Mobile device and liquid medicine supply device including the same

Abstract

The present invention provides a moving device and a liquid medicine supply device including the same. The liquid medicine supply device may include a gantry, a liquid medicine supply component for supplying liquid medicine to a substrate, and a moving device that supports the liquid medicine supply component and moves along the gantry. The moving device may include a moving component, a plurality of load supporting components, and a plurality of absorbing components. The moving component is capable of supporting one side of the liquid medicine supply component and is capable of moving on the upper part of the gantry. The moving component is capable of covering the first side, the top, and the second side of the gantry. The plurality of load supporting components is capable of maintaining a substantially certain distance between the moving component and the gantry, while supporting the load applied to the moving component and the gantry. The plurality of absorbing components is capable of absorbing the impact load or impact force applied to the moving component and / or the gantry when the moving component deviates from the moving path provided by the gantry.

Description

[0001] This application enjoys the priority of Korean Patent Application No. 10-2020-0154084 filed with the Korean Intellectual Property Office on November 17, 2020. Technical Field

[0002] Exemplary embodiments of the present invention relate to a mobile device and a liquid medicine supply device including the mobile device. More specifically, exemplary embodiments of the present invention relate to a mobile device including a moving part that can move along a moving path and a liquid medicine supply device including a mobile device that can support a liquid medicine supply part for providing liquid medicine onto a substrate. Background Art

[0003] When manufacturing a display device such as an organic light-emitting display device, a liquid supply process of supplying a liquid onto a substrate may be performed in order to form pixels on the substrate. The liquid supply process may be performed using a liquid supply device including a moving member capable of supporting an inkjet head that supplies the liquid onto the substrate and capable of moving along a gantry that provides a predetermined moving path.

[0004] In recent years, the size of the substrate used to manufacture the display device has increased, and thus the size of the liquid medicine supply device has also increased. In particular, a liquid medicine supply device having a relatively large size may include a liquid medicine supply component in which a plurality of inkjet heads are provided as a single component, and thus the size and weight of the liquid medicine supply component may also increase. Therefore, when the moving component moves along the moving path in a state in which the liquid medicine supply component is supported, the moving component and the moving path may be subjected to a significantly increased load.

[0005] When the greatly increased load is applied to the moving part and the moving path, the stability of the moving path and the moving part may be reduced, and the displacement of the liquid medicine supply part may be increased. Finally, the moving path, the moving part and / or the liquid medicine supply part may be damaged, and a process failure may occur in which the liquid medicine supply part cannot accurately supply the liquid medicine to a desired area on the substrate. Summary of the invention

[0006] Technical issues

[0007] One aspect of the present invention provides a moving device capable of improving the stability of a moving component moving on a moving path and preventing damage to the moving component and the moving path.

[0008] Another aspect of the present invention provides a liquid medicine supply device including a moving device capable of supporting a liquid medicine supply component, capable of improving the stability of a moving component moving along a gantry, and capable of preventing damage to the moving component and the gantry.

[0009] Another aspect of the present invention provides a liquid medicine supply device including a moving device capable of supporting a liquid medicine supply component, capable of improving the stability of a plurality of moving components moving along a first gantry and a second gantry, and capable of preventing damage to the plurality of moving components and the first and second gantry.

[0010] Technical Solution

[0011] According to one aspect of the present invention, there is provided a moving device including a moving route, a moving component, a plurality of load supporting components and a plurality of absorbing components. The moving component can move on the upper part of the moving route and can cover the first side, the top and the second side of the moving route. The plurality of load supporting components can maintain a substantially certain distance between the moving component and the moving route and can support the load applied to the moving component and the moving route. The plurality of load supporting components can be arranged between the top of the moving route and the bottom of the moving component and between the first side of the moving route and the first inner side of the moving component. The plurality of absorbing components can absorb the impact load or impact force applied to the moving component and / or the moving route when the moving component deviates from the moving path provided by the moving route. The plurality of absorbing components can be arranged between the second side of the moving route and the second inner side of the moving component.

[0012] In an exemplary embodiment, each of the absorbing components may include an air bearing and a vibration-damping component, and each of the load supporting components may include an air bearing, respectively. In this case, the vibration-damping component may include a spring seat.

[0013] In an exemplary embodiment, the plurality of load supporting components may be disposed between a first side surface of the moving path and a first inner side surface of the moving component and between a top surface of the moving path and a bottom surface of the moving component, and the plurality of absorbing components may be disposed between a second side surface of the moving path and a second inner side surface of the moving component.

[0014] In an exemplary embodiment, the first side surface of the moving component may entirely cover the first side surface of the moving route, and the second side surface of the moving route may partially cover the second side surface of the moving route.

[0015] In an exemplary embodiment, the moving device may further include a driving component that applies a driving force to the moving component so that the moving component moves on the upper part of the moving route; and a control component that adjusts the driving force provided by the driving component to correct the moving component when the moving component deviates from the moving path.

[0016] According to another aspect of the present invention, a liquid medicine supply device is provided, comprising: a gantry, a liquid medicine supply component for supplying liquid medicine to a substrate, and a moving device for supporting the liquid medicine supply component and moving along the gantry. The moving device may include a moving component, a plurality of load supporting components, and a plurality of absorbing components. The moving component is capable of supporting one side of the liquid medicine supply component, is capable of moving on the upper part of the gantry, and is capable of covering the first side surface, the upper surface, and the second side surface of the gantry. The plurality of load supporting components is capable of maintaining a substantially certain distance between the moving component and the gantry, and is capable of supporting the load applied to the moving component and the gantry. The plurality of absorbing components is capable of absorbing the impact load or impact force applied to the moving component and / or the gantry when the moving component deviates from the moving path provided by the gantry.

[0017] In an exemplary embodiment, each of the absorbing components may include an air bearing and a vibration-damping component, and each of the load-supporting components may include an air bearing, wherein the vibration-damping component may include a spring seat.

[0018] In an exemplary embodiment, the load supporting component can be arranged between a first side surface of the gantry and a first inner side surface of the movable component and between a top surface of the gantry and a bottom surface of the movable component, and the plurality of absorbing components can be arranged between a second side surface of the gantry and a second inner side surface of the movable component.

[0019] In an exemplary embodiment, the first side surface of the moving member may entirely cover the first side surface of the gantry, and the second side surface of the moving member may partially cover the second side surface of the gantry.

[0020] In an exemplary embodiment, the liquid medicine supply device may further include a driving component for applying a driving force to the moving component so that the moving component moves on the upper part of the gantry, and a control component for adjusting the driving force provided by the driving component to correct the moving component when the moving component deviates from the moving path.

[0021] According to another aspect of the present invention, there is provided a liquid medicine supply device, comprising: a first gantry; a second gantry facing the first gantry; a liquid medicine supply component for supplying liquid medicine to a substrate; a first moving component supporting one side of the liquid medicine supply component and moving on the upper part of the first gantry; a second moving component supporting the other side of the liquid medicine supply component and moving on the upper part of the second gantry; a plurality of load supporting components and a plurality of absorbing components. The plurality of load supporting components can maintain a substantially constant distance between the first moving component and the first gantry and between the second moving component and the second gantry, and support the load applied to the first moving component, the first gantry, the second moving component and the second gantry. The plurality of absorbing components can absorb the impact load or impact force applied to the first moving component and / or the first gantry and the second moving component and / or the second gantry when the first moving component deviates from the first moving path provided by the first gantry and / or when the second moving component deviates from the second moving path provided by the second gantry.

[0022] In an exemplary embodiment, each of the absorbing components may include an air bearing and a vibration-damping component, and each of the load-supporting components may include an air bearing, respectively. For example, the vibration-damping component may include a spring seat.

[0023] In some exemplary embodiments, the plurality of load supporting members may be disposed between one side of the first gantry and one side of the first moving member, between the top of the first gantry and the bottom of the first moving member, between one side of the second gantry and one side of the second moving member, and between the top of the second gantry and the bottom of the second moving member. The plurality of absorbing members may be disposed between the other side of the first gantry and the other side of the first moving member, and between the other side of the second gantry and the other side of the second moving member.

[0024] In another exemplary embodiment, the plurality of load supporting members may be disposed between the upper surface of the first gantry and the bottom surface of the first moving member, between the upper surface of the second gantry and the bottom surface of the second moving member, and between one side of the first gantry and one side of the first moving member. The plurality of absorbing members may be disposed between the other side of the first gantry and the other side of the first moving member, between one side of the second gantry and one side of the second moving member, and between the other side of the second gantry and the other side of the second moving member.

[0025] In another exemplary embodiment, the plurality of load supporting members may be disposed between the upper surface of the first gantry and the bottom surface of the first moving member, between the upper surface of the second gantry and the bottom surface of the second moving member, between one side of the first gantry and one side of the first moving member, and between one side of the second gantry and one side of the second moving member. The plurality of absorbing members may be disposed between the other side of the first gantry and the other side of the first moving member, and between the other side of the second gantry and the other side of the second moving member.

[0026] In some exemplary embodiments, one side of the first moving component may entirely cover one side of the first gantry, and the other side of the first moving component may partially cover the other side of the first gantry. One side of the second moving component may entirely cover one side of the second gantry, and the other side of the second moving component may partially cover the other side of the second gantry.

[0027] In some exemplary embodiments, the liquid medicine supply device may also include a first driving component that applies a first driving force to the first moving component so that the first moving component moves on the upper part of the first gantry; a second driving component that applies a second driving force to the second moving component so that the second moving component moves on the upper part of the second gantry; and multiple control components that adjust the first driving force and / or the second driving force to correct the first moving component and / or the second moving component when the first moving component deviates from the first moving path and / or the second moving component deviates from the second moving path.

[0028] Technical Effects

[0029] According to an exemplary embodiment of the present invention, the plurality of absorbing members can effectively absorb the impact load or the impact force applied to the moving member and / or the moving route (the gantry) when the moving member deviates from the moving path, thereby preventing damage to the moving member and / or the moving route (the gantry). The liquid medicine supply device including such a moving device can easily move a substrate having a relatively large size, and can accurately supply the liquid medicine from the liquid medicine supply member to a desired area of ​​the substrate.

[0030] However, the technical effects of the present invention are not limited to the above technical effects, and can be expanded in various ways without exceeding the scope of the idea and field of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 is a schematic plan view for explaining a mobile device according to an exemplary embodiment of the present invention;

[0032] Figure 2 is a simplified cross-sectional view for explaining a mobile device according to an exemplary embodiment of the present invention;

[0033] Figure 3 is an enlarged cross-sectional view for explaining an absorbent member according to an exemplary embodiment of the present invention;

[0034] Figure 4 and Figure 5 is a schematic diagram for explaining the arrangement of an absorbing member and a load supporting member according to an exemplary embodiment of the present invention;

[0035] Figure 6 is a schematic plan view of a liquid medicine supply device for explaining an exemplary embodiment of the present invention;

[0036] Figure 7 is a schematic plan view of a liquid medicine supply device for explaining another exemplary embodiment of the present invention;

[0037] Figure 8 is a schematic plan view of a liquid medicine supply device for explaining another exemplary embodiment of the present invention;

[0038] Fig. 9 FIG. 1 is a schematic plan view of a medical solution supply device for explaining another exemplary embodiment of the present invention. DETAILED DESCRIPTION

[0039] The following describes an exemplary embodiment of the present invention. The present invention can be subjected to a variety of changes and can have a variety of modes. The present invention is described in detail through embodiments. However, it is not intended to limit the present invention to a specific disclosure mode, and it should be understood to include all changes, equivalents and substitutes within the scope of the thought and technology of the present invention. Similar reference numerals are used for similar constituent elements when describing the various drawings. Terms such as first and second can be used to describe a variety of constituent elements, but the constituent elements shall not be limited to the terms. The terms are only used to distinguish one constituent element from other constituent elements. The terms used in this application are only used to illustrate specific embodiments, and the purpose is not to limit the present invention. The singular form of expression also includes the plural form of expression when there is no other clear description in the text. The terms such as "including", "having" or "having" described in this application should be understood as the existence of features, numbers, steps, operations, constituent elements, components or combinations thereof recorded in the specification, and should not be understood as pre-excluding the existence or additional possibility of one or more other features, numbers, steps, operations, constituent elements, components or combinations thereof.

[0040] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by those skilled in the art to which the present invention belongs. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the context of the relevant art and should not be interpreted as having an ideal or overly formal meaning if not clearly defined in this application.

[0041] The exemplary embodiments of the present invention are described in more detail below with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and repeated description of the same components is omitted.

[0042] Figure 1 is a schematic plan view for explaining a mobile device according to an exemplary embodiment of the present invention. Figure 2 is a simplified cross-sectional view for explaining a mobile device according to an exemplary embodiment of the present invention.

[0043] See also Figure 1 and Figure 2 According to the exemplary embodiment, the moving device 100 may include a traveling way 11, a moving member 13, at least one absorbing member 15, at least one load supporting member 17, a driving member 19, and a control member 21.

[0044] The moving path 11 may provide a predetermined moving path along which the moving member 13 can travel. The moving path 11 may include, for example, a gantry for a liquid medicine supply device, a moving track for an OHT (overhead hoist transport), and the like.

[0045] The moving part 13 can move on the upper part of the moving route 11. In particular, the moving part 13 can move along the length direction of the moving route 11 along which the moving route 11 extends. For example, the moving route 11 can have a substantially straight shape. Optionally, the moving route 11 can include a straight portion and a curved portion as required. The moving part 13 can have a structure that substantially surrounds the upper side and the side of the moving route 11 to ensure that it can move more stably on the upper part of the moving route 11.

[0046] like Figure 2As shown in the example, the moving part 13 can substantially surround the top of the moving route 11, the first side of the moving route 11, and the second side of the moving route 11 opposite to the first side. In this case, the moving part 13 can cover the top of the moving route 11 and the first side of the moving route 11 as a whole, and conversely, the moving part 13 can partially cover the second side of the moving route 11.

[0047] In an exemplary embodiment, the mobile device 100 may include a plurality of absorbing components 15 and a plurality of load supporting components 17. For example, the mobile device 100, such as Figure 1 The example may include two absorbing components 15 and four load supporting components 17. In this case, two load supporting components 17 may be arranged between the first side surface of the moving route 11 and the first inner side surface of the moving component 13, and the two absorbing components 15 may be arranged between the second side surface of the moving route 11 and the second inner side surface of the moving component 13. The two absorbing components 15 may substantially correspond to the two load supporting components 17. Furthermore, two load supporting components 17 may be arranged between the upper surface of the moving route 11 and the bottom surface of the moving component 13. The plurality of absorbing components 15 and the plurality of load supporting components 17 may be spaced at substantially the same intervals. However, the number of the plurality of absorbing components 15 and / or the number of the plurality of load supporting components 17 may vary according to the size of the moving device 100, the size of the liquid medicine supply device including the moving device 100, and the size of the OHT using the moving device 100.

[0048] When the moving device 100 includes a plurality of absorbing members 15 and a plurality of load supporting members 17 that can be arranged in the above-described configuration, as described later, the moving member 13 can stably move along the moving path provided by the moving path 11 on the moving path 11 while maintaining a substantially constant distance from the moving path 11. Furthermore, the plurality of absorbing members 15 and the plurality of load supporting members 17 can effectively prevent damage to the moving path 11 and / or the moving member 13.

[0049] When the moving part 13 is traveling on the upper part of the moving route 11, if the moving part 13 tilts to the right or left side, the moving part 13 can be separated from the moving path provided by the moving route 11. In other words, when the moving part 13 tilts to the right or left side on the upper part of the moving route 11, the moving part 13 can fall off the moving route 11. To this end, when the moving part 13 is moving on the upper part of the moving route 11, the multiple load supporting parts 17 can keep the moving part 13 at a substantially certain distance from the moving route 11. In particular, the load supporting parts 17 can support the load applied to the moving part 13 and the moving route 11. As described above, the multiple load supporting parts 17 of the mobile device 100 can support the load applied to the moving part 13 and the moving route 11, so that the moving part 13 can maintain the substantially certain distance between the moving part 13 and the moving route 11, and the moving part 13 can move more stably along the moving path.

[0050] Although not limited to this, when the moving part 13 moves along the moving path on the upper part of the moving route 11, due to the change of the load applied to the moving part 13 and various factors including the state of the moving route 11, the moving part 13 may not be able to maintain the certain distance relative to the moving route 11, so that the moving part 13 can be separated from the moving path. In other words, the moving part 13 can fall from the moving route 11. Therefore, when the moving part 13 falls from the moving route 11, the impact load or impact force applied to the moving part 13 and the moving route 11 may cause damage to the moving part 13 and / or the moving route 11.

[0051] In consideration of this problem, the mobile device 100 may include the plurality of absorbing components 15 to prevent the mobile component 13 from being separated from the moving path due to changes in the load applied to the mobile component 13 when the mobile component 13 moves along the moving path on the upper portion of the moving path 11 and various factors including the state of the moving path 11 (i.e., to prevent the mobile component 13 from falling from the moving path 11). In other words, the plurality of absorbing components 15 can absorb the impact load or the impact force applied to the mobile component 13 and the moving path 11 when the mobile component 13 falls from the moving path 11, thereby effectively preventing the mobile component 13 and / or the moving path 11 from being damaged.

[0052] Hereinafter, the plurality of absorbing members 15 and the plurality of load supporting members 17 according to an exemplary embodiment of the present invention will be described in detail.

[0053] In the mobile device 100 according to the exemplary embodiment, the plurality of load supporting members 17 and the plurality of absorbing members 15 may be arranged between the mobile member 13 and the moving path 11. The plurality of load supporting members 17 can maintain the certain distance between the mobile member 13 and the moving path 11. Furthermore, when the mobile member 13 travels on the moving path 11, the plurality of load supporting members 17 and the plurality of absorbing members 15 can prevent the mobile member 13 from tilting to the right and / or left on the moving path 11, thereby enabling the mobile member 13 to stably move along the moving path on the moving path 11.

[0054] The absorbing members 15 can absorb the impact load or the impact force applied to the moving path 11 and the moving member 13 when the moving member 13 moves on the moving path 11 and when the moving member 13 deviates from the moving path. Therefore, the plurality of absorbing members 15 can prevent the moving path 11 and / or the moving member 13 from being damaged by the impact load or the impact force.

[0055] As described above, the mobile device 100 may include the plurality of load supporting components 17. For example, the mobile device 100 may include the two load supporting components 17 disposed between the first side surface of the moving route 11 and the first inner side surface of the moving component 13 and the two load supporting components 17 disposed between the upper surface of the moving route 11 and the bottom surface of the moving component 13. The plurality of load supporting components 17 may be spaced apart from each other at the substantially constant intervals. Furthermore, the mobile device 100 may include the two absorbing components 15 disposed between the second side surface of the moving route 11 and the second inner side surface of the moving component 13. In this case, the plurality of load supporting components 17 may not overlap with the plurality of absorbing components 15 between the moving route 11 and the moving component 13. However, the number of the plurality of absorbing components 15 and / or the number of the load supporting components 17 may vary depending on the circumstances.

[0056] According to an exemplary embodiment, the plurality of absorbing members 15 and / or the plurality of load supporting members 17 may each include an air bearing. Preferably, each of the absorbing members 15 may include the air bearing. In the case where the plurality of load supporting members 17 each include the air bearing, the plurality of load supporting members 17 can support the load applied to the moving member 13 and the moving path 11 by using the air pressure provided by the air bearing. By using such a plurality of load supporting members 17, the moving member 13 can move more stably along the moving path on the upper portion of the moving path 11 while maintaining the substantially constant interval between the moving member 13 and the moving path 11.

[0057] Figure 3 is a schematic cross-sectional view for explaining the absorbing member 15 of the mobile device 100 according to an exemplary embodiment.

[0058] See also Figure 2 and Figure 3 , each of the absorbing components 15 may include an air bearing 31 and a damping member 33 that can be connected to the air bearing 31. For example, the damping member 33 may include a spring seat connected to the air bearing 31. A gap 35 can be provided between the second side of the moving route 11 and the air bearing 31 through the air bearing 31. Therefore, the damping member 33 and the air bearing 31 can effectively absorb the impact and / or vibration to the moving component 13 and the moving route 11. Each of the absorbing components 15 including the air bearing 31 and the damping member 33 can more effectively absorb the impact load or the impact force applied to the moving route 11 and the moving component 13 when the moving component 13 falls from the moving route 11 (that is, when the moving component 13 is separated from the moving path). Finally, the plurality of absorbing components 15 including a plurality of the air bearings 31 and a plurality of the damping members 33 can more effectively prevent the moving component 13 and / or the moving route 11 from being damaged. Furthermore, since the vibration-damping member 33 and the air bearing 31 can absorb the impact applied to the moving member 13 and the moving path 11 and / or the vibration occurring between the moving member 13 and the moving path 11, the moving member 13 can move more stably on the moving path 11. Furthermore, the substantially constant distance between the moving member 13 and the moving path 11 can be maintained by the plurality of gaps 35 provided by the plurality of air bearings 31 of the plurality of absorbing members 15.

[0059] In this way, the mobile device 100 according to the exemplary embodiment may include the multiple load-supporting components 17 having the multiple air bearings and the multiple absorbing components 15 having the multiple air bearings 31 and the multiple vibration-damping components 33, so that when the mobile component 13 moves on the upper part of the moving route 11, it can not only maintain the certain distance between the mobile component 13 and the moving route 11, but also prevent the impact load or the impact force applied to the moving route 11 and the mobile component 13 when the mobile component 13 falls from the moving route 11, causing damage to the mobile component 13 and / or the moving route 11.

[0060] See again Figure 1 , each of the absorbing components 15 arranged between the second side surface of the moving route 11 and the second inner side surface of the moving component 13 can be substantially opposite to each of the load supporting components 17 arranged between the first side surface of the moving route 11 and the first inner side surface of the moving component 13. In other words, the multiple absorbing components 15 and the multiple load supporting components 17 can be spaced apart from each other at substantially the same intervals. And, preferably, each of the load supporting components 17 can be arranged on a reference plane of movement when the moving component 13 moves along the moving path. The moving reference plane can be a plane that provides a reference moving path relative to the moving path, and can be located between the moving route 11 and the moving component 13.

[0061] As described above, the mobile device 100 of the exemplary embodiment may include the plurality of load supporting members 17 disposed between the first side surface of the moving route 11 and the first inner side surface of the moving member 13, and the plurality of load supporting members 17 disposed between the upper surface of the moving route 11 and the bottom surface of the moving member 13. In this case, the plurality of absorbing members 15 may be disposed between the second side surface of the moving route 11 and the second inner side surface of the moving member 13. Therefore, the plurality of load supporting members 17 and the plurality of absorbing members 15 may be disposed between the moving route 11 and the moving member 13 without overlapping.

[0062] The first side surface of the moving member 13 can entirely cover the first side surface of the moving path 11, so that the first side surface of the moving member 13 can substantially completely cover the plurality of load supporting members 17. Furthermore, the second side surface of the moving member 13 can partially cover the second side surface of the moving path 11, so as to cover the plurality of absorbing members 15. Furthermore, the moving member 13 can cover the plurality of load supporting members 17 disposed between the upper surface of the moving path 11 and the bottom surface of the moving member 13.

[0063] Although not illustrated, the moving part 13 may include a space for accommodating an object (eg, a substrate) that can be moved along the moving route 11 or a hook or a ring that can hang the object.

[0064] Figure 4 and Figure 5 1 is a schematic diagram for explaining the arrangement of a plurality of absorbing members 15 and a plurality of load supporting members 17 according to an exemplary embodiment of the present invention.

[0065] See also Figure 4 and Figure 5 , the plurality of absorbing components 15 may be arranged between the second side surface of the moving route 11 and the second inner side surface of the moving component 13, and the plurality of load supporting components 17 may be arranged between the upper surface of the moving route 11 and the bottom surface of the moving component 13 and between the first side surface of the moving route 11 and the first inner side surface of the moving component 13. Furthermore, the first side surface of the moving component 13 may entirely cover the first side surface of the moving route 11, and the second side surface of the moving component 13 may partially cover the second side surface of the moving route 11. In an exemplary embodiment, the number of the plurality of load supporting components 17 arranged between the first side surface of the moving route 11 and the first side surface of the moving component 13 and between the upper surface of the moving route 11 and the bottom surface of the moving component 13 may vary. Furthermore, the number of the plurality of absorbing components 15 arranged between the second side surface of the moving route 11 and the second inner side surface of the moving component 13 may vary.

[0066] like Figure 4 As shown, the plurality of load supporting members 17 may be arranged in substantially two rows and two columns between the first inner side of the moving member 13 and the first side of the moving path 11. Also, the plurality of load supporting members 17 may be arranged in substantially one row and two columns between the bottom surface of the moving member 13 and the top surface of the moving path 11. Figure 5 As illustrated, the plurality of absorbing members 15 may be arranged in a row and two columns between the second side surface of the moving path 11 and the second inner side surface of the moving member 13 .

[0067] In another exemplary embodiment, the plurality of absorbing components 15 may also be arranged between the first side surface of the moving route 11 and the first inner side surface of the moving component 13. In this case, the plurality of absorbing components 15 may be arranged in 2 rows and 2 columns between the first side surface of the moving route 11 and the first inner side surface of the moving component 13. Furthermore, the plurality of load supporting components 17 may also be arranged between the second side surface of the moving route 11 and the second inner side surface of the moving component 13. In particular, the plurality of load supporting components 17 may be arranged in 1 row and 2 columns between the second side surface of the moving route 11 and the second inner side surface of the moving component 13. Furthermore, two load supporting components 17 may be arranged in 1 column between the top surface of the moving route 11 and the bottom surface of the moving component 13.

[0068] As described above, taking into account various factors including the load applied to the moving part 13 and the state of the moving route 11, the multiple load supporting parts 17 and the multiple absorbing parts 15 can be arranged between the moving route 11 and the moving part 13 in various arrangements and in various numbers.

[0069] According to an exemplary embodiment, the moving device 100 may include the plurality of load supporting members 17 and the plurality of absorbing members 15 that can be arranged in the above-mentioned arrangement, so that the moving member 13 can move more stably on the upper portion of the moving path 11 while maintaining the substantially constant distance between the moving member 13 and the moving path 11. Furthermore, when the moving member 13 deviates from the moving path, the impact load or the impact force applied to the moving member 13 and / or the moving path 11 can be effectively absorbed, so that the moving member 13 and the moving path 11 can be prevented from being damaged.

[0070] See again Figure 1 , the moving path 11 of the mobile device 100 may generally have a substantially straight line shape, but may selectively include a straight line portion and a curved line portion. The driving component 19 is capable of providing the driving force to the moving component 13 so that the moving component 13 can move on the moving path 11. For example, the driving component 19 may include a motor such as a linear motor for moving the moving component 13 along the moving path. With such a driving component 19, the moving component 13 can move not only in one direction on the moving path 11, but also in two directions.

[0071] As described above, during the movement of the moving part 13 on the upper part of the moving route 11, the moving part 13 may deviate from the moving path. Although the plurality of absorbing parts 15 can absorb the impact load or the impact force applied to the moving part 13 and / or the moving route 11, since the moving part 13 deviates from the moving route 11, it may be necessary to correct the moving part 13 and / or the moving route 11. The control part 21 can adjust the driving force provided by the driving part 19 so as to correct the moving part 13 and / or the moving route 11 when the moving part 13 deviates from the moving path. In an exemplary embodiment, the control part 21 and the driving part 19 can work in cooperation with each other to correct the moving part 13 and / or the moving route 11 when the moving part 13 deviates from the moving path. Therefore, the mobile device 100 including the moving part 13, the driving part 19 and the control part 21 can transfer the object more stably even when the size of the object increases.

[0072] Hereinafter, a liquid medicine supply device including a moving device and a liquid medicine supply component according to an exemplary embodiment of the present invention will be described in detail. However, the present invention is not limited to the liquid medicine supply device, and it should be understood that it can also be applied to other devices such as OHT.

[0073] Figure 6 FIG. 1 is a schematic plan view of a chemical liquid supply device for explaining an exemplary embodiment of the present invention.

[0074] See also Figure 6 , the medical liquid supply device 200 according to the exemplary embodiment may have a substantially cantilever structure. Figure 6 The liquid medicine supply device 200 illustrated in FIG. 1 may include Figures 1 to 5 The mobile device 100 and the liquid medicine supply component 61 are described. For example, the liquid medicine supply component 61 may include at least one inkjet head.

[0075] At least one inkjet head of the liquid medicine supply component 61 may include a plurality of nozzles for spraying a predetermined liquid medicine onto the substrate. The plurality of nozzles may be arranged at a predetermined interval. Furthermore, the at least one inkjet head may include a plurality of piezoelectric elements respectively arranged adjacent to the plurality of nozzles. The number of the piezoelectric elements may be substantially the same as the number of the nozzles. The liquid medicine can be supplied from the plurality of nozzles to the substrate through the action of such piezoelectric elements. In particular, the amount of the liquid medicine sprayed from the plurality of nozzles to the area of ​​the substrate can be independently adjusted by controlling the voltage applied to the plurality of piezoelectric elements.

[0076] In an exemplary embodiment, the liquid medicine supply device 200 may further include a workbench for placing the substrate on the upper portion and a transfer member for transferring the substrate. The workbench may be a floating workbench capable of floating the substrate from its surface. When the liquid medicine supply device 200 includes the floating workbench, the liquid medicine supply device 200 may further include an air supply member capable of spraying air onto the bottom surface of the substrate and a vacuum adsorption member capable of providing adsorption force to the bottom surface of the substrate.

[0077] The transfer component can hold one side or both sides of the substrate floating on the upper part of the workbench, and then transfer the substrate on the upper part of the workbench. In an exemplary embodiment, the transfer component may include a guide rail, a holding component and a driving component. The guide rail may be adjacently arranged on one side of the workbench. Optionally, two guide rails may be adjacently arranged on both sides of the workbench, respectively. The holding component can hold one side or both sides of the substrate and can move along the guide rail. The driving component can provide a predetermined driving force to the holding component.

[0078] The liquid medicine supply component 61 of the liquid medicine supply device 200 may be configured as a package including a plurality of inkjet heads. For example, the liquid medicine supply component 61 may be configured as a component including three inkjet heads. Alternatively, the liquid medicine supply component 61 may be configured as a plurality of components including a plurality of inkjet heads, respectively. Therefore, the liquid medicine supply component 61 may have a relatively large volume and a relatively heavy weight. To this end, the liquid medicine supply device 200 may include a package including a plurality of inkjet heads. Figures 1 to 5 The moving device 100 described is used for the liquid medicine supply part 61 having a relatively large size.

[0079] like Figure 6 As illustrated, the liquid medicine supply device 200 may include a moving part 13 capable of supporting one side of the liquid medicine supply part 61 and a gantry 63 capable of providing a moving path for the moving part 13 .

[0080] The gantry 63 may be arranged in a direction substantially orthogonal to the direction in which the substrate is transferred on the upper portion of the workbench. For example, the substrate may be transferred in a first direction, and the gantry 63 may be arranged in a second direction substantially orthogonal to the first direction. Therefore, during the process of transferring the substrate in the first direction on the upper portion of the workbench, the moving member 13 may move in the second direction along the gantry 63. The liquid medicine may be supplied to the substrate from the liquid medicine supply member 61 supported by the moving member 13.

[0081] Since the liquid medicine supply device 200 may include Figures 1 to 5The plurality of load supporting members 17 and the plurality of absorbing members 15 described above can maintain a substantially constant distance between the moving member 13 and the gantry 63, while the moving member 13 can stably move on the upper portion of the gantry 63. The plurality of absorbing members 15 can also absorb the impact load or impact force applied to the moving member 13 and / or the gantry 63 when the moving member 13 deviates from the moving path provided by the gantry 63, thereby preventing the moving member 13 and the gantry 63 from being damaged. In this case, the plurality of load supporting members 17 can be arranged between the first side surface of the gantry 63 and the first inner side surface of the moving member 13 and between the upper surface of the gantry 63 and the bottom surface of the moving member 13. Furthermore, the plurality of absorbing members 15 can be arranged between the second side surface of the gantry 63 and the second inner side surface of the moving member 13.

[0082] In the exemplary embodiment, when the moving member 13 supporting the relatively large-sized chemical liquid supply member 61 moves on the upper part of the gantry 63, even if a large load is applied to the moving member 13 and the gantry 63 from the chemical liquid supply member 61, the moving member 13 can be stably moved by the plurality of load supporting members 17. Furthermore, when the moving member 13 supporting the relatively large-sized chemical liquid supply member 61 is separated from the gantry 63, the large impact load or impact force applied to the moving member 13 and / or the gantry 63 can be effectively absorbed by the absorbing member 15. Therefore, the chemical liquid can be accurately discharged from the chemical liquid supply member 61 moving together with the moving member 13 to a set area on the substrate.

[0083] Furthermore, the liquid medicine supply device 200 may include: Figure 1 The driving component 19 and the control component 21 illustrated as an example, therefore, when the moving component 13 deviates from the moving path provided by the gantry 63, the moving component 13 and / or the gantry 63 can be corrected by the driving component 19 and the control component 21.

[0084] According to the exemplary embodiment, the movable part 13 supporting the liquid medicine supply part 61 can move along the moving path while the substantially constant distance between the gantry 63 and the movable part 13 is maintained by the plurality of load supporting parts 17. Furthermore, when the movable part 13 is separated from the gantry 63, the plurality of absorbing parts 15 can absorb the impact load or the impact force applied to the movable part 13 and / or the gantry 63, thereby preventing damage to the movable part 13 and the gantry 63. Furthermore, when the movable part 13 is separated from the moving path, the control part 21 and the driving part 19 can correct the movable part 13 and / or the gantry 63. Therefore, the stable movement of the movable part 13 can be ensured, and the movable part 13 and the gantry 63 can be effectively prevented from being damaged, while the liquid medicine can be stably supplied from the liquid medicine supply part 61 to the substrate.

[0085] Figure 7 FIG. 1 is a schematic plan view of a medical solution supply device for explaining another exemplary embodiment of the present invention. Figure 8 FIG. 1 is a schematic plan view of a medical solution supply device for explaining another exemplary embodiment of the present invention. Fig. 9 FIG. 1 is a schematic plan view of a medical solution supply device for explaining another exemplary embodiment of the present invention.

[0086] Figures 7 to 9 The liquid medicine supply device illustrated in the figure may have a dual structure including a first moving device and a second moving device. In this case, the first moving device and the second moving device may be respectively connected to the first moving device and the second moving device. Figures 1 to 5 The mobile devices 100 described are substantially the same. Figures 7 to 9 In addition to the first gantry 75, the second gantry 77, the first moving member 71 and the second moving member 73, each liquid medicine supply device 300 may have the same Figure 6 The liquid medicine supply device 200 described above is substantially similar in structure. More specifically, Figures 7 to 9 In addition to the first moving device and the second moving device, each of the liquid medicine supply devices 300 illustrated in FIG. 1 may also include Figure 6 The liquid medicine supply unit 61, the workbench and the transfer unit are described.

[0087] See also Figure 7 The liquid medicine supply device 300 may include the first gantry 75, the second gantry 77 substantially facing the first gantry 75, and a liquid medicine supply component 61 for supplying liquid medicine onto the substrate.

[0088] The first moving part 71 of the first moving device can support one side of the liquid medicine supply part 61, and the second moving part 73 can support the other side of the liquid medicine supply part 61. The first moving part 71 can move on the first gantry 75, and the second moving part 73 can move on the second gantry 77. That is, the first moving part 71 can move along the first moving path provided by the first gantry 75, and the second moving part 73 can move along the second moving path provided by the second gantry 77.

[0089] The first moving device may include the plurality of absorbing members 15 and the plurality of load supporting members 17, and the second moving device may include the plurality of load supporting members 17. Optionally, the second moving device may further include the plurality of absorbing members 15. The plurality of absorbing members 15 of the first and second moving devices can absorb the impact load or impact force that can be applied to the first moving member 71 and / or the first gantry 75 and the second moving member 73 and / or the second gantry 77 when the first moving member 71 deviates from the first moving path and / or the second moving member 73 deviates from the second moving path. The plurality of load supporting members 17 of the first and second moving devices can support the load applied to the first moving member 71 and the second moving member 73 while maintaining a substantially certain interval between the first moving member 71 and the first gantry 75 and a substantially certain interval between the second moving member 73 and the second gantry 77, so that the first moving member 71 and the second moving member 73 can each stably move on the upper portion of the first gantry 75 and the second gantry 77.

[0090] In some exemplary embodiments, the plurality of load supporting members 17 of the first moving device may be arranged between the first side surface of the first gantry 75 and the first inner side surface of the first moving member 71 and between the upper surface of the first gantry 75 and the bottom surface of the first moving member 71. The plurality of absorbing members 15 of the first moving device may be arranged between the second side surface of the first gantry 75 and the second inner side surface of the first moving member 71. The plurality of load supporting members 17 of the second moving device may be arranged between the first side surface of the second gantry 77 and the first inner side surface of the second moving member 73 and between the upper surface of the second gantry 77 and the bottom surface of the second moving member 73. The plurality of absorbing members 15 of the second moving device may be arranged between the second side surface of the second gantry 77 and the second inner side surface of the second moving member 73. In other words, the plurality of load supporting members 17 and the plurality of absorbing members 15 of the first and second moving devices may be arranged so as not to overlap between the first gantry 75, the first moving member 71, the second gantry 77 and the second moving member 73, respectively.

[0091] Figures 7 to 9 In each of the liquid medicine supply devices 300 illustrated in the figure, the first movable member 71 and the second movable member 73 can work independently, so a position error may occur between one side and the other side of the liquid medicine supply member 61 supported by the first movable member 71 and the second movable member 73. As a result, the first movable member 71 can be separated from the first moving path, or the second movable member 73 can be separated from the second moving path. To this end, each of the liquid medicine supply devices 300 may include the plurality of load supporting members 17, so that while maintaining the substantially constant distance between the first movable member 71 and the first gantry 75, and maintaining the substantially constant interval between the second movable member 73 and the second gantry 77, the first movable member 71 can move more stably on the upper part of the first gantry 75, and the second movable member 73 can move more stably on the upper part of the second gantry 77. Furthermore, since each of the liquid medicine supply devices 300 may include the plurality of absorbing members 15, when the first movable member 71 is separated from the first gantry 75 or the second movable member 73 is separated from the second gantry 77, the plurality of absorbing members 15 can effectively absorb the impact load or the impact force applied to the first movable member 71 and / or the first gantry 75 or the impact load or the impact force applied to the second movable member 73 and / or the second gantry 77. Therefore, damage to the first movable member 71, the first gantry 75, the second movable member 73 and the second gantry 77 can be effectively prevented.

[0092] Figures 7 to 9 In each of the liquid medicine supply devices 300 illustrated in the figure, the first moving device may further include a first driving component and a first control component, and the second moving device may further include a second driving component and a second control component. The first driving component can provide a first driving force to the first moving component 71, so that the first moving component 71 can move on the upper part of the first gantry 75. The second driving component can provide a second driving force to the second moving component 73, so that the second moving component 73 can move on the upper part of the second gantry 77. The first control component can adjust the first driving force of the first driving component to correct the first moving component 71 when the first moving component 71 deviates from the first moving path. The second control component can adjust the second driving force of the second driving component to correct the second moving component 73 when the second moving component 73 deviates from the second moving path. In other words, the first and second control components can each cooperate with the first and second driving components to respectively correct the first moving component 71 and the second moving component 73. The first and second driving components and the first and second control components can respectively cooperate with each other as shown in FIG. Figure 1 The driving member 19 and the control member 21 described are substantially the same.

[0093] In some exemplary embodiments, the plurality of load supporting members 17 can maintain a substantially constant distance between the first moving member 71 and the first gantry 75, and between the second moving member 73 and the second gantry 77, so that the first moving member 71 and the second moving member 73 supporting the liquid medicine supply member 61 can each stably move on the first gantry 75 and the second gantry 77. In addition, the plurality of absorbing members 15 can absorb the impact load or the impact force applied to the first moving member 71 and / or the first gantry 75 and the second moving member 73 and / or the second gantry 77 when the first moving member 71 and the second moving member 73 each deviate from the first and second moving paths, thereby effectively preventing the first moving member 71 and the second moving member 73 and the first gantry 75 and the second gantry 77 from being damaged. In this case, the first and second driving members and the first and second control members can correct the first moving member 71 and / or the first gantry 75 and the second moving member 73 and / or the second gantry 77.

[0094] In another exemplary embodiment, each of the first moving component 71 and the second moving component 73 may include a ring or a hook, etc., for easily moving the relatively large-sized liquid medicine supply component 61 along the first gantry 75 and the second gantry 77 .

[0095] See again Figure 7 The dual-structure liquid medicine supply device 300 may include the multiple load supporting components 17, the multiple absorbing components 15, the liquid medicine supply component 61, the first moving component 71, the second moving component 73, the first gantry 75 and the second gantry 77.

[0096] The plurality of load supporting members 17 of the first and second moving devices may be arranged between one side of the first gantry 75 and one side of the first moving member 71, between the top of the first gantry 75 and the bottom of the first moving member 71, between one side of the second gantry 77 and one side of the second moving member 73, and between the top of the second gantry 77 and the bottom of the second moving member 73. Furthermore, the plurality of absorbing members 15 of the first and second moving devices may be arranged between the other side of the first gantry 75 and the other side of the first moving member 71, and between the other side of the second gantry 77 and the other side of the second moving member 73. The plurality of absorbing members 15 and the plurality of load supporting members 17 may be arranged so as not to overlap.

[0097] In another exemplary embodiment, the plurality of load supporting members 17 may not be arranged between one side of the second moving member 73 and one side of the second gantry 77. When no member is arranged between one side of the second moving member 73 and one side of the second gantry 77, the second moving member 75 can have an increased degree of freedom of movement, so that the second moving member 75 can stably transfer the liquid medicine supply member 61. Similarly, the plurality of absorbing members 15 may not be arranged between the other side of the second moving member 73 and the other side of the second gantry 77, so that the second moving member 75 can have an even greater degree of freedom of movement. As a result, the liquid medicine supply member 61 can be moved more stably by the first moving member 71 and the second moving member 73, and the liquid medicine can be accurately provided from the liquid medicine supply member 61 to a desired area of ​​the substrate. One side of the second moving member 73 can entirely cover one side of the second gantry 77, and the other side of the second moving member 73 can partially cover the other side of the second gantry 77.

[0098] Figure 7In the illustrated liquid medicine supply device 300, the first moving member 71 and the second moving member 73 can stably move on the upper part of the first gantry 75 and the second gantry 77 through the plurality of load supporting members 17 and the plurality of absorbing members 15 of the first and second moving devices, and can prevent damage to the first moving member 71 and the second moving member 73 and the first gantry 75 and the second gantry 77. In addition, the first moving member 71 and the second moving member 73 can move along the first and second moving paths through the first and second driving members and the first and second control members of the first and second moving devices, and can perform correction of the first moving member 71 and the second moving member 73 and / or the first gantry 75 and the second gantry 77.

[0099] See below Figure 8 The dual-structure liquid medicine supply device 300 may include the plurality of absorption components 15 , the plurality of load supporting components 17 , the liquid medicine supply component 61 , the first moving component 71 , the second moving component 73 , the first gantry 75 and the second gantry 77 .

[0100] In some exemplary embodiments, the plurality of load supporting members 17 may be disposed between the upper surface of the first gantry 75 and the bottom surface of the first moving member 71, between the upper surface of the second gantry 77 and the bottom surface of the second moving member 73, and between one side of the first gantry 75 and one side of the first moving member 71. In this case, the plurality of absorbing members 15 may be disposed between the other side of the first gantry 75 and the other side of the first moving member 71, between one side of the second gantry 77 and one side of the second moving member 73, and between the other side of the second gantry 77 and the other side of the second moving member 73.

[0101] Figure 8 In the double-structured liquid medicine supply device 300 illustrated in FIG. 1 , the plurality of load supporting members 17 may be adjacent to the upper surface of the first gantry 75, the upper surface of the second gantry 77, and one side of the first gantry 75. Furthermore, the plurality of absorbing members 15 may be adjacent to the other side of the first gantry 75, one side of the second gantry 77, and the other side of the second gantry 77. If the plurality of absorbing members 15 are disposed between one side of the first gantry 75 and one side of the first moving member 71, the movement stability of the first moving member 71 and / or the second moving member 73 can be reduced by the buffer provided by the plurality of absorbing members 15.

[0102] In some exemplary embodiments, the plurality of load supporting members 17 and the plurality of absorbing members 15 can stably move the first moving member 71 and the second moving member 73 on the first gantry 75 and the second gantry 77, and can prevent damage to the first moving member 71 and the second moving member 73 and the first gantry 75 and the second gantry 77. Furthermore, the first and second driving members and the first and second control members can move the first moving member 71 and the second moving member 73 along the first and second moving paths, and can correct the first moving member 71 and the second moving member 73 and / or the first gantry 75 and the second gantry 77. Furthermore, the first moving member 71 and the second moving member 73 can move along the first and second moving paths by the first and second driving members and the first and second control members of the first and second moving devices, and can correct the first moving member 71 and the second moving member 73 and / or the first gantry 75 and the second gantry 77.

[0103] See below Fig. 9 The dual-structure liquid medicine supply device 300 may include the plurality of absorption components 15 , the plurality of load supporting components 17 , the liquid medicine supply component 61 , the first moving component 71 , the second moving component 73 , the first gantry 75 and the second gantry 77 .

[0104] In another exemplary embodiment, the plurality of load supporting members 17 may be disposed between the upper surface of the first gantry 75 and the bottom surface of the first moving member 71, between the upper surface of the second gantry 77 and the bottom surface of the second moving member 73, between one side of the first gantry 75 and one side of the first moving member 71, and between one side of the second gantry 77 and one side of the second moving member 73. In this case, the plurality of load absorbing members 15 may be disposed between the other side of the first gantry 75 and the other side of the first moving member 71, and between the other side of the second gantry 77 and the other side of the second moving member 73.

[0105] In another exemplary embodiment, the plurality of load supporting members 17 and the plurality of absorbing members 15 can stably move the first moving member 71 and the second moving member 73 on the first gantry 75 and the second gantry 77, and can prevent damage to the first moving member 71 and the second moving member 73 and the first gantry 75 and the second gantry 77. Furthermore, the first and second driving members and the first and second control members can move the first moving member 71 and the second moving member 73 along the first and second moving paths, and can perform corrections on the first moving member 71 and the second moving member 73 and / or the first gantry 75 and the second gantry 77. Furthermore, the first moving member 71 and the second moving member 73 can move along the first and second moving paths by the first and second driving members and the first and second control members of the first and second moving devices, and can perform corrections on the first moving member 71 and the second moving member 73 and / or the first gantry 75 and the second gantry 77.

[0106] Figures 7 to 9 In the liquid medicine supply device 300 illustrated in the figure, the liquid medicine supply component 61, the first movable component 71 and the second movable component 73, and the first gantry frame 75 and the second gantry frame 77 can be considered to appropriately adjust the arrangement of the multiple absorption components 15 and the arrangement of the multiple load supporting components 17 according to the situation.

[0107] According to the exemplary embodiment of the present invention, the chemical liquid supply device including the moving device can easily move a substrate having a relatively large size, and can accurately supply the chemical liquid from the chemical liquid supply part to a desired area of ​​the substrate.

[0108] Although exemplary embodiments of the present invention are described above, it should be understood by those skilled in the art that various modifications and changes may be made to the present invention without departing from the scope of the concept and field of the present invention described in the technical solutions.

Claims

1. A liquid medicine supply device, characterized in that: include: First portal frame; a second portal frame, which faces the first portal frame; A liquid medicine supplying component, which supplies liquid medicine to the substrate; a first moving component, which supports one side of the liquid medicine supply component and moves on the upper part of the first gantry; A second moving component, which supports the other side of the liquid medicine supply component and moves on the upper part of the second gantry; A plurality of load supporting members, which maintain a certain distance between the first moving member and the first gantry and between the second moving member and the second gantry, and support a load applied to the first moving member, the first gantry, the second moving member, and the second gantry; as well as A plurality of absorbing parts for absorbing the impact load or impact force applied to the first moving part and / or the first gantry when the first moving part deviates from the first moving path provided by the first gantry, and for absorbing the impact load or impact force applied to the second moving part and / or the second gantry when the second moving part deviates from the second moving path provided by the second gantry.

2. The liquid medicine supply device according to claim 1, characterized in that: Each of the absorbing components includes an air bearing and a vibration-damping component, and each of the load-supporting components includes an air bearing.

3. The liquid medicine supply device according to claim 2, characterized in that: The vibration-damping component includes a spring seat.

4. The liquid medicine supply device according to claim 1, characterized in that: The multiple load supporting components are arranged between one side of the first gantry and one side of the first movable component, between the top of the first gantry and the bottom of the first movable component, between one side of the second gantry and one side of the second movable component, and between the top of the second gantry and the bottom of the second movable component, and the multiple absorbing components are arranged between the other side of the first gantry and the other side of the first movable component and between the other side of the second gantry and the other side of the second movable component.

5. The liquid medicine supply device according to claim 1, characterized in that: The load supporting component is arranged between the top of the first gantry and the bottom of the first movable component, between the top of the second gantry and the bottom of the second movable component, and between one side of the first gantry and one side of the first movable component, and the multiple absorbing components are arranged between the other side of the first gantry and the other side of the first movable component, between one side of the second gantry and one side of the second movable component, and between the other side of the second gantry and the other side of the second movable component.

6. The liquid medicine supply device according to claim 1, characterized in that: One side of the first movable component entirely covers one side of the first gantry, and the other side of the first movable component partially covers the other side of the first gantry. One side of the second movable component entirely covers one side of the second gantry, and the other side of the second movable component partially covers the other side of the second gantry.

7. The liquid medicine supply device according to claim 1, characterized in that: Also includes: a first driving component, which applies a first driving force to the first moving component so that the first moving component moves on the upper part of the first gantry; a second driving member, which applies a second driving force to the second moving member so that the second moving member moves on the upper portion of the second gantry; as well as A plurality of control components adjust the first driving force to correct the first moving component when the first moving component deviates from the first moving path; and / or adjust the second driving force to correct the second moving component when the second moving component deviates from the second moving path.

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