Fixed Ring Detection Device

Abstract

The present invention discloses a fixing ring detection device, comprising: a machine base, a detection mechanism and a controller; wherein, the machine base has a detection channel through which the fixing ring can pass; the detection mechanism is arranged on the machine base, and the detection mechanism includes a sensor assembly corresponding to the detection channel, and the sensor assembly is used to measure the external shape information of the fixing ring passing through the detection channel; the controller is connected to the sensor assembly and is used to judge whether the fixing ring is a good product according to the external shape information. The fixing ring detection device provided by the present invention can detect the thickness and outer diameter of the fixing ring through the sensor assembly, and can detect the abnormal outer diameter, thickness (too thick or too thin) and warping of the fixing ring, and the detection efficiency is higher and more accurate.

Description

Technical Field

[0001] The present invention relates to the technical field of detection devices, and particularly to a fixing ring detection device. Background Art

[0002] In semiconductor wafer processing, wafer fixing rings are used, and the outer shape information of the wafer fixing rings affects the processing quality of the wafers. The existing fixing ring detection devices in the prior art can usually only detect whether the fixing rings are too thick and cannot detect other outer shape conditions of the fixing rings; moreover, in the existing detection processes of the fixing rings, all are manually operated by workers, resulting in low detection efficiency.

[0003] Therefore, it is necessary to provide a new fixing ring detection device for the problems in the prior art. Summary of the Invention

[0004] The purpose of the present invention is to provide a fixing ring detection device which can automatically detect the outer shape information of the fixing rings and can automatically determine whether the fixing rings are qualified products according to the outer shape information of the fixing rings.

[0005] To achieve the above purpose, the technical solution provided by the present invention is as follows:

[0006] A fixing ring detection device includes: a machine base, a detection mechanism and a controller; wherein, the machine base has a detection channel through which the fixing ring can pass; the detection mechanism is arranged on the machine base, and the detection mechanism includes a sensor assembly corresponding to the detection channel, and the sensor assembly is used for measuring the outer shape information of the fixing ring passing through the detection channel; the controller is connected to the sensor assembly and is used for judging whether the fixing ring is a qualified product according to the outer shape information.

[0007] In one or more embodiments of the present invention, the sensor assembly includes a first sensor and a second sensor. The first sensor is arranged above the detection channel for measuring the thickness of the fixing ring, and the second sensor is arranged on both sides of the detection channel for measuring the outer diameter of the fixing ring.

[0008] In one or more embodiments of the present invention, the detection mechanism further includes a pressing member which can press the detected fixing ring when the first sensor detects the thickness of the fixing ring.

[0009] In one or more embodiments of the present invention, the first sensor and the second sensor are one of an optical sensor, an acoustic wave sensor and an eddy current sensor.

[0010] In one or more embodiments of the present invention, the detection mechanism further includes a support and a slide rail. The support is erected above the detection channel, the slide rail is arranged on the support and spans across the detection channel, the first sensor is slidably mounted on the slide rail, and the sensing signal of the first sensor can pass through the support to act on the fixed ring in the detection channel.

[0011] In one or more embodiments of the present invention, an adjustment mechanism is further provided on the machine base. The adjustment mechanism is used to adjust the width of the detection channel to match fixed rings with different outer diameter sizes.

[0012] In one or more embodiments of the present invention, a loading mechanism and a paddle mechanism are further provided on the machine base. The loading mechanism is arranged corresponding to the entrance of the detection channel and is used to place the fixed ring to be detected, and the paddle mechanism is used to dial the fixed ring to be detected on the loading mechanism into the detection channel.

[0013] In one or more embodiments of the present invention, a marking mechanism is further provided on the machine base. The marking mechanism is connected to the controller and is arranged corresponding to the detection channel; when the controller determines that the fixed ring is a defective product, the controller controls the marking mechanism to print a defective product identification on the defective product fixed ring.

[0014] In one or more embodiments of the present invention, a receiving box is further provided on the machine base. The receiving box is arranged corresponding to the exit of the detection channel and is used to receive the fixed ring sent out from the exit.

[0015] In one or more embodiments of the present invention, the receiving box includes a first receiving cavity for receiving qualified product fixed rings and a second receiving cavity for receiving defective product fixed rings which are arranged in a stacked manner. The receiving box is installed on a lifting mechanism, and the lifting mechanism is connected to the controller.

[0016] When the controller determines that the fixed ring is a qualified product, the controller controls the lifting mechanism to move the first receiving cavity to the exit of the detection channel to receive the qualified product fixed ring; when the controller determines that the fixed ring is a defective product, the controller controls the lifting mechanism to move the second receiving cavity to the exit of the detection channel to receive the defective product fixed ring.

[0017] In one or more embodiments of the present invention, a protective cover is further provided on the machine base. The protective cover covers the periphery of the detection channel to isolate fine dust.

[0018] Compared with the prior art, the fixing ring detection device provided by the present invention can detect the thickness and outer diameter of the fixing ring through the sensor assembly. The outer diameter, thickness (too thick or too thin) and warping abnormalities of the fixing ring can all be detected, and the detection efficiency is higher and more accurate; and automatic loading can be achieved through the setting of the paddle mechanism; the marking mechanism can mark defective products to avoid the defective products from being put into use again; the material receiving box can classify and collect defective products and good products to avoid mixing of materials and facilitate future use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic structural diagram of a fixed ring detection device in one embodiment of the present invention;

[0020] Figure 2 Figure 1 A schematic structural diagram of the fixing ring detection device shown in another perspective;

[0021] Figure 3 Figure 1 A schematic diagram of a local structure of a fixing ring detection device shown;

[0022] Figure 4 Figure 1 An enlarged schematic diagram of a local structure in the fixing ring detection device shown;

[0023] Figure 5 yes Figure 1 A schematic diagram of the structure of a material receiving box in the fixed ring detection device shown;

[0024] Figure 6 It is a partial structural schematic diagram of a fixing ring detection device in another embodiment of the present invention.

[0025] Description of main reference numerals:

[0026] 1-base, 11-detection channel, 12-adjustment mechanism, 13-stopper, 2-detection mechanism, 21-sensor assembly, 22-support, 23-slide rail, 24-slider, 25-through groove, 26-pressing member, 211-first sensor, 212-second sensor, 3-controller, 41-loading mechanism, 42-paddle mechanism, 5-marking mechanism, 6-material receiving box, 61-first receiving chamber, 62-second receiving chamber, 7-lifting mechanism, 8-protective cover, 9-operation panel. DETAILED DESCRIPTION

[0027] The specific implementation modes of the present invention are described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.

[0028] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or variations thereof such as "comprises" or "comprising" etc. will be understood to include the stated element or component, without excluding other elements or other components.

[0029] As Figure 1 , Figure 2 and Figure 3 shown, the fixed ring detection device in an embodiment of the present invention includes: a machine base 1, a detection mechanism 2, and a controller 3.

[0030] Among them, the machine base 1 has a detection channel 11 through which the fixed ring can pass. The detection mechanism 2 is arranged on the machine base 1, and the detection mechanism 2 includes a sensor assembly 21 corresponding to the detection channel 11, and the sensor assembly 21 is used to measure the external shape information of the fixed ring passing through the detection channel 11. The controller 3 is connected to the sensor assembly 21 and is used to judge whether the fixed ring is a good product according to the external shape information detected by the sensor assembly 21.

[0031] In an exemplary embodiment, the detection channel 11 is arranged in an inclined shape at a specific angle with the horizontal plane, so that the fixed ring can slide along the detection channel 11 under the action of gravity. The width of the detection channel 11 is set to match the outer diameter of the fixed ring to be detected, so as to prevent the fixed ring from shifting when sliding in the detection channel 11.

[0032] In other embodiments, the detection channel 11 can also be arranged horizontally. In this case, an additional driving mechanism needs to be provided to drive the fixed ring to move along the detection channel 11. For example, a conveyor belt mechanism can be used to drive the fixed ring to move.

[0033] In an exemplary embodiment, an adjusting mechanism 12 is further arranged on the machine base, and the adjusting mechanism 12 is used to adjust the width of the detection channel 11 to match fixed rings with different outer diameter sizes. For example, in the existing production process, the fixed rings usually have two outer diameter specifications of 8 inches and 12 inches. In order to adapt to the existing production process, the width of the detection channel 11 can be adjusted by the adjusting mechanism 12 to match the fixed rings with corresponding outer diameter specifications.

[0034] In an exemplary embodiment, please refer to Figure 3 shown, the adjusting mechanism 12 includes a guide rail 121, a push rod 122, and a cylinder 123. Among them, the detection channel 11 of the fixed ring is defined between two guide rails 121. The two guide rails 121 are respectively connected to two groups of push rods 122, and the two groups of push rods 122 are driven by two groups of cylinders 123. By driving the push rod 122 with the cylinder 123, the two guide rails 121 can be moved closer or farther away, so as to realize the adjustment of the width of the detection channel 11.

[0035] In another embodiment, please refer toFigure 6 As shown, the detection channel 11 can also be set to include a first channel 111 and a second channel 112 with different widths, and the first channel 111 and the second channel 112 can allow fixing rings with different outer diameter sizes to pass through. For example, in the existing production process, the fixing rings usually have two outer diameter specifications of 8 inches and 12 inches. In order to adapt to the existing production process, the widths of the first channel 111 and the second channel 112 can be set to 8 inches and 12 inches respectively to match the fixing rings of the corresponding specifications.

[0036] In an exemplary embodiment, please refer to Figure 1 and Figure 3 As shown, the sensor assembly 21 of the detection mechanism 2 includes a first sensor 211 and a second sensor 212. Among them, the first sensor 211 is arranged above the detection channel 11 to measure the thickness of the fixing ring, and the second sensor 212 is arranged on both sides of the detection channel 11 to measure the outer diameter of the fixing ring.

[0037] In an exemplary embodiment, please refer to Figure 3 As shown, the detection mechanism 2 further includes a pressing member 26. When the first sensor 211 detects the thickness of the fixing ring, the pressing member 26 can press the detected fixing ring, so that the first sensor 211 can measure the thickness of the fixing ring after pressing. If the detected fixing ring is warped, under the pressing action of the pressing member 26, the warped fixing ring will be flattened under the pressing action of the pressing member 26, that is, the fixing ring will change from the warped state to the flattened state that fits the tabletop of the detection channel 11. That is, the thickness of the fixing ring after pressing will be different from the thickness of the fixing ring before pressing (when the fixing ring is in the warped state, the thickness detected by the first sensor 211 will be greater than the actual thickness of the fixing ring). Therefore, by measuring the thickness of the fixing ring before and after pressing with the first sensor 211, and then comparing the thicknesses of the fixing ring before and after pressing, the difference between the two thicknesses can be obtained. When the difference exceeds a preset threshold (permissible error value), it can be determined that the fixing ring is warped too much.

[0038] In an exemplary embodiment, multiple first sensors 211 can also be set to detect the thicknesses of multiple points on the fixing ring. According to the thickness difference of each point on the fixing ring, it can be determined whether the fixing ring is warped.

[0039] Specifically, the first sensor 211 and the second sensor 212 can be one of an optical sensor, an acoustic wave sensor, and an eddy current sensor. Taking the optical sensor as an example, the optical sensor emits an optical signal to the surface of the fixed ring passing through the channel and receives the optical signal reflected back by the surface of the fixed ring to measure the profile parameter information such as the thickness and outer diameter of the fixed ring. And this profile information will be transmitted to the controller 3, and the controller 3 can compare the profile parameter information with the preset standard parameters to determine whether the detected fixed ring is a good product.

[0040] In an exemplary embodiment, the detection mechanism 2 further includes a support 22 and a slide rail 23. Among them, the support 22 is erected above the detection channel 11, the slide rail 23 is arranged on the support 22 and straddles the detection channel 11, the first sensor 211 is slidably mounted on the slide rail 23, and the sensing signal of the first sensor 211 can pass through the support 22 to act on the fixed ring in the detection channel 11.

[0041] The first sensor 211 can be slidably mounted on the slide rail 23 through a slider 24 matching the slide rail 23. The slider 24 is configured to be able to slide along the slide rail 23. The first sensor 211 can be fixed to the slider 24, and the first sensor 211 is driven to slide by sliding the slider 24, so as to be applicable to detecting fixed rings with different outer diameter sizes. To enable the sensing signal of the first sensor 211 to smoothly pass through the support 22 to act on the fixed ring, a through slot 25 penetrating the upper and lower surfaces of the support 22 can be opened on the support 22, and the first sensor 211 is arranged corresponding to the through slot 25 so that the sensing signal of the first sensor 211 can pass through the through slot 25 to act on the fixed ring.

[0042] In an exemplary embodiment, please refer to Figure 4 As shown, a stop block 13 is further provided on the machine base 1, and the stop block 13 is arranged downstream of the detection mechanism 2. The stop block 13 can rise above the table surface of the detection channel 11 when the detection mechanism 2 detects the fixed ring to block and stagnate the fixed ring in the detection area of the detection mechanism 2 to ensure the detection accuracy. And after the detection mechanism 2 completes the detection, the stop block 13 can descend below the table surface of the detection channel 11 to release the block on the fixed ring so that the fixed ring after the detection can continue to slide down along the detection channel 11.

[0043] In an exemplary embodiment, a loading mechanism 41 and a paddle mechanism 42 are further provided on the machine base 1. Among them, the loading mechanism 41 is arranged corresponding to the entrance of the detection channel 11 and is used for placing the fixing rings to be detected. The paddle mechanism 42 is used to dial the fixing rings to be detected on the loading mechanism 41 into the detection channel 11. Multiple fixing rings to be detected can be pre-placed on the loading mechanism 41. For example, 50 fixing rings can be placed on the loading mechanism 41 at one time, and then the paddle mechanism 42 dials the fixing rings on the loading mechanism 41 into the detection channel 11 one by one, so as to realize automatic feeding of the fixing rings without manual feeding by the staff. To ensure that the fixing rings can be smoothly dialed into the detection channel 11, the loading mechanism 41 is arranged adjacent to the entrance of the detection channel 11, and the fixing rings placed in the loading mechanism 41 are set to have the same inclination angle as the detection table.

[0044] In an exemplary embodiment, the loading mechanism 41 includes a loading table 411 and a slide rail 412. The loading table 411 is slidably mounted on the slide rail 412 and is driven by a driving mechanism. The loading table 411 is used to accommodate the fixing rings to be detected. The driving mechanism is controlled by a program. Each time the paddle mechanism 42 dials a fixing ring into the detection channel 11, the program will control the loading table 411 to rise a predetermined height along the slide rail 412 to facilitate the paddle mechanism 42 to perform the next dialing operation.

[0045] In an exemplary embodiment, a marking mechanism 5 is further provided on the machine base 1. The marking mechanism 5 is connected to the controller 3 and is arranged corresponding to the detection channel 11. And when the controller 3 determines that a fixing ring is a defective product, the controller 3 can control the marking mechanism 5 to print a defective product identification on the defective fixing ring, so as to distinguish the defective fixing rings through the defective product identification and avoid the marked defective fixing rings from being put into use again.

[0046] In an exemplary embodiment, please refer to Figure 1 and Figure 5 As shown, a receiving box 6 is further provided on the machine base 1. The receiving box 6 is arranged corresponding to the exit of the detection channel 11 and is used to receive the fixing rings sent out from the exit. After the fixing rings are detected, they can be sent out from the exit of the detection channel 11. The receiving box 6 is arranged at the exit of the detection channel 11 and can receive the sent-out fixing rings to realize automatic material collection.

[0047] In an exemplary embodiment, the receiving box 6 includes a first receiving cavity 61 and a second receiving cavity 62 which are stacked and used for receiving the good product fixing rings and the defective product fixing rings respectively. The receiving box 6 is installed on a lifting mechanism 7, and the lifting mechanism 7 is connected to the controller 3. When the detected fixing ring is determined to be a good product by the controller 3, the controller 3 controls the lifting mechanism 7 to move the first receiving cavity 61 to the outlet of the detection channel 11 to receive the good product fixing rings. When the detected fixing ring is determined to be a defective product by the controller 3, the controller 3 controls the lifting mechanism 7 to move the second receiving cavity 62 to the outlet of the detection channel 11 to receive the defective product fixing rings. By separately storing the good products and the defective products in the first receiving cavity 61 and the second receiving cavity 62, mixing of materials can be avoided, and the risk of losses in subsequent production operations can be reduced.

[0048] In an exemplary embodiment, a protective cover 8 is further provided on the machine base 1. The protective cover 8 covers the outer periphery of the detection channel 11 to isolate fine dust, so as to avoid interference of fine dust with the detection results when the detection device performs detection operations. The protective cover 8 can be made of transparent material, so that the staff can directly observe the inside through the protective cover 8, which is convenient for the staff to timely discover abnormal conditions.

[0049] In an exemplary embodiment, the fixing ring detection device further includes an operation panel 91 and a display screen 92 which are connected to the controller 3. The staff can start and stop the fixing ring detection device and set relevant parameters through the operation panel 91. The controller 3 can be a PLC controller. The controller 3 can perform data statistics according to the fixing ring detection results and display the corresponding data on the display screen 92.

[0050] The present invention will be further described below in combination with specific usage scenarios:

[0051] Place the fixing ring to be detected on the loading mechanism 41 of the fixing ring detection device, and then start the detection device; the paddle mechanism 42 sequentially paddles the fixing rings to be detected into the detection channel 11 of the machine base 1, and the fixing rings to be detected slide along the detection channel 11; when passing through the detection mechanism 2, the sensor assembly 21 measures the shape information of the fixing rings to be detected, and the measured shape information is transmitted to the controller 3; the controller 3 determines whether the fixing ring is a good product according to the shape information, and controls the marking mechanism 5 and the receiving box 6 to mark and classify and collect the fixing rings according to the judgment result.

[0052] In summary, for the fixed ring detection device provided by the present invention, the thickness and outer diameter of the fixed ring can be detected by the sensor assembly 21. Abnormalities in the outer diameter, thickness (too thick or too thin), and warpage of the fixed ring can all be detected, with higher and more accurate detection efficiency. Moreover, automatic feeding can be achieved through the setting of the paddle mechanism 42. The marking mechanism 5 can mark defective products to prevent them from being put into use again. The receiving box 6 can classify and collect defective products and non-defective products, avoiding material mixing and facilitating future access.

[0053] The foregoing description of specific exemplary embodiments of the invention has been presented for purposes of illustration and exemplification. These descriptions are not intended to limit the invention to the precise forms disclosed, and it is apparent that, according to the above teaching, many changes and variations are possible. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the invention and its practical applications, so that those skilled in the art can implement and utilize the various different exemplary embodiments of the invention, as well as various different selections and changes. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. A fixed ring detection device, characterized in that, comprising: a base having a detection channel through which a fixed ring can pass; a detection mechanism provided on the base, the detection mechanism including a sensor assembly and a pressing member corresponding to the detection channel, the sensor assembly being used to measure the external shape information of the fixed ring passing through the detection channel, the sensor assembly including a first sensor for measuring the thickness of the fixed ring, and the pressing member being able to press the fixed ring to be detected when the first sensor detects the thickness of the fixed ring, so that the fixed ring is flattened under the pressing action of the pressing member; and a controller connected to the sensor assembly and used to judge whether the fixed ring is a good product according to the external shape information; wherein, the thickness of the fixed ring before and after pressing is measured by the first sensor, the thicknesses of the fixed ring before and after pressing are compared to obtain the thickness difference of the fixed ring before and after pressing; when the thickness difference exceeds a preset threshold, it is determined that the warpage of the fixed ring is too large.

2. The fixed ring detection device according to claim 1, characterized in that, the sensor assembly includes a second sensor, the first sensor is provided above the detection channel, and the second sensor is provided on both sides of the detection channel for measuring the outer diameter of the fixed ring.

3. The fixed ring detection device according to claim 2, characterized in that, the detection mechanism further includes a support and a slide rail, the support is erected above the detection channel, the slide rail is provided on the support and straddles the detection channel, the first sensor is slidably installed on the slide rail, and the induction signal of the first sensor can pass through the support to act on the fixed ring in the detection channel.

4. The fixed ring detection device according to claim 1, characterized in that, an adjustment mechanism is further provided on the base, and the adjustment mechanism is used to adjust the width of the detection channel to match fixed rings of different outer diameter sizes.

5. The fixed ring detection device according to claim 1, characterized in that, a loading mechanism and a paddle mechanism are further provided on the base, the loading mechanism is provided corresponding to the entrance of the detection channel and is used to place the fixed ring to be detected, and the paddle mechanism is used to dial the fixed ring to be detected on the loading mechanism into the detection channel.

6. The fixed ring detection device according to claim 1, characterized in that, a marking mechanism is further provided on the base, the marking mechanism is connected to the controller and is provided corresponding to the detection channel; when the fixed ring is determined by the controller to be a defective product, the controller controls the marking mechanism to print a defective product identification on the defective fixed ring.

7. The fixed ring detection device according to claim 1, characterized in that, a receiving box is further provided on the base, and the receiving box is provided corresponding to the exit of the detection channel and is used to receive the fixed ring sent out from the exit.

8. The fixed ring detection device according to claim 7, characterized in that, The receiving box includes a first receiving cavity for receiving the qualified product fixing rings and a second receiving cavity for receiving the unqualified product fixing rings, which are stacked. The receiving box is installed on a lifting mechanism, and the lifting mechanism is connected to a controller; When the fixing ring is determined to be a qualified product by the controller, the controller controls the lifting mechanism to move the first receiving cavity to the outlet of the detection channel to receive the qualified product fixing ring; When the fixing ring is determined to be an unqualified product by the controller, the controller controls the lifting mechanism to move the second receiving cavity to the outlet of the detection channel to receive the unqualified product fixing ring.

9. The fixing ring detection device according to any one of claims 1 to 8, characterized in that, a protective cover is further provided on the machine base, and the protective cover covers the periphery of the detection channel to isolate fine dust.

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