Flow controller and driving device having the same

Abstract

The flow controller (22, 22A) and the drive device (20) are provided in a housing (30): a first flow path (42); a second flow path (44) arranged in parallel with the first flow path (42); a first throttle valve (36) arranged in the first flow path (42); a second throttle valve (38) arranged in the second flow path (44); a pilot check valve (48) connected in series with the second throttle valve (38); a pilot air flow path (46) connected to a pilot port (48c) of the pilot check valve (48) to supply and discharge pilot air; and a third throttle valve (40) arranged in the pilot air flow path (46), wherein the pilot check valve (48) switches between a state of allowing exhaust air discharged from a cylinder (10) to pass through and a state of preventing exhaust air from passing through according to the pressure of the pilot air.

Description

Technical Field

[0001] The invention relates to a flow controller and a driving device equipped with the flow controller. Background Art

[0002] Conventionally, an impact mitigation mechanism is used, which is a cushioning material made of soft resin such as rubber or polyurethane, an oil damper, etc., installed at the end of the cylinder to mitigate the impact at the end of the stroke. However, the impact mitigation mechanism that mechanically mitigates the impact of the cylinder has a limit on the number of operations and requires regular maintenance.

[0003] In order to solve this inconvenience, Japanese Patent No. 5578502 discloses a speed controller (flow rate controller) that reduces the operating speed of the cylinder by throttling the exhaust air from the cylinder near the end of the stroke.

[0004] However, the number of parts of conventional flow controllers is large. In addition, when a three-way valve is used to switch the throttling member of the exhaust air, it is necessary to grind the parts requiring production man-hours such as the required slide valve, which has the problem of being unable to be manufactured cheaply. Summary of the invention

[0005] An object of the present invention is to provide a flow controller that can simplify the device structure and is easy to manufacture, and a driving device including the flow controller.

[0006] One aspect of the present invention is a flow controller, which is connected between a port of a cylinder and an action switching valve, which switches a high-pressure air supply source or an exhaust port to the cylinder, and comprises: a housing, which comprises a cylinder-side port connected to the port of the cylinder and a valve-side port connected to the action switching valve; a first flow path, which is arranged in the housing and connects the cylinder-side port and the valve-side port; a first throttle valve, which is arranged in the first flow path; a second flow path, which is arranged in the housing and is arranged in parallel with the first flow path; A second throttle valve, which is arranged in the second flow path; a pilot check valve, which is arranged in the second flow path and is connected in series with the second throttle valve; a pilot air flow path, which is arranged in the housing, connects the valve side port and the pilot port of the pilot check valve, and supplies and discharges pilot air to the pilot check valve; and a third throttle valve, which is arranged in the pilot air flow path, and the pilot check valve uses the pressure of the pilot air to switch between a state of allowing exhaust air discharged from the cylinder to pass through and a state of preventing the exhaust air from passing through.

[0007] Another aspect of the present invention is a drive device, which is a drive device for a cylinder, comprising: a high-pressure air supply source, which supplies high-pressure air to the cylinder; an exhaust port, which exhausts the exhaust air of the cylinder; an action switching valve, which switchably connects the high-pressure air supply source and the exhaust port to the port of the cylinder; and a flow controller, which is connected between the action switching valve and the port of the cylinder, and the flow controller comprises: a housing, which has a cylinder-side port connected to the port of the cylinder and a valve-side port connected to the action switching valve; a first flow path, which is arranged in the housing and connects the cylinder-side port and the valve-side port; a first throttle valve, The first throttle valve is arranged in the first flow path; the second flow path, which is arranged in the shell and is arranged in parallel with the first flow path; the second throttle valve, which is arranged in the second flow path; the pilot check valve, which is arranged in the second flow path and is connected in series with the second throttle valve; the pilot air flow path, which is arranged in the shell, connects the valve side port and the pilot port of the pilot check valve, and supplies and discharges pilot air to the pilot check valve; and the third throttle valve, which is arranged in the pilot air flow path, and the pilot check valve uses the pressure of the pilot air to switch between a state of allowing the exhaust air to pass through and a state of preventing the exhaust air from passing through.

[0008] According to the flow controller of the above-described viewpoint and the driving device including the flow controller, the device structure is simplified and the manufacturing becomes easy. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a fluid circuit diagram showing a flow controller and a drive device of the air cylinder according to the first embodiment.

[0010] Figure 2 Yes means Figure 1 A perspective view of the appearance of a flow controller.

[0011] Figure 3 Yes means Figure 2 A top perspective view of the layout of the throttle valve and flow path of a flow controller.

[0012] Figure 4 Yes, along Figure 6 A cross-sectional view taken along line IV-IV.

[0013] Figure 5 Yes means Figure 4 A cross-sectional view of a pilot check valve that is switched to a state where air can pass in both directions.

[0014] Figure 6 It is along Figure 3 A cross-sectional view taken along line VI-VI.

[0015] Figure 7 It is along Figure 3 A cross-sectional view taken along line VII-VII.

[0016] Figure 8 Yes means Figure 1 Fluid circuit diagram of the air flow when the flow controller on the rod side switches to the second control flow. DETAILED DESCRIPTION

[0017] Hereinafter, preferred embodiments of the present invention will be listed and described in detail with reference to the drawings.

[0018] like Figure 1 As shown, the air cylinder 10 is a double-acting air cylinder used in an automatic equipment production line, etc. The air cylinder 10 includes a cylindrical cylinder tube 12. A piston 14 that partitions a cylinder chamber 12c and a piston rod 16 connected to the piston 14 are provided inside the cylinder tube 12. A top side port 18 is provided in the top side pressure chamber 12a, and a rod side port 18A is provided in the rod side pressure chamber 12b.

[0019] The drive device 20 is connected to the top port 18 and the rod port 18A. The drive device 20 includes a flow controller 22 connected to the top side of the top port 18, a rod-side flow controller 22A connected to the rod port 18A, a high-pressure air supply source 24, an exhaust port 26, and an operation switching valve 28.

[0020] like Figure 2 As shown, the top flow controller 22 has a flat box-shaped housing 30. A cylinder side port 32 connected to the top side port 18 of the cylinder 10, a valve side port 34 connected to the operation switching valve 28, and a second throttle valve 38 for setting the stroke speed of the cylinder 10 are provided on the front surface 30a of the housing 30. In addition, a first throttle valve 36 for adjusting the degree of limitation of the operation speed of the piston 14 and a third throttle valve 40 for setting the start time of limitation of the operation speed of the piston 14 are provided on the upper surface 30b of the housing 30. A connecting member 32b is provided on the cylinder side port 32, and a connecting member 34b is provided on the valve side port 34.

[0021] exist Figure 3 As shown by the dotted line, the housing 30 includes a first flow path 42, a pilot air flow path 46, and a pilot check valve 48 inside. Figures 4 to 7 The cross-sectional view illustrates the internal structure of the housing 30.

[0022] like Figure 4As shown in FIG. 1 , the valve side port 34 is provided with a port forming hole 34a, which is provided near the first side surface 30c of the housing 30. The port forming hole 34a is opened at the front surface 30a of the housing 30 and is formed to face the back surface 30e. A connecting member 34b for connecting a pipe is installed at the front surface 30a of the port forming hole 34a. The first flow path 42 and the pilot air flow path 46 are opened at the end of the back surface 30e side of the port forming hole 34a.

[0023] like Figure 1 As shown, the first flow path 42 and the second flow path 44 are flow paths that connect the valve side port 34 and the cylinder side port 32, and the first flow path 42 and the second flow path 44 are arranged in parallel. Figure 4 As shown, the first flow path 42 includes a first hole portion 42a extending linearly from the port forming hole 34a toward the second side surface 30d and a second hole portion 42b extending toward the cylinder side port 32 by bending from the first hole portion 42a. In addition, an end portion of the first hole portion 42a on the second side surface 30d side communicates with the second throttle valve 38 as a part of the second flow path 44.

[0024] The second throttle valve 38 is provided in a valve hole 39 formed between the valve side port 34 and the cylinder side port 32. The valve hole 39 opens on the front side of the housing 30 and extends toward the rear side 30e. The first hole portion 42a opens on the side of the valve hole 39, and the end portion of the valve hole 39 on the rear side 30e communicates with an inlet 48a of a pilot check valve 48 described later.

[0025] The second throttle valve 38 is a throttle valve with a check valve in which a throttle valve 38a and a check valve 38b are integrally formed. Figure 1 As shown, the throttle valve 38a and the check valve 38b are arranged in parallel. Figure 4 As shown in FIG. 1 , the second throttle valve 38 includes: a tubular flow path member 50, a rod-shaped member 58 disposed on the inner periphery of the flow path member 50, a knob portion 59 joined to the end of the rod-shaped member 58, and a non-return sealing member 56 mounted on the outer periphery of the flow path member 50. The flow path member 50 is fitted on the inlet side of the valve hole 39, and the inner side portion is reduced in diameter compared to the inlet side, so that the valve hole 39 is divided into an inner flow path 52b on the inner periphery of the flow path member 50 and an outer flow path 54a on the outside of the flow path member 50. The end of the inner flow path 52b opens toward the inner side of the valve hole 39, and the inner flow path 52b has an opening portion 52a in the side portion that communicates with the first hole portion 42a. The outer flow path 54a is formed as a gap between the outer periphery of the flow path member 50 and the valve hole 39. The air from the first hole portion 42a can flow in both the inner flow path 52b and the outer flow path 54a.

[0026] The rod-shaped member 58 of the second throttle valve 38 is arranged inside the inner flow path 52b via a screw mechanism 58a so as to be able to move forward and backward. The rod-shaped member 58 can rotate together with the knob portion 59, and the cross-sectional area of ​​the flow path of the inner flow path 52b can be variably adjusted by rotating the knob portion 59, thereby forming the throttle valve 38a.

[0027] In addition, a non-return sealing member 56 is provided in the outer flow path 54a. The non-return sealing member 56 is an annular sealing member installed on the outer periphery of the flow path member 50, and the cross section with a recessed portion formed on the inner side is formed into a substantially V-shaped shape. For the flow of air from the first hole portion 42a toward the inner side of the valve hole 39, the non-return sealing member 56 is elastically deformed in a manner that the outer periphery is reduced in diameter, so that the air can flow freely. In addition, for the air flowing from the inner side of the valve hole 39 toward the first hole portion 42a, the outer periphery of the non-return sealing member 56 is in close contact with the inner peripheral surface of the valve hole 39, thereby preventing the air passing through the outer flow path 54a from passing. Therefore, the air flowing from the inner side of the valve hole 39 toward the first hole portion 42a can only pass through the inner flow path 52b and flow at a flow rate limited by the rod-shaped member 58.

[0028] A pilot check valve 48 is provided on the back side 30e of the valve hole 39. The pilot check valve 48 is provided in a through hole 60 that passes through the second side 30d from the first side 30c. The first side 30c side of the through hole 60 is closed by a cover 64, and the second side 30d side is closed by a cover 62. A piston chamber 60a, an intermediate portion 60b, and a check valve accommodating portion 60c are formed inside the cover 62 and the cover 64. The piston chamber 60a is an empty chamber with a circular cross section, and the pilot air flow path 46 is opened near the cover 64 as a pilot port 48c. In addition, an air discharge hole 65 open to the atmosphere is opened near the end of the intermediate portion 60b side of the piston chamber 60a. In addition, an intermediate portion 60b is formed on the second side 30d side of the piston chamber 60a, and the intermediate portion 60b is formed to have an inner diameter smaller than that of the piston chamber 60a.

[0029] A pilot piston 66 is disposed in the piston chamber 60a and the middle portion 60b, and the pilot piston 66 is displaced in the axial direction of the through hole 60 according to the pressure of the pilot air. The pilot piston 66 includes a piston portion 66a that slides in the piston chamber 60a, a guide portion 66b that extends from the piston portion 66a toward the middle portion 60b, and a rod portion 66c that protrudes toward the top end side (the second side surface 30d side) of the guide portion 66b. The piston portion 66a divides the piston chamber 60a into an area that communicates with the pilot air flow path 46 and an area that communicates with the air discharge hole 65. A return spring 68 is disposed in the piston chamber 60a on the middle portion 60b side of the piston portion 66a, and when the pilot air is not acting, the pilot piston 66 is urged toward the cover 64 side by the elastic force of the return spring 68.

[0030] The guide portion 66b is formed to have an inner diameter that can be inserted through the middle portion 60b, and is configured to be guided by the middle portion 60b and slide. The rod portion 66c protrudes from the top end of the guide portion 66b. The rod portion 66c is formed to have an outer diameter that is smaller than the inner diameter of the middle portion 60b, and a flow path that can be passed by air is formed between the rod portion 66c and the inner peripheral surface of the middle portion 60b. A reduced diameter portion 60d is formed at the end of the second side surface 30d side of the middle portion 60b, and the reduced diameter portion 60d is formed by reducing the inner diameter of the middle portion 60b. The above-mentioned rod portion 66c is formed to have a diameter that is smaller than the inner diameter of the reduced diameter portion 60d, and the rod portion 66c can protrude to the side of the check valve receiving portion 60c. In addition, the rod portion 66c is configured in a manner that its top end portion abuts against the valve core 70 described later of the check valve receiving portion 60c.

[0031] A check valve receiving portion 60c is formed on the second side surface 30d side of the middle portion 60b. The check valve receiving portion 60c is a hollow chamber with a circular cross section and an inner diameter larger than that of the middle portion 60b. A valve core 70 constituting a check valve is arranged inside the check valve receiving portion 60c. The valve core 70 has a disc-shaped closing portion 70a and a shaft portion 70b. The closing portion 70a is formed as a reduced diameter portion 60d with a diameter capable of closing the middle portion 60b, and the shaft portion 70b protrudes from the closing portion 70a toward the cover 62 side. The closing portion 70a is covered by an elastic member with excellent adhesion. The shaft portion 70b is inserted into a tubular receiving portion 62a protruding from the cover 62, and the valve core 70 is supported by the cover 62 so as to be displaceable along the axial direction of the through hole 60. In addition, a return spring 72 is provided between the valve core 70 and the cover 62, and the valve core 70 is urged toward the reduced diameter portion 60d by the elastic force of the return spring 72. The second flow path 44 opens as the outlet 48 b at the side of the check valve housing portion 60 c . The second flow path 44 extends toward the front surface 30 a and communicates with the port forming hole 32 a of the cylinder side port 32 .

[0032] When air is about to flow back from the outlet 48b toward the inlet 48a, the valve core 70 is urged by the pressure of the air to close the reduced diameter portion 60d, thereby preventing the backflow of air. Figure 5 As shown, when the rod portion 66c of the pilot piston 66 projects toward the check valve housing portion 60c due to the pressure of the pilot air, the valve element 70 remains separated from the reduced diameter portion 60d, allowing air to flow back from the outlet 48b to the inlet 48a.

[0033] On the other hand, Figure 6As shown, the second hole portion 42b of the first flow path 42 extends toward the second side surface 30d side in a manner bypassing the valve hole 39 of the second throttle valve 38, passes through the first throttle valve 36, and merges with the portion of the first flow path 42 near the cylinder side port 32. The first throttle valve 36 is provided in the valve hole 36a formed from the upper surface 30b side. The second hole portion 42b opens at the lower end of the valve hole 36a as the inlet 36b of the first throttle valve 36, and opens at the side of the valve hole 36a as the outlet 36c. The first throttle valve 36 includes a needle 74 fixed to the valve hole 36a via a screw mechanism 74a. When the needle 74 is rotated and moved toward the inlet 36b side, the cross-sectional area of ​​the flow path of the second hole portion 42b is reduced. In this way, the first throttle valve 36 can variably adjust the flow rate of the first flow path 42.

[0034] like Figure 7 As shown, the third throttle valve 40 is provided in a valve hole 41 provided in the middle of the pilot air flow path 46. The valve hole 41 is formed from the upper surface 30b side, and the pilot air flow path 46 opens at the bottom and side of the valve hole 41. The third throttle valve 40 is a throttle valve with a check valve in which a throttle valve 40a and a check valve 40b are integrally formed, and includes a flow path member 76, a needle 78, and a check seal member 80.

[0035] The flow path member 76 is a tubular member that seals the upper end of the sealing valve hole 41 and divides the bottom side of the valve hole 41 into an inner flow path 76a and an outer flow path 76b. The needle 78 is inserted into the inner side of the flow path member 76 to variably adjust the cross-sectional area of ​​the inner flow path 76a. The non-return sealing member 80 (non-return valve 40b) is composed of an annular elastic member installed on the outer periphery of the flow path member 76. The non-return sealing member 80 is formed into a substantially V-shaped cross-section having a recessed portion on the upper surface 30b side, allowing the pilot air toward the pilot port 48c to pass in a free flow manner and preventing the reverse air from passing. Therefore, in the third throttle valve 40, the pilot air discharged from the pilot port 48c is throttled by the throttle valve 40a.

[0036] The connection relationship of the components constituting the flow controller 22 on the top side is as follows: Figure 1 shown.

[0037] On the other hand, Figure 1 In the flow controller 22A, the rod side flow controller 22A connected to the rod side port 18A is substantially configured in the same manner as the top side flow controller 22. In the flow controller 22A, the same components as those of the top side flow controller 22 are denoted by the same reference numerals and detailed description thereof is omitted.

[0038] Next, the structure of the action switching valve 28 connected to the top side flow controller 22 and the rod side flow controller 22A will be described. The action switching valve 28 is a five-port valve that electrically switches the connection destination of the high-pressure air, and has a first port 28a to a fifth port 28e. The first port 28a is connected to the valve side port 34 of the top side flow controller 22, and the second port 28b is connected to the valve side port 34 of the rod side flow controller 22A. The third port 28c and the fifth port 28e are connected to the exhaust port 26, and the fourth port 28d is connected to the high-pressure air supply source 24.

[0039] The action switching valve 28 is Figure 1 The first position shown connects the first port 28a with the fourth port 28d and connects the second port 28b with the fifth port 28e. In this way, the operation switching valve 28 supplies high-pressure air from the high-pressure air supply source 24 to the top side flow controller 22, and exhausts the exhaust air of the rod side pressure chamber 12b from the exhaust port 26.

[0040] In addition, the operation switching valve 28 connects the first port 28a with the third port 28c and connects the second port 28b with the fourth port 28d in the second position. In this way, the operation switching valve 28 supplies the high-pressure air of the high-pressure air supply source 24 to the rod-side flow controller 22A, and exhausts the exhaust air of the top side pressure chamber 12a from the exhaust port 26.

[0041] The flow controllers 22, 22A and the drive device 20 of this embodiment are constructed as described above. Here, their functions and operations are described together. Figure 1 and Figure 8 The following description will be made taking the working stroke in which the piston 14 moves toward the rod-side port 18A as an example.

[0042] like Figure 1 As shown, in the working stroke, the action switching valve 28 is switched to the first position, and the high-pressure air supply source 24 is connected to the flow controller 22 on the top side. The high-pressure air flows into the flow controller 22 through the valve side port 34, and flows into the first flow path 42, the second flow path 44, and the pilot air flow path 46. As shown by the arrow A, the high-pressure air is mainly supplied to the top side port 18 of the cylinder 10 through the check valve 38b of the second flow path 44 and the pilot check valve 48 in a free-flowing manner. In addition, the high-pressure air after flowing into the pilot air flow path 46 flows in the check valve 40b in the forward direction as the pilot air, and is stored in the piston chamber 60a of the pilot check valve 48 (refer to Figure 5 ).

[0043] On the other hand, the exhaust air discharged from the rod side pressure chamber 12b flows into the rod side flow controller 22A from the cylinder side port 32. In the piston chamber 60a of the pilot check valve 48 of the flow controller 22A, the pilot air stored in the previous stroke remains. Figure 5 As shown in FIG. 6 , the pilot piston 66 protrudes toward the check valve housing portion 60c. Figure 1 As shown, the pilot check valve 48 allows exhaust air to pass from the outlet 48b toward the inlet 48a.

[0044] Therefore, the exhaust air flows through the first flow path 42 as indicated by the arrow B1, and flows through the second flow path 44 as indicated by the arrow B2. The exhaust air is throttled by the first throttle valve 36 and the second throttle valve 38 of the first flow path 42, and as indicated by the arrow B1+B2, is discharged from the exhaust port 26 through the operation switching valve 28. The operation speed of the piston 14 of the cylinder 10 is determined by the flow rate of the exhaust air of the flow controller 22A on the rod side.

[0045] During the working stroke of the piston 14, the pilot air of the rod-side pilot check valve 48 is gradually exhausted through the pilot air flow path 46 and the third throttle valve 40. Along with this, the pressure of the pilot air of the pilot check valve 48 is gradually reduced.

[0046] When the pressure of the pilot check valve 48 on the rod side is lower than the specified value, Figure 4 As shown, the pilot piston 66 is displaced toward the cover 64 due to the elastic force of the return spring 68, and the rod portion 66c is pulled into the middle portion 60b. As a result, the valve core 70 of the check valve accommodating portion 60c closes the reduced diameter portion 60d, and the pilot check valve 48 is switched to a state that prevents the exhaust air from passing through.

[0047] Then, if Figure 8 As shown, the exhaust air passes only through the first flow path 42 as shown by arrow B1. The flow rate of the exhaust air is throttled by the first throttle valve 36, thereby reducing the movement speed of the piston 14. As a result, the impact of the cylinder 10 when the piston 14 reaches the end of the stroke is alleviated.

[0048] As described above, the stroke action of the cylinder 10 using the drive device 20 is completed. After that, the reset stroke is performed by switching the action switching valve 28 to the second position. In the reset stroke, the exhaust air flows to the flow controller 22 on the top side, and the high-pressure air flows to the flow controller 22A on the rod side. The action of the above-mentioned working stroke is only that the flow controller 22 on the top side is replaced by the flow controller 22A on the rod side. The action of the drive device 20 in the reset stroke is basically the same, so its description is omitted.

[0049] The flow rate controllers 22 and 22A and the driving device 20 of this embodiment have the following effects.

[0050] The flow controller 22, 22A is connected between the port of the cylinder 10 and the action switching valve 28, and the action switching valve 28 switches the high-pressure air supply source 24 or the exhaust port 26 to the cylinder 10. The flow controller 22, 22A includes: a housing 30, the housing 30 having a cylinder-side port 32 connected to the port of the cylinder 10 and a valve-side port 34 connected to the action switching valve 28; a first flow path 42, the first flow path 42 is arranged in the housing 30, and connects the cylinder-side port 32 and the valve-side port 34; a first throttle valve 36, the first throttle valve 36 is arranged in the first flow path 42; a second flow path 44, the second flow path 44 is arranged in the housing 30, and is connected to the first flow path 4 2 is arranged in parallel; a second throttle valve 38, which is arranged in the second flow path 44; a pilot check valve 48, which is arranged in the second flow path 44 and is connected in series with the second throttle valve 38; a pilot air flow path 46, which is arranged in the housing 30, connects the valve side port 34 and the pilot port 48c of the pilot check valve 48, and supplies and discharges pilot air to the pilot check valve 48; and a third throttle valve 40, which is arranged in the pilot air flow path 46, and the pilot check valve 48 switches to a state of allowing exhaust air discharged from the cylinder 10 to pass through and a state of preventing exhaust air from passing through according to the pressure of the pilot air.

[0051] According to the above structure, the pilot check valve 48 with a simple structure is used to switch the control flow of the exhaust air, so there is no need to use a switching valve such as a shuttle valve or a three-way valve, and the internal structure is simplified. In addition, since there is no need for components requiring precision such as a bushing and a slide column constituting the shuttle valve or the three-way valve, grinding and surface treatment requiring production man-hours are not required, and the manufacturing can be inexpensive.

[0052] In the above-mentioned flow controller 22, 22A, a one-way valve 38b may be further provided, and the one-way valve 38b is provided in the second throttle valve 38, and allows the air flowing from the valve side port 34 toward the cylinder side port 32 to pass through. By providing the one-way valve 38b, high-pressure air can be supplied to the cylinder 10 in a free-flowing manner through the one-way valve 38b, and it can cope with the high-speed operation of the cylinder 10.

[0053] In the above-mentioned flow controller 22, 22A, the third throttle valve 40 may include a throttle valve 40a and a check valve 40b, which is arranged in parallel with the throttle valve 40a and allows the air flowing toward the pilot port 48c to pass through. According to such a structure, the timing of switching the pilot check valve 48 can be adjusted with a simple device structure.

[0054] In the above-mentioned flow controller 22, 22A, it is also possible that the pilot check valve 48 has: a through hole 60, the through hole 60 has a piston chamber 60a connected to the pilot port 48c, a check valve receiving portion 60c connected to the cylinder side port 32, and an intermediate portion 60b connecting the piston chamber 60a and the check valve receiving portion 60c and connected to the second throttle valve 38; a pilot piston 66, the pilot piston 66 is arranged in the piston chamber 60a and the intermediate portion 60b, and protrudes toward or from the check valve receiving portion 60c based on the pressure of the pilot air. The check valve housing portion 60c retreats toward the middle portion 60b; and a valve core 70, which is arranged in the check valve housing portion 60c and is configured to be able to close the connection between the middle portion 60b and the check valve housing portion 60c. When the pilot piston 66 retreats to the middle portion 60b side, the valve core 70 allows high-pressure air from the valve side port 34 toward the cylinder side port 32 to pass through, thereby preventing reverse exhaust air from passing through. Moreover, when the pilot piston 66 protrudes toward the check valve housing portion 60c, the valve core 70 allows high-pressure air and exhaust air to pass through.

[0055] According to the above configuration, the flow controller 22, 22A that switches the flow path can be realized without components requiring much manufacturing time such as a slide post and polishing or surface treatment, thereby reducing the manufacturing cost of the flow controller 22, 22A.

[0056] In the above-mentioned flow controller 22, 22A, it is also possible to configure that when the pressure of the pilot air is above a predetermined value, the pilot piston 66 of the pilot check valve 48 protrudes toward the check valve housing portion 60c to allow high-pressure air and exhaust air to pass through. According to such a structure, the high-pressure air can be supplied to the cylinder 10 in a free-flowing manner through the second flow path 44, and the cylinder 10 can be operated at a high speed.

[0057] In addition, the drive device 20 of the present embodiment is a drive device 20 of the cylinder 10, which includes: a high-pressure air supply source 24, which supplies high-pressure air to the cylinder 10; an exhaust port 26, which exhausts the exhaust air of the cylinder 10; an action switching valve 28, which switches the high-pressure air supply source 24 and the exhaust port 26 to connect to the port of the cylinder 10; and a flow controller 22, 22A, which is connected between the action switching valve 28 and the port of the cylinder 10, and the flow controller 22, 22A includes: a housing 30, which has a cylinder-side port 32 connected to the port of the cylinder 10 and a valve-side port 34 connected to the action switching valve 28; a first flow path 42, which is arranged in the housing 30, connecting the cylinder-side port 32 and the valve-side port port 34; a first throttle valve 36, which is arranged in the first flow path 42; a second flow path 44, which is arranged in the housing 30 and is arranged in parallel with the first flow path 42; a second throttle valve 38, which is arranged in the second flow path 44; a pilot check valve 48, which is arranged in the second flow path 44 and is connected in series with the second throttle valve 38; a pilot air flow path 46, which is arranged in the housing 30, connects the valve side port 34 and the pilot port 48c of the pilot check valve 48, and supplies and discharges pilot air to the pilot check valve 48; and a third throttle valve 40, which is arranged in the pilot air flow path 46, and the pilot check valve 48 uses the pressure of the pilot air to switch between a state of allowing exhaust air to pass through and a state of preventing exhaust air from passing through.

[0058] Although the present invention has been described above by way of preferred embodiments, the present invention is not limited to the embodiments, and various modifications can be made without departing from the gist of the present invention.

Claims

1. A flow controller, the flow controller (22, 22A) being connected between a port of a cylinder (10) and an action switching valve (28), the action switching valve switchingly connecting a high-pressure air supply source (24) or an exhaust port (26) to the cylinder, characterized in that: have: A housing (30) having a cylinder-side port (32) connected to a port of the cylinder and a valve-side port (34) connected to an action switching valve; a first flow path (42) disposed in the housing and connecting the cylinder side port and the valve side port; a first throttle valve (36), the first throttle valve being arranged in the first flow path; a second flow path (44), the second flow path being arranged in the housing and being arranged in parallel with the first flow path; a second throttle valve (38), the second throttle valve being arranged in the second flow path; a pilot check valve (48) disposed in the second flow path and connected in series with the second throttle valve; a pilot air flow path (46) disposed in the housing, connecting the valve side port and the pilot port (48c) of the pilot check valve, and supplying and discharging pilot air to the pilot check valve; as well as a third throttle valve (40) disposed in the pilot air flow path, The pilot check valve switches between a state of allowing exhaust air discharged from the cylinder to pass therethrough and a state of preventing the exhaust air from passing therethrough according to the pressure of the pilot air. One end of the pilot air flow path is connected to the first flow path through the valve side port. When air is supplied to the valve side port, the air is supplied to the pilot air flow path and the first flow path. When the valve side port is connected to the exhaust port, the air is discharged from the pilot air flow path and the first flow path.

2. The flow controller according to claim 1, characterized in that: A one-way valve (38b) is further provided, the one-way valve being provided on the second throttle valve and allowing air flowing from the valve side port toward the cylinder side port to pass therethrough.

3. The flow controller according to claim 1, characterized in that: The third throttle valve includes a throttle valve (40a) and a check valve (40b) which is arranged in parallel with the throttle valve and allows the air flowing toward the pilot port to pass therethrough.

4. The flow controller according to any one of claims 1 to 3, characterized in that: The pilot check valve has: a through hole (60) having a piston chamber communicating with the pilot port, a check valve receiving portion (60c) communicating with the cylinder side port, and an intermediate portion (60b) connecting the piston chamber and the check valve receiving portion and communicating with the second throttle valve; a pilot piston (66) disposed between the piston chamber and the intermediate portion and protruding toward the check valve housing portion or retreating from the check valve housing portion toward the intermediate portion based on the pressure of the pilot air; as well as a valve core (70) which is disposed in the check valve receiving portion and is configured to close a connection between the intermediate portion and the check valve receiving portion, When the pilot piston retreats to the middle portion side, the valve core allows high-pressure air to pass from the valve side port toward the cylinder side port, preventing the exhaust air from passing in the reverse direction, and when the pilot piston protrudes toward the check valve housing portion side, the valve core allows the high-pressure air and the exhaust air to pass.

5. The flow controller according to claim 4, characterized in that: When the pressure of the pilot air is equal to or higher than a predetermined value, the pilot piston of the pilot check valve protrudes toward the check valve accommodating portion to allow the high-pressure air and the exhaust air to pass therethrough.

6. A driving device, which is a driving device (20) of a cylinder, characterized in that: have: a high-pressure air supply source, the high-pressure air supply source supplies high-pressure air to the cylinder; an exhaust port that discharges exhaust air from the cylinder; an action switching valve that switchably connects the high-pressure air supply source and the exhaust port to the port of the cylinder; as well as a flow controller connected between the action switching valve and the port of the cylinder, The flow controller has: a housing having a cylinder-side port connected to the port of the cylinder and a valve-side port connected to the action switching valve; a first flow path, the first flow path being disposed in the housing and connecting the cylinder-side port and the valve-side port; a first throttle valve, the first throttle valve being disposed in the first flow path; a second flow path, the second flow path being arranged in the housing and being arranged in parallel with the first flow path; a second throttle valve, the second throttle valve being disposed in the second flow path; a pilot check valve, the pilot check valve being disposed in the second flow path and connected in series with the second throttle valve; a pilot air flow path, which is provided in the housing, connects the valve side port and the pilot port of the pilot check valve, and supplies and discharges pilot air to the pilot check valve; as well as a third throttle valve, the third throttle valve being provided in the pilot air flow path, The pilot check valve switches between a state of allowing the exhaust air to pass therethrough and a state of preventing the exhaust air from passing therethrough according to the pressure of the pilot air. One end of the pilot air flow path is connected to the first flow path through the valve side port. When air is supplied to the valve side port, the air is supplied to the pilot air flow path and the first flow path. When the valve side port is connected to the exhaust port, the air is discharged from the pilot air flow path and the first flow path.

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