and a second communication flow path that extends in the second direction and communicates the second pressure chamber and the nozzle flow path, wherein the nozzle flow path has: a first portion that extends in the first direction and communicates with the first communication flow path; and a second portion that extends in a third direction that intersects the first direction and is orthogonal to the second direction and communicates with the first portion, and an angle formed by the first direction and the third direction is greater than 0 degrees and less than 90 degrees. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 FIG. is an explanatory diagram showing an example of the liquid ejection device 100 according to the present embodiment.

[0008] Figure 2 FIG. is an exploded perspective view of the liquid ejection head 1.

[0009] Figure 3 FIG. is a Figure 2 cross-sectional view taken along line III-III in

[0010] Figure 4 FIG. is a cross-sectional view showing an enlarged view of the vicinity of the piezoelectric element PZq.

[0011] Figure 5 FIG. is a plan view showing an enlarged view of the vicinity of the nozzle flow path RN[i].

[0012] Figure 6 FIG. is a plan view showing an enlarged view of the vicinity of the pressure chamber CB1[i] and the pressure chamber CB2[i].

[0013] Figure 7 FIG. is a plan view showing an enlarged view of the vicinity of the nozzle flow path RN[i] according to the first modification.

[0014] Figure 8 FIG. is a plan view showing an enlarged view of the vicinity of the nozzle flow path RN[i] according to the second modification.

[0015] Figure 9 FIG. is a plan view showing an enlarged view of the vicinity of the pressure chamber CB1C[i] and the pressure chamber CB2C[i] according to the third modification.

[0016] Figure 10 FIG. is a plan view showing an enlarged view of the vicinity of the nozzle flow path RN[i] according to the fourth modification.

[0017] Figure 11 Exploded perspective view of the liquid ejection head 1E according to the fifth modification example.

[0018] Figure 12 Plan view of the liquid ejection head 1E according to the fifth modification example.

[0019] Figure 13 Cross-sectional view of the liquid ejection head 1E according to the fifth modification example.

[0020] Figure 14 Cross-sectional view of the liquid ejection head 1E according to the fifth modification example.

[0021] Figure 15 Exploded perspective view of the liquid ejection head 1F according to the sixth modification example.

[0022] Figure 16 Plan view when observing the liquid ejection head 1F from the Z-axis direction.

[0023] Figure 17 Exploded perspective view of the liquid ejection head 1G according to the seventh modification example.

[0024] Figure 18 Cross-sectional view of the liquid ejection head 1G according to the seventh modification example.

[0025] Figure 19 Plan view magnifying the vicinity of the nozzle flow path RNG[i].

[0026] Figure 20 Diagram showing an example of the structure of the liquid ejection device 100H according to the eighth modification example. Detailed implementation mode

[0027] Hereinafter, a mode for implementing the present invention will be described with reference to the drawings. However, in each drawing, the dimensions and scales of each part are appropriately different from the actual situation. In addition, although the following described implementation modes are preferred specific examples of the present invention and thus various technically preferred limitations are added, the scope of the present invention is not limited to these modes as long as there is no description of the gist of specifically limiting the present invention in the following description.

[0028] 1. Embodiment

[0029] Hereinafter, while referring to Figure 1 the liquid ejection device 100 according to the present embodiment will be described.

[0030] 1.1. Outline of the liquid ejection device 100

[0031] Figure 1FIG. 0 is an explanatory diagram showing an example of the liquid ejection device 100 according to the present embodiment. The liquid ejection device 100 according to the present embodiment is an inkjet printing device that ejects ink onto a medium PP. Although the medium PP is typically printing paper, any printing object such as a resin film or fabric can also be used as the medium PP.

[0032] As Figure 1 illustrated, the liquid ejection device 100 includes a liquid container 93 that stores ink. As the liquid container 93, for example, a detachable ink cartridge on the liquid ejection device 100, a bag-shaped ink bag formed of a flexible film, or an ink tank that can be refilled with ink can be used. In the liquid container 93, a plurality of inks of different colors are stored.

[0033] As Figure 1 illustrated, the liquid ejection device 100 includes a control device 90, a moving mechanism 91, a conveying mechanism 92, and a circulation mechanism 94.

[0034] Among them, the control device 90 includes a processing circuit such as a CPU or FPGA, and a storage circuit such as a semiconductor memory, and controls each element of the liquid ejection device 100. Here, the CPU is an abbreviation for Central Processing Unit, and the FPGA is an abbreviation for Field Programmable Gate Array.

[0035] In addition, the moving mechanism 91 conveys the medium PP in the +Y direction under the control of the control device 90. In the following, the +Y direction and the -Y direction opposite to the +Y direction are collectively referred to as the Y-axis direction.

[0036] In addition, the conveying mechanism 92 reciprocates a plurality of liquid ejection heads 1 in the +X direction and the -X direction opposite to the +X direction under the control of the control device 90. In the following, the +X direction and the -X direction are collectively referred to as the X-axis direction. Here, the +X direction refers to the direction intersecting the +Y direction. Typically, the +X direction refers to the direction orthogonal to the +Y direction. The conveying mechanism 92 includes a housing 921 that houses a plurality of liquid ejection heads 1, and an endless belt 922 to which the housing 921 is fixed. In addition, the liquid container 93 may be housed in the housing 921 together with the liquid ejection heads 1.

[0037] In addition, under the control implemented by the control device 90, the circulation mechanism 94 supplies the ink retained in the liquid container 93 to the supply flow path RB1 provided in the liquid ejection head 1. Further, under the control implemented by the control device 90, the circulation mechanism 94 recovers the ink in the discharge flow path RB2 provided in the liquid ejection head 1 and returns the recovered ink to the supply flow path RB1. In addition, regarding the supply flow path RB1 and the discharge flow path RB2, Figure 3 will be described later.

[0038] As Figure 1 illustrated, in the liquid ejection head 1, a drive signal Com for driving the liquid ejection head 1 and a control signal SI for controlling the liquid ejection head 1 are supplied from the control device 90. And, the liquid ejection head 1 is driven by the drive signal Com under the control implemented by the control signal SI, so as to supply the ink supplied to the supply flow path RB1 to the nozzle flow path RN provided in the liquid ejection head 1, and cause the ink to be ejected in the +Z direction from a part or all of the M nozzles N provided in the liquid ejection head 1. Here, the value of M is a natural number of 1 or more.

[0039] In addition, the +Z direction is a direction orthogonal to the +X direction and the +Y direction. Hereinafter, there are cases where the +Z direction and the -Z direction, which is the opposite direction to the +Z direction, are collectively referred to as the Z-axis direction. In addition, regarding the nozzle N, Figure 2 and Figure 3 will be described later. Regarding the nozzle flow path, Figure 3 will be described later. The liquid ejection head 1 ejects the ink from a part or all of the M nozzles N in a manner linked to the conveyance of the medium PP by the moving mechanism 91 and the reciprocating movement of the liquid ejection head 1 by the conveyance mechanism 92, and causes the ejected ink to be ejected onto the surface of the medium PP, thereby forming a desired image on the surface of the medium PP.

[0040] 1.2. Outline of the liquid ejection head

[0041] Hereinafter, while referring to Figures 2 to 6 , the outline of the liquid ejection head 1 will be described.

[0042] Figure 2 is an exploded perspective view of the liquid ejection head 1. Figure 3 is Figure 2 a cross-sectional view taken along line III-III in . Line III-III is an imaginary line passing through the nozzle flow path RN.

[0043] As Figure 2 and Figure 3As illustrated, the liquid ejection head 1 includes a nozzle substrate 60, flexible sheets 61 and 62, a communication plate 2, a pressure chamber substrate 3, a diaphragm 4, a reservoir formation substrate 5, and a wiring substrate 8.

[0044] As Figure 2 and Figure 3 As illustrated, the communication plate 2 is provided on the -Z side of the nozzle substrate 60. The communication plate 2 is a plate-like member that extends in a long strip shape in the Y-axis direction and is substantially parallel to the XY plane, and a flow path for the ink is formed therein.

[0045] Specifically, a supply flow path RA1 and a discharge flow path RA2 are formed in the communication plate 2. Among them, the supply flow path RA1 is provided to communicate with a supply flow path RB1 described later and extends in the Y-axis direction. In addition, the discharge flow path RA2 is provided to communicate with a discharge flow path RB2 described later and extends in the -X direction along the Y-axis direction when viewed from the supply flow path RA1.

[0046] In addition, M connection flow paths RK1 corresponding to the M nozzles N one by one, M connection flow paths RK2 corresponding to the M nozzles N one by one, M communication flow paths RR1 corresponding to the M nozzles N one by one, M communication flow paths RR2 corresponding to the M nozzles N one by one, M nozzle flow paths RN corresponding to the M nozzles N one by one, M connection flow paths RX1 corresponding to the M nozzles N one by one, and M connection flow paths RX2 corresponding to the M nozzles N one by one are formed in the communication plate 2.

[0047] In addition, the connection flow path RX1 may be a single flow path provided commonly in the M nozzles, and the connection flow path RX2 may be a single flow path provided commonly in the M nozzles. Hereinafter, it is assumed that there are M connection flow paths RX1 and M connection flow paths RX2 for explanation.

[0048] Hereinafter, m is a natural number satisfying 1 or more and M or less, and sometimes the nozzle N located at the m-th position when viewed from the -Y direction among the M nozzles N is expressed as nozzle N[m]. Sometimes the connection flow path RK1 corresponding to the nozzle N[m] is expressed as connection flow path RK1[m]. Sometimes the connection flow path RK2 corresponding to the nozzle N[m] is expressed as connection flow path RK2[m]. Sometimes the communication flow path RR1 corresponding to the nozzle N[m] is expressed as communication flow path RR1[m]. Sometimes the communication flow path RR2 corresponding to the nozzle N[m] is expressed as communication flow path RR2[m]. Sometimes the nozzle flow path RN corresponding to the nozzle N[m] is expressed as nozzle flow path RN[m]. The nozzle N[m] is provided on the nozzle flow path RN[m].

[0049] The connection flow path RX1 is arranged to communicate with the supply flow path RA1 and extend along the X-axis direction in the -X direction when observed from the supply flow path RA1. The connection flow path RK1 is arranged to communicate with the connection flow path RX1 and extend along the Z-axis direction in the -X direction when observed from the connection flow path RX1. Further, the communication flow path RR1 is arranged to extend along the Z-axis direction in the -X direction when observed from the connection flow path RK1. Further, the connection flow path RK2 is arranged to communicate with the connection flow path RX2 and extend along the Z-axis direction in the +X direction when observed from the connection flow path RX2. Further, the connection flow path RX2 is arranged to communicate with the discharge flow path RA2 and extend along the X-axis direction in the +X direction when observed from the discharge flow path RA2. Further, the communication flow path RR2 is arranged to extend along the Z-axis direction in the +X direction when observed from the connection flow path RK2, in the -X direction when observed from the communication flow path RR1. Further, the nozzle flow path RN connects the communication flow path RR1 and the communication flow path RR2. The nozzle flow path RN is located between the pressure chamber CB1 and the pressure chamber CB2 when observed from the -Z direction. The nozzle flow path RN communicates with the nozzle N corresponding to the nozzle flow path RN.

[0050] Further, the communication plate 2 is manufactured, for example, by processing a single crystal substrate of silicon using semiconductor manufacturing technology. However, known materials and manufacturing methods can be arbitrarily adopted in the manufacture of the communication plate 2.

[0051] Returning the explanation to Figure 2 and Figure 3 . As Figure 2 and Figure 3 illustrated, a pressure chamber substrate 3 is provided on the -Z side of the communication plate 2. The pressure chamber substrate 3 is a plate-shaped member that is long in the Y-axis direction and extends substantially parallel to the XY plane, and a flow path for ink is formed therein.

[0052] Specifically, M pressure chambers CB1 corresponding one-to-one to M nozzles N and M pressure chambers CB2 corresponding one-to-one to M nozzles N are formed in the pressure chamber substrate 3. Among them, the pressure chamber CB1 is arranged to communicate with the connection flow path RK1 and the communication flow path RR1, connect the +X side end of the connection flow path RK1 and the -X side end of the communication flow path RR1 when observed from the Z-axis direction, and extend in the X-axis direction. Further, the pressure chamber CB2 is arranged to communicate with the connection flow path RK2 and the communication flow path RR2, connect the -X side end of the connection flow path RK2 and the +X side end of the communication flow path RR2 when observed from the Z-axis direction, and extend in the X-axis direction.

[0053] Hereinafter, the pressure chamber CB1 corresponding to the nozzle N[m] is sometimes expressed as the pressure chamber CB1[m]. The pressure chamber CB2 corresponding to the nozzle N[m] is sometimes expressed as the pressure chamber CB2[m].

[0054] In addition, the pressure chamber substrate 3 is manufactured, for example, by processing a single crystal substrate of silicon using semiconductor manufacturing technology. However, known materials and manufacturing methods can also be arbitrarily adopted in the manufacture of the pressure chamber substrate 3.

[0055] In addition, hereinafter, the flow path of the ink that connects the supply flow path RA1 and the discharge flow path RA2 is referred to as the circulation flow path RJ. That is, the supply flow path RA1 and the discharge flow path RA2 are connected by M circulation flow paths RJ corresponding to the M nozzles N one by one. As described above, each circulation flow path RJ includes: a connection flow path RX1 connected to the supply flow path RA1, a connection flow path RK1 connected to the connection flow path RX1, a pressure chamber CB1 connected to the connection flow path RK1, a communication flow path RR1 connected to the pressure chamber CB1, a nozzle flow path RN connected to the communication flow path RR1, a communication flow path RR2 connected to the nozzle flow path RN, a pressure chamber CB2 connected to the communication flow path RR2, a connection flow path RK2 connected to the pressure chamber CB2, and a connection flow path RX2 connected to the connection flow path RK2 and the discharge flow path RA2.

[0056] As Figure 2 and Figure 3 As exemplified, a diaphragm 4 is provided on the -Z side of the pressure chamber substrate 3. The diaphragm 4 is a plate-like member that is long in the Y-axis direction and extends substantially parallel to the XY plane, and is a member that can vibrate elastically.

[0057] As Figure 2 and Figure 3 As exemplified, M piezoelectric elements PZ1 corresponding to the M pressure chambers CB1 and M piezoelectric elements PZ2 corresponding to the M pressure chambers CB2 are provided on the -Z side of the diaphragm 4. Hereinafter, the piezoelectric element PZ1 and the piezoelectric element PZ2 are collectively referred to as the piezoelectric element PZq. The piezoelectric element PZq is a passive element that deforms according to the potential change of the drive signal Com. In other words, the piezoelectric element PZq is an example of an energy conversion element that converts the electrical energy of the drive signal Com into kinetic energy. In addition, hereinafter, there is a case where a subscript "q" is added to the symbol representing the structural element or signal corresponding to the piezoelectric element PZq in the liquid ejection head 1.

[0058] Figure 4 is a cross-sectional view that magnifies the vicinity of the piezoelectric element PZq.

[0059] As Figure 4As illustrated, the piezoelectric element PZq is a laminate in which a piezoelectric body ZMq is interposed between a lower electrode ZDq supplied with a predetermined reference potential VBS and an upper electrode ZUq supplied with a drive signal Com. The piezoelectric element PZq is, for example, a portion where the lower electrode ZDq, the upper electrode ZUq, and the piezoelectric body ZMq overlap when viewed from the -Z direction. Further, a pressure chamber CBq is provided in the +Z direction of the piezoelectric element PZq.

[0060] As described above, the piezoelectric element PZq is driven according to the potential change of the drive signal Com and thus deforms. The diaphragm 4 vibrates in a manner linked to the deformation of the piezoelectric element PZq. When the diaphragm 4 vibrates, the pressure in the pressure chamber CBq changes. And since the pressure in the pressure chamber CBq changes, the ink filled inside the pressure chamber CBq is ejected from the nozzle N via the communication flow path RRq and the nozzle flow path RN.

[0061] As Figure 2 and Figure 3 As illustrated, a wiring substrate 8 is mounted on the -Z side surface of the diaphragm 4. The wiring substrate 8 is a component for electrically connecting the control device 90 and the liquid ejection head 1. As the wiring substrate 8, for example, a flexible wiring substrate such as an FPC or an FFC is preferably used. Here, FPC is the abbreviation of Flexible Printed Circuit, and FFC is the abbreviation of Flexible Flat Cable. A drive circuit 81 is mounted on the wiring substrate 8. The drive circuit 81 is an electrical circuit that switches whether to supply the drive signal Com to the piezoelectric element PZq under the control of the control signal SI. As Figure 4 As illustrated, the drive circuit 81 supplies the drive signal Com to the upper electrode ZUq of the piezoelectric element PZq via the wiring 810.

[0062] In addition, hereinafter, there are cases where the drive signal Com supplied to the piezoelectric element PZ1 is referred to as the drive signal Com1, and the drive signal Com supplied to the piezoelectric element PZ2 is referred to as the drive signal Com2. In the present embodiment, it is assumed that when ink is ejected from the nozzle N, the waveform of the drive signal Com1 supplied by the drive circuit 81 to the piezoelectric element PZ1 corresponding to the nozzle N and the waveform of the drive signal Com2 supplied by the drive circuit 81 to the piezoelectric element PZ2 corresponding to the nozzle N are substantially the same. Here, the so-called "substantially the same" refers to a concept that includes not only the case of being exactly the same but also the case where it can be regarded as the same when errors are considered.

[0063] As Figure 2and Figure 3 As illustrated, a reservoir forming substrate 5 is provided on the -Z side of the connection plate 2. The reservoir forming substrate 5 is a member that is long in the Y-axis direction and has a flow path for the ink formed therein.

[0064] Specifically, in the reservoir forming substrate 5, a supply flow path RB1 and a discharge flow path RB2 are formed. Among them, the supply flow path RB1 is provided to communicate with the supply flow path RA1 and, when viewed from the supply flow path RA1, extends in the Y-axis direction in the -Z direction. In addition, the discharge flow path RB2 is provided to communicate with the discharge flow path RA2 and, when viewed from the discharge flow path RA2 in the -Z direction and when viewed from the supply flow path RB1 in the -X direction, extends in the Y-axis direction.

[0065] In addition, in the reservoir forming substrate 5, an inlet 51 communicating with the supply flow path RB1 and an outlet 52 communicating with the discharge flow path RB2 are provided. And, in the supply flow path RB1, ink is supplied from the liquid container 93 via the inlet 51. In addition, the ink retained in the discharge flow path RB2 is recovered via the outlet 52.

[0066] In addition, an opening 50 is provided on the reservoir forming substrate 5. Inside the opening 50, a pressure chamber substrate 3, a diaphragm 4, and a wiring substrate 8 are provided.

[0067] In addition, the reservoir forming substrate 5 is formed, for example, by injection molding of a resin material. However, known materials and manufacturing methods can also be arbitrarily adopted in the manufacture of the reservoir forming substrate 5.

[0068] In the present embodiment, the ink supplied from the liquid container 93 to the inlet 51 flows into the supply flow path RA1 via the supply flow path RB1. Then, a part of the ink that has flowed into the supply flow path RA1 flows into the pressure chamber CB1 via the connection flow path RX1 and the connection flow path RK1. In addition, a part of the ink that has flowed into the pressure chamber CB1 flows into the pressure chamber CB2 via the communication flow path RR1, the nozzle flow path RN, and the communication flow path RR2. Then, a part of the ink that has flowed into the pressure chamber CB2 is discharged from the outlet 52 via the connection flow path RK2, the connection flow path RX2, the discharge flow path RA2, and the discharge flow path RB2.

[0069] In addition, when the piezoelectric element PZ1 is driven by the drive signal Com1, a part of the ink filled inside the pressure chamber CB1 is ejected from the nozzle N via the communication flow path RR1 and the nozzle flow path RN. Further, when the piezoelectric element PZ2 is driven by the drive signal Com2, a part of the ink filled inside the pressure chamber CB2 is ejected from the nozzle N via the communication flow path RR2 and the nozzle flow path RN.

[0070] As Figure 2 and Figure 3 illustrated, on the +Z side surface of the communication plate 2, a flexible thin plate 61 is provided so as to block the supply flow path RA1, the connection flow path RX1, and the connection flow path RK1. The flexible thin plate 61 is formed of an elastic material and absorbs pressure fluctuations of the ink in the supply flow path RA1, the connection flow path RX1, and the connection flow path RK1. Further, on the +Z side surface of the communication plate 2, a flexible thin plate 62 is provided so as to block the discharge flow path RA2, the connection flow path RX2, and the connection flow path RK2. The flexible thin plate 62 is formed of an elastic material and absorbs pressure fluctuations of the ink in the discharge flow path RA2, the connection flow path RX2, and the connection flow path RK2.

[0071] As described above, the liquid ejection head 1 according to the present embodiment circulates the ink from the supply flow path RA1 to the discharge flow path RA2 via the circulation flow path RJ. Therefore, in the present embodiment, even when there is a period during which the ink inside the pressure chamber CBq is not ejected from the nozzle N, it is possible to prevent a state in which the ink stays in the pressure chamber CBq and the nozzle flow path RN or the like from continuing. Therefore, in the present embodiment, even when there is a period during which the ink inside the pressure chamber CBq is not ejected from the nozzle N, it is possible to suppress thickening of the ink inside the pressure chamber CBq, and thus it is possible to prevent ejection abnormalities in which the ink cannot be ejected from the nozzle N due to thickening of the ink.

[0072] Further, the liquid ejection head 1 according to the present embodiment can eject the ink filled inside the pressure chamber CB1 and the ink filled inside the pressure chamber CB2 from the nozzle N. Therefore, in the liquid ejection head 1 according to the present embodiment, for example, compared with a method of ejecting only the ink filled inside one pressure chamber CBq from the nozzle N, the ejection amount of the ink from the nozzle N can be increased.

[0073] 1.3. Shape of Nozzle Flow Path

[0074] Figure 5 is a plan view of the vicinity of the nozzle flow path RN[i] magnified. i is a natural number satisfying 2 or more and M - 1 or less. In Figure 4Among them, the connecting flow channels RR1[i - 1], nozzle flow channel RN[i - 1], connecting flow channels RR2[i - 1], connecting flow channels RR1[i], nozzle flow channel RN[i], connecting flow channels RR2[i], connecting flow channels RR1[i + 1], nozzle flow channel RN[i + 1], and connecting flow channels RR2[i + 1] are shown. In Figure 4 In the example of , in the plan view observed from the -Z direction, the shapes of the connecting flow channel RR1 and the connecting flow channel RR2 are parallelograms for facilitating the processing of the single crystal substrate. However, the shapes of the connecting flow channel RR1 and the connecting flow channel RR2 can also be rectangles.

[0075] The nozzle flow channel RN has a first part U1, a second part U2, and a third part U3. In Figure 5 In order to suppress the complication of the drawing, symbols are marked on the first part U1, the second part U2, and the third part U3 of the nozzle flow channel RN[i - 1], the nozzle flow channel RN[i], and the nozzle flow channel RN[i + 1] among the nozzle flow channels RN[i - 1], RN[i], and RN[i + 1]. The first part U1 extends in the -X direction and is connected to the connecting flow channel RR1. The second part U2 extends in the V1 direction and is connected to the first part U1. The third part U3 extends in the -X direction and is connected to the second part U2 and the connecting flow channel RR2. The V1 direction intersects the -X direction and is orthogonal to the -Z direction. The angle θ1 formed by the -X direction and the V1 direction is greater than 0 degrees and less than 90 degrees.

[0076] In the second part U2, a nozzle N is provided. Typically, the nozzle N is provided approximately at the center of the second part U2. For example, the distance from the nozzle N to the wall surface HU2a in the V2 direction and the distance from the nozzle N to the wall surface HU2b in the direction opposite to the V2 direction are approximately the same. In addition, for example, the distance from the nozzle N to the boundary B12 between the first part U1 and the second part U2 in the V1 direction and the distance from the nozzle N to the boundary B23 between the second part U2 and the third part U3 in the V1 direction are approximately the same. Here, the so-called "approximately at the center" means a concept that includes not only the case of being strictly at the center but also the case that can be regarded as being at the center if errors are considered. The V2 direction is the -Y side direction among the two directions perpendicular to the V1 direction and the -Z direction.

[0077] As Figure 5 illustrated, in the case of observing from the Z-axis direction, the first part U1 has a -Y side wall surface HU1a and a +Y side wall surface HU1b. In addition, the second part U2 has a V2 side wall surface HU2a and a wall surface HU2b on the side opposite to the V2 direction. In addition, the third part U3 has a -Y side wall surface HU3a and a +Y side wall surface HU3b in the case of observing from the Z-axis direction.

[0078] The angle θ1 can also be expressed as the angle formed by the normal vector of the wall surface HU1b of the first part U1 toward the wall surface HU1a and the normal vector of the wall surface HU2b of the second part U2 toward the wall surface HU2a. The V1 direction can also be expressed as the direction obtained by rotating the -X direction clockwise by the angle θ1 when viewed from the -Z direction. The angle θ1 is greater than 10 degrees and less than 50 degrees. Moreover, the angle θ1 is greater than 20 degrees and less than 40 degrees. Typically, the angle θ1 is 30 degrees.

[0079] In the present embodiment, the channel widths of the first part U1, the second part U2, and the third part U3 are substantially equal to each other. Here, the channel width refers to the length of the channel in the direction perpendicular to the extending direction of the channel. The direction perpendicular to the extending direction of the channel can be either the horizontal direction or the vertical direction, i.e., the Z-axis direction. Hereinafter, it is assumed that the channel width is the length of the channel in the horizontal direction among the directions perpendicular to the extending direction of the channel for explanation. As Figure 5 illustrated, the channel width w1 of the first part U1 in the -Y direction, the channel width w2 of the second part U2 in the V2 direction, and the channel width w3 of the third part U3 in the -Y direction are substantially equal to each other. The so-called "substantially equal" means a concept that includes cases where they are considered equal when errors are taken into account, in addition to the case where they are exactly equal.

[0080] In the present embodiment, the channel length L2 of the second part U2 is shorter than the channel length L1 of the first part U1 and shorter than the channel length L3 of the third part U3. Here, the channel length refers to the length in the extending direction of the channel. Moreover, the channel length L1 and the channel length L3 are substantially equal to each other.

[0081] When viewed from the -X direction, the communication channel RR2 partially overlaps and partially does not overlap with respect to the communication channel RR1 corresponding to the communication channel RR2. In Figure 5 the example, the portion Pa1 of the communication channel RR2[i + 1] in the -X direction does not overlap with the communication channel RR1[i + 1], and the portion Pa2 of the communication channel RR2[i + 1] in the -X direction overlaps with the communication channel RR1[i + 1].

[0082] Figure 6 is a plan view showing an enlarged view of the vicinity of the pressure chamber CB1[i] and the pressure chamber CB2[i]. In Figure 6 it shows the pressure chamber CB1[i - 1], the pressure chamber CB2[i - 1], the pressure chamber CB1[i], the pressure chamber CB2[i], the pressure chamber CB1[i + 1], and the pressure chamber CB2[i + 1].

[0083] When the pressure chamber CB2 is observed from the -X direction, a part of it overlaps with the pressure chamber CB1 corresponding to the pressure chamber CB2, and another part does not overlap. In Figure 6 the example of, the part Pa3 of the pressure chamber CB2[i - 1] in the -X direction does not overlap with the pressure chamber CB1[i - 1], and the part Pa4 of the pressure chamber CB2[i - 1] in the -X direction overlaps with the pressure chamber CB1[i - 1].

[0084] 1.4. Summary of the Embodiment

[0085] As described above, the liquid ejection head 1 according to the present embodiment is characterized by including: a pressure chamber CB1 that extends in the -X direction and applies pressure to the ink; a pressure chamber CB2 that extends in the -X direction and applies pressure to the ink; a nozzle flow path RN that communicates with the nozzle N for ejecting the ink; a communication flow path RR1 that extends in the -Z direction and communicates the pressure chamber CB1 and the nozzle flow path RN; a communication flow path RR2 that extends in the -Z direction and communicates the pressure chamber CB2 and the nozzle flow path RN, and the nozzle flow path RN has: a first part U1 that extends in the -X direction and communicates with the communication flow path RR1; a second part U2 that extends in the V1 direction intersecting the -X direction and the -Z direction and communicates with at least the first part U1, and the angle θ1 formed by the -X direction and the V1 direction is greater than 0 degrees and less than 90 degrees.

[0086] Generally, when high resolution is achieved, the partition walls between the nozzle flow paths RN become narrower, so-called structural crosstalk occurs where the internal pressure change in a certain nozzle flow path RN affects the ink ejection of the nozzle flow path RN adjacent to the certain nozzle flow path RN. The liquid ejection head 1 according to the present embodiment forms a shape of a so-called truss structure by the partition wall of the first part U1 and the partition wall of the second part U2 by making the partition wall of the second part U2 inclined at an angle θ1 with respect to the partition wall of the first part U1. Therefore, the liquid ejection head 1 according to the present embodiment has a higher strength of the partition walls between the nozzle flow paths RN compared to the case where the angle θ1 is 0 degrees. In addition, since the partition wall of the second part U2 is inclined at an angle θ1 with respect to the partition wall of the first part U1, the velocity of the ink flowing in the nozzle flow path RN temporarily decreases particularly at the boundary B12 between the first part U1 and the second part U2. Therefore, the internal pressure change itself in a certain nozzle flow path RN also becomes smaller. By these means, the generation of structural crosstalk can be suppressed. By suppressing the generation of structural crosstalk, the deterioration of the image quality formed on the surface of the medium PP can be suppressed.

[0087] In addition, in the present embodiment, the pressure chamber CB1 is an example of the "first pressure chamber", the pressure chamber CB2 is an example of the "second pressure chamber", the communication flow path RR1 is an example of the "first communication flow path", the communication flow path RR2 is an example of the "second communication flow path", the ink is an example of the "liquid", the +X direction is an example of the "first direction", the -Z direction is an example of the "second direction", and the V1 direction is an example of the "third direction".

[0088] Furthermore, in the liquid ejection head 1 according to the present embodiment, the nozzle flow path RN further has a third portion U3 that extends in the -X direction and connects the second portion U2 and the communication flow path RR2.

[0089] Since the third portion U3 extends in the -X direction and the second portion U2 extends in the V1 direction, the partition wall of the second portion U2 is inclined at an angle θ1 with respect to the partition wall of the third portion U3. Therefore, similar to the relationship between the first portion U1 and the second portion U2 described above, in the relationship between the second portion U2 and the third portion U3, it is also possible to increase the partition wall strength and reduce the velocity. Thus, the liquid ejection head 1 according to the present embodiment can suppress the generation of structural crosstalk compared to a configuration in which the second portion U2 is not inclined with respect to the third portion U3, in other words, compared to a configuration in which the angle θ1 is 0 degrees.

[0090] Furthermore, in the liquid ejection head 1 according to the present embodiment, the flow path length L2 is shorter than the flow path length L1 and shorter than the flow path length L3.

[0091] Generally, the rigidity of an object has a characteristic of monotonically increasing as the length of the object becomes shorter. Since the flow path length L2 is shorter than the flow path length L1 and shorter than the flow path length L3, the rigidity of the partition wall of the second portion U2 is greater than the rigidity of the partition wall of the first portion U1 and the rigidity of the partition wall of the third portion U3. In addition, since the velocity reduction at the boundary B12 between the first portion U1 and the second portion U2 and the velocity reduction at the boundary B23 between the second portion U2 and the third portion U3 are implemented in a short period of time when the flow path length L2 is short, the ink velocity can be continuously reduced across the entire second portion U2. By these means, the generation of structural crosstalk can be suppressed compared to a configuration in which the flow path lengths L1 and L3 are the same.

[0092] Furthermore, in the liquid ejection head 1 according to the present embodiment, the flow path lengths L1 and L3 are substantially equal to each other.

[0093] Therefore, according to the present embodiment, when the nozzle N communicates with the substantially center of the nozzle flow path RN, the length of the flow path of the ink that reaches the nozzle N from the pressure chamber CB1 via the communication flow path RR1 and the nozzle flow path RN can be made substantially equal to the length of the flow path of the ink that reaches the nozzle N from the pressure chamber CB2 via the communication flow path RR2 and the nozzle flow path RN. Thus, according to the present embodiment, for example, compared with a manner in which the lengths of the flow path length L1 and the flow path length L3 are different, the control for ejecting the ink filled in the pressure chamber CB1 from the nozzle N and the control for ejecting the ink filled in the pressure chamber CB2 from the nozzle N can be simplified.

[0094] In addition, in the liquid ejection head 1 according to the present embodiment, the angle θ1 of the V1 direction with respect to the -X direction is greater than 10 degrees and less than 50 degrees.

[0095] Therefore, compared with a manner in which the angle θ1 is 0 degrees, the liquid ejection head 1 according to the present embodiment can increase the strength of the partition wall between the nozzle flow paths RN, thereby suppressing the generation of structural crosstalk.

[0096] In a manner in which the angle θ1 is 90 degrees, near the connection portion of the wall surface HU1b and the wall surface HU2b, bubbles are more likely to remain compared with the liquid ejection head 1 according to the present embodiment. When bubbles remain in a circulation flow path such as the nozzle flow path RN, even if the piezoelectric element PZq is driven by the drive signal Com, the pressure for the piezoelectric element PZq to press out the ink is absorbed by the bubbles, etc., resulting in so-called ejection abnormality where it is difficult to eject the ink from the nozzle N. And, in the case of occurrence of ejection abnormality, the image quality of the image formed on the medium PP deteriorates. In contrast, compared with a manner in which the angle θ1 is 90 degrees, the liquid ejection head 1 according to the present embodiment can suppress the deterioration of the image quality of the image formed on the medium PP because bubbles are less likely to remain.

[0097] In addition, in the liquid ejection head 1 according to the present embodiment, when viewed from the -X direction, the communication flow path RR2 partially overlaps and partially does not overlap with the communication flow path RR1 corresponding to the communication flow path RR2.

[0098] Since, when observing the communication flow path RR2 from the -X direction, the width extending in the V1 direction of the second portion U2 becomes larger, or the angle θ1 becomes larger (close to 90 degrees), in a manner that does not overlap with the entire communication flow path RR1. In the former case, the dimensions of the liquid ejection head 1 in the X-axis direction and the Y-axis direction become larger. In addition, in the latter case, since the larger the angle θ1, the shorter the distance between the partitions of the second portion U2 in the adjacent nozzle flow path RN, the influence of structural crosstalk becomes larger, and thus it is possible to cancel the effect of reducing structural crosstalk achieved by increasing the partition strength and decreasing the flow velocity. Therefore, according to the present embodiment, compared with the case where the communication flow path RR2 does not overlap with the entire communication flow path RR1 when observed from the -X direction, the effects of preventing size increase and reducing structural crosstalk can be obtained.

[0099] In addition, in the liquid ejection head 1 according to the present embodiment, when observed from the -X direction, the pressure chamber CB2 partially overlaps and partially does not overlap with respect to the pressure chamber CB1.

[0100] Therefore, the shape of the flow path of the ink that reaches the nozzle N from the pressure chamber CB1 via the communication flow path RR1 and the nozzle flow path RN can be made substantially the same as the shape of the flow path of the ink that reaches the nozzle N from the pressure chamber CB2 via the communication flow path RR2 and the nozzle flow path RN. Thus, according to the present embodiment, for example, compared with the case where the pressure chamber CB2 overlaps with the entire pressure chamber CB1 when observed from the -X direction, the control for ejecting the ink filled in the pressure chamber CB1 from the nozzle N and the control for ejecting the ink filled in the pressure chamber CB2 from the nozzle N can be simplified.

[0101] In addition, in the liquid ejection head 1 according to the present embodiment, the nozzle N is provided in the second portion U2. Typically, the nozzle N is provided at approximately the center of the second portion U2.

[0102] By providing the nozzle N at approximately the center of the second portion U2, the shape of the flow path of the ink that reaches the nozzle N from the pressure chamber CB1 via the communication flow path RR1 and the nozzle flow path RN can be made substantially the same as the shape of the flow path of the ink that reaches the nozzle N from the pressure chamber CB2 via the communication flow path RR2 and the nozzle flow path RN. Thus, according to the present embodiment, for example, compared with the case where the nozzle N communicates with the nozzle flow path RN at a position different from the center of the nozzle flow path RN, the control for ejecting the ink filled in the pressure chamber CB1 from the nozzle N and the control for ejecting the ink filled in the pressure chamber CB2 from the nozzle N can be simplified.

[0103] In addition, although in the present embodiment, it is described that the first portion U1 is a portion communicating with the supply-side communication flow path RR1, it can also be understood that the first portion U1 is a portion communicating with the discharge-side communication flow path RR2. In this case, in the present embodiment, the third portion U3 communicates with the supply-side communication flow path.

[0104] Furthermore, in the liquid ejection head 1 according to the present embodiment, it is characterized in that it further includes: a pressure chamber substrate 3 in which a pressure chamber CB1 and a pressure chamber CB2 are provided; a communication plate 2 in which a nozzle flow path RN, a communication flow path RR1, and a communication flow path RR2 are provided; and a nozzle substrate 60 in which a nozzle N is provided.

[0105] Therefore, according to the present embodiment, the pressure chamber CB1, the pressure chamber CB2, the nozzle flow path RN, the communication flow path RR1, the communication flow path RR2, and the nozzle N can be manufactured using semiconductor manufacturing technology. Therefore, according to the present embodiment, the pressure chamber CB1, the pressure chamber CB2, the nozzle flow path RN, the communication flow path RR1, the communication flow path RR2, and the nozzle N can be miniaturized and densified.

[0106] Furthermore, in the liquid ejection head 1 according to the present embodiment, it is characterized in that it includes: a piezoelectric element PZ1 that applies pressure to the ink in the pressure chamber CB1 according to the supply of a drive signal Com1; and a piezoelectric element PZ2 that applies pressure to the ink in the pressure chamber CB2 according to the supply of a drive signal Com2.

[0107] Therefore, according to the present embodiment, compared with a configuration in which only a piezoelectric element PZq that applies pressure to the ink in one pressure chamber CBq is provided, the ejection amount of the ink ejected from the nozzle N can be increased.

[0108] In addition, in the present embodiment, the piezoelectric element PZ1 is an example of the "first element", the piezoelectric element PZ2 is an example of the "second element", the drive signal Com1 is an example of the "first drive signal", and the drive signal Com2 is an example of the "second drive signal".

[0109] Furthermore, in the liquid ejection head 1 according to the present embodiment, it is characterized in that the waveform of the drive signal Com1 is substantially the same as the waveform of the drive signal Com2.

[0110] Therefore, according to the present embodiment, compared with a configuration in which the waveform of the drive signal Com1 and the waveform of the drive signal Com2 are different, the control for ejecting the ink filled in the pressure chamber CB1 from the nozzle N and the control for ejecting the ink filled in the pressure chamber CB2 from the nozzle N can be simplified.

[0111] 2. Modification

[0112] Each of the above-exemplified modes can be variously modified. Below, specific modification modes will be exemplified. Two or more modes arbitrarily selected from the following examples can be appropriately combined within a range where they do not conflict with each other.

[0113] 2.1. First modification example

[0114] Although in the above-described embodiment, a mode in which the flow channel widths w1, w2, and w3 are all substantially equal has been exemplified, it is not limited to this mode. For example, the flow channel width w2 may be narrower than the flow channel width w1 and narrower than the flow channel width w3.

[0115] Figure 7 FIG. is a plan view magnifying the vicinity of the nozzle flow channel RN[i] according to the first modification example. In the liquid ejection head 1A according to the first modification example, except for the point that the connection plate 2 is replaced with the connection plate 2A, the rest is configured in the same manner as the liquid ejection head 1.

[0116] As Figure 7 shown, the nozzle flow channel RNA provided in the connection plate 2A has a first part U1A, a second part U2A, and a third part U3A. The second part U2A extends in the V3 direction. The V3 direction intersects the -X direction and is orthogonal to the -Z direction. The angle θ2 formed by the -X direction and the V3 direction is greater than 0 degrees and less than 90 degrees. The flow channel width w2A of the second part U2A is narrower than the flow channel width w1A of the first part U1A and narrower than the flow channel width w3A of the third part U3A.

[0117] As described above, in the liquid ejection head 1 according to the first modification example, the flow channel width w2A is narrower than the flow channel width w1A and narrower than the flow channel width w3A. Therefore, the flow velocity of the ink in the second part U2 is faster than the flow velocity of the ink in the first part U1 and faster than the flow velocity of the ink in the third part U3. Therefore, compared with the ink in the first part U1 and the ink in the third part U3, the ink in the second part U2 can cause the ink to flow before the thickening development of the ink, thereby preventing the occurrence of ejection abnormalities where the ink cannot be ejected from the nozzle N due to the thickening of the ink.

[0118] Moreover, since the channel width w2A is narrower than the channel width w1A and narrower than the channel width w3A, the partition wall in the second part U2 is thicker than the partition wall in the first part U1 and thicker than the partition wall in the third part U3. Therefore, the rigidity of the partition wall in the second part U2 is greater compared to the rigidity of the partition wall in the first part U1 and the rigidity of the partition wall in the third part U3. Although in the embodiment, by tilting only the second part U2 by an angle θ1 with respect to the first part U1 and the third part U3 to increase the partition wall strength to reduce the speed, structural crosstalk is reduced. However, in the first modification, as described above, since the channel width w2A is narrowed, the flow velocity in the second part U2 has increased compared to the embodiment. However, since the partition wall strength has been further improved compared to the embodiment, the generation of structural crosstalk can be reduced in the same manner as in the embodiment.

[0119] In addition, although in the first modification, the channel width w1A is the width of the first part U1A in the horizontal direction, the channel width w2A is the width of the second part U2A in the horizontal direction, and the channel width w3A is the width of the third part U3A in the horizontal direction, it is not limited thereto. For example, the channel width of the second part U2 in the -Z direction may also be narrower than the channel width of the first part U1 in the -Z direction and narrower than the channel width of the third part U3 in the -Z direction.

[0120] 2.2. Second modification

[0121] Although in the above-described embodiment and the first modification, an example in which the channel widths w1 and w3 are substantially equal to each other has been illustrated, it is not limited to this manner. For example, the channel width w3 may also be narrower than the channel width w1.

[0122] Figure 8 FIG. is an enlarged plan view of the vicinity of the nozzle channel RN[i] according to the second modification. In the liquid ejection head 1B according to the second modification, except for the fact that the connection plate 2 is replaced with a connection plate 2B, the rest is configured in the same manner as the liquid ejection head 1.

[0123] As Figure 8 shown, the nozzle channel RNB provided in the connection plate 2B has a first part U1B, a second part U2B, and a third part U3B. The second part U2B extends in the V4 direction. The V4 direction intersects the -X direction and is orthogonal to the -Z direction. The angle θ3 formed by the -X direction and the V4 direction is greater than 0 degrees and less than 90 degrees. The channel width w3B of the third part U3B is narrower than the channel width w1B of the first part U1B.

[0124] As described above, in the liquid ejection head 1B according to the second modification example, the flow channel width w3B is narrower than the flow channel width w1B. Since the flow channel width w3B is narrower than the flow channel width w1B, the flow velocity of the ink in the third portion U3B is greater than the flow velocity of the ink in the first portion U1B. Therefore, according to the liquid ejection head 1B according to the second modification example, compared with the case where the flow channel widths w3B and w1B are the same, the air bubbles in the ink can be discharged smoothly. In addition, since the partition wall of the third portion U3B can be thickened, structural crosstalk can be further suppressed.

[0125] In addition, in the second modification example, the flow channel width w3B may be narrower than the flow channel width w2B, may be the same as the flow channel width w2B, or may be wider than the flow channel width w2B.

[0126] 2.3. Third modification example

[0127] Although in the above-described embodiments, the first modification example, and the second modification example, it is illustrated that when viewed from the -X direction, the pressure chamber CB2 partially overlaps and the other part does not overlap with respect to the pressure chamber CB1, it is not limited to this manner. For example, when viewed from the -X direction, the pressure chamber CB2 may entirely overlap with respect to the pressure chamber CB1.

[0128] Figure 9 FIG. is a plan view of the vicinity of the pressure chamber CB1C[i] and the pressure chamber CB2C[i] according to the third modification example, which is enlarged. In the liquid ejection head 1C according to the third modification example, except that the pressure chamber substrate 3 is replaced with the pressure chamber substrate 3C and the communication plate 2 is replaced with the communication plate 2C, the rest is configured in the same manner as the liquid ejection head 1.

[0129] As Figure 9 shown, in the pressure chamber substrate 3C, M pressure chambers CB1C corresponding to the M nozzles N one by one, and M pressure chambers CB2C corresponding to the M nozzles N one by one are formed.

[0130] As Figure 9 illustrated, when viewed from the -X direction, the pressure chamber CB2C entirely overlaps with the pressure chamber CB1C. In the Figure 9 example, the X coordinate of the -Y side wall surface of the pressure chamber CB2C[i] is substantially the same as the X coordinate of the -Y side wall surface of the pressure chamber CB1C[i]. Moreover, the X coordinate of the +Y side wall surface of the pressure chamber CB2C[i] is substantially the same as the X coordinate of the +Y side wall surface of the pressure chamber CB1C[i].

[0131] In the connection plate 2C, there are formed M connection channels RK1C corresponding one-to-one to M nozzles N, M connection channels RK2C corresponding one-to-one to M nozzles N, M communication channels RR1C corresponding one-to-one to M nozzles N, M communication channels RR2C corresponding one-to-one to M nozzles N, and M nozzle channels RNC corresponding one-to-one to M nozzles N.

[0132] The nozzle channel RNC has the same shape as the nozzle channel RN. However, for the position of the nozzle channel RNC, in order to allow the ink to flow smoothly, when viewed from the Z-axis direction, the nozzle channel RNC is provided at a position where the entire opening of the communication channel RR1 in the -Z direction and the entire opening of the communication channel RR2 in the -Z direction overlap with the pressure chamber CB1C. In addition, when viewed from the Z-axis direction, the connection channel RK1C is provided at a position where the entire opening of the connection channel RK1C in the -Z direction overlaps with the pressure chamber CB1C. In addition, when viewed from the Z-axis direction, the connection channel RK2C is provided at a position where the entire opening of the connection channel RK2C in the -Z direction overlaps with the pressure chamber CB2C.

[0133] As described above, in the liquid ejector head 1C according to the third modification, when viewed from the -X direction, the pressure chamber CB2C completely overlaps with the pressure chamber CB1C. Therefore, since the X coordinates of the pressure chamber CB1C and the pressure chamber CB2C are substantially the same as each other, the liquid ejector head 1C can be manufactured more easily than in a manner where the pressure chamber CB2C does not overlap at least a part of the pressure chamber CB1C when viewed from the -X direction.

[0134] 2.4. Fourth Modification

[0135] Although in the above-described embodiments and the first to third modifications, the nozzle channel RN has the first part U1, the second part U2, and the third part U3, it is not limited thereto. For example, the nozzle channel RN may have only the first part U1 and the second part U2.

[0136] Figure 10 FIG. is a plan view of the vicinity of the nozzle channel RN[i] according to the fourth modification. In the liquid ejector head 1D according to the fourth modification, except that the connection plate 2 is replaced with a connection plate 2D, the rest is configured in the same manner as the liquid ejector head 1.

[0137] As Figure 10As shown, the nozzle flow path RND provided in the communication plate 2D has a first portion U1D and a second portion U2D. The first portion U1D extends in the -X direction and communicates with the communication flow path RR1. The second portion U2D extends in the V5 direction and communicates with the first portion U1 and the communication flow path RR2. The V5 direction intersects the -X direction and is orthogonal to the Z direction. The angle θ4 formed by the -X direction and the V5 direction is greater than 0 degrees and less than 90 degrees.

[0138] As described above, in the liquid ejection head 1B according to the fourth modification, the second portion U2D communicates with the communication flow path RR2. Even in the fourth modification, a shape such as a so-called truss structure is formed by the partition walls of the first portion U1 and the second portion U2. Therefore, the liquid ejection head 1 according to the present embodiment has a higher strength of the partition walls between the nozzle flow paths RN than the case where the angle θ4 formed by the -X direction and the V5 direction is 0 degrees, and thus the generation of structural crosstalk can be suppressed. Moreover, in the nozzle flow path RND, the direction in which the ink flows is changed once, whereas in the nozzle flow path RN, the direction in which the ink flows is changed twice. Therefore, according to the fourth modification, the ink can flow smoothly as compared with the embodiment.

[0139] In addition, although a system in which the first portion U1D communicating with the communication flow path RR1 extends in the -X direction and the second portion U2D communicating with the communication flow path RR2 extends in the V5 direction has been described here, the first portion U1D may extend in the V5 direction and the second portion U2D may extend in the -X direction.

[0140] 2.5. Fifth Modification

[0141] Although in the above-described embodiment and the first to fourth modifications, an example in which two piezoelectric elements PZq, i.e., the piezoelectric element PZ1 and the piezoelectric element PZ2, are provided corresponding to each nozzle N has been shown, the present invention is not limited to this manner. For example, one piezoelectric element PZ may be provided corresponding to each nozzle N.

[0142] Figure 11 FIG. is an exploded perspective view of the liquid ejection head 1E according to the fifth modification.

[0143] As Figure 11 shown, in the liquid ejection head 1E according to the fifth modification, it is different from the liquid ejection head 1 according to the embodiment in that the nozzle substrate 60E is provided instead of the nozzle substrate 60, the communication plate 2E is provided instead of the communication plate 2, the pressure chamber substrate 3E is provided instead of the pressure chamber substrate 3, and the diaphragm 4E is provided instead of the diaphragm 4.

[0144] Among them, the nozzle substrate 60E is different from the nozzle substrate 60 according to the embodiment in that the nozzle rows Ln1 and Ln2 are provided instead of the nozzle row Ln. Here, the nozzle row Ln1 is a set of M1 nozzles N arranged to extend in the Y-axis direction. In addition, the nozzle row Ln2 is a set of M2 nozzles N arranged to extend in the Y-axis direction at a position closer to the discharge flow path RA2 than the nozzle row Ln1. Here, the value M1 and the value M2 are natural numbers of 1 or more that satisfy "M1 + M2 = M". In addition, in this modified example, it is assumed that the value M is a natural number of 2 or more. In addition, hereinafter, there are cases where the nozzle N constituting the nozzle row Ln1 is referred to as the nozzle N1, and the nozzle N constituting the nozzle row Ln2 is referred to as the nozzle N2.

[0145] In addition, the connection plate 2E is different from the connection plate 2 according to the embodiment in that instead of the M connection channels RK1, the M connection channels RK2, the M communication channels RR1, and the M communication channels RR2, M1 connection channels RK1 corresponding one-to-one to the M1 nozzles N1, M2 connection channels RK2 corresponding one-to-one to the M2 nozzles N2, M1 communication channels RR1 corresponding one-to-one to the M1 nozzles N1, and M2 communication channels RR2 corresponding one-to-one to the M2 nozzles N2 are provided. In addition, the connection plate 2E is formed with a supply flow path RA1 extending in the Y-axis direction and a discharge flow path RA2 extending along the Y-axis direction in the -X direction when viewed from the supply flow path RA1, similarly to the connection plate 2.

[0146] In addition, the pressure chamber substrate 3E is different from the pressure chamber substrate 3 according to the embodiment in that instead of the M pressure chambers CB1 and the M pressure chambers CB2, M1 pressure chambers CB1 corresponding one-to-one to the M1 nozzles N1 and M2 pressure chambers CB2 corresponding one-to-one to the M2 nozzles N2 are formed.

[0147] In addition, the diaphragm 4E is different from the diaphragm 4 according to the embodiment in that instead of the M piezoelectric elements PZ1 and the M piezoelectric elements PZ2, M1 piezoelectric elements PZ1 corresponding one-to-one to the M1 nozzles N1 and M2 piezoelectric elements PZ2 corresponding one-to-one to the M2 nozzles N2 are formed.

[0148] Figure 12 is a plan view when observing the liquid ejection head 1E from the Z-axis direction.

[0149] In the fifth modification example, the liquid ejection head 1E has M circulation channels RJ that respectively correspond one-to-one to M nozzles N provided on the nozzle substrate 60E. Hereinafter, the circulation channel RJ provided corresponding to the nozzle N1 is referred to as the circulation channel RJ1, and the circulation channel RJ provided corresponding to the nozzle N2 is referred to as the circulation channel RJ2. That is, in the fifth modification example, the supply channel RA1 and the discharge channel RA2 are communicated through M1 circulation channels RJ1 and M2 circulation channels RJ2.

[0150] In addition, in the fifth modification example, in the Y-axis direction, the circulation channels RJ1 and the circulation channels RJ2 are alternately arranged. In addition, in the fifth modification example, M1 circulation channels RJ1 and M2 circulation channels RJ2 are arranged such that the interval in the Y-axis direction between adjacent circulation channels RJ1 and circulation channels RJ2 becomes the interval dY.

[0151] As described above, the circulation channel RJ1 has a pressure chamber CB1, and the circulation channel RJ2 has a pressure chamber CB2. In the fifth modification example, as Figure 12 shown, when viewed from the Z-axis direction, the pressure chamber CB1 is provided at a position closer to the supply channel RA1 than the nozzle N1. When viewed from the Z-axis direction, the pressure chamber CB2 is provided at a position closer to the discharge channel RA2 than the nozzle N2. And, as described above, the nozzle row Ln1 to which the nozzle N1 belongs is provided on the +X side compared to the nozzle row Ln2 to which the nozzle N2 belongs. Therefore, in the fifth modification example, the pressure chamber CB1 is located on the +X side compared to the pressure chamber CB2.

[0152] In addition, in the fifth modification example, the circulation channel RJ is provided such that the width in the Y-axis direction of the pressure chamber CBq becomes the width dCY, and the width of the portion other than the pressure chamber CBq becomes equal to or less than the width dRY. And, in the fifth modification example, as an example, it is assumed that M1 circulation channels RJ1 and M2 circulation channels RJ2 are arranged such that the interval dY and the width dCY satisfy "dCY > dY", and the interval dY and the width dRY satisfy "dRY > dY". In addition, although it is described in Figure 12 for simplicity and for easy understanding that the interval dY and the width dRY are in the manner of "dY > dRY", the interval dY and the width dRY may also be in the manner of "dRY > dY", or at least a part of the portion other than the pressure chamber CBq may be greater than the interval dY. Moreover, in the fifth modification example, it is assumed that in the -Y direction, the interval from the nozzle N1 to the nozzle N2 and the interval from the nozzle N2 to the nozzle N1 are substantially the same and are the width dY.

[0153] As usedFigure 13 as well as Figure 14 As described, in the fifth modification, there is almost no overlapping portion in the Z-axis direction at each position in the X-axis direction between the adjacent circulation channels RJ1 and the circulation channels RJ2 in the Y-axis direction. Therefore, there is almost no structural crosstalk between the circulation channels RJ1 and the circulation channels RJ2, so it is only necessary to consider the structural crosstalk between the two circulation channels RJ1 sandwiching the circulation channels RJ2 and between the two circulation channels RJ2 sandwiching the circulation channels RJ1. Therefore, compared with the method in which the pressure chambers CB1 and CB2 are arranged at the same position in the X-axis direction, the spacing of the circulation channels RJ can be narrowed. In addition, according to the fifth modification, after narrowing the spacing of the circulation channels RJ, the channel resistance can also be reduced. Moreover, according to the fifth modification, by increasing the width dCY of the pressure chambers CB1 and CB2 in the Y-axis direction after narrowing the spacing of the circulation channels RJ, the volume of the pressure chambers CB1 and CB2 can also be ensured.

[0154] Furthermore, in the fifth variation, the circulation channel RJ1 has a nozzle channel RNE1. The nozzle channel RNE1 has a first portion U1E1, a second portion U2E1, and a third portion U3E1. The first portion U1E1 extends in the -X direction and is connected to the connecting channel RR1. The second portion U2E1 extends in the V6 direction and is connected to the first portion U1E1. The V6 direction intersects the -X direction and is orthogonal to the -Z direction. The angle θ5 formed by the -X direction and the V6 direction is greater than 0 degrees and less than 90 degrees. The second portion U2E1 is connected to the nozzle N1. The third portion U3E1 extends in the -X direction and is connected to the second portion U2E1 and the channel R11. The channel R11 will utilize Figure 13 This will be described later in the text.

[0155] In addition, the circulation channel RJ2 has a nozzle channel RNE2. The nozzle channel RNE2 has a first portion U1E2, a second portion U2E2, and a third portion U3E2. The first portion U1E2 extends in the -X direction and communicates with the connecting channel RR2. The second portion U2E2 extends in the V6 direction and communicates with the first portion U1E2. The second portion U2E2 communicates with the nozzle N2. The third portion U3E2 extends in the -X direction and communicates with the second portion U2E2 and the channel R21. The channel R21 will utilize Figure 14 This will be described later. The X coordinate of the center of the nozzle flow channel RNE1 and the X coordinate of the center of the nozzle flow channel RNE2 are different from each other.

[0156] Figure 13 2 is a cross-sectional view obtained by cutting the liquid ejection head 1E in parallel with the XZ plane in a manner passing through the circulation flow path RJ1. Figure 14FIG. 0 is a cross-sectional view obtained by slicing the liquid ejection head 1E in a manner parallel to the XZ plane so as to pass through the circulation flow path RJ2.

[0157] As Figure 13 and Figure 14 shown, in the fifth modification, the communication plate 2E includes a substrate 21 and a substrate 22. Here, the substrate 21 and the substrate 22 are manufactured, for example, by processing a single crystal substrate of silicon using semiconductor manufacturing techniques such as etching. However, known materials and manufacturing methods can be arbitrarily adopted in the manufacture of the substrate 21 and the substrate 22.

[0158] As Figure 13 shown, in the fifth modification, the circulation flow path RJ1 has: a connection flow path RX1, a connection flow path RK1, a pressure chamber CB1, a communication flow path RR1, a nozzle flow path RNE1, a flow path R11, a flow path R12, a flow path R13, a flow path R14, a flow path R15, and a connection flow path RX2. The connection flow path RX1 communicates with the supply flow path RA1 and is formed in the substrate 21 and the substrate 22. The connection flow path RK1 communicates with the connection flow path RX1 and is formed in the substrate 21 and the substrate 22. The pressure chamber CB1 communicates with the connection flow path RK1 and is formed in the pressure chamber substrate 3E. The communication flow path RR1 communicates with the pressure chamber CB1 and is formed in the substrate 21 and the substrate 22. The nozzle flow path RNE1 communicates with the communication flow path RR1 and the nozzle N1 and is formed in the substrate 21. The flow path R11 communicates with the nozzle flow path RNE1 and is formed in the substrate 22. The flow path R12 communicates with the flow path R11 and is formed in the substrate 21. The flow path R13 communicates with the flow path R12 and is formed in the nozzle substrate 60E. The flow path R14 communicates with the flow path R13 and is formed in the substrate 21. The flow path R15 communicates with the flow path R14 and is formed in the substrate 22. The connection flow path RX2 communicates the flow path R15 and the discharge flow path RA2 and is formed in the substrate 21 and the substrate 22.

[0159] In addition, as Figure 14As shown in the figure, in the fifth modification example, the circulation flow path RJ2 includes: a connection flow path RX2, a connection flow path RK2, a pressure chamber CB2, a communication flow path RR2, a nozzle flow path RNE2, a flow path R21, a flow path R22, a flow path R23, a flow path R24, a flow path R25, and a connection flow path RX1. The connection flow path RX2 communicates with the discharge flow path RA2 and is formed in the substrates 21 and 22. The connection flow path RK2 communicates with the connection flow path RX2 and is formed in the substrates 21 and 22. The pressure chamber CB2 communicates with the connection flow path RK2 and is formed in the pressure chamber substrate 3E. The communication flow path RR2 communicates with the pressure chamber CB2 and is formed in the substrates 21 and 22. The nozzle flow path RNE2 communicates with the communication flow path RR2 and the nozzle N2 and is formed in the substrate 21. The flow path R21 communicates with the nozzle flow path RNE2 and is formed in the substrate 22. The flow path R22 communicates with the flow path R21 and is formed in the substrate 21. The flow path R23 communicates with the flow path R22 and is formed in the nozzle substrate 60E. The flow path R24 communicates with the flow path R23 and is formed in the substrate 21. The flow path R25 communicates with the flow path R24 and is formed in the substrate 22. The connection flow path RX1 connects the flow path R25 and the supply flow path RA1 and is formed in the substrates 21 and 22.

[0160] According to the fifth modification example, the partition wall of the second part U2E1 is inclined only by the angle θ5 with respect to the partition wall of the first part U1E1. In addition, the partition wall of the second part U2E1 is also inclined only by the angle θ5 with respect to the partition wall of the third part U3E1. In addition, the partition wall of the second part U2F2 is inclined only by the angle θ5 with respect to the partition wall of the first part U1E2. In addition, the partition wall of the second part U2E2 is also inclined only by the angle θ5 with respect to the partition wall of the third part U3E2. Therefore, according to the fifth modification example, compared with the case where the angle θ5 formed by the -X direction and the V6 direction is 0 degrees, the partition wall strength can be increased and the speed of the ink can be reduced. As a result, the generation of structural crosstalk can be suppressed.

[0161] 2.6. Sixth Modification Example

[0162] Although in the above fifth modification example, the X coordinate at the center of the nozzle flow path RNE1 and the X coordinate at the center of the nozzle flow path RNE2 are different from each other, they may also be the same.

[0163] Figure 15 FIG. is an exploded perspective view of the liquid ejection head 1F according to the sixth modification example.

[0164] As Figure 15As shown, the liquid ejection head 1F according to the sixth modification is different from the liquid ejection head 1E according to the fifth modification in that the nozzle substrate 60E is replaced with the nozzle substrate 60F and the communication plate 2E is replaced with the communication plate 2F.

[0165] The nozzle substrate 60F is different from the nozzle substrate 60E according to the fifth modification in that, in the -Y direction, the interval from the nozzle N1 to the nozzle N2 and the interval from the nozzle N2 to the nozzle N1 are different.

[0166] In addition, the communication plate 2F is different from the communication plate 2E according to the fifth modification in that the shape of the nozzle flow path RNF1 provided on the communication plate 2F is different from the shape of the nozzle flow path RNE1 provided on the communication plate 2E according to the fifth modification, and the shape of the nozzle flow path RNF2 provided on the communication plate 2F is different from the shape of the nozzle flow path RNE2 provided on the communication plate 2E according to the fifth modification.

[0167] Figure 16 is a plan view when observing the liquid ejection head 1F from the Z-axis direction.

[0168] In the sixth modification, similarly to the fifth modification, the circulation flow path RJ is provided so that the width in the Y-axis direction of the pressure chamber CBq becomes the width dCY, and the width of the portion other than the pressure chamber CBq becomes equal to or less than the width dRY. In the sixth modification, as an example, it is assumed that M1 circulation flow paths RJ1 and M2 circulation flow paths RJ2 are provided such that the interval dY and the width dCY satisfy "dCY > dY", and the interval dY and the width dRY satisfy "dRY > dY". In addition, although Figure 16 it is described in a way that dY > dRY for simplicity and ease of understanding, actually dRY > dY is also possible, and at least a part of the portion other than the pressure chamber CBq is larger than the interval dY. Moreover, in the sixth modification, in the -Y direction, the interval d1Y from the nozzle N1 to the nozzle N2 and the interval d2Y from the nozzle N2 to the nozzle N1 are different from each other.

[0169] Even in the sixth modification, similar to the fifth modification, between the circulation channels RJ1 and RJ2 adjacent in the Y-axis direction, there is almost no overlapping portion in the Z-axis direction at each position in the X-axis direction. Therefore, almost no structural crosstalk occurs between the circulation channels RJ1 and RJ2, and thus it is only necessary to consider the structural crosstalk between two circulation channels RJ1 sandwiching the circulation channel RJ2, or between two circulation channels RJ2 sandwiching the circulation channel RJ1. Therefore, compared with the manner in which the pressure chambers CB1 and CB2 are provided at the same position in the X-axis direction, the pitch of the circulation channels RJ can be narrowed. Moreover, according to the sixth modification, after narrowing the pitch of the circulation channels RJ, the flow channel resistance and the like can also be reduced. Further, according to the sixth modification, by increasing the widths dCY in the Y-axis direction of the pressure chambers CB1 and CB2 after narrowing the pitch of the circulation channels RJ, the volumes of the pressure chambers CB1 and CB2 can also be ensured.

[0170] Moreover, in the sixth modification, the circulation channel RJ1 has a nozzle channel RNF1. The nozzle channel RNF1 has a first portion U1F1, a second portion U2F1, and a third portion U3F1. The first portion U1F1 extends in the -X direction and communicates with the communication channel RR1. The first portion U1F1 communicates with the nozzle N1. The second portion U2F1 extends in the V7 direction and communicates with the first portion U1F1. The V7 direction intersects the -X direction and is orthogonal to the -Z direction. The angle θ6 formed by the -X direction and the V7 direction is greater than 0 degree and less than 90 degrees. The third portion U3F1 extends in the -X direction and communicates with the second portion U2F1 and the channel R11.

[0171] In addition, the circulation channel RJ2 has a nozzle channel RNF2. The nozzle channel RNF2 has a first portion U1F2, a second portion U2F2, and a third portion U3F2. The first portion U1F2 extends in the -X direction and communicates with the communication channel RR2. The second portion U2F2 extends in the V6 direction and communicates with the first portion U1F2. The second portion U2F2 communicates with the nozzle N2. The third portion U3F2 extends in the -X direction and communicates with the second portion U2F2 and the channel R21. The X coordinate at the center of the nozzle channel RNF1 and the X coordinate at the center of the nozzle channel RNF2 are substantially the same as each other.

[0172] According to the sixth modification example, the partition wall of the second part U2F1 is inclined only by the angle θ6 with respect to the partition wall of the first part U1F1. Further, the partition wall of the second part U2F1 is inclined only by the angle θ6 with respect to the partition wall of the third part U3F1. Further, the partition wall of the second part U2F2 is inclined only by the angle θ6 with respect to the partition wall of the first part U1E2. Further, the partition wall of the second part U2F2 is also inclined only by the angle θ6 with respect to the partition wall of the third part U3F2. Therefore, according to the sixth modification example, compared with the case where the angle θ6 formed with the -X direction and the V7 direction is 0 degrees, the partition wall strength can be increased and the speed of the ink can be decreased. As a result, the generation of structural crosstalk can be suppressed.

[0173] Furthermore, in the sixth modification example, since the X coordinate at the center of the nozzle flow path RNF1 is substantially equal to the X coordinate at the center of the nozzle flow path RNF2, the thickness of the partition wall between the nozzle flow path RNF1 and the nozzle flow path RNF2 can be made substantially constant. On the other hand, in the fifth modification example, since the X coordinate at the center of the nozzle flow path RNF1 is different from the X coordinate at the center of the nozzle flow path RNF2, the thickness of the partition wall between the nozzle flow path RNF1 and the nozzle flow path RNF2 is not constant, and thus, as Figure 12 illustrated by the thickness dmY, there is a portion where the thickness is thinner than other portions. The portion with a thinner thickness has less rigidity than other portions, and thus structural crosstalk is likely to occur. In the sixth modification example, since a portion where the thickness is thinner than other portions is less likely to be generated, the generation of structural crosstalk can be suppressed compared with the fifth modification example.

[0174] 2.7. Seventh Modification Example

[0175] Although in the above-described first embodiment and the first to fourth modification examples, the ink filled in the pressure chamber CB1 and the ink filled in the pressure chamber CB2 are ejected from the nozzle N, it is also possible to eject only the ink filled in one pressure chamber CBq from the nozzle N.

[0176] Figure 17 FIG. is an exploded perspective view of the liquid ejection head 1G according to the seventh modification example.

[0177] As Figure 17 shown, the liquid ejection head 1G according to the seventh modification example differs from the liquid ejection head 1 according to the embodiment in that it includes a communication plate 2G instead of the communication plate 2, a pressure chamber substrate 3G instead of the pressure chamber substrate 3, and a diaphragm 4G instead of the diaphragm 4.

[0178] The communicating plate 2G is different from the communicating plate 2 according to the embodiment in that it does not include the M connecting flow passages RK1 , the M connecting flow passages RK2 , the M communicating flow passages RR1 , and the M communicating flow passages RR2 .

[0179] However, the pressure chamber substrate 3G is different from the pressure chamber substrate 3 according to the embodiment in that it does not include the M pressure chambers CB1 and the M pressure chambers CB2 .

[0180] Furthermore, the vibration plate 4G is different from the vibration plate 4 according to the embodiment in that it does not include the M piezoelectric elements PZ1 and the M piezoelectric elements PZ2 .

[0181] The connecting plate 2G is formed with one supply flow path RA1, one discharge flow path RA2, M connection flow paths RK1, and M communication flow paths RR1. The flow path of ink connecting the supply flow path RA1 and the discharge flow path RA2 in the seventh modification is called a circulation flow path RJG.

[0182] Figure 18 2 is a cross-sectional view obtained by cutting the liquid ejecting head 1G in parallel with the XZ plane so as to pass through the circulation flow path RJG.

[0183] like Figure 18 As shown, in the seventh modification, the connecting plate 2G includes a substrate 21 and a substrate 22. Here, the substrate 21 and the substrate 22 are manufactured by processing a single crystal substrate of silicon using semiconductor manufacturing technology such as etching. However, any known material and manufacturing method can be used in the manufacture of the substrate 21 and the substrate 22.

[0184] like Figure 18As shown, in the seventh modification, the circulation flow path RJG includes: a connection flow path RX1, a connection flow path RK1, a pressure chamber CB1, a communication flow path RR1, a nozzle flow path RNG, a flow path R11, a flow path R12, a flow path R13, a flow path R14, a flow path R15, and a connection flow path RX2. The connection flow path RX1 communicates with the supply flow path RA1 and is formed in the substrates 21 and 22. The connection flow path RK1 communicates with the connection flow path RX1 and is formed in the substrates 21 and 22. The pressure chamber CB1 communicates with the connection flow path RK1 and is formed in the pressure chamber substrate 3. The communication flow path RR1 communicates with the pressure chamber CB1 and is formed in the substrates 21 and 22. The nozzle flow path RNG communicates with the communication flow path RR1 and the nozzle N and is formed in the substrate 21. The flow path R11 communicates with the nozzle flow path RNG and is formed in the substrate 22. The flow path R12 communicates with the flow path R11 and is formed in the substrate 21. The flow path R13 communicates with the flow path R12 and is formed in the nozzle substrate 60G. The flow path R14 communicates with the flow path R13 and is formed in the substrate 21. The flow path R15 communicates with the flow path R14 and is formed in the substrate 22. The connection flow path RX2 connects the flow path R15 and the discharge flow path RA2 and is formed in the substrates 21 and 22.

[0185] Figure 19 is a plan view showing an enlarged view of the vicinity of the nozzle flow path RNG[i].

[0186] The nozzle flow path RNG has a first portion U1G, a second portion U2G, and a third portion U3G. The first portion U1G extends in the -X direction and communicates with the communication flow path RR1. The second portion U2G extends in the V8 direction and communicates with the first portion U1G. The V8 direction intersects the -X direction and is orthogonal to the -Z direction. The angle θ7 formed by the -X direction and the V8 direction is greater than 0 degrees and less than 90 degrees. The second portion U2G communicates with the nozzle N. The third portion U3G extends in the -X direction and communicates with the second portion U2G and the flow path R11.

[0187] Even in the seventh modification, the partition wall of the second portion U2G is inclined only by the angle θ7 with respect to the partition wall of the first portion U1G. In addition, the partition wall of the second portion U2G is inclined only by the angle θ7 with respect to the partition wall of the third portion U3G. Therefore, according to the seventh modification, compared with the case where the angle θ7 formed by the -X direction and the V8 direction is 0 degrees, the strength of the partition walls between the nozzle flow paths RNG can be increased, thereby suppressing the generation of structural crosstalk.

[0188] In addition, in the seventh modification example, the circulation flow path RJG may also have a connection flow path RX1, a connection flow path RK1, a pressure chamber CB1, a communication flow path RR1, a nozzle flow path RNG, a flow path R11, and a connection flow path RX2, and does not have a flow path R12, a flow path R13, a flow path R14, and a flow path R15. The connection flow path RX2 connects the flow path R11 and the discharge flow path RA2.

[0189] 2.8. Eighth modification example

[0190] Although in the above-described embodiments and the first to seventh modification examples, the serial liquid ejecting device 100 that reciprocally moves the jointless tape 922 on which the liquid ejecting heads 1, 1A, 1B, 1C, 1D, 1E, 1F, or 1G are mounted in the Y-axis direction has been illustrated, the present invention is not limited to such a manner. The liquid ejecting device may also be a line-type liquid ejecting device in which a plurality of nozzles N are distributed across the entire width of the medium PP.

[0191] Figure 20 FIG. is a diagram showing an example of the structure of the liquid ejecting device 100H according to the eighth modification example. The liquid ejecting device 100H is different from the liquid ejecting device 100 according to the embodiment in that it includes a control device 90H instead of the control device 90, includes a housing 921H instead of the housing 921, and does not include the jointless tape 922. The control device 90H is different from the control device 90 in that it does not output a signal for controlling the jointless tape 922. The housing 921H is provided such that a plurality of liquid ejecting heads 1 with the Y-axis direction as the long side direction are distributed across the entire width of the medium PP. In addition, in the housing 921H, the liquid ejecting head 1A, 1B, 1C, 1D, 1E, 1F, or 1G may be mounted instead of the liquid ejecting head 1.

[0192] 2.9. Ninth modification example

[0193] Although in the above-described embodiments and the first to eighth modification examples, the piezoelectric element PZ that converts electric energy into kinetic energy has been illustrated as the energy conversion element that applies pressure to the inside of the pressure chamber CB, the present invention is not limited to such a manner. As the energy conversion element that applies pressure to the inside of the pressure chamber CB, for example, a heating element that converts electric energy into heat energy and generates bubbles inside the pressure chamber CB by heating to change the pressure inside the pressure chamber CB may also be used. The heating element may be, for example, an element that causes a heating body to generate heat by supplying a drive signal Com.

[0194] 2.10. Tenth Modified Example

[0195] Although the nozzle flow path RN illustrated in the above-described embodiments, the first to third modified examples, and the fifth to seventh modified examples has the first part U1, the second part U2, and the third part U3, it is not limited thereto, and one or more parts may be provided in addition to the first part U1, the second part U2, and the third part U3. For example, the nozzle flow path RN in the tenth modified example has the first part U1, the second part U2, the third part U3, and the fourth part. The first part U1 extends in the -X direction and communicates with the communication flow path RR1. The second part U2 extends in the V1 direction and communicates with the first part U1. The third part U3 extends in the direction obtained by rotating the -X direction counterclockwise by an angle θ1 when viewed from the -Z direction, and communicates with the second part U2. The fourth part extends in the -X direction and communicates with the third part U3 and the communication flow path RR2. The nozzle N may be provided in the second part U2 or the third part U3.

[0196] 2.11. Eleventh Modified Example

[0197] Although the nozzle N is connected to the second part U2 of the nozzle flow path RN illustrated in the above-described embodiments, the first to fifth modified examples, and the seventh modified example, the nozzle N may be connected to the first part U1 or the third part U3.

[0198] 2.12. Twelfth Modified Example

[0199] Although the waveforms of the drive signals Com1 and Com2 are substantially the same in the above-described embodiments and the first to fourth modified examples, they may be different.

[0200] 2.13. Thirteenth Modified Example

[0201] In addition to the equipment dedicated to printing, the liquid ejection device illustrated in the above-described embodiments and the first to ninth modified examples can also be used in various devices such as facsimile machines and copying machines. Obviously, the use of the liquid ejection device of the present invention is not limited to printing. For example, a liquid ejection device that ejects a solution of a color material can be used as a manufacturing device for forming a color filter of a liquid crystal display device. In addition, a liquid ejection device that ejects a solution of a conductive material can be used as a manufacturing device for forming wirings and electrodes of a wiring board.

[0202] Reference Signs

[0203] 1...Liquid ejection head; 2...Communication board; 3...Pressure chamber substrate; 4...Vibration plate; 5...Reservoir chamber forming substrate; 8...Wiring substrate; 60...Nozzle substrate; 100...Liquid ejection device; CB1...Pressure chamber; CB2...Pressure chamber; N...Nozzle; PZ1...Piezoelectric element; PZ2...Piezoelectric element; RA1...Supply flow path; RA2...Discharge flow path; RR1...Communication flow path; RR2...Communication flow path; U1...First part; U2...Second part; U3...Third part.

Claims

1. A liquid ejection head, characterized in that, Comprising: A first pressure chamber that extends in a first direction and applies pressure to a liquid; A second pressure chamber that extends in the first direction and applies pressure to a liquid; A nozzle flow path that communicates with a nozzle for ejecting a liquid; A first communication flow path that extends in a second direction orthogonal to the first direction and communicates the first pressure chamber and the nozzle flow path; A second communication flow path that extends in the second direction and communicates the second pressure chamber and the nozzle flow path, The nozzle flow path has: A first portion that extends in the first direction and communicates with the first communication flow path; A second portion that extends in a third direction that intersects the first direction and is orthogonal to the second direction and communicates with the first portion, The angle formed by the first direction and the third direction is greater than 0 degrees and less than 90 degrees.

2. The liquid ejection head according to claim 1, wherein The nozzle flow path further has a third portion that extends in the first direction and communicates the second portion and the second communication flow path.

3. The liquid ejection head according to claim 2, wherein The flow path width of the second portion is narrower than the flow path width of the first portion and narrower than the flow path width of the third portion.

4. The liquid ejection head according to claim 2 or 3, wherein The flow path length of the second portion is shorter than the flow path length of the first portion and shorter than the flow path length of the third portion.

5. The liquid ejection head according to claim 2, wherein The flow path lengths of the first portion and the third portion are substantially equal to each other.

6. The liquid ejection head according to claim 1, wherein The angle of the third direction with respect to the first direction is greater than 10 degrees and less than 50 degrees.

7. The liquid ejection head according to claim 1, wherein When viewed from the first direction, the second communication flow path partially overlaps and partially does not overlap with respect to the first communication flow path.

8. The liquid ejection head according to claim 1, wherein When viewed from the first direction, the second pressure chamber partially overlaps and partially does not overlap with respect to the first pressure chamber.

9. The liquid ejection head according to claim 1, wherein When viewed from the first direction, the second pressure chamber completely overlaps with respect to the first pressure chamber.

10. The liquid ejection head according to claim 1, wherein The nozzle is provided in the second portion.

11. The liquid ejection head according to claim 1, wherein The second portion communicates with the second communication flow path.

12. The liquid ejection head according to claim 1, wherein, Further comprising: A supply flow path that communicates with the second pressure chamber and supplies liquid to the second pressure chamber; A discharge flow path that communicates with the first pressure chamber and discharges liquid from the first pressure chamber.

13. The liquid ejection head according to claim 1, wherein Further comprising: A supply flow path that communicates with the first pressure chamber and supplies liquid to the first pressure chamber; A discharge flow path that communicates with the second pressure chamber and discharges liquid from the second pressure chamber.

14. The liquid ejection head according to claim 1, wherein It further includes: A pressure chamber substrate on which the first pressure chamber and the second pressure chamber are provided; A communication plate on which the nozzle flow path, the first communication flow path, and the second communication flow path are provided; A nozzle substrate on which the nozzle is provided.

15. The liquid ejection head according to claim 1, wherein It further includes: A first element that applies pressure to the liquid in the first pressure chamber according to the supply of a first drive signal; A second element that applies pressure to the liquid in the second pressure chamber according to the supply of a second drive signal.

16. The liquid ejection head according to claim 15, wherein The waveforms of the first drive signal and the second drive signal are substantially the same.

17. A liquid ejection device, characterized in that, It includes: A first pressure chamber that extends in a first direction and applies pressure to the liquid; A second pressure chamber that extends in the first direction and applies pressure to the liquid; A nozzle flow path that communicates with a nozzle for ejecting the liquid; A first communication flow path that extends in a second direction orthogonal to the first direction and communicates the first pressure chamber and the nozzle flow path; A second communication flow path that extends in the second direction and communicates the second pressure chamber and the nozzle flow path, The nozzle flow path has: A first portion that extends in the first direction and communicates with the first communication flow path; A second portion that extends in a third direction that intersects the first direction and is orthogonal to the second direction and communicates with the first portion, The angle formed by the first direction and the third direction is greater than 0 degrees and less than 90 degrees.

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