Mask assembly and manufacturing apparatus for display device

Abstract

A mask assembly and a manufacturing apparatus of a display device are disclosed. The present invention includes a mask frame equipped with a first opening portion, a support member arranged in at least one of a first direction and a second direction and disposed in the mask frame to divide the first opening portion into at least one second opening portion and at least one third opening portion, and a division member disposed to overlap the support member.

Description

Technical Field

[0001] Embodiments of the present invention relate to an apparatus and method, and more specifically to an apparatus for manufacturing a mask assembly and a display device. Background Technology

[0002] Mobile electronic devices are becoming increasingly popular. Besides small electronic devices like mobile phones, tablet computers are also gaining widespread use as mobile electronic devices.

[0003] Such mobile electronic devices include display devices to support various functions and to provide users with visual information such as images or videos. Recently, as other components used to drive the display devices have been miniaturized, the proportion of display devices in electronic devices has been gradually increasing, and structures that can be bent from a flat state to a predetermined angle are also being developed.

[0004] For the mask assembly used to manufacture the above-mentioned display device, the resolution of the display device and the shape of the image realized by the display device can be different depending on the degree of non-deformation during the deposition process. Summary of the Invention

[0005] Typically, when manufacturing display devices with different display areas, different mask assemblies can be used. In such cases, separate mask assemblies are required, and after manufacturing one display device, the mask assembly can be replaced to manufacture other display devices. This manufacturing method not only consumes considerable manufacturing time but also complicates the manufacturing process. Therefore, embodiments of the present invention provide a mask assembly and a display device manufacturing apparatus with a simpler manufacturing process that can manufacture display devices with display areas of different sizes.

[0006] An embodiment of the present invention discloses a mask assembly, comprising: a mask frame having a first opening; a support member arranged along at least one of a first direction and a second direction and disposed on the mask frame to divide the first opening into at least one second opening and at least one third opening; and a dividing member arranged to overlap with the support member.

[0007] In this embodiment, the width of the supporting component can be less than or equal to the width of the dividing component.

[0008] In this embodiment, the supporting components may include: a first supporting component arranged along the first direction; and a second supporting component arranged along the second direction.

[0009] In this embodiment, the dividing component may include: a first dividing component arranged on the first supporting component; and a second dividing component arranged on the second supporting component.

[0010] In this embodiment, the area of ​​the second opening and the area of ​​the third opening can be different from each other on the plane.

[0011] In this embodiment, it may also include a mask sheet to cover at least one of the second opening and the third opening.

[0012] In this embodiment, the mask sheet may include: a first mask sheet that covers the second opening; and a second mask sheet that covers the third opening.

[0013] Another embodiment of the present invention discloses a manufacturing apparatus for a display device, including a mask assembly; a cavity on which the mask assembly and a substrate are disposed; and a deposition source disposed inside the cavity facing the mask assembly. The mask assembly includes: a mask frame having a first opening; a support member arranged along at least one of a first direction and a second direction and disposed on the mask frame to divide the first opening into at least one second opening and at least one third opening; and a dividing member arranged to overlap with the support member.

[0014] In this embodiment, the width of the supporting component can be less than or equal to the width of the dividing component.

[0015] In this embodiment, the supporting components may include: a first supporting component arranged along the first direction; and a second supporting component arranged along the second direction.

[0016] In this embodiment, the dividing component may include: a first dividing component arranged on the first supporting component; and a second dividing component arranged on the second supporting component.

[0017] In this embodiment, the area of ​​the second opening and the area of ​​the third opening can be different from each other on the plane.

[0018] In this embodiment, the mask assembly may further include a mask sheet that covers at least one of the second opening and the third opening.

[0019] In this embodiment, the mask sheet may include: a first mask sheet that covers the second opening; and a second mask sheet that covers the third opening.

[0020] Another embodiment of the present invention can provide a method for manufacturing a mask assembly, comprising the following steps: arranging a mask frame equipped with a first opening; arranging a support member in a manner that extends through the first opening along at least one of a first direction and a second direction; and arranging a dividing member to overlap with the support member.

[0021] In this embodiment, the width of the supporting component can be less than or equal to the width of the dividing component.

[0022] In this embodiment, the step of arranging the support component may include the following steps: arranging the first support component along the first direction; and arranging the second support component along the second direction.

[0023] In this embodiment, the step of arranging the support component may further include the following step: welding the first support component and the second support component to each other at the portion where the first support component and the second support component intersect.

[0024] In this embodiment, the step of arranging the dividing components may include the following steps: arranging the first dividing component to overlap with the first supporting component; and arranging the second dividing component to overlap with the second supporting component.

[0025] In this embodiment, the following step may also be included: removing a portion of at least one of the supporting component and the dividing component.

[0026] Other aspects, features, and advantages beyond those described above will become clear from the accompanying drawings, claims, and detailed description of the invention.

[0027] Such ordinary and specific aspects can be implemented using systems, methods, computer programs, or a combination of systems, methods, and computer programs.

[0028] The mask assembly of embodiments of the present invention can deposit deposits on a substrate with a precise pattern. The manufacturing method of the mask assembly of embodiments of the present invention can manufacture a mask assembly having a predetermined pattern.

[0029] The manufacturing apparatus for the display device according to embodiments of the present invention is capable of manufacturing display devices having precise patterns. Attached Figure Description

[0030] Figure 1 This is a cross-sectional view showing a manufacturing apparatus for a display device according to an embodiment of the present invention.

[0031] Figure 2 This is a perspective view showing a mask assembly according to an embodiment of the present invention.

[0032] Figures 3 to 9It is shown Figure 2 A plan view of the manufacturing method of the mask assembly shown.

[0033] Figure 10 This is a plan view illustrating a mask assembly according to another embodiment of the present invention.

[0034] Figure 11 This is a plan view illustrating a display device according to an embodiment of the present invention.

[0035] Figure 12 It is along Figure 11 A sectional view taken by the A-A' line.

[0036] Explanation of reference numerals in the attached figures:

[0037] 20: Display device

[0038] 21: Substrate

[0039] 100: Manufacturing apparatus for display devices

[0040] 110: Cavity

[0041] 120: Magnetic force generation part

[0042] 131: First Support Section

[0043] 132: Second Support Section

[0044] 140: Filming Department

[0045] 160: Sediment source

[0046] 170: Pressure Regulation Section

[0047] 200: Mask assembly

[0048] 210: Mask frame

[0049] 220: Mask sheet

[0050] 231: First support component

[0051] 232: Second support component

[0052] 233: First dividing component

[0053] 234: Second dividing component Detailed Implementation

[0054] This invention can be modified in various ways and has multiple embodiments. Specific embodiments are illustrated in the accompanying drawings and described in detail in specific implementation details. References and Appendix Figure 1The embodiments described in detail below will clearly demonstrate the effects and features of the present invention, as well as the methods for achieving said effects and features. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various forms.

[0055] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing the invention with reference to the accompanying drawings, the same or corresponding constituent elements will be given the same reference numerals and repeated descriptions thereof will be omitted.

[0056] In the following embodiments, terms such as "first" and "second" are not used in a limiting sense, but are used for the purpose of distinguishing one constituent element from other constituent elements.

[0057] In the following embodiments, the singular expression includes the plural expression unless otherwise explicitly indicated in the context.

[0058] In the following embodiments, terms such as "comprising" or "having" indicate the presence of the features or constituent elements described in the specification, rather than pre-excluding the possibility of adding more than one other feature or constituent element.

[0059] In the following embodiments, when referring to a portion of a membrane, region, constituent element, etc., located "above" or "on top of" another portion, it includes not only the case of being "immediately above" the other portion, but also the case of other membranes, regions, constituent elements, etc., being sandwiched in between.

[0060] For ease of explanation, the sizes of the constituent elements in the accompanying drawings may be exaggerated or reduced. For example, for ease of explanation, the sizes and thicknesses of the various components shown in the drawings are arbitrarily depicted, and therefore the invention is not necessarily limited to the content shown in the drawings.

[0061] In the following embodiments, the x-axis, y-axis, and z-axis are not limited to the three axes of a Cartesian coordinate system, but can be interpreted to include their broad meaning. For example, while the x-axis, y-axis, and z-axis may be perpendicular to each other, they may also refer to different directions that are not perpendicular to each other.

[0062] Where an embodiment can be implemented in different ways, a particular process sequence may be performed in a different order than that described. For example, two processes described consecutively may be performed substantially simultaneously, or they may be performed in the reverse order of the description.

[0063] Figure 1 This is a cross-sectional view showing a manufacturing apparatus for a display device according to an embodiment of the present invention. Figure 2 This is a perspective view showing a mask assembly according to an embodiment of the present invention.

[0064] Reference Figure 1 as well as Figure 2 The manufacturing apparatus 100 for the display device may include a cavity 110, a magnetic force generating unit 120, a first support unit 131, a second support unit 132, an imaging unit 140, a mask assembly 200, a deposition source 160, and a pressure regulating unit 170.

[0065] The cavity 110 can form a space inside, and the cavity 110 can be formed as a partial opening. A gate valve 110A can be installed in the opening of the cavity 110 to selectively open and close the opening of the cavity 110.

[0066] The magnetic force generating unit 120 can be fixed to the cavity 110. In this case, the magnetic force generating unit 120 can include at least one of an electromagnet and a permanent magnet to selectively generate a magnetic field. The magnetic force generating unit 120 can tightly attach the mask assembly 200 to the display substrate D side.

[0067] The first support portion 131 can support the display substrate D. In this case, the first support portion 131 can support the display substrate D in various ways. For example, the first support portion 131 may include an electrostatic chuck or an adhesive chuck. In such a case, the first support portion 131 and the magnetic force generating portion 120 can be integrated. As another embodiment, the first support portion 131 may include a frame that supports and places a portion of the display substrate D, or a clamp that holds and fixes a portion of the display substrate D. The first support portion 131 is not limited to the above, and may include all devices capable of supporting the display substrate D. However, for ease of explanation, the following detailed description will focus on the case where the first support portion 131 includes a clamp that holds the display substrate D.

[0068] The mask assembly 200 can be placed on and supported by the second support portion 132. At this time, the second support portion 132 can finely adjust the mask assembly 200 in at least two directions that are different from each other.

[0069] The imaging unit 140 can capture the positions of the display substrate D and the mask assembly 200. At this time, based on the image captured by the imaging unit 140, at least one of the display substrate D and the mask assembly 200 can be moved to align the display substrate D and the mask assembly 200.

[0070] The mask assembly 200 may include a mask frame 210, support components 231 and 232, dividing components 233 and 234, and a mask sheet 220.

[0071] The mask frame 210 may include multiple frames connected to each other. These multiple frames may form a quadrilateral shape. In this case, the mask frame 210 may include a first opening 211 in its central portion. The first opening 211 may be quadrilateral in shape. For example, the first opening 211 may be rectangular or square. The mask frame 210 may have a long side and a short side. For example, the long side of the mask frame 210 may be along... Figure 2 Arranged in the X direction, the short side of the mask frame 210 can be along... Figure 2 Arranged in the Y direction.

[0072] At least one of the support members 231, 232 and the dividing members 233, 234 may be arranged in the first opening 211 to divide the first opening 211 into a plurality of openings (not marked).

[0073] For example, support members 231, 232 may be configured as a plurality and arranged along a first direction and a second direction, which are different from each other. Support members 231, 232 may include those along the first direction (e.g., Figure 2 The first support member 231 is arranged in the Y-axis direction and along the second direction (e.g., Figure 2 The second support member 232 is arranged in the X-axis direction. At this time, the first support member 231 and the second support member 232 can be arranged on the mask frame 210 and fixed to the mask frame 210. Furthermore, the first support member 231 and the second support member 232 can be arranged to intersect each other, and can be connected to each other at the intersecting part.

[0074] The first support member 231 and the second support member 232 described above can support the mask frame 210 in a manner that prevents deformation of the mask frame 210. Furthermore, an opening (e.g., a second opening AR1-2 or a third opening AR2-2) is formed by the first support member 231 and the second support member 232 dividing the first opening 211. Figure 5 This can correspond to the display area of ​​the aforementioned display device. In this case, the first support member 231 and the second support member 232 divide the first opening 211 into multiple openings, thereby enabling the deposition material to be guided by a mask assembly 200 in a manner corresponding to multiple display areas. For example, the first support member 231 and the second support member 232 can divide the first opening 211 into a second opening AR1-2 and a third opening AR2-2. In this case, at least one of the shapes and sizes (or areas) of the second opening AR1-2 and the third opening AR2-2 can be different from each other. For ease of explanation, the following detailed description will focus on the case where the second opening AR1-2 and the third opening AR2-2 have the same shape but different sizes.

[0075] The number of the first support member 231 and the second support member 232 described above can be adjusted according to the number of at least one of the second opening AR1-2 and the third opening AR2-2. For example, as an embodiment, multiple first support members 231 and second support members 232 can be provided. In this case, three second openings AR1-2 can be arranged along the first direction, and one third opening AR2-2 can be arranged along the second direction. In this case, the third opening AR2-2 can be adjacent to the second openings AR1-2 along the second direction. At this time, the number of second openings AR1-2 and the number of third openings AR2-2 are not limited to the above and can be formed in various ways.

[0076] As described above, when multiple first support members 231 are provided, the lengths of at least a portion of the multiple first support members 231 and the lengths of other portions of the multiple first support members 231 may be different from each other, or the lengths of the multiple first support members 231 may all be the same or different from each other. When multiple second support members 232 are provided, the lengths of a portion of the multiple second support members 232 and the lengths of other portions of the multiple second support members 232 may be different from each other. As another embodiment, the lengths of the multiple second support members 232 may also be all the same or different from each other. In this case, the lengths of the first support members 231 or the lengths of the second support members 232 may be formed differently depending on the size of the second opening AR1-2 or the size of the third opening AR2-2.

[0077] Dividing components 233 and 234 can be arranged on supporting components 231 and 232. In this case, dividing components 233 and 234 can be arranged on at least one of the supporting components 231 and 232. For ease of explanation, the following detailed description will focus on the case where dividing components 233 and 234 are arranged on all supporting components 231 and 232.

[0078] When multiple dividing components 233 and 234 are provided, the multiple dividing components 233 and 234 may include a first dividing component 233 and a second dividing component 234. At least one of the first dividing component 233 and the second dividing component 234 described above may be provided in multiples. In such a case, the number of first dividing components 233 and the number of second dividing components 234 may correspond to the number of first support components 231 and the number of second support components 232.

[0079] The first dividing member 233 can be arranged on the first supporting member 231. In this case, the first dividing member 233 can be arranged in the same direction as the first supporting member 231. In this case, the width of the first dividing member 233 can be different from the width of the first supporting member 231. For example, the width of the first supporting member 231 can be less than the width of the first dividing member 233. In this case, when viewed from a plane, the first supporting member 231 can be completely obscured by the first dividing member 233. In the above case, it can be arranged along the length direction of the first supporting member 231 or in a direction perpendicular to the length direction of the first dividing member 233 (e.g., along the length direction of the first supporting member 231 or perpendicular to the length direction of the first dividing member 233). Figure 2 Width is measured in the X-axis direction.

[0080] The second dividing member 234 can be arranged to correspond to the second supporting member 232. In this case, the width of the second dividing member 234 can be different from the width of the second supporting member 232. Specifically, the width of the second supporting member 232 can be less than the width of the second dividing member 234. In this case, when viewed from a plane, the second dividing member 234 can completely obscure the second supporting member 232.

[0081] At least one of the first dividing member 233 and the second dividing member 234 described above can be provided as multiple. In this case, when multiple first dividing members 233 are provided, the lengths of a portion of the multiple first dividing members 233 and the lengths of another portion of the multiple first dividing members 233 can be different from each other. As another embodiment, the length of each of the multiple first dividing members 233 can also be the same as or different from each other. In this case, the length of each first dividing member 233 can be the same as or similar to the length of the corresponding first support member 231. When multiple second dividing members 234 are provided, the length of a portion of the multiple second dividing members 234 can be different from the length of another portion of the multiple second dividing members 234. As another embodiment, the length of each of the multiple second dividing members 234 can be different from each other or the same as each other. The lengths of the first dividing members 233 and the second dividing members 234 described above can vary depending on at least one of the shape and size of the second opening AR1-2 or at least one of the shape and size of the third opening AR2-2.

[0082] The first dividing member 233 and the second dividing member 234 described above can make at least one of the shapes and sizes of the second opening AR1-2 and the third opening AR2-2 correspond to a preset value. In this case, the first dividing member 233 and the second dividing member 234 can accurately define the edge of at least one of the second opening AR1-2 and the third opening AR2-2.

[0083] Mask sheet 220 may be arranged on mask frame 210. In this case, mask sheet 220 may be provided as at least one. For example, mask sheet 220 may include a first mask sheet 221 and a second mask sheet 222.

[0084] The first mask 221 can be arranged to cover the second opening AR1-2. In this case, the first mask 221 can be arranged to completely cover the entire second opening AR1-2. As another embodiment, multiple first mask 221s can be provided, and multiple first mask 221s can also cover a second opening AR1-2. In this case, multiple first mask 221s can be arranged to be adjacent to each other along the second direction. As yet another embodiment, the first mask 221 can also be arranged to cover at least two second openings AR1-2. In this case, the first mask 221 can cover the entire second openings AR1-2 that are adjacent to each other along at least one of the first and second directions.

[0085] The second mask 222 can be arranged to cover the third opening AR2-2. In this case, one second mask 222 can be arranged to completely cover the entire third opening AR2-2. As another embodiment, one second mask 222 can also be arranged to cover at least two third openings AR2-2.

[0086] The first mask 221 or the second mask 222 may be arranged along a first direction. For example, the first mask 221 or the second mask 222 may be arranged along the short side direction of the mask frame 210 (e.g., Figure 2 The first mask 221 and the second mask 222 can be arranged to be adjacent to each other along the second direction.

[0087] The first mask sheet 221 and the second mask sheet 222 can be fixed to the mask frame 210 under tension. In this case, the first mask sheet 221 and the second mask sheet 222 can be formed in a stick shape. At least one of the first mask sheet 221 and the second mask sheet 222 can be provided in multiples. In this case, each first mask sheet 221 or each second mask sheet 222 can be arranged on the mask frame 210 such that the short side direction of the mask frame 210 is the same as the long side direction of the first mask sheet 221 or the long side direction of the second mask sheet 222. Furthermore, multiple first mask sheets 221 can be arranged adjacent to each other, and multiple first mask sheets 221 can be arranged to be adjacent to each other along the long side direction of the mask frame 210. When multiple second mask sheets 222 are provided, multiple second mask sheets 222 can also be adjacent to each other along the long side direction of the mask frame 210 in the same way as the first mask sheets 221. The first mask piece 221 can be fixed to the mask frame 210 in a stretched state. For example, both ends of each first mask piece 221 can be fixed to at least one of the mask frame 210 and the second support member 232. As another embodiment, when multiple second support members 232 are provided, both ends of the first mask piece 221 can also be fixed to each adjacent second support member 232. For ease of explanation, the following detailed description will focus on the case where both ends of the first mask piece 221 are fixed to the mask frame 210 and the second support member 232, respectively.

[0088] In the above case, the first mask 221 and the second mask 222 are fixed in a manner that separates them from each other in the mask frame 210, thereby preventing the first mask 221 and the second mask 222 from sagging due to their respective weights.

[0089] Furthermore, when heat is applied to the mask frame 210, the deformation of the mask frame 210 can be minimized by the first support member 231 and the second support member 232.

[0090] The deposition source 160 allows the deposited material to evaporate after being inserted inside. At this time, the deposition source 160 may be equipped with a heater 160A, and the deposited material can be evaporated by the heat applied from the heater 160A.

[0091] The sedimentation source 160 can be formed in various forms. For example, the sedimentation source 160 can be a point sedimentation source with a circular inlet for discharging sediment. Furthermore, the sedimentation source 160 can be a linear sedimentation source, which is relatively long and has multiple inlets or an elongated pore shape. For ease of explanation, the following detailed description will focus on the case where the sedimentation source 160 is arranged opposite a point on the mask assembly 200 and is a point sedimentation source.

[0092] The pressure regulating unit 170 can be connected to the cavity 110 to regulate the pressure inside the cavity 110 to be similar to atmospheric pressure or vacuum. In this case, the pressure regulating unit 170 may include a connecting pipe 171 connected to the cavity 110 and a pressure regulating pump 172 arranged on the connecting pipe 171.

[0093] Furthermore, observing the method of manufacturing a display device (not shown) using the above-described display device manufacturing apparatus 100, a display substrate D can be prepared.

[0094] The pressure regulating unit 170 can maintain the interior of the cavity 110 at atmospheric pressure, and after the gate valve 110A is opened, the display substrate D and the deformation-correcting mask assembly 200 can be inserted into the cavity 110. At this time, a separate robotic arm, shuttle, etc. can be provided inside or outside the cavity 110 to move the display substrate D and the mask assembly 200.

[0095] The pressure regulating unit 170 can maintain the interior of the cavity 110 at a near-vacuum level. Furthermore, at least one of the first support unit 131 and the second support unit 132 can be operated to adjust the spacing between the display substrate D and the mask assembly 200 to a preset spacing. The imaging unit 140 can image the display substrate D and the mask assembly 200, and finely drive the first support unit 131 and the second support unit 132 to fine-tune at least one of the display substrate D and the mask assembly 200, thereby aligning the display substrate D and the mask assembly 200.

[0096] Heater 160A can operate to supply deposited material from deposition source 160 to mask assembly 200. The deposited material through mask assembly 200 can be deposited on display substrate D in a predetermined pattern.

[0097] During the process described above, at least one of the deposition source 160 and the display substrate D can perform linear movement. Alternatively, deposition can be performed with both the deposition source 160 and the display substrate D completely stopped. For ease of explanation, the following detailed description will focus on the scenario where deposition is performed with both the deposition source 160 and the display substrate D completely stopped.

[0098] As described above, the deposit material provided from the deposition source 160 can be deposited onto the display substrate D after passing through the mask assembly 200 to form at least one of the intermediate layers, which will be described later. As another embodiment, the deposit material provided from the deposition source 160 can be formed into the opposing electrode, which will be described later, after passing through the mask assembly 200. However, for ease of explanation, the following detailed description will focus on the case where at least one of the intermediate layers is formed after passing through the mask assembly 200.

[0099] As described above, after forming the intermediate layer and the opposing electrode, encapsulation components can be arranged on the opposing electrode to manufacture the display device 20 (see reference). Figure 11 ).

[0100] Therefore, the manufacturing apparatus 100 of the display device is able to form at least one of the intermediate layers with an accurate pattern, or to form opposing electrodes in an accurate area.

[0101] The manufacturing apparatus 100 for the display device accurately maintains the shapes of the second opening AR1-2 and the third opening AR2-2, thereby enabling the deposition of a deposited material onto the display substrate D in an accurate pattern.

[0102] Figures 3 to 10 It is shown Figure 2 A plan view of the manufacturing method of the mask assembly shown.

[0103] Reference Figures 3 to 10 It can be prepared by manufacturing mask frame 210, support components 231, 232, dividing components 233, 234 and mask sheet 220.

[0104] Reference Figure 3 The mask frame 210 described above may have a first opening 211 formed in the center. A first support member 231 may be arranged across this first opening 211 in the mask frame 210. In this case, the first opening 211 may be divided into multiple regions. The mask frame 210 may have a groove for inserting the first support member 231. In this case, the first support member 231 may be arranged close to the back surface of the mask frame 210. The first support member 231 may be arranged on the mask frame 210 under tension along its length, and may be fixed to the mask frame 210 by welding. In this case, a first welding point P1 may be formed on the upper surface of the first support member 231, and the first welding point P1 may be connected from the upper surface of the first support member 231 to the mask frame 210.

[0105] Reference Figure 4 If the fixing of the first support member 231 is completed, the second support member 232 can be arranged on the first support member 231. At this time, the second support member 232 can be stretched along its length and arranged in a direction different from the direction in which the first support member 231 is arranged. For example, in the first support member 231 along a first direction (e.g., Figure 4 In the case where the second support member 232 is arranged in the second direction (e.g., along the Y-axis direction), the second support member 232 can be arranged along the second direction (e.g., along the Y-axis direction). Figure 4The first support member 231 is arranged along the second direction (X-axis direction). In another embodiment, when the first support member 231 is arranged along the second direction, the second support member 232 can be arranged along the first direction. In the above case, when viewed from a plane, the first support member 231 and the second support member 232 can be arranged to intersect each other. At this time, the first support member 231 and the second support member 232 can be arranged at different heights, and the first support member 231 and the second support member 232 can contact each other at their intersecting portions in the plane. When multiple first support members 231 and multiple second support members 232 are arranged, when viewed from a plane, multiple overlapping portions of the first support member 231 and the second support member 231 can be formed. When viewed from a plane, a third welding point P3 can be formed in a portion of the multiple overlapping portions of the first support member 231 and the second support member 232, thereby fixing the first support member 231 and the second support member 232. Furthermore, a second welding point P2 can be arranged at the portion where the second support member 232 overlaps with the mask frame 210, thereby fixing the second support member 232 and the mask frame 210. In this case, the mask frame 210 can be formed with a groove to receive the second support member 232, so that the second support member 232 is arranged at a different height than the first support member 231. At this time, if multiple second support members 232 are provided, the second welding point P2 can be formed in a portion of the multiple second support members 232 or at one of the two ends of each second support member 232, thereby fixing the second support member 232 to the mask frame 210.

[0106] The first support member 231 or the second support member 232 described above can also be stacked in more than two layers. That is, multiple first support members 231 or multiple second support members 232 can be stacked in the same part.

[0107] Reference Figure 5 If the fixing of the first support member 231 and the second support member 232 is terminated, a portion of one of the multiple first support members 231 can be removed. Similarly, a portion of one of the multiple second support members 232 can be removed. By removing portions of the first support members 231 and the second support members 232, a second opening AR1-2 and a third opening AR2-2 can be formed. That is, portions of the first support members 231 and the second support members 232 that overlap with the second opening AR1-2 and the third opening AR2-2 can be removed.

[0108] Reference Figure 6A first dividing member 233 can be arranged on the first support member 231. In this case, the first dividing member 233 can be arranged on the mask frame 210 in a stretched state. In this case, the tension applied to the first dividing member 233 can be less than the tension applied to the first support member 231. In particular, in this case, when viewed from a plane, the first dividing member 233 can completely cover the first support member 231 in a manner corresponding to the edge of a predetermined second opening AR1-2 or a third opening AR2-2. Furthermore, the thickness of the first support member 231 can be different from the thickness of the first dividing member 233. The thickness of the first support member 231 can exceed the thickness of the first dividing member 233.

[0109] In the above configuration, the first dividing member 233 can be arranged on the mask frame 210, and the mask frame 210 can be provided with a groove for inserting the end of the first dividing member 233. Subsequently, the first dividing member 223 can be fixed to the mask frame 210 by welding. In this case, a fourth welding point P4 can be arranged on the first dividing member 233.

[0110] Reference Figure 7 After the first dividing member 233 is fixed to the mask frame 210, the second dividing member 234 can be stretched and arranged on the mask frame 210 to correspond to the second support member 232. In this case, multiple second dividing members 234 can be arranged, and the second dividing members 234 can be arranged spaced apart from each other. At this time, the thickness of the second dividing member 234 can be less than the thickness of the second support member 232.

[0111] The second dividing member 234 can be arranged on the mask frame 210 and fixed to the mask frame 210 by welding. At this time, the mask frame 210 can be equipped with a slot to allow the second dividing member 234 to be inserted. In the above case, a fifth welding point P5 can be arranged on the portion of the second dividing member 234 that overlaps the mask frame 210.

[0112] As described above, if the second dividing member 234 is arranged, it can overlap with the first dividing member 233 when viewed from a plane. When viewed from a plane, the overlapping portions of the second dividing member 234 and the first dividing member 233 can be fixed to each other by welding. In this case, when viewed from a plane, a sixth welding point P6 can be formed at the overlapping portion of the second dividing member 234 and the first dividing member 233. In this case, the sixth welding point P6 can be formed to sequentially penetrate the second dividing member 234, the first dividing member 233, and the second supporting member 232, so that the second dividing member 234, the first dividing member 233, and the second supporting member 232 can be connected to each other. In this case, the second dividing member 234 and the first dividing member 233 can also be connected to each other through the sixth welding point P6, and the first dividing member 233 and the second supporting member 232 can also be connected to each other by forming welding points through individual welding. However, for ease of explanation, the following description will focus on the case where the second dividing member 234, the first dividing member 233, and the second supporting member 232 are connected to each other by a welding point.

[0113] Reference Figure 8 After arranging the first dividing member 233 and the second dividing member 234, a portion of at least one of the first dividing member 233 and the second dividing member 234 that overlaps with the interior of the second opening AR1-2 or the interior of the third opening AR2-2 can be removed. In this case, the first dividing member 233 and the second dividing member 234 can divide the first opening 211 into multiple regions and can define the second opening AR1-2 and the third opening AR2-2.

[0114] In the case described above, when the second opening AR1-2 and the third opening AR2-2 are formed solely by the first support member 231 and the second support member 232, thermal deformation may occur if the mask assembly 200 is used. In particular, in the above case, the morphology (e.g., at least one of shape and size) of the second opening AR1-2 and the third opening AR2-2 differ from each other, so the first support member 231 and the second support member 232 may be arranged asymmetrically inside the first opening 211. In this case, the first support member 231 and the second support member 232 are arranged in a state of tension on the mask frame 210, so if heat is applied as described above, more deformation may occur. In such a case, the morphology of the second opening AR1-2 and the third opening AR2-2 differs from the intended morphology, making it impossible to perform precise deposition on the display substrate.

[0115] At this time, the first dividing member 233 and the second dividing member 234 are under a tension that is weaker than that of the first supporting member 231 and the second supporting member 232, and the width of the first dividing member 233 and the width of the second dividing member 234 are larger than the width of the first supporting member 231 and the width of the second supporting member 232, so that the deformation by thermal deformation can be smaller.

[0116] Reference Figure 9 After arranging the first dividing component 233 and the second dividing component 234 as described above, the mask sheet 220 can be stretched and fixed to the mask frame 210. At this time, after stretching the first mask sheet 221 and the second mask sheet 222 and arranging them on the mask frame 210 respectively, the first mask sheet 221 and the second mask sheet 222 can be fixed to the mask frame 210 by welding. In this case, the first mask sheet 221 and the second mask sheet 222 can be adjacent to each other, the first mask sheet 221 can cover the second opening AR1-2, and the second mask sheet 222 can cover the third opening AR2-2.

[0117] Therefore, the mask assembly manufacturing method can manufacture a mask assembly 200 having a second opening AR1-2 and a third opening AR2-2 corresponding to preset values.

[0118] Figure 10 This is a plan view illustrating a mask assembly according to another embodiment of the present invention.

[0119] Reference Figure 10 The mask assembly 200 may include a mask frame 210, support members 231 and 232, and dividing members 233 and 234. In this case, the mask frame 210, support members 231 and 232, and dividing members 233 and 234 may be the same as or similar to those described above. Support members 231 and 232 may include a first support member 231 and a second support member 232, and dividing members 233 and 234 may include a first dividing member 233 and a second dividing member 234.

[0120] The method of manufacturing the mask assembly 200 described above may include the methods described in the foregoing. Figures 3 to 8 The contents shown are in the same or similar order.

[0121] Counter electrodes can be formed on the display substrate D using the mask assembly 200 described above. At this time, the second opening AR1-2 and the third opening AR2-2 may include at least one of different sizes and shapes.

[0122] Therefore, the mask assembly 200 can form opposing electrodes in a predetermined area of ​​the display substrate D.

[0123] Figure 11 This is a plan view illustrating a display device according to an embodiment of the present invention. Figure 12 It is along Figure 11 A sectional view taken by the A-A' line.

[0124] Reference Figure 11 as well as Figure 12 The display device 20 can define a display area DA and a non-display area NDA surrounding the display area DA on the substrate 21. A light-emitting component can be arranged in the display area DA, and power wiring (not shown) can be arranged in the non-display area NDA. Furthermore, a pad C can be arranged in the non-display area NDA.

[0125] The display device 20 may include a display substrate D and an encapsulation component (not shown). In this case, the display substrate D may include a substrate 21, a thin-film transistor (TFT), a passivation film 27, and a pixel electrode 28A. As another embodiment, the display substrate D may also include at least one of the following layers: substrate 21, TFT, passivation film 27, pixel electrode 28A, and an intermediate layer 28B. As one embodiment, the encapsulation component may include: an encapsulation substrate (not shown) arranged facing the substrate 21; and a sealing component (not shown) disposed between the substrate 21 and the encapsulation substrate. In this case, the organic light-emitting diode (OLED) 28 disposed on the substrate 21 can be sealed by the sealing component and the encapsulation substrate. As another embodiment, the encapsulation component may include a thin-film encapsulation layer E. For ease of explanation, the following detailed description will focus on the case where the display substrate D includes the substrate 21, TFT, passivation film 27, and pixel electrode 28A. Furthermore, for ease of explanation, the detailed description will focus on the case where the encapsulation component includes the thin-film encapsulation layer E.

[0126] The substrate 21 may comprise glass or a polymer resin. The polymer resin may include polymers such as polyethersulfone, polyacrylate, polyetherimide, polyethylene naphalate, polyethylene terephthalate, polyphenylene sulfide, polyarylate, polyimide, polycarbonate, or cellulose acetate propionate (CAP). The substrate 21 comprising the polymer resin may have flexible, rollable, or bendable properties. The substrate 21 may be a multilayer structure comprising a layer containing the aforementioned polymer resin and an inorganic layer (not shown).

[0127] A thin-film transistor (TFT) can be formed on the substrate 21, and a passivation film 27 is formed to cover the TFT. An organic light-emitting element 28 can be formed on this passivation film 27.

[0128] A buffer layer 22, composed of organic and / or inorganic compounds, can also be formed on the upper surface of the substrate 21. This buffer layer can utilize SiO₂. x (x≥1), SiN x (x≥1) is formed.

[0129] After an active layer 23 with a predetermined pattern is formed on the buffer layer 22, the active layer 23 is buried by the gate insulating layer 24. The active layer 23 has a source region 23A and a drain region 23C, and includes a channel region 23B therebetween.

[0130] Such an active layer 23 can be formed to contain a variety of materials. For example, the active layer 23 can contain inorganic semiconductor materials such as amorphous silicon or crystalline silicon. As another example, the active layer 23 can contain oxide semiconductors. As yet another example, the active layer 23 can contain organic semiconductor materials. However, for ease of explanation, the following detailed description will focus on the case where the active layer 23 is formed using amorphous silicon.

[0131] Such an active layer 23 can be formed as follows: after forming an amorphous silicon film on the buffer layer 22, this film is crystallized to form a polycrystalline silicon film, and this polycrystalline silicon film is patterned. The active layer 23 has its source region 23A and drain region 23C doped with dopants depending on the type of TFT, such as a driving TFT (not shown) or a switching TFT (not shown).

[0132] A gate electrode 25 corresponding to the active layer 23 and an interlayer insulating layer 26 buried therein are formed on the upper surface of the gate insulating layer 24.

[0133] Furthermore, after forming contact hole H1 in interlayer insulating layer 26 and gate insulating layer 24, source electrode 27A and drain electrode 27B are formed on interlayer insulating layer 26 in a manner that contacts source region 23A and drain region 23C, respectively.

[0134] A passivation film 27 is formed on the upper part of the thin-film transistor thus formed, and a pixel electrode 28A of an organic light-emitting element (OLED) 28 is formed on the upper part of this passivation film 27. This pixel electrode 28A contacts the drain electrode 27B of the TFT via a via H2 formed in the passivation film 27. The passivation film 27 can be formed as an inorganic and / or organic material, a single layer or two or more layers, or it can be formed as a planarization film in a manner that flattens the upper surface regardless of the curvature of the lower film; conversely, it can be formed to be curved according to the curvature of the lower film. Furthermore, preferably, this passivation film 27 is formed using a transparent insulator to achieve a resonance effect.

[0135] After forming pixel electrode 28A on passivation film 27, pixel definition film 29 is formed using organic and / or inorganic materials to cover pixel electrode 28A and passivation film 27, and pixel definition film 29 is opened to expose pixel electrode 28A.

[0136] Furthermore, at least an intermediate layer 28B and a counter electrode 28C are formed on the pixel electrode 28A. Alternatively, the counter electrode 28C may be formed on the entire surface of the display substrate D. In this case, the counter electrode 28C may be formed on the intermediate layer 28B and the pixel definition film 29. For ease of explanation, the following detailed description will focus on the case where the counter electrode 28C is formed on the intermediate layer 28B and the pixel definition film 29.

[0137] The pixel electrode 28A functions as an anode electrode, and the opposing electrode 28C functions as a cathode electrode. Of course, it is fine if the polarities of these pixel electrodes 28A and opposing electrodes 28C are opposite.

[0138] The pixel electrode 28A and the opposing electrode 28C are insulated from each other by the intermediate layer 28B, and light emission is achieved in the organic light-emitting layer by applying voltages of different polarities to the intermediate layer 28B.

[0139] The intermediate layer 28B may be equipped with an organic emission layer. As another optional example, the intermediate layer 28B may be equipped with an organic emission layer, and may also be equipped with at least one of a hole injection layer (HIL), a hole transport layer, an electron transport layer, and an electron injection layer. This embodiment is not limited to this; the intermediate layer 28B may be equipped with an organic emission layer, and may also be equipped with various other functional layers (not shown).

[0140] Multiple intermediate layers 28B as described above can be configured, and multiple intermediate layers 28B can form a display area DA. At this time, the multiple intermediate layers 28B can be arranged to be separated from each other within the display area DA.

[0141] Furthermore, a unit pixel is composed of multiple sub-pixels, which can emit light of various colors. For example, multiple sub-pixels can be equipped with sub-pixels that emit red, green, and blue light respectively, or sub-pixels that emit red, green, blue, and white light (not labeled). Each such sub-pixel can be included in the pixel electrode 28A, intermediate layer 28B, and opposing electrode 28C described above.

[0142] The display device manufacturing apparatus 100 described above can form multiple layers on the display substrate D. For example, the display device manufacturing apparatus 100 can form at least one of the intermediate layers 28B on the display substrate D. Specifically, the display device manufacturing apparatus 100 can form at least one of the following in the intermediate layer 28B: an organic light-emitting layer, a hole injection layer, a hole transport layer, an electron injection layer, an electron transport layer, and a functional layer. As another embodiment, the display device manufacturing apparatus 100 can also form a counter electrode 28C on the display substrate D. In this case, the display substrate D can mean at least one layer from the substrate 21 to the intermediate layer 28B described above.

[0143] In addition, the thin film encapsulation layer E may include multiple inorganic layers, or may include both inorganic and organic layers.

[0144] The organic layer of the thin-film encapsulation layer E may include polymer-based materials. Polymer-based materials may include polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyimide, polyethylene sulfonate, polyoxymethylene, polyarylate, hexamethyldisiloxane, acrylic resins (e.g., polymethyl methacrylate, polyacrylic acid, etc.), or any combination thereof.

[0145] The inorganic layer of the thin-film encapsulation layer E may include one or more inorganic insulators such as aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride.

[0146] To prevent moisture penetration into the organic light-emitting element, the uppermost layer of the thin-film encapsulation layer E exposed to the outside can be formed as an inorganic layer.

[0147] The thin-film encapsulation layer E may include at least one sandwich structure in which at least one organic layer is inserted between at least two inorganic layers. As another example, the thin-film encapsulation layer E may also include a sandwich structure in which at least one organic layer is inserted between at least two organic layers, and a sandwich structure in which at least one inorganic layer is inserted between at least two organic layers.

[0148] The thin-film encapsulation layer E can be sequentially composed of a first inorganic layer, a first organic layer, and a second inorganic layer from the top of the organic light-emitting element (OLED) 28.

[0149] As another example, the thin-film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, and a third inorganic layer from the top of the organic light-emitting element (OLED) 28.

[0150] As another example, the thin-film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, a third inorganic layer, a third organic layer, and a fourth inorganic layer from the top of the organic light-emitting element (OLED) 28.

[0151] A metal halide layer comprising LiF may be added between the organic light-emitting element (OLED) 28 and the first inorganic layer. The metal halide layer can prevent damage to the organic light-emitting element (OLED) 28 when the first inorganic layer is formed by sputtering.

[0152] The area of ​​the first organic layer can be smaller than the area of ​​the second inorganic layer, and the area of ​​the second organic layer can also be smaller than the area of ​​the third inorganic layer.

[0153] As described above, when multiple inorganic layers are provided, the inorganic layers can be deposited in a manner that allows them to directly contact each other in the edge region of the display device 20, and the organic layers can be kept from being exposed to the outside.

[0154] Therefore, the display device 20 can achieve precise images.

[0155] Thus, the present invention has been described with reference to one embodiment shown in the accompanying drawings, but this is merely exemplary, and it will be understood by those skilled in the art that various modifications and variations of the embodiments can be made accordingly. Therefore, the true scope of protection of the present invention should be determined based on the technical concept of the stated claims.

Claims

1. A mask assembly, comprising: A mask frame, equipped with a first opening; Supporting components are arranged along at least one of a first direction and a second direction and are disposed on the mask frame to divide the first opening into at least one second opening and at least one third opening; as well as The components are divided and arranged to overlap with the supporting components. The supporting component includes: Multiple first support components are arranged along the first direction and at different intervals from each other; The second support component is arranged along the second direction. The dividing component includes: Multiple first dividing components are respectively arranged on the multiple first supporting components, and are arranged at different intervals from each other; The second dividing component is arranged on the second supporting component. Each of the plurality of first support components and each of the plurality of first dividing components is arranged parallel to the short side of the first opening, and both ends of each of the plurality of first support components and each of the plurality of first dividing components are fixed to the mask frame. The second support member and the second dividing member are arranged parallel to the long side of the first opening. One of the two ends of the second support component is fixed to the mask frame, and the other end of the second support component is fixed to one of the plurality of first support components. One of the two ends of the second dividing component is fixed to the mask frame, and the other end of the second dividing component is fixed to one of the plurality of first dividing components. On the plane, the other of the two ends of the second support member and the other of the two ends of the second dividing member are arranged inside the first opening.

2. The mask assembly as claimed in claim 1, wherein, The width of the supporting component is less than or equal to the width of the dividing component.

3. The mask assembly as claimed in claim 1, wherein, On a plane, the area of ​​the second opening is different from the area of ​​the third opening.

4. The mask assembly of claim 1, further comprising: A mask sheet that covers at least one of the second opening and the third opening.

5. The mask assembly as claimed in claim 4, wherein, The mask includes: A first mask sheet, covering the second opening; and The second mask sheet covers the third opening.

6. An apparatus for manufacturing a display device, comprising: Mask assembly; The cavity is equipped with the mask assembly and the substrate. as well as A deposition source is arranged inside the cavity, facing the mask assembly. The mask assembly includes: A mask frame, equipped with a first opening; Supporting members, arranged along at least one of a first direction and a second direction, and disposed on the mask frame, divide the first opening into at least one second opening and at least one third opening; and The components are divided and arranged to overlap with the supporting components. The supporting component includes: Multiple first support components are arranged along the first direction and at different intervals from each other; The second support component is arranged along the second direction. The dividing component includes: Multiple first dividing components are respectively arranged on the multiple first supporting components, and are arranged at different intervals from each other; The second dividing component is arranged on the second supporting component. Each of the plurality of first support components and each of the plurality of first dividing components is arranged parallel to the short side of the first opening, and both ends of each of the plurality of first support components and each of the plurality of first dividing components are fixed to the mask frame. The second support member and the second dividing member are arranged parallel to the long side of the first opening. One of the two ends of the second support component is fixed to the mask frame, and the other end of the second support component is fixed to one of the plurality of first support components. One of the two ends of the second dividing component is fixed to the mask frame, and the other end of the second dividing component is fixed to one of the plurality of first dividing components. On the plane, the other of the two ends of the second support member and the other of the two ends of the second dividing member are arranged inside the first opening.

7. The manufacturing apparatus for the display device as claimed in claim 6, wherein, The width of the supporting component is less than or equal to the width of the dividing component.

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