Switchable vacuum optical components and vacuum light source system

Abstract

This disclosure provides a switchable vacuum optical assembly, characterized in that it includes: a vacuum containment cavity, including an optical input end and an optical output end, the vacuum containment cavity being used to contain working optical elements located on the optical path; a switching device, vacuum-sealed connected to the vacuum containment cavity, including: a carrier device for carrying multiple optical elements; and a driving device for driving the carrier device to move, thereby switching the working optical elements in the vacuum containment cavity.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum optical components, and in particular to a switchable vacuum optical component and a vacuum light source system. Background Art

[0002] Vacuum optical components are widely used in various vacuum environments, for example, angle-resolved photoelectron spectroscopy devices. Angle-resolved photoelectron spectroscopy is an important surface analysis tool that plays an irreplaceable role in determining the electronic structure of the crystal surface. The experimental device of angle-resolved photoelectron spectroscopy mainly includes a light source and an energy analyzer. Generally speaking, the light source used in angle-resolved photoelectron spectroscopy experiments is in the vacuum ultraviolet region, which is mainly used to measure the electronic structure of the valence band.

[0003] Existing vacuum ultraviolet light sources need to pass through a monochromator to obtain a single spectrum line, but the space inside the monochromator is limited and can only install two gratings at most. Therefore, in an experiment, only two monochromatic spectrum lines can be used. If other spectrum lines need to be used, the monochromator needs to be disassembled and the grating needs to be replaced. However, the vacuum environment must be broken to disassemble the monochromator. After replacing the grating, it is necessary to re-evacuate the high vacuum, which is time-consuming and labor-intensive, prolonging the experiment time and reducing the experimental efficiency. Summary of the invention

[0004] The present disclosure provides a switchable vacuum optical component, characterized in that it includes: a vacuum containing chamber, including an optical input end and an optical output end, the vacuum containing chamber is used to contain a working optical element located on an optical path; a switching device, vacuum-sealed and connected to the vacuum containing chamber, including: a bearing device, used to bear a plurality of optical elements; a driving device, used to drive the bearing device to move, so as to switch the working optical element in the vacuum containing chamber.

[0005] The present disclosure provides a vacuum light source system, a vacuum chamber; a light source, arranged outside the vacuum chamber and used to emit light into the vacuum chamber; and a switchable vacuum optical component according to any one embodiment of the present disclosure, sealedly connected to the vacuum chamber and the light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0007] Figure 1 A schematic diagram showing the structure of a switchable vacuum optical component according to some embodiments of the present disclosure;

[0008] Figure 2An exploded view of the structure of a switchable vacuum optical component according to some embodiments of the present disclosure is shown;

[0009] Figure 3 An exploded view showing a portion of the structure of a switchable vacuum optical assembly according to some embodiments of the present disclosure; and

[0010] Figure 4 A schematic structural diagram of a vacuum light source system according to some embodiments of the present disclosure is shown.

[0011] In the above drawings, the reference numerals represent:

[0012] 100 switchable vacuum optical components

[0013] 10 Vacuum chamber

[0014] 11 Optical input

[0015] 111 The first vacuum sealing structure

[0016] 12 optical output ports

[0017] 13Third vacuum sealing structure

[0018] 14 Windows

[0019] 20 Switching device

[0020] 21 Carrying device

[0021] 211 Feed

[0022] 2111, 2111a, 2111b, 2111c, 2111d, 2111e limit holes

[0023] 212 T-slot

[0024] 213, 213a, 213b, 213c, 213d, 213e optical element receiving groove

[0025] 22 Drive device

[0026] 221 first flange

[0027] 222 Vacuum seal

[0028] 223 bellows

[0029] 224 Adjustment components

[0030] 2241 screw assembly

[0031] 2241-1 screw

[0032] 2241-2 Nut

[0033] 2241-3 Guide rod

[0034] 2241-4 sliding hole

[0035] 30 stopper

[0036] 31, 31a, 31b limit seat

[0037] 311, 311a, 311b limiting grooves

[0038] 312a, 312b, 312c, 312d bolts

[0039] 32, 32a, 32b, 32c, 32d limit plunger

[0040] 40 optical sensors

[0041] 1000 Vacuum Light Source System

[0042] 200 light sources DETAILED DESCRIPTION

[0043] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0044] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", "connected", and "coupling" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances.

[0045] Figure 1 A schematic structural diagram of a switchable vacuum optical component 100 according to some embodiments of the present disclosure is shown. Figure 2 An exploded view of the structure of the switchable vacuum optical assembly 100 according to some embodiments of the present disclosure is shown.

[0046] like Figure 1and Figure 2 As shown, the switchable vacuum optical component 100 may include: a vacuum containing chamber 10 and a switching device 20. The vacuum containing chamber 10 includes an optical input end 11 and an optical output end 12, and an optical path is formed in the vacuum containing chamber 10. The vacuum containing chamber 10 can be used to accommodate a working optical element located on the optical path. The optical element may include, for example, one or more of a filter, a lens, a prism, and the like. In the present disclosure, a working optical element refers to an optical element located on the optical path and processing or transmitting light.

[0047] The switching device 20 is vacuum-tightly connected to the vacuum containing chamber 10. Figure 2 As shown, the switching device 20 includes a carrying device 21 and a driving device 22. The carrying device 21 can be used to carry multiple optical elements. The multiple optical elements can include the same type or different types of optical elements, which can be set according to actual needs. The driving device 22 can be used to drive the carrying device 21 to switch the working optical element located on the optical path in the vacuum housing chamber 10.

[0048] Those skilled in the art will appreciate that, in the embodiments of the present disclosure, light emitted by the light source enters the vacuum chamber 10 through the optical input end 11, passes through the vacuum chamber 10, and enters the vacuum chamber through the optical output end 12. Figure 4 However, this is only exemplary and does not constitute a limitation.

[0049] In some embodiments of the present disclosure, the vacuum chamber 10 is a flange with a hollow interior and openings at both ends, and is cylindrical in shape as a whole, and the optical input end 11 and the optical output end 12 are openings at both ends. The optical input end 11 and the optical output end 12 can be used to ensure a sealed connection with the vacuum chamber and the light source without affecting the vacuum degree of the overall device.

[0050] Those skilled in the art can understand that the optical input end 11 and the optical output end 12 are relative concepts. The optical input end 11 refers to the end of the vacuum chamber 10 that receives light, and the optical output end 12 refers to the end of the vacuum chamber 10 that outputs light.

[0051] In some embodiments of the present disclosure, the optical input end 11 includes a first vacuum sealing structure 111, and the optical output end 12 includes a second vacuum sealing structure (not shown in the figure). The first vacuum sealing structure may include a flange or a vacuum sealing transparent window. Similarly, the second vacuum sealing structure may also include a flange or a vacuum sealing transparent window.

[0052] In some embodiments of the present disclosure, a knife edge is provided at the second vacuum sealing structure 121, which can cooperate with the knife edge flange of the vacuum chamber to vacuum-seal the vacuum containing chamber 10 with the vacuum chamber window to ensure the vacuum environment in the vacuum chamber.

[0053] The structures of the first vacuum sealing structure and the second vacuum sealing structure 121 are similar, and only the structure of the second vacuum sealing structure 121 is taken as an example for description, and no further details are given.

[0054] like Figure 1 As shown, in some embodiments of the present disclosure, the vacuum housing chamber 10 may further include a third vacuum sealing structure 13 , which can be used to be vacuum-sealed and connected to the switching device 20 .

[0055] The third vacuum sealing structure 13 may include a flange, which is disposed on the side wall of the vacuum housing chamber 10 , communicated with the vacuum housing chamber 10 , and vacuum-sealedly connected to the switching device 20 .

[0056] In some embodiments of the present disclosure, the vacuum chamber 10 may further include a window 14. The window 14 is installed on the side wall of the vacuum chamber 10 through a flange provided on the vacuum chamber 10, and can be used to observe the situation in the vacuum chamber 10, facilitate the judgment of the switching situation of the optical element, and timely discover the source of the fault.

[0057] Figure 3 An exploded view of a portion of the switchable vacuum optical assembly 100 according to some embodiments of the present disclosure is shown.

[0058] like Figure 3 As shown, in some embodiments of the present disclosure, the carrier 21 may include a feeding member 211. A plurality of optical elements are disposed on the feeding member 211. In some embodiments, the feeding member 211 may be in a long strip shape, and a plurality of optical elements are disposed on the feeding member 211 side by side.

[0059] For example, Figure 3 As shown, the feeding member 211 may be a rectangular plate, the width of which is adapted to the inner diameter of the third vacuum sealing structure 13, and can be fed into the vacuum containing chamber 10 under the drive of the driving device 22. A T-slot 212 is provided at one end of the feeding member 211, and an optical element containing groove 213 (for example, optical element containing grooves 213a, 213b, 213c, 213d, 213e) is provided at the other end. The optical element is installed in the optical element containing groove 213 and is fed into the vacuum containing chamber 10 along with the feeding member 211, thereby switching to a working optical element.

[0060] Those skilled in the art will appreciate that although Figure 3 The feeding member 211 shown in the figure is a rectangular plate, but the feeding member 211 can be any structure that is compatible with the third vacuum sealing structure 13. Figure 3 The optical element receiving groove 213 shown in FIG. 1 is a circular groove, but the optical element receiving groove 213 can also be a square groove, a diamond groove, or other structure that can be compatible with the optical element. Similarly, those skilled in the art can also understand that although Figure 3The number of the optical element receiving slots 213 shown in FIG. 2 is five, but the number of the optical element receiving slots 213 may be less than five or greater than five.

[0061] In some embodiments of the present disclosure, the driving device 22 may include a linear mechanism connected to the feeding member 211 and capable of driving the feeding member 211 to perform linear motion to switch the working optical element located on the optical path in the vacuum chamber 10 .

[0062] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the linear mechanism includes: a first flange 221, a vacuum seal 222 (such as Figure 1 ), bellows 223 and adjustment assembly 224. The first flange 221 is vacuum-sealed and connected to the vacuum housing chamber 10, and the vacuum seal 222 is connected to the feeding member 211. The bellows 223 is vacuum-sealed and connected to the vacuum seal 222 and the first flange 221, and can be used to accommodate the feeding member 211. The adjustment assembly 224 can be used to adjust the distance between the vacuum seal 222 and the first flange 221 to feed the feeding member 211.

[0063] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum seal 222 includes a second flange 2221 and a third flange 2222. The second flange 2221 is vacuum-sealed and connected to the bellows 223, and the third flange 2222 is vacuum-sealed and connected to the second flange 2221 and the feeding member 211.

[0064] In some embodiments of the present disclosure, the third flange 2222 is connected to the feeding member 211 through the T-slot 212. Figure 2 and Figure 3 As shown, the third flange 2222 may include a connecting rod and a T-shaped piece disposed at the end of the connecting rod. The T-shaped piece may cooperate with the T-shaped slot 212 on the feeding member 211 to achieve the connection between the third flange 2222 and the feeding member 211. It can be understood by those skilled in the art that the T-shaped slot connection can provide a displacement margin, provide appropriate buffering for the driving of the feeding member 211, and also relax the precision requirements for the driving control, making the operation more simple and efficient.

[0065] Those skilled in the art will appreciate that the vacuum seal 222 including the second flange 2221 and the third flange 2222 is merely an exemplary structure. In actual applications, the second flange 2221 and the third flange 2222 may be an integral structure, and the vacuum seal 222 is directly connected to the feeding member 211 via the T-slot 212 .

[0066] like Figure 1 and Figure 2As shown, in some embodiments of the present disclosure, the adjustment assembly 224 includes a screw assembly 2241. The screw assembly 2241 is connected to the first flange 221 and the second flange 2221 or the vacuum seal 222, and can be used to adjust the distance between the first flange 221 and the second flange 2221 or the vacuum seal 222.

[0067] In some embodiments of the present disclosure, the screw assembly 2241 includes at least one screw 2241-1 and at least one nut 2241-2. The screw 2241-1 is arranged between the first flange 221 and the second flange 2221, one end of which is fixed to the first flange 221, and the other end is slidably connected to the second flange 2221 and passes through the second flange 2221. The nut 2241-2 meshing with the screw 2241-1 is sleeved on one end of the screw 2241-1 passing through the second flange 2221.

[0068] By rotating the nut 2241-2, the distance between the second flange 2221 and the first flange 221 can be shortened or increased, so that the third flange 2222 fixed to the second flange 2221 drives the feeding member 211 to perform linear motion in the vacuum chamber 10 to switch the working optical element on the optical path.

[0069] Those skilled in the art will appreciate that although Figure 1 and Figure 2 Only one screw 2241-1 and one nut 2241-2 are shown in the figure, but in actual application, the number of screws and nuts can be greater than one. Furthermore, it can be understood by those skilled in the art that the screw assembly 2241 can also include only at least one screw, which is threadedly connected to the second flange 2221, and the second flange 2221 and the third flange 2222 are driven to approach or move away from the first flange 221 by rotating the screw. Similarly, the screw assembly 2241 can also include at least one screw and at least one pair of nuts. For example, a pair of nuts can be set at both ends of the screw, and the second flange 2221 and the third flange 2222 are driven to approach or move away from the first flange 221 by rotating a pair of nuts that cooperate with each other. Alternatively, a pair of nuts can be set at one end of the screw close to the second flange 2221, and are respectively set on both sides of the second flange 2221. By rotating the nut on the outside of the second flange 2221, the distance between the second flange 2221 and the third flange 2222 and the first flange 221 is adjusted, and by rotating the nut on the inside of the second flange 2221, the distance is loosened or locked.

[0070] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the screw assembly 2241 further includes: one or more guide rods 2241 - 3 slidably connected to the vacuum seal 222 .

[0071] In some embodiments of the present disclosure, the vacuum seal 222 or the second flange 2221 includes a sliding hole 2241 - 4 for sliding connection with the guide rod 2241 - 3 .

[0072] One end of the guide rod 2241-3 is fixed on the first flange 221, and the other end passes through the sliding hole 2241-4 to be slidably connected to the second flange 2221. When the second flange 2221 approaches the first flange 221, the guide rod 2241-3 passes through the sliding hole 2241-4 and can be used for guidance and support, thereby preventing the screw rod 2241-1 from bending during the distance adjustment process, causing damage to the equipment.

[0073] Those skilled in the art will appreciate that although Figure 1 and Figure 2 The number of guide rods 2241 - 3 shown in the figure is two, but the number of guide rods 2241 - 3 can also be one or more than two.

[0074] In some embodiments of the present disclosure, the adjustment assembly further includes a motor (not shown in the figure), the output end of which is connected to the screw assembly 2241 (eg, a screw or a nut) and can be used to drive the screw assembly 2241 .

[0075] like Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the switchable vacuum optical assembly 100 may further include a stopper 30. The stopper 30 is disposed in the vacuum housing chamber 10 and cooperates with the feeding member 211 to limit the working optical element.

[0076] In some embodiments of the present disclosure, the limiter 30 includes a limit seat 31 (eg, limit seats 31a, 31b) and a limit plunger 32 (eg, limit plungers 32a, 32b, 32c, 32d). Figure 2 and Figure 3 As shown, the limit seat 31 may include two parts, the limit seat 31a and 31b. The limit seat 31 includes a limit groove 311 (for example, the limit groove 311a, 311b) that matches the feeding member 211. The limit plunger 32 is arranged on the limit seat 31 and matches the limit holes 2111 (for example, the limit holes 2111a, 2111b, 2111c, 2111d, 2111e) on both sides of the feeding member 211. The limit hole structures on both sides of the feeding member 211 can be symmetrically distributed, and only the limit hole 2111 on one side is used as an example for description.

[0077] The limiting seats 31a, 31b are fixed in the vacuum chamber 10 by bolts 312a, 312b, 312c, 312d, and are located on both sides of the feeding member 211. The limiting grooves 311a, 311b are provided inside the limiting seats 31a, 31b, and the width thereof is adapted to the thickness of the feeding member 211, so that the feeding member 211 can slide between the limiting seats 31a, 31b while ensuring that it will not deviate.

[0078] The limiting plungers 32a, 32b, 32c, 32d pass through the limiting seats 31a, 31b and abut against the feeding member 211. When the feeding member 211 slides on the limiting seats 31a, 31b, the ends of the limiting plungers 32a, 32b, 32c, 32d can be squeezed into the limiting hole 2111, thereby ensuring that the optical element is fed into place. The feeding member 211 may also include a slide groove for slidingly abutting against the limiting plungers 32a, 32b, 32c, 32d. The limiting holes 2111a, 2111b, 2111c, 2111d, 2111e may be set in the slide groove.

[0079] like Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the switchable vacuum optical assembly 100 may further include an optical sensor 40 that may be used to detect light passing through the working optical element.

[0080] The optical sensor 40 is installed in the vacuum chamber 10 and can detect the optical signal passing through the optical element.

[0081] In some embodiments of the present disclosure, the switchable vacuum optical assembly 100 further includes a controller (not shown in the figure). The controller is used to receive a signal sent from the optical sensor 40 to control the switching device 20 to switch the working optical element located on the optical path in the vacuum chamber 10. For example, the controller can determine whether the working optical element is in place in the stopper 30 through the signal sent by the optical sensor 40, thereby determining whether to stop driving the feeding member 211.

[0082] The switchable vacuum optical component 100 of the present disclosure adjusts the distance between the first flange 221 and the vacuum seal 222 so that the feeder 211 fixedly connected to the vacuum seal 222 drives multiple optical elements to perform linear motion in the vacuum chamber 10, thereby switching the working optical elements located on the optical path to change the processing of light. The present disclosure can set optical elements (for example, color filters) according to needs, and combine them with the grating in the monochromator, and directly switch multiple optical elements during the production or experiment process without destroying the vacuum environment, thereby obtaining multiple spectral lines that can be used for production or experiments.

[0083] Figure 4A schematic structural diagram of a vacuum light source system 1000 according to some embodiments of the present disclosure is shown.

[0084] like Figure 4 As shown, the vacuum light source system 1000 includes a vacuum chamber (not shown in the figure), a light source 200, and a switchable vacuum optical component 100. The light source 200 is arranged outside the vacuum chamber and can be used to emit light into the vacuum chamber. The optical output end 12 of the switchable vacuum optical component 100 is sealed and connected to the vacuum chamber, and the optical input end 11 is sealed and connected to the light source 200.

[0085] The light emitted by the light source 200 enters the vacuum chamber through the switchable vacuum optical component 100 to form an optical path. The switchable vacuum optical component 100 can switch different optical elements located on the optical path, and the optical elements can be switched according to the requirements of the experiment or production without destroying the vacuum environment, thereby shortening the experiment or production time and improving the experiment or production efficiency.

[0086] The switchable vacuum optical components according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the switchable vacuum optical components according to some embodiments of the present disclosure can solve the problems that the spectral lines that can be used in one experimental process in conventional technology are limited to only two at most due to the number of gratings, the number of experiments is passively increased, and the experimental steps are more complicated. It can achieve the technical effect of being able to switch multiple optical elements so that multiple spectral lines can be used in the experimental process, facilitate experimental operations, and simplify experimental steps.

[0087] The vacuum light source system according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the vacuum light source system according to some embodiments of the present disclosure can solve the problems in conventional technology that the monochromator needs to be disassembled and the grating needs to be replaced in order to change the spectrum line, the vacuum environment needs to be broken, and the high vacuum needs to be re-drawn after the optical element is replaced, which is time-consuming and labor-intensive, prolongs the experimental time, and reduces the experimental efficiency. It can achieve the technical effect of switching multiple spectrum lines by switching the optical elements matched with the grating without breaking the vacuum environment. At the same time, the vacuum light source system in some embodiments of the present disclosure does not need to destroy the vacuum environment when switching optical elements, which saves time and labor, shortens the experimental time, and improves the experimental efficiency.

[0088] It should be pointed out that the above are only preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A switchable vacuum optical component, characterized in that: include: A vacuum containing chamber, comprising an optical input end and an optical output end, wherein the vacuum containing chamber is used to contain a working optical element located on an optical path; A switching device, which is vacuum-tightly connected to the vacuum containing chamber, comprises: A carrying device, used for carrying a plurality of optical elements, the carrying device comprising a feeding member, and the plurality of optical elements are arranged on the feeding member; a driving device, used for driving the carrying device to move so as to switch the working optical element in the vacuum chamber, wherein the driving device comprises a linear mechanism connected to the feeding member and used for driving the feeding member to perform linear movement so as to switch the working optical element located on the optical path in the vacuum chamber, The linear mechanism comprises: A first flange is connected to the vacuum housing chamber. A vacuum seal connected to the feeding member via a T-slot; a bellows, vacuum-tightly connected to the vacuum seal and the first flange, and used to accommodate the feeding member; and an adjusting assembly, used for adjusting the distance between the vacuum seal and the first flange to feed the feeding member, the adjusting assembly comprising: a screw assembly connected to the first flange and the vacuum seal, used for adjusting the distance between the first flange and the vacuum seal; A stopper is arranged in the vacuum containing chamber and cooperates with the feeding member to limit the working optical element. The stopper includes: A limiting seat, comprising a limiting groove matched with the feeding member; and The limiting plunger is arranged on the limiting seat and matches with the limiting hole on the feeding member.

2. The switchable vacuum optical component according to claim 1, characterized in that: The optical input end comprises a first vacuum sealing structure; and / or The optical output end comprises a second vacuum sealing structure; and / or The vacuum containing chamber further comprises a third vacuum sealing structure for being vacuum-sealedly connected to the switching device.

3. The switchable vacuum optical component according to claim 2, characterized in that: The first vacuum sealing structure comprises a flange or a vacuum sealing transparent window; and / or The second vacuum sealing structure comprises a flange or a vacuum sealing transparent window; and / or The third vacuum sealing structure includes a flange.

4. The switchable vacuum optical assembly according to claim 1, characterized in that: The feeding member is in the shape of an elongated strip, and the plurality of optical elements are arranged side by side on the feeding member; and / or The optical element includes at least one of a filter, a lens, a prism, and a grating.

5. The switchable vacuum optical assembly according to claim 1, characterized in that: The vacuum seal comprises: A second flange is connected to the bellows in a vacuum-tight manner and is connected to the screw assembly; The third flange is vacuum-tightly connected to the second flange and is connected to the feeding member.

6. The switchable vacuum optical assembly according to claim 5, characterized in that: The third flange is connected to the feeding member through a T-slot.

7. The switchable vacuum optical assembly according to claim 1, characterized in that: The screw assembly comprises: At least one screw, or at least one screw and at least one nut, or At least one screw and at least one pair of nuts.

8. The switchable vacuum optical assembly according to claim 7, characterized in that: The screw assembly further comprises: one or more guide rods slidably connected to the vacuum seal, The vacuum seal comprises a sliding hole for slidingly connecting with the guide rod.

9. The switchable vacuum optical assembly according to claim 7, characterized in that: The adjustment component also includes: A motor, wherein the output end of the motor is connected to the screw assembly and is used to drive the screw assembly.

10. The switchable vacuum optical assembly according to claim 1, wherein: Also includes: an optical sensor for detecting light passing through the working optical element; as well as The controller is used to receive the signal sent from the optical sensor to control the switching device to switch the working optical element located on the optical path in the vacuum chamber.

11. A vacuum light source system, comprising: Vacuum chamber; a light source, disposed outside the vacuum chamber and configured to emit light into the vacuum chamber; as well as The switchable vacuum optical component according to any one of claims 1 to 10 is sealedly connected to the vacuum chamber and the light source.

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