Apparatus for manufacturing display device and method for manufacturing display device

Abstract

A manufacturing apparatus of a display device and a manufacturing method of a display device are provided. The manufacturing apparatus of a display device according to an embodiment includes a laser module emitting a laser beam, and a first optical system disposed at one side of the laser module into which the laser beam enters, wherein the first optical system controls an energy distribution curve of the laser beam, and the energy distribution curve of the laser beam includes a first peak gradually increasing and then decreasing from an edge toward a center portion at a first irradiation surface located at one side of a traveling direction of the laser beam with respect to a focal point of the laser beam.

Description

Technical Field

[0001] This invention relates to an apparatus for manufacturing a display device and a method for manufacturing a display device. Background Technology

[0002] With the development of multimedia, the importance of display devices is increasing. In response, various display devices such as Organic Light Emitting Displays (OLEDs) and Liquid Crystal Displays (LCDs) are being used. Applications of such display devices are diversifying, primarily centered around various mobile electronic devices (e.g., smartphones, smartwatches, laptops, and other portable electronic devices).

[0003] In the manufacturing process of display devices, the display panel can be protected by a protective film attached to a surface. The protective film protecting the display panel can be partially peeled off as needed. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a manufacturing apparatus and a manufacturing method for a display device that can provide uniform energy along the line of the irradiated laser beam by region, thereby stably removing the protective film.

[0005] Furthermore, the technical problem to be solved by the present invention is to provide a display device manufacturing apparatus and a display device manufacturing method that can minimize damage to the substrate under the protective film when irradiating a laser beam onto a substrate with a protective film attached.

[0006] The technical problems of this invention are not limited to those mentioned above. Other technical problems not mentioned can be clearly understood by those skilled in the art through the following content.

[0007] An apparatus for manufacturing a display device according to an embodiment for solving the aforementioned technical problem includes: a laser module that emits a laser beam; and a first optical system disposed on one side of the laser module, the laser beam entering the first optical system, wherein the first optical system controls the energy distribution curve of the laser beam on a first irradiation surface located on one side of the laser beam's direction of travel relative to the focal point of the laser beam, the energy distribution curve of the laser beam including a first peak that gradually increases from the edge toward the center and then decreases.

[0008] On the first irradiated surface, the energy can be distributed in the central part with a minimum value.

[0009] At the center, the energy of the laser beam can be 0.

[0010] On the first irradiated surface, the energy distribution curve also includes a second peak formed at the center of the laser beam.

[0011] The energy at the second peak can be less than the energy at the first peak.

[0012] The first irradiation surface may be perpendicular to the direction of travel of the laser beam.

[0013] The laser beam can be formed by overlapping and moving multiple light spots to form a beamline. The energy distribution curve of the beamline can include a first interval and a second interval. In the first interval, the energy gradually increases from the edge of the beamline toward the center. The second interval is located inside the first interval and exhibits constant energy.

[0014] In the bundle, the area of ​​the first interval may be smaller than the area of ​​the second interval.

[0015] In the beam, the overlap rate of the plurality of light spots can be 80% or more.

[0016] The spot of the laser beam can have a circular shape when viewed in a plan view.

[0017] The manufacturing apparatus for the display device may further include: a second optical system, wherein the laser beam passing through the first optical system enters the second optical system, and the second optical system controls the optical path of the laser beam.

[0018] The second optical system may include multiple mirrors and may scan the laser beam.

[0019] The manufacturing apparatus for the display device may further include: a third optical system, wherein the laser beam passing through the second optical system enters the third optical system, and wherein the third optical system controls the shape of the focal plane of the laser beam.

[0020] The focal plane of the laser beam passing through the third optical system can be a plane.

[0021] A method for manufacturing a display device according to an embodiment for solving the aforementioned technical problem includes the following steps: preparing a laser device including a beam shaper that controls the energy distribution curve of a laser beam, and a substrate to which a protective film including a film portion and an adhesive portion is attached; irradiating the substrate with the laser beam to remove the film portion and the adhesive portion; and peeling off a dummy area of ​​the protective film, wherein, at the protective film, a spot of the laser beam may have a ring shape when viewed in a plan view.

[0022] In the step of irradiating the substrate with the laser beam, a first irradiation surface may be arranged inside the protective film, with its focal point located on one side of the laser beam's direction of travel relative to the laser beam's focus.

[0023] On the first irradiated surface, the energy distribution curve of the laser beam may include a first peak that gradually increases from the edge toward the center and then decreases.

[0024] On the first irradiated surface, the energy distribution curve may have a minimum energy value at the center.

[0025] At the center, the energy of the laser beam can be 0.

[0026] On the first irradiated surface, the energy distribution curve also includes a second peak formed at the center of the laser beam.

[0027] Specific details of other embodiments are provided in the detailed description and accompanying drawings.

[0028] Based on the display device manufacturing apparatus and method according to one embodiment, a laser beam with a controlled energy distribution curve can be provided to an irradiation object. This prevents excessive energy from being applied to the object irradiated by the laser beam. Furthermore, when moving the laser beam and irradiating, uniform energy can be provided to the irradiation object by region. Therefore, when locally peeling off a protective film, the protective film can be stably removed using the laser beam.

[0029] According to one embodiment of a display device manufacturing apparatus and a display device manufacturing method, in order to partially peel off a protective film including a film portion and an adhesive portion, a laser beam can be irradiated onto a substrate to which the protective film is attached, thereby penetrating the protective film along its thickness direction. At this time, since the energy distribution curve of the laser beam is controlled, damage to the substrate disposed below the protective film can be prevented.

[0030] The effects of the embodiments are not limited to the descriptions above, and more diverse effects are included in this specification. Attached Figure Description

[0031] Figure 1 This is a plan view of a display panel according to one embodiment.

[0032] Figure 2 This is a plan view of the substrate to be peeled off according to one embodiment.

[0033] Figure 3 This is a partial cross-sectional view of the substrate to be peeled off according to one embodiment.

[0034] Figure 4 This is a schematic diagram of a manufacturing apparatus for a display device according to one embodiment.

[0035] Figure 5 This is a perspective view of an optical system included in a manufacturing apparatus for a display device according to an embodiment.

[0036] Figure 6 This is a schematic diagram showing a substrate to be peeled off by an irradiated laser beam.

[0037] Figure 7 It is shown in Figure 6 A diagram showing the planar shape of the laser beam spot on the first irradiated surface.

[0038] Figure 8 It is shown in Figure 6 The graph shows the energy distribution curves of the laser beam from the first irradiation surface to the third irradiation surface.

[0039] Figure 9 This is a plan view showing a portion of the substrate to be stripped if the laser beam is moved and the laser beam is irradiated.

[0040] Figure 10 It shows that it is aimed at Figure 6 The graph shows the cumulative energy distribution curve of the first irradiated surface by the laser beam.

[0041] Figure 11 It is along Figure 9 The cross-sectional view taken from XI-XI'.

[0042] Figure 12 This is a sequence diagram illustrating a method for manufacturing a display device according to an embodiment.

[0043] Figure 13 This is a perspective view showing the process of irradiating a laser beam onto a substrate to be peeled off.

[0044] Figure 14 This is a schematic cross-sectional view illustrating the process of irradiating a laser beam onto a substrate to be peeled off.

[0045] Figure 15 This is a three-dimensional diagram showing the process of peeling off a dummy area of ​​the protective film.

[0046] Figure 16 This is a diagram showing the planar shape of a laser beam spot according to another embodiment.

[0047] Figure 17 It shows along Figure 16 A graph of the energy distribution curves of the cross-sections taken from XVIIa-XVIIa' or XVIIb-XVIIb'.

[0048] Figure 18 This is a diagram showing the planar shape of a laser beam spot according to yet another embodiment.

[0049] Figure 19 It shows along Figure 18 A graph of the energy distribution curve of the cross section taken from XIXa-XIXa' or XIXb-XIXb'.

[0050] [Explanation of Labels in the Attached Image]

[0051] 1: Peeling off the target substrate DD: Manufacturing apparatus for display devices

[0052] LB: Laser beam; LM: Laser module

[0053] OS: Optical System; PF: Protective Film

[0054] FL: Membrane; AD: Adhesive

[0055] DPM: mother substrate SUB: base substrate Detailed Implementation

[0056] References and Appendix Figure 1 The advantages and features of the invention, as well as the methods for achieving them, will become clear from the detailed embodiments described below. However, the invention can take many different forms and is not limited to the embodiments disclosed below. These embodiments are provided only to make the disclosure of the invention complete and to fully inform those skilled in the art of the invention of its scope. The invention is defined only by the scope of the claims.

[0057] The reference to elements or layers being "on" other elements or layers includes situations where they are immediately above or adjacent to other elements, or where other layers or elements are sandwiched in between. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0058] Although terms such as "first" and "second" are used to describe multiple constituent elements, these constituent elements are clearly not limited to these terms. These terms are only used to distinguish one constituent element from another. Therefore, the "first constituent element" mentioned below can obviously also be a "second constituent element" within the technical concept of this invention.

[0059] The specific embodiments are described below with reference to the accompanying drawings.

[0060] Figure 1 This is a plan view of a display panel according to one embodiment. Figure 2 This is a plan view of the substrate to be peeled off according to one embodiment. Figure 3 This is a partial cross-sectional view of the substrate to be peeled off according to one embodiment.

[0061] Reference Figures 1 to 3The display panel 10 may be used in display devices that display video or still images. For example, the display panel 10 may be used not only in portable electronic devices such as mobile phones, smartphones, tablet personal computers, smartwatches, watchphones, mobile communication terminals, electronic notebooks, e-books, portable multimedia players (PMPs), navigators, and ultra-portable mobile PCs (UMPCs), but also in various display devices such as televisions, laptops, monitors, billboards, and Internet of Things (IoT) products for displaying screens.

[0062] According to one embodiment, the display panel 10 may be any one of an organic light-emitting display device, a liquid crystal display device, a plasma display device, a field emission display device, an electrophoretic display device, an electrowetting display device, a quantum dot light-emitting display device, and a micro LED display device.

[0063] In the plan view, the display panel 10 may have a rectangular shape, which may have a first side in a first direction X and a second side in a second direction Y. Although in Figure 1 This illustrates a case where the length of the first side in the first direction X is greater than the length of the second side in the second direction Y, but it is not limited to this. The length of the first side may be the same as the length of the second side, or it may be shorter than the length of the second side. The angle where the first side in the first direction X intersects with the second side in the second direction Y may be formed as an arc with a predetermined curvature, but it is not limited to this; it may be formed as a right angle.

[0064] Display panel 10 may include a display area DA and a non-display area NDA surrounding the display area DA. The display area DA may be located at the center of the display panel 10 and may occupy most of the area of ​​the display panel 10. Although not shown, the display area DA may have multiple scan lines (not shown), multiple data lines (not shown), and multiple pixels (not shown). Each pixel (not shown) may be connected to the scan lines (not shown) and the data lines (not shown) to receive a data voltage from the data lines (not shown) according to a scan signal applied to the scan lines (not shown). Each pixel (not shown) may include a light-emitting element that emits light through the data voltage.

[0065] The non-display area NDA can be arranged to surround the display area DA. In the display panel 10, the area of ​​the non-display area NDA located on the other side of the second direction Y of the display area DA can be larger than the area of ​​the non-display area NDA located on the second direction Y side, the first direction X side, and the other side of the display area DA, but is not limited thereto.

[0066] Multiple pads can be arranged in the non-display area NDA, located on the other side of the second direction Y of the display area DA. These multiple pads can be arranged along the first direction X. Flexible films (COF films) with drive circuitry mounted on them can be incorporated into the multiple pads, thereby enabling the transmission of drive signals to the pixels.

[0067] The display panel 10 can be formed by cutting a substrate 1 along the substrate cutting line SCL in units of cells to form multiple scan lines (not shown), multiple data lines (not shown), and multiple pixels (not shown). The substrate 1 can include: a cell region CA located inside the substrate with reference to the substrate cutting line SCL; and a cell outer region NCA arranged around the cell region CA.

[0068] Each unit region CA of the substrate 1 can be formed into a display panel 10 through subsequent processes. That is, a display area DA and a non-display area NDA can be formed in each unit region CA. Although in Figure 2 The substrate 1 to be peeled is shown to include a total of 9 unit regions CA (three rows along the first direction X and three columns along the second direction Y), but the number of unit regions CA included in the substrate 1 to be peeled is not limited to this.

[0069] The substrate 1 to be peeled off may include: a mother substrate DPM; and a protective film PF attached to the mother substrate DPM. The mother substrate DPM can be formed into the aforementioned display panel 10 by a cutting process, and may include: a base substrate SUB; a display layer DISL disposed on the base substrate SUB; and a pad PAD disposed on the base substrate SUB. Detailed descriptions of each component constituting the mother substrate DPM will be provided later.

[0070] The protective film PF serves to protect one surface of the mother substrate DPM to which the protective film PF is attached during the manufacturing process. The protective film PF may include: a film portion FL; and an adhesive portion AD disposed on the film portion FL. The film portion FL substantially protects the upper surface of the mother substrate DPM, and the adhesive portion AD allows the film portion FL and the mother substrate DPM to adhere to each other.

[0071] The membrane portion FL may include a membrane made of a transparent material. For example, the membrane portion FL may include at least one selected from the group consisting of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polycarbonate (PC), polymethyl methacrylate (PMMA), polystyrene (PS), polyvinyl chloride (PVC), polyethersulfone (PES), polyethylene (PE), polypropylene (PP), polyimide (PI), and combinations thereof, but is not limited thereto.

[0072] The substrate 1 to be stripped may include: a base substrate SUB, including a display area DA and a non-display area NDA; a display layer DISL disposed on the display area DA of the base substrate SUB; and a plurality of pads PAD disposed on the non-display area NDA of the base substrate SUB.

[0073] A display layer (DISL) may include: a thin-film transistor layer (TFTL); an emissive layer (EML) disposed on the TFTL; and a packaging layer (TFEL) disposed to cover the TFTL and the EML. A gap (GP) may be formed in a display layer adjacent to another display layer (DISL). A pad (PAD) may be disposed overlapping the gap (GP).

[0074] The protective film PF can be arranged to completely overlap with the substrate SUB to protect the mother substrate DPM, but is not limited thereto; the protective film PF can also partially overlap with the substrate SUB. The protective film PF can be in direct contact with the encapsulation layer TFEL disposed on the display area DA of the target substrate 1, but can be arranged to be spaced apart from the pad PAD disposed on the non-display area NDA. At least one surface of the protective film PF can include a flat surface.

[0075] The protective film PF may include: an effective area PFA, arranged on the inner side with reference to the film cutting line FCL; and a dummy area PFD, arranged on the outer side with reference to the film cutting line FCL. The film cutting line FCL may be irradiated by a laser beam LB emitted from the manufacturing apparatus DD of the display device, described later.

[0076] If a laser beam LB is irradiated onto a protective film PF along the film cutting line FCL from the manufacturing apparatus DD of a display device according to an embodiment, a portion of the protective film PF can be removed and cut. The cutting process of the protective film PF can be performed with the substrate 1 to be peeled off arranged on the STG stage. After a portion of the protective film PF is removed and cut, the dummy area PFD of the protective film PF can be peeled off. After the dummy area PFD is peeled off, after a manufacturing process such as image quality inspection, the display panel 10 can then be formed by cutting along the substrate cutting line SCL.

[0077] That is, the manufacturing apparatus DD of the display device described below can be a laser device that irradiates a laser beam LB for peeling a dummy area PFD of the protective film PF from the substrate 1.

[0078] Figure 4 This is a schematic diagram of a manufacturing apparatus for a display device according to one embodiment. Figure 5 This is a perspective view of an optical system included in a manufacturing apparatus for a display device according to an embodiment.

[0079] Reference Figure 4 and Figure 5 According to one embodiment, a manufacturing apparatus DD for a display device may include: a laser module LM that outputs a laser beam LB; and an optical system OS disposed on one side of the laser module LM and controlling the optical path and energy distribution curve of the laser beam LB. That is, as a device for irradiating the laser beam LB, in the manufacturing apparatus DD for a display device according to one embodiment, the laser beam LB emitted from the laser module LM can be emitted to the outside through the optical system OS.

[0080] The laser module LM can output a laser beam LB. The laser beam LB can propagate in a straight line. The laser beam LB can form a beam spot on the irradiated surface. The energy distribution curve of the laser beam LB output from the laser module LM can have a Gaussian distribution with high energy at the center.

[0081] Laser modules (LMs) can use excimer lasers, YAG lasers, glass lasers, YVO4 lasers, Ar lasers, ruby ​​lasers, etc., but are not limited to these.

[0082] The laser beam LB output from the laser module LM can enter the optical system OS. The optical system OS can control the optical path and energy distribution curve of the laser beam LB provided by the laser module LM and direct it towards the object being irradiated.

[0083] The optical system OS may include: a first optical system OS1, which controls the energy distribution curve of the laser beam LB; a second optical system OS2, which controls the optical path of the laser beam LB; and a third optical system OS3, which controls the shape of the focal plane of the laser beam LB. Although Figure 4 and Figure 5 The diagram shows a configuration in which the laser beam LB output from the laser module LM passes sequentially through the first optical system to the third optical system OS1, OS2, OS3, but the arrangement order of the first optical system to the third optical system OS1, OS2, OS3 is not limited to this.

[0084] The laser beam LB output from the laser module LM can form a Gaussian energy distribution curve with high energy at the center. The first optical system OS1 can control the energy distribution curve of the laser beam LB. The laser beam LB passing through the first optical system OS1 can have various energy distribution curve shapes. For example, the laser beam LB passing through the first optical system OS1 can have a flat-top shape energy distribution curve including a region of constant energy, or it can have an M-shaped energy distribution curve where the energy gradually increases from the edge towards the center and then decreases. A detailed explanation of the energy distribution curve of the laser beam LB will be given later.

[0085] The first optical system OS1 is a beam shaper and may include at least one optical element. For example, the first optical system OS1 may include a lens or mirror constructed using at least one of a convex lens, a concave lens, a convex mirror, and a concave mirror, or a combination thereof. For example, the first optical system OS1 may include a composite lens that combines a convex lens and a concave lens in one lens.

[0086] In one embodiment, the laser beam LB passing through the first optical system OS1 can enter the second optical system OS2. The second optical system OS2 can control the optical path of the laser beam LB. In one embodiment, the second optical system OS2 may include a first mirror MR1 and a second mirror MR2. For example, the first mirror MR1 and the second mirror MR2 can change the optical path of the laser beam LB to a first direction X and a second direction Y.

[0087] The second optical system OS2 can be a laser scanner that scans the laser beam LB along a first direction X and a second direction Y. For example, the first mirror MR1 can move the laser beam LB along the first direction X, and the second mirror MR2 can move the laser beam LB along the second direction Y.

[0088] The laser beam LB passing through the second optical system OS2 can enter the third optical system OS3. The third optical system OS3 can control the shape of the focal plane that serves as the focal point of the laser beam LB. The third optical system OS3 may include a flat-field focusing (F-Theta) lens. For example, the focal plane of the laser beam LB passing through the third optical system OS3 may be flat, but is not limited to this; it may be a spherical surface with curvature.

[0089] The following describes the irradiation of a laser beam LB by a display device manufacturing apparatus DD according to an embodiment.

[0090] Figure 6 This is a schematic diagram showing a substrate to be peeled off by an irradiated laser beam. Figure 7 It is shown in Figure 6 A diagram showing the planar shape of the laser beam spot on the first irradiated surface. Figure 8 It is shown in Figure 6 The graph shows the energy distribution curves of the laser beam from the first irradiation surface to the third irradiation surface.

[0091] Reference Figures 6 to 8 A laser beam LB can be irradiated from a manufacturing apparatus DD of a display device according to an embodiment onto a substrate SUB to which a protective film PF is attached. Specifically, the laser beam LB can be irradiated onto the protective film PF attached to the substrate SUB.

[0092] The laser beam LB can irradiate the protective film PF to locally remove and cut the protective film PF. Specifically, the laser beam LB can cut the film portion FL and the adhesive portion AD in the area irradiated by the laser beam LB.

[0093] The protective film PF of the laser beam LB can be located further away from the manufacturing apparatus DD of the display device than the focal point FC of the laser beam LB. That is, the focal point FC of the laser beam LB can be located between the manufacturing apparatus DD of the display device and the protective film PF.

[0094] The protective film PF of the irradiated laser beam LB can be located at a first distance d1 from the focal point FC in the direction of travel of the laser beam LB. A virtual surface perpendicular to the direction of travel of the laser beam LB and located at a first distance d1 from the focal point FC can be defined as the first irradiation surface PL1. The first irradiation surface PL1 can be flat. When the distance between the optical system OS and the protective film PF is 75 mm, the first distance d1 can be approximately 4.7 mm to 5.3 mm, but is not limited to this.

[0095] At the location of the first irradiation surface PL1, the laser beam LB can have the following characteristics: Figure 7 The circular beam spot LBS is shown. Figure 7 In the diagram, brighter areas indicate relatively low-energy regions, while darker areas indicate relatively high-energy regions. The energy at the center of the beam spot LBS can be 0. Therefore, the beam spot LBS can have a ring shape when viewed from a planar perspective. The energy distribution curve of the beam spot LBS, formed by a virtual straight line passing through the midpoint CP of the beam spot LBS, can be shown as follows: Figure 8 The first curve G1 is formed as shown.

[0096] observe Figure 8 As can be seen from the first curve G1, the beam spot LBS at the first irradiation surface PL1 can exhibit the following energy distribution curve: the energy gradually increases from the edge toward the center, has the maximum energy value at the first energy E1 and forms a peak, and its energy gradually decreases again toward the center.

[0097] The width of the laser beam LB can be defined as the distance between the outermost peaks of the energy distribution curve of the beam spot LBS at the midpoint CP at the corresponding irradiation surface. On the first irradiation surface PL1, the width of the laser beam LB can form the first beam width LW1.

[0098] Although Figure 6 The illustration shows a scenario where the first irradiation surface PL1 is arranged inside the membrane portion FL, but it is not limited to this. The first irradiation surface PL1 can be located at the boundary between the membrane portion FL and the adhesive portion AD, or inside the adhesive portion AD. That is, the first irradiation surface PL1 can be located at any position inside the protective film PF.

[0099] A virtual surface perpendicular to the travel direction of the laser beam LB and located at a second distance d2 less than the first distance d1 from the focal point FC of the laser beam LB can be defined as the second irradiation surface PL2. On the second irradiation surface PL2, the energy distribution curve of the laser beam LB can be as follows: Figure 8 The second curve G2 is formed as shown.

[0100] observe Figure 8 As shown in the second curve G2, the energy of the laser beam LB at the second irradiation surface PL2 can exhibit a distribution curve where it gradually increases from the edge towards the center, then remains constant, and then increases again. The laser beam LB at the second irradiation surface PL2 can also exhibit an energy distribution curve where it has a maximum energy value (the second energy E2) at the center, forming a peak, and its energy gradually decreases towards the edge. The second energy E2 can be greater than the first energy E1. In the second irradiation surface PL2, the width of the laser beam LB can form a second beam width LW2. The second beam width LW2 can be smaller than the first beam width LW1, but is not limited to this.

[0101] A virtual surface perpendicular to the travel direction of the laser beam LB and located at a third distance d3, greater than the first distance d1, from the focal point FC of the laser beam LB, can be defined as the third irradiation surface PL3. The third irradiation surface PL3 can be located below the substrate SUB. Since most of the energy of the laser beam LB is absorbed by the protective film PF forming the first irradiation surface PL1, the energy of the laser beam LB at the third irradiation surface PL3 can have a very low value. The energy distribution curve of the laser beam LB at the third irradiation surface PL3 can be as follows: Figure 8The third curve, G3, is formed as shown.

[0102] observe Figure 8 As shown in the third curve G3, the energy of the laser beam LB at the third irradiation surface PL3 can have a roughly constant distribution curve from the edge towards the center. The laser beam LB at the third irradiation surface PL3 can have a roughly third energy E3. As mentioned above, since most of the energy of the laser beam LB is absorbed by the protective film PF, the third energy E3 can have a value that is less than the first energy E1 and the second energy E2.

[0103] On the third irradiation surface PL3, the width of the laser beam LB can form a third beam width LW3. The third beam width LW3 can be greater than the first beam width LW1, but is not limited to this.

[0104] Figure 9 This is a plan view showing a portion of the substrate to be stripped if the laser beam is moved and the laser beam is irradiated. Figure 10 It shows that it is aimed at Figure 6 The graph shows the cumulative energy distribution curve of the first irradiated surface by the laser beam. Figure 11 It is along Figure 9 The cross-sectional view taken from XI-XI'.

[0105] Reference Figures 9 to 11 When the laser beam LB moves along the predetermined laser movement direction LDR on the protective film PF, the laser beam LB can form a laser beamline LBL. The laser beamline LBL can be formed by locally removing the protective film PF using the laser beam LB. Specifically, as... Figure 11 As shown, the film portion FL and the adhesive portion AD, which are arranged in the region overlapping with the laser beam LB, can be removed.

[0106] Figure 9 The laser beamline LBL can be formed by the overlap and movement of the beam spot LBS of the laser beam LB formed on the first irradiation surface PL1. As the laser beam LB moves, the overlap rate between the previous beam spot LBS and the next beam spot LBS can be approximately 80% or more, but is not limited to this. If the beam spot LBS overlaps and moves along the laser movement direction LDR, the energy supplied to the protective film PF through the laser beam LB can accumulate.

[0107] The cumulative energy distribution curve exhibited when the beam spots LBS formed on the first irradiation surface PL1 overlap and move can be as follows: Figure 10 The graph is presented as shown. That is, if it has Figure 8 The first curve, G1, shows the beam spot LBS overlapping and shifting, which can present a pattern similar to... Figure 10 The cumulative energy distribution curve of the graph.

[0108] Figure 10 The cumulative energy distribution curve can be represented by the energy distribution curve of a cross-section taken along the direction perpendicular to the laser movement direction LDR of the laser beamline LBL. The cumulative energy distribution curve of the laser beamline LBL can show a gradual increase from the edge towards the center in the direction perpendicular to the laser movement direction LDR, and then a roughly constant value. Figure 10 The distribution curve of “ET”.

[0109] Specifically, in a laser beamline (LBL), the energy distribution curve can include the following intervals: a first interval where the energy gradually increases from the edge of the beamline towards the center; and a second interval located inside the first interval and exhibiting constant energy. In the laser beamline (LBL), the area of ​​the first interval can be smaller than the area of ​​the second interval.

[0110] If the first irradiation surface PL1 is moved while being located inside the protective film PF and irradiated with the laser beam LB, the cumulative energy received by the region of the protective film PF irradiated with the laser beam LB can be approximately constant by region.

[0111] If a laser beam LB is irradiated onto the protective film PF to form a first irradiated surface PL1 of the laser beam LB, the protective film PF can be partially removed to form a cutting groove CH. The cutting groove CH can be formed by partially removing the film portion FL and the adhesive portion AD of the protective film PF. Although the cross-section of the cutting groove CH can have a downwardly convex parabolic shape, it is not limited to this. As described above, since the laser beam LB moves with the accumulation of beam spots LBS, the energy of the laser beam LB at the protective film PF can be provided to a region wider than the LBS regions of each beam spot. Therefore, the groove width HW, which is the width of the upper end of the cutting groove CH, can be greater than the first beam width LW1.

[0112] In the region where the cutting groove CH is formed, by appropriately adjusting the irradiation time of the laser beam LB, the film portion FL and the adhesive portion AD can be removed by the laser beam LB and penetrated along the thickness direction. Therefore, in the subsequent peeling process of the dummy region PFD of the protective film PF, the protective film PF can be easily peeled off even without additionally removing the adhesive portion AD that overlaps with the cutting groove CH.

[0113] The laser beam LB can be irradiated onto the protective film PF until the adhesive portion AD is partially removed and penetrated. However, even after the adhesive portion AD is penetrated, the substrate SUB is directly irradiated with the laser beam LB, because the energy distribution curve of the laser beam LB is shaped using the first optical system OS1. Figure 8The first curve G1 is formed as shown, so the energy applied to the substrate SUB can be small. Therefore, the substrate SUB disposed below the protective film PF can remain undamaged.

[0114] According to one embodiment, the manufacturing apparatus DD of a display device can control the energy distribution curve of the laser beam LB by including a first optical system OS1. Accordingly, when irradiating the laser beam LB, excessive energy can be prevented from being applied to the irradiated object. Furthermore, when moving and irradiating the laser beam LB, uniform energy can be provided to the irradiated object by region.

[0115] Furthermore, when a laser beam LB is irradiated onto a substrate SUB to which the protective film PF, including the film portion FL and the adhesive portion AD, is attached for partial peeling of the protective film PF, the manufacturing apparatus DD of the display device according to one embodiment can irradiate in such a way that the first irradiation surface PL1 of the laser beam LB is located inside the protective film PF, so that the film portion FL and the adhesive portion AD can be penetrated along the thickness direction. At this time, the energy distribution curve of the laser beam LB can be controlled, thereby preventing damage to the substrate SUB located on the lower part of the protective film PF.

[0116] Hereinafter, a method for manufacturing a display device according to an embodiment will be described using the display device manufacturing apparatus DD described above.

[0117] Figure 12 This is a sequence diagram illustrating a method for manufacturing a display device according to an embodiment. Figure 13 This is a perspective view showing the process of irradiating a laser beam onto a substrate to be peeled off. Figure 14 This is a schematic cross-sectional view illustrating the process of irradiating a laser beam onto a substrate to be peeled off. Figure 15 This is a three-dimensional diagram showing the process of peeling off a dummy area of ​​the protective film.

[0118] Reference Figure 12 A method for manufacturing a display device according to one embodiment may include the following steps: preparing a laser device including a beam shaper and a substrate to which a protective film including a film portion and an adhesive portion is attached (S11); irradiating the substrate with a laser beam along a cutting line and removing the film portion and the adhesive portion (S21); and peeling off a dummy area of ​​the protective film (S31).

[0119] In step (S11), which involves preparing a laser device including a beam shaper and a substrate to which a protective film including a film portion and an adhesive portion is attached, the laser device may be, as described above... Figure 4 and Figure 5 The manufacturing apparatus DD for a display device according to an embodiment described above may include a substrate that can be referred to in the preceding text. Figure 2 and Figure 3The described mother substrate DPM has the aforementioned protective film PF affixed to it. Therefore, additional descriptions of the laser device and the substrate used in this step are omitted.

[0120] Reference Figures 12 to 14 After preparing the laser device including the beam shaper and the substrate with the protective film including the film and the adhesive part attached (S11), the step of irradiating the substrate with the laser beam along the cutting line and removing the film and the adhesive part can be performed (S21).

[0121] According to one embodiment, the manufacturing apparatus DD of a display device can irradiate a laser beam LB onto a protective film PF. The laser beam LB can irradiate along the film cutting line FCL. The process of locally removing the film portion FL and the adhesive portion AD using the laser beam LB can be a cutting process of the protective film PF. Specifically, if the laser beam LB is irradiated along the film cutting line FCL, the film portion FL and the adhesive portion AD can be locally removed to form a cutting groove CH. The cutting groove CH may not overlap with the display layer DISL, but may overlap with the gap GP arranged between the display layers DISL. The cutting groove CH may have a closed curve shape, and the interior of the cutting groove CH can be the effective area PFA of the protective film PF, and the exterior can be the dummy area PFD.

[0122] In this step, the irradiation time of the laser beam LB can be appropriately adjusted and the protective film PF can be cut by removing the film portion FL and the adhesive portion AD using the manufacturing apparatus DD of the display device according to one embodiment.

[0123] As mentioned above Figure 4 and Figure 5 According to one embodiment, the manufacturing apparatus DD for the display device may include a first optical system OS1, and the first irradiation surface PL1 of the laser beam LB may be located inside the protective film PF. Therefore, the energy distribution curve of the laser beam LB at the protective film PF can be as follows: Figure 8 The first curve G1 is formed as shown.

[0124] In one embodiment, the laser beam LB can irradiate the protective film PF until the adhesive portion AD is penetrated along the thickness direction. After the adhesive portion AD is penetrated along the thickness direction, the laser beam LB can also irradiate the protective film PF for a predetermined time period. As described above, the laser beam LB can form a protective film PF with a first irradiation surface PL1, such as... Figure 8 The first curve G1 shows the energy distribution curve, so that in this case, the substrate SUB can be protected without damage.

[0125] Reference Figure 12 and Figure 15After step (S21) of irradiating the substrate with a laser beam along the cutting line and removing the film and adhesive portion, step (S31) of peeling off the dummy area of ​​the protective film can be performed.

[0126] If a closed-curve groove CH is formed by irradiating a laser beam LB, the protective film PF can be separated into an effective region PFA inside the groove CH and a dummy region PFD outside the groove CH. Then, if the dummy region PFD is peeled off, only the effective region PFA of the protective film PF can remain on the substrate SUB.

[0127] According to one embodiment of the display device manufacturing method, when the display device manufacturing apparatus DD, equipped with a first optical system OS1 that controls the energy distribution curve of the laser beam LB, irradiates the laser beam LB, excessive energy can be prevented from being applied to the irradiated object. Furthermore, when moving and irradiating the laser beam LB, uniform energy can be provided to the irradiated object along the area of ​​the line of the irradiated laser beam LB. Accordingly, the protective film PF can be removed stably.

[0128] When a laser beam LB is irradiated onto a substrate SUB to which the protective film PF, including the film portion FL and the adhesive portion AD, is attached for partial peeling of the protective film PF, according to a method for manufacturing a display device according to one embodiment, the irradiation is performed such that the first irradiation surface PL1 of the laser beam LB is located inside the protective film PF, thereby penetrating the film portion FL and the adhesive portion AD along the thickness direction. In this case, the energy of the laser beam LB can be controlled to prevent damage to the substrate SUB disposed at the lower part of the protective film PF.

[0129] Hereinafter, another embodiment of the manufacturing apparatus DD for the display device will be described. In the following description of the manufacturing apparatus DD for the display device according to another embodiment, repeated descriptions of the manufacturing apparatus DD for the display device according to one embodiment will be omitted, and the description will focus on the differences.

[0130] The difference between the manufacturing apparatus DD for the display device according to another embodiment and the manufacturing apparatus DD for the display device according to one embodiment is that the beam spot LBS of the laser beam LB forms an energy distribution curve of a different shape. The following description will focus primarily on the shape of the beam spot LBS and the energy distribution curve.

[0131] Figure 16 This is a diagram showing the planar shape of a laser beam spot according to another embodiment. Figure 17 It shows along Figure 16 A graph of the energy distribution curves of the cross-sections taken from XVIIa-XVIIa' or XVIIb-XVIIb'.

[0132] Reference Figure 16 and Figure 17 The manufacturing apparatus DD of the display device according to this embodiment can form an energy distribution curve with a different shape than the beam spot LBS according to one embodiment. Although the beam spot LBS_1 according to this embodiment is the same as that of one embodiment in having a circular shape and the energy gradually increasing from the edge to the center and then decreasing, it differs from the beam spot LBS according to one embodiment in having a constant energy at the center of the beam spot LBS_1.

[0133] Specifically, according to this embodiment, the energy of the beam spot LBS_1 can gradually increase from the edge toward the center, thereby forming a first peak PK1_1 with a first energy E1_1 as the maximum value on the energy distribution curve. Thereafter, its energy gradually decreases toward the center, thereby forming a first minimum point VL1_1 with a second energy E2_1 as the minimum value on the energy distribution curve at the center.

[0134] The manufacturing apparatus DD of the display device according to this embodiment can control the energy distribution curve of the laser beam LB by including the first optical system OS1. Accordingly, when irradiating the laser beam LB, excessive energy can be prevented from being applied to the irradiated object. Furthermore, when moving and irradiating the laser beam LB, uniform energy can be provided to the irradiated object according to the area.

[0135] When a laser beam LB is irradiated onto a substrate SUB to which the protective film PF, including the film portion FL and the adhesive portion AD, is attached for partial peeling of the protective film PF, the manufacturing apparatus DD of the display device according to this embodiment can irradiate the film PF with the first irradiation surface PL1 of the laser beam LB located inside the protective film PF, thereby penetrating the film portion FL and the adhesive portion AD along the thickness direction. At this time, the energy of the laser beam LB can be controlled to prevent damage to the substrate SUB disposed on the lower part of the protective film PF.

[0136] Furthermore, the manufacturing apparatus DD of the display device according to this embodiment has a predetermined energy at the center of the beam spot LBS_1 to form a valley on the energy distribution curve. Therefore, when the size of the beam spot LBS_1 becomes larger, when moving and irradiating the laser beam LB, the energy supplied to the center of the line of the irradiated laser beam LB can be increased, thereby providing uniform energy along the area of ​​the line of the irradiated laser beam LB.

[0137] Figure 18 This is a diagram showing the planar shape of a laser beam spot according to yet another embodiment. Figure 19 It shows along Figure 18 A graph of the energy distribution curve of the cross section taken from XIXa-XIXa' or XIXb-XIXb'.

[0138] Reference Figure 18 and Figure 19 The manufacturing apparatus DD of the display device according to this embodiment can form an energy distribution curve with a different shape than the beam spot LBS according to one embodiment. Although the beam spot LBS_2 according to this embodiment is the same as that of one embodiment in having a circular shape, it differs from the beam spot LBS according to one embodiment in that the energy increases from the edge of the beam spot LBS_2 toward the center, gradually decreases, and then increases again.

[0139] Specifically, according to this embodiment, the energy of the beam spot LBS_2 gradually increases from the edge towards the center, thereby forming a first peak PK1_2 with a first energy E1_2 as its maximum value on the energy distribution curve. Thereafter, its energy gradually decreases towards the center, thereby forming a first minimum point VL1_2 with a second energy E2_2 as its minimum value. Subsequently, its energy gradually increases again towards the center, thereby forming a second peak PK2_2 with a third energy E3_2 as its minimum value at the center of the energy distribution curve. The third energy E3_2 at the center can be less than the first energy E1_2.

[0140] The manufacturing apparatus DD of the display device according to this embodiment can control the energy distribution curve of the laser beam LB by including the first optical system OS1. Accordingly, when irradiating the laser beam LB, excessive energy can be prevented from being applied to the irradiated object. Furthermore, when moving and irradiating the laser beam LB, uniform energy can be provided to the irradiated object according to the area.

[0141] When a laser beam LB is irradiated onto a substrate SUB to which the protective film PF, including the film portion FL and the adhesive portion AD, is attached for partial peeling of the protective film PF, the manufacturing apparatus DD of the display device according to this embodiment can irradiate the film PF with the first irradiation surface PL1 of the laser beam LB located inside the protective film PF, thereby penetrating the film portion FL and the adhesive portion AD along the thickness direction. At this time, the energy of the laser beam LB can be controlled to prevent damage to the substrate SUB disposed on the lower part of the protective film PF.

[0142] Furthermore, the manufacturing apparatus DD of the display device according to this embodiment can form a predetermined energy with a maximum value on the energy distribution curve at the center of the beam spot LBS_2. Thus, when the size of the beam spot LBS_2 increases, when moving and irradiating the laser beam LB, the energy supplied to the center of the line of the irradiated laser beam LB can be increased, thereby providing uniform energy according to the area of ​​the irradiated laser beam LB.

[0143] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, it will be understood by those skilled in the art that the invention can be implemented in other specific forms without altering its technical concept or essential features. Therefore, the embodiments described above should be understood as exemplary in all respects, and not limiting.

Claims

1. An apparatus for manufacturing a display device, comprising: The laser module emits a laser beam; as well as A first optical system is arranged on one side of the laser module, and the laser beam enters the first optical system. The first optical system controls the energy distribution curve of the laser beam. On a first irradiation surface located on one side of the laser beam's direction of travel relative to the focal point of the laser beam, the energy distribution curve of the laser beam includes a first peak that gradually increases towards the center and then decreases. On a second irradiation surface located between the focal point of the laser beam and the first irradiation surface and parallel to the first irradiation surface, the energy distribution curve of the laser beam gradually increases from the edge toward the center, then remains constant, and then increases again, thereby including a second peak formed at the center.

2. The manufacturing apparatus for the display device as claimed in claim 1, wherein, On the first irradiated surface, the energy distribution curve has a minimum energy value at its center. The energy value of the second peak is greater than that of the first peak.

3. The manufacturing apparatus for the display device as claimed in claim 2, wherein, At the center, the energy of the laser beam is 0.

4. An apparatus for manufacturing a display device, comprising: The laser module emits a laser beam; as well as A first optical system is arranged on one side of the laser module, and the laser beam enters the first optical system. The first optical system controls the energy distribution curve of the laser beam. On a first irradiation surface located on one side of the laser beam's direction of travel relative to the focal point of the laser beam, the energy distribution curve of the laser beam includes a first peak that gradually increases towards the center and then decreases. On the first irradiated surface, the energy distribution curve also includes a second peak formed at the center of the laser beam.

5. The manufacturing apparatus for the display device as claimed in claim 4, wherein, The energy at the second peak is less than the energy at the first peak.

6. The manufacturing apparatus for the display device as claimed in claim 1 or 4, wherein, The first irradiation surface is perpendicular to the direction of travel of the laser beam.

7. The manufacturing apparatus for the display device as claimed in claim 1 or 4, wherein, The laser beam forms a beamline by overlapping and moving multiple light spots. The energy distribution curve of the beam includes a first interval and a second interval. In the first interval, the energy gradually increases from the edge of the beam toward the center. The second interval is located inside the first interval and exhibits constant energy.

8. The manufacturing apparatus for the display device as claimed in claim 7, wherein, In the bundle, the area of ​​the first interval is smaller than the area of ​​the second interval.

9. The manufacturing apparatus for the display device as claimed in claim 7, wherein, In the beam, the overlap rate of the plurality of light spots is more than 80%.

10. The manufacturing apparatus for the display device as claimed in claim 7, wherein, The laser beam spot has a circular shape when viewed in a plan view.

11. The manufacturing apparatus for a display device as claimed in claim 1 or 4, wherein, Also includes: The laser beam from the first optical system enters the second optical system. The second optical system controls the optical path of the laser beam.

12. The manufacturing apparatus for a display device as claimed in claim 11, wherein, The second optical system includes multiple mirrors. The second optical system scans the laser beam.

13. The manufacturing apparatus for the display device as claimed in claim 11, wherein, Also includes: The laser beam from the second optical system enters the third optical system. The third optical system controls the shape of the focal plane of the laser beam.

14. The manufacturing apparatus for a display device as claimed in claim 13, wherein, The focal plane of the laser beam passing through the third optical system is a plane.

15. A method for manufacturing a display device, comprising the following steps: Prepare a laser device including a beam shaper that controls the energy distribution curve of the laser beam and a substrate with a protective film including a film portion and an adhesive portion. The film portion and the adhesive portion are removed by irradiating the substrate with the laser beam; and Peel off the dummy area of ​​the protective film. in, At the protective film, one spot of the laser beam has a ring shape when viewed in a plan view. In the step of irradiating the substrate with the laser beam, a first irradiation surface is arranged inside the protective film, with its focal point located on one side of the laser beam's direction of travel relative to the laser beam's focus. On the first irradiated surface, the energy distribution curve of the laser beam includes a first peak that gradually increases from the edge towards the center and then decreases. On a second irradiation surface located between the focal point of the laser beam and the first irradiation surface and parallel to the first irradiation surface, the energy distribution curve of the laser beam gradually increases from the edge toward the center, then remains constant, and then increases again, thereby including a second peak formed at the center.

16. The method of manufacturing a display device as claimed in claim 15, wherein, The energy value of the second peak is greater than that of the first peak.

17. The method of manufacturing a display device as claimed in claim 15, wherein, On the first irradiated surface, the energy distribution curve has a minimum energy value at the center.

18. The method of manufacturing a display device as claimed in claim 17, wherein, At the center, the energy of the laser beam is 0.

19. A method for manufacturing a display device, comprising the following steps: Prepare a laser device including a beam shaper that controls the energy distribution curve of the laser beam and a substrate with a protective film including a film portion and an adhesive portion. The film portion and the adhesive portion are removed by irradiating the substrate with the laser beam; and Peel off the dummy area of ​​the protective film. in, At the protective film, one spot of the laser beam has a ring shape when viewed in a plan view. In the step of irradiating the substrate with the laser beam, a first irradiation surface is arranged inside the protective film, with its focal point located on one side of the laser beam's direction of travel relative to the laser beam's focus. On the first irradiated surface, the energy distribution curve of the laser beam includes a first peak that gradually increases towards the center and then decreases. On the first irradiated surface, the energy distribution curve also includes a second peak formed at the center of the laser beam.

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