Mask storage system, query system, storage method and computer equipment

Abstract

The present application relates to a storage system, query system, storage method, computer equipment and storage medium for a mask. The storage system includes a carrier, the carrier includes a mask placement area for placing the mask; a storage device stores preset coordinates and position information of each carrier in the preset coordinates; a detection device is set in a one-to-one correspondence with the carrier, and is used to detect the carrier, and when a mask is placed in the mask placement area, a first detection signal is sent; when a mask is placed outside the mask placement area on the carrier, a second detection signal is sent; the detection device is connected to the storage device, and the storage device is also used to store the mask position information in the preset coordinates when the first detection signal or the second detection signal is received; an alarm device is connected to the detection device in a one-to-one correspondence, and is used to display an alarm when the second detection signal is received, thereby avoiding the risk of the mask falling and being damaged.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a mask storage system, a query system, a storage method, a computer device, and a computer-readable storage medium. Background Art

[0002] The photolithography process is an important step in the semiconductor device manufacturing process. This step uses exposure and development to depict geometric structures on the photoresist layer, and then the pattern on the mask is transferred to the substrate through an etching process. In the semiconductor device manufacturing process, many different patterns need to be formed on the substrate, and one pattern corresponds to one mask. In the semiconductor device manufacturing process, many different types and models of masks are needed.

[0003] However, there is no dedicated storage box for the masks (reticles) used in the production of semiconductor devices. Currently, the masks that are not used temporarily are mainly stored on mask trees. When the masks are placed on the mask tree, if they are not placed in place, there is a risk of falling, which will cause the interruption of semiconductor device production and bring great economic losses. Summary of the invention

[0004] Based on this, it is necessary to provide a mask storage system, query system, storage method, computer device and computer-readable storage medium to address the above technical problems.

[0005] A mask storage system, comprising:

[0006] A carrying device, the carrying device comprising a mask placement area for placing the mask;

[0007] A storage device storing preset coordinates and position information of each of the carrying devices in the preset coordinates;

[0008] A detection device is provided in a one-to-one correspondence with the carrying device, and is used to detect the carrying device, and when a mask is placed in the mask placement area on the carrying device, a first detection signal is sent; when a mask is placed outside the mask placement area on the carrying device, a second detection signal is sent; the detection device is connected to the storage device, and the storage device is further used to store the mask position information of the mask in the preset coordinates when receiving the first detection signal or the second detection signal;

[0009] The alarm device is connected to the detection device in a one-to-one correspondence, and is used for displaying an alarm when receiving the second detection signal.

[0010] In one embodiment, the detection device includes at least two detection modules, and the detection modules are arranged in the edge area of ​​the mask placement area. When a mask is placed on the carrier, and the detection modules corresponding to the carrier all detect the mask, the detection device sends a first detection signal; when a mask is placed on the carrier, at least one of the detection modules corresponding to the carrier does not detect the mask, and at least one detects the mask, the detection device sends a second detection signal.

[0011] In one of the embodiments, the detection module includes a pressure-sensitive sensor, and when the pressure-sensitive sensor detects that the pressure signal of the edge area is not less than a preset pressure signal, it is determined that the detection module has detected the mask.

[0012] In one of the embodiments, the storage system further comprises a display device connected to the storage device and used to establish display coordinates, wherein the display coordinates are the same as the preset coordinates;

[0013] The display device is also used to display the position information of each of the carriers in the display coordinates. When the position information of the carrier is the same as the mask position information, a first display is performed; when the position information of the carrier is different from the mask position information, a second display is performed.

[0014] In one of the embodiments, the detection device is further used to send a third detection signal when it detects that no mask is placed on the carrier; the storage device is further used to delete the mask position information that is the same as the position information of the carrier without the mask placed thereon when receiving the third detection signal.

[0015] In one of the embodiments, a barcode pattern is provided on the mask plate, and the storage system also includes a reading device corresponding to the carrying device one by one, and the reading device is connected to the storage device for obtaining the mask plate number information in the barcode pattern; the storage device is also used to store the mask plate position information and the mask plate number information in a one-to-one correspondence.

[0016] The above-mentioned mask storage system includes a carrying device, the carrying device includes a mask placement area for placing the mask; a storage device, storing preset coordinates and position information of each of the carrying devices in the preset coordinates; a detection device, which is arranged in a one-to-one correspondence with the carrying device, and is used to detect the carrying device, and when a mask is placed in the mask placement area on the carrying device, sends a first detection signal; when a mask is placed outside the mask placement area on the carrying device, sends a second detection signal; the detection device is connected to the storage device, and the storage device is also used to store the mask position information of the mask in the preset coordinates when receiving the first detection signal or the second detection signal; an alarm device, which is connected to the detection device in a one-to-one correspondence, and is used to display an alarm when receiving the second detection signal. In the present application, when the detection device corresponding to the carrier device detects that a mask is placed on the carrier device, the storage device stores the mask position information of the mask in the preset coordinates; and when the mask is placed outside the mask placement area on the carrier device, the alarm device connected to the detection device in a one-to-one correspondence performs an alarm display. By using the alarm device connected to the detection device in a one-to-one correspondence, the purpose of performing an alarm display when the mask on each carrier device is not placed in the mask placement area is achieved, thereby reminding the user to adjust the position of the mask on the carrier device until the mask is placed in the mask placement area on the carrier device. The risk of the mask falling and being damaged when the mask is placed outside the mask placement area on the carrier device is avoided, thereby avoiding the interruption of semiconductor device production due to mask damage and the resulting economic losses.

[0017] A mask query system, comprising:

[0018] A server connected to a storage device of at least one storage system, and used to obtain the coding information of the storage system and the mask position information stored in the storage device, wherein the storage system is the storage system of the mask including the reading device;

[0019] An input device, used for inputting preset mask plate number information;

[0020] A query device, connected to the server and the input device respectively, for acquiring the encoding information of the corresponding storage system and the corresponding mask position information according to the preset mask number information;

[0021] An output device is connected to the query device and is used to output the coding information and mask position information corresponding to the preset mask number information.

[0022] The above-mentioned mask query system includes: a server connected to a storage device of no less than one storage system, used to obtain the coding information of the storage system and the mask position information stored in the storage device, wherein the storage system is the above-mentioned mask storage system including the reading device; an input device, used to input the preset mask number information; a query device, respectively connected to the server and the input device, used to obtain the coding information of the corresponding storage system and the corresponding mask position information according to the preset mask number information; an output device, connected to the query device, used to output the coding information and mask position information corresponding to the preset mask number information. The present application inputs the preset mask number information of the mask to be queried through the input device, and can obtain the coding information of the storage system where the mask corresponding to the preset mask number information is located, and the mask position information of the mask in the storage system from the output device. Through the query system of the present application, the coding information and mask position information corresponding to the masks stored in each storage system connected to the server of the query system can be quickly obtained, which shortens the query time of querying the masks stored in each storage system and improves the query efficiency.

[0023] A method for storing a mask, used in a mask storage system including a carrier, the method comprising:

[0024] Obtaining the position information of each carrying device in the preset coordinates;

[0025] Detecting whether a mask is placed on each of the carrying devices;

[0026] If a mask is placed on the carrying device, storing the mask position information of the mask in the preset coordinates;

[0027] If a mask is placed outside the mask placement area on the carrying device, an alarm is displayed.

[0028] In one embodiment, the step of detecting whether a mask is placed on the carrying device comprises:

[0029] Detecting a pressure signal at an edge area of ​​the mask placement area;

[0030] If the pressure signals are not less than the preset pressure signals, it is determined that a mask is placed in the mask placement area on the carrier device;

[0031] If at least one of the pressure signals is not less than a preset pressure signal, and at least one of the pressure signals is less than a preset pressure signal, it is determined that a mask is placed outside the mask placement area on the carrier device.

[0032] In one embodiment, the method further comprises:

[0033] Establishing display coordinates that are the same as the preset coordinates;

[0034] Displaying the position information of each of the carrying devices in the display coordinates;

[0035] When the position information of the carrying device is the same as the position information of the mask, a first display is performed; when the position information of the carrying device is different from the position information of the mask, a second display is performed.

[0036] In one embodiment, a barcode pattern is provided on the mask, and the method further comprises:

[0037] Obtaining the mask number information in the barcode pattern, and storing the mask number information and the mask position information in a one-to-one correspondence;

[0038] Enter the preset mask number information;

[0039] According to the preset mask number information, encoding information and mask position information of the storage system corresponding to the preset mask number information are obtained.

[0040] A computer device comprises a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of any one of the above methods when executing the computer program.

[0041] A computer-readable storage medium stores a computer program, which implements the steps of any of the above methods when executed by a processor.

[0042] The above-mentioned mask storage method, computer device and computer-readable storage medium are used in a mask storage system including a carrier device, and detect whether a mask is placed on each of the carrier devices. If a mask is placed on the carrier device, the mask position information of the mask in the preset coordinates is stored; if a mask is placed outside the mask placement area on the carrier device, an alarm display is performed, and the purpose of alarm display is achieved when the mask on each carrier device is not placed in the mask placement area, thereby reminding the user to adjust the position of the mask on the carrier device until the mask is placed in the mask placement area on the carrier device. The risk of the mask falling and being damaged when the mask is placed outside the mask placement area on the carrier device is avoided, thereby avoiding the interruption of semiconductor device production caused by mask damage and the resulting economic losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0044] Figure 1 It is a structural schematic diagram of the storage system of the mask in the first embodiment;

[0045] Figure 2 A schematic diagram of the positions of a detection device and a carrying device in an embodiment;

[0046] Figure 3 is a schematic diagram of varistor detection in one embodiment;

[0047] Figure 4 A schematic diagram of a voltage output curve of a varistor in one embodiment;

[0048] Figure 5 is a schematic structural diagram of a storage system for a mask in a second embodiment;

[0049] Figure 6 It is a schematic diagram showing the display of the position information of the carrying device by the display device in one embodiment;

[0050] Figure 7 A schematic diagram of the structure of a mask query system in one embodiment;

[0051] Figure 8 is a schematic flow chart of a method for storing a mask in one embodiment;

[0052] Fig. 9 is a schematic flow chart of a method for storing a mask in another embodiment;

[0053] Fig.10 The figure is a flowchart of a method for storing a mask in another embodiment. DETAILED DESCRIPTION

[0054] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0055] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0056] It can be understood that the terms "first", "second", etc. used in the present application can be used in this article to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish the first element from another element.

[0057] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element, or connected to the other element through an intermediate element. In addition, the "connection" in the following embodiments should be understood as "electrical connection", "communication connection", etc. if there is transmission of electrical signals or data between the connected objects.

[0058] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" and the like specify the presence of stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. At the same time, the term "and / or" used in this specification includes any and all combinations of the relevant listed items.

[0059] In one embodiment, a mask storage system is provided, comprising:

[0060] A carrying device, the carrying device comprising a mask placement area for placing the mask;

[0061] A storage device storing preset coordinates and position information of each of the carrying devices in the preset coordinates;

[0062] A detection device is provided in one-to-one correspondence with the carrying device, and is used to detect the carrying device, and when a mask is placed in the mask placement area on the carrying device, a first detection signal is sent; when a mask is placed outside the mask placement area on the carrying device, a second detection signal is sent; the detection device is connected to the storage device, and the storage device is further used to store the mask position information of the mask in the preset coordinates when receiving the first detection signal or the second detection signal;

[0063] The alarm device is connected to the detection device in a one-to-one correspondence, and is used for displaying an alarm when receiving the second detection signal.

[0064] like Figure 1 As shown, a storage system for a mask plate includes two carrying devices 10A and 10B for exemplary description; the carrying device 10A includes a mask plate placement area 102A for placing the mask plate, the detection device 30A is arranged corresponding to the carrying device 10A, and the alarm device 40A is arranged corresponding to the detection device 30A. The detection device 30A is used to detect the carrying device 10A, and when a mask plate is placed in the mask plate placement area 102A of the carrying device 10A, a first detection signal is sent, and when a mask plate is placed outside the mask plate placement area 102A of the carrying device 10A, a second detection signal is sent. When the alarm device 40A receives the second detection signal sent by the detection device 10A, an alarm is displayed to remind the user that the mask plate is not placed in the mask plate placement area 102A of the carrying device 10A, and the placement position of the mask plate on the carrying device 10A needs to be adjusted, thereby reducing the risk of the mask plate falling and being damaged. The carrier device 10B includes a mask placement area 102B for placing the mask, the detection device 30B is arranged corresponding to the carrier device 10B, and the alarm device 40B is arranged corresponding to the detection device 30B. The detection method is the same as that of the detection carrier device 10A. When the alarm device 40B receives the second detection signal sent by the detection device 10B, an alarm is displayed to remind the user that the mask has not been placed in the mask placement area 102B of the carrier device 10B, and the placement position of the mask on the carrier device 10B needs to be adjusted, thereby avoiding the risk of the mask falling and being damaged when the mask is not placed in the mask placement area 102B on the carrier device 10B, thereby avoiding the interruption of semiconductor device production caused by mask damage. The storage device 20 of the storage system stores preset coordinates, and the position information A of the carrier 10A in the preset coordinates and the position information B of the carrier 10B in the preset coordinates; the storage device 20 is connected to the detection device 30A and the detection device 30B respectively. When the detection device 30A and / or the detection device 30B sends a first detection signal and / or a second detection signal, that is, when the detection device 30A and / or the detection device 30B detects that a mask is placed on the carrier 10A and / or the carrier 10B, the storage device 20 stores the mask position information in the preset coordinates, that is, the position information of the carrier 10A and / or the carrier 10B where the mask is located in the preset coordinates. Assuming that the detection device 30A detects that a mask is placed on the carrier 10A, and the detection device 30B detects that no mask is placed on the carrier 10B, the storage device 20 stores the position information A of the carrier 10A in the preset coordinates as a mask position information.

[0065] In one embodiment, the alarm display includes a red indication and / or a buzzer alarm. In its embodiment, the alarm display can be other common displays with warning effects, such as sound and light alarms, which are not given one by one here.

[0066] In one embodiment, the alarm device displays an alarm when the time for continuously receiving the second detection signal is not less than a first preset time. In practical applications, the value of the first preset time can be set as needed, such as 5 seconds, 10 seconds, etc.

[0067] In one embodiment, the detection device includes at least two detection modules, and the detection modules are arranged in the edge area of ​​the mask placement area. When a mask is placed on the carrier, and the detection modules corresponding to the carrier all detect the mask, the detection device sends a first detection signal; when a mask is placed on the carrier, at least one of the detection modules corresponding to the carrier does not detect the mask, and at least one detects the mask, the detection device sends a second detection signal.

[0068] In one of the embodiments, the detection device includes an even number of detection modules, and the detection modules are diagonally arranged at the edge area of ​​the mask placement area.

[0069] In one embodiment, the detection device includes an even number of detection modules, and the detection modules are arranged at the edge areas on both sides of the mask placement area. In the application process, the positions of the detection modules at the edge areas on both sides of the mask placement area can be set according to actual needs, such as symmetrical arrangement.

[0070] In one of the embodiments, the detection device includes an odd number of detection modules, and one of the detection modules is disposed in an edge area of ​​the mask placement area away from a position where a user takes and places the mask.

[0071] like Figure 2 As shown, the detection device 30A and the carrier device 10A are used as examples for explanation, assuming that the detection device 30A includes detection modules 302A and 304A, and the detection modules 302A and 304A are diagonally arranged at the edge area of ​​the mask placement area 102A (that is, the distances between the detection modules 302A and 304A and the edges of the mask placement area 102 adjacent to them are equal). When a mask is placed on the carrier device 10A, and the detection modules 302A and 304A both detect the mask, the detection device 30A sends a first detection signal; when a mask is placed on the carrier device 10A, and any one of the detection modules 302A and 304A does not detect the mask, and the other detects the mask, the detection device 30A sends a second detection signal.

[0072] In one of the embodiments, the detection module includes a pressure-sensitive sensor, and when the pressure-sensitive sensor detects that the pressure signal of the edge area is not less than a preset pressure signal, it is determined that the detection module has detected the mask.

[0073] like Figure 3 As shown, it is a schematic diagram of varistor detection; Ui is the input voltage, resistor R1 is a fixed resistor, resistor Rx is the varistor in the pressure sensitive sensor, resistor R1 and RX are connected in series, the output end of the varistor Rx is connected to the input end of the voltage amplifier circuit, and the voltage amplifier circuit, A / D conversion module, decoding interface circuit, and comparison circuit are connected in series in sequence; the voltage amplifier circuit includes resistor R2, transistor slightly variable equivalent linear resistor Rbe and constant current source β, resistor R3 and resistor R4. When the mask is in contact with the varistor Rx, according to the voltage division principle, the voltage across the varistor Rx is U0 = Ui*Rx / (R1+Rx). When the varistor Rx is subjected to different forces, different voltages U0 are input to the voltage amplifier circuit. After amplification by the voltage amplifier circuit, the amplified voltage U1 is input to the A / D conversion module. For example, the voltage amplifier circuit amplifies the voltage U0 across the varistor Rx by 150 times to obtain the voltage U1. After analysis and processing by the A / D conversion module and the decoding interface circuit, the conversion data is input to the comparison circuit. The comparison circuit compares the conversion data with the preset value, and then determines the state of the mask on the carrier. When it is determined that the mask is not placed in the mask placement area, the detection device sends a second detection signal, and the alarm device displays an alarm to remind the operator to adjust the position of the mask on the carrier.

[0074] Assume that both detection modules 302A and 304A are pressure-sensitive sensors, detection module 302A includes a first pressure-sensitive resistor, and detection module 304A includes a second pressure-sensitive resistor. When the voltage output of the first pressure-sensitive resistor in detection module 302A or the second pressure-sensitive resistor in detection module 304A fluctuates over time (similar to Figure 4 The output voltage of the first varistor or the second varistor is abnormal, indicating that a mask is placed outside the mask placement area 102A of the carrier device 10A, and the detection device 30A sends a second detection signal. When the voltage output of the first varistor in the detection module 302A and the second varistor in the detection module 304A does not change with time, and the output voltage approaches zero (similar to Figure 4 If the voltage output of the first varistor in the detection module 302A and the second varistor in the detection module 304A does not change with time, and the output voltage approaches a fixed value M (similar to Figure 4 ), it means that both the detection modules 302A and 304A detect the mask, and a mask is placed in the mask placement area 102A, and the detection device 30A sends a first detection signal, wherein the fixed value M is the voltage value output by the varistor when the mask is placed in the mask placement area 102A.

[0075] In one of the embodiments, the detection device is further used to send a third detection signal when it detects that no mask is placed on the carrier; the storage device 20 is further used to delete the mask position information that is the same as the position information of the carrier without the mask placed thereon when receiving the third detection signal.

[0076] Taking the carrier device 10A as an example, after the detection device 30A detects that a mask is placed on the carrier device 10A, the storage device 20 stores the first mask position information of the mask. When the mask on the carrier device 10A is taken out, the detection device 30A detects that no mask is placed on the carrier device 10A, and sends a third detection signal. After receiving the third detection signal, the storage device 20 deletes the stored first mask position information.

[0077] In one of the embodiments, a barcode pattern is provided on the mask plate, and the storage system also includes a reading device corresponding to the carrying device one by one, and the reading device is connected to the storage device for obtaining the mask plate number information in the barcode pattern; the storage device is also used to store the mask plate position information and the mask plate number information in a one-to-one correspondence.

[0078] In one embodiment, the reading device includes a barcode reader, and the barcode pattern includes a two-dimensional code. When the mask is placed on the carrier, the barcode reader scans the two-dimensional code on the mask to obtain the corresponding mask number information, and sends the obtained mask number information to the storage device.

[0079] In one embodiment, the reading device includes an image acquisition device and an image recognition device, the barcode pattern is the mask plate number information, and when the mask plate is placed on the carrier device, the image acquisition device (such as a camera) in the reading device acquires an image of the barcode pattern, and the image recognition device acquires the mask plate number information in the image after recognizing the image, and sends the acquired mask plate number information to the storage device.

[0080] In one embodiment, the storage device 20 is further configured to delete the mask position information that is the same as the position information of the carrier device without the mask placed thereon, and the mask number information stored corresponding to the mask position information, when receiving the third detection signal.

[0081] like Figure 5As shown, the carrier device 10A is connected to the reading device 60A, and the carrier device 10B is connected to the reading device 60B. When the first mask and the second mask are placed on the carrier devices 10A and 10B respectively, the reading device 60A reads the mask number information A1 of the first mask, and the reading device 60B reads the mask number information A2 of the second mask. The storage device 20 stores the mask position information B1 and the mask number information A1 of the first mask correspondingly, and stores the mask position information B2 and the mask number information A2 of the second mask correspondingly.

[0082] In one of the embodiments, the storage device is further used to store the system time for acquiring the mask position information and the mask position information in a one-to-one correspondence.

[0083] like Figure 5 As shown, in one embodiment, the storage system further includes a display device 50, the display device 50 is connected to the storage device 20, and is used to establish display coordinates, wherein the display coordinates are the same as the preset coordinates;

[0084] The display device 50 is also used to display the position information of each of the carriers in the display coordinates. When the position information of the carrier is the same as the mask position information, a first display is performed; when the position information of the carrier is different from the mask position information, a second display is performed.

[0085] After the display device 50 obtains the preset coordinates stored in the storage device 20, it establishes display coordinates that are the same as the preset coordinates, and then displays the position information of the carrier device in the display coordinates. When a mask is placed on the carrier device, the display device 50 performs a first display of the position information of the carrier device. When no mask is placed on the carrier device, the display device 50 performs a second display of the position information of the carrier device.

[0086] In one embodiment, the first display is displayed in green, and the second display is displayed in gray. In other embodiments, the first display and the second display are two things of the same type, or two things of different types, such as different letters, different words, etc. Figure 6 As shown, in one embodiment, the first display is a display of letters M (M1-Mx) and letters N (N1-Ny), where x and y are the numbers of the first display, and the second display is Through the different displays of the display device, the user can easily see which carriers in the storage system have no masks placed on them.

[0087] In one embodiment, the first display is the mask number information corresponding to the mask position information. The user can search for each mask stored in the storage system through the mask number information displayed by the display device, and the query process is simple, avoiding the operation error caused by manual mask search.

[0088] In one embodiment, the display device includes an input module, a query module, and an output module. The input module is used to input the query mask number information to be queried. The query module is connected to the input module and the storage device respectively, and is used to obtain the corresponding mask position information according to the query mask number information. The output module is connected to the query module and is used to output the mask position information corresponding to the query mask number information. The user can obtain the mask position information of the mask in the storage system by inputting the query mask number information to be searched through the input module. The query process is simple, and the operation error caused by searching for the mask by comparing the required mask number information is avoided.

[0089] The above-mentioned mask storage system includes a carrying device, the carrying device includes a mask placement area for placing the mask; a storage device, storing preset coordinates and position information of each of the carrying devices in the preset coordinates; a detection device, which is arranged in a one-to-one correspondence with the carrying device, and is used to detect the carrying device, and when a mask is placed in the mask placement area on the carrying device, sends a first detection signal; when a mask is placed outside the mask placement area on the carrying device, sends a second detection signal; the detection device is connected to the storage device, and the storage device is also used to store the mask position information of the mask in the preset coordinates when receiving the first detection signal or the second detection signal; an alarm device, which is connected to the detection device in a one-to-one correspondence, and is used to display an alarm when receiving the second detection signal. In the present application, when the detection device corresponding to the carrier device detects that a mask is placed on the carrier device, the storage device stores the mask position information of the mask in the preset coordinates; and when the mask is placed outside the mask placement area on the carrier device, the alarm device connected to the detection device in a one-to-one correspondence performs an alarm display. By using the alarm device connected to the detection device in a one-to-one correspondence, the purpose of performing an alarm display when the mask on each carrier device is not placed in the mask placement area is achieved, thereby reminding the user to adjust the position of the mask on the carrier device until the mask is placed in the mask placement area on the carrier device. The risk of the mask falling and being damaged when the mask is placed outside the mask placement area on the carrier device is avoided, thereby avoiding the interruption of semiconductor device production due to mask damage and the resulting economic losses.

[0090] like Figure 7As shown, in one embodiment, a mask query system is provided, comprising:

[0091] A server 502 is connected to a storage device of at least one storage system, and is used to obtain the encoding information of the storage system and the mask position information stored in the storage device, wherein the storage system is the storage system of the mask including the reading device;

[0092] Combination Figure 7 The server 502 is connected to the storage device 506A of the storage system 504A and the storage device 506B of the storage system 504B respectively, and is used to obtain the first coding information of the storage system 504A and the second coding information of 504B, and the mask position information stored in the storage devices 506A and 506B, wherein the storage system is a mask storage system including a reading device.

[0093] The input device 508 is used to input preset mask plate number information; that is, the input device 508 is used to input preset mask plate number information Z.

[0094] The query device 510 is connected to the server 502 and the input device 508, respectively, and is used to obtain the encoding information of the corresponding storage system and the corresponding mask position information according to the preset mask number information; assuming that the mask with the mask number information Z is placed on the carrier in the storage system 504A, the query device 510 obtains the first encoding information of the storage system 504A and the mask position information Z' of the mask with the mask number information Z in the storage system 504A according to the preset mask number information Z input by the input device.

[0095] The output device 512 is connected to the query device 510 and is used to output the coding information and mask position information corresponding to the preset mask number information. The output device 512 outputs the first coding information and mask position information Z' of the storage system 504A corresponding to the preset mask number information Z.

[0096] In one embodiment, the output device 512 is further configured to output the storage time corresponding to the mask position information.

[0097] In one embodiment, the storage system includes a display device, and the query system also includes a system display device connected to the output device and the query device respectively, and the system display device is used to display the coding information and mask position information corresponding to the preset mask number information. The server is also used to obtain the position information of the carrier device stored in the storage device, and the system display device is also used to display a first display and a second display of the display device of the storage system corresponding to the coding information.

[0098] The above-mentioned mask query system includes: a server connected to a storage device of no less than one storage system, used to obtain the coding information of the storage system and the mask position information stored in the storage device, wherein the storage system is the above-mentioned mask storage system including the reading device; an input device, used to input the preset mask number information; a query device, respectively connected to the server and the input device, used to obtain the coding information of the corresponding storage system and the corresponding mask position information according to the preset mask number information; an output device, connected to the query device, used to output the coding information and mask position information corresponding to the preset mask number information. The present application inputs the preset mask number information of the mask to be queried through the input device, and the coding information of the storage system where the mask corresponding to the preset mask number information is located, and the mask position information of the mask in the storage system can be obtained from the output device. Through the query system of the present application, the coding information and mask position information corresponding to the masks stored in each storage system connected to the server of the query system can be quickly obtained, which shortens the query time of querying the masks stored in each storage system and improves the query efficiency.

[0099] like Figure 8 As shown, in one embodiment, a method for storing a mask is provided, which is used in a mask storage system including a carrier, and the method includes:

[0100] S102, obtaining position information of each carrying device in a preset coordinate.

[0101] S104, detecting whether a mask is placed on each of the carrying devices.

[0102] S106: If a mask is placed on the carrying device, the mask position information of the mask in the preset coordinates is stored.

[0103] S108: If a mask is placed outside the mask placement area on the carrier, an alarm is displayed.

[0104] In one embodiment, the step of detecting whether a mask is placed on the carrying device comprises:

[0105] Detect the pressure signals of the edge area of ​​the mask placement area; if the pressure signals are not less than the preset pressure signals, it is determined that a mask is placed in the mask placement area on the carrier; if at least one of the pressure signals is not less than the preset pressure signal, and at least one of the pressure signals is less than the preset pressure signal, it is determined that a mask is placed outside the mask placement area on the carrier.

[0106] like Fig. 9As shown, in one embodiment, the method further includes:

[0107] S202: Establish display coordinates that are the same as the preset coordinates.

[0108] S204: Displaying the position information of each of the carrying devices in the display coordinates.

[0109] When the position information of the carrier device is the same as the position information of the mask, a first display is performed; when the position information of the carrier device is different from the position information of the mask, a second display is performed.

[0110] like Fig.10 As shown, in one embodiment, a barcode pattern is provided on the mask, and the method further comprises:

[0111] S302, obtaining the mask number information in the barcode pattern, and storing the mask number information and the mask position information in a one-to-one correspondence.

[0112] S304, input preset mask number information.

[0113] S306: Acquire, according to the preset mask number information, encoding information and mask position information of a storage system corresponding to the preset mask number information.

[0114] A computer device comprises a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of any one of the above methods when executing the computer program.

[0115] A computer-readable storage medium stores a computer program, which implements the steps of any of the above methods when executed by a processor.

[0116] The above-mentioned mask storage method, computer device and computer-readable storage medium are used in a mask storage system including a carrier device, and detect whether a mask is placed on each of the carrier devices. If a mask is placed on the carrier device, the mask position information of the mask in the preset coordinates is stored; if a mask is placed outside the mask placement area on the carrier device, an alarm display is performed, and the purpose of alarm display is achieved when the mask on each carrier device is not placed in the mask placement area, thereby reminding the user to adjust the position of the mask on the carrier device until the mask is placed in the mask placement area on the carrier device. The risk of the mask falling and being damaged when the mask is placed outside the mask placement area on the carrier device is avoided, thereby avoiding the interruption of semiconductor device production caused by mask damage and the resulting economic losses.

[0117] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory or optical memory, etc. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0118] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", "ideal embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.

[0119] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0120] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A mask storage system, characterized in that: include: A carrying device, the carrying device comprising a mask placement area for placing the mask; A storage device storing preset coordinates and position information of each of the carrying devices in the preset coordinates; A detection device is provided in a one-to-one correspondence with the carrying device, and is used to detect the carrying device, and when a mask is placed in the mask placement area on the carrying device, a first detection signal is sent; when a mask is placed outside the mask placement area on the carrying device, a second detection signal is sent; the detection device is connected to the storage device, and the storage device is further used to store the mask position information of the mask in the preset coordinates when receiving the first detection signal or the second detection signal; An alarm device, connected to the detection device in a one-to-one correspondence, and used for displaying an alarm when receiving the second detection signal; The detection devices each include at least two detection modules, and the detection modules are each arranged at an edge area of ​​the mask placement area. A mask is placed on the carrier device, and when at least one of the detection modules corresponding to the carrier device fails to detect the mask and at least one detects the mask, the detection device sends a second detection signal.

2. The storage system according to claim 1, characterized in that: When a mask is placed on the carrying device and the detection modules corresponding to the carrying device all detect the mask, the detection device sends a first detection signal.

3. The storage system according to claim 2, characterized in that: The detection module includes a pressure-sensitive sensor. When the pressure-sensitive sensor detects that the pressure signal of the edge area is not less than a preset pressure signal, it is determined that the detection module detects the mask.

4. The storage system according to claim 1, characterized in that: The storage system further includes a display device connected to the storage device and used to establish display coordinates, wherein the display coordinates are the same as the preset coordinates; The display device is also used to display the position information of each of the carriers in the display coordinates. When the position information of the carrier is the same as the mask position information, a first display is performed; when the position information of the carrier is different from the mask position information, a second display is performed.

5. The storage system according to claim 1, characterized in that: The detection device is further used to send a third detection signal when it detects that no mask is placed on the carrier; the storage device is further used to delete the mask position information that is the same as the position information of the carrier without the mask placed thereon when receiving the third detection signal.

6. The storage system according to claim 1, characterized in that: The mask is provided with a barcode pattern, and the storage system further comprises a reading device corresponding to the carrying device one by one, the reading device being connected to the storage device and being used to obtain the mask number information in the barcode pattern; The storage device is also used to store the mask position information and the mask number information in a one-to-one correspondence.

7. A mask query system, characterized in that: include: A server connected to a storage device of at least one storage system, and used to obtain the coding information of the storage system and the mask position information stored in the storage device, wherein the storage system is the storage system according to claim 6; An input device, used for inputting preset mask plate number information; A query device, connected to the server and the input device respectively, for acquiring the mask number information and the corresponding mask position information of the corresponding storage system according to the preset mask number information; An output device is connected to the query device and is used to output the coding information and mask position information corresponding to the preset mask number information.

8. A method for storing a mask, characterized in that: A storage system for a mask including a carrier, the method comprising: Obtaining the position information of each carrying device in the preset coordinates; Detecting whether a mask is placed on each of the carrying devices; If a mask is placed on the carrying device, storing the mask position information of the mask in the preset coordinates; If a mask is placed outside the mask placement area on the carrier, an alarm is displayed; The step of detecting whether a mask is placed on each of the carrying devices comprises: Detecting a pressure signal at an edge area of ​​the mask placement area; If at least one of the pressure signals is not less than a preset pressure signal, and at least one of the pressure signals is less than a preset pressure signal, it is determined that a mask is placed outside the mask placement area on the carrier device.

9. The storage method according to claim 8, characterized in that: The step of detecting whether a mask is placed on each of the carrying devices further includes: if the pressure signals are not less than a preset pressure signal, determining that a mask is placed in the mask placement area on the carrying device.

10. The storage method according to claim 8, characterized in that: The method further comprises: Establishing display coordinates that are the same as the preset coordinates; Displaying the position information of each of the carrying devices in the display coordinates; When the position information of the carrying device is the same as the position information of the mask, a first display is performed; when the position information of the carrying device is different from the position information of the mask, a second display is performed.

11. The storage method according to claim 8, characterized in that: A barcode pattern is provided on the mask, and the method further comprises: Obtaining the mask number information in the barcode pattern, and storing the mask number information and the mask position information in a one-to-one correspondence; Enter the preset mask number information; According to the preset mask number information, encoding information and mask position information of the storage system corresponding to the preset mask number information are obtained.

12. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that: When the processor executes the computer program, the steps of the method according to any one of claims 8 to 11 are implemented.

13. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 8 to 11 are implemented.

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