A manufacturing apparatus for integrated circuit chips

Abstract

The application discloses a manufacturing equipment for integrated circuit chips, which comprises a cross rod, a turnover motor is fixedly installed on one end surface of the cross rod, a mounting ring is rotationally installed on the shaft end of the turnover motor, a hollow rod is rotationally installed on the side surface of the mounting ring, a disc is fixedly connected on one end surface of the hollow rod, an empty groove is arranged on one side surface of the disc, a rubber adsorption pad is fixedly connected on the side surface of the empty groove, a negative pressure adsorption hole is arranged on the surface of the rubber adsorption pad, a connecting through hole is arranged on the other side surface of the disc, one end of the connecting through hole is located at the position of one end of the negative pressure adsorption hole, a pressing plate is slidingly installed on the surface of the hollow rod, a mounting screw is threadedly connected on the surface of the pressing plate, and a rubber push rod is threadedly connected on one end of the mounting screw, so that the convenience and stability of use can be greatly improved, and the efficiency and universality of transfer manufacturing are ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of chip manufacturing, more particularly, to a manufacturing device for integrated circuit chips. BACKGROUND

[0002] In the production and manufacturing process of integrated circuit chips, it is necessary to transfer the complete raw material plate to different stations for operation, and the commonly used is a negative pressure adsorption device.

[0003] However, in the existing negative pressure adsorption manufacturing device, the mechanical hand structure is usually directly installed by a slidingly connected moving seat, and the adsorption surface is directly attached to the raw material plate for adsorption during use. This not only easily causes surface scratches, but also is not conducive to controlling the negative pressure adsorption force. The suction force is small and easy to fall off, and when the adsorption force is large, not only the air extraction time is long, but also the pressure relief time is long, which is not conducive to quick relaxation, affects the use efficiency, and the existing device has poor freedom, which is not conducive to multidirectional transfer, and the air extraction pipeline is also easy to twist and interfere, which needs to be improved. SUMMARY

[0004] In view of the problems in the prior art, the present application aims to provide a manufacturing device for integrated circuit chips, which is connected to the turning motor and the mounting ring through the cross rod, and is further connected to the hollow rod and the disc, so as to rotate and adjust the orientation in multiple directions, which is conducive to transferring the raw material plate. The rubber adsorption pad and the rubber push rod are installed on both sides of the disc, which can be flexibly attached for negative pressure adsorption to avoid scratches and ensure safety and stability. When loosening, it is directly mechanically pushed to loosen, which is efficient and stable. The drive motor and the fixed plate are installed on the support rod connected by the cross rod, which is conducive to the circumferential rotation after installation and fixation, and expands the working area, which can greatly improve the convenience and stability of use, and ensure the efficiency and universality of transfer and manufacturing.

[0005] To solve the above problems, the present application adopts the following technical solutions.

[0006] The utility model provides a kind of manufacturing equipment for integrated circuit chip, including cross bar, one end surface of the cross bar is fixedly installed with turnover motor, shaft end of the turnover motor is rotatably installed with mounting ring, the side surface of the mounting ring is rotatably installed with hollow rod, one end surface of the hollow rod is fixedly connected with disc, one side surface of the disc is equipped with hollow slot, the side surface of the hollow slot is fixedly connected with rubber adsorption pad, the surface of the rubber adsorption pad is equipped with negative pressure adsorption hole, the other side surface of the disc is equipped with connecting through-hole, one end of the connecting through-hole is located at the end position of negative pressure adsorption hole, the surface of the hollow rod is slidably installed with pressing plate, the surface of the pressing plate is threadedly connected with mounting screw, one end of the mounting screw is threadedly connected with rubber push rod, one end surface of the rubber push rod is slidably connected to the side surface of connecting through-hole, the other side surface of the pressing plate is fixedly connected with telescopic rod, the surface of the telescopic rod is fixedly connected to the two side surfaces of hollow rod.

[0007] Further, one side surface of the mounting ring is fixedly connected with rotating cylinder, one end side of the rotating cylinder is rotatably connected to one end surface of the cross bar, and the cross bar is connected by the rotating cylinder. The mounting ring can be rotatably supported to ensure the stability of the turnover.

[0008] Further, the other side surface of the mounting ring is fixedly connected with U-shaped frame, the surface of the U-shaped frame is fixedly installed with rotating motor, the shaft end of the rotating motor is rotatably connected to the other end surface of the hollow rod, and the rotating motor is installed by the U-shaped frame. The hollow rod and the disc can be rotated towards, which is beneficial to adjust the placement angle of the raw material plate and has high adaptability.

[0009] Further, one end side of the hollow rod is provided with a negative pressure hole, the surface of the negative pressure hole is rotatably installed with a negative pressure cylinder, and the surface of the negative pressure cylinder is fixedly connected to the side surface of the U-shaped frame. The negative pressure cylinder is installed by the negative pressure hole, negative pressure air suction can be performed, and interference with rotation is avoided, which facilitates adjustment and use.

[0010] Further, one side surface of the negative pressure cylinder is fixedly connected with a hose, one end of the hose is fixedly installed with a negative pressure device, and the surface of the negative pressure device is fixedly installed on one end surface of the cross bar. The hose and the negative pressure device are installed by the negative pressure cylinder, can be moved synchronously, interference is avoided, negative pressure air suction can be performed, and safety and stability are ensured.

[0011] Further, the other end surface of the cross bar is fixedly connected with a support rod, one end of the support rod is rotatably installed with a driving motor, and one end of the driving motor is fixedly installed with a fixed plate. The driving motor and the fixed plate are installed by the support rod, can be fixed in position and then rotated circumferentially, which facilitates adjustment and use.

[0012] Further, the surface of one end of the supporting rod is rotatably sleeved with a supporting ring, the side surface of the supporting ring is fixedly connected to the surface of the fixed plate through an inclined rod, the supporting rod is connected through the supporting ring, the stability of the circumferential rotation is ensured, and use is facilitated.

[0013] Further, the surface of one end of the supporting rod is rotatably sleeved with a supporting ring, the side surface of the supporting ring is fixedly connected to the surface of the fixed plate through an inclined rod, the supporting rod is connected through the supporting ring, the stability of the circumferential rotation is ensured, and use is facilitated.

[0014] Further, the surface of one end of the supporting rod is rotatably sleeved with a supporting ring, the side surface of the supporting ring is fixedly connected to the surface of the fixed plate through an inclined rod, the supporting rod is connected through the supporting ring, the stability of the circumferential rotation is ensured, and use is facilitated.

[0015] Further, the surface of one end of the supporting rod is rotatably sleeved with a supporting ring, the side surface of the supporting ring is fixedly connected to the surface of the fixed plate through an inclined rod, the supporting rod is connected through the supporting ring, the stability of the circumferential rotation is ensured, and use is facilitated.

[0016] Compared with the prior art, the application has the following advantages:

[0017] (1) The horizontal rod is connected to the overturning motor and the mounting ring, and then the hollow rod and the disc are rotatably connected, so that the orientation can be adjusted in multiple directions, the raw material plate is facilitated to be transferred, the rubber adsorption pads and the rubber push rods are mounted on the two sides of the disc, negative pressure adsorption can be flexibly attached, scratching is avoided, safety and stability are ensured, and when loosening, the raw material plate is directly mechanically pushed to be loosened, which is efficient and stable.

[0018] (2) The horizontal rod is connected to the rotating cylinder, the mounting ring can be rotatably supported, and the stability of overturning is ensured.

[0019] (3) The U-shaped frame is used to install the rotating motor, the hollow rod and the disc can be rotated in the orientation, the angle of the raw material plate is facilitated to be adjusted, and the adaptability is high.

[0020] (4) The negative pressure hole is used to install the negative pressure cylinder, negative pressure air suction can be performed, and interference with rotation is avoided, and the use is facilitated.

[0021] (5) The negative pressure cylinder is used to install the hose and the negative pressure device, synchronous movement is facilitated, interference is avoided, negative pressure air suction can be performed, safety and stability are ensured.

[0022] (6) The supporting rod is used to install the driving motor and the fixed plate, the position can be fixed and then circumferential rotation is facilitated, and the use is facilitated.

[0023] (7) The supporting ring is used to connect the supporting rod, the stability of the circumferential rotation is ensured, and use is facilitated.

[0024] (8) The guide rod is used to install the guide wheel, the horizontal rod can be supported, the safety of the circumferential rotation direction is ensured, and shaking is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a schematic diagram of the overall structure of the present application;

[0026] Figure 2 is a partial schematic diagram of the hollow rod connection of the present application;

[0027] Figure 3 is a cross-sectional schematic diagram of the disc connection of the present application;

[0028] Figure 4 is an enlarged view of A of the medium pressure plate connection of the present application; Figure 3

[0029] Figure 5 is a partial structural diagram of the support rod connection of the present application.

[0030] Explanation of reference numerals in the drawings:

[0031] 1 horizontal rod, 11 overturning motor, 12 mounting ring, 13 hollow rod, 14 disc, 15 hollow slot, 16 rubber adsorption pad, 17 negative pressure adsorption hole, 18 connection through hole, 2 pressure plate, 21 mounting screw, 22 rubber push rod, 23 telescopic rod, 24 rotating cylinder, 25 U-shaped frame, 26 rotating motor, 3 negative pressure hole, 31 negative pressure cylinder, 32 hose, 33 negative pressure device, 34 support rod, 35 drive motor, 36 fixed plate, 37 support ring, 38 guide rod, 39 guide wheel. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0033] Please refer to Figures 1-5 , a manufacturing device for integrated circuit chips, comprising a horizontal rod 1, please refer to Figure 1 , Figure 3 and Figure 4 ​, one end surface of the crossbar 1 is fixedly installed with a turnover motor 11, which can overturn the installation ring 12 by an angle, and then adjust the straight hollow rod 13 to a transverse position, which is beneficial to place the raw material plate to different positions, has high adaptability, is beneficial to use, a shaft end of the turnover motor 11 is rotatably installed with the installation ring 12, a side surface of the installation ring 12 is rotatably installed with the hollow rod 13, one end surface of the hollow rod 13 is fixedly connected with a disc 14, one side surface of the disc 14 is provided with a hollow groove 15, a side surface of the hollow groove 15 is fixedly connected with a rubber adsorption pad 16, a surface of the rubber adsorption pad 16 is provided with a negative pressure adsorption hole 17, which can suck air by negative pressure, and then adhere to the surface of the raw material plate for negative pressure adsorption, which is convenient for transfer position, is efficient and stable, the other side surface of the disc 14 is provided with a connecting through hole 18, one end of the connecting through hole 18 is located at the position of one end of the negative pressure adsorption hole 17, a surface of the hollow rod 13 is slidably installed with a pressing plate 2, a surface of the pressing plate 2 is threadedly connected with an installation screw 21, one end of the installation screw 21 is threadedly connected with a rubber push rod 22, which can be inserted into the inside of the negative pressure adsorption hole 17, on one hand, it cuts off the air suction position and balances the adsorption air pressure, on the other hand, it can push the adsorbed raw material plate to separate, which can be operated efficiently and quickly, improves the efficiency of placing the raw material plate, ensures the safety and efficiency of manufacturing, one end surface of the rubber push rod 22 is slidably connected to the side surface of the connecting through hole 18, the other side surface of the pressing plate 2 is fixedly connected with a telescopic rod 23, a surface of the telescopic rod 23 is fixedly connected to the two side surfaces of the hollow rod 13, one side surface of the installation ring 12 is fixedly connected with a rotating cylinder 24, one end side surface of the rotating cylinder 24 is rotatably connected to one end surface of the crossbar 1, the crossbar 1 is connected through the rotating cylinder 24, which can rotatably support the installation ring 12 and ensure the stability of overturning.

[0034] Please refer to Figure 1 and Figure 2 , the other side surface of the installation ring 12 is fixedly connected with a U-shaped frame 25, a surface of the U-shaped frame 25 is fixedly installed with a rotating motor 26, a shaft end of the rotating motor 26 is rotatably connected to the other end surface of the hollow rod 13, the rotating motor 26 is installed through the U-shaped frame 25, which can rotate the hollow rod 13 and the disc 14 towards, is beneficial to adjust the placing angle of the raw material plate, has high adaptability, one end side surface of the hollow rod 13 is provided with a negative pressure hole 3, a surface of the negative pressure hole 3 is rotatably installed with a negative pressure cylinder 31, a surface of the negative pressure cylinder 31 is fixedly connected to the side surface of the U-shaped frame 25, the negative pressure cylinder 31 is installed through the negative pressure hole 3, which can suck air by negative pressure and avoid interference with rotation, is convenient to adjust and use, one side surface of the negative pressure cylinder 31 is fixedly connected with a hose 32, one end of the hose 32 is fixedly installed with a negative pressure device 33, a surface of the negative pressure device 33 is fixedly installed to one end surface of the crossbar 1, the hose 32 and the negative pressure device 33 are installed through the negative pressure cylinder 31, which can move synchronously, avoid interference, and can suck air by negative pressure, is safe and stable.

[0035] Please refer to Figure 1 and Figure 5The other end surface of the cross rod 1 is fixedly connected with a supporting rod 34, one end of the supporting rod 34 is rotatably installed with a driving motor 35, one end of the driving motor 35 is fixedly installed with a fixed plate 36, the driving motor 35 and the fixed plate 36 are installed through the supporting rod 34, can be fixed in position and then rotate in a circle, is convenient to adjust and use, the one end surface of the supporting rod 34 is rotatably sleeved with a supporting ring 37, the side surface of the supporting ring 37 is fixedly connected to the surface of the fixed plate 36 through an inclined rod, the supporting rod 34 is connected through the supporting ring 37, guarantees the stability of the circumferential rotation, is beneficial to use, the surface of one side of the cross rod 1 is fixedly connected with a guide rod 38, the surface of one end of the guide rod 38 is rotatably installed with a guide wheel 39, the guide wheel 39 is installed through the guide rod 38, can support the cross rod 1, guarantees the safety of the circumferential rotation direction, avoids shaking.

[0036] When in use, the fixed plate 36 can be fixedly installed, it is relatively stable, the supporting rod 34 is rotated through the driving motor 35, the guide wheel 39 is combined to roll and support, the cross rod 1 is guaranteed to rotate in a circle to different angle positions, and then work can be carried out at different direction positions, which is beneficial to adjust and use, when operating, the rubber adsorption pad 16 can be attached to the surface of the raw material plate, the negative pressure device 33 is started to suck air, the negative pressure can be formed in the hollow rod 13 and the hollow groove 15 through the hose 32 and the negative pressure cylinder 31, and then the raw material plate can be stably adsorbed to the surface of the disc 14 in combination with the adsorption hole 17 and external air pressure, which is beneficial to grabbing and convenient to transfer positions, the hollow rod 13 and the disc 14 can be rotated through the rotating motor 26, the direction position of the raw material plate can be adjusted, the installation ring 12 can be turned over through the turning motor 11, the raw material plate can be placed vertically or horizontally, and the adaptability is high, which is beneficial to adjust and use, when reaching the manufacturing position, the negative pressure suction is not stopped, the telescopic rod 23 is driven to extend, the rubber push rod 22 is inserted into the negative pressure adsorption hole 17 in combination with the pressing plate 2, on the one hand, the suction position is cut off, the adsorption air pressure is balanced, on the other hand, the adsorbed raw material plate can be pushed and separated, high-efficiency and rapid operation can be realized, the efficiency of placing the raw material plate is improved, and the safety and efficiency of manufacturing are guaranteed.

[0037] The above merely illustrates the preferred embodiments of the present application; however, the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacements or changes to the technical scheme of the present application and the improvement concept thereof within the technical range disclosed by the present application, which should be covered by the protection scope of the present application.

Claims

1. A manufacturing apparatus for integrated circuit chips, comprising a crossbar (1), characterized in that: A flipping motor (11) is fixedly mounted on one end of the crossbar (1). A mounting ring (12) is rotatably mounted on the shaft end of the flipping motor (11). A hollow rod (13) is rotatably mounted on the side of the mounting ring (12). A disc (14) is fixedly connected to one end of the hollow rod (13). A groove (15) is provided on one side of the disc (14). A rubber adsorption pad (16) is fixedly connected to the side of the groove (15). A negative pressure adsorption hole (17) is provided on the surface of the rubber adsorption pad (16). A connecting through hole is provided on the other side of the disc (14). (18), one end of the connecting through hole (18) is located at one end of the negative pressure adsorption hole (17), a pressure plate (2) is slidably installed on the surface of the hollow rod (13), a mounting screw (21) is threadedly connected to the surface of the pressure plate (2), a rubber push rod (22) is threadedly connected to one end of the mounting screw (21), one end of the rubber push rod (22) is slidably connected to the side of the connecting through hole (18), a telescopic rod (23) is fixedly connected to the other side of the pressure plate (2), and the surface of the telescopic rod (23) is fixedly connected to both sides of the hollow rod (13); A rotating cylinder (24) is fixedly connected to one side surface of the mounting ring (12). One end of the rotating cylinder (24) is rotatably connected to one end surface of the crossbar (1). A U-shaped frame (25) is fixedly connected to the other side surface of the mounting ring (12). A rotating motor (26) is fixedly mounted on the surface of the U-shaped frame (25). The shaft end of the rotating motor (26) is rotatably connected to the other end surface of the hollow rod (13). A negative pressure hole (3) is provided on one side surface of the hollow rod (13). A negative pressure cylinder (31) is rotatably mounted on the surface of the negative pressure hole (3). The surface of the negative pressure cylinder (31) is fixedly connected to the side of the U-shaped frame (25). A flexible hose (32) is fixedly connected to one side surface of the negative pressure cylinder (31). A negative pressure device (33) is fixedly installed at one end of the hose (32). The surface of the negative pressure device (33) is fixedly installed on one end of the crossbar (1). A support rod (34) is fixedly connected to the other end of the crossbar (1). A drive motor (35) is rotatably installed at one end of the support rod (34). A fixing plate (36) is fixedly installed at one end of the drive motor (35). A support ring (37) is rotatably sleeved on one end of the support rod (34). The side of the support ring (37) is fixedly connected to the surface of the fixing plate (36) by an inclined rod. A guide rod (38) is fixedly connected to one side of the crossbar (1). A guide wheel (39) is rotatably installed on one end of the guide rod (38).

2. The manufacturing equipment for integrated circuit chips according to claim 1, characterized in that: The guide rod (38) is located on one side of the support rod (34), and the surface of the guide wheel (39) is rolledly connected to one side surface of the fixing plate (36).

3. The manufacturing equipment for integrated circuit chips according to claim 1, characterized in that: The positions of the negative pressure adsorption holes (17) and the rubber push rods (22) correspond one-to-one and are respectively distributed on both sides of the disk (14).

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