Handling system, handling method and handling device

Abstract

The transport system includes a transport chamber with multiple processing chambers located on its side walls for handling substrates under reduced pressure. The transport chamber transports substrates under reduced pressure. The transport chamber includes: multiple robots fixed inside the transport chamber for transporting substrates; and a movable buffer. The movable buffer holds the substrate and moves horizontally along the side wall between the side wall and the robots. The robots cooperate with the movement of the movable buffer to transfer substrates between the movable buffer and the processing chambers.

Description

Technical Field

[0001] The disclosed embodiments relate to a transport system, a transport method, and a transport device. Background Technology

[0002] Previously, a transport system was known in which a robot with a hand that holds a substrate is disposed in a transport chamber with a depressurized atmosphere, and the substrate is transported to a processing chamber provided on the side wall of the transport chamber.

[0003] For example, a substrate processing apparatus has been proposed that uses a mobile robot to transport substrates to multiple processing chambers disposed on the side wall of a transport chamber, wherein the mobile robot moves within the transport chamber by being driven by a linear motor (see, for example, Patent Document 1).

[0004] Prior art literature

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2008-028179 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] However, in the aforementioned prior art, there are concerns about increased costs due to making the robot mobile, and reduced usability due to the increased complexity of the mobile mechanism. When usability is reduced, the result is a decrease in the efficiency of substrate handling. Therefore, from the viewpoint of improving the handling efficiency of substrates before and after processing, there is room for improvement.

[0009] One embodiment aims to provide a handling system, handling method, and handling device that can improve the handling efficiency of substrates.

[0010] Means for solving technical problems

[0011] One aspect of the embodiment includes a transport system comprising a transport chamber with multiple processing chambers disposed on its sidewalls for processing substrates under a reduced-pressure atmosphere. The transport chamber transports the substrates under reduced-pressure atmosphere. The transport chamber includes: multiple robots fixed inside the transport chamber for transporting the substrates; and a movable buffer. The movable buffer holds the substrate and moves horizontally along the sidewall between itself and the robots. The robots cooperate with the movement of the movable buffer to transfer the substrates between the movable buffer and the processing chambers.

[0012] One aspect of the embodiment describes a transport method using a transport chamber with multiple processing chambers on its sidewalls for handling substrates under a reduced-pressure atmosphere. The transport chamber includes: multiple robots fixed inside the transport chamber for transporting the substrates; and a movable buffer. The movable buffer holds the substrate and moves horizontally along the sidewall between the sidewall and the robots. Furthermore, one aspect of the embodiment describes a transport method that facilitates the transfer of substrates between the movable buffer and the processing chamber by coordinating the movement of the robots and the movable buffer.

[0013] One aspect of the embodiment describes a transport apparatus comprising multiple robots, a movable buffer, and a controller. The robots are fixed within a transport chamber to transport a substrate. Multiple processing chambers, where the substrate is processed under a reduced-pressure atmosphere, are located on the side walls of the transport chamber. The movable buffer holds the substrate and moves horizontally along the side walls within the transport chamber, between itself and the robots. The controller coordinates the movement of the robots and the movable buffer to facilitate the transfer of the substrate between the movable buffer and the processing chambers.

[0014] Invention Effects

[0015] According to one aspect of the embodiments, a handling system, handling method, and handling apparatus that can improve the handling efficiency of substrates can be provided. Attached Figure Description

[0016] Figure 1 This is a top view schematic diagram showing an outline of the conveying system according to an embodiment.

[0017] Figure 2A This is a top view schematic diagram illustrating one of the configuration examples of a loading and locking chamber.

[0018] Figure 2B This is a top view schematic diagram showing a second example of a configuration for loading and locking chambers.

[0019] Figure 3 This is a top view schematic diagram of the transport system according to the implementation method.

[0020] Figure 4 This is a side view of the robot and the mobile buffer.

[0021] Figure 5A This is a top view diagram illustrating one example of a robot's structure.

[0022] Figure 5B This is a top view diagram illustrating the structure of a robot, example two.

[0023] Figure 5C This is a top view diagram illustrating the third example of a robot's structure.

[0024] Figure 5D This is a top view diagram illustrating the fourth example of a robot's structure.

[0025] Figure 5E This is a top view diagram illustrating the fifth example of a robot's structure.

[0026] Figure 6 This is a top view schematic diagram of a transport system, one of the variations.

[0027] Figure 7 This is a top view of the transport system in the second variation.

[0028] Figure 8 This is a top view of the transport system in the third variation.

[0029] Figure 9 This is a top view of the transport system in the fourth variation.

[0030] Figure 10 This is a diagram illustrating a variation of a robot and a movable buffer.

[0031] Figure 11 It is a block diagram representing the structure of the transport device.

[0032] Figure 12 It is a flowchart showing the processing sequence performed by the conveying device.

[0033] Figure 13A This is a three-dimensional diagram of a multi-layered movable buffer.

[0034] Figure 13B It is a 3D diagram of the movable buffer and the track.

[0035] Figure 14A This is a top-down view of the transport room.

[0036] Figure 14B This is a 3D schematic diagram of the transport room.

[0037] Figure 15 This is a diagram illustrating a variation of a multi-layered movable buffer. Detailed Implementation

[0038] The embodiments of the transport system, transport method, and transport device disclosed in this application will now be described in detail with reference to the accompanying drawings. However, this invention is not limited to the embodiments shown below.

[0039] Furthermore, in the embodiments shown below, expressions such as "orthogonal," "horizontal," "vertical," "parallel," or "symmetrical" are used, but these states do not need to be strictly satisfied. That is, the above expressions allow for deviations in manufacturing accuracy, setting accuracy, processing accuracy, inspection accuracy, etc.

[0040] First, use Figure 1 An overview of the transport system 1 of the embodiments will be described. Figure 1 This is a top view schematic diagram showing the outline of the conveying system 1 according to the embodiment. Additionally, Figure 1 This is equivalent to a schematic diagram of the transport system 1 viewed from above.

[0041] In addition, Figure 1 To facilitate understanding, a three-dimensional Cartesian coordinate system is shown, with the Z-axis pointing vertically upwards, the X-axis along the direction of the side wall 100sw of the transport chamber 100, which has multiple processing chambers PC, and the Y-axis along the normal direction of the side wall 100sw. This Cartesian coordinate system is sometimes also shown in other figures used in the following description. Additionally, in Figure 1 The diagram shows line CL, which corresponds to the front side of the processing chamber PC. Line CL corresponds to the line in the normal of the sidewall 100sw that passes through the center of the substrate W (refer to the circle in the dashed line) in the processing chamber PC. Figure 1 The middle line is along the Y-axis.

[0042] like Figure 1 As shown, multiple processing chambers PC are provided on the side wall 100sw outside the transport chamber 100 for processing the substrate W under reduced pressure atmosphere. The processing performed on the substrate W in the processing chambers PC includes film deposition processes such as CVD (Chemical Vapor Deposition) and etching processes. Furthermore, the reduced pressure atmosphere environment is sometimes referred to as a "vacuum". Figure 1 The edges of the double lines in the processing chamber PC shown correspond to the openings that can be opened and closed.

[0043] Similar to the processing chamber PC, the transfer chamber 100 has a depressurized atmosphere and houses multiple robots 10 and mobile buffers 110, which work together to transfer the substrate W. The robot 10 is a substrate transfer mechanism that moves the substrate W into or out of the processing chamber PC; for example, it is a horizontal articulated robot (SCARA robot).

[0044] Here, robot 10 is fixed to the floor 100f of the transport chamber 100 (see reference). Figure 4This is a "fixed robot" (e.g., a robot that moves or travels within the transport chamber 100), unlike a "mobile robot" (e.g., a robot that moves within the transport chamber 100). Because the robot does not move within the transport chamber 100, it is easier to power the robot and this contributes to the cleanliness of the transport chamber 100.

[0045] The movable buffer 110 is a buffer that temporarily holds the substrate W and moves horizontally in the direction D1 along the sidewall 100sw between the sidewall 100sw and the robot 10. For example, the movable buffer 110 is non-contact driven by a linear motor or the like. Furthermore, in Figure 1 In the diagram, the movement path ML of the movable buffer 110 is shown for reference. Here, Figure 1 The side wall 100sw shown is straight when viewed from above, so the horizontal direction D1 and the movement path ML are straight. However, if the side wall 100sw is curved when viewed from above, the horizontal direction D1 and the movement path ML can also be curves along the side wall 100sw.

[0046] Robot 10 performs the transfer of substrate W between the movable buffer 110 and the processing chamber PC by cooperating with the movement of the movable buffer 110. Specifically, when robot 10 places substrate W into the processing chamber PC, the movable buffer 110, holding the substrate W before processing, moves toward the vicinity of robot 10. Robot 10 retrieves the substrate W before processing from the movable buffer 110 and places the retrieved substrate W before processing into the processing chamber PC.

[0047] Furthermore, when robot 10 removes substrate W from processing chamber PC, empty (without holding substrate W) movable buffer 110 moves toward the vicinity of robot 10. Robot 10 removes the processed substrate W from processing chamber PC and hands the removed processed substrate W to movable buffer 110.

[0048] In addition, such as Figure 1 As shown, when multiple robots 10 are respectively arranged on the front of the processing chamber PC, the preferred movable buffer 110 can also stop on the front of the processing chamber PC (see reference). Figure 1 (The dashed line indicates the movable buffer 110). This minimizes the movement distance of the substrate W when the robot 10 places and retrieves it relative to the processing chamber PC, thus improving handling efficiency. Furthermore, since the robot 10's movements are simplified, its structure can also be simplified, achieving cost reduction.

[0049] In this way, by forming the buffer as a movable movable buffer 110, compared to forming the robot 10 as a movable type, the moving object can be made lighter and the moving mechanism can be simplified. As a result, the operating rate of the moving mechanism is improved, thereby improving the availability of the substrate W for handling and improving the handling efficiency of the substrate W.

[0050] In recent years, due to the multilayering of semiconductors formed on substrate W, the processing time of substrate W in each processing chamber PC has tended to be longer. Therefore, it is necessary to increase the number of processing chamber PCs for each transport chamber 100 and increase the number of substrates W processed per unit time.

[0051] Therefore, as with the handling system 1, this requirement can be met by improving the handling efficiency of the substrate W in the handling chamber 100. Furthermore, by making the robot 10 fixed, the height of the handling chamber 100 can be reduced, thereby decreasing its volume. This reduces the operating cost of the handling chamber 100.

[0052] in addition, Figure 1 Only a portion of the transport chamber 100 is shown; more will be used later. Figure 3 The following describes an example of the configuration of the processing chamber PC, robot 10, and moving buffer 110 within the entire handling chamber 100. Additionally, using... Figure 4 The structural examples of robot 10 and movable buffer 110 will be described later.

[0053] in addition, Figure 1 The robot 10 shown can also enter the load lock chamber, which corresponds to the entrance and exit of the substrate W in the transport chamber 100, but there are various variations in the shape of the upper surface of the transport chamber 100, the configuration of the load lock chamber, and the processing chamber PC.

[0054] Therefore, the following uses Figure 2A and Figure 2B This section describes a configuration example of a loading and locking chamber. Furthermore, in the case of a robot-integrated loading and locking chamber, if the built-in robot can connect to the transfer base plate W between itself and the movable buffer 110, then... Figure 1 The robot 10 shown does not need to be able to enter the loading and locking chamber. Additionally, as... Figure 1 As shown, the device including robot 10 and mobile buffer 110 is sometimes referred to as handling device 5.

[0055] Figure 2A and Figure 2B These are top views illustrating one and two configuration examples of the locking chamber LL. Additionally, in Figure 2A and Figure 2B In the middle, the following was omitted. Figure 1 The robot 10 and the movable buffer 110 are shown in the description. Additionally, in... Figure 2A and Figure 2B The diagram shows a case where the transport chamber 100 is rectangular in top view, and a processing chamber PC is provided on the long side of the rectangle. In this way, by arranging the processing chamber PC on the long side of the rectangular transport chamber 100, the transport chamber 100 can be flexibly expanded even if the number of processing chamber PCs is increased.

[0056] In addition, Figure 2A and Figure 2B In the middle, the sidewall 100sw, which is equivalent to the longer side of the rectangle (refer to...) Figure 1 The sidewalls 100sw1 and 100sw2 are recorded as sidewalls 100sw1 and 100sw2, respectively, while the sidewalls 100sw corresponding to the shorter side are recorded as sidewalls 100sw3 and 100sw4. Furthermore, in Figure 2A and Figure 2B In this context, multiple (n) processing chambers PC are recorded as processing chambers PC1 to PCn.

[0057] Figure 2A This refers to a case where a loading and locking chamber LL is provided on the side wall 100sw1 of a PC with multiple processing chambers. Here, the loading and locking chamber LL causes the internal pressure to fluctuate between a reduced pressure atmosphere and atmospheric pressure. For example, on the substrate W (refer to...) Figure 1 When the load locking chamber LL is moved into the transport chamber 100 from the outside, the internal pressure of the load locking chamber LL is adjusted to atmospheric pressure, and the first opening, which is the outward opening of the load locking chamber LL, is opened. After the first opening is closed, the internal pressure of the load locking chamber LL is adjusted to depressurization, and the second opening, which is the opening on the side of the transport chamber 100, is opened.

[0058] Figure 2B This refers to the case where the loading and locking chamber LL is installed on a side wall 100sw3 (short side) adjacent to the side wall 100sw1 (long side) where multiple processing chambers PC are located. In this way, the loading and locking chamber LL can also be configured on a side wall 100sw different from the side wall 100sw where the processing chamber PCs are located. Furthermore, in... Figure 2B The image shows the loading locking chamber LL being installed on side wall 100sw3, but it can also be installed on side wall 100sw4.

[0059] In addition, Figure 2A and Figure 2B The diagram shows the transport chamber 100 as a rectangle when viewed from above, but it can also be applied to other shapes such as polygons or circles. Figure 1 The conveying system 1 is shown below. The structure of the conveying system 1 will be described in further detail below.

[0060] Figure 3 This is a top view schematic diagram of the conveying system 1 according to the embodiment. (As shown) Figure 3As shown, four processing chambers PC are respectively arranged at opposite positions on the parallel side walls 100sw1 and 100sw2. In addition, the robot 10 is respectively positioned in front of the opening of each processing chamber PC and in the middle of the processing chamber PC with the openings facing each other.

[0061] Specifically, four robots 10 are configured in total: one on the front of processing chamber PC1 and processing chamber PC5, one on the front of processing chamber PC2 and processing chamber PC6, one on the front of processing chamber PC3 and processing chamber PC7, and one on the front of processing chamber PC4 and processing chamber PC8.

[0062] The loading lock chamber LL is configured on the side wall 100sw, which is not parallel to the side walls 100sw1 and 100sw2, and can be entered by the robot 10 closest to the loading lock chamber LL (refer to loading lock chamber LL1 and loading lock chamber LL2).

[0063] That is, at least one of the multiple robots 10 has a substrate W (refer to) between the movable buffer 110 and the processing chamber PC or the loading locking chamber LL. Figure 1 The robot 10 inside the transport chamber 100 also enters the loading and locking chamber LL. Thus, it is not necessary to install a built-in robot in the loading and locking chamber LL, which enables the miniaturization of the loading and locking chamber LL.

[0064] like Figure 3 As shown, the transport chamber 100 has a shape that is symmetrical about a "line of symmetry" parallel to the side walls 100sw1 and 100sw2. Therefore, the structure of the side wall 100sw1 (positive Y-axis direction side) will be described below.

[0065] like Figure 3 As shown, the side wall 100sw1 is straight when viewed from above, and is provided with a plurality of processing chambers PC (PC1 to PC4) arranged horizontally. The robot 10 is arranged along the arrangement direction of the processing chambers PC. The movable buffer 110 moves along a track 120 fixed to the floor surface, etc., of the transport chamber 100. Alternatively, the movable buffer 110 and the track 120 may be collectively referred to as the movable buffer 110. In addition, using Figure 4 The structure of the movable buffer 110 and track 120 will be described later.

[0066] Track 120 includes a straight track 121. Thus, by moving the movable buffer 110 along the straight track 121, the positional accuracy of the movable buffer 110 can be improved. Furthermore, in Figure 3 In the diagram, two linear tracks 121 are shown because processing chambers PC are provided on opposite side walls 100sw, but there could also be only one linear track.

[0067] Furthermore, at least one of the multiple straight tracks 121 can be a so-called "multi-track". In this case, it is preferable that the movable buffers 110 moving in each track of the multi-track have height differences in a manner that do not interfere with each other. Alternatively, a "multi-track" configuration can also be achieved by arranging adjacent straight tracks 121 with different heights.

[0068] Alternatively, the track 120 may include a bend 122 at at least one end of the straight track 121, curving away from the sidewall 100sw. By providing the bend 122 at one end of the straight track 121, it can be effectively utilized as a retraction location for the movable buffer 110 or a reset location for resetting the position of the movable buffer 110. This improves the usability of the movable buffer 110. Furthermore, the bend 122 may branch off from the middle of the straight track 121.

[0069] in addition, Figure 3 The diagram shows a track 120 with curved sections 122 at both ends of a straight track 121. Furthermore, in the case where two straight tracks 121 are connected by curved sections 122, the "curved section 122" is sometimes referred to as the "curved track 122".

[0070] like Figure 3 As shown, the transport chamber 100 includes: a linear track 121 disposed between the side wall 100sw1 and the robot 10; and a linear track 121 disposed between the side wall 100sw2 and the robot 10. Additionally, at least one movable buffer 110 moves along each linear track 121. Thus, by providing parallel linear tracks 121 across the robot 10, the robot 10 can shorten the travel distance of the substrate W associated with its transfer by utilizing the movable buffer 110, which moves along the linear track 121 near the processing chamber PC. Therefore, the transport efficiency of the substrate W can be improved.

[0071] Here, Figure 3 The movable buffer 110 shown includes a holding assembly 111 for holding the substrate W and a connecting assembly 115. The holding assembly 111 is connected to both ends of the connecting assembly 115 in the horizontal direction via a connector J that allows horizontal rotation.

[0072] In this way, retaining components 111 can be connected to both ends of the connecting component 115. Thus, even if the movement range of the connecting component 115 is limited to the linear track 121, the retaining component 111 can be moved to the curved portion 122 provided at the end of the linear track 121. Furthermore, if the movable buffer 110 only needs to move on the linear track 121, the connector J can be made non-rotating, or the connector J itself can be omitted, and the retaining component 111 and the connecting component 115 can be fixed together as a single unit.

[0073] For example, with the connecting assembly 115 in the straight track 121, the movable buffer 110 can move the retaining assembly 111 along the bend 122 to the front of the loading locking chamber LL1. In addition, the movable buffer 110 can also move any of the connected retaining assemblies 111 to the front of the processing chamber PC (PC1 to PC4).

[0074] In addition, such as Figure 3 As shown, a pair of substrate detection sensors S are installed at the opening of each processing chamber PC. By detecting at least two points on the outer periphery of the substrate W, the center position of the substrate W transported into the processing chamber PC can be calculated. This allows for the detection of positional misalignment between the substrate W and the robot 10 transporting the substrate W. By correcting the robot 10's movements, the substrate W can be moved to its correct position within the processing chamber PC. Alternatively, the substrate detection sensors S can be installed on the bottom or top surface of the transport chamber 100.

[0075] The robot 10 closest to the loading locking chamber LL among the multiple robots 10 can enter loading locking chambers LL1, LL2, processing chamber PC1, and processing chamber PC5. Furthermore, the other robots 10 can enter the opposite processing chambers PC (processing chambers PC2 and PC6, processing chambers PC3 and PC7, and processing chambers PC4 and PC8), respectively. Additionally, as described above, the holding assembly 111 of the movable buffer 110 can be moved to the front of each processing chamber PC (PC1 to PC8).

[0076] Next, use Figure 4 This section describes the structure of robot 10 and movable buffer 110. Figure 4 This is a side view of robot 10 and movable buffer 110. Additionally, Figure 4 Viewed from the positive X-axis direction Figure 1 The side view of the robot 10 and the movable buffer 110 shown.

[0077] First, let's illustrate the structure of robot 10. For example... Figure 4As shown, the robot 10 has a first arm 11, a second arm 12, a hand 13, a lifting mechanism 15, a flange F, and a base B.

[0078] The base portion B of the robot 10 protrudes outside the transport chamber 100 through the floor 100f. Furthermore, the flange F supports the robot 10 on the upper surface of the floor 100f and maintains the airtightness of the transport chamber 100. Thus, by having the base portion B of the robot 10 protrude from the transport chamber 100, the volume of the transport chamber 100 can be reduced. Furthermore, it allows for easy power supply to the robot 10 from the outside of the transport chamber 100 and easy access.

[0079] The lifting mechanism 15 supports the base end of the first arm 11 so that it can rotate about the first rotation axis AH1 and move up and down along the lifting axis AV. Alternatively, the lifting mechanism 15 itself can rotate about the first rotation axis AH1. The first arm 11 supports the base end of the second arm 12 at its end, allowing the second arm 12 to rotate about the second rotation axis AH2. The second arm 12 supports the base end of the hand 13 at its end, allowing the hand 13 to rotate about the third rotation axis AH3. Figure 1 and Figure 3 As shown, the hand portion 13, for example, has a fork portion that splits into two branches at its end, and supports the substrate W on its upper surface. Alternatively, the hand portion 13 may also be multilayered to hold multiple substrates W.

[0080] Here, the first arm 11, the second arm 12, and the hand 13, which are equivalent to horizontal arms, can also rotate independently about the first rotation axis AH1, the second rotation axis AH2, and the third rotation axis AH3, respectively. In addition, the second arm 12 and the hand 13 can also rotate driven by the rotation of the first arm 11 about the first rotation axis AH1.

[0081] There are three drive sources (actuators) for independent rotation, and one or two drive sources for driven rotation. Additionally, robot 10 requires an extra drive source to raise and lower the lifting mechanism 15. Here, the shaft structure of robot 10 is modified, using... Figure 5A , Figure 5B , Figure 5C as well as Figure 5D This will be described in detail later.

[0082] Next, a structural example of the movable buffer 110 will be described. The movable buffer 110 includes a holding assembly 111 and a driving assembly 112 for holding the substrate W. Here, Figure 4The drive assembly 112 shown corresponds to the moving element in a linear motor of the moving magnet type. Therefore, the "drive assembly 112" will sometimes be referred to as the "moving element 112" below. Here, the linear motor is not limited to the moving magnet type, and may also be induction type. In this embodiment, the moving magnet type, that is, the moving element 112 includes a permanent magnet, will be described, but the moving element 112 may also be formed of a material that moves by an induced current flowing through it.

[0083] Furthermore, the track 120 has a stator 120a corresponding to the stator in the linear motor and a guide member 120b. In this embodiment, the movable buffer 110 is described as moving relative to the track 120 by means of the driving force of the linear motor, but it could also be a contact type, or a non-contact type such as magnetic levitation or air levitation. The guide member 120b is a support member that guides linear or curvilinear motion in a plane such as a horizontal plane. Figure 4 In the case shown, guide 120b guides the linear movement of movable buffer 110 along the X-axis.

[0084] In this way, the drive assembly 112 of the movable buffer 110 is non-contactly driven by the stator 120a included in the track 120. For example, the stator 120a is formed by molding the winding with resin or the like and covering the surface of the molded part with a film-like metal. This metal film, also called a shell, encloses the gas generated from the resin or the like inside. In this way, by forming the movable buffer 110 into a non-contact drive in the manner of a movable magnet, it helps to clean the transport chamber 100. In addition, since power can be supplied to the stator 120a via the floor 100f of the transport chamber 100, it also helps to clean the transport chamber 100 in this respect.

[0085] like Figure 4 As shown, when the substrate W is held by the movable buffer 110, the robot 10 receives the substrate W in a scooping manner by raising its hand 13. Conversely, when the substrate W is held by the hand 13, the robot 10 hands the substrate W to the movable buffer 110 by lowering its hand 13.

[0086] In addition, the position of the holding assembly 111 when viewed from above can be obtained based on the change in current or voltage of the stator 120a in the track 120, or the detection result of the position sensor appropriately set in the guide 120b.

[0087] Next, use Figures 5A to 5D Explain the structure of robot 10. Figure 5A , Figure 5B , Figure 5C and Figure 5DThese are top views illustrating four structural examples of robot 10.

[0088] Figure 5A The robot 10 shown is a first robot 10A, which is a three-degree-of-freedom robot with one degree of freedom in the vertical direction and two degrees of freedom in the horizontal direction. Additionally, in Figure 5A In this diagram, the lifting axis AV and the first rotation axis AH1 are shown as coaxial, but they may not be coaxial. The first arm 11, the second arm 12, and the hand 13, which are horizontal arms, move in a coordinated manner along the radial direction of the first rotation axis AH1 while maintaining the posture of the hand 13.

[0089] That is, with the help of the driving force and transmission mechanism that causes the first arm 11 to rotate around the first rotation axis AH1, the second arm 12 rotates passively around the second rotation axis AH, and the hand 13 rotates passively around the third rotation axis AH3. Furthermore, the transmission mechanism can be a belt, gear, linkage mechanism, etc. In addition, "substrate center CW" refers to the center position of the substrate W when the hand 13 holds the substrate W in its normal position.

[0090] Thus, the first robot 10A, while keeping the first rotation axis AH1, the third rotation axis AH3, and the angle θ of the straight line passing through the center CW of the substrate fixed, changes the distance r from the first rotation axis AH1 to the center CW of the substrate. Here, the angle θ can be any angle. Thus, the first robot 10A is a three-degree-of-freedom robot 10 with one degree of freedom in the vertical direction and two degrees of freedom in the horizontal direction. Hereinafter, the first robot 10A is sometimes referred to as the "RθZ robot".

[0091] By using the first robot 10A as the RθZ robot, the cost of the robot 10 can be reduced compared to the case where the robot 10 is formed with four or more degrees of freedom. When using the first robot 10A as the robot 10, the first robot 10A is positioned in front of the processing chamber PC or the loading and locking chamber LL. In other words, by positioning the robot 10 in front of the processing chamber PC or the loading and locking chamber LL, the robot 10 can be made into a three-degree-of-freedom RθZ robot.

[0092] Figure 5B The robot 10 shown is a second robot 10B, which is a robot with four or more degrees of freedom, having one degree of freedom in the vertical direction and three or more degrees of freedom in the horizontal direction. Furthermore, in Figure 5B In this diagram, the lifting axis AV and the first rotation axis AH1 are represented coaxially, but they may not be coaxial. The first arm 11, the second arm 12, and the hand 13, which serve as the horizontal arm, are... Figure 5AUnlike the first robot 10A shown, it rotates independently around the first rotation axis AH1, the second rotation axis AH2, and the third rotation axis AH3.

[0093] Thus, since the second robot 10B has at least one redundant axis in the horizontal direction, the substrate center CW can move along any path. Therefore, when using the second robot 10B as robot 10, the second robot 10B does not need to be positioned on the front of the processing chamber PC or the loading and locking chamber LL. In other words, even without positioning the robot 10 on the front of the processing chamber PC or the loading and locking chamber LL, the substrate W can still be transferred between the processing chamber PC and the loading and locking chamber LL.

[0094] Figure 5C The robot 10 shown is... Figure 5A The horizontal arm of the first robot 10A shown is configured as a double-armed third robot 10C. That is, the third robot 10C uses two-degree-of-freedom arms in the horizontal direction as double arms, and has one degree of freedom in the vertical direction. Specifically, the base ends of the two first arms 11 are supported by a platform P, which moves up and down along the lifting axis AV and rotates about the rotation axis AH0. Furthermore, in Figure 5C The text shows that... Figure 5A The first robot 10A shown is configured with a dual-arm horizontal arm, but it can also be configured as a dual-arm robot. Figure 5B The horizontal arm of the second robot 10B shown is configured as a double arm. Alternatively, the rotation axis AH0 can be omitted.

[0095] Figure 5D The third robot 10C shown is Figure 5C The third robot 10C shown is a variant example. Figure 5D The third robot 10C shown is Figure 5C The difference in the third robot 10C shown is that the lifting axis AH0 and the two first rotation axes AH1 in the dual arms are coaxial. This allows for a more compact third robot 10C, reducing the volume of the transport chamber 100. Furthermore, it also allows for… Figure 5D The vertical relationship of the arms in the illustrated double arms is reversed. Additionally, the axis of rotation AH0 can be omitted, which is consistent with... Figure 5C The third robot 10C shown is the same.

[0096] Figure 5E The robot 10 shown is a two-degree-of-freedom robot 10D with one degree of freedom in the vertical direction and one degree of freedom in the horizontal direction. The robot 10D has a slider 16 and a double-forked hand 17. The slider 16 supports the double-forked hand 17 so that it can move in the horizontal direction. The double-forked hand 17 is formed by joining two forks of the holding base plate W back to back.

[0097] Furthermore, since robot 10D lacks a rotation axis around a vertical axis, it cannot change the orientation of the double-forked hand 17. Therefore, the sliding direction of robot 10D in the double-forked hand 17 (in...) Figure 5D They are positioned on the front of their respective processing chamber PCs along the extension line of the Y-axis (with the center line in the middle).

[0098] Next, use Figures 6-9 illustrate Figure 3 A variation of the conveying system 1 shown. Figures 6 to 9 This is a top view schematic diagram of the transport system 1 in variations one through four. Furthermore, the following mainly describes the... Figure 3 The differences of the transport system 1 shown are omitted for the sake of comparison.

[0099] Figure 6 The conveying system 1 shown is Figure 3 The difference in the conveying system 1 shown is that the shape of the track 120 is a so-called "U-shape". Specifically, one end of a pair of straight tracks 121 of the track 120 is connected to each other by a curved track 122 (bend 122). Therefore, each movable buffer 110 can move from one straight track 121 to the other via the curved track 122. Additionally, in Figure 6 The diagram shows three movable buffers 110, but there can be any number of more than one.

[0100] in addition, Figure 6 The conveying system 1 shown is Figure 3 The difference in the conveying system 1 shown is that each movable buffer 110 is non-connected. Therefore, each movable buffer 110 can move independently along the track 120. Furthermore, in Figure 6 The diagram shows three movable buffers 110, but there can be any number of more than one.

[0101] In addition, Figure 6 In the image, robot 10 is shown (reference 10). Figure 3 )Configured with Figure 5A The first robot 10A (RθZ robot) is shown. Furthermore, the positional relationships between the processing chamber PC and the loading / locking chamber LL and each of the first robots 10A are as follows: Figure 3 The situation is the same for robot 10 shown. However, Figure 3 The robot 10 shown can be positioned relative to the processing chamber PC and the loading locking chamber LL from... Figures 5A to 5D Appropriate selections are made from the first robots 10A to 10D shown respectively.

[0102] Figure 7 The conveying system 1 shown is Figure 3 The difference in the conveying system 1 shown is that the shape of the track 120 is so-called "ring-shaped," and the movable buffers 110 are not connected. Specifically, in the track 120, one end of a pair of straight tracks 121 is connected to each other, and the other end is connected to each other by curved tracks 122 (bends 122). Therefore, each movable buffer 110 can independently circle the ring-shaped track 120. Furthermore, in Figure 7 The diagram shows four movable buffers 110, but it can be set to any number more than one, which is consistent with... Figure 6 The conveying system shown is the same as 1.

[0103] In addition, Figure 7 The image shows a robot 10, configured as the closest to the loading locking chamber LL, equipped with... Figure 5A The first robot 10A (RθZ robot) shown is configured as one of the other robots 10. Figure 5D The case of robot 10D is shown.

[0104] Additionally, the first robot 10A can enter both loading and locking chambers LL and the two opposing processing chambers PC. Furthermore, each robot 10D can enter the two opposing processing chambers PC. Alternatively, either the first robot 10A or the second robot 10B can be used instead of robot 10D.

[0105] Figure 8 The conveying system 1 shown is Figure 3 The difference in the conveying system 1 shown is that the shape of the track 120 is so-called "ring-shaped", and the movable buffer 110 is connected along the ring-shaped track 120. Specifically, the movable buffer 110 has a plurality of connecting components 115 between the retaining components 111 and the retaining components 111, which are connected to each other in a ring shape by a joint J that allows horizontal rotation.

[0106] The annular movable buffer 110 moves (circles) along the annular track 120, thereby enabling any holding component 111 to be moved to the front of any processing chamber PC or the front of any loading locking chamber LL. Additionally, in Figure 8 The diagram shows five retaining components 111, but there can be any number of more than one. Additionally, in... Figure 8 The diagram shows three connecting components 115 between the retaining component 111 and the retaining component 111, but with the condition that the movable buffer 110 is set as a ring, it can be set to any number of more than one.

[0107] In addition, Figure 8The diagram shows a movable buffer 110 connected in a ring, but multiple movable buffers 110 connected in a non-ringed manner can also be provided. In this case, each movable buffer 110 can move independently of each other. Additionally, with... Figure 6 The conveying system 1 shown is similar, as are all robots 10 (see...) Figure 3 All of them are the first robot 10A.

[0108] Figure 9 The conveying system 1 shown is Figure 3 The difference in the conveying system 1 shown is that the shape of the track 120 is so-called "ring-shaped", the movable buffers 110 are non-connected, and the robot 10 (see reference) Figure 3 The number of [items] is small. Additionally, the shape of track 120 is a so-called "ring," and the fact that each movable buffer 110 is non-connected is related to [other factors]. Figure 7 The conveying system shown is the same as 1, therefore, the following explanation focuses on the fact that there are fewer robots 10.

[0109] Specifically, robot 10, starting from the side closest to the loading and locking chamber LL, consists of... Figure 5A The first robot 10A shown Figure 5B The second robot 10B shown and Figure 5D The robot 10D is shown. Here, the first robot 10A can enter the loading and locking chamber LL1, the loading and locking chamber LL2, the processing chamber PC1, and the processing chamber PC5. In addition, the second robot 10B can enter the processing chambers PC2, PC3, PC6, and PC7. The robot 10D can enter the processing chambers PC4 and PC8.

[0110] Thus, by using a second robot 10B as robot 10, which is a robot with four or more degrees of freedom (one degree of freedom in the vertical direction and three or more degrees of freedom in the horizontal direction), the number of processing chambers (PCs) that can be entered increases, thereby reducing the number of robots 10. Alternatively, it can be replaced with... Figure 9 The first robot 10A and robot 10D are shown, while the second robot 10B is used.

[0111] Alternatively, it can be used as a substitute Figure 9 The first robot 10A shown is replaced by a third robot 10C, which is a dual-arm robot. In this way, by using the third robot 10C, which is a dual-arm robot, as the robot 10 that enters the loading and locking chamber LL, it is possible to quickly enter the loading and locking chamber LL, which is prone to becoming a bottleneck in the handling process, thereby improving the handling efficiency of the substrate W.

[0112] Next, use Figure 10 illustrate Figure 4The robot 10 and the movable buffer 110 shown are variations. Figure 10 This is a diagram showing a modified example of robot 10 and movable buffer 110. Additionally, Figure 10 Is with Figure 4 The same side view diagram. Here, Figure 10 The robot 10 and the movable buffer 110 shown are... Figure 4 The difference lies in that robot 10 is a fourth robot 10E without a lifting mechanism, while the movable buffer 110 is a movable buffer 110A with a lifting mechanism. Therefore, the following mainly describes the difference between the two. Figure 4 The differences.

[0113] like Figure 10 As shown, due to from Figure 4 The lifting axis AV and lifting mechanism 15 are omitted in the robot 10 shown, therefore the fourth robot 10E is a two-degree-of-freedom robot with two degrees of freedom in the horizontal direction. Furthermore, by omitting the lifting axis AV and lifting mechanism 15, the height of the base portion B is suppressed to a lower level than... Figure 4 The robot 10 shown is low. On the other hand, the movable buffer 110A has a lift-type holding assembly 111s that moves up and down along the lift axis AL in the vertical direction.

[0114] In this way, by omitting the lifting mechanism from robot 10, the height of the handling chamber 100 can be reduced. In addition, by simplifying the structure of robot 10, its usability can be improved.

[0115] However, the drive source (actuator) for the elevator-type retaining assembly 111s is powered by DC via a non-contact power supply through the rail 120. Thus, if the movable buffer 110A is powered non-contactly, it is possible to mount sensors such as weight sensors or optical sensors, or wireless communication cameras, within the movable buffer 110A.

[0116] Therefore, the presence, shape, weight, and position of the substrate W can be detected during the period when the substrate W is placed on the movable buffer 110A. Furthermore, DC power supply is less expensive than AC power supply, thus contributing to cost reduction.

[0117] like Figure 10 As shown, when the substrate W is held by the movable buffer 110A, the movable buffer 110A delivers the substrate W to the hand 13 of the fourth robot 10E by lowering the lifting holding assembly 111s. Conversely, when the substrate W is held by the hand 13 of the fourth robot 10E, the lifting holding assembly 111s is raised from below the substrate W to receive the substrate W in a scooping manner.

[0118] Alternatively, you can also Figure 5A The first robot 10A shown Figure 5B The second robot 10B shown Figure 5C The third robot 10C shown and Figure 10 The fourth robot 10E shown is simply referred to as Robot 10. Additionally, in use... Figure 10 In the case of the movable buffer 110A including the lift-type retaining assembly 111s shown, it can also be from Figures 1-9 The lifting mechanism 15 is omitted from the robot 10 shown (see reference). Figure 4 ).

[0119] Next, use Figure 11 illustrate Figure 1 The structure of the conveying device 5 shown. Figure 11 This is a block diagram showing the structure of the conveying device 5. For example... Figure 11 As shown, the conveying device 5 includes a robot 10, a movable buffer 110, and a controller 20. The robot 10 and the movable buffer 110 are connected to the controller 20. Additionally, the loading locking chamber LL and the processing chamber PC are also connected to the controller 20, enabling information exchange.

[0120] The controller 20 includes a control unit 21 and a storage unit 22. The control unit 21 includes an acquisition unit 21a and a motion control unit 21b. The storage unit 22 stores teaching information 22a. Additionally, in... Figure 11 For simplicity, only one controller 20 is shown, but multiple controllers 20 can also be used. In this case, a master controller that aggregates all the controllers can also be set up. For example, the controller connected to the robot 10 and the controller connected to the mobile buffer 110 can be set up separately, and a master controller that aggregates all the controllers can be set up.

[0121] Here, the controller 20 includes, for example, a computer with a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), HDD (Hard Disk Drive), input / output ports, and various circuits. The computer's CPU, for example, reads and executes a program stored in the ROM, thereby functioning as the acquisition unit 21a and the motion control unit 21b of the control unit 21.

[0122] In addition, at least one or all of the acquisition unit 21a and the motion control unit 21b may be constructed from hardware such as ASIC (Application Specific Integrated Circuit) or FPGA (Field Programmable Gate Array).

[0123] Additionally, the storage unit 22 corresponds to, for example, RAM or HDD. RAM or HDD can store teaching information 22a. Furthermore, the controller 20 can also obtain the aforementioned program or various information via another computer or portable recording medium connected via a wired or wireless network. Moreover, as described above, the controller 20 can be configured as multiple devices capable of communicating with each other, or as a hierarchical device capable of communicating with higher or lower level devices.

[0124] The control unit 21 obtains trigger information such as entry requests from the loading and locking chamber LL or the processing chamber PC, and performs motion control on the robot 10 and the movable buffer 110. In addition, when there are multiple controllers 20, the control unit 21 can also perform synchronization processing between the multiple controllers 20 at the same time.

[0125] The acquisition unit 21a acquires trigger information such as entry requests from the loading and locking chamber LL or the processing chamber PC. Then, based on the acquired information, the acquisition unit 21a determines the motion timing and motion content of the robot 10 and the movable buffer 110, and notifies the motion control unit 21b of the determined motion timing and motion content.

[0126] For example, the acquisition unit 21a acquires the timing of the substrate W being moved from the outside into the loading and locking chamber LL, and the action control unit 21b, based on the acquired timing, coordinates the operation of the robot 10 and the movable buffer 110. Furthermore, the acquisition unit 21a acquires the timing of the completion of processing the substrate W from the processing chamber PC, and the action control unit 21b, based on the acquired timing, coordinates the operation of the robot 10 and the movable buffer 110.

[0127] The motion control unit 21b moves the robot 10 and the movable buffer 110 based on the instructions from the acquisition unit 21a and the teaching information 22a. In addition, the motion control unit 21b uses the encoder values ​​in the actuators such as rotary motors or linear motors that serve as the power source for the robot 10 and the movable buffer 110 to perform feedback control, thereby improving the motion accuracy of the robot 10 and the movable buffer 110.

[0128] Teaching information 22a is generated during the teaching phase of teaching actions to robot 10 and movable buffer 110, and includes information about the "task" as a program that specifies the motion path of the robot, etc. Additionally, as... Figure 3 As shown, when each robot is positioned in a regular, symmetrical location, the teaching data can be shared or used in reverse. Therefore, according to the handling device 5, the time and cost of generating the teaching information 22a containing the teaching data can be reduced.

[0129] Next, use Figure 12 illustrate Figure 1 An example of the processing sequence performed by the conveying device 5 shown. Figure 12 This is a flowchart illustrating the processing sequence performed by the conveying device 5. For example... Figure 12 As shown, when the acquisition unit 21a of the controller 20 receives a notification that the substrate W is being stored in the loading and locking chamber LL (step S101), the movable buffer 110, whose operation is controlled by the operation control unit 21b of the controller 20, moves toward the front of the loading and locking chamber LL (step S102).

[0130] Then, the robot 10, whose motion is controlled by the motion control unit 21b of the controller 20, transfers the substrate W from the loading locking chamber LL to the movable buffer 110 (step S103). Next, the movable buffer 110 carrying the substrate W moves towards the front of the processing chamber PC (step S104), and the robot 10 transfers the substrate W from the movable buffer 110 to the processing chamber PC (step S105).

[0131] Additionally, when the acquisition unit 21a of the controller 20 receives a notification that the processing of the substrate W in the processing chamber PC is complete (step S106), the movable buffer 110 moves toward the front of the processing chamber PC (step S107). Then, the robot 10 transfers the substrate W from the processing chamber PC to the movable buffer 110 (step S108).

[0132] Then, the movable buffer 110 carrying the substrate W moves towards the front of the loading and locking chamber LL (step S109), and the robot 10 transfers the substrate W from the movable buffer 110 to the loading and locking chamber LL (step S110), thus ending the process.

[0133] In addition, Figure 12 To make the explanation easier to understand, the example shown illustrates the case where the acquisition processes of steps S101 and S106 are executed sequentially, but the processes triggered by the acquisition processes can also be performed in parallel. For example, the handover with the substrate W of the loading locking chamber LL and the handover with the substrate W of the processing chamber PC can also be performed in parallel.

[0134] Alternatively, multiple substrates W can be moved independently by moving multiple movable buffers 110 in parallel, or multiple substrates W can be held by the movable buffers 110 to move the substrates W before and after processing simultaneously.

[0135] The following uses Figures 13A to 15 An example of a movable buffer 110 with a multilayer holding substrate W and a transport chamber 100 using a multilayer movable buffer 110 will be described. First, using... Figure 13A and Figure 13B Explanation of the multi-layer movable buffer 110. Figure 13A This is a perspective view of a multi-layer movable buffer 110. Additionally, a two-layer movable buffer 110 will be described below, but the number of layers can also be set to three or more.

[0136] like Figure 13A As shown, the movable buffer 110 includes a holding assembly 111 and a driving assembly 112. The holding assembly 111 includes a support portion 111a, a buckling portion 111b, a holding portion 111c1, and a holding portion 111c2. The support portion 111a extends upward and supports the buckling portion 111b at its upper end. The buckling portion 111b is in the horizontal direction D1 (refer to the moving direction of the movable buffer 110)... Figure 1 It protrudes from the support portion 111a.

[0137] Specifically, the buckling portion 111b includes: a protrusion 111b1, which protrudes from the support portion 111a along the horizontal direction D1 such that its upper surface is coplanar with the upper surface of the support portion 111a; and a support portion 111b2, which bends upward from the protrusion 111b1. Furthermore, the buckling portion 111b includes a folded-back portion 111b3, which bends back from the support portion 111b2 towards the support portion 111a along the horizontal direction D1. In addition, the end of the folded-back portion 111b3 does not protrude from the support portion 111a when viewed from above.

[0138] Holding parts 111c1 and 111c2 hold the substrate W (see reference). Figure 1 The component 111c1, corresponding to the first layer, is supported by the upper surface of the support portion 111a and the upper surface of the protrusion 111b1 of the buckling portion 111b. The retaining portion 111c2, corresponding to the second layer, is supported by the upper surface of the folded-back portion 111b3. Furthermore, the base ends of the retaining portions 111c1 and 111c2 are supported by the buckling portion 111b, and the end ends are bifurcated. The distance between the retaining portions 111c1 and 111c2 is the distance between the robot 10 (see reference 111b1). Figure 4 The size that the hand 13 can enter.

[0139] so, Figure 13A The shown retaining assembly 111 includes a buckled portion 111b to prevent interference with the substrate W placed on the first layer. Furthermore, the buckled portion 111b has a cantilever shape with the side without the support portion 111b2 (the negative X-axis direction side) open. Therefore, even when used by the robot 10 (see reference...) Figure 4 When the substrate W, which is held in place, intrudes into the buckling portion 111b along the Y-axis, the movable buffer 110 can also avoid the lifting and lowering motion of the robot 10. More specifically, by moving towards the side with the support column 111b2 (the positive X-axis direction side), the lifting and lowering motion of the robot 10 can be avoided.

[0140] In addition, Figure 13A The diagram shows a movable buffer 110 with the buckling portion 111b protruding to the right (positive X-axis direction) when viewed from the negative Y-axis direction, but the buckling portion 111b can also protrude to the left (negative X-axis direction). Thus, the direction of the aforementioned avoidance action can be reversed (negative X-axis direction).

[0141] The drive assembly 112 supports the retaining assembly 111. Additionally, the drive assembly 112 has two recesses 112r extending horizontally along the direction D1 on its bottom surface. These recesses 112r respectively interact with the track 120 (see reference). Figure 3 The two protrusions 120r described later in the text (refer to) Figure 13B )correspond.

[0142] Figure 13B This is a perspective view of the movable buffer 110 and the track 120. Figure 13B This refers to the movable buffer 110 that is held in the state of the substrate W. Additionally, in Figure 13B In the diagram, the substrate W held by the holding portion 111c1, which corresponds to the first layer, is represented by a dashed line, and the substrate W held by the holding portion 111c2, which corresponds to the second layer, is represented by a solid line.

[0143] like Figure 13B As shown, the substrate W held by the holding portion 111c1 reaches the through space in the buckling portion 111b. Furthermore, the track 120 has two protrusions 120r extending horizontally in the upper surface. The two protrusions 120r correspond to the two recesses 112r of the aforementioned drive assembly 112 (see reference). Figure 13A ).

[0144] Next, use Figure 14A and Figure 14B For settings Figure 13A as well as Figure 13B The transport chamber 100 of the movable buffer 110 shown will be described. Figure 14A This is a top view of the transport room 100. Figure 14BThis is a top-down perspective view of the transport room 100. Additionally, in... Figure 14A and Figure 14B In the middle, the following was omitted. Figure 3 Instead of describing the processing chamber PC and loading locking chamber LL as shown, a communication port 101 is described that is provided on the side wall 100sw of the transport chamber 100 and communicates with the processing chamber PC and the loading locking chamber LL.

[0145] In addition, Figure 14A as well as Figure 14B In order to cooperate with Figure 3 Similarly, four robots 10 are distinguished and labeled as robot 10-1 and robot 10-2, starting from the side closest to the loading and locking chamber LL. Likewise, the aforementioned connecting ports 101 are labeled as connecting ports 101-1 and 101-2 for side walls 100sw1, and connecting ports 101-5 and 101-6 for side walls 100sw2.

[0146] Additionally, regarding the movable buffer 110 located near the side wall 100sw1 (see...) Figure 13A The movable buffer 110 is described as movable buffer 110-1, while the movable buffer 110 located near the side wall 100sw2 is described as movable buffer 110-2. Similarly, the track 120 is also described as track 120-1 and track 120-2. Furthermore, Figure 14B It is for easy understanding to express Figure 14A The diagram shown is a three-dimensional representation of the structure shown; therefore, it will be used below. Figure 14A The transport room 100 is described below.

[0147] like Figure 14A As shown, the movable buffer 110-1 and Figure 13A Similarly, the movable buffer 110 shown, viewed from robot 10, has a buckling portion 111b (see reference). Figure 13A It protrudes to the right (positive X-axis direction). Therefore, the robot 10, which is holding the hand 13 holding the substrate W close to the movable buffer 110, avoids it by moving to the right (positive X-axis direction). That is, as Figure 14A As shown, when the movable buffer 110-1 is located in front of the communication port 101-1, the movable buffer 110-1 avoids it by moving the robot 10-1 in the positive X-axis direction.

[0148] Therefore, it is not necessary for one end of track 120-1 (the negative X-axis side) to extend towards the connection port 101-9. Conversely, with the movable buffer 110-1 located in front of the connection port 101-4, it is necessary for robot 10-4 to avoid it in the positive X-axis direction. Figure 14AAs shown, it is necessary to extend the other end of track 120-1 (the positive X-axis side) toward the positive X-axis side.

[0149] In contrast, the movable buffer 110-2 and Figure 13A Unlike the movable buffer 110 shown, the buckling portion 111b (see reference 110) is different when viewed from robot 10. Figure 13A It protrudes to the left. Therefore, the robot 10, which is in a position where the hand 13 is close to the movable buffer 110 while holding the base plate W, moves to the left to avoid it. However, the movable buffer 110-1 and the movable buffer 110-2 are arranged symmetrically about a line parallel to the X-axis.

[0150] Therefore, as Figure 14A As shown, when the movable buffer 110-2 is located in front of the connection port 101-5, the movable buffer 110-2, like the movable buffer 110-1, can avoid the connection by moving the robot 10-1 in the positive X-axis direction. Therefore, it is not necessary to extend one end of the track 120-2 (the negative X-axis side) towards the connection port 101-10. Conversely, when the movable buffer 110-2 is located in front of the connection port 101-8, it needs to avoid the robot 10-4 in the positive X-axis direction, therefore... Figure 14A As shown, it is necessary to extend the other end of track 120-2 (the positive X-axis side) toward the positive X-axis side.

[0151] Next, regarding Figure 14A An example of the operation of the robot 10 and the movable buffer 110 will be described. Assume that the processing chamber PC (refer to...) is connected to the communication port 101-1. Figure 3 There is a processed substrate W in the first layer (lower layer), the robot 10 does not hold the substrate W, the unprocessed substrate W is placed on the second layer (upper layer) of the movable buffer 110, and there is no substrate W in the first layer (lower layer).

[0152] In this case, the movable buffer 110-1 is in comparison Figure 14A The position shown is closer to the positive X-axis direction, and the robot waits near robot 10-1 at a position offset from robot 10-1. Robot 10-1 uses its hand 13 to remove the processed substrate W from the processing chamber PC through the communication port 101-1. Then, robot 10-1 moves its hand 13 back to a position where it can connect the substrate W with the first layer of the movable buffer 110-1, and raises or lowers its hand 13. The movable buffer 110-1 moves from the standby position toward robot 10-1, and the hand 13 holding the processed substrate W stops at a position in the X-axis direction between the first and second layers.

[0153] Robot 10-1 moves its hand 13 forward. Then, robot 10-1 lowers its hand 13 until the substrate W is placed on the first layer of the movable buffer 110-1. The movable buffer 110-1, having received the substrate W, moves away from robot 10-1 again towards the standby position. Robot 10-1 raises its hand 13 to the height between the first and second layers of the movable buffer 110-1, and then moves its hand 13 backward. The movable buffer 110-1 moves towards robot 10-1 from the standby position, stopping the hand 13, which is not holding the substrate W, at the position in the X-axis direction between the first and second layers.

[0154] Robot 10-1 moves its hand 13 forward. Then, robot 10-1 raises its hand 13 until it obtains the unprocessed substrate W placed on the second layer of the movable buffer 110-1. The movable buffer 110-1 then moves away from robot 10-1 to a standby position. Then, robot 10-1, having obtained the unprocessed substrate W, moves its hand 13 forward to place the substrate W into the processing chamber PC. In this way, robot 10 and movable buffer 110 cooperate in a manner that does not interfere with the substrate W held in place.

[0155] In addition, Figure 14A The diagram shows two tracks 120 (track 120-1 and track 120-2), but only one may be provided. For example, with only track 120-1, each robot 10 cooperates with a movable buffer 110-1 to transport the substrate W. For example, robot 10-4 cooperates with movable buffer 110-1 to enter the processing chamber PC, which is connected to connection ports 101-4 and 101-8, respectively.

[0156] Next, use Figure 15 illustrate Figure 13A A modified example of the movable buffer 110 shown. Figure 15 This is a diagram showing a modified example of the multi-layer movable buffer 110. Furthermore, the following mainly describes... Figure 13A The differences of the movable buffer 110 shown are omitted for the sake of comparison.

[0157] Figure 15 The movable buffer 110 shown is Figure 13A The difference in the movable buffer 110 shown is that the buckling direction of the buckling portion 111b is different. For example... Figure 15As shown, the protrusion 111b1 of the buckling portion 111b protrudes from the support portion 111a in the positive Y-axis direction with its upper surface coplanar with the upper surface of the support portion 111a. Furthermore, the support portion 111b2, which buckles upward from the protrusion 111b1, is located on the positive Y-axis side. In addition, the folded-back portion 111b3 buckles in the negative Y-axis direction.

[0158] If replace Figure 13A The movable buffer 110 shown is used Figure 15 The movable buffer 110 shown means that the support column 111b2 will not become an obstacle, so it can avoid the robot 10 and the base plate W regardless of which direction it moves in the horizontal direction D1. Therefore, it is not necessary to... Figure 14A Shown Figure 14A The other end of the track 120 (the positive X-axis side) extends towards the positive X-axis direction. Therefore, the overall length of the track 120 can be shortened, and the volume of the transport chamber 100 can be reduced.

[0159] In addition, in use Figure 15 In the case of the movable buffer 110 shown, compared with the use of Figure 13A Compared to the movable buffer 110 shown, the width (width along the Y-axis) of the transport chamber 100 is wider. Therefore, when it is desirable to narrow the width of the transport chamber 100, it is preferable to use... Figure 13A The movable buffer 110 is shown.

[0160] As described above, the transport system 1 of the embodiment includes a transport chamber 100, on which a plurality of processing chambers PC are provided for processing a substrate W under a reduced pressure atmosphere. The transport chamber 100 transports the substrate W under a reduced pressure atmosphere. The transport chamber 100 includes: a plurality of robots 10 fixed inside the transport chamber 100 for transporting the substrate W; and a movable buffer 110. The movable buffer 110 holds the substrate W and moves horizontally along the side wall 100sw between the side wall 100sw and the robots 10. The robots 10 cooperate with the movement of the movable buffer 110 to transfer the substrate W between the movable buffer 110 and the processing chamber PC.

[0161] In this way, the robot is stationary in the handling system, while the buffer, which serves as the substrate placement area, is mobile. The substrate is handled through the coordinated action of the robot and the mobile buffer, thus enabling the lightweighting of the moving object. This simplifies the moving mechanism, increases its operating rate, and consequently improves the usability of substrate handling. Therefore, the efficiency of substrate handling is improved.

[0162] Those skilled in the art can readily derive further effects and variations. Therefore, the invention is not limited to the specific details and representative embodiments shown and described above. Consequently, various modifications can be made without departing from the overall inventive concept or scope defined by the appended claims and their equivalents.

[0163] Label Explanation

[0164] 1. Material handling system

[0165] 5. Handling device

[0166] 10 robots

[0167] 10A First Robot

[0168] 10B Second Robot

[0169] 10C Third Robot

[0170] 10E Fourth Robot

[0171] 11 First Arm

[0172] 12 Second Arm

[0173] 13 Hands

[0174] 15 Lifting Mechanism

[0175] 16 Slider

[0176] 17 Double-forked hands

[0177] 20 Controllers

[0178] 21 Control Department

[0179] 21a Acquisition Department

[0180] 21b Motion Control Unit

[0181] 22 Storage Department

[0182] 22a Teaching Information

[0183] 100 Transport Room

[0184] 100F floor

[0185] 100sw sidewall

[0186] 101 Connecting Port

[0187] 110 Movable Buffer

[0188] 111 Retaining Component

[0189] 111a Support section

[0190] 111b Bend

[0191] 111b1 Protrusion

[0192] 111b2 Support section

[0193] 111b3 Turnback Section

[0194] 111c1, 111c2 retaining parts

[0195] 111s Lift-type Holding Assembly

[0196] 112 Drive Components (Moving Parts)

[0197] 112r recess

[0198] 115 Connection Components

[0199] 120 tracks

[0200] 120a stator

[0201] 120b Guide

[0202] 120r convex part

[0203] 121 Straight Track

[0204] 122 Curved track (bend)

[0205] AL elevator axis

[0206] AH1 First Rotation Axis

[0207] AH2 Second Rotation Axis

[0208] AH3 Third Rotation Axis

[0209] AV lifting axis

[0210] B. Base section

[0211] CW substrate center

[0212] F flange

[0213] J connector

[0214] LL Loading Locking Chamber

[0215] ML movement path

[0216] P base

[0217] PC processing room

[0218] S-substrate detection sensor

[0219] W substrate.

Claims

1. A handling system, characterized in that, The transport system includes a transport chamber, and multiple processing chambers are arranged on the side wall of the transport chamber for processing the substrate under a reduced pressure atmosphere. The transport chamber transports the substrate under a reduced pressure atmosphere. The transport chamber is equipped with: Multiple robots, fixed within the transport chamber, transport the substrate; and A movable buffer that holds the substrate and moves horizontally along the sidewall between the sidewall and the robot. The robot collaborates with the movement of the movable buffer to transfer the substrate between the movable buffer and the processing chamber. The transport chamber has a loading and locking chamber on its side wall that allows the internal pressure to fluctuate between a depressurized atmosphere and atmospheric pressure. The robot closest to the loading and locking chamber among the plurality of robots performs the transfer of the substrate between the processing chamber adjacent to the loading and locking chamber and the loading and locking chamber. The robots, excluding the one closest to the loading and locking chamber, perform the transfer of the substrate between the movable buffer and the processing chambers, excluding the one adjacent to the loading and locking chamber. The other robots include a second robot, which is a robot with four or more degrees of freedom, having one degree of freedom in the vertical direction and three or more degrees of freedom in the horizontal direction. The second robot has a first arm, a second arm, and a hand. The first arm, the second arm, and the hand are horizontal arms that can independently rotate about a first rotation axis, a second rotation axis, and a third rotation axis, respectively. The second robot enters one of the other processing chambers adjacent to each other on the side wall. The second robot is not positioned at the front of the processing chamber. The movable buffer moves to the front of the loading locking chamber or the processing chamber adjacent to the loading locking chamber, and the robot closest to the loading locking chamber or the processing chamber adjacent to the loading locking chamber performs the handover of the base plate between the loading locking chamber or the processing chamber adjacent to the loading locking chamber and the movable buffer. The movable buffer moves to the front of the other processing chamber, and the other robot performs the handover of the substrate between the other processing chamber and the movable buffer. The transfer of the substrate is carried out with the movable buffer located in front of the processing chamber and the robot's hand facing the front of the processing chamber.

2. The handling system according to claim 1, characterized in that, From the robot's perspective, the movable buffer is able to stop in front of the side wall.

3. The handling system according to claim 1, characterized in that, The transport chamber is equipped with tracks fixed inside the transport chamber. The movable buffer has: A holding component that holds the substrate; and The drive component corresponds to the moving part in a linear motor. The drive assembly is driven in a non-contact manner by a stator contained in the track.

4. The handling system according to claim 3, characterized in that, The holding assembly has two holding portions that hold the substrate in two layers.

5. The handling system according to claim 3, characterized in that, The sidewalls, viewed from above, are straight and are provided with a plurality of processing chambers arranged horizontally. Multiple robots are arranged along the orientation of the processing chamber. The track is fixed at a position closer to the side wall than to the robot, and is a straight track along the arrangement direction.

6. The handling system according to claim 5, characterized in that, The straight track has a bend at at least one of its two ends that curves away from the sidewall.

7. The handling system according to claim 5, characterized in that, The transport chamber, viewed from above, is rectangular in shape and includes: The sidewalls corresponding to the long side of the rectangle are the first sidewall and the second sidewall; The straight track disposed between the first sidewall and the robot is the first straight track; as well as The straight track set between the second sidewall and the robot is the second straight track.

8. The handling system according to claim 7, characterized in that, The transport chamber has a first curved track that connects one end of the first linear track and one end of the second linear track to each other.

9. The handling system according to claim 8, characterized in that, The transport chamber has a second curved track that connects the other ends of the first and second straight tracks to each other.

10. The handling system according to claim 3, characterized in that, A plurality of movable buffers are provided for one of the tracks, each capable of moving independently.

11. The handling system according to claim 3, characterized in that, Multiple movable buffers are provided for one of the tracks, and they are interconnected.

12. The handling system according to claim 3, characterized in that, The movable buffer has: The two retaining components; and One of the aforementioned driving components, The retaining components are respectively connected to the two ends of the driving component in the horizontal direction.

13. The handling system according to claim 1, characterized in that, The plurality of said robots include a first robot, which is a three-degree-of-freedom robot having one degree of freedom in the vertical direction and two degrees of freedom in the horizontal direction. The first robot is positioned at the front of the processing chamber.

14. The handling system according to claim 13, characterized in that, The first robot has a hand formed by two forks that hold the substrate together back to back.

15. The handling system according to claim 1, characterized in that, The plurality of said robots include a third robot with two arms having two degrees of freedom in the horizontal direction as its two arms and one degree of freedom in the vertical direction. The third robot is positioned closest to the loading and locking chamber among the plurality of robots.

16. The handling system according to claim 1, characterized in that, The plurality of said robots includes a fourth robot, which is a two-degree-of-freedom robot with two degrees of freedom in the horizontal direction. The movable buffer includes a lift mechanism for raising and lowering the base plate.

17. A method for handling materials, characterized in that, This transport method utilizes a transport chamber, which has multiple processing chambers on its side walls for processing the substrate under reduced pressure. The transport chamber transports the substrate under reduced pressure. The transport chamber is equipped with: Multiple robots, fixed within the transport chamber, transport the substrate; and A movable buffer that holds the substrate and moves horizontally along the sidewall between the sidewall and the robot. The transport chamber has a loading and locking chamber on its side wall that allows the internal pressure to fluctuate between a depressurized atmosphere and atmospheric pressure. The robot closest to the loading and locking chamber among the plurality of robots performs the transfer of the substrate between the processing chamber adjacent to the loading and locking chamber and the loading and locking chamber. The robots, excluding the one closest to the loading and locking chamber, perform the transfer of the substrate between the movable buffer and the processing chambers, excluding the one adjacent to the loading and locking chamber. The other robots include a second robot, which is a robot with four or more degrees of freedom, having one degree of freedom in the vertical direction and three or more degrees of freedom in the horizontal direction. The second robot has a first arm, a second arm, and a hand. The first arm, the second arm, and the hand are horizontal arms that can independently rotate about a first rotation axis, a second rotation axis, and a third rotation axis, respectively. The second robot enters one of the other processing chambers adjacent to each other on the side wall. The transfer of the substrate between the mobile buffer and the processing chamber is achieved by coordinating the movement of the robot and the mobile buffer. The second robot is not positioned at the front of the processing chamber. The movable buffer moves to the front of the loading locking chamber or the processing chamber adjacent to the loading locking chamber, and the robot closest to the loading locking chamber or the processing chamber adjacent to the loading locking chamber performs the handover of the base plate between the loading locking chamber or the processing chamber adjacent to the loading locking chamber and the movable buffer. The movable buffer moves to the front of the other processing chamber, and the other robot performs the handover of the substrate between the other processing chamber and the movable buffer. The transfer of the substrate is carried out with the movable buffer located in front of the processing chamber and the robot's hand facing the front of the processing chamber.

18. A conveying device, characterized in that, The conveying device has the following features: Multiple robots are fixed in a transport chamber to transport substrates. Multiple processing chambers are provided on the side wall of the transport chamber to process the substrates under a reduced pressure atmosphere. The transport chamber transports the substrates under a reduced pressure atmosphere. A movable buffer that holds the substrate within the transport chamber, moving horizontally along the sidewall between the sidewall and the robot; as well as The controller coordinates the movement of the robot and the mobile buffer to facilitate the transfer of the substrate between the mobile buffer and the processing chamber. The transport chamber has a loading and locking chamber on its side wall that allows the internal pressure to fluctuate between a depressurized atmosphere and atmospheric pressure. The robot closest to the loading and locking chamber among the plurality of robots performs the transfer of the substrate between the processing chamber adjacent to the loading and locking chamber and the loading and locking chamber. The robots, excluding the one closest to the loading and locking chamber, perform the transfer of the substrate between the movable buffer and the processing chambers, excluding the one adjacent to the loading and locking chamber. The other robots include a second robot, which is a robot with four or more degrees of freedom, having one degree of freedom in the vertical direction and three or more degrees of freedom in the horizontal direction. The second robot has a first arm, a second arm, and a hand. The first arm, the second arm, and the hand are horizontal arms that can independently rotate about a first rotation axis, a second rotation axis, and a third rotation axis, respectively. The second robot enters one of the other processing chambers adjacent to each other on the side wall. The second robot is not positioned at the front of the processing chamber. The movable buffer moves to the front of the loading locking chamber or the processing chamber adjacent to the loading locking chamber, and the robot closest to the loading locking chamber or the processing chamber adjacent to the loading locking chamber performs the handover of the base plate between the loading locking chamber or the processing chamber adjacent to the loading locking chamber and the movable buffer. The movable buffer moves to the front of the other processing chamber, and the other robot performs the handover of the substrate between the other processing chamber and the movable buffer. The transfer of the substrate is carried out with the movable buffer located in front of the processing chamber and the robot's hand facing the front of the processing chamber.

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