Shutter Interlocking Method and Device for Excimer Lasers

Abstract

The present invention relates to the field of excimer lasers, and particularly to a shutter interlock method and device for an excimer laser. When the shutter fails to complete the opening or closing operation within the specified time, the present method and device acquire the open-in-place signal and the close-in-place signal of the shutter, convert the open-in-place signal and the close-in-place signal into digital signals for exclusive NOR gate logic operation, perform AND gate operation on the signal after the logic operation and the timing pulse signal to obtain an interlock signal. Finally, the interlock signal is collected by a dedicated interlock module and transmitted to the upper computer, and the power supply of the entire excimer laser is controlled according to the interlock information, thereby ensuring the use safety of the laser and the safety of the operator.

Description

Technical Field

[0001] The present invention relates to the field of excimer lasers, and in particular, to a shutter interlock method and device for an excimer laser. Background Art

[0002] An excimer laser is a pulsed gas laser for deep ultraviolet characteristic applications, with characteristics such as high repetition rate, large energy, and narrow linewidth. It is a high-performance laser light source and can be used in microelectronic lithography systems.

[0003] The shutter controls the light output port of the laser. In the past, the opening and closing of the laser shutter were controlled by the instructions of the controller, and the shutter in-place signal monitoring was detected by the controller. However, the switching speed of the shutter is related to the use safety of the laser and the safety of the operator. Therefore, it is necessary to add a shutter interlock circuit. When the shutter cannot complete the opening or closing operation within the specified time, the interlock signal of the shutter is actively transmitted to the controller of the laser to notify the staff, thereby ensuring the use safety of the laser and the safety of the operator. Summary of the Invention

[0004] Embodiments of the present invention provide a shutter interlock method and device for an excimer laser to at least solve the technical problem that the shutter in the existing excimer laser cannot complete the opening or closing operation within the specified time.

[0005] According to an embodiment of the present invention, a shutter interlock method for an excimer laser is provided, including the following steps:

[0006] Real-time detect whether the opening or closing time of the shutter reaches the preset requirement, and obtain the open-in-place signal and close-in-place signal of the shutter when the shutter acts;

[0007] Convert the open-in-place signal and close-in-place signal into digital signals for exclusive-NOR gate logic operation, and perform AND gate operation on the signal after the logic operation and the timing pulse signal to obtain an interlock signal;

[0008] If a shutter interlock signal occurs, collect the shutter interlock signal by the interlock unit and upload it to the controller of the laser, and the interlock unit controls the whole machine power supply according to different interlock sources.

[0009] Further, when the shutter is closed, the signal indicating it is fully open is at the 0 level, and the signal indicating it is fully closed is at the 1 level; at the moment when the shutter starts to open and before it is fully open, the signal indicating it is fully open is at the 0 level, and the signal indicating it is fully closed is also at the 0 level; when the shutter is fully open, the signal indicating it is fully open is at the 1 level, and the signal indicating it is fully closed is at the 0 level; during the process of the shutter opening from the closed state, the signal indicating it is fully open and the signal indicating it is fully closed are used as the inputs of an exclusive-NOR gate. The time when the output is at the 1 level is the time for the shutter to open or close. Meanwhile, the moment when the output of the exclusive-NOR gate changes from 0 to 1 triggers timing, and finally an interlock signal is obtained through an AND gate.

[0010] Further, the signal after logical operation and the timing pulse signal are subjected to an AND gate operation to obtain the interlock signal, including:

[0011] The signal after logical operation and the timing pulse signal are subjected to an AND gate operation to obtain an output level change signal, and the level change signal is converted to obtain the interlock signal.

[0012] Further, the time when the output is at a high level in the signal after logical operation is the time for opening or closing the shutter.

[0013] According to another embodiment of the present invention, there is provided a shutter interlock device for an excimer laser, including:

[0014] A position sensor for obtaining the signal indicating the shutter is fully open and the signal indicating the shutter is fully closed;

[0015] A shutter interlock unit for detecting in real time whether the time for the shutter to open or close reaches a preset requirement, and for converting the signal indicating the shutter is fully open and the signal indicating the shutter is fully closed into digital signals for exclusive-NOR gate logic operation. The signal after logical operation and the timing pulse signal are subjected to an AND gate operation to obtain the interlock signal.

[0016] Further, when the shutter is closed, the signal indicating it is fully open is at the 0 level, and the signal indicating it is fully closed is at the 1 level; at the moment when the shutter starts to open and before it is fully open, the signal indicating it is fully open is at the 0 level, and the signal indicating it is fully closed is also at the 0 level; when the shutter is fully open, the signal indicating it is fully open is at the 1 level, and the signal indicating it is fully closed is at the 0 level; during the process of the shutter opening from the closed state, the signal indicating it is fully open and the signal indicating it is fully closed are used as the inputs of an exclusive-NOR gate logic circuit. The time when the output is at the 1 level is the time for the shutter to open or close. Meanwhile, the moment when the output of the exclusive-NOR gate changes from 0 to 1 triggers a flip-flop for a timing pulse, and finally an interlock signal is obtained through an AND gate circuit.

[0017] Further, the interlock signal detects a rising edge signal from the 0 level to the 1 level and transmits the signal with the state change to the controller.

[0018] A storage medium storing a program file capable of implementing the shutter interlock method for an excimer laser as described in any one of the above.

[0019] A processor is used to run a program. When the program runs, it executes the shutter interlock method of any one of the above-mentioned excimer lasers.

[0020] In the shutter interlock method, device, and storage medium of the excimer laser in the embodiments of the present invention, when the shutter cannot complete the opening or closing operation within the specified time, the open-in-place signal and the close-in-place signal of the shutter are obtained, and the open-in-place signal and the close-in-place signal are converted into digital signals for exclusive-NOR gate logic operation. The signal after the logic operation is subjected to an AND gate operation with a timing pulse signal to obtain an interlock signal, and finally, the shutter is controlled to open or close according to the interlock signal, thereby ensuring the safety of the use of the laser and the safety of the operator. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings:

[0022] Figure 1 is a flowchart of the shutter interlock method of the excimer laser of the present invention;

[0023] Figure 2 is a block diagram of the shutter interlock device of the excimer laser of the present invention;

[0024] Figure 3 is a signal flow diagram within the shutter interlock unit of the present invention;

[0025] Figure 4 is a waveform change diagram of the shutter interlock signal detection when the shutter is normal in the present invention;

[0026] Figure 5 is a waveform change diagram of the shutter interlock signal detection when the shutter is abnormal in the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0028] It should be noted that the terms "first", "second", etc. in the description, claims and above-mentioned drawings of the present invention are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present invention described here can be implemented in an order other than those illustrated or described here. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0029] The object of this invention is to provide a shutter interlock method and device for an excimer laser, which can monitor the quality of the shutter. When the shutter fails to complete the opening or closing operation within the specified time, the interlock signal of the shutter is actively transmitted to the controller of the excimer laser, and the interlock unit controls the main power supply according to different interlock sources.

[0030] First, the controller of the excimer laser functions to control the opening or closing of the shutter. Secondly, the in-place sensors detect the in-place signals for opening and closing. The shutter interlock unit first converts the in-place signals for opening and closing into digital signals, and then outputs them through an exclusive-NOR gate logic circuit. At this time, the time when the high level is output is the time for opening or closing the shutter, and at the same time, a trigger is triggered to generate a timing pulse. Then, the output signal of the exclusive-NOR gate logic circuit is ANDed with the timing signal triggered by the trigger, and finally, the signal obtained by the AND operation is converted into an interlock signal and output to the controller.

[0031] Compared with the prior art, the circuit of the present invention is simple and easy to implement, and can effectively ensure the use safety of the excimer laser and the safety of the operator.

[0032] Embodiment 1

[0033] According to an embodiment of the present invention, a shutter interlock method for an excimer laser is provided. Refer to Figure 1 , including the following steps:

[0034] S100: Real-time detect whether the opening or closing time of the shutter reaches the preset requirement, and obtain the open-in-place signal and close-in-place signal of the shutter when the shutter operates;

[0035] S200: Convert the open-in-place signal and close-in-place signal into digital signals for exclusive-NOR gate logic operation, and perform AND gate operation on the signal after the logic operation and the timing pulse signal to obtain an interlock signal;

[0036] S300: The dedicated interlock device collects the shutter interlock signal, uploads the interlock information to the main controller, and simultaneously performs power control according to the interlock situation.

[0037] The interlock situation refers to information from different interlock sources, such as shutter interlock, liquid leakage interlock, temperature interlock, voltage interlock, etc.

[0038] In the shutter interlock method of the excimer laser in the embodiment of the present invention, when the shutter cannot complete the opening or closing operation within the specified time, the open-in-place signal and the close-in-place signal of the shutter are obtained, the open-in-place signal and the close-in-place signal are converted into digital signals for exclusive-NOR gate logic operation, the signal after the logic operation is ANDed with the timing pulse signal to obtain the interlock signal, and finally the shutter is controlled to open or close according to the interlock signal, thereby ensuring the use safety of the laser and the safety of the operator.

[0039] Among them, when the shutter is closed, the open-in-place signal is at 0 level and the close-in-place signal is at 1 level; at the moment when the shutter starts to open and before it is fully opened, the open-in-place signal is at 0 level and the close-in-place signal is also at 0 level; when the shutter is fully opened, the open-in-place signal is at 1 level and the close-in-place signal is at 0 level; during the process of the shutter opening from the closed state, the open-in-place signal and the close-in-place signal are used as the inputs of the exclusive-NOR gate, the time when the output is at 1 level is the time for the shutter to open or close, and at the moment when the output of the exclusive-NOR gate changes from 0 to 1, timing is triggered, and finally the interlock signal is obtained through the AND gate.

[0040] Among them, the signal after the logic operation is ANDed with the timing pulse signal to obtain the interlock signal, which includes:

[0041] The signal after the logic operation is ANDed with the timing pulse signal to obtain the output level change signal, and the level change signal is converted to obtain the interlock signal.

[0042] Among them, the time when the high level is output in the signal after the logic operation is the time for opening or closing the shutter.

[0043] Next, a specific embodiment is used to describe in detail the shutter interlock method of the excimer laser of the present invention.

[0044] Figure 4It is a waveform change diagram for detecting the shutter interlock signal when the shutter is normal. Vi1 is the signal indicating the shutter is fully open, Vi2 is the signal indicating the shutter is fully closed, Vo1 is the signal output by the exclusive-NOR gate, Vo2 is the timing signal of the flip-flop, and Vo3 is the interlock signal. When the shutter is closed, the signal Vi1 indicating the shutter is fully open is at the 0 level, and the signal Vi2 indicating the shutter is fully closed is at the 1 level; at the moment when the shutter starts to open and before it is fully open, the signal Vi1 indicating the shutter is fully open is at the 0 level, and the signal Vi2 indicating the shutter is fully closed is also at the 0 level; when the shutter is fully open, the signal Vi1 indicating the shutter is fully open is at the 1 level, and the signal Vi2 indicating the shutter is fully closed is at the 0 level. During the process of the shutter changing from closed to open, the signals Vi1 and Vi2 indicating the shutter is fully open and fully closed are used as the inputs of the exclusive-NOR gate. The time when the output is at the 1 level is the time for the shutter to open and close. At the moment when the output of the exclusive-NOR gate changes from 0 to 1, the flip-flop is triggered for timing. Finally, the interlock signal is obtained through the AND gate. The function of the AND gate is to output 1 only when both inputs are 1. Therefore, when the shutter is normal, the signals output by the interlock are all 0.

[0045] Figure 5 It is a waveform change diagram for detecting the shutter interlock signal when the shutter is abnormal. Vi1 is the signal indicating the shutter is fully open, Vi2 is the signal indicating the shutter is fully closed, Vo1 is the signal output by the exclusive-NOR gate, Vo2 is the timing signal of the flip-flop, and Vo3 is the interlock signal. When the shutter is closed, the signal Vi1 indicating the shutter is fully open is at the 0 level, and the signal Vi2 indicating the shutter is fully closed is at the 1 level; at the moment when the shutter starts to open and before it is fully open, the signal Vi1 indicating the shutter is fully open is at the 0 level, and the signal Vi2 indicating the shutter is fully closed is also at the 0 level; when the shutter is fully open, the signal Vi1 indicating the shutter is fully open is at the 1 level, and the signal Vi2 indicating the shutter is fully closed is at the 0 level. During the process of the shutter changing from closed to open, the signals Vi1 and Vi2 indicating the shutter is fully open and fully closed are used as the inputs of the exclusive-NOR gate. The time when the output is at the 1 level is the time for the shutter to open and close. At the moment when the output of the exclusive-NOR gate changes from 0 to 1, the flip-flop is triggered for timing. Finally, the interlock signal is obtained through the AND gate. The function of the AND gate is to output 1 only when both inputs are 1. Therefore, when the shutter is abnormal, there will be a rising edge signal from the 0 level to the 1 level in the signal output by the interlock. At this time, the interlock signal will also detect this change in state and transmit the interlock signal to the controller of the excimer laser.

[0046] Embodiment 2

[0047] According to another embodiment of the present invention, a shutter interlock device for an excimer laser is provided. Refer to Figure 2 , including:

[0048] A position sensor for obtaining the signal indicating the shutter is fully open and the signal indicating the shutter is fully closed;

[0049] A shutter interlock unit for detecting in real time whether the opening or closing time of the shutter meets the preset requirements, and for converting the signal indicating the shutter is fully open and the signal indicating the shutter is fully closed into digital signals for exclusive-NOR gate logic operation, and performing AND gate operation on the signal after the logic operation and the timing pulse signal to obtain the interlock signal;

[0050] A controller, configured to control the opening or closing of the shutter according to the interlock signal.

[0051] An interlock unit, configured to upload the interlock information to the main controller and perform power control according to the interlock situation.

[0052] In the shutter interlock device of the excimer laser according to the embodiment of the present invention, when the shutter fails to complete the opening or closing operation within the specified time, the open-in-place signal and the close-in-place signal of the shutter are acquired, and the open-in-place signal and the close-in-place signal are converted into digital signals for exclusive-NOR gate logic operation. The signal after the logic operation is subjected to AND gate operation with the timing pulse signal to obtain the interlock signal, and finally the shutter is controlled to open or close according to the interlock signal, thereby ensuring the safety of the use of the laser and the safety of the operator.

[0053] Wherein, when the shutter is closed, the open-in-place signal is at the 0 level and the close-in-place signal is at the 1 level; at the moment when the shutter is opened and not fully opened, the open-in-place signal is at the 0 level and the close-in-place signal is also at the 0 level; when the shutter is fully opened, the open-in-place signal is at the 1 level and the close-in-place signal is at the 0 level; during the process of the shutter opening from the closed state, the open-in-place signal and the close-in-place signal are used as the inputs of the exclusive-NOR gate logic circuit, and the time when the output is at the 1 level is the time of the shutter opening and closing. At the same time, the moment when the output of the exclusive-NOR gate changes from 0 to 1 triggers the trigger for timing pulse, and finally the interlock signal is obtained through the AND gate circuit.

[0054] Wherein, the interlock signal detects the rising edge signal from the 0 level to the 1 level and transmits the signal with the state change to the controller.

[0055] Next, a specific embodiment is used to describe in detail the shutter interlock device of the excimer laser of the present invention.

[0056] In a shutter interlock device of an excimer laser, the controller controls the opening or closing of the shutter, the in-place sensor is used to detect the in-place signal of the opening or closing, and the shutter interlock unit is used to judge whether the opening or closing time of the shutter meets the requirements and output the interlock signal of the shutter at the same time. The signal flow diagram is as Figure 2 shown.

[0057] Figure 3 is the signal flow diagram inside the shutter interlock unit. First, the controller controls the opening or closing of the shutter. Secondly, the in-place sensor detects the in-place signals of the opening and closing. The shutter interlock unit first converts the in-place signals of the opening and closing into digital signals, and then passes through the exclusive-NOR gate logic circuit. At this time, the time when the high level is output is the time of opening or closing the shutter, and at the same time, the trigger is triggered for timing pulse. Then, the output signal of the exclusive-NOR gate logic circuit is ANDed with the timing pulse signal triggered by the trigger. Finally, the output signal is converted into an interlock signal and output to the controller, and the controller controls the opening or closing of the shutter according to the interlock signal.

[0058] Figure 4 It is the waveform change diagram of the shutter interlock signal detection when the shutter is normal. Vi1 is the signal of reaching the open position, Vi2 is the signal of reaching the closed position, Vo1 is the signal output by the exclusive-NOR gate, Vo2 is the timing signal of the flip-flop, and Vo3 is the interlock signal. When the shutter is closed, the signal of reaching the open position is at 0 level, and the signal of reaching the closed position is at 1 level; at the moment when the shutter starts to open and before it is fully opened, the signal of reaching the open position is at 0 level, and the signal of reaching the closed position is also at 0 level; when the shutter is fully opened, the signal of reaching the open position is at 1 level, and the signal of reaching the closed position is at 0 level. During the process of the shutter changing from closed to open, the signals of reaching the open position and the closed position are used as the inputs of the exclusive-NOR gate. The time when the output is at 1 level is the time of the shutter opening and closing. At the same time, the flip-flop is triggered for timing at the moment when the output of the exclusive-NOR gate changes from 0 to 1. Finally, the interlock signal is obtained through the AND gate. The function of the AND gate is to output 1 only when both are at 1 at the same time. Therefore, when the shutter is normal, the signals output by the interlock are all 0.

[0059] Figure 5 It is the waveform change diagram of the shutter interlock signal detection when the shutter is abnormal. Vi1 is the signal of reaching the open position, Vi2 is the signal of reaching the closed position, Vo1 is the signal output by the exclusive-NOR gate, Vo2 is the timing signal of the flip-flop, and Vo3 is the interlock signal. When the shutter is closed, the signal of reaching the open position is at 0 level, and the signal of reaching the closed position is at 1 level; at the moment when the shutter starts to open and before it is fully opened, the signal of reaching the open position is at 0 level, and the signal of reaching the closed position is also at 0 level; when the shutter is fully opened, the signal of reaching the open position is at 1 level, and the signal of reaching the closed position is at 0 level. During the process of the shutter changing from closed to open, the signals of reaching the open position and the closed position are used as the inputs of the exclusive-NOR gate. The time when the output is at 1 level is the time of the shutter opening and closing. At the same time, the flip-flop is triggered for timing at the moment when the output of the exclusive-NOR gate changes from 0 to 1. Finally, the interlock signal is obtained through the AND gate. The function of the AND gate is to output 1 only when both are at 1 at the same time. Therefore, when the shutter is abnormal, there will be a rising edge signal from 0 level to 1 level in the signal output by the interlock. At this time, the interlock signal will also detect this change in state and transmit the interlock signal to the controller of the excimer laser.

[0060] Embodiment 3

[0061] A storage medium that stores a program file capable of implementing the shutter interlock method of the excimer laser as described in any one of the above.

[0062] Embodiment 4

[0063] A processor that is used to run a program, wherein when the program runs, it executes the shutter interlock method of the excimer laser as described in any one of the above.

[0064] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages and disadvantages of the embodiments.

[0065] In the above embodiments of the present invention, the descriptions of the various embodiments each have their own emphases. For parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0066] In the several embodiments provided by the present application, it should be understood that the disclosed technical content can be implemented in other ways. Among them, the system embodiments described above are only illustrative. For example, the division of units can be a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed couplings or direct couplings or communication connections to each other can be through some interfaces. The indirect couplings or communication connections of units or modules can be in electrical or other forms.

[0067] The units described as separate components may or may not be physically separated. The components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0068] In addition, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-mentioned integrated units can be implemented in the form of hardware or in the form of software functional units.

[0069] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods in the various embodiments of the present invention. The aforementioned storage medium includes: USB flash drives, read-only memories (ROMs), random access memories (RAMs), mobile hard disks, magnetic disks, or optical discs and other various media that can store program codes.

[0070] The above is only the preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can still be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A shutter interlock method for an excimer laser, characterized in that, Including the following steps: Real-time detect whether the opening or closing time of the shutter reaches the preset requirement, and obtain the open-in-place signal and the close-in-place signal of the shutter when the shutter operates; Convert the open-in-place signal and the close-in-place signal into digital signals for exclusive-NOR gate logic operation, perform AND gate operation on the signal after the logic operation and the timing pulse signal to obtain the output level change signal, and convert the level change signal to obtain the interlock signal; If there is a shutter interlock signal, the shutter interlock signal is collected by the interlock unit and uploaded to the controller of the laser, and the interlock unit controls the main power supply according to different interlock sources.

2. The shutter interlock method of the excimer laser according to claim 1, wherein When the shutter is closed, the open-in-place signal is at 0 level and the close-in-place signal is at 1 level; at the moment when the shutter starts to open and before it is fully opened, the open-in-place signal is at 0 level and the close-in-place signal is also at 0 level; when the shutter is fully opened, the open-in-place signal is at 1 level and the close-in-place signal is at 0 level; During the process of the shutter closing to opening, the open-in-place signal and the close-in-place signal are used as the inputs of the exclusive-NOR gate. The time when the output is at 1 level is the shutter opening and closing time. At the same time, the moment when the output of the exclusive-NOR gate changes from 0 to 1 triggers timing, and finally the interlock signal is obtained through the AND gate.

3. The shutter interlock method of the excimer laser according to claim 1, characterized in that, The time when the output is at high level in the signal after the logic operation is the time for opening or closing the shutter.

4. A shutter interlock device for an excimer laser, characterized in that, Including: An in-place sensor for obtaining the open-in-place signal and the close-in-place signal of the shutter; A shutter interlock unit for real-time detecting whether the opening or closing time of the shutter reaches the preset requirement, and for converting the open-in-place signal and the close-in-place signal into digital signals for exclusive-NOR gate logic operation, performing AND gate operation on the signal after the logic operation and the timing pulse signal to obtain the output level change signal, and converting the level change signal to obtain the interlock signal.

5. The shutter interlock device of the excimer laser according to claim 4, characterized in that, When the shutter is closed, the open-in-place signal is at 0 level and the close-in-place signal is at 1 level; at the moment when the shutter starts to open and before it is fully opened, the open-in-place signal is at 0 level and the close-in-place signal is also at 0 level; when the shutter is fully opened, the open-in-place signal is at 1 level and the close-in-place signal is at 0 level; During the process of the shutter closing to opening, the open-in-place signal and the close-in-place signal are used as the inputs of the exclusive-NOR gate logic circuit. The time when the output is at 1 level is the shutter opening and closing time. At the same time, the moment when the output of the exclusive-NOR gate changes from 0 to 1 triggers the trigger for timing pulse, and finally the interlock signal is obtained through the AND gate circuit.

6. The shutter interlock device of the excimer laser according to claim 5, characterized in that, The interlock signal detects the rising edge signal from 0 level to 1 level and transmits the signal with the state change to the controller.

7. A storage medium, characterized in that, The storage medium stores a program file capable of implementing the shutter interlock method of the excimer laser as described in any one of claims 1 to 3.

8. A processor, characterized in that, The processor is used to run the program, wherein when the program runs, it executes the shutter interlock method of the excimer laser as described in any one of claims 1 to 3.

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