Semiconductor manufacturing system, control device, control method and storage medium

Abstract

The present disclosure provides a semiconductor manufacturing system, a control device, a control method and a storage medium. The system comprises: a local operation terminal, which displays a device screen of a semiconductor manufacturing device; a remote operation terminal, which is connected to the semiconductor manufacturing device via a network and displays the device screen; and a control device, which controls the semiconductor manufacturing device based on operations received from the local operation terminal and the remote operation terminal by the user, and the control device comprises the following units: managing the simultaneous login status from the local operation terminal and the remote operation terminal; managing the device screen display status of the local and remote operation terminals; and generating screen data of the device screen sent to the local operation terminal and the remote operation terminal for the local operation terminal and each remote operation terminal based on the simultaneous login status and the device screen display status.

Description

Technical Field

[0001] The present disclosure relates to a semiconductor manufacturing system, a control device, a control method, and a program. Background Art

[0002] For example, a semiconductor manufacturing device is provided with a control device for controlling the operation of the semiconductor manufacturing device itself. The control device is provided with an input device and a display device. The operator inputs instructions and information to the control device via the input device to control the semiconductor manufacturing device, and confirms the processing condition settings and current status of the semiconductor manufacturing device displayed on the display device. The operator can control or monitor the semiconductor manufacturing device at a location where the semiconductor manufacturing device is installed in a clean room by means of the input device and the display device provided in the control device.

[0003] Generally, semiconductor manufacturing equipment is installed in a clean room. Since the environment in the clean room needs to be maintained constant, it is necessary to minimize the entry and exit of people. In the past, the following remote control system was known: a semiconductor manufacturing equipment installed in a clean room is connected to a computer outside the clean room via a network, and the computer is used to control or monitor the operation of the processing device (for example, refer to Patent Document 1).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2008-251050 Summary of the invention

[0007] Problem that the invention aims to solve

[0008] The present disclosure provides a technology capable of simultaneously displaying different device screens of a semiconductor manufacturing device on each of one or more remote terminals and a local operation terminal, and accepting operations on the semiconductor manufacturing device from the device screens.

[0009] Solutions for solving problems

[0010] A semiconductor manufacturing system of one embodiment of the present invention comprises: a local operation terminal, which displays a device screen of a semiconductor manufacturing device; one or more remote operation terminals, which are connected to the semiconductor manufacturing device via a network to display the device screen; and a control device, which controls the semiconductor manufacturing device based on operations received from users by the local operation terminal and the remote operation terminal that display the device screen, wherein the control device comprises: a login status management unit, which manages simultaneous login status from the local operation terminal and the remote operation terminal; a device screen display status management unit, which manages the device screen display status of the local operation terminal and the remote operation terminal that are logged in; and a screen data production unit, which produces screen data of the device screen for the local operation terminal and each of the remote operation terminals based on the simultaneous login status and the device screen display status, to be sent to the local operation terminal and the remote operation terminal that are logged in.

[0011] Effects of the Invention

[0012] According to the present disclosure, it is possible to provide a technology capable of simultaneously displaying different device screens of a semiconductor manufacturing device on each of one or more remote terminals and a local operation terminal, and accepting operations on the semiconductor manufacturing device from the device screens. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a structural diagram of an example of a semiconductor manufacturing system involved in this embodiment.

[0014] Figure 2 This is a hardware structure diagram of an example of a computer.

[0015] Figure 3 This is a functional block diagram of an example of the control device according to the present embodiment.

[0016] Figure 4 This is a conceptual diagram of an example of a screen displayed during login.

[0017] Figure 5 This is a conceptual diagram of an example of a screen displayed during login.

[0018] Figure 6 This is a conceptual diagram of an example of a screen displayed during login.

[0019] Figure 7 This is a classification diagram showing an example of exclusive control of the device screen in this embodiment.

[0020] Figure 8This is a flowchart of an example of processing of the control device according to the present embodiment.

[0021] Description of Reference Numerals

[0022] 1: semiconductor manufacturing system; 2: clean room; 10: semiconductor manufacturing device; 12: local operation terminal; 14: local remote switching switch; 20: remote operation terminal; 30: control device; 32: login processing unit; 34: screen data acquisition request receiving unit; 36: screen data sending unit; 38: operation information receiving unit; 40: screen management unit; 42: mechanical control unit; 44: input and output unit; 46: local remote switching switch state determination unit; 50: login state management unit; 52: device screen display state management unit; 54: exclusive control unit; 56: screen data production unit; 58: operation information determination unit; 60: execution instruction unit; 62: remote operation cut-off unit. DETAILED DESCRIPTION

[0023] Hereinafter, a mode for carrying out the present invention will be described with reference to the drawings.

[0024] <System Structure>

[0025] Figure 1 It is a structural diagram of an example of a semiconductor manufacturing system 1 according to the present embodiment. Figure 1 The semiconductor manufacturing system 1 shown includes a semiconductor manufacturing apparatus 10, a local operation terminal 12, and a remote operation terminal 20. The semiconductor manufacturing system 1 is a system configured to remotely control the semiconductor manufacturing apparatus 10 from the local operation terminal 12 and one or more remote operation terminals 20.

[0026] One or more semiconductor manufacturing apparatuses 10 are installed in the clean room 2. The semiconductor manufacturing apparatuses 10 are communicatively connected via a network 24 such as a LAN (Local Area Network). The semiconductor manufacturing apparatuses 10 are apparatuses that perform processes such as film formation, etching, and photolithography, for example.

[0027] The semiconductor manufacturing apparatus 10 includes a processing unit for processing an object to be processed and a control device for controlling the processing unit. Figure 1 Although the control device provided in the semiconductor manufacturing apparatus 10 is not shown in the figure, the state where the local operation terminal 12 as the display input device of the control device is installed in the semiconductor manufacturing apparatus 10 is shown as an example.

[0028] The remote operation terminal 20 is installed outside the clean room 2, for example, in an office, and is connected to a network 22 such as a LAN in a communicable manner. The network 22 is connected to a network 24 in the clean room 2 in a communicable manner. The remote operation terminal 20 installed in the office or the like can communicate with the control device of the semiconductor manufacturing device 10 via the network 22 and the network 24.

[0029] exist Figure 1 In the semiconductor manufacturing system 1, the device screen of the semiconductor manufacturing device 10 can be displayed on the local operation terminal 12 and the remote operation terminal 20, and the semiconductor manufacturing device 10 can be controlled based on the operation of the user (operator) on the device screen. As described later, the control device of the semiconductor manufacturing device 10 can accept simultaneous login of multiple users (multi-user login), and make the local operation terminal 12 and the remote operation terminal 20 operated by the logged-in user (hereinafter referred to as the logged-in local operation terminal 12 and the remote operation terminal 20) display different device screens.

[0030] Therefore, in Figure 1 In the semiconductor manufacturing system 1, the local operation terminal 12 and one or more remote operation terminals 20 in the control device logged in to the same semiconductor manufacturing device 10 can independently display different device screens at the same time, and can control the semiconductor manufacturing device 10 from different device screens. In addition, the control device of the semiconductor manufacturing device 10 performs exclusive control of the device screens displayed in the local operation terminal 12 and one or more remote operation terminals 20 in which the device is logged in, as described later.

[0031] exist Figure 1 In the semiconductor manufacturing system 1, users who log in to the control device of the same semiconductor manufacturing device 10 from a local operation terminal 12 and one or more remote operation terminals 20 can browse different device screens and operate the same semiconductor manufacturing device 10 from different (individual) device screens.

[0032] The local operation terminal 12 includes a local-remote switch 14, and receives a user's selection of the local operation terminal 12 or the remote operation terminal 20. The local operation terminal 12 and the remote operation terminal 20 are implemented by, for example, a personal computer (PC), a tablet terminal, a smartphone, a dedicated terminal, or the like.

[0033] In addition, the semiconductor manufacturing apparatus 10 may be Figure 1 The control device is built-in, but it is not necessary to build-in the control device if it is connected to the control device in a communicable manner. The control device is a controller having a computer structure that controls the semiconductor manufacturing device 10. For example, the control device outputs parameters of the control components of the semiconductor manufacturing device 10 to the semiconductor manufacturing device 10 according to the process.

[0034] The control device has a user interface (UI) function for accepting operations on the semiconductor manufacturing device 10 from the user and for allowing the user to browse information related to the semiconductor manufacturing device 10. For example, the UI function of the control device manages the device screens displayed on the local operation terminal 12 and the remote operation terminal 20 as described later.

[0035] also, Figure 1 The semiconductor manufacturing system 1 is an example, and it is self-evident that there are various system configuration examples depending on the use and purpose. For example, the semiconductor manufacturing system 1 can have various configurations such as the following configuration: the control devices of each semiconductor manufacturing device 10 are combined into a control device for a plurality of semiconductor manufacturing devices 10, or the control devices of each semiconductor manufacturing device 10 are further divided.

[0036] <Hardware Structure>

[0037] Figure 1 The control device of the semiconductor manufacturing system 1 shown is composed of, for example, Figure 2 The present invention is implemented by a computer 100 having the hardware structure shown. Figure 2 This is a hardware structure diagram of an example of a computer.

[0038] The computer 100 includes a main control unit 101, a storage device 105, an external interface 106, and a bus 107 that connects them. The main control unit 101 includes a CPU (Central Processing Unit) 111, a RAM (Random Access Memory) 112, and a ROM (Read Only Memory) 113. The storage device 105 records and reads programs and information required for control. The storage device 105 includes a computer-readable storage medium such as a HDD (Hard Disk Drive). The storage medium stores a process for a desired process performed on a wafer.

[0039] In the control device, CPU 111 uses RAM 112 as a working area to execute a program stored in ROM 113 or a storage medium of storage device 105, thereby causing the local operation terminal 12 and the remote operation terminal 20 to display the device screen and control the semiconductor manufacturing device 10 based on the user's operation on the device screen.

[0040] The control device of the semiconductor manufacturing apparatus 10 can be operated by, for example, Figure 2 The hardware structure of the computer 100 executes the program to implement Figure 3 various functions.

[0041] <Functional Structure>

[0042] The control device 30 of the semiconductor manufacturing system 1 according to the present embodiment implements, for example, Figure 3 Function block. Figure 3 This is a functional block diagram of an example of the control device according to the present embodiment. Figure 3 In the functional block diagram, illustration of structures that are not necessary for the description of this embodiment is omitted.

[0043] The control device 30 implements the login processing unit 32, the screen data acquisition request receiving unit 34, the screen data sending unit 36, the operation information receiving unit 38, the screen management unit 40, the mechanical control unit 42, the input and output unit 44 and the local remote switching switch state determination unit 46 by executing the program.

[0044] The login processing unit 32 performs login processing on login requests from the local operation terminal 12 and the remote operation terminal 20. The screen data acquisition request receiving unit 34 receives screen data acquisition requests from application programs (hereinafter simply referred to as applications) installed in the local operation terminal 12 and the remote operation terminal 20. The screen data sending unit 36 ​​sends screen data generated based on the screen data acquisition request to the local operation terminal 12 and the remote operation terminal 20 as the screen data acquisition request source.

[0045] The application etc. installed in the local operation terminal 12 and the remote operation terminal 20 displays a screen based on the received screen data. The screen based on the received screen data includes the device screen of the semiconductor manufacturing device 10. The user who operates the local operation terminal 12 and the remote operation terminal 20 can control the semiconductor manufacturing device 10 by operating the device screen.

[0046] For example, the local operation terminal 12 and the remote operation terminal 20 that display the device screen transmit operation information to the control device 30 based on the user's operation on the device screen. Here, the operation information may be any information that can notify the control device 30 of the user's operation on the device screen or the like displayed by the local operation terminal 12 and the remote operation terminal 20. The operation information receiving unit 38 of the control device 30 receives the operation information transmitted from the local operation terminal 12 and the remote operation terminal 20.

[0047] In addition, the control device 30 opens a plurality of communication ports to accept simultaneous logins from a plurality of users from the local operation terminal 12 and the remote operation terminal 20, and enables the logged-in local operation terminal 12 and the remote operation terminal 20 to display different device screens. For example, the control device 30 can start a plurality of VNC (Virtual Network Computing) servers, and enable the local operation terminal 12 and the remote operation terminal 20 to simultaneously display independent individual device screens using port numbers.

[0048] The screen management unit 40 manages the screens displayed on the logged-in local operation terminal 12 and the remote operation terminal 20. The screen management unit 40 includes a login status management unit 50, a device screen display status management unit 52, an exclusive control unit 54, a screen data creation unit 56, an operation information determination unit 58, an execution instruction unit 60, and a remote operation disconnection unit 62.

[0049] The login status management unit 50 manages information (login status) related to the local operation terminal 12 and the remote operation terminal 20 that are logged in. The device screen display status management unit 52 manages information (device screen display status) related to the device screens that are being displayed by the local operation terminal 12 and the remote operation terminal 20 that are logged in. The exclusive control unit 54 performs exclusive control on the device screens displayed by the local operation terminal 12 that is logged in and one or more remote operation terminals 20. In the semiconductor manufacturing system 1 of this embodiment, the local operation terminal 12 that is logged in and one or more remote operation terminals 20 simultaneously display independent device screens, so it is necessary to perform exclusive control including whether to display.

[0050] The screen data generating unit 56 generates screen data according to the screen data acquisition request, login status, device screen display status, and exclusive control result received from the logged-in local operation terminal 12 and the remote operation terminal 20. The device screen for which the screen data generating unit 56 generates screen data includes a plurality of screens depending on the type of information to be displayed.

[0051] For example, during normal operation, the device screen may display different screens for each data type such as airflow state, temperature, etc. Also, during maintenance work, the device screen may display different screens for each work type. The screen data creation unit 56 creates screen data corresponding to the screen data acquisition request received from the local operation terminal 12 and the remote operation terminal 20 in the login state from among the plurality of screens of the device screen.

[0052] The operation information determination unit 58 determines whether an execution instruction corresponding to the operation information can be given to the semiconductor manufacturing device 10 based on the operation information received from the logged-in local operation terminal 12 and one or more remote operation terminals 20. In the semiconductor manufacturing system 1 of this embodiment, the logged-in local operation terminal 12 and one or more remote operation terminals 20 simultaneously display independent device screens, so it is necessary to perform a determination including whether an execution instruction corresponding to the operation information can be given. If an execution instruction corresponding to the operation information can be given to the semiconductor manufacturing device 10, the execution instruction unit 60 gives an execution instruction corresponding to the operation information.

[0053] When the local-remote switching switch 14 is switched from the state of selecting the remote operation terminal 20 to the state of selecting the local operation terminal 12 , the remote operation disconnection unit 62 logs out the logged-in remote operation terminal 20 and disconnects the remote control from the remote operation terminal 20 .

[0054] The mechanical control unit 42 controls the operation and setting of each part of the semiconductor manufacturing device 10 based on the request and execution instruction from the screen management unit 40. The input-output unit 44 sends the control command sent from the mechanical control unit 42 to the corresponding parts of the semiconductor manufacturing device 10, and receives the required information from each part. The information received by the input-output unit 44 includes the sensor output data. The mechanical control unit 42 sends the information received by the input-output unit 44 from each part of the semiconductor manufacturing device 10 to the screen management unit 40. For example, the screen management unit 40 uses the information received from each part of the semiconductor manufacturing device 10 to create the screen data of the device screen. The local-remote switching switch state determination unit 46 determines whether the local-remote switching switch 14 is in the state of selecting the remote operation terminal 20 or the state of selecting the local operation terminal 12.

[0055] <Screen>

[0056] Figure 4 This is a conceptual diagram of an example of a screen displayed during login. Figure 4 The screen 1000 is displayed on the local operation terminal 12 and the remote operation terminal 20 that are logged in. Figure 4 In screen 1000, tabs 1002 and 1004 can be used to switch between the dashboard screen and the device screen. Figure 4 Screen 1000 is an example of a dashboard screen displayed by selecting tab 1002 .

[0057] In addition, a device status display column 1006 is displayed on the screen 1000. The device status display column 1006 displays information such as the device name of the semiconductor manufacturing device 10, the login status of the local operation terminal 12, the login user name of the local operation terminal 12, the utilization status of the remote operation terminal 20, the login user name of the remote operation terminal 20, the status of the signal tower of the semiconductor manufacturing device 10, the alarm status of the semiconductor manufacturing device 10, the status of the local remote switching switch 14, and the process execution status.

[0058] When Figure 4 When tab 1004 is selected in screen 1000, as shown in FIG. Figure 5 As shown in FIG. 1 , a command icon 1010 for connecting, disconnecting, or setting the device screen on the device screen of the semiconductor manufacturing device 10 is displayed on the screen 1000. Figure 5 The screen 1000 of FIG. 1000 displays a user display field 1012. The user display field 1012 displays remote local identification information, a user name, a terminal name, etc., as user information of a user who is currently using the semiconductor manufacturing apparatus 10 (who is logged in).

[0059] When Figure 5 When the connection command icon 1010 is selected in the screen 1000, as shown in FIG. Figure 6 As shown, the device screen 1014 of the semiconductor manufacturing device 10 in the login state is displayed in the screen 1000. Figure 6 The user who operates the local operation terminal 12 and the remote operation terminal 20 on the device screen 1014 can view the airflow status, process status, system status, etc. of the logged-in semiconductor manufacturing device 10 through the operation device screen 1014.

[0060] In addition, the display Figure 6 The user who operates the local operation terminal 12 and the remote operation terminal 20 on the device screen 1014 can control the logged-in semiconductor manufacturing device 10 by operating the device screen 1014. However, it is also possible to set restrictions on the operations that the device screen 1014 accepts from the remote operation terminal 20. For example, it is possible to restrict the device screen 1014 from accepting operations that include actions of the semiconductor manufacturing device 10 from the remote operation terminal 20.

[0061] In addition, for example, the device screen 1014 displayed on the remote operation terminal 20 may not accept operations including actions of the semiconductor manufacturing apparatus 10 when the local operation terminal 12 is logged in. In addition, the remote operation terminal 20 may be restricted from displaying the device screen 1014 including operations including actions of the semiconductor manufacturing apparatus 10 when the local operation terminal 12 is logged in.

[0062] Furthermore, since the individual device screens 1014 can be displayed simultaneously in the logged-in local operation terminal 12 and the remote operation terminal 20, in the semiconductor manufacturing system 1 of the present embodiment, exclusive control is performed between the device screens 1014. For example, the device screen 1014 that can edit a recipe becomes locked during the recipe editing period, and does not accept the recipe editing operation from other local operation terminals 12 and remote operation terminals 20.

[0063] Furthermore, for example, when the local operation terminal 12 is logged in, the parameter editing operation from the parameter editing device screen 1014 displayed on the remote operation terminal 20 may not be accepted.

[0064] Figure 7 This is a classification diagram showing an example of exclusive control of the device screen in this embodiment. Figure 7 The exclusive controls of the device screen 1014 shown are classified according to simultaneous local and remote operations, types of restrictions, and changes in restriction status.

[0065] For example, for a device screen 1014 where local and remote simultaneous operations are “available” and the type of restriction is “unrestricted”, the device screen 1014 can always be operated from the logged-in local operation terminal 12 and remote operation terminal 20 .

[0066] For the device screen 1014 where the simultaneous local and remote operations are "enabled" and the restriction type is "screen display cannot be performed", there is a display restriction in which the restriction status changes to "fixed" and is performed based on the operation restrictions of the logged-in user, or a display restriction in which the restriction status changes to "dynamically changed" and is performed based on the status of the semiconductor manufacturing device 10.

[0067] For the device screen 1014 where local and remote simultaneous operations are "enabled" and the types of restrictions are "enabled for screen display, enabled for simultaneous use, restricted command execution", there are operation restrictions that are performed based on the operation restrictions of the logged-in user and where the restriction status changes to "fixed", or operation restrictions that are performed based on the status of the semiconductor manufacturing device 10 and where the restriction status changes to "dynamically change".

[0068] For the device screen 1014 where local and remote simultaneous operations are "enabled" and the types of restrictions are "screen display enabled, simultaneous use enabled, editing restricted", there are operation restrictions in which the restriction status changes to "fixed" and is based on the operation restrictions of the logged-in user, or operation restrictions in which the restriction status changes to "dynamically changed" and is based on the status of the semiconductor manufacturing device 10 or the login status of the local operation terminal 12.

[0069] For example, for the device screen 1014 where the local and remote simultaneous operations are “not possible” and the restriction type is “only local operations possible”, operations can be performed only on the logged-in local operation terminal 12 .

[0070] <Processing>

[0071] Figure 8 1 is a flowchart of an example of the processing of the control device involved in this embodiment. When the control device 30 of the semiconductor manufacturing device 10 successfully logs in to the login request from the local operation terminal 12 and the remote operation terminal 20, it proceeds from step S10 to step S12. In step S12, the control device 30 creates the initial screen data to be displayed by the local operation terminal 12 or the remote operation terminal 20 that has successfully logged in. The initial screen data to be displayed by the local operation terminal 12 or the remote operation terminal 20 that has successfully logged in is, for example, Figure 4 The screen data of screen 1000.

[0072] The control device 30 sends initial screen data to the local operation terminal 12 or remote operation terminal 20 operated by the successfully logged-in user. The local operation terminal 12 or remote operation terminal 20 that receives the initial screen data displays, for example, Figure 4 The initial screen like screen 1000.

[0073] Shows e.g. Figure 4 The user of the local operation terminal 12 or the remote operation terminal 20 of the screen 1000 can request the display of the device screen 1014 by selecting the connected command icon 1010 after selecting the tab 1004. Figure 8 The flowchart is omitted Figure 4 The update process of screen 1000 is performed.

[0074] When receiving a display request for the device screen 1014 from the local operation terminal 12 or the remote operation terminal 20 operated by the logged-in user, the control device 30 proceeds to step S16. In step S16, the control device 30 confirms the device screen display status of other users as information for exclusive control.

[0075] In step S18, the control device 30 determines whether the device screen 1014 can be displayed on the local operation terminal 12 or the remote operation terminal 20 operated by the logged-in user through the above-mentioned exclusive control. If it is determined that the display can be performed, the control device 30 creates screen data of the device screen 1014 in step S20 and transmits it to the local operation terminal 12 or the remote operation terminal 20 operated by the logged-in user. In addition, if it is determined that the display cannot be performed, the control device 30 proceeds to step S28 and performs error processing to notify that the device screen 1014 cannot be displayed.

[0076] The local operation terminal 12 or the remote operation terminal 20 that receives the screen data of the device screen 1014 displays, for example, Figure 6 Such a device screen 1014. Displays, for example Figure 6 The user of the local operation terminal 12 or the remote operation terminal 20 displaying the device screen 1014 can send operation information for the logged-in semiconductor manufacturing device 10 to the control device 30 by operating the device screen 1014 .

[0077] When receiving operation information from the local operation terminal 12 or the remote operation terminal 20 operated by the logged-in user, the control device 30 proceeds from step S22 to step S24. In step S24, the control device 30 determines whether it is possible to perform an execution instruction corresponding to the operation information on the semiconductor manufacturing device 10 based on the operation information received from the local operation terminal 12 or the remote operation terminal 20 operated by the logged-in user through the above-mentioned exclusive control.

[0078] When it is determined that the execution instruction can be performed, the control device 30 performs the execution instruction corresponding to the operation information in step S26 to control the logged-in semiconductor manufacturing device 10. In addition, when it is determined that the execution instruction cannot be performed, the control device 30 proceeds to step S30 to perform error processing such as notifying that the operation of the semiconductor manufacturing device 10 received from the device screen 1014 cannot be performed.

[0079] The control device 30 repeats the processing of steps S14 to S32 until there is a request to log out from the local operation terminal 12 or the remote operation terminal 20 operated by the logged-in user. When there is a request to log out, the control device 30 ends. Figure 8 Flowchart of the process.

[0080] <Conclusion>

[0081] In the semiconductor manufacturing system 1 of the present embodiment, the device screen 1014 displays data on a plurality of screens, for example, 20 or more, depending on the type of data that the user wants to view, such as airflow state and temperature.

[0082] In the semiconductor manufacturing system 1 of the present embodiment, the logged-in local operation terminal 12 and one or more remote operation terminals 20 can simultaneously display independent device screens 1014, thereby improving the work efficiency during normal operation and maintenance.

[0083] For example, in the semiconductor manufacturing system 1 of the present embodiment, during normal operation, a user who wants to view the temperature of the semiconductor manufacturing device 10, a user who wants to view the airflow status, and a user who wants to know the time of the next cleaning can simultaneously view different device screens 1014, and can operate the semiconductor manufacturing device 10 simultaneously and in parallel from individual device screens 1014.

[0084] In addition, for example, in the semiconductor manufacturing system 1 of the present embodiment, during maintenance, a user who wants to refer to maintenance screen A of the semiconductor manufacturing device 10 and a user who wants to refer to maintenance screen B of the semiconductor manufacturing device 10 can simultaneously view maintenance screen A or maintenance screen B from different device screens 1014, and can perform maintenance operations on the semiconductor manufacturing device 10 simultaneously and in parallel.

[0085] Furthermore, in the semiconductor manufacturing system 1 of the present embodiment, when a failure occurs, the operator can use the local operation terminal 12 to perform input and expenditure processing while the engineer can use the remote operation terminal 20 to confirm the process settings, parameter settings, and sensor status in parallel, thereby improving business efficiency.

[0086] As mentioned above, although the preferred embodiment of the present invention was described in detail, the present invention is not limited to the above-mentioned embodiment, and various modifications and substitutions can be added to the above-mentioned embodiment without departing from the scope of the present invention.

Claims

1. A semiconductor manufacturing system, characterized in that: have: A local operation terminal that displays an apparatus screen of a semiconductor manufacturing apparatus; One or more remote operation terminals, the one or more remote operation terminals are connected to the semiconductor manufacturing device via a network and display the device screen; as well as a control device for controlling the semiconductor manufacturing device based on the operation received from the user by the local operation terminal displaying the device screen and the remote operation terminal, Wherein, the control device comprises: A login status management unit, which manages the simultaneous login status from the local operation terminal and the remote operation terminal; a device screen display state management unit that manages the device screen display states of the local operation terminal and the remote operation terminal in the simultaneous login state; and a screen data creating unit that creates, for the local operation terminal and each of the remote operation terminals, screen data of the device screen to be sent to the local operation terminal and the remote operation terminal in the simultaneous login state based on the simultaneous login state and the device screen display state, In which, the control device also has an exclusive control unit, which controls the screen data produced by the screen data production unit based on the simultaneous login state and the device screen display state, so that the device screens displayed by the local operation terminal and the remote operation terminal in the simultaneous login state are different.

2. The semiconductor manufacturing system according to claim 1, characterized in that When the local operation terminal is logged in, the exclusive control unit does not create screen data of the device screen for accepting an operation including an action of the semiconductor manufacturing device from a user as screen data of the device screen to be sent to the remote operation terminal.

3. The semiconductor manufacturing system according to claim 2, characterized in that: When the local operation terminal is not logged in, the exclusive control unit creates screen data of the device screen for accepting operations including actions of the semiconductor manufacturing device from a user as screen data of the device screen to be sent to the remote operation terminal.

4. The semiconductor manufacturing system according to any one of claims 1 to 3, characterized in that: The control device also has: an operation information determination unit that determines, based on the simultaneous login state and the device screen display state, whether an execution instruction corresponding to the operation information received from the local operation terminal and the remote operation terminal in the simultaneous login state can be performed on the semiconductor manufacturing device; as well as The execution instruction unit, when determining that an execution instruction can be issued to the semiconductor manufacturing apparatus, issues an execution instruction corresponding to the operation information to the semiconductor manufacturing apparatus to control the semiconductor manufacturing apparatus.

5. The semiconductor manufacturing system according to claim 4, characterized in that: In a case where the execution instruction corresponding to the operation information is related to the editing of a process or parameter related to the semiconductor manufacturing device, the operation information determination unit confirms the lock state of the process or parameter to be edited. If the process or parameter to be edited is not in the lock state, it is determined that the editing instruction of the process or parameter related to the semiconductor manufacturing device can be performed after the process or parameter is changed to the lock state. If the process or parameter to be edited is in the lock state, it is determined that the editing instruction of the process or parameter related to the semiconductor manufacturing device cannot be performed.

6. The semiconductor manufacturing system according to any one of claims 1 to 3, characterized in that: The control device also has: a local-remote switching switch state determination unit for determining a state of a local-remote switching switch for selecting one of the local operation terminal and the remote operation terminal; as well as The remote operation disconnection unit logs out the logged-in remote operation terminal when the local-remote switch state determination unit determines that the local-remote switch is switched from a state in which the remote operation terminal is selected to a state in which the local operation terminal is selected.

7. A control device for controlling a semiconductor manufacturing device based on operations received from a user at a local operation terminal displaying a device screen of the semiconductor manufacturing device and at least one remote operation terminal displaying the device screen, the control device being characterized in that: A login status management unit, which manages the simultaneous login status from the local operation terminal and the remote operation terminal; a device screen display state management unit that manages the device screen display states of the local operation terminal and the remote operation terminal in the simultaneous login state; and a screen data creating unit that creates, for the local operation terminal and each of the remote operation terminals, screen data of the device screen to be sent to the local operation terminal and the remote operation terminal in the simultaneous login state based on the simultaneous login state and the device screen display state, in, The control device also has an exclusive control unit, which controls the screen data produced by the screen data production unit based on the simultaneous login state and the device screen display state, so that the device screens displayed by the local operation terminal and the remote operation terminal in the simultaneous login state are different.

8. A control method for controlling a semiconductor manufacturing device based on operations received from a user by a local operation terminal displaying a device screen of the semiconductor manufacturing device and one or more remote operation terminals displaying the device screen, the control method comprising: A login status management step, managing the simultaneous login status from the local operation terminal and the remote operation terminal; a device screen display status management step, managing the device screen display status of the local operation terminal and the remote operation terminal in the simultaneous login state; as well as a screen data creation step of creating, based on the simultaneous login state and the device screen display state, screen data of the device screen to be sent to the local operation terminal and the remote operation terminal in the simultaneous login state for the local operation terminal and each of the remote operation terminals, Wherein, the control method further includes: The exclusive control step controls the screen data produced by the screen data production step based on the simultaneous login state and the device screen display state so that the device screens displayed by the local operation terminal and the remote operation terminal in the simultaneous login state are different.

9. A storage medium storing a program for causing a control device to execute a control method, wherein the control device controls the semiconductor manufacturing device based on operations received from a user at a local operation terminal displaying a device screen of the semiconductor manufacturing device and at least one remote operation terminal displaying the device screen, the control method comprising: A login status management step, which manages the simultaneous login status from the local operation terminal and the remote operation terminal; a device screen display status management step, which manages the device screen display status of the local operation terminal and the remote operation terminal in the simultaneous login state; as well as a screen data creation step of creating, based on the simultaneous login state and the device screen display state, screen data of the device screen to be sent to the local operation terminal and the remote operation terminal in the simultaneous login state for the local operation terminal and each of the remote operation terminals, Wherein, the control method further includes: The exclusive control step controls the screen data produced by the screen data production step based on the simultaneous login state and the device screen display state so that the device screens displayed by the local operation terminal and the remote operation terminal in the simultaneous login state are different.

10. A computer program product comprising a computer program, which, when executed by a processor, implements the control method according to claim 8.

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