Power transmission device and semiconductor manufacturing apparatus

Abstract

The application discloses a power transmission device and a semiconductor manufacturing equipment, the power transmission device comprises a supporting body, a rotating shaft, a magnetic fluid, a bearing assembly and a gasket sealing assembly, the supporting body is installed at an opening of a vacuum reaction chamber communicated with an atmospheric environment, an axle hole is arranged in the supporting body; the rotating shaft extends into the vacuum reaction chamber through the axle hole; the magnetic fluid is arranged between the rotating shaft and the inner wall of the axle hole; the bearing assembly is sleeved on the rotating shaft, the bearing assembly comprises at least one vacuum side bearing, and the vacuum side bearing is located on the side of the magnetic fluid close to the vacuum reaction chamber; and the gasket sealing assembly is attached to the side of the vacuum side bearing facing the vacuum reaction chamber. In the power transmission device, the gasket sealing assembly is attached to the side of the vacuum side bearing facing the vacuum reaction chamber, so that the reaction gas in the vacuum reaction chamber is prevented from polluting the vacuum side bearing and the magnetic fluid, and the service life of the vacuum side bearing and the magnetic fluid is prolonged.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a power transmission device and a semiconductor manufacturing equipment. BACKGROUND

[0002] The background art provided in this part is only background information related to the present disclosure, which does not necessarily have to be prior art.

[0003] The power transmission device includes a power transmission device for transmitting rotary power between atmospheric pressure and vacuum, and the power transmission device generally includes a fixed housing and a rotary shaft, a bearing is arranged between the rotary shaft and the housing for supporting the rotary shaft, and a magnetic fluid is arranged for blocking the vacuum and the atmospheric pressure.

[0004] During the use of the power transmission device, the bearing exposed to the vacuum reaction chamber in the semiconductor manufacturing process will be attached and even corroded by various gases and some reaction residues in the semiconductor manufacturing process, thereby causing the lubricant in the bearing to deteriorate or harden, affecting the rotation of the rotary shaft; and if the bearing fails, the gas in the vacuum reaction chamber is easy to contact the magnetic fluid, causing the temperature of the magnetic fluid to rise, and even causing the magnetic fluid to leak. SUMMARY

[0005] The first aspect of the present application provides a power transmission device, which comprises:

[0006] a support body, which is installed at an opening of a vacuum reaction chamber communicating with an atmospheric environment, and an axle hole is arranged in the support body;

[0007] a rotary shaft, which extends into the vacuum reaction chamber through the axle hole;

[0008] a magnetic fluid, which is arranged between the rotary shaft and the inner wall of the axle hole;

[0009] a bearing assembly, which is sleeved on the rotary shaft, and the bearing assembly comprises at least one vacuum side bearing, which is located on the side of the magnetic fluid close to the vacuum reaction chamber;

[0010] a gasket sealing assembly, which is arranged on the side of the vacuum side bearing facing the vacuum reaction chamber.

[0011] The second aspect of the present application provides a semiconductor manufacturing equipment, which comprises the power transmission device as described above and a vacuum reaction chamber, and the power transmission device is installed on the vacuum reaction chamber and partially located outside the vacuum reaction chamber. BRIEF DESCRIPTION OF DRAWINGS

[0012] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are included to provide a better understanding of the preferred embodiments, and are not intended to be limiting of the application. Moreover, in the drawings, like reference numerals denote same or similar components. In the drawings:

[0013] Figure 1 A cross-sectional view schematically showing a structure of a power transmission apparatus according to an embodiment of the present application installed on a vacuum reaction chamber;

[0014] Figure 2 A first structure of a first gasket in a power transmission apparatus according to an embodiment of the present application is schematically shown;

[0015] Figure 3 A second structure of a first gasket in a power transmission apparatus according to an embodiment of the present application is schematically shown;

[0016] Figure 4 A structure of a second gasket in a power transmission apparatus according to an embodiment of the present application is schematically shown;

[0017] Figure 5 A cross-sectional view schematically showing a shield cover in a power transmission apparatus according to an embodiment of the present application.

[0018] Reference signs are as follows:

[0019] 100: power transmission apparatus

[0020] 10: support body; 11: shaft hole; 12: shield groove

[0021] 20: rotating shaft

[0022] 30: magnetic fluid

[0023] 41: first support washer; 42: second support washer

[0024] 51: atmospheric side bearing; 52: vacuum side bearing

[0025] 60: gasket seal assembly; 61: first gasket; 611: lubricating oil accumulation hole; 62: second gasket

[0026] 70: retainer

[0027] 80: shield cover; 81: through hole

[0028] 900: vacuum reaction chamber DETAILED DESCRIPTION

[0029] Exemplary embodiments of the present disclosure will be described more fully hereinafter with reference to the accompanying drawings. While example embodiments of the present disclosure are shown in the drawings, it is understood that the present disclosure can be embodied in many forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present disclosure to those skilled in the art.

[0030] It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises", "comprising", "includes", "including" and the like are to be construed to be inclusive (i.e., to include both instances of open ended terms and instances of terms limiting to a specific number) unless otherwise indicated as otherwise limited by context. The methods described herein can be implemented as a method, an apparatus, a system, a computer program product, or any combination thereof.

[0031] Although the terms first, second, third, and the like can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can be only used to differentiate one element, component, region, layer or section from another region, layer or section. Terms such as "first", "second", and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.

[0032] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "over," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure is flipped, an element described as "below other elements or features" or "below other elements or features" would subsequently be oriented as "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0033] like Figures 1 to 5 As shown, according to an embodiment of the present invention, a power transmission device 100 is provided. The power transmission device 100 includes a support body 10, a rotating shaft 20, a magnetic fluid 30, a bearing assembly, and a gasket sealing assembly 60. The support body 10 is installed at the opening of the vacuum reaction chamber 900 that communicates with the atmospheric environment, and a shaft hole 11 is provided inside the support body 10. The rotating shaft 20 extends into the vacuum reaction chamber 900 through the shaft hole 11. The magnetic fluid 30 is disposed between the rotating shaft 20 and the inner wall of the shaft hole 11. The bearing assembly is sleeved on the rotating shaft 20, and the bearing assembly includes at least one vacuum-side bearing 52, which is located on the side of the magnetic fluid 30 closer to the vacuum reaction chamber 900. The gasket sealing assembly 60 is fitted and disposed on the side of the vacuum-side bearing 52 facing the vacuum reaction chamber 900.

[0034] The power transmission device 100 proposed in this embodiment is used to provide rotational power to the vacuum reaction chamber 900. By installing the support body 10 at the opening of the vacuum reaction chamber 900, a mounting position is provided for the rotating shaft 20. The magnetic fluid 30 is provided between the rotating shaft 20 and the shaft hole 11 of the support body 10 to achieve the barrier between the atmosphere and the vacuum. The bearing assembly is used to support the rotating shaft 20 and ensure the rotational accuracy of the rotating shaft 20. The vacuum side bearing 52 is also used to further improve the sealing performance. The gasket sealing assembly 60 is fitted and disposed on the side of the vacuum side bearing 52 facing the vacuum reaction chamber 900, thereby avoiding the reaction gas in the vacuum reaction chamber 900 from contaminating the vacuum side bearing 52 and the magnetic fluid 30, and extending the service life of the vacuum side bearing 52 and the magnetic fluid 30.

[0035] like Figure 1As shown, the side wall of the vacuum reaction chamber 900 is provided with an opening, the opening of the vacuum reaction chamber 900 communicates with the outside atmosphere and the inside of the vacuum reaction chamber 900, the power transmission device 100 provided in the embodiment is installed at the opening and can block the opening, and at the same time, provides the rotating power for the components in the vacuum reaction chamber 900 which need to rotate.

[0036] Specifically, the supporting body 10 in the power transmission device 100 cooperates with the opening, when the opening is provided as a circular opening, the supporting body 10 can be provided as a cylindrical shape, and the cylindrical supporting body 10 is in interference fit with the opening, thereby ensuring the reliability of the connection between the power transmission device 100 and the vacuum reaction chamber 900, and at the same time, ensuring the sealing property of the vacuum reaction chamber 900, preventing air leakage; on this basis, further, one end of the supporting body 10 is provided with a flange, the flange abuts against the outer side wall of the vacuum reaction chamber 900, and the end away from the flange extends into the vacuum reaction chamber 900.

[0037] Please continue to refer to Figure 1 , the supporting body 10 has an axial hole 11, the axial hole 11 is used for the rotating shaft 20 to pass through, and provides an installation position for the rotating shaft 20 and the sealing component, specifically, the rotating shaft 20 extends into the vacuum reaction chamber 900 from the atmospheric pressure side through the axial hole 11, one end of the rotating shaft 20 located on the atmospheric pressure side can be connected with a driving device such as a motor, and the side of the rotating shaft 20 located in the vacuum reaction chamber 900 is used to be connected with the component which needs to rotate, and the component which needs to rotate in the vacuum reaction chamber 900 is not limited in the embodiment.

[0038] On the basis of the above-mentioned embodiment, the magnetic fluid 30 is also arranged in the axial hole 11 and located between the rotating shaft 20 and the inner wall of the axial hole 11, as shown in Figure 1 In the axial direction of the axial hole 11, the magnetic fluid 30 can be arranged at the middle position, and it can be understood that the magnetic fluid 30 can fill in the annular space between the rotating shaft 20 and the inner wall of the axial hole 11 under the action of the magnetic field, thereby forming a sealing structure similar to an O-shaped sealing ring, and realizing the sealing effect.

[0039] It should be noted that when the magnetic fluid 30 is used as a sealing structure, the left and right sides of the magnetic fluid 30 are also provided with bearings, in the embodiment, a bearing assembly is sleeved on the rotating shaft 20, and the bearing assembly is also used to support the rotating shaft 20, reduce the friction coefficient of the rotating shaft 20 in the rotating process, and ensure the rotation accuracy of the rotating shaft 20.

[0040] Specifically, the bearing assembly in the embodiment includes at least two bearings, which are distinguished according to whether the bearings are close to the atmospheric pressure environment or close to the vacuum reaction chamber 900 environment. The bearing assembly includes an atmospheric side bearing 51 and a vacuum side bearing 52, which are respectively installed on the two sides of the magnetic fluid 30, thereby ensuring to provide stable support for the rotating shaft 20. The atmospheric side bearing 51 is provided with one, and the vacuum side bearing 52 can be provided with one or more.

[0041] In addition, a supporting washer is further provided between the magnetic fluid 30 and the two bearings, which is used to prevent the magnetic fluid 30 from moving in the axial direction. Specifically, as shown in FIG. 1, a first supporting washer 41 is provided between the magnetic fluid 30 and the atmospheric side bearing 51, and a second supporting washer 42 is provided between the magnetic fluid 30 and the vacuum side bearing 52. Figure 1

[0042] It can be understood that the vacuum side bearing 52 also has the effect of blocking the reaction gas in the vacuum reaction chamber 900 from entering the shaft hole 11, that is, it can reduce or prevent the reaction gas from contacting the magnetic fluid 30, avoid the temperature of the magnetic fluid 30 from rising under the influence of the reaction gas, and avoid the magnetic fluid 30 from being corroded by the reaction gas, thereby prolonging the service life of the magnetic fluid 30.

[0043] In the embodiment, the vacuum side bearing 52 can be provided with one, or two or more. Two or more vacuum side bearings 52 can further improve the blocking effect of the reaction gas and improve the sealing effect. In addition, the vacuum side bearing 52 can be provided with a protective cover to further improve the blocking effect of the reaction gas.

[0044] On the basis of the above-mentioned embodiment, the gasket sealing assembly 60 is attached to the side of the vacuum side bearing 52 facing the vacuum reaction chamber 900 in the embodiment, and the gasket sealing assembly 60 is used to further improve the sealing effect. It should be noted that since the reaction gas in the vacuum reaction chamber 900 is mostly toxic or corrosive, the gasket sealing assembly 60 is also used to prevent the reaction gas in the vacuum reaction chamber 900 from contacting the bearing assembly, thereby achieving the effect of protecting the bearing assembly and prolonging the service life of the bearing assembly.

[0045] For example, in some embodiments of the present application, the number of vacuum side bearings 52 is two, and the gasket sealing assembly 60 is attached to the side of the vacuum side bearing 52 facing the vacuum reaction chamber 900 in the embodiment. It can be understood that when the vacuum side bearing 52 is provided with two, the gasket sealing assembly 60 is attached to the vacuum side bearing 52 close to the vacuum reaction chamber 900.

[0046] ​In some embodiments of the present application, the vacuum side bearing 52 is coated with lubricating oil, for example, high vacuum lubricating oil, and in particular, the high vacuum lubricating oil is coated on the rolling elements of the vacuum side bearing 52. Thus, when the rotating shaft 20 rotates, the high vacuum lubricating oil coated on the vacuum side bearing 52 can form a lubricating film, thereby further blocking the reaction gas from contacting the bearing and even the magnetic fluid 30.

[0047] Further, in some embodiments of the present application, the gasket seal assembly 60 includes a first gasket 61 and a second gasket 62, as shown in Figure 2 and Figure 3 The first gasket 61 is provided with a lubricating oil accumulation hole 611 that can accumulate liquid, and in particular, as shown in Figure 1 The first gasket 61 is attached to the side of the vacuum side bearing 52 facing the vacuum reaction chamber 900. After the vacuum side bearing 52 is coated with lubricating oil, the lubricating oil can enter the lubricating oil accumulation hole 611 to form a lubricating film.

[0048] Based on the above embodiments, during assembly of the power transmission device 100, high vacuum lubricating oil can be coated on the vacuum side bearing 52 first, and then the first gasket 61 can be assembled to one side of the vacuum side bearing 52 and attached thereto. Thus, when the rotating shaft 20 rotates, the lubricating oil on the vacuum side bearing 52 will enter the lubricating oil accumulation hole 611 of the first gasket 61 and quickly form a lubricating film, thereby blocking the reaction gas from contacting the vacuum side bearing 52 and even the magnetic fluid 30 using the lubricating film.

[0049] The shape of the first gasket 61 in this embodiment has various settings, and in particular, as shown in Figure 2 and Figure 3 The first gasket 61 is formed with a plurality of lubricating oil accumulation holes 611, which can be circular or polygonal in shape. The plurality of lubricating oil accumulation holes 611 can be spaced apart from each other and can be in communication with the central hole in the middle of the first gasket 61. Understandably, the plurality of lubricating oil accumulation holes 611 are respectively aligned with the plurality of rolling elements on the vacuum side bearing 52, thereby facilitating the generation of a lubricating film.

[0050] Based on the above embodiments, the second gasket 62 is attached to the side of the first gasket 61 away from the vacuum side bearing 52, as shown in Figure 1 and Figure 4 The second gasket 62 is provided as a flat gasket, which can cover the lubricating oil accumulation holes 611 on the first gasket 61, thereby reducing the possibility of the reaction gas in the vacuum reaction chamber 900 contacting the first gasket 61 and facilitating the generation of a lubricating film between the vacuum side bearing 52 and the first gasket 61.

[0051] Further, in some embodiments of the present application, the diameters of the first gasket 61 and the second gasket 62 are equal to the outer diameter of the vacuum-side bearing 52, as shown in Figure 1 The equal-diameter arrangement makes the outer surfaces of the first gasket 61, the second gasket 62 and the vacuum-side bearing 52 flush, which not only facilitates assembly, but also prevents reaction gas from leaking through the gaps.

[0052] In some embodiments of the present application, the power transmission device 100 further comprises a retainer 70 mounted in the shaft hole 11 for preventing the bearing assembly and the gasket sealing assembly 60 from moving in the axial direction of the shaft hole 11, the retainer 70 being located in the shaft hole 11 close to the vacuum reaction chamber 900 and connected to the inner wall of the shaft hole 11.

[0053] As shown in Figure 1 The outer wall of the retainer 70 is connected to the inner wall of the shaft hole 11, which can be connected by threading, i.e. an inner thread is provided on the shaft hole 11 close to the vacuum reaction chamber 900, and an outer thread is provided on the outer wall of the retainer 70, or can be connected by a clamping tooth, which is not limited in the present embodiment.

[0054] Further, the side of the retainer 70 away from the vacuum reaction chamber 900 abuts against the gasket sealing assembly 60, and based on the above-described embodiment, the retainer 70 abuts against the side of the second gasket 62 away from the first gasket 61, thereby ensuring the stability of the gasket sealing assembly 60 and the vacuum-side bearing 52 in the axial direction of the shaft hole 11.

[0055] In some embodiments of the present application, the power transmission device 100 further comprises a shielding cover 80, as shown in Figure 1 The shielding cover 80 is provided on the end of the support body 10 located in the vacuum reaction chamber 900 and is connected to the support body 10 by clamping, covering the shaft hole 11 of the support body 10 to block the reaction gas in the vacuum reaction chamber 900 from entering the shaft hole 11. The shielding cover 80 is connected to the support body 10, and in the present embodiment, the shielding cover 80 can be provided in the form of a disc, which can be connected to the support body 10 by bolts or screws.

[0056] In an alternative embodiment, the end of the support body 10 located in the vacuum reaction chamber 900 is provided with a shielding groove 12, and the shielding cover 80 is provided with an extension tube that can be inserted into the shielding groove 12 to be connected therewith, and in the present embodiment, the shielding groove 12 is recessed inward from the end of the support body 10. When the reaction gas is blocked by the shielding cover 80 and spreads along the outer surface of the shielding cover 80, the shielding groove 12 can extend the diffusion path of the reaction gas, and by depositing the reaction gas in the shielding groove 12, the amount of reaction gas entering the power transmission device 100 can be reduced.

[0057] Specifically, as shown in Figure 1 , the shielding groove 12 is annularly arranged at the periphery of the shaft hole 11, that is, the shielding groove 12 is arranged as an annular groove, and the axis of the shielding groove 12 coincides with the axis of the shaft hole 11, on this basis, the shielding cover 80 is connected with the shielding groove 12 in a matching manner.

[0058] As shown in Figure 5 , the shielding cover 80 is arranged in a C shape, the shielding cover 80 is buckled on the end portion of the support body 10 located in the vacuum reaction chamber 900, specifically, the extended pipe formed at the end portion of the shielding cover 80 can be inserted into the shielding groove 12 and connected with the shielding groove 12, the connection between the shielding cover 80 and the shielding groove 12 can be clamped, specifically, the extended pipe of the shielding cover 80 can be arranged in a transition fit with the shielding groove 12, or it can also be arranged to be connected by bolts or screws.

[0059] It can be understood that the shielding cover 80 is provided with a through hole 81 through which the rotating shaft 20 passes, as shown in Figure 1 and Figure 5 , the through hole 81 is arranged at the center of the shielding cover 80, and the through hole 81 is coaxially arranged with the shaft hole 11, and the through hole 81 and the rotating shaft 20 can be arranged in a transition fit, so as to avoid the reaction gas entering the shaft hole 11 as much as possible along the matching gap.

[0060] In summary, the power transmission device 100 proposed in the embodiment includes a support body 10, a rotating shaft 20 is arranged in the shaft hole 11 of the support body 10, and one end of the rotating shaft 20 is located in the atmospheric environment and the other end is located in the vacuum reaction chamber 900, the shaft hole 11 is sequentially provided with an atmospheric side bearing 51, a first supporting washer 41, a magnetic fluid 30, a second supporting washer 42, a vacuum side bearing 52, a first gasket 61, a second gasket 62, a retainer 70 and a shielding cover 80 in the direction from the atmospheric environment to the vacuum reaction chamber 900, wherein the vacuum side bearing 52 is coated with high vacuum lubricating oil, so that the reaction gas in the vacuum reaction chamber 900 is blocked by the shielding cover 80, the second gasket 62, the first gasket 61 and the lubricating film formed on the vacuum side bearing 52, so that the power transmission device 100 proposed in the embodiment can reduce or avoid the possibility of the reaction gas entering, and prolong the service life of the bearing assembly and the magnetic fluid 30.

[0061] The embodiment of the second aspect of the application proposes a semiconductor manufacturing equipment, which includes the power transmission device 100 in the above-mentioned embodiments and the vacuum reaction chamber 900, the power transmission device 100 is installed on the vacuum reaction chamber 900, and part of the power transmission device 100 is located in the vacuum reaction chamber 900 and part of the power transmission device 100 is located outside the vacuum reaction chamber 900.

[0062] The semiconductor manufacturing apparatus proposed in this embodiment has the same advantages as the power transmission device 100 proposed in the embodiment of the first aspect, and will not be described here again.

[0063] In the above description, the technical details of patterning, etching, etc. for each layer are not described in detail. However, those skilled in the art should understand that the layers, regions, etc. of the desired shape can be formed by various technical means. In addition, those skilled in the art can also design methods that are not exactly the same as the methods described above in order to form the same structure. In addition, although each embodiment is described above separately, this does not mean that the measures in each embodiment cannot be used advantageously in combination.

[0064] The embodiments of the present disclosure are described above. However, these embodiments are only for illustrative purposes, and are not intended to limit the scope of the present disclosure. The scope of the present disclosure is defined by the appended claims and their equivalents. Those skilled in the art can make various substitutions and modifications without departing from the scope of the present disclosure, and all such substitutions and modifications shall fall within the scope of the present disclosure.

Claims

1. A power transmission device characterized by comprising: The power transmission device comprises: a supporting body installed at an opening of a vacuum reaction chamber communicating with an atmospheric environment, an axle hole being arranged in the supporting body; a rotating axle penetrating into the vacuum reaction chamber through the axle hole; a magnetic fluid arranged between the rotating axle and an inner wall of the axle hole; a bearing assembly sleeved on the rotating axle, the bearing assembly comprising at least one vacuum-side bearing located at a side of the magnetic fluid close to the vacuum reaction chamber; a gasket sealing assembly arranged on a side of the vacuum-side bearing facing the vacuum reaction chamber; the vacuum-side bearing being coated with lubricating oil; the gasket sealing assembly comprising a first gasket and a second gasket, the first gasket being provided with lubricating oil accumulation holes, and the second gasket being a flat gasket, the first gasket being arranged on a side of the vacuum-side bearing facing the vacuum reaction chamber, and the second gasket being arranged on a side of the first gasket away from the vacuum-side bearing; the first gasket having a central hole, the lubricating oil accumulation holes being arranged around the periphery of the central hole and respectively communicating with the central hole; the lubricating oil accumulation holes respectively aligning with a plurality of rolling bodies on the vacuum-side bearing.

2. The power transmission device according to claim 1, characterized by, The number of the vacuum-side bearings is two, and the gasket sealing assembly is arranged on the vacuum-side bearings close to the vacuum reaction chamber.

3. The power transmission device according to claim 1, characterized by, The lubricating oil accumulation holes are circular or polygonal in shape.

4. The power transmission device according to claim 1, characterized by The diameters of the first gasket and the second gasket are equal to the outer diameter of the vacuum-side bearing.

5. The power transmission device according to claim 1, characterized by The power transmission device further comprises a retainer installed in the axle hole and abutting against a side of the gasket sealing assembly away from the vacuum-side bearing.

6. The power transmission device according to claim 1, characterized by The power transmission device further comprises a shielding cover fastened to an end of the supporting body located at the vacuum reaction chamber and covering the axle hole.

7. The power transmission device according to claim 6, characterized by The shielding cover is connected with the supporting body, and is disc-shaped.

8. The power transmission device according to claim 7, characterized by The supporting body is provided with a shielding groove arranged around the periphery of the axle hole, and the shielding cover is provided with an extension tube inserted into the shielding groove.

9. The power transmission device according to claim 7, characterized by The shielding cover is provided with a through hole through which the rotating axle penetrates.

10. A semiconductor manufacturing apparatus, characterized by comprising: The power transmission device of any one of claims 1 to 9 and a vacuum reaction chamber, the power transmission device being installed on the vacuum reaction chamber and partially located outside the vacuum reaction chamber.

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