Material offset value detection method and system, compensation method and system, and storage medium

Abstract

A material offset value detection method and system, a compensation method and system, and a storage medium. The detection method is suitable for detecting the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform. The processing platform is provided with a carrier, a first drive device, and a second drive device. The detection method includes: outputting a first control signal to control the first drive device to vacuum the carrier so that the material is adsorbed onto the carrier and a corresponding vacuum value is obtained; judging whether the vacuum value is within a preset vacuum value range, and when the vacuum value is within the preset vacuum value range, outputting a second control signal to control the second drive device to drive the carrier to move so as to drive the material to move, and obtaining the edge data of the material; and calculating and obtaining the offset value based on the edge data. The above scheme can realize contactless detection and adjustment of the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, and can improve the adjustment accuracy.

Description

Technical Field

[0001] The embodiments of this specification relate to the field of mechanical manufacturing technology, and in particular to a material offset value detection method and system, a compensation method and system, and a storage medium. Background Art

[0002] In the process of mechanical manufacturing, for some materials with regular shapes (such as circles), when placing the materials on the corresponding carrying device, it is necessary to make the geometric center of the materials (such as the center of the circle) coincide with the origin of the reference coordinates of the processing platform. However, during the process of picking, placing and transporting the materials, the geometric center position of the materials is inevitably offset.

[0003] At present, the relative position between the geometric center of the material and the origin of the reference coordinates of the processing platform is mainly adjusted by a mechanical clamping device. The above method can make the geometric center of the material coincide with the origin of the reference coordinates of the processing platform, but the material is in direct contact with the mechanical clamping device, which is easy to contaminate the material or even damage the material. In addition, the adjustment method of the mechanical clamping device controlled manually has low adjustment accuracy. Summary of the invention

[0004] In view of this, one aspect of the embodiments of this specification provides a material offset value detection method and system, and a storage medium, which can realize non-contact detection of the relative position between the material calibration position and the reference coordinate origin of the processing platform.

[0005] On the other hand, the embodiments of this specification also provide a material offset value compensation method, system, and storage medium, which can achieve contactless adjustment of the relative position between the material calibration position and the reference coordinate origin of the processing platform, and can improve the adjustment accuracy.

[0006] First, an embodiment of this specification provides a material offset value detection method, which is suitable for detecting the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform. The processing platform is provided with a carrying device, a first driving device and a second driving device. The detection method includes:

[0007] Outputting a first control signal to control the first driving device to perform a vacuum process on the carrying device, so that the material is adsorbed onto the carrying device, and obtaining a corresponding vacuum value;

[0008] Determine whether the vacuum value is within a preset vacuum value range, and when the vacuum value is within the preset vacuum value range, output a second control signal to control the second driving device to drive the carrying device to move so as to drive the material to move, and obtain edge data of the material;

[0009] The offset value is calculated and obtained according to the edge data.

[0010] The embodiment of this specification also provides a material offset value compensation method, including:

[0011] The material offset value detection method described in any of the above embodiments is used for detection to obtain the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, and the processing platform is provided with a bearing device and a compensation device;

[0012] Determine whether the offset value is within a preset offset value range, and when the offset value is greater than the preset offset value range, output a compensation signal to the compensation device, so that the compensation device drives the carrying device to move to drive the material to move, so as to adjust the relative position between the material calibration position and the origin of the reference coordinate system of the processing platform.

[0013] Accordingly, the embodiment of the present specification provides a material offset value detection system, which is suitable for detecting the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform. The processing platform is provided with a carrying device, and the material offset value detection system includes a control device, a first drive device, and a second drive device, wherein:

[0014] The control device is adapted to output a first control signal to the first driving device and obtain a corresponding vacuum value; and is adapted to determine whether the vacuum value is within a preset vacuum value range, and when the vacuum value is within the preset vacuum value range, output a second control signal to the second driving device and obtain edge data of the material; and is adapted to calculate and obtain the offset value according to the edge data;

[0015] The first driving device is adapted to perform a vacuum process on the carrying device in response to the first control signal, so that the material is adsorbed onto the carrying device;

[0016] The second driving device is adapted to drive the carrying device to move in response to the second control signal so as to drive the material to move.

[0017] Accordingly, the embodiment of this specification also provides a material offset value compensation system, including:

[0018] The material offset value detection system described in any of the aforementioned embodiments comprises a control device adapted to determine whether the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is within a preset offset value range, and output a compensation signal when the offset value is greater than the preset displacement value range, wherein a carrying device is provided on the processing platform;

[0019] The compensation device is adapted to drive the carrying device to move in response to the compensation signal to drive the material to move, so as to adjust the relative position between the material calibration position and the origin of the reference coordinate system of the processing platform.

[0020] The embodiments of the present specification also provide a computer-readable storage medium having computer instructions stored thereon, wherein the computer instructions, when executed, execute any of the aforementioned material offset value detection methods.

[0021] The embodiments of the present specification also provide another computer-readable storage medium on which computer instructions are stored, wherein the computer instructions, when executed, execute any of the aforementioned material offset value compensation methods.

[0022] By using the material offset value detection method in the embodiment of this specification, under the control of the first control signal, the carrying device can be vacuumed so that the material is adsorbed to the carrying device, and when it is judged that the vacuum value obtained is within the vacuum value range, the second control signal is output to drive the carrying device to drive the material to move, and during the material movement process, the edge data of the material is obtained, and the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is obtained according to the edge data. It can be seen from the above that during the entire offset value detection process, when the vacuum value is within the preset vacuum value analog range, the edge data during the material movement process can be obtained by outputting the corresponding control signal, and then the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is calculated according to the obtained edge data. Since the material is always adsorbed on the carrying device during the material offset value detection process, there is no need to contact the material, so the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform can be detected non-contact.

[0023] By using the offset value compensation method in the embodiment of this specification, when it is determined that the offset value between the detected calibrated position of the material and the origin of the reference coordinate system of the processing platform is greater than the preset offset value range, the corresponding compensation signal is output to drive the carrier to move to drive the material to move, so that the relative position between the center position of the material and the origin of the reference coordinate system of the processing platform can be adjusted. Through the above process, the relative position of the calibrated position of the material and the reference coordinate system of the processing platform can meet the requirements without manual operation. Since the material is always adsorbed on the carrier, the relative position of the calibrated position of the material and the origin of the reference coordinate system of the processing platform can be adjusted contactlessly, and the adjustment accuracy can be improved.

[0024] By using the offset value compensation method in the embodiment of this specification, when it is determined that the offset value between the detected calibrated position of the material and the origin of the reference coordinate system of the processing platform is greater than the preset offset value range, the corresponding compensation signal is output to drive the carrier to move to drive the material to move, so that the relative position between the center position of the material and the origin of the reference coordinate system of the processing platform can be adjusted. Through the above process, the relative position of the calibrated position of the material and the reference coordinate system of the processing platform can meet the requirements without manual operation. Since the material is always adsorbed on the carrier, the relative position of the calibrated position of the material and the origin of the reference coordinate system of the processing platform can be adjusted contactlessly, and the adjustment accuracy can be improved.

[0025] Using the offset value detection system in the embodiment of this specification, on the one hand, the control device outputs a first control signal to the first drive device, the first drive device can perform vacuum processing on the carrier device, and when the control device determines that the vacuum value obtained is within the preset vacuum value analog value range, the second control signal is output to the second drive device, and the second drive device can drive the carrier device to move to drive the material to move; on the other hand, during the movement of the material, the control device can obtain the edge data of the material, and calculate and obtain the deviation value based on the edge data. It can be seen from the above that in the entire offset value detection process, it is only necessary to obtain the edge data of the material movement process by outputting the corresponding control signal when the vacuum value obtained is within the preset vacuum value analog value range, and then calculate the offset value between the calibration position of the material and the origin of the reference coordinate system of the processing platform based on the obtained edge data. Since the material is always adsorbed on the carrier device, it is possible to achieve non-contact detection of the offset value between the calibration center of the material and the origin of the reference coordinate system of the processing platform.

[0026] Using the offset value compensation system in the embodiment of the present specification, the control module outputs a compensation signal to the compensation device when it is determined that the offset value between the detected calibrated position of the material and the origin of the reference coordinate system of the processing platform is greater than the preset displacement value range. The compensation device can drive the carrying device to move to drive the material to move according to the compensation signal, thereby adjusting the relative position between the center position of the material and the origin of the reference coordinate system of the processing platform. Moreover, during the entire adjustment process, the material is always adsorbed on the carrying device. Therefore, the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform can be adjusted contactlessly, and the adjustment accuracy can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the drawings required for use in the embodiments of this specification or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 A flow chart of a material offset value detection method according to an embodiment of the present specification is shown.

[0029] Figure 2 A schematic diagram showing the principle of a material offset value detection method in an embodiment of this specification is shown.

[0030] Figure 3 A flow chart of a material offset value compensation method in an embodiment of this specification is shown.

[0031] Figure 4 A schematic diagram of the relative position between an adjusted material calibration position and the origin of the reference coordinate system of the processing platform in an embodiment of this specification is shown.

[0032] Figure 5 A flow chart of a material offset value compensation method in a specific application scenario in an embodiment of this specification is shown.

[0033] Figure 6 A structural schematic diagram of a material offset value detection system in an embodiment of this specification is shown.

[0034] Figure 7 A structural schematic diagram of a material offset value detection system in an embodiment of this specification is shown.

[0035] Figure 8 A schematic diagram of the installation layout structure of a material offset value compensation system in an embodiment of this specification is shown.

[0036] Fig. 9 A schematic diagram of the architecture of a material offset value compensation system in an embodiment of this specification is shown.

[0037] Fig.10 A schematic diagram of the mechanical structure of a material offset value compensation system in an embodiment of this specification is shown. DETAILED DESCRIPTION

[0038] As can be seen from the background technology, the relative position between the geometric center of the material and the origin of the reference coordinates of the processing platform is currently adjusted mainly by manually controlling a mechanical holding device. However, the above adjustment method is easy to contaminate the material or even damage the material, and the adjustment accuracy is low through manual control.

[0039] To solve the above problems, an embodiment of the present specification provides a material offset value detection method that can realize non-contact detection of the relative position of the material's calibrated position and the origin of the reference coordinate system of a processing platform, wherein the detection method is suitable for detecting the offset value between the material's calibrated position and the origin of the reference coordinate system of the processing platform, and a carrying device, a first driving device and a second driving device are provided on the processing platform, and the first driving device is controlled by outputting a first control signal to vacuum the carrying device, and obtain a corresponding true control value, and when it is judged that the vacuum value is within the preset vacuum value range, a second control signal is output to drive the carrying device to drive the material to move, and during the movement of the material, the edge data of the material is obtained, and based on the edge data, the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is obtained. From the above, it can be seen that during the entire offset value detection process, when the vacuum value is within the preset vacuum value analog range, the edge data of the material movement process can be obtained by outputting the corresponding control signal, and then the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is calculated based on the acquired edge data. During the material offset value detection process, the material is always adsorbed on the carrying device and there is no need to contact the material. Therefore, the relative position of the material calibration center and the reference coordinate origin of the processing platform can be detected non-contactly.

[0040] In specific implementation, the material offset value detection method provided in the embodiments of this specification can be widely used in various mechanical manufacturing scenarios, such as semiconductor-related mechanical manufacturing scenarios, insulator-related mechanical manufacturing scenarios, and conductor-related mechanical manufacturing scenarios. Accordingly, the material offset value detection method provided in the embodiments of this specification can detect the offset value between the calibration position of multiple materials and the origin of the reference coordinate system of the processing platform, such as adjusting the offset value between the center of the wafer and the origin of the reference coordinate system of the processing platform. The embodiments of this specification do not specifically limit the application scenarios of the material offset value detection method and the types of material offset values ​​detected.

[0041] In order to enable those skilled in the art to better understand and implement the embodiments of this specification, the following is a detailed description with reference to the accompanying drawings and through specific application examples.

[0042] Reference Figure 1 The flowchart of a material offset value detection method in an embodiment of the present specification is shown, and the detection method is suitable for detecting the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform. The processing platform is provided with a carrying device, a first driving device and a second driving device. In some embodiments of the present specification, it can be specifically performed according to the steps:

[0043] S10, outputting a first control signal to control the first driving device to perform a vacuum process on the carrying device, so that the material is adsorbed onto the carrying device, and obtaining a corresponding vacuum value.

[0044] Specifically, when it is necessary to calibrate the offset value between the calibrated position of the inspection material and the origin of the reference coordinate system of the processing platform, in order to prevent the material from falling from the processing platform during the inspection process, a first control signal can be output. Under the action of the first control signal, the first drive device can vacuum the carrying device so that the air pressure on the carrying device is lower than the atmospheric pressure. The material can be adsorbed onto the carrying device, and the corresponding vacuum value can be obtained in real time.

[0045] In a specific implementation, the vacuum value may be an analog value or a digital value, and the embodiments of this specification do not limit the specific type of the vacuum value.

[0046] S11, determine whether the vacuum value is within the preset vacuum value range, and when the vacuum value is within the preset vacuum value range, output a second control signal to control the second driving device to drive the carrying device to move to drive the material to move, and obtain edge data of the material.

[0047] Specifically, during the vacuuming process of the carrier, the vacuum value obtained can be compared with the preset vacuum value range, and when the vacuum value obtained is within the preset vacuum value range, a second control signal is output, and under the action of the second control signal, the second driving device can drive the carrier to move, and since the material is adsorbed on the carrier, the material can be driven to move during the movement of the carrier. During the movement of the material, the edge data of the material can be obtained in real time.

[0048] In a specific implementation, for different materials, different vacuum values ​​are required when the carrying device is vacuumed. This specification does not make any requirements on the vacuum value, as long as the material can be adsorbed onto the carrying device.

[0049] S12: Calculate and obtain the offset value according to the edge data.

[0050] Specifically, after steps S10 and S11, edge data of the material during movement can be obtained, and then the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform can be calculated according to a pre-stored algorithm.

[0051] By adopting the above-mentioned detection method, under the action of the first control signal, the first driving device can be controlled to perform vacuum processing on the carrying device, and during the vacuuming process, the corresponding vacuum value is obtained, and when it is judged that the obtained vacuum value is within the preset vacuum value range, the second control signal is output to drive the carrying device to drive the material to move, and during the movement of the material, the edge data of the material is obtained, and based on the edge data, the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is obtained.

[0052] From the above, it can be seen that by using the material offset value detection method in the embodiment of this specification, during the process of detecting the material offset value, since the material is always adsorbed on the supporting device, there is no need to contact the material, thus achieving non-contact detection of the relative position of the material calibration center and the reference coordinate origin of the processing platform.

[0053] When the carrying device is evacuated, the corresponding vacuum value can be obtained in a variety of ways. In some embodiments of the present specification, the processing platform may also include a vacuum value acquisition device. Accordingly, the acquisition of the corresponding vacuum value includes: when the first driving device performs a vacuum process on the carrying device, the corresponding vacuum value analog quantity is collected in real time by the vacuum value acquisition device, and converted into a vacuum value digital quantity as the vacuum value, that is, the corresponding vacuum value can be collected in real time by setting the vacuum value acquisition device.

[0054] In practical applications, in order to simultaneously perform vacuum processing on the carrying device and real-time collection of the corresponding vacuum value analog quantity, in other embodiments of the present specification, a first control signal can be output to the vacuum value collection device to control the vacuum value collection device to output a corresponding level signal to the first driving device according to the first control signal, so that the first driving device performs vacuum processing on the carrying device under the action of the level signal, and outputs the corresponding vacuum value analog quantity obtained to the vacuum value collection device, and the vacuum value collection device converts the vacuum value analog quantity into a vacuum value digital quantity.

[0055] In the embodiments of this specification, the obtained vacuum value analog quantity is first converted into a vacuum value digital quantity, and then the vacuum values ​​are compared. In a specific implementation, the vacuum value analog quantity and the preset vacuum value can also be directly compared without converting the obtained vacuum value type.

[0056] In a specific implementation, the edge data may include edge width values ​​of the material, angle values ​​corresponding to each edge width value, and the number of edge width values ​​collected. During the movement of the material, the edge data values ​​of the material can be obtained separately by different devices or by the same device.

[0057] As a specific example, in some embodiments of the present specification, a motion control device, a data acquisition control device and a data acquisition device are provided on the processing platform; accordingly, during the movement of the material, a third control signal is output to the data acquisition control device, so that the data acquisition control device outputs a data acquisition control signal corresponding to the third control signal to the data acquisition device, so as to control the data acquisition device to collect the edge width value of the material using a preset sampling frequency, and to make the data acquisition control device output a pulse signal with the same frequency as the preset sampling frequency, so as to control the motion control device to count the number of edge width values ​​collected, and save the angle value corresponding to each edge width value, and use each edge width value of the material, the angle value corresponding to each edge width value and the number of edge width values ​​collected as the edge data.

[0058] For the convenience of description and understanding, the following describes the concepts related to the embodiments of this specification, wherein: the edge width value refers to the actual edge of the collected material (such as Figure 2 The solid circle in the figure) is relative to the distance between the origin of the reference coordinate system of the processing platform and the preset edge of the material (such as Figure 2 The difference between the distance between the dotted circle in (a) and the origin of the reference coordinate system of the processing platform;

[0059] The preset edge of the material refers to the edge of the material when there is no offset between the material and the origin of the reference coordinate system of the processing platform, that is, the edge of the material when the calibrated position of the material coincides with the origin of the coordinate system;

[0060] The angle value refers to the angle between the line between the actual edge point of the material collected and the origin of the reference coordinate system of the processing platform and the positive extension direction of the axis of the reference coordinate system.

[0061] In a specific implementation, the edge data obtained can be multiple, and the more edge data obtained, the more accurate the offset value obtained in the subsequent material offset value calculation. Moreover, in the process of obtaining the material edge data value, since the sampling frequency is consistent with the frequency of the pulse signal, the consistency of the obtained edge width value and angle value can be improved, thereby improving the accuracy of the calculated offset value.

[0062] After obtaining multiple sets of edge data during the material movement process, the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform can be obtained according to a preset calculation method. Specifically, firstly, according to each edge width value and the angle value corresponding to each edge width value, a plurality of offset coordinate values ​​of the calibrated position of the material relative to the origin of the reference coordinate system of the processing platform are obtained, and then, according to the plurality of offset coordinate values ​​and the number of edge width values ​​collected, a curve fitting algorithm is used to obtain the offset value. That is, the obtained edge width value and its corresponding angle value are first converted into an offset coordinate value relative to the origin of the reference coordinate system, and then a curve fitting algorithm is used to obtain the offset value according to the number of offset coordinate values ​​and edge width values.

[0063] In the embodiments of this specification, in order to more efficiently determine the offset value between the material calibration position and the origin of the reference coordinate system of the processing platform, the calibration position can be selected as the geometric center of the material. In specific implementations, the material may have various shapes, such as a sheet structure. As a specific example, it can be a regular sheet structure such as a circular sheet, a square sheet, or an irregular sheet structure. The material may also be a three-dimensional structure, such as a regular structure of a cylinder, a cuboid, or a cone, or some irregular three-dimensional structures. This description embodiment does not impose any restrictions on the shape, contour, structure or material of the material.

[0064] As a specific example, in the embodiments of this specification, the shape of the material is a disc, and the calibration position is the center of the material.

[0065] The following describes in detail the material offset value detection method involved in the embodiments of this specification by taking a circular sheet material (such as a wafer) and calibrating the position as the center of the material.

[0066] Reference Figure 2 The schematic diagram of the principle of a material offset value detection method in the embodiment of the present specification is shown, wherein the dotted circle represents the edge of the material when the center of the material coincides with the origin of the reference coordinate system of the processing platform, the solid circle represents the actual edge of the material actually collected, r represents the radius of the material, L i Indicates the detected edge width of the material, θ i Indicates the angle value corresponding to the edge width value, (x i ,y i ) represents the offset coordinate value of the material.

[0067] In the actual detection process, the edge data of the material rotating one circle can be detected, and the number of edge data obtained is N, where i and N are both integers greater than 0, and i is less than or equal to N.

[0068] After the above detection process, the edge width value L is obtained.i , edge width value L i The corresponding angle value θ i Then, according to the Pythagorean theorem, x i =(r+L i )*cosθ i ,y i =(r+L i )*sinθ i , we can get a series of offset coordinate values ​​(x i ,y i ).

[0069] Assume that the coordinates of the center of the solid circle relative to the origin of the reference coordinate system are (x a ,y a ), then the standard equation of the solid circle can be obtained as:

[0070] (xx a ) 2 +(yy a ) 2 =r 2 (1)

[0071] In some embodiments of this specification, the minimum multiplication curve fitting algorithm is used to obtain the fitting mathematical model of the solid circle:

[0072] k=∑((x i -x a ) 2 +(y i -y a ) 2 -r 2 ) 2 (2)

[0073] According to the least squares method, taking the extreme value of k, we have:

[0074]

[0075] Since r is not equal to 0, we have:

[0076] f=∑((x i -x a ) 2 +(y i -y a ) 2 -r 2 ) (4)

[0077] Construct the corresponding conversion formula, let:

[0078] M i =x i -∑xi / N (5)

[0079] M a =x a -∑x i / N (6)

[0080] N i =y i -∑y i / N (7)

[0081] N a =y a -∑y i / N (8)

[0082] From formula (5) and formula (7), we can get:

[0083] ∑M i =0 (9)

[0084] ∑N i =0 (10)

[0085] From formula (5) and formula (6), we can get:

[0086] M i -M a =x i -x a (11)

[0087] From formula (7) and formula (8), we can get:

[0088] N i -N a =y i -y a (12)

[0089] Substituting formula (11) and (12) into formula (4), we have:

[0090] ∑((M i -M a )+(N i -N a )-r 2 )M i =0 (13)

[0091] ∑((M i -M a )+(N i -N a )-r 2 )N i =0 (14)

[0092] By squaring formulas (13) and (14) and combining them with formulas (9) and (10), we can obtain:

[0093]

[0094]

[0095] Continue to construct the conversion formula, let:

[0096]

[0097]

[0098]

[0099]

[0100] L MN =∑M i N i (twenty one)

[0101]

[0102]

[0103] Substituting formulas (17) to (23) into formulas (15) and (16), we can obtain:

[0104]

[0105]

[0106] From formulas (24) and (25), we can get:

[0107]

[0108]

[0109] According to formula (6) and formula (8), we can get:

[0110] x a =M a +∑x i / N (28)

[0111] y a =N a +∑y i / N (29)

[0112] That is, through the above-mentioned material offset value detection method, the offset value coordinates between the calibrated position of the material and the reference coordinate system of the processing platform are obtained as (M a+∑x i / N,N a +∑y i / N).

[0113] In a specific implementation, the number of edge width values ​​of the material can be adjusted by adjusting the sampling frequency. Within the preset frequency range, the higher the sampling frequency, the more edge width values ​​are obtained, and the more accurate the calculated offset value is. Therefore, the sampling frequency can be flexibly adjusted according to actual needs.

[0114] It should be noted that the above embodiment is only a method for detecting the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform in the same plane (x-axis and y-axis) for materials with two-dimensional shapes. For materials with three-dimensional structures, the material offset value can be detected in three dimensions: x-axis, y-axis and z-axis.

[0115] In addition, in actual applications, the material may be offset in only one or two dimensions during movement. In this case, the material offset value can be detected only in the dimension and direction where the offset may occur, without the need to detect all dimensions of the material, thereby improving detection efficiency.

[0116] When it is detected that there is an offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, a corresponding operation can be performed to adjust the relative position between the two so that the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform meets the processing requirements. To this end, the embodiment of this specification also provides a material offset value compensation method. The following is a detailed description through specific embodiments and in conjunction with the accompanying drawings.

[0117] Reference Figure 3 The flowchart of a material offset value compensation method in an embodiment of the present specification is shown. In some embodiments of the present specification, the material offset value compensation method can adjust the relative position between the material calibration position and the origin of the reference coordinate system of the processing platform, wherein the processing platform is provided with a carrying device and a compensation device, and the relative position between the two can be adjusted specifically according to the following steps:

[0118] S20, using a material offset value detection method to perform detection to obtain an offset value between a calibrated position of the material and an origin of a reference coordinate system of the processing platform.

[0119] In the embodiments of this specification, the method for detecting the material offset value in the aforementioned embodiments can be used to detect whether the material has been offset. For details, please refer to the detailed description of the aforementioned embodiments, which will not be described in detail here.

[0120] S21, determine whether the offset value is within a preset offset value range, and when the offset value is greater than the preset offset value range, output a compensation signal to the compensation device, so that the compensation device drives the carrying device to move to drive the material to move, so as to adjust the relative position between the material calibration position and the origin of the reference coordinate system of the processing platform.

[0121] Specifically, when it is detected that there is an offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, it can be determined whether the offset value is within the preset offset value range. When it is determined that the offset value is greater than the preset offset value range, a corresponding compensation signal can be output so that the compensation device drives the reference device to move to drive the material to move, thereby adjusting the relative position between the two, so that the offset value of the material is within the preset offset value range.

[0122] In a specific implementation, when the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is obtained, the offset value needs to be converted into a signal recognizable by the compensation device, and the offset value cannot be directly output to the compensation device.

[0123] As a specific example, the compensation device may include a motion control unit and a displacement unit. Accordingly, when the offset value is greater than the preset offset value range, a compensation signal is output to the compensation device, including: when the offset value is greater than the preset offset value range, an offset compensation value is determined according to the offset value; according to the offset compensation value and a preset displacement conversion coefficient, a driving pulse number is obtained, and the compensation signal corresponding to the driving pulse number is output to the motion control unit to control the motion control unit to output a first driving signal corresponding to the compensation signal to the displacement unit, so that the displacement unit drives the carrying device to move to drive the material to move.

[0124] After the above adjustment process, if Figure 4 As shown in sub-figure (a), the calibrated position of the material can be made to coincide with the origin of the reference coordinate system of the processing platform, that is, the black circle in sub-figure (a) coincides with the origin O, or, Figure 4 As shown in sub-figure (b), there is still some deviation between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, but the deviation value between the two is within the preset deviation value range, that is, the black circle in sub-figure (b) does not coincide with the origin O.

[0125] In specific implementations, according to different application scenarios, the speed of material movement can be set by controlling the time interval between drive pulses output to the compensation device or the amplitude and pulse width of the drive pulses to adapt to different processing scenarios.

[0126] In some embodiments of the present specification, the preset displacement conversion coefficient is related to the parameters of the displacement device in the compensation device. As a specific example, the preset displacement conversion coefficient is suitable for being determined using the following formula:

[0127] K=n*A*L (30)

[0128] Among them: K is suitable for characterizing the preset displacement conversion coefficient; n is suitable for characterizing the number of pulses corresponding to one circle of movement of the displacement unit; A is suitable for characterizing the transmission ratio of the displacement unit; L is suitable for characterizing the transmission distance corresponding to one circle of movement of the displacement unit.

[0129] Combination Figure 2 , refer to Figure 5 The flowchart of the material offset value compensation method in a specific application scenario in the embodiment of this specification is shown, which can be specifically performed according to the following steps:

[0130] S30, obtain the offset value x a and a .

[0131] Among them, the offset value x a and a For the acquisition process, please refer to the method for detecting the material offset value in the aforementioned embodiment. For details, please refer to the detailed description of the aforementioned embodiment, which will not be described in detail here.

[0132] S31, judge x a ≤Δx, and y a ≤Δy, if not, continue to execute step S32, if yes, the compensation process can be ended.

[0133] Wherein, Δx represents a preset offset value in the first direction, and Δy represents an offset value in the second direction.

[0134] S32, according to the offset coordinate value x a and a , get the compensation value S x and S y .

[0135] Among them, S x =-x a , S y =-y a , S x represents the offset compensation value in the first direction, S y Indicates the offset compensation value in the first direction.

[0136] S33, according to the compensation value S x And preset compensation coefficient K x , get the first driving pulse number N x; and according to the compensation value S y And preset compensation coefficient K y , get the second driving pulse number N y .

[0137] Among them, N x =S x *K x =-x a *K x , N y =S y *K y =-y a *K y , K x and K y The calculation process of can be found in formula (30).

[0138] S34, according to the first driving pulse number N x and the second driving pulse number N y , driving the carrying device to move to drive the material to move.

[0139] In a specific implementation, the first driving pulse number N can be used to x , adjust the offset value of the material in the first direction, and after the offset value in the first direction is adjusted, adjust the offset value according to the second driving pulse number N y , adjust the offset value of the material in the second direction; or, first, according to the second driving pulse number N y , adjust the offset value of the material in the second direction, and after the offset value in the second direction is adjusted, according to the first driving pulse number N x , adjusting the offset value of the material in the first direction; or adjusting the offset value of the material in the first direction and the second direction at the same time. The embodiments of this specification do not limit the specific adjustment method.

[0140] In a specific implementation, after step S30 to step S34, the material offset value detection method described in the aforementioned embodiment can be used again to detect the offset value between the adjusted material calibration position and the origin of the processing platform reference coordinate system, and determine whether the offset value is within the preset offset value range.

[0141] It can be seen from the above that the material offset value detection and compensation method provided in the embodiments of this specification can realize non-contact detection and adjustment of the relative position between the material calibration position and the reference coordinate origin of the processing platform, and can improve the adjustment accuracy.

[0142] The embodiments of this specification also provide a material offset value detection system corresponding to the above-mentioned material offset value detection method, which is described in detail below through specific embodiments with reference to the accompanying drawings.

[0143] Reference Figure 6 The structural diagram of a material offset value detection system in the embodiment of this specification is described. In some embodiments of this specification, such as Figure 6 As shown, the material offset value detection system M1 is suitable for detecting the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform 6A, wherein a carrying device 6A1 is provided on the processing platform, and the material offset value detection system 60 may include: a control device M1, a first drive device M12, and a second drive device M13, wherein:

[0144] The control device M11 is adapted to output a first control signal to the first driving device M12 and obtain a corresponding vacuum value; and is adapted to determine whether the vacuum value is within a preset vacuum value range, and when the vacuum value is within the preset vacuum value range, output a second control signal to the second driving device M13 and obtain edge data of the material; and is adapted to calculate and obtain the offset value according to the edge data;

[0145] The first driving device M12 is adapted to perform a vacuum process on the carrying device 6A1 in response to the first control signal, so that the material is adsorbed onto the carrying device 6A1;

[0146] The second driving device M13 is adapted to drive the carrying device 6A1 to move in response to the second control signal so as to drive the material to move.

[0147] The following reference Figure 6 , describing the detection principle of the material offset value detection system M1:

[0148] When it is necessary to detect the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform 6A, the control device M11 can output a first control signal to the first drive device M12, and the second drive device can respond to the first control signal to vacuum the carrier device 6A1 so that the air pressure on the carrier device 6A1 is lower than the atmospheric pressure, and the material can be adsorbed onto the carrier device 6A1. In the process of vacuuming the carrier device 6A1, the control device M11 can obtain the corresponding vacuum value, and compare the obtained vacuum value with the preset vacuum value range, and when the vacuum value is within the preset vacuum value range, output the second control signal to the second drive device M13.

[0149] The second driving device M13 can drive the carrying device to move in response to the second control signal, and drive the material to move. During the movement of the material, the control device M11 can obtain the edge data of the material, and calculate and obtain the deviation value based on the edge data.

[0150] From the above, it can be seen that in the entire offset value detection process, it is only necessary to obtain the edge data of the material movement process by outputting the corresponding control signal when the obtained vacuum value is within the preset vacuum value analog range, and then calculate the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform based on the obtained edge data. Since the material is always adsorbed on the carrying device, the offset value between the calibrated center of the material and the origin of the reference coordinate system of the processing platform can be detected non-contactly.

[0151] In order to enable those skilled in the art to better understand and implement, some achievable examples of each module in the material offset point detection circuit in this specification are shown below.

[0152] Continue to refer to Figure 6 In some embodiments of this specification, Figure 6 As shown, when the first driving device M12 performs vacuuming on the carrying device 6A1, the corresponding vacuum value can be obtained in a variety of ways. In a specific implementation, the material offset value detection system M1 may also include: a vacuum acquisition device M14, which is suitable for real-time acquisition of the corresponding vacuum value analog quantity when the first driving device M12 performs vacuuming on the carrying device 6A1, and converting it into a vacuum value digital quantity as the vacuum value, and transmitting it to the control device M11.

[0153] In practical applications, in order to realize that the first driving device M12 simultaneously performs vacuum processing on the carrying device 6A1, and the control device M11 obtains the corresponding vacuum value in real time, in some embodiments of this specification, such as Figure 6 As shown, the first control signal can be first output to the vacuum value acquisition device M14, and the vacuum value acquisition device M14 outputs a corresponding level signal to the first drive device M12 according to the first control signal. Under the action of the level signal, the first drive device M12 performs a vacuum process on the carrying device 6A1, and outputs the corresponding vacuum value analog quantity obtained to the vacuum value acquisition device M14, and the vacuum value acquisition device M14 converts the vacuum value analog quantity into a vacuum value digital quantity.

[0154] In some embodiments of the present specification, the first driving device M12 may be a vacuum controller, which may include a vacuum solenoid valve and a vacuum pressure gauge. When receiving the first control signal, the vacuum controller opens the internal vacuum solenoid valve, evacuates the carrying device 6A1, and directly outputs the corresponding vacuum value analog quantity to the vacuum value acquisition device M14 through the vacuum pressure gauge.

[0155] In a specific implementation, the vacuum value analog quantity acquired by the vacuum value acquisition device M14 is first converted into a vacuum value digital quantity, and then output to the control device M11, which compares the vacuum values. In some embodiments, the acquired vacuum value analog quantity can also be directly output to the control device M11, and the acquired vacuum value analog quantity is directly compared with the preset vacuum value, without converting the acquired vacuum value type.

[0156] In some embodiments of the present specification, the control module M11 can be implemented by a central processing unit (CPU), FPGA and other processing chips, or by an application specific integrated circuit (ASIC) or one or more integrated circuits configured to implement the embodiments of the present invention.

[0157] The second driving device M13 may be a rotatable device, and the material may rotate when driven by the second driving device M13.

[0158] In the semiconductor field, the carrying device 6A1 may include a wafer stage for carrying a wafer.

[0159] In a specific implementation, the edge data may include edge width values ​​of the material, angle values ​​corresponding to each edge width value, and the number of edge width values ​​collected. During the movement of the material, the edge data values ​​of the material can be obtained separately by different devices or by the same device.

[0160] As a specific example, in some embodiments of this specification, continue to refer to Figure 6 The processing platform is provided with a motion control device M17, a data acquisition control device M15 and a data acquisition device M16, wherein:

[0161] The control device M11 is further adapted to output a third control signal to the data acquisition control device M15 during the material movement process;

[0162] The data acquisition control device M15 is adapted to output a corresponding data acquisition signal to the data acquisition device M16 in response to the third control signal, and is adapted to output a pulse signal having the same frequency as a preset sampling frequency to the motion control device M17 in response to the third control signal;

[0163] The data acquisition device M16 is adapted to respond to the data acquisition signal, acquire the edge width value of the material at the preset sampling frequency, and output it to the control device M11;

[0164] The motion control device M17 is adapted to count the number of times the edge width value is collected in response to the pulse signal, store the angle value corresponding to each edge width value, and output it to the control device M11.

[0165] Specifically, during the material movement process, the control device M11 can also output a third control signal to the data acquisition control device M15, and the data acquisition control device M15 can respond to the third control signal and output a corresponding data acquisition signal to the data acquisition device M16, so that the data acquisition device uses the preset sampling frequency to collect the edge width value of the material and output it to the control device M11, and outputs a pulse signal with the same frequency as the preset sampling frequency to the motion control device M17, so that the motion control device M17 counts the number of times the edge width value is collected, and saves the angle value corresponding to each edge width value, and outputs it to the control device M11. The definitions of edge width value, material preset edge and angle value refer to the above content and will not be expanded here.

[0166] In a specific implementation, the edge data obtained can be multiple, and the more edge data obtained, the more accurate the offset value obtained in the subsequent material offset value calculation. Moreover, in the process of obtaining the material edge data value, since the sampling frequency of the edge width value collected by the data acquisition device M16 is the same as the pulse signal frequency of the angle value corresponding to each edge width value stored by the motion control device M17, the consistency of the obtained edge width value and the angle value can be improved, thereby improving the accuracy of the calculated offset value.

[0167] After obtaining multiple sets of edge data during the material movement process, the offset value between the material's calibrated position and the origin of the reference coordinate system of the processing platform can be obtained according to a pre-set calculation method. Specifically, the control device M11 can first obtain multiple offset coordinate values ​​of the material's calibrated position relative to the origin of the reference coordinate system of the processing platform 6A according to each edge width value and the angle value corresponding to each edge width value, and then use a curve fitting algorithm according to the multiple offset coordinate values ​​and the number of edge width values ​​collected to obtain the offset value. The specific process of obtaining the material offset value is shown in the above Figure 2 The corresponding content will not be described in detail here.

[0168] In the embodiment of this specification, the least squares curve fitting algorithm is used to calculate the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform. In other embodiments, other curve fitting algorithms can also be used to obtain the offset value between the two.

[0169] In a specific implementation, in order to obtain the edge data of the material at the first moment of its movement, in some embodiments of this specification, continue to refer to Figure 6 , wherein the control device M11 can output the first control signal to the motion control device M17, and the motion controller M17 controls the movement of the second driving device M13.

[0170] In a specific implementation, the material offset value detection system M1 can be integrated with the processing platform 6A, and the material offset value detection system M1 can be used as a part of the processing platform 6A.

[0171] When the material offset value detection system detects that there is an offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, corresponding operations can be performed to adjust the relative position between the two so that the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform meets the processing requirements.

[0172] Based on this, the embodiment of this specification also provides a material offset value compensation system corresponding to the above-mentioned material offset value compensation method, which can perform corresponding compensation when the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is greater than the preset offset value range to adjust the relative position between the two. The following is a detailed introduction through specific embodiments with reference to the accompanying drawings.

[0173] Reference Figure 7 The structural diagram of a material offset value compensation system in an embodiment of the present specification is shown. In some embodiments of the present specification, the material offset value compensation system 70 can adjust the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform 7A, wherein a carrying device 7A1 is provided on the processing platform, and the material offset value compensation system 70 may include:

[0174] The material offset value detection system M1 described in any of the aforementioned embodiments comprises a control device M11 adapted to determine whether the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform 7A is within a preset offset value range, and output a compensation signal when the offset value is greater than the preset displacement value range;

[0175] The compensation device M2 is adapted to respond to the compensation signal to drive the carrying device 7A1 to move so as to drive the material to move, so as to adjust the relative position between the material calibration position and the origin of the reference coordinate system of the processing platform 7A.

[0176] The following combination Figure 7 , explaining the working principle of the material offset value compensation system 70:

[0177] As mentioned above, the material offset value detection system M1 can detect the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform 7A1, and compare the detected offset value with the preset offset value range. When it is determined that the offset value is greater than the preset displacement value range, a corresponding compensation signal is output to the compensation device M2 coupled to the material offset value detection system M1.

[0178] The compensation device M2 can drive the carrying device 7A1 to move to drive the material to move according to the compensation signal, so as to adjust the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, so that the offset value between the two meets the processing requirements.

[0179] From the above, it can be seen that the material offset value compensation system in the embodiment of the present specification can output a corresponding compensation signal when it is determined that the offset value is greater than the preset displacement value range to adjust the relative position of the material calibration position and the reference coordinate system of the processing platform. Since the material is always adsorbed on the supporting device during the material offset value compensation process and there is no need to contact the material, the relative position of the material calibration position and the reference coordinate origin of the processing platform can be adjusted contactlessly, and the adjustment accuracy can be improved.

[0180] In order to enable those skilled in the art to better understand and implement, some achievable examples of each module in the material offset value compensation system of this specification are shown below.

[0181] In a specific implementation, when the material offset value detection system obtains the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, and determines that the offset value is greater than a preset offset value range, the offset value needs to be converted into a signal that can be recognized by the compensation device, and the offset value cannot be directly output to the compensation device.

[0182] As a specific example, in an embodiment of the present specification, when the control device determines that the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is greater than the preset offset value range, the corresponding offset compensation value can be determined based on the offset value between the two, and then the number of driving pulses is obtained based on the offset compensation value and the preset displacement conversion coefficient, and the compensation signal corresponding to the number of driving pulses is output to the compensation device, and the compensation device can drive the carrying device to move to drive the material to move, so as to adjust the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform.

[0183] Continuing with reference to 7, in some embodiments of this specification, the compensation device M2 may include a motion control unit M21 and a displacement unit M22, wherein:

[0184] The motion control unit M21 is adapted to output a corresponding first driving signal to the displacement unit M22 in response to the compensation signal;

[0185] The displacement unit M22 is adapted to drive the carrying device 7A1 to move in response to the first driving signal so as to drive the material to move.

[0186] In a specific implementation, the displacement unit may include a driving mechanism, a transmission mechanism and a displacement mechanism, wherein:

[0187] The driving mechanism is connected to the motion control unit and the transmission mechanism respectively, and is adapted to generate a first driving force according to the first driving signal;

[0188] The transmission mechanism is connected to the displacement mechanism and is suitable for transmitting the first driving force to the displacement mechanism;

[0189] The displacement mechanism is suitable for carrying the material, and under the drive of the first driving force, drives the carrying device to move to drive the material to move, so as to adjust the relative position between the material calibration position and the origin of the processing platform reference coordinate system.

[0190] In a specific implementation, when the driving force generated by the driving mechanism is large, in order to improve the stability of the displacement mechanism during movement and reduce the movement speed of the displacement mechanism, thereby improving the adjustment accuracy of the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, the transmission mechanism can be a reduction gear assembly. Through the reduction gear assembly, the driving force transmitted to the displacement mechanism can be reduced and the movement speed of the displacement mechanism can be reduced, thereby improving the adjustment accuracy.

[0191] In some other embodiments of the present specification, the transmission mechanism may also be a reduction assembly such as a sprocket reduction assembly, a pulley reduction assembly, etc., and the driving mechanism may be connected to the propulsion module through the above-mentioned reduction assembly.

[0192] In some embodiments of the present specification, the preset displacement conversion coefficient is related to the parameters of the displacement device in the compensation device. As a specific example, the preset displacement conversion coefficient is suitable for being determined by formula (30), wherein: K is suitable for characterizing the preset displacement conversion coefficient; n is suitable for characterizing the number of pulses corresponding to one circle of movement of the drive mechanism; A is suitable for characterizing the transmission ratio of the transmission mechanism; and L is suitable for characterizing the transmission distance corresponding to one circle of movement of the drive mechanism.

[0193] As a specific example, when the transmission mechanism is a gear transmission assembly, the transmission ratio of the transmission mechanism may be a gear tooth number ratio or a gear diameter ratio;

[0194] When the transmission structure is connected to the driving mechanism via a screw rod, the transmission distance corresponding to one circle of movement of the driving mechanism may be the pitch of the screw rod.

[0195] In a specific implementation, if the driving force generated by the driving mechanism is small, the displacement mechanism and the driving mechanism may be directly connected.

[0196] In some embodiments of the present specification, the driving mechanism may be a stepper motor. Since the stepper motor has good control performance, the adjustment accuracy of the material offset value can be improved.

[0197] In other embodiments, the driving mechanism may also be other power devices, such as an electric motor.

[0198] In a specific implementation, according to different application scenarios and actual needs, one or more driving mechanisms can be provided in the displacement module, and correspondingly, one or more transmission mechanisms corresponding to the driving mechanisms can be provided in the displacement module. With the cooperation of the one or more displacement mechanisms and the one or more transmission mechanisms, forces in different directions can be transmitted to the displacement mechanism.

[0199] As a specific example, the driving mechanism includes a first driving mechanism and a second driving mechanism, and the transmission displacement mechanism includes a first transmission mechanism and a second transmission mechanism, wherein:

[0200] The first driving mechanism, whose first end is electrically connected to the motion control unit and whose second end is connected to the second end of the first transmission mechanism, is adapted to generate a first driving force along a first preset direction according to the first driving signal;

[0201] The first transmission mechanism, whose second end is connected to the displacement mechanism, is suitable for outputting the first driving force along the first preset direction to the displacement mechanism;

[0202] The second driving mechanism, whose first end is electrically connected to the motion control unit and whose second end is connected to the second end of the first transmission mechanism, is adapted to generate a first driving force along a second preset direction according to the first driving signal;

[0203] The second transmission mechanism, whose second end is connected to the displacement mechanism, is suitable for outputting the first driving force along the second preset direction to the displacement mechanism.

[0204] When the displacement mechanism receives the first driving force and the second driving force transmitted by the transmission mechanism, the displacement value of the material along the first preset direction can be adjusted under the drive of the first driving force, and the displacement value along the second preset direction can be adjusted under the drive of the second driving force.

[0205] As a specific example, the displacement mechanism includes a first displacement mechanism and a second displacement mechanism, wherein:

[0206] The first displacement mechanism, whose first end is coupled to the second end of the first transmission mechanism and whose second end is coupled to the carrying device, is adapted to drive the carrying device to move under the driving of the first driving force along the first preset direction so as to drive the material to move along the first preset direction;

[0207] The second displacement mechanism, whose first end is coupled to the second end of the second transmission mechanism and whose second end is coupled to the carrying device, is suitable for driving the carrying device to move to drive the material to move along the second preset direction under the drive of the first driving force along the second preset direction.

[0208] In a specific implementation, the offset value of the material along the first preset direction may be adjusted first, and then the offset value of the material along the second preset direction may be adjusted; or, the offset value of the material along the second preset direction may be adjusted first, and then the offset value of the material along the first preset direction may be adjusted; or, the offset value of the material along the first preset direction and the second direction may be adjusted simultaneously. The embodiments of this specification do not limit the specific adjustment method.

[0209] In other embodiments of the present specification, the shift module may include only one driving mechanism, one displacement mechanism and one transmission mechanism, and adjust the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform in steps. Further, the driving mechanism first generates a driving force along the first preset direction according to the first driving signal output by the motion control unit, and transmits it to the displacement mechanism through the transmission structure, and the displacement mechanism drives the carrying device to move to drive the material to move along the first preset direction. When the material moves to the position corresponding to the first preset direction, it generates a driving force along the second preset direction according to the first driving signal, and transmits it to the displacement mechanism through the transmission structure, and the displacement mechanism drives the carrying device to move to drive the material to move along the second preset direction, until the material moves to the position corresponding to the second preset direction, and the adjustment process is completed.

[0210] In some embodiments of the present specification, the first preset direction may be perpendicular to the second preset direction.

[0211] It is understandable that the structure of the displacement module is only an example. In specific implementation, the structure of the displacement module can be flexibly adjusted according to actual needs, or other devices capable of adjusting the position of the material can be used. The embodiments of this specification do not limit the specific structure of the displacement module.

[0212] In order to enable those skilled in the art to better understand and implement, the following is a detailed example description through a structural schematic diagram of a material offset value compensation system in a specific scenario.

[0213] Combination Figure 6 and Figure 7 , refer to Figure 8 As shown in the schematic diagram of the installation layout structure of a material offset value compensation system in an embodiment of the present specification, the material offset value compensation system 80 may include a material offset value detection system M1 and a compensation system M2. In a specific implementation, the material offset value detection system M1 and the compensation system M2 may be integrated on a circuit board 81, and the interactive information between the two may be transmitted through the circuit board 81.

[0214] Similar to the aforementioned embodiment, the material offset value detection system M1 may include a control device M11, a first drive device M12, and a second drive device M13, and the compensation device M2 may include a motion control unit M21 and a displacement unit M22, wherein the displacement unit M22 may include a first displacement unit M221 and a second displacement unit M222, wherein the first displacement unit M221 may adjust the offset value of the material along a first preset direction, and the second displacement unit M222 may adjust the offset value of the material along a second preset direction.

[0215] It should be noted that Figure 8 The first shift unit M221 and the second shift unit M222 in the figure only show the hardware circuit diagram of the control part thereof.

[0216] Optionally, the material offset value detection system M1 may further include a vacuum acquisition device M14, a data acquisition control device M15, a data acquisition device ( Figure 8 Not shown) and a motion control device (motion control unit) M17, wherein, in a specific implementation, the motion control unit and the motion control device can be designed to be integrated. For the convenience of description, the motion control unit and the motion control device are denoted by the reference numeral M21 below.

[0217] First, the control device M11 outputs a first control signal to the first driving device M12, and the first driving device M12 can perform vacuum processing on the carrying device on the processing platform. During the vacuuming process, the vacuum value acquisition device M14 can obtain the corresponding vacuum value analog quantity, and convert the type of the vacuum value analog quantity, and output the obtained vacuum value to the control device M11.

[0218] When the control device M11 determines that the acquired vacuum value is greater than the preset vacuum value, it can output a second control signal to the second drive device M13. The second drive device M13 can drive the carrying device to move to drive the material to move. During the movement of the material, the control device 11 can also output a third control signal to the data acquisition control device M15. The data acquisition control device M15 can respond to the third control signal and output a corresponding data acquisition signal to the data acquisition device M16, so that the data acquisition device uses the preset sampling frequency to collect the edge width value of the material and output it to the control device M11, and outputs a pulse signal with the same frequency as the preset sampling frequency to the motion control device M17, so that the motion control device M17 counts the number of edge width values ​​collected, saves the angle value corresponding to each edge width value, and outputs it to the control device M11.

[0219] The control device M11 can use a curve fitting algorithm to obtain an offset value according to each edge width value, the angle value corresponding to each edge width value, and the number of edge width values, thereby completing the material offset value detection process.

[0220] When the control device M11 determines that the calculated offset value is greater than the preset displacement value range, it can output a corresponding compensation signal to the motion control unit M21. The motion control unit M21 responds to the compensation signal and outputs a corresponding first drive signal to the first displacement unit M221 and the second displacement unit M222. The first displacement unit M221 adjusts the offset value of the material along the first preset direction, and the second displacement unit M222 can adjust the offset value of the material along the second preset direction, so that the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is within the preset offset value range, thereby completing the compensation process of the material offset value.

[0221] It is understandable that the above-mentioned schematic diagram of the installation layout structure of the material offset value compensation system is only an example. In actual applications, according to actual needs and application scenarios, those skilled in the art can adaptively select, expand and / or deform the above-mentioned examples according to actual needs and application scenarios. This can extend more implementation plans, such as: changing the actual installation position of each device, adding relevant protective devices, etc. The embodiments of this specification do not limit these extension plans.

[0222] Correspondingly, the embodiment of this specification also provides a schematic diagram of the architecture of a material offset value compensation system. Figure 8 The difference is that Fig. 9The first control signal between the control device M11 and the first driving device M12 needs to be transmitted through the vacuum value acquisition device M14, and the second control signal between the control device M11 and the second driving device M13 needs to be transmitted through the motion control device M21.

[0223] Specifically, the control device M11 may first output the first control signal to the vacuum value acquisition device M14, and the vacuum value acquisition device M14 controls the first driving device M12, and when the first driving device M12 performs a vacuum process on the carrying device, obtains the corresponding vacuum value and outputs it to the control device M11.

[0224] The control device M11 may output a first control signal to the motion control device M21 , and the motion control device M21 controls the second driving device M13 to drive the carrying device to move and drive the material to move.

[0225] The working principles and processes of other modules can refer to the relevant contents of the material offset value detection system and the material offset value compensation system in the aforementioned embodiments, which will not be repeated here.

[0226] Combination Figure 8 , refer to Fig.10 The mechanical structure diagram of a material offset value compensation system in an embodiment of the present specification is shown, and the material offset value compensation system 100 may include a data acquisition device M15, a first displacement unit M221, a second displacement unit M222, and a second driving device M13, wherein:

[0227] The second driving device M13 is coupled to the second displacement unit M222 and the carrying device 100A1 respectively, and can drive the carrying device 100A1 to move under the control of the control device to drive the material to rotate.

[0228] As a specific example, the second driving device M13 may include a motor ( Fig.10 (not shown), a vacuum interface M131 and a power interface M132, wherein the vacuum interface M131 can be connected to a first drive device (such as Figure 8 The first driving device M12 is connected to the carrier device 100A1, and the first driving device can perform vacuum processing on the carrier device 100A1 through the vacuum interface M131.

[0229] like Fig.10 As shown, the carrier 100A1 has an adsorption area 100A1-1, and the adsorption area 100A1-1 fixes the material by vacuum adsorption. For example, in the semiconductor field, wafers can be fixed by vacuum adsorption.

[0230] The data acquisition device M16 is fixedly connected to the first shift unit M221, and is suitable for acquiring edge data of the material when the second driving device M13 drives the material to move.

[0231] As a specific example, continue to refer to Fig.10 The data acquisition device M16 may include a first data acquisition unit M161, a second data acquisition unit M162 and a connecting unit M163, wherein one end of the second data acquisition unit M162 is fixedly connected to the first displacement unit M221, and the second end of the second data acquisition unit M162 is fixedly connected to the connecting unit M163; a guide rail is provided on the connecting unit M163, and the first data acquisition unit M161 can move along the guide rail.

[0232] In a specific implementation, the first data acquisition unit M161 can be used as an output end of a sampling signal, and the second data acquisition unit M162 can be used as a receiving end of a sampling signal.

[0233] In practical applications, the first data acquisition unit M161 and the second data acquisition unit M162 may be CCD (Charge Coupled Device) cameras. In some other optional examples, they may also be cameras, scanners, tablets and other devices.

[0234] The first displacement unit M221 is coupled to the carrying device 100A1 and is adapted to drive the carrying device 100A1 to move under the control of the motion control device so as to adjust the offset value of the material along the first preset direction.

[0235] As a specific example, the first displacement unit M221 may include a motor, a coupling, a screw rod, and a drag chain.

[0236] The second shifting unit M222 is coupled to the carrying device 100A1 and is adapted to drive the carrying device 100A1 to move under the control of the motion control device so as to adjust the offset value of the material along the second preset direction.

[0237] As a specific example, the second displacement unit M222 may include a motor, a coupling, a screw rod, and a drag chain, such as the drag chain 101 in the figure.

[0238] It should be noted that Fig.10 Only the mechanical structure of the execution part of the material offset compensation system is shown. For the specific hardware circuit layout structure of its control part, please refer to Figure 8 , which will not be described in detail here.

[0239] An embodiment of the present specification provides a computer-readable storage medium on which computer instructions are stored, wherein the computer instructions, when executed, execute the steps of the material offset value detection method described in any of the aforementioned embodiments. For details, please refer to the aforementioned embodiments and corresponding drawings, which will not be repeated here.

[0240] The embodiments of this specification also provide another computer-readable storage medium on which computer instructions are stored, wherein the computer instructions, when executed, execute the steps of the material offset value compensation method described in any of the aforementioned embodiments. For details, please refer to the aforementioned embodiments and corresponding drawings, which will not be repeated here.

[0241] The computer-readable storage medium may include, for example, any suitable type of memory unit, memory device, memory item, memory medium, storage device, storage item, storage medium and / or storage unit, such as memory, removable or non-removable medium, erasable or non-erasable medium, writable or rewritable medium, digital or analog medium, hard disk, floppy disk, compact disk read-only memory (CD-ROM), compact disk recordable (CD-R), compact disk rewritable (CD-RW), optical disk, magnetic medium, magneto-optical medium, removable memory cards or disks, various types of digital versatile discs (DVDs), magnetic tapes, cassettes, etc.

[0242] Although the embodiments of this specification are disclosed as above, the embodiments of this specification are not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the embodiments of this specification, so the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A material offset value detection method, used to detect the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, wherein the processing platform is provided with a carrying device, a first driving device and a second driving device, characterized in that: The processing platform is also provided with a motion control device, a data acquisition control device and a data acquisition device, and the detection method comprises: Outputting a first control signal to control the first driving device to perform a vacuum process on the carrying device, so that the material is adsorbed onto the carrying device, and obtaining a corresponding vacuum value; Determine whether the vacuum value is within a preset vacuum value range, and when the vacuum value is within the preset vacuum value range, output a second control signal to control the second drive device to drive the carrying device to move so as to drive the material to move, and obtain edge data of the material, wherein obtaining edge data of the material comprises: during the movement of the material, output a third control signal to the data acquisition control device, so that the data acquisition control device outputs a data acquisition control signal corresponding to the third control signal to the data acquisition device, so as to control the data acquisition device to collect the edge width value of the material using a preset sampling frequency, and so that the data acquisition control device outputs a pulse signal with a frequency the same as the preset sampling frequency, so as to control the motion control device to count the number of the edge width values ​​collected, and save the angle value corresponding to each edge width value, and use each edge width value of the material, the angle value corresponding to each edge width value and the number of the edge width values ​​collected as the edge data; Calculating and obtaining the offset value according to the edge data includes: obtaining a plurality of offset coordinate values ​​of the calibrated position of the material relative to the origin of the reference coordinate system of the processing platform according to each edge width value and the angle value corresponding to each edge width value; obtaining the offset value by using a least squares curve fitting algorithm according to the plurality of offset coordinate values ​​and the number of edge width values ​​collected; Among them, the edge width value refers to the difference between the distance between the actual edge of the material collected and the origin of the reference coordinate system of the processing platform and the distance between the preset edge of the material and the origin of the reference coordinate system of the processing platform; the preset edge of the material is the edge of the material when there is no offset between the origin of the reference coordinate system of the processing platform; the angle value refers to the angle between the line connecting the actual edge point of the material collected and the origin of the reference coordinate system of the processing platform and the positive extension direction of the axis of the reference coordinate system of the processing platform; the preset edge of the material refers to the edge of the material when the calibrated position of the material coincides with the origin of the reference coordinate system of the processing platform.

2. The material offset value detection method according to claim 1, characterized in that: The processing platform also includes: a vacuum value acquisition device; The obtaining of the corresponding vacuum value includes: when the first driving device performs a vacuum process on the carrying device, the vacuum value collecting device collects the corresponding vacuum value analog quantity in real time, and converts it into a vacuum value digital quantity as the vacuum value.

3. The material offset value detection method according to claim 1, characterized in that: The material is in the shape of a disk, and the marked position is the center of the material.

4. A material offset value compensation method, characterized in that: include: The material offset value detection method according to any one of claims 1 to 3 is used for detection to obtain the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, wherein a bearing device and a compensation device are provided on the processing platform; Determine whether the offset value is within a preset offset value range, and when the offset value is greater than the preset offset value range, output a compensation signal to the compensation device, so that the compensation device drives the carrying device to move to drive the material to move, so as to adjust the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform.

5. The material offset value compensation method according to claim 4, characterized in that: The compensation device includes a motion control unit and a displacement unit; When the offset value is greater than the preset offset value range, outputting a compensation signal to the compensation device comprises: When the offset value is greater than the preset offset value range, determining an offset compensation value according to the offset value; According to the offset compensation value and the preset displacement conversion coefficient, the number of driving pulses is obtained, and the compensation signal corresponding to the driving pulse is output to the motion control unit to control the motion control unit to output a first driving signal corresponding to the compensation signal to the displacement unit, so that the displacement unit drives the carrying device to move to drive the material to move.

6. The material offset value compensation method according to claim 5, characterized in that: The preset displacement conversion coefficient is determined by the following formula: K=n*A*L; Wherein: K represents the preset displacement conversion coefficient; n represents the number of pulses corresponding to one circle of movement of the displacement unit; A represents the transmission ratio of the displacement unit; L represents the transmission distance corresponding to one circle of movement of the displacement unit.

7. A material offset value detection system, used for detecting the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform, wherein the processing platform is provided with a carrying device, and the material offset value detection system comprises a control device, a first drive device, a second drive device, a motion control device, a data acquisition control device and a data acquisition device, wherein: The control device is used to output a first control signal to the first driving device and obtain a corresponding vacuum value; and to determine whether the vacuum value is within a preset vacuum value range, and when the vacuum value is within the preset vacuum value range, output a second control signal to the second driving device; and during the movement of the material, output a third control signal to the data acquisition control device and obtain edge data of the material; and for calculating and obtaining the offset value according to the edge data; The first driving device is used to perform a vacuum process on the carrying device in response to the first control signal, so that the material is adsorbed onto the carrying device; The second driving device is used to drive the carrying device to move so as to drive the material to move in response to the second control signal; The data acquisition control device is used to output a corresponding data acquisition signal to the data acquisition device in response to the third control signal, and is used to output a pulse signal having a frequency identical to a preset sampling frequency to the motion control device in response to the third control signal; The data acquisition device is used to respond to the data acquisition signal, collect the edge width value of the material using the preset sampling frequency, and output it to the control device; The motion control device is used to count the number of times the edge width value is collected in response to the pulse signal, and save the angle value corresponding to each edge width value, and output it to the control device; The control device obtains a plurality of offset coordinate values ​​of the calibrated position of the material relative to the origin of the reference coordinate system of the processing platform according to each edge width value and the angle value corresponding to each edge width value; and obtains the offset value by using a least squares curve fitting algorithm according to the plurality of offset coordinate values ​​and the number of edge width values ​​collected; Among them, the edge width value refers to the difference between the distance between the actual edge of the material collected and the origin of the reference coordinate system of the processing platform and the distance between the preset edge of the material and the origin of the reference coordinate system of the processing platform; the preset edge of the material is the edge of the material when there is no offset between the origin of the reference coordinate system of the processing platform; the angle value refers to the angle between the line connecting the actual edge point of the material collected and the origin of the reference coordinate system of the processing platform and the positive extension direction of the axis of the reference coordinate system of the processing platform; the preset edge of the material refers to the edge of the material when the calibrated position of the material coincides with the origin of the reference coordinate system of the processing platform.

8. The material offset value detection system according to claim 7, further comprising: The vacuum collection device is used to collect the corresponding vacuum value analog quantity in real time when the first driving device performs vacuum processing on the carrying device, convert it into a vacuum value digital quantity as the vacuum value, and transmit it to the control device.

9. A material offset value compensation system, characterized in that: include: The material offset value detection system according to claim 7 or 8, wherein the control device is further used to determine whether the offset value between the calibrated position of the material and the origin of the reference coordinate system of the processing platform is within a preset offset value range, and output a compensation signal when the offset value is greater than the preset offset value range, wherein a carrying device is provided on the processing platform; The compensation device is used to drive the carrying device to move in response to the compensation signal to drive the material to move, so as to adjust the relative position between the calibrated position of the material and the origin of the reference coordinate system of the processing platform.

10. The material offset value compensation system according to claim 9, characterized in that: The compensation device comprises a motion control unit and a displacement unit, wherein: The motion control unit is used to output a corresponding first driving signal to the displacement unit in response to the compensation signal; The displacement unit is used to drive the carrying device to move in response to the first driving signal to drive the material to move.

11. The material offset value compensation system according to claim 10, characterized in that: The displacement unit comprises a driving mechanism, a transmission mechanism and a displacement mechanism, wherein: The driving mechanism is connected to the motion control unit and the transmission mechanism respectively, and is used to generate a first driving force according to the first driving signal; The transmission mechanism is connected to the displacement mechanism and is used to transmit the first driving force to the displacement mechanism; The displacement mechanism is used to carry the material, and under the drive of the first driving force, drives the carrying device to move to drive the material to move, so as to adjust the relative position between the material calibration position and the origin of the reference coordinate system of the processing platform.

12. The offset compensation system according to claim 11, characterized in that: The driving mechanism includes a first driving mechanism and a second driving mechanism, and the transmission mechanism includes a first transmission mechanism and a second transmission mechanism, wherein: The first driving mechanism, whose first end is electrically connected to the motion control unit and whose second end is connected to the second end of the first transmission mechanism, is used to generate a first driving force along a first preset direction according to the first driving signal; The first transmission mechanism, whose second end is connected to the displacement mechanism, is used to output the first driving force along the first preset direction to the displacement mechanism; The second driving mechanism, whose first end is electrically connected to the motion control unit and whose second end is connected to the second end of the first transmission mechanism, is used to generate a first driving force along a second preset direction according to the first driving signal; The second transmission mechanism has a second end connected to the displacement mechanism, and is used to output the first driving force along the second preset direction to the displacement mechanism.

13. The offset compensation system according to claim 12, characterized in that: The displacement mechanism comprises a first displacement mechanism and a second displacement mechanism, wherein: The first displacement mechanism, whose first end is coupled to the second end of the first transmission mechanism, and whose second end is coupled to the carrying device, is used to drive the carrying device to move under the driving of the first driving force along the first preset direction so as to drive the material to move along the first preset direction; The second displacement mechanism has a first end coupled to the second end of the second transmission mechanism, and a second end coupled to the carrying device, and is used to drive the carrying device to move to move the material along the second preset direction under the drive of the first driving force along the second preset direction.

14. The material offset value compensation system according to claim 11, characterized in that: The control device is used to determine the offset compensation value according to the offset value when the offset value is greater than the preset offset value range, and obtain the number of driving pulses according to the offset compensation value and the preset displacement conversion coefficient, and output the compensation signal corresponding to the number of driving pulses to the compensation device.

15. The material offset value compensation system according to claim 14, characterized in that: The preset displacement conversion coefficient is determined by the following formula: K=n*A*L; Wherein, K represents the preset displacement conversion coefficient; n represents the number of pulses corresponding to one revolution of the driving mechanism; A represents the transmission ratio of the transmission mechanism; L represents the transmission distance corresponding to one circle of movement of the driving mechanism.

16. A computer-readable storage medium having computer instructions stored thereon, wherein: When the computer instructions are executed, the material offset value detection method according to any one of claims 1 to 3 is executed.

17. A computer-readable storage medium having computer instructions stored thereon, wherein: When the computer instructions are executed, the material offset value compensation method described in any one of claims 4 to 6 is executed.

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